JP6980877B2

JP6980877B2 - Vibration actuator

Info

Publication number: JP6980877B2
Application number: JP2020158579A
Authority: JP
Inventors: 義一岡崎; 孝史飛鳥川; 雄介千葉; 元後藤; 晃原; 憲山上; 起史笹沼
Original assignee: Foster Electric Co Ltd
Current assignee: Foster Electric Co Ltd
Priority date: 2017-12-25
Filing date: 2020-09-23
Publication date: 2021-12-15
Anticipated expiration: 2037-12-25
Also published as: JP2020199506A

Description

本発明は、振動アクチュエータに関し、更に詳しくは、可動子が重い振動アクチュエータに関する。 The present invention relates to a vibration actuator, and more particularly to a vibration actuator having a heavy mover.

可動磁石型や可動コイル型の可動子を有した振動アクチュエータでは、往復運動をする可動子を支持するのに複数の板ばねが用いられている。
また、振動力を大きくするために、可動子に錘を付加する場合がある。この場合、可動子の質量が重く、板ばねだけでは、可動子を支持できない場合がある。特に、可動子が水平方向に振動する場合、板ばねで支持される可動子が下がり、ケースと接触し、異音が発生したり、ケースや可動子が破損したりする。 In a vibration actuator having a movable magnet type or movable coil type mover, a plurality of leaf springs are used to support the mover that reciprocates.
Further, in order to increase the vibration force, a weight may be added to the movable element. In this case, the mass of the mover is heavy, and the leaf spring alone may not be able to support the mover. In particular, when the mover vibrates in the horizontal direction, the mover supported by the leaf spring is lowered and comes into contact with the case, causing abnormal noise or damage to the case or mover.

このような場合、可動子に振動軸線に沿った方向に延出する軸を設け、この軸を軸受けで支持する場合もある（例えば、特許文献１参照） In such a case, the mover may be provided with a shaft extending in a direction along the vibration axis, and this shaft may be supported by a bearing (see, for example, Patent Document 1).

特許第４５６７４０９号公報Japanese Patent No. 4567409

しかし、上述した軸受けを用いた振動アクチュエータにおいて、以下のような問題点がある。
(1) 可動子が振動すると、軸受けと軸との摺動音（異音）が発生する。
(2) 軸受けの構造が必要となり、構造が複雑で、コストもかかる。 However, the vibration actuator using the bearing described above has the following problems.
(1) When the mover vibrates, a sliding noise (abnormal noise) is generated between the bearing and the shaft.
(2) A bearing structure is required, the structure is complicated, and the cost is high.

本発明は、上記問題点に鑑みてなされたもので、その課題は、異音が発生しにくく、構造が簡単で、低コストの振動アクチュエータを提供することにある。 The present invention has been made in view of the above problems, and an object thereof is to provide a vibration actuator which is less likely to generate abnormal noise, has a simple structure, and is low in cost.

課題を解決する請求項１に係る発明の振動アクチュエータは、円筒状のケースと、前記ケースの開口側を塞ぐように取り付けられたダンパカバーと、該ケースに設けられたコイルと、該コイルにより前記ケースの振動軸線に沿って振動する可動子と、内周部が前記可動子に取り付けられ、外周部が前記ケースに取り付けられたダンパと、を有し、前記ケースの開口部の端面と前記ダンパカバーの周縁部の端面との間で前記ダンパの外周部が挟持されていることを特徴とする。 The vibration actuator of the invention according to claim 1 for solving the problem is described by a cylindrical case, a damper cover attached so as to close the opening side of the case, a coil provided in the case, and the coil. It has a mover that vibrates along the vibration axis of the case, and a damper whose inner peripheral portion is attached to the mover and whose outer peripheral portion is attached to the case. The outer peripheral portion of the damper is sandwiched between the peripheral end surface of the peripheral portion of the cover.

本発明の他の特徴は、以下に述べる発明を実施するための形態並びに添付の図面から一層明らかになるであろう。 Other features of the invention will become more apparent from the embodiments and accompanying drawings for carrying out the invention described below.

第１及び第２板ばねを、渦巻き状の腕部の渦巻き方向が同一となるように配置して用いる場合、板ばねの支持部は、板厚方向の変位につれて、その平面内で回転しようとする。このため、可動子は、振動軸線方向の変位に応じて回転する。
本発明の振動アクチュエータによれば、前記第１及び第２板ばねの渦巻き状の腕部の渦巻き方向が逆になるように、前記第１及び第２板ばねは配置されることにより、可動子は双方の板ばねから逆方向のトルクを受けることになるために、振動軸線方向に変位しても回転しない。 When the first and second leaf springs are arranged and used so that the spiral directions of the spiral arms are the same, the support portion of the leaf spring tries to rotate in the plane with the displacement in the plate thickness direction. do. Therefore, the mover rotates according to the displacement in the vibration axis direction.
According to the vibration actuator of the present invention, the first and second leaf springs are arranged so that the spiral directions of the spiral arms of the first and second leaf springs are opposite to each other. Will receive torque in opposite directions from both leaf springs, so it will not rotate even if it is displaced in the vibration axis direction.

次に、前記第１及び第２板ばねの複数の腕部は、力が負荷されると局所的に応力が増大する応力集中部を有し、前記各腕部の応力集中部は、前記振動軸線と直交する複数の直線上に位置している。一方、各腕部の応力集中部と隣接する部分は、発生する応力が応力集中部に比べて小さな低応力部となり、この低応力部は、応力集中部が位置する同一直線とは別の振動軸線と直交する複数の直線上に位置している。よって、可動子は、振動軸線と直交する複数の直線上に位置する低応力部により支持され、可動子が振動軸線方向に変位しても、振動軸線に対して傾かない。 Next, the plurality of arms of the first and second leaf springs have a stress concentration portion in which the stress locally increases when a force is applied, and the stress concentration portion of each arm portion is the vibration. It is located on multiple straight lines orthogonal to the axis. On the other hand, the part adjacent to the stress concentration part of each arm becomes a low stress part where the generated stress is smaller than the stress concentration part, and this low stress part vibrates differently from the same straight line where the stress concentration part is located. It is located on multiple straight lines orthogonal to the axis. Therefore, the mover is supported by low stress portions located on a plurality of straight lines orthogonal to the vibration axis, and even if the mover is displaced in the vibration axis direction, it does not tilt with respect to the vibration axis.

よって、可動子が振動軸線方向に変位しても、回転せず、振動軸線に対して傾かないので、異音が発生しにくく、構造が簡単で、低コストの振動アクチュエータを実現できる。
本発明の他の効果は、以下に述べる発明を実施するための形態並びに添付の図面から一層明らかになるであろう。 Therefore, even if the mover is displaced in the vibration axis direction, it does not rotate and does not tilt with respect to the vibration axis, so that abnormal noise is less likely to occur, the structure is simple, and a low-cost vibration actuator can be realized.
Other effects of the invention will become even more apparent from the embodiments and accompanying drawings for carrying out the invention described below.

