JP4736375B2 - Method for manufacturing ink jet recording head - Google Patents
Method for manufacturing ink jet recording head Download PDFInfo
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- JP4736375B2 JP4736375B2 JP2004230402A JP2004230402A JP4736375B2 JP 4736375 B2 JP4736375 B2 JP 4736375B2 JP 2004230402 A JP2004230402 A JP 2004230402A JP 2004230402 A JP2004230402 A JP 2004230402A JP 4736375 B2 JP4736375 B2 JP 4736375B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2002/14306—Flow passage between manifold and chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
本発明は、インクジェット記録ヘッドの製造方法に関する。
The present invention relates to a method for manufacturing an ink jet recording head.
複数のノズルを有するピエゾ型インクジェットヘッドにおいては、圧電素子からの加圧によって圧力室で生じたインク圧力波のうち、複数のノズルおよび圧力室をつなぐ共通インク室へ伝播する圧力波が、他のノズルでの吐出へ影響する、いわゆるクロストークを排除するため、圧力室から共通インク室において圧力波を抑制するダンパが必要となる。 In a piezo-type ink jet head having a plurality of nozzles, out of the ink pressure waves generated in the pressure chamber by the pressurization from the piezoelectric element, the pressure waves propagating to the common ink chamber connecting the plurality of nozzles and the pressure chamber In order to eliminate so-called crosstalk that affects ejection at the nozzle, a damper is required to suppress pressure waves from the pressure chamber to the common ink chamber.
例えば図３に示す従来例１のインクジェット記録ヘッド１００のように、圧力室１０６と共通インク室１１２ａが重なるように配置し、共通インク室１１２ａを挟んで、圧力室１０６の反対側にダンパプレート１１１を設け、このダンパプレート１１１の一部を除去することでダンパ室１１１ａを形成し、共通インク室１１２ａとダンパ室１１１ａの間の壁１１２ｂをダンパ膜として用いた。しかし、この構成では、金属からなるマニホールドプレート１１２やダンパプレート１１１の一部を薄く切削加工しなければならないため、生産性が悪く、加工精度が悪いため共通インク室１１２ａやダンパ室１１１ａの壁面の厚さがばらついて吐出性能が不均一になるといった問題があった（例えば、特許文献１参照）。 For example, like the ink jet recording head 100 of Conventional Example 1 shown in FIG. 3, the pressure chamber 106 and the common ink chamber 112a are arranged so as to overlap each other, and the damper plate 111 is placed on the opposite side of the pressure chamber 106 with the common ink chamber 112a interposed therebetween. A damper chamber 111a is formed by removing a part of the damper plate 111, and the wall 112b between the common ink chamber 112a and the damper chamber 111a is used as a damper film. However, in this configuration, since a part of the manifold plate 112 and the damper plate 111 made of metal must be cut thinly, the productivity is low and the processing accuracy is low. There has been a problem that the discharge performance becomes non-uniform due to variations in thickness (see, for example, Patent Document 1).
あるいは図４に示す従来例２のインクジェット記録ヘッド２００のように、共通流路支流２０８と圧力発生室２１２の間に凹部２１３を設け、凹部２１３と共通流路支流２０８の間の壁を樹脂フィルム２０３とすることによって、内部ダンパを形成していた。しかしこの場合、圧力発生室２１２からノズル２１０へのインクの連通路２１５を形成するのとは別に、共通流路支流２０８から圧力発生室２１２へのインク供給孔２１１を樹脂フィルム２０３に形成する必要がある。また、樹脂フィルム２０３と凹部２１３を有するプレート２１６を接合する際に図中上下方向から加圧しているが、接合面の一部（図中凹部２１３の左側部分）へは加圧ができない（上下を圧力発生室２１２と共通流路支流２０８に挟まれているため）ので、該当部分の密着性が悪いという問題も発生する（例えば、特許文献２参照）。 Alternatively, as in the ink jet recording head 200 of Conventional Example 2 shown in FIG. 4, a recess 213 is provided between the common channel branch 208 and the pressure generating chamber 212, and the wall between the recess 213 and the common channel branch 208 is a resin film. By setting to 203, an internal damper was formed. However, in this case, in addition to forming the ink communication path 215 from the pressure generation chamber 212 to the nozzle 210, it is necessary to form the ink supply hole 211 from the common flow path branch 208 to the pressure generation chamber 212 in the resin film 203. There is. Further, when the resin film 203 and the plate 216 having the recess 213 are joined, pressure is applied from above and below in the figure, but pressure cannot be applied to a part of the joining surface (the left part of the recess 213 in the figure). Is sandwiched between the pressure generation chamber 212 and the common flow path tributary 208), there is a problem that the adhesion of the corresponding part is poor (see, for example, Patent Document 2).