本発明の振動アクチュエータの実施形態を説明する分解斜視図である。It is an exploded perspective view explaining the embodiment of the vibration actuator of this invention. 図１を組み付けた際の平面図である。It is a top view when FIG. 1 is assembled. 図２の正面図である。It is a front view of FIG. 図２の背面図である。It is a rear view of FIG. 図２の下面図である。It is a bottom view of FIG. 図３の左側面図である。It is a left side view of FIG. 図２の切断線VII−VIIにおける断面図である。It is sectional drawing in the cutting line VII-VII of FIG. ケースに分割ヨークを取り付ける方法を説明する図である。It is a figure explaining the method of attaching a split yoke to a case. 分割ヨークが取り付けられたケースにコイルを取り付ける方法を説明する図である。It is a figure explaining the method of attaching a coil to the case to which a split yoke is attached. 分割ヨークとコイルとが取り付けられたケースを説明する図である。It is a figure explaining the case in which the split yoke and the coil are attached. 図１の第１ダンパの平面図である。It is a top view of the 1st damper of FIG. 第１ダンパのみに荷重を加えた際、各部に発生する応力の分布を示す平面図である。It is a top view which shows the distribution of the stress generated in each part when a load is applied only to the 1st damper. 第１ダンパのみに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。It is a perspective view which shows the distribution of the stress generated in each part and the displacement of each part when a load is applied only to the 1st damper. 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が同じになるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布を示す平面図である。It is a top view which shows the distribution of the stress generated in each part when the load is applied to the 1st and 2nd dampers arranged so that the spiral direction of the spiral arm part of the 1st and 2nd dampers is the same. .. 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が同じになるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。The distribution of stress generated in each part and the displacement of each part are shown when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are the same. It is a perspective view. 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が逆になるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布を示す平面図である。It is a top view which shows the distribution of the stress generated in each part when the load is applied to the 1st and 2nd dampers arranged so that the spiral direction of the spiral arm part of the 1st and 2nd dampers is reversed. .. 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が逆になるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。The distribution of stress generated in each part and the displacement of each part are shown when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are opposite to each other. It is a perspective view. 図１に示す振動アクチュエータの作動を説明する図である。It is a figure explaining the operation of the vibration actuator shown in FIG. 他の実施形態の振動アクチュエータの作動を説明する図である。It is a figure explaining the operation of the vibration actuator of another embodiment.

図を用いて実施形態を説明する。図１は本発明の振動アクチュエータの実施形態を説明する分解斜視図、図２は図１を組み付けた際の平面図、図３は図２の正面図、図４は図２の背面図、図５は図２の下面図、図６は図３の左側面図、図７は図２の切断線VII−VIIにおける断面図、図８はケースに分割ヨークを取り付ける方法を説明する図、図９は分割ヨークが取り付けられたケースにコイルを取り付ける方法を説明する図、図１０は分割ヨークとコイルとが取り付けられたケースを説明する図、図１８は図１に示す振動アクチュエータの作動を説明する図、図１９は他の実施形態の振動アクチュエータの作動を説明する図である。尚、図３の右側面は、図６の左側面と同一である。
（全体構成）
図１−図７を用いて振動アクチュエータの全体構成を説明する。 An embodiment will be described with reference to the drawings. 1 is an exploded perspective view illustrating an embodiment of the vibration actuator of the present invention, FIG. 2 is a plan view when FIG. 1 is assembled, FIG. 3 is a front view of FIG. 2, and FIG. 4 is a rear view of FIG. 2. 5 is a bottom view of FIG. 2, FIG. 6 is a left side view of FIG. 3, FIG. 7 is a sectional view taken along line VII-VII of FIG. 2, FIG. 8 is a view illustrating a method of attaching a split yoke to the case, and FIG. 8 is a diagram illustrating a method of attaching a coil to a case to which a split yoke is attached, FIG. 10 is a diagram illustrating a case in which the split yoke and the coil are attached, and FIG. 18 is a diagram illustrating the operation of the vibration actuator shown in FIG. FIG. 19 is a diagram illustrating the operation of the vibration actuator of another embodiment. The right side surface of FIG. 3 is the same as the left side surface of FIG.
(overall structure)
The overall configuration of the vibration actuator will be described with reference to FIGS. 1 to 7.

両端に開口を有する円筒状でABS等の樹脂でなるケース１の内部には円筒状の軟磁性材料でなるヨーク１１が設けられている。ヨーク１１の内周面には、ヨーク１１と電気的に絶縁された状態でコイル２１が取り付けられている。
ケース１の一方の開口側の端面には、ABS等の樹脂でなる円筒状の第１カバーケース３１が配置される。ケース１の他方の開口側の端面には、ABS等の樹脂でなる円筒状の第２カバーケース４１が配置されている。 A yoke 11 made of a cylindrical soft magnetic material is provided inside the case 1 which is cylindrical and has openings at both ends and is made of a resin such as ABS. A coil 21 is attached to the inner peripheral surface of the yoke 11 in a state of being electrically insulated from the yoke 11.
A cylindrical first cover case 31 made of a resin such as ABS is arranged on one end surface of the case 1 on the opening side. A cylindrical second cover case 41 made of a resin such as ABS is arranged on the other end surface of the case 1 on the opening side.

第１カバーケース３１のケース１と反対側の開口側の端面には、ステンレスの薄板を加工してなり、ケース１の振動軸線Ｏに沿って可撓可能な板ばねである第１ダンパ５１が配置されている。第２カバーケース４１のケース１と反対側の開口側の端面には、ステンレスの薄板を加工してなり、ケース１の振動軸線Ｏに沿って可撓可能な板ばねである第２ダンパ６１が配置されている。 A first damper 51, which is a leaf spring that is made by processing a thin stainless steel plate and is flexible along the vibration axis O of the case 1, is formed on the end surface of the first cover case 31 on the opening side opposite to the case 1. Have been placed. A second damper 61, which is a leaf spring that is made by processing a thin stainless steel plate and is flexible along the vibration axis O of the case 1, is formed on the end surface of the second cover case 41 on the opening side opposite to the case 1. Have been placed.

第１カバーケース３１と協働して第１ダンパ５１を挟むように第１ダンパカバー７１が配置されている。第２カバーケース４１と協働して第２ダンパ６１を挟むように第２ダンパカバー８１が配置されている。
第１ダンパカバー７１の縁部に沿って１２０°ピッチで３つの貫通した穴７１ａが形成されている。第１カバーケース３１には、第１ダンパカバー７１の穴７１ａに対向する３つの貫通した穴３１ａが形成されている。ケース１の一方の開口側の端面には、第１カバーケース３１の３つの穴３１ａに対向する３つのめねじ穴１ａが形成されている。 The first damper cover 71 is arranged so as to sandwich the first damper 51 in cooperation with the first cover case 31. The second damper cover 81 is arranged so as to sandwich the second damper 61 in cooperation with the second cover case 41.
Three through holes 71a are formed along the edge of the first damper cover 71 at a pitch of 120 °. The first cover case 31 is formed with three through holes 31a facing the holes 71a of the first damper cover 71. Three female screw holes 1a facing the three holes 31a of the first cover case 31 are formed on the end surface on one opening side of the case 1.

そして、第１ダンパカバー７１の穴７１ａ、第１カバーケース３１の穴３１ａを挿通し、ケース１のめねじ穴１ａに螺合する３本のねじ９１により、第１ダンパ５１の周縁部が第１ダンパカバー７１と第１カバーケース３１とに挟持された状態で、第１ダンパカバー７１、第１ダンパ５１、第１カバーケース３１は、ケース１の一方の開口側に取り付けられている。即ち、第１ダンパ５１は、ケース１の内面に取り付けられている。 Then, the peripheral portion of the first damper 51 is brought into the first position by the three screws 91 which are inserted through the hole 71a of the first damper cover 71 and the hole 31a of the first cover case 31 and screwed into the female screw hole 1a of the case 1. The first damper cover 71, the first damper 51, and the first cover case 31 are attached to one opening side of the case 1 in a state of being sandwiched between the first damper cover 71 and the first cover case 31. That is, the first damper 51 is attached to the inner surface of the case 1.

第２ダンパカバー８１の縁部に沿って１２０°ピッチで３つの貫通した穴８１ａが形成されている。第２カバーケース４１には、第２ダンパカバー８１の穴８１ａに対向する３つの貫通した穴４１ａが形成されている。ケース１の他方の開口側の端面には、第２カバーケース４１の３つの穴４１ａに対向する３つのめねじ穴（図示せず）が形成されている。 Three through holes 81a are formed along the edge of the second damper cover 81 at a pitch of 120 °. The second cover case 41 is formed with three through holes 41a facing the holes 81a of the second damper cover 81. Three female screw holes (not shown) facing the three holes 41a of the second cover case 41 are formed on the other end surface of the case 1 on the opening side.

そして、第２ダンパカバー８１の穴８１ａ、第２カバーケース４１の穴４１ａを挿通し、ケース１の他方の開口側の端面に形成されためねじ穴に螺合する３本のねじ１０１により、第２ダンパ６１は、第２ダンパカバー８１と第２カバーケース４１とに挟持された状態で、第２ダンパカバー８１、第２ダンパ６１、第２カバーケース４１は、ケース１の他方の開口側に取り付けられている。即ち、第２ダンパ６１は、ケース１の内面に取り付けられている。 Then, the hole 81a of the second damper cover 81 and the hole 41a of the second cover case 41 are inserted, and the three screws 101 formed on the other end surface of the case 1 on the opening side and screwed into the screw holes are used for the second. The 2 damper 61 is sandwiched between the 2nd damper cover 81 and the 2nd cover case 41, and the 2nd damper cover 81, the 2nd damper 61, and the 2nd cover case 41 are on the other opening side of the case 1. It is attached. That is, the second damper 61 is attached to the inner surface of the case 1.

第１ダンパ５１と第２ダンパ６１との間には、コイル２１に包囲され、振動軸線Ｏに沿って振動する可動子１１１が配置される。可動子１１１は、円板状のマグネット１１３と、マグネット１１３を挟むように配置された円板状の第１ポールピース１１５、第２ポールピース１１７と、マグネット１１３、第１ポールピース１１５、第２ポールピース１１７を挟むように配置される第１マス（錘）１１９、第２マス（錘）１２１からなっている。 Between the first damper 51 and the second damper 61, a mover 111 surrounded by a coil 21 and vibrating along the vibration axis O is arranged. The mover 111 includes a disk-shaped magnet 113, a disk-shaped first pole piece 115 and a second pole piece 117 arranged so as to sandwich the magnet 113, and a magnet 113, a first pole piece 115, and a second. It is composed of a first mass (weight) 119 and a second mass (weight) 121 arranged so as to sandwich the pole piece 117.

マグネット１１３は着磁方向が振動軸線Ｏ方向である。第１ポールピース１１５、第２ポールピース１１７は、難磁性材料でなり、マグネット１１３の磁気吸着力及び接着剤等により、マグネット１１３に取り付けられている。第１マス１１９、第２マス１２１は、非磁性体でなり、接着剤等により、第１ポールピース１１５、第２ポールピース１１７に取り付けられている。このため、可動子１１１を構成するマグネット１１３、第１ポールピース１１５、第２ポールピース１１７、第１マス１１９、第２マス１２１は一体化されている。 The magnetizing direction of the magnet 113 is the vibration axis O direction. The first pole piece 115 and the second pole piece 117 are made of a non-magnetic material, and are attached to the magnet 113 by the magnetic attraction force of the magnet 113, an adhesive, or the like. The first mass 119 and the second mass 121 are made of a non-magnetic material, and are attached to the first pole piece 115 and the second pole piece 117 by an adhesive or the like. Therefore, the magnet 113, the first pole piece 115, the second pole piece 117, the first square 119, and the second square 121 constituting the mover 111 are integrated.

第１マス１１９、第２マス１２１には、中心軸に沿って貫通した穴１１９ａ、貫通した穴１２１ａが形成されている。また、第１ダンパ５１の中心には、第１マス１１９の穴１１９ａに対向し、貫通した穴５１ａが形成されている。同様に、第２ダンパ６１の中心には、第２マス１２１の穴１２１ａに対向し、貫通した穴６１ａが形成されている。 A hole 119a penetrating along the central axis and a hole 121a penetrating are formed in the first mass 119 and the second mass 121. Further, at the center of the first damper 51, a hole 51a facing the hole 119a of the first mass 119 and penetrating the hole 51a is formed. Similarly, at the center of the second damper 61, a hole 61a facing and penetrating the hole 121a of the second mass 121 is formed.

そして、ピン１３１が第１ダンパ５１の穴５１ａを挿通し、第１マス１１９の穴１１９ａに圧入され、ピン１４１が第２ダンパ６１の穴６１ａを挿通し、第２マス１２１の穴１２１ａに圧入されることにより、可動子１１１はケース１の振動軸線Ｏに沿って振動可能に支持されている。
前記可動子が取り付けられる支持部、ケースの内面に取り付けられる円環部、前記支持部と前記円環部とを接続する複数の渦巻き状の腕部とからなる第１板ばね、ケース１の周面には、リード線が接続され、コイル２１に電流を供給するターミナル３が形成されている。
（ケース１、ヨーク１１、コイル２１）
図８−図１０を用いて説明する
本実施形態のヨーク１１は、円筒を異なる母線に沿って切断された短冊状の複数（本実施形態では３つ）の分割ヨーク１３で構成されている。 Then, the pin 131 inserts the hole 51a of the first damper 51 and is press-fitted into the hole 119a of the first mass 119, and the pin 141 inserts the hole 61a of the second damper 61 and press-fits into the hole 121a of the second mass 121. By doing so, the mover 111 is oscillatedly supported along the vibration axis O of the case 1.
A first leaf spring composed of a support portion to which the mover is attached, an annular portion attached to the inner surface of the case, and a plurality of spiral arm portions connecting the support portion and the annular portion, and the circumference of the case 1. A lead wire is connected to the surface, and a terminal 3 for supplying a current to the coil 21 is formed.
(Case 1, yoke 11, coil 21)
The yoke 11 of the present embodiment, which will be described with reference to FIGS. 8-10, is composed of a plurality of strip-shaped (three in this embodiment) split yokes 13 in which a cylinder is cut along different generatrix lines.