本発明はダンパ膜を樹脂によって形成することで加工性、生産性を高め、さらにダンパ膜とプレートの密着性の高いインクジェットヘッドを提供することを目的とする。
本発明は上記事実を考慮し、加工性が良好でダンパ部分の強度に優れたインクジェット記録ヘッドの製造方法を提供することを目的とする。
In consideration of the above facts, an object of the present invention is to provide a method of manufacturing an ink jet recording head having good workability and excellent strength of a damper portion.
請求項１に記載のインクジェット記録ヘッドの製造方法は、インク滴を吐出するノズルと、前記ノズルにインクを供給する圧力室と、前記圧力室内のインクを加圧し圧力波を発生させる加圧手段と、前記圧力室と連通しインクを供給する共通インク室と、前記共通インク室の壁面に設けられ前記圧力波を吸収する制動手段と、を備え、前記制動手段は、前記ノズルが形成されるノズルプレートと前記共通インク室との間に設けられた樹脂フィルムからなるダンパプレートと、前記ノズルプレートと前記ダンパプレートとの間に形成された、外気と連通する空隙からなることを特徴とするインクジェット記録ヘッドの製造方法であって、樹脂からなるダンパプレートと、予め前記ノズル部分に第１の開口部、前記空隙部分に第２の開口部を設けた支持プレートと、前記ノズル部分に第１の開口部を備え耐食性のある金属からなるカバープレートと、を接合し積層体を形成する工程と、前記カバープレートをマスクとして、Ｏ２プラズマによるエッチングで前記ダンパプレート上に前記第１の開口部を通じて前記圧力室から前記ノズルに通じる連通口を設ける工程と、前記積層体と前記ノズルプレートとを接合した後、エキシマレーザによる加工で前記連通口位置に前記積層体と前記ノズルプレートとを貫通する前記ノズルを開口させる工程と、を含むことを特徴とする。 The method of manufacturing an ink jet recording head according to claim 1, wherein a nozzle that discharges ink droplets, a pressure chamber that supplies ink to the nozzle, and a pressurizing unit that pressurizes the ink in the pressure chamber and generates a pressure wave. A common ink chamber that communicates with the pressure chamber and supplies ink; and a braking unit that is provided on a wall surface of the common ink chamber and absorbs the pressure wave. The braking unit is a nozzle on which the nozzle is formed. An ink jet recording comprising: a damper plate made of a resin film provided between a plate and the common ink chamber; and a gap formed between the nozzle plate and the damper plate and communicating with outside air. A method of manufacturing a head, wherein a damper plate made of resin, a first opening in the nozzle portion, and a second opening in the gap portion are provided in advance. A step of bonding a support plate and a cover plate made of a corrosion-resistant metal having a first opening in the nozzle portion, and forming a laminate, and using the cover plate as a mask, etching with O 2 plasma is performed to form the damper. A step of providing a communication port communicating with the nozzle from the pressure chamber through the first opening on the plate; and joining the stacked body and the nozzle plate, and then processing the excimer laser to form the stacked layer at the communication port position. Opening the nozzle penetrating the body and the nozzle plate.