また、本実施形態のコイル２１は、振動軸線Ｏに沿って配置され、第１コイル２３、第２コイル２５からなっている。第１コイル２３、第２コイル２５は、ヨーク１１の内周面に沿って巻回されている。
ケース１の内周面には、振動軸線Ｏ方向に突出し、振動軸線Ｏ方向に延びるリブ５が等ピッチ間隔で３か所形成されている。 Further, the coil 21 of the present embodiment is arranged along the vibration axis O and includes a first coil 23 and a second coil 25. The first coil 23 and the second coil 25 are wound along the inner peripheral surface of the yoke 11.
On the inner peripheral surface of the case 1, three ribs 5 protruding in the vibration axis O direction and extending in the vibration axis O direction are formed at equal pitch intervals.

各リブ５の振動軸線Ｏ方向の２つの端面には、分割ヨーク１３の母線に沿った端面が当接する分割ヨーク当接面５ａが形成されている。本実施形態では、リブ５は樹脂でなっているので、弾性を有している。よって、分割ヨーク１３の母線に沿った２つの端面が当接する。 The two end faces of each rib 5 in the vibration axis O direction are formed with a split yoke contact surface 5a to which the end faces along the generatrix of the split yoke 13 abut. In the present embodiment, since the rib 5 is made of resin, it has elasticity. Therefore, the two end faces along the generatrix of the split yoke 13 come into contact with each other.

分割ヨーク１３の母線に沿った端面が、リブ５の分割ヨーク当接面５ａに当接することで、分割ヨーク１３のケース１の周方向の位置決めが成される。
また、各リブ５の可動子１１１のマグネット１１３と対向する面５ｂには可動子１１１方向に突出する突起７が形成されている。突起７のケース１の一方の開口側には、第１コイル２３の開口側の端部が当接する第１コイル当接面７ａが形成されている。突起７のケース１の他方の開口側には、第２コイル２５の開口側の端部が当接する第２コイル当接面７ｂが形成されている。 The end surface of the split yoke 13 along the generatrix abuts on the split yoke contact surface 5a of the rib 5, so that the case 1 of the split yoke 13 is positioned in the circumferential direction.
Further, a protrusion 7 projecting in the direction of the mover 111 is formed on the surface 5b of each rib 5 facing the magnet 113 of the mover 111. On one opening side of the case 1 of the protrusion 7, a first coil contact surface 7a with which the end of the first coil 23 on the opening side abuts is formed. On the other opening side of the case 1 of the protrusion 7, a second coil contact surface 7b with which the end of the second coil 25 on the opening side abuts is formed.

第１コイル２３の開口側の端部が、リブ５の突起７の第１コイル当接面７ａに当接し、第１コイル２３のケース１の振動軸線Ｏ方向の位置決めがなされた状態で、接着剤等を用いて第１コイル２３のヨーク１１への取り付けがなされる。第２コイル２５の開口側の端部が、リブ５の突起７の第２コイル当接面７ｂに当接し、第２コイル２５のケース１の振動軸線Ｏ方向の位置決めがなされた状態で、接着剤等を用いて第２コイル２５のヨーク１１への取り付けがなされる。
（第１ダンパ５１、第２ダンパ６１）
図１１を用いて、本実施形態の第１ダンパ５１、第２ダンパ６１について、更に詳しく説明する。尚、第１ダンパ５１と第２ダンパ６１とは同一形状で、取り付け方が異なるだけであるので、ここでは第１ダンパ５１で説明を行い、第２ダンパ６１の説明は省略する。そして、第２ダンパ６１の第１ダンパ５１と同一部分には、第１ダンパ５１の各部分の符号に１０加えた符号で説明を行う。例えば、第１ダンパ５１の第１腕部が符号５３である場合、第２ダンパ６１の第１腕部の符号は６３である。 The end of the first coil 23 on the opening side abuts on the first coil contact surface 7a of the protrusion 7 of the rib 5, and is bonded in a state where the case 1 of the first coil 23 is positioned in the vibration axis O direction. The first coil 23 is attached to the yoke 11 using an agent or the like. The end of the second coil 25 on the opening side abuts on the second coil contact surface 7b of the protrusion 7 of the rib 5, and is bonded in a state where the case 1 of the second coil 25 is positioned in the vibration axis O direction. The second coil 25 is attached to the yoke 11 using an agent or the like.
(1st damper 51, 2nd damper 61)
The first damper 51 and the second damper 61 of the present embodiment will be described in more detail with reference to FIG. 11. Since the first damper 51 and the second damper 61 have the same shape and differ only in the mounting method, the first damper 51 will be described here, and the description of the second damper 61 will be omitted. Then, the same portion as the first damper 51 of the second damper 61 will be described with a reference numeral obtained by adding 10 to the reference numeral of each portion of the first damper 51. For example, when the first arm portion of the first damper 51 has a reference numeral 53, the reference numeral of the first arm portion of the second damper 61 is 63.

第１ダンパ５１の中央部には、穴５１ａを挿通するピン１３１を用いて可動子１１１に取り付けられる支持部５１ｂが形成されている。
第１ダンパカバー７１と第１カバーケース３１とに挟持され、ケース１の内面に取り付けられる第１ダンパ５１の円環部５１ｃには、ねじ９１との干渉を防ぐために、３つの切り欠き５１ｄが形成されている。 At the central portion of the first damper 51, a support portion 51b attached to the mover 111 by using a pin 131 through which the hole 51a is inserted is formed.
The annular portion 51c of the first damper 51, which is sandwiched between the first damper cover 71 and the first cover case 31 and attached to the inner surface of the case 1, has three notches 51d in order to prevent interference with the screw 91. It is formed.

そして、支持部５１ｂと円環部５１ｃとは、３つの同一形状の渦巻き状の第１腕部５３、第２腕部５５、第３腕部５７で接続されている。第１腕部５３、第２腕部５５、第３腕部５７は振動軸線Oの回りに１２０°ピッチで設けられている。
第１腕部５３は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５３ａ、第２応力集中部５３ｂ、第３応力集中部５３ｃを有している。同様に、第２腕部５５は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５５ａ、第２応力集中部５５ｂ、第３応力集中部５５ｃを有し、第３腕部５７は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５７ａ、第２応力集中部５７ｂ、第３応力集中部５７ｃを有している。 The support portion 51b and the annular portion 51c are connected by three spiral first arm portions 53, a second arm portion 55, and a third arm portion 57 having the same shape. The first arm portion 53, the second arm portion 55, and the third arm portion 57 are provided around the vibration axis O at a pitch of 120 °.
The first arm portion 53 has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first arm portion 53, the first stress concentration portion 53a, the second stress concentration portion 53b, and the third stress concentration portion 53c. have. Similarly, the second arm portion 55 has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first stress concentration portion 55a, the second stress concentration portion 55b, and the third stress. The third arm portion 57 has a concentrated portion 55c and has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first stress concentrated portion 57a and the second stress concentrated portion 57b. , Has a third stress concentration portion 57c.

そして、第１腕部５３の第１応力集中部５３ａと、第３腕部５７の第２応力集中部５７ｂと、第２腕部５５の第３応力集中部５５ｃとは、振動軸線Ｏと直交する第１直線Ｌ１上に位置している。また、第２腕部５５の第１応力集中部５５ａと、第１腕部５３の第２応力集中部５３ｂと、第３腕部５７の第３応力集中部５７ｃとは、振動軸線Ｏと直交する第２直線Ｌ２上に位置している。更に、第３腕部５７の第１応力集中部５７ａと、第２腕部５５の第２応力集中部５５ｂと、第１腕部５５の第３応力集中部５３ｃとは、振動軸線Ｏと直交する第３直線Ｌ３上に位置している。尚、第１直線Ｌ１、第２直線Ｌ２、第３直線Ｌ３は、振動軸線Oの回りに１２０°ピッチで位置している。 The first stress concentration portion 53a of the first arm portion 53, the second stress concentration portion 57b of the third arm portion 57, and the third stress concentration portion 55c of the second arm portion 55 are orthogonal to the vibration axis O. It is located on the first straight line L1. Further, the first stress concentration portion 55a of the second arm portion 55, the second stress concentration portion 53b of the first arm portion 53, and the third stress concentration portion 57c of the third arm portion 57 are orthogonal to the vibration axis O. It is located on the second straight line L2. Further, the first stress concentration portion 57a of the third arm portion 57, the second stress concentration portion 55b of the second arm portion 55, and the third stress concentration portion 53c of the first arm portion 55 are orthogonal to the vibration axis O. It is located on the third straight line L3. The first straight line L1, the second straight line L2, and the third straight line L3 are located around the vibration axis O at a pitch of 120 °.

この構成は、第２ダンパ６１も有している。
そして、図１に示すように、第１ダンパ５１の第１腕部５３、第２腕部５５、第３腕部５７の渦巻き方向と、第２ダンパ６１の第１腕部６３、第２腕部６５、第３腕部６７の渦巻き方向とが、逆になるように第１ダンパ５１と第２ダンパ６１とは配置されている。 This configuration also has a second damper 61.
Then, as shown in FIG. 1, the spiral direction of the first arm portion 53, the second arm portion 55, and the third arm portion 57 of the first damper 51, and the first arm portion 63 and the second arm of the second damper 61. The first damper 51 and the second damper 61 are arranged so that the spiral directions of the portion 65 and the third arm portion 67 are opposite to each other.

（作動）
図１８を用いて、本実施形態の振動アクチュエータの作動を説明する。
第１コイル２３、第２コイル２５に通電していない状態では、第１ダンパ５１、第２ダンパ６１で支持される可動子１１１は、コイル２１の中央に位置している。 (Operation)
The operation of the vibration actuator of the present embodiment will be described with reference to FIG.
When the first coil 23 and the second coil 25 are not energized, the mover 111 supported by the first damper 51 and the second damper 61 is located at the center of the coil 21.

第１コイル２３、第２コイル２５には、交互に逆極性の磁界を発生する向きに交流を通電させる。即ち、第１コイル２３、第２コイル２５の隣り合う部分に同極が発生するようになっている。
図１８の極性では、可動子１１１には下方（矢印A方向）への推力が発生し、第１コイル２３、第２コイル２５へ流す電流を反転させれば、可動子１１１には上方向（矢印Ｂ方向）への推力が発生する。 The first coil 23 and the second coil 25 are alternately energized with alternating current in a direction in which a magnetic field of opposite polarity is generated. That is, the same pole is generated in the adjacent portions of the first coil 23 and the second coil 25.
In the polarity of FIG. 18, a thrust is generated downward (in the direction of arrow A) on the mover 111, and if the currents flowing through the first coil 23 and the second coil 25 are reversed, the mover 111 is moved upward (in the direction of arrow A). Thrust in the direction of arrow B) is generated.

このように、第１コイル２３、第２コイル２５に交流を通電させれば、可動子１１１はケース１、第１ダンパ５１、第２ダンパ６１よる付勢力を両側から受けながら、振動軸線Ｏに沿って振動する。
ところで、可動子１１１に発生する推力は、基本的にはフレミングの左手の法則に基づいて与えられる推力に準じられる。本実施形態では、第１コイル２３、第２コイル２５が固定されているので、可動子１１１に第１コイル２３、第２コイル２５に発生する力の反力としての推力が発生する。 In this way, when alternating current is applied to the first coil 23 and the second coil 25, the mover 111 is placed on the vibration axis O while receiving the urging force of the case 1, the first damper 51, and the second damper 61 from both sides. Vibrate along.
By the way, the thrust generated in the mover 111 is basically based on the thrust given based on Fleming's left-hand rule. In the present embodiment, since the first coil 23 and the second coil 25 are fixed, a thrust as a reaction force of the force generated in the first coil 23 and the second coil 25 is generated in the mover 111.

よって、推力に寄与するのは、可動子１１１のマグネット１１３の磁束の水平成分（マグネット１１３の軸方向に直交する成分）である。そして、ヨーク１１はマグネット１１３の磁束の水平成分を増大するものである。
上記構成によれば、以下のような効果が得られる。 Therefore, it is the horizontal component of the magnetic flux of the magnet 113 of the mover 111 (the component orthogonal to the axial direction of the magnet 113) that contributes to the thrust. The yoke 11 increases the horizontal component of the magnetic flux of the magnet 113.
According to the above configuration, the following effects can be obtained.

(1) 第１ダンパ５１の第１腕部５３、第２腕部５５、第３腕部５７の渦巻き方向と、第２ダンパ６１の第１腕部６３、第２腕部６５、第３腕部６７の渦巻き方向とが、同一となるように配置して用いる場合、第１ダンパ５１の支持部５１ｂ、第２ダンパ６１の支持部６１ｂは、板厚方向の変位につれて、その平面内で回転しようとする。このため、可動子１１は、振動軸線Ｏ方向の変位に応じて回転する。 (1) The swirling direction of the first arm 53, the second arm 55, and the third arm 57 of the first damper 51, and the first arm 63, the second arm 65, and the third arm of the second damper 61. When the portions 67 are arranged and used so as to be in the same spiral direction, the support portion 51b of the first damper 51 and the support portion 61b of the second damper 61 rotate in the plane as they are displaced in the plate thickness direction. try to. Therefore, the mover 11 rotates according to the displacement in the vibration axis O direction.

本実施形態では、第１ダンパ５１の第１腕部５３、第２腕部５５、第３腕部５７の渦巻き方向と、第２ダンパ６１の第１腕部６３、第２腕部６５、第３腕部６７の渦巻く方向とが、逆になるように第１ダンパ５１と第２ダンパ６１とは配置されているので、可動子１１１は第１ダンパ５１、第２ダンパ６１から逆方向のトルクを受けることになるために、振動軸線Ｏ方向に変位しても回転しない。 In the present embodiment, the spiral direction of the first arm portion 53, the second arm portion 55, and the third arm portion 57 of the first damper 51, and the first arm portion 63, the second arm portion 65, and the second arm portion of the second damper 61 are the first. Since the first damper 51 and the second damper 61 are arranged so that the swirling direction of the three arm portions 67 is opposite to each other, the mover 111 has a torque in the opposite direction from the first damper 51 and the second damper 61. Therefore, it does not rotate even if it is displaced in the O direction of the vibration axis.