上記構成の発明では、樹脂フィルムでダンパ層を形成したので金属部材の加工を必要とせず、共通インク室から圧力室へのインク供給路をダンパ層に設ける必要もなく、また空隙の両端部は上下の層に挟持されているので加圧・接着の際に密着性に優れる構造のイン クジェット記録ヘッドの製造方法であり、カバープレートはＳＵＳなどの耐食性のある金 属であるため、Ｏ2プラズマによるエッチングに対して耐性があるのでそのままエッチン グの際のマスクとして使用でき、ダンパプレート上の連通口部とダンパ空間である空隙の みをＯ2プラズマによるエッチングで開口させることが可能となり、かつそのままダンパ 空間の壁面を構成する。
In the invention with the above configuration, since the damper layer is formed of a resin film, it is not necessary to process the metal member, it is not necessary to provide an ink supply path from the common ink chamber to the pressure chamber in the damper layer, and both end portions of the gap are because it is sandwiched at the top and bottom of the layer there is provided a process for the preparation of the structure of the in-Kujetto recording head having excellent adhesion during the pressing and bonding, since the cover plate is a metallic with corrosion resistance, such as SUS, by O2 plasma because resistant to etching can be used as it is as a mask for etching grayed, only the gap is communicating mouth and the damper space above the damper plate it is possible to open by etching with O2 plasma, and it is a damper Configure the wall of the space .
また連通口部をレーザなどの加工でなくＯ2プラズマによるエッチングで開口すること により同時に多数の連通口部を一括して開口可能である。連通口部はノズル一個ごとに個 別に設けられているため、ノズルと同じ数だけ存在するので連通口部を一個ずつレーザな どで加工・開口して行く方式に比較して大幅に時間とコストを削減可能であり、生産性を 改善することができる。
In addition, a large number of communication ports can be simultaneously opened by opening the communication ports by etching with O2 plasma instead of processing with a laser or the like. For communicating the mouth portion is number is separately provided for each one nozzle, considerably time than the manner in which the communication mouth going to processing and open at etc. one by one laser because there the same number as the nozzle and cost Can be reduced and productivity can be improved .
すなわち金属製のカバープレートを付加することによって、複数の連通口部を同時に加 工することが可能になり、時間とコストを削減し生産性を上げることができることに加え て、共通インク室などを金属製のカバープレートで覆うことで、インクジェット記録ヘッ ド自体の剛性も高くすることができる。
That by adding a metal cover plate, it is possible to simultaneously pressurized Engineering a plurality of communication mouth, in addition to being able to increase productivity and reduce the time and cost, and the common ink chamber by covering a metallic cover plate, it can be higher rigidity of the inkjet recording heads themselves.
本発明は上記構成としたので、加工性が良好でダンパ部分の強度に優れたインクジェッ ト記録ヘッドの製造方法とすることができた。
Since the present invention is structured as described above, it was possible to workability and a manufacturing method of good Inkjet recording head having excellent strength of the damper portions.
図１には、本発明の第１実施形態に係るインクジェット記録ヘッドの製造方法が示されている。
FIG. 1 shows a method of manufacturing an ink jet recording head according to the first embodiment of the present invention .
まず図２（ａ）に示すように、樹脂からなるダンパプレート１２と金属からなる支持プレート１４およびＳＵＳなどの金属からなるカバープレート１５を接合する。 First, as shown in FIG. 2A, a damper plate 12 made of resin, a support plate 14 made of metal, and a cover plate 15 made of metal such as SUS are joined.
次に図２（ｂ）に示すように、圧力室側からノズル側に通じる連通口部１３を、カバープレート１５をマスクとしてダンパープレート１２上にＯ2プラズマによるエッチングで開口させる。すなわち、黒矢印の方向からＯ2プラズマによるエッチングを行うことで樹脂からなるダンパプレート１２のみがエッチングされ、連通口部１３が開口する。 Next, as shown in FIG. 2B, the communication port portion 13 communicating from the pressure chamber side to the nozzle side is opened on the damper plate 12 by etching with O 2 plasma using the cover plate 15 as a mask. That is, by etching with O 2 plasma from the direction of the black arrow, only the damper plate 12 made of resin is etched, and the communication port 13 is opened.
このとき、カバープレート１５はＳＵＳなどの耐食性のある金属であるため、Ｏ2プラズマによるエッチングに対して耐性があるのでそのままエッチングの際のマスクとして使用でき、ダンパプレート１２上の連通口部１３のみをＯ2プラズマによるエッチングで開口させることが可能となる。 At this time, since the cover plate 15 is a corrosion-resistant metal such as SUS, it is resistant to etching by O 2 plasma, so it can be used as it is as a mask during etching, and only the communication port 13 on the damper plate 12 is used. Can be opened by etching with O 2 plasma.