また、第１腕部５３は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５３ａ、第２応力集中部５３ｂ、第３応力集中部５３ｃを有している。同様に、第２腕部５５は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５５ａ、第２応力集中部５５ｂ、第３応力集中部５５ｃを有し、第３腕部５７は、他の部分に比べて曲率が大きく、力が負荷されると局所的に応力が増大する第１応力集中部５７ａ、第２応力集中部５７ｂ、第３応力集中部５７ｃを有している。 Further, the first arm portion 53 has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first arm portion 53, the first stress concentration portion 53a, the second stress concentration portion 53b, and the third stress concentration. It has a portion 53c. Similarly, the second arm portion 55 has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first stress concentration portion 55a, the second stress concentration portion 55b, and the third stress. The third arm portion 57 has a concentrated portion 55c and has a larger curvature than the other portions, and the stress is locally increased when a force is applied to the first stress concentrated portion 57a and the second stress concentrated portion 57b. , Has a third stress concentration portion 57c.

そして、第１腕部５３の第１応力集中部５３ａと、第３腕部５７の第２応力集中部５７ｂと、第２腕部５５の第３応力集中部５５ｃとは、振動軸線Ｏと直交する第１直線Ｌ１上に位置している。また、第２腕部５５の第１応力集中部５５ａと、第１腕部５３の第２応力集中部５３ｂと、第３腕部５７の第３応力集中部５７ｃとは、振動軸線Ｏと直交する第２直線Ｌ２上に位置している。更に、第３腕部５７の第１応力集中部５７ａと、第２腕部５５の第２応力集中部５５ｂと、第１腕部５５の第３応力集中部５３ｃとは、振動軸線Ｏと直交する第３直線Ｌ３上に位置している。 The first stress concentration portion 53a of the first arm portion 53, the second stress concentration portion 57b of the third arm portion 57, and the third stress concentration portion 55c of the second arm portion 55 are orthogonal to the vibration axis O. It is located on the first straight line L1. Further, the first stress concentration portion 55a of the second arm portion 55, the second stress concentration portion 53b of the first arm portion 53, and the third stress concentration portion 57c of the third arm portion 57 are orthogonal to the vibration axis O. It is located on the second straight line L2. Further, the first stress concentration portion 57a of the third arm portion 57, the second stress concentration portion 55b of the second arm portion 55, and the third stress concentration portion 53c of the first arm portion 55 are orthogonal to the vibration axis O. It is located on the third straight line L3.

一方、各腕部の応力集中部と隣接する部分は、発生する応力が応力集中部に比べて小さな低応力部となり、この低応力部は、応力集中部が位置する同一直線Ｌ１、Ｌ２、Ｌ３とは別の振動軸線Ｏと直交し、振動軸線Ｏの回りに１２０°ピッチで位置する複数の直線Ｌ４、Ｌ５、Ｌ６上に位置している（図１１の破線で示す直線Ｌ４、Ｌ５、Ｌ６参照）。よって、可動子１１１は、振動軸線Ｏと直交する直線Ｌ４、Ｌ５、Ｌ６上に位置する低応力部により支持され、可動子１１１が振動軸線Ｏ方向に変位しても、振動軸線Ｏに対して傾かない。 On the other hand, the part adjacent to the stress concentration part of each arm part becomes a low stress part where the generated stress is smaller than the stress concentration part, and this low stress part is the same straight line L1, L2, L3 where the stress concentration part is located. It is orthogonal to another vibration axis O and is located on a plurality of straight lines L4, L5, L6 located at a pitch of 120 ° around the vibration axis O (straight lines L4, L5, L6 shown by the broken line in FIG. 11). reference). Therefore, the mover 111 is supported by the low stress portions located on the straight lines L4, L5, and L6 orthogonal to the vibration axis O, and even if the mover 111 is displaced in the vibration axis O direction, the mover 111 is with respect to the vibration axis O. Do not tilt.

よって、可動子１１１が振動軸線Ｏ方向に変位しても、可動子１１１は回転せず、振動軸線Ｏに対して傾かないので、異音が発生しにくく、構造が簡単で、低コストの振動アクチュエータを実現できる。
尚、本発明は上記実施形態に限定するものではない。 Therefore, even if the actuator 111 is displaced in the vibration axis O direction, the actuator 111 does not rotate and does not tilt with respect to the vibration axis O, so that abnormal noise is less likely to occur, the structure is simple, and low-cost vibration is performed. An actuator can be realized.
The present invention is not limited to the above embodiment.

上記実施形態では、応力集中部を腕部の曲率を他の部分より大きくすることで形成したが、曲率に限定するものではない。例えば、腕部に孔や切り欠きを設けても応力集中部を形成できる。
また、上記実施形態では、各腕に３つの応力集中部を形成したが、３つにするものではなく、複数、即ち２または４つ以上であってもよい。 In the above embodiment, the stress concentration portion is formed by making the curvature of the arm portion larger than that of the other portions, but the stress concentration portion is not limited to the curvature. For example, a stress concentration portion can be formed even if a hole or a notch is provided in the arm portion.
Further, in the above embodiment, three stress concentration portions are formed on each arm, but the number is not three, and may be a plurality, that is, two or four or more.

更に、上記実施形態では、コイル２１は第１コイル２３、第２コイル２５の２つからなった例で説明をしたが、図１９に示すように、１つのコイル２２１でもよい。この場合、可動子３１１のマグネットはラジアル方向に着磁されている。 Further, in the above embodiment, the coil 21 has been described with the example of two coils 23 and 25, but as shown in FIG. 19, one coil 221 may be used. In this case, the magnet of the mover 311 is magnetized in the radial direction.

出願人は、本願発明の効果を確認するために、第１ダンパ５１、第２ダンパ６１に荷重を加えたときの変位、応力を有限要素法を用いて解析を行った。
尚、第１ダンパ５１、第２ダンパ６１を材質SUS304、厚さは0.3mm、重さ100gとし、シェル要素で解析を行った。 In order to confirm the effect of the present invention, the applicant analyzed the displacement and stress when a load was applied to the first damper 51 and the second damper 61 by using the finite element method.
The first damper 51 and the second damper 61 were made of SUS304, had a thickness of 0.3 mm, and weighed 100 g, and were analyzed using shell elements.

(1) 第１ダンパ５１のみに荷重を加えた際の解析
2.1Nの荷重を第１ダンパ５１の支持部５１ｂ加えた場合、最大変位が1.981mm、最大応力が318MPaであった。
解析結果を図１２、図１３に示す。図１２は第１ダンパのみに荷重を加えた際、各部に発生する応力の分布を示す平面図、図１３は第１ダンパのみに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。 (1) Analysis when a load is applied only to the first damper 51
When a load of 2.1N was applied to the support portion 51b of the first damper 51, the maximum displacement was 1.981 mm and the maximum stress was 318 MPa.
The analysis results are shown in FIGS. 12 and 13. FIG. 12 is a plan view showing the distribution of stress generated in each part when a load is applied only to the first damper, and FIG. 13 shows the distribution of stress generated in each part and each part when a load is applied only to the first damper. It is a perspective view which shows the displacement.

尚、応力分布は、黒の濃度が高い箇所ほど、応力が高いことを示している。また、メッシュが切られていない部分は、初期の状態（無荷重状態）を示している。
図１２に示すように、第１ダンパ５１の第１腕部５３の第２応力集中部５３ｂ、第３応力集中部５３ｃ、第２腕部５５の第２応力集中部５５ｂ、第３応力集中部５５ｃ、第３腕部５７の第２応力集中部５７ｂ、第３応力集中部５７ｃは、濃い色で、高い応力が発生していることが分かる。一方、各腕部の応力集中部と隣接する部分は、色が薄く、発生する応力が応力集中部に比べて小さな低応力部となっていることが分かる。 The stress distribution indicates that the higher the density of black, the higher the stress. Further, the portion where the mesh is not cut indicates the initial state (no load state).
As shown in FIG. 12, the second stress concentration portion 53b and the third stress concentration portion 53b of the first arm portion 53 of the first damper 51, the second stress concentration portion 55b of the second arm portion 55, and the third stress concentration portion. 55c, the second stress concentration portion 57b of the third arm portion 57, and the third stress concentration portion 57c are dark colors, and it can be seen that high stress is generated. On the other hand, it can be seen that the portion adjacent to the stress concentration portion of each arm portion is light in color and the generated stress is a low stress portion smaller than that of the stress concentration portion.

また、図１３に示すように、支持部５１ｂの変位が一番大きいことがわかる。
更に、図１２、図１３に示すように、荷重が加えられると、第１ダンパ５１の支持部５１ｂ、第１腕部５３、第２腕部５５、第３腕部５７は、固定された円環部５１ｃに対して無荷重状態から変位していることが分かる。 Further, as shown in FIG. 13, it can be seen that the displacement of the support portion 51b is the largest.
Further, as shown in FIGS. 12 and 13, when a load is applied, the support portion 51b of the first damper 51, the first arm portion 53, the second arm portion 55, and the third arm portion 57 are fixed circles. It can be seen that the ring portion 51c is displaced from the no-load state.

(2) 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が同じになるように配置された第１及び第２ダンパに荷重を加えた際の解析
解析結果を図１４，図１５を用いて説明する。図１４は、第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が同じになるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布を示す平面図、図１５は第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が同じになるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。 (2) Analysis when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are the same. The analysis results are shown in FIGS. 14 and 15. It will be explained using. FIG. 14 shows the distribution of stress generated in each part when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are the same. The plan view and FIG. 15 show the distribution of stress generated in each part when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are the same. It is a perspective view which shows the displacement of each part.

尚、応力分布は、黒の濃度が高い箇所ほど、応力が高いことを示している。また、メッシュが切られていない部分は、初期の状態（無荷重状態）を示している。
本解析では、第１ダンパ５１、第２ダンパ６１を垂直線に沿って配置し、水平線に沿って位置する可動子１１１の質量を100g、重力を1Gと設定し、4.4Nの荷重を第１ダンパ５１の支持部５１ｂ加えた。すると、第１ダンパ５１、第２ダンパ６１の最大変位が1.988mm、最大応力が329MPaであった。 The stress distribution indicates that the higher the density of black, the higher the stress. Further, the portion where the mesh is not cut indicates the initial state (no load state).
In this analysis, the first damper 51 and the second damper 61 are arranged along the vertical line, the mass of the mover 111 located along the horizontal line is set to 100 g, the gravity is set to 1 G, and the load of 4.4 N is set to the first. The support portion 51b of the damper 51 was added. Then, the maximum displacement of the first damper 51 and the second damper 61 was 1.988 mm, and the maximum stress was 329 MPa.

図１４に示すように、第１ダンパ５１の第１腕部５３の第２応力集中部５３ｂ、第３応力集中部５３ｃ、第２腕部５５の第２応力集中部５５ｂ、第３応力集中部５５ｃ、第３腕部５７の第２応力集中部５７ｂ、第３応力集中部５７ｃは、濃い色で、高い応力が発生していることが分かる。同様に、第２ダンパ６１の第１腕部６３の第２応力集中部６３ｂ、第３応力集中部６３ｃ、第２腕部６５の第２応力集中部６５ｂ、第３応力集中部６５ｃ、第３腕部６７の第２応力集中部６７ｂ、第３応力集中部６７ｃは、濃い色で、高い応力が発生していることが分かる。一方、各腕部の応力集中部と隣接する部分は、色が薄く、発生する応力が応力集中部に比べて小さな低応力部となっていることが分かる。 As shown in FIG. 14, the second stress concentration portion 53b and the third stress concentration portion 53b of the first arm portion 53 of the first damper 51, the second stress concentration portion 55b of the second arm portion 55, and the third stress concentration portion. 55c, the second stress concentration portion 57b of the third arm portion 57, and the third stress concentration portion 57c are dark colors, and it can be seen that high stress is generated. Similarly, the second stress concentration portion 63b and the third stress concentration portion 63c of the first arm portion 63 of the second damper 61, the second stress concentration portion 65b of the second arm portion 65, the third stress concentration portion 65c, and the third. The second stress concentration portion 67b and the third stress concentration portion 67c of the arm portion 67 are dark in color, and it can be seen that high stress is generated. On the other hand, it can be seen that the portion adjacent to the stress concentration portion of each arm portion is light in color and the generated stress is a low stress portion smaller than that of the stress concentration portion.

また、図１５に示すように、支持部５１ｂ、支持部６１ｂの変位が一番大きいことがわかる。
更に、図１４に示すように、無荷重時の第１腕部５３、第２腕部５５、第３腕部５７の側部と、荷重時の第１腕部５３、第２腕部５５、第３腕部５７の側部との間には、平行な部分がない隙間Ｓ１が発生している。この隙間Ｓ１は、第１ダンパ５１に荷重を加えると、各腕部の低応力部が支持部５１ｂ（中心）に向かって移動することにより発生する。その際、支持部５１ｂ、第１腕部５３、第２腕部５５、第３腕部５７が、固定された円環部５１ｃに対して、回転しているので、平行な部分がない隙間Ｓ１となる。 Further, as shown in FIG. 15, it can be seen that the displacements of the support portion 51b and the support portion 61b are the largest.
Further, as shown in FIG. 14, the side portions of the first arm portion 53, the second arm portion 55, and the third arm portion 57 under no load, and the first arm portion 53 and the second arm portion 55 under load. A gap S1 having no parallel portion is generated between the third arm portion 57 and the side portion. This gap S1 is generated by the low stress portion of each arm moving toward the support portion 51b (center) when a load is applied to the first damper 51. At that time, since the support portion 51b, the first arm portion 53, the second arm portion 55, and the third arm portion 57 are rotated with respect to the fixed annular portion 51c, there is no parallel portion in the gap S1. Will be.

即ち、第１ダンパ５１に荷重を加えると、支持部５１ｂ、第１腕部５３、第２腕部５５、第３腕部５７は、固定された円環部５１ｃに対して、回転していることが分かる。
同様に、第２ダンパ６１の支持部６１ｂ、第１腕部６３、第２腕部６５、第３腕部６７も、固定された円環部６１ｃに対して無荷重状態から回転していることが分かる。 That is, when a load is applied to the first damper 51, the support portion 51b, the first arm portion 53, the second arm portion 55, and the third arm portion 57 rotate with respect to the fixed annular portion 51c. You can see that.
Similarly, the support portion 61b, the first arm portion 63, the second arm portion 65, and the third arm portion 67 of the second damper 61 are also rotated from the no-load state with respect to the fixed annular portion 61c. I understand.