本実施形態ではこの連通口部１３をレーザなどの加工でなくＯ2プラズマによるエッチングで開口することにより同時に多数の連通口部１３を一括して開口可能である。連通口部１３はノズル１６一個ごとに個別に設けられているためノズル１６と同じ数だけ存在する。そのため本実施形態では連通口部１３を一個ずつレーザなどで加工・開口して行く方式に比較して大幅に時間とコストを削減可能なので、生産性を改善することができる。 In the present embodiment, a large number of communication ports 13 can be simultaneously opened by opening the communication ports 13 by etching with O 2 plasma instead of processing with a laser or the like. Since the communication port portions 13 are individually provided for each nozzle 16, there are as many as the nozzles 16. For this reason, in this embodiment, the time and cost can be greatly reduced as compared with the method of processing and opening the communication ports 13 one by one with a laser or the like, so that productivity can be improved.
次に、図２（ｃ）に示すように、ダンパプレート１２と支持プレート１４、カバープレート１５の積層体とノズルプレート１７を接合した後、エキシマレーザによる加工でノズル１６を開口させる。 Next, as shown in FIG. 2C, after the damper plate 12, the support plate 14, the cover plate 15 and the nozzle plate 17 are joined together, the nozzle 16 is opened by processing with an excimer laser.
その後、図２（ｄ）に示すように、ダンパプレート１２、支持プレート１４、カバープレート１５、ノズルプレート１７の積層体を、プールプレート３２、第１スループレート３０、サプライプレート２８、第２スループレート２６、圧力室プレート２４、振動板２２および圧電素子２０と積層接合することにより、インクジェット記録ヘッド１１が作製される。 Thereafter, as shown in FIG. 2 (d), the laminated body of the damper plate 12, the support plate 14, the cover plate 15, and the nozzle plate 17 is formed into a pool plate 32, a first through plate 30, a supply plate 28, and a second through plate. 26, the ink jet recording head 11 is manufactured by laminating and bonding the pressure chamber plate 24, the vibration plate 22, and the piezoelectric element 20.
本実施形態では、金属製のカバープレート１５を付加することによって、複数の連通口部１３を同時に加工することが可能になり、時間とコストを削減し生産性を上げることができることに加えて、共通インク室３４などを金属製のカバープレート１５で覆うことで、インクジェット記録ヘッド１１自体の剛性も高くすることができる。 In the present embodiment, by adding a metal cover plate 15, it becomes possible to process a plurality of communication ports 13 at the same time, in addition to being able to reduce time and cost and increase productivity, By covering the common ink chamber 34 and the like with the metal cover plate 15, the rigidity of the inkjet recording head 11 itself can be increased.
１０ インクジェット記録ヘッド
１１ インクジェット記録ヘッド
１２ ダンパプレート
１４ 支持プレート
１５ カバープレート
１６ ノズル
１８ ダンパ部
１８ａ ダンパ空間
３４ 共通インク室
DESCRIPTION OF SYMBOLS 10 Inkjet recording head 11 Inkjet recording head 12 Damper plate 14 Support plate 15 Cover plate 16 Nozzle 18 Damper part 18a Damper space 34 Common ink chamber
Claims (1)
前記ノズルにインクを供給する圧力室と、
前記圧力室内のインクを加圧し圧力波を発生させる加圧手段と、
前記圧力室と連通しインクを供給する共通インク室と、
前記共通インク室の壁面に設けられ前記圧力波を吸収する制動手段と、
を備え、
前記制動手段は、前記ノズルが形成されるノズルプレートと前記共通インク室との間に設けられた樹脂フィルムからなるダンパプレートと、前記ノズルプレートと前記ダンパプレートとの間に形成された、外気と連通する空隙からなることを特徴とするインクジェット記録ヘッドの製造方法であって、
樹脂からなるダンパプレートと、予め前記ノズル部分に第１の開口部、前記空隙部分に第２の開口部を設けた支持プレートと、前記ノズル部分に第１の開口部を備え耐食性のある金属からなるカバープレートと、を接合し積層体を形成する工程と、
前記カバープレートをマスクとして、Ｏ２プラズマによるエッチングで前記ダンパプレート上に前記第１の開口部を通じて前記圧力室から前記ノズルに通じる連通口を設ける工程と、
前記積層体と前記ノズルプレートとを接合した後、エキシマレーザによる加工で前記連通口位置に前記積層体と前記ノズルプレートとを貫通する前記ノズルを開口させる工程と、を含むことを特徴とするインクジェット記録ヘッドの製造方法。 Nozzles that eject ink drops;
A pressure chamber for supplying ink to the nozzle;
Pressurizing means for pressurizing the ink in the pressure chamber to generate a pressure wave;
A common ink chamber that communicates with the pressure chamber and supplies ink;
Braking means provided on the wall surface of the common ink chamber for absorbing the pressure wave;
With
The braking means includes a damper plate made of a resin film provided between the nozzle plate in which the nozzle is formed and the common ink chamber, and outside air formed between the nozzle plate and the damper plate. A method of manufacturing an ink jet recording head, characterized by comprising communicating voids,
A damper plate made of resin, a support plate provided with a first opening in the nozzle portion and a second opening in the gap portion in advance, and a corrosion-resistant metal provided with the first opening in the nozzle portion. Joining the cover plate, and forming a laminate,
Using the cover plate as a mask, providing a communication port that leads from the pressure chamber to the nozzle through the first opening on the damper plate by etching with O2 plasma;
And a step of opening the nozzle penetrating the laminate and the nozzle plate at the communication port position by excimer laser processing after joining the laminate and the nozzle plate. A manufacturing method of a recording head.
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| JP2004230402A JP4736375B2 (en) | 2004-08-06 | 2004-08-06 | Method for manufacturing ink jet recording head |
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| JP2004230402A JP4736375B2 (en) | 2004-08-06 | 2004-08-06 | Method for manufacturing ink jet recording head |
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| JP2006044133A JP2006044133A (en) | 2006-02-16 |
| JP4736375B2 true JP4736375B2 (en) | 2011-07-27 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8197048B2 (en) * | 2006-04-26 | 2012-06-12 | Ricoh Company, Ltd. | Image forming apparatus |
| JP4645631B2 (en) * | 2006-08-18 | 2011-03-09 | セイコーエプソン株式会社 | Droplet discharge head, droplet discharge device, method for manufacturing droplet discharge head, and method for manufacturing droplet discharge device |
| JP2009126012A (en) * | 2007-11-21 | 2009-06-11 | Brother Ind Ltd | Method for manufacturing droplet discharge head |
| JP2013103392A (en) * | 2011-11-14 | 2013-05-30 | Seiko Epson Corp | Liquid ejecting apparatus |
| JP6004158B2 (en) * | 2012-03-06 | 2016-10-05 | セイコーエプソン株式会社 | Liquid ejector |
| JP6753080B2 (en) * | 2016-03-08 | 2020-09-09 | 株式会社リコー | Liquid discharge head, liquid discharge unit, device that discharges liquid |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02266947A (en) * | 1989-04-07 | 1990-10-31 | Ricoh Co Ltd | Nozzle plate for ink jet recorder |
| JPH0431059A (en) * | 1990-05-29 | 1992-02-03 | Seiko Epson Corp | Manufacture of ink jet head |
| JP2001277524A (en) * | 1999-11-11 | 2001-10-09 | Seiko Epson Corp | Ink-jet recording head and manufacturing method |
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2004
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02266947A (en) * | 1989-04-07 | 1990-10-31 | Ricoh Co Ltd | Nozzle plate for ink jet recorder |
| JPH0431059A (en) * | 1990-05-29 | 1992-02-03 | Seiko Epson Corp | Manufacture of ink jet head |
| JP2001277524A (en) * | 1999-11-11 | 2001-10-09 | Seiko Epson Corp | Ink-jet recording head and manufacturing method |
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| JP2006044133A (en) | 2006-02-16 |
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