(３) 第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が逆になるように配置された第１及び第２ダンパに荷重を加えた際の解析（実施形態に相当する）
解析結果を図１６，図１７を用いて説明する。図１６は第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が逆になるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布を示す平面図、図１７は第１及び第２ダンパの渦巻き状の腕部の渦巻き方向が逆になるように配置された第１及び第２ダンパに荷重を加えた際、各部に発生する応力の分布と各部の変位を示す斜視図である。 (3) Analysis when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are opposite to each other (corresponding to the embodiment).
The analysis results will be described with reference to FIGS. 16 and 17. FIG. 16 is a plane showing the distribution of stress generated in each part when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are opposite to each other. FIGS. and 17 show the distribution of stress generated in each part when a load is applied to the first and second dampers arranged so that the spiral directions of the spiral arms of the first and second dampers are opposite to each other. It is a perspective view which shows the displacement of each part.

尚、応力分布は、黒の濃度が高い箇所ほど、応力が高いことを示している。また、メッシュが切られていない部分は、初期の状態（無荷重状態）を示している。
本解析では、第１ダンパ５１、第２ダンパ６１を垂直線に沿って配置し、水平線に沿って位置する可動子１１１の質量を100g、重力を1Gと設定し、4.7Nの荷重を第１ダンパ５１の支持部５１ｂ加えた。すると、第１ダンパ５１、第２ダンパ６１の最大変位が1.985mm、最大応力が444MPaであった。 The stress distribution indicates that the higher the density of black, the higher the stress. Further, the portion where the mesh is not cut indicates the initial state (no load state).
In this analysis, the first damper 51 and the second damper 61 are arranged along the vertical line, the mass of the mover 111 located along the horizontal line is set to 100 g, the gravity is set to 1 G, and the load of 4.7 N is set to the first. The support portion 51b of the damper 51 was added. Then, the maximum displacement of the first damper 51 and the second damper 61 was 1.985 mm, and the maximum stress was 444 MPa.

図１６に示すように、第１ダンパ５１の第１腕部５３の第２応力集中部５３ｂ、第３応力集中部５３ｃ、第２腕部５５の第２応力集中部５５ｂ、第３応力集中部５５ｃ、第３腕部５７の第２応力集中部５７ｂ、第３応力集中部５７ｃは、濃い色で、高い応力が発生していることが分かる。同様に、第２ダンパ６１の第１腕部６３の第２応力集中部６３ｂ、第３応力集中部６３ｃ、第２腕部６５の第２応力集中部６５ｂ、第３応力集中部６５ｃ、第３腕部６７の第２応力集中部６７ｂ、第３応力集中部６７ｃは、濃い色で、高い応力が発生していることが分かる。一方、各腕部の応力集中部と隣接する部分は、色が薄く、発生する応力が応力集中部に比べて小さな低応力部となっていることが分かる。 As shown in FIG. 16, the second stress concentration portion 53b and the third stress concentration portion 53b of the first arm portion 53 of the first damper 51, the second stress concentration portion 55b of the second arm portion 55, and the third stress concentration portion. 55c, the second stress concentration portion 57b of the third arm portion 57, and the third stress concentration portion 57c are dark colors, and it can be seen that high stress is generated. Similarly, the second stress concentration portion 63b and the third stress concentration portion 63c of the first arm portion 63 of the second damper 61, the second stress concentration portion 65b of the second arm portion 65, the third stress concentration portion 65c, and the third. The second stress concentration portion 67b and the third stress concentration portion 67c of the arm portion 67 are dark in color, and it can be seen that high stress is generated. On the other hand, it can be seen that the portion adjacent to the stress concentration portion of each arm portion is light in color and the generated stress is a low stress portion smaller than that of the stress concentration portion.

また、図１７に示すように、支持部５１ｂ、支持部６１ｂ変位が一番大きいことがわかる。
更に、図１６に示すように、無荷重時の第１腕部５３、第２腕部５５、第３腕部５７の側部と、荷重時の第１腕部５３、第２腕部５５、第３腕部５７の側部との間には、中間部に略平行な部分を有する隙間Ｓ２が発生している。この隙間Ｓ２は、第１ダンパ５１に荷重を加えると、各腕部の低応力部が支持部５１ｂ（中心）に向かって移動することにより発生する。その際、支持部５１ｂ、第１腕部５３、第２腕部５５、第３腕部５７が、固定された円環部５１ｃに対して、回転しないので、中間部に略平行な部分を有する隙間Ｓ２となる。 Further, as shown in FIG. 17, it can be seen that the displacements of the support portion 51b and the support portion 61b are the largest.
Further, as shown in FIG. 16, the side portions of the first arm portion 53, the second arm portion 55, and the third arm portion 57 under no load, and the first arm portion 53 and the second arm portion 55 under load. A gap S2 having a portion substantially parallel to the intermediate portion is generated between the third arm portion 57 and the side portion. This gap S2 is generated when a load is applied to the first damper 51, and the low stress portion of each arm portion moves toward the support portion 51b (center). At that time, since the support portion 51b, the first arm portion 53, the second arm portion 55, and the third arm portion 57 do not rotate with respect to the fixed annular portion 51c, the support portion 51b has a portion substantially parallel to the intermediate portion. It becomes a gap S2.

即ち、第１ダンパ５１に荷重を加えると、支持部５１ｂ、第１腕部５３、第２腕部５５、第３腕部５７は、固定された円環部５１ｃに対して、回転しないことが分かる。
同様に、第２ダンパ６１の支持部６１ｂ、第１腕部６３、第２腕部６５、第３腕部６７も、固定された円環部６１ｃに対して無荷重状態から回転しないことが分かる。 That is, when a load is applied to the first damper 51, the support portion 51b, the first arm portion 53, the second arm portion 55, and the third arm portion 57 may not rotate with respect to the fixed annular portion 51c. I understand.
Similarly, it can be seen that the support portion 61b, the first arm portion 63, the second arm portion 65, and the third arm portion 67 of the second damper 61 also do not rotate with respect to the fixed annular portion 61c from the no-load state. ..

１ケース
１１ヨーク
１３分割ヨーク
２１コイル
５１第１ダンパ（板ばね）
５３、６３第１腕部
５５、６５第２腕部
５７、６７第３腕部
６１第２ダンパ（板ばね）
１１１可動子
１１３マグネット 1 Case 11 York 13 Divided yoke 21 Coil 51 1st damper (leaf spring)
53, 63 1st arm 55, 65 2nd arm 57, 67 3rd arm 61 2nd damper (leaf spring)
111 Movable 113 Magnet

Claims

With a cylindrical case,
A damper cover attached so as to close the opening side of the case,
The coil provided in the case and
A mover that vibrates along the vibration axis of the case by the coil, and
A damper whose inner peripheral portion is attached to the movable element and whose outer peripheral portion is attached to the case,
On the end surface of the opening of the case, a convex portion protruding in the vibration axis O direction along the outer peripheral edge of the damper, and a convex portion.
Have,
A vibration actuator characterized in that the outer peripheral portion of the damper is sandwiched between the end surface of the opening portion of the case and the end surface of the peripheral edge portion of the damper cover.

The vibration actuator according to claim 1, wherein the convex portion is provided along the outer peripheral edge of the damper cover.

The vibration actuator according to claim 1 or 2, wherein the end face of the convex portion is provided so as to face the end face of the damper cover, and a gap is provided between the end faces of both.

The case is composed of a cylindrical case body and a tubular cover case provided on an end surface on the opening side thereof.
The convex portion is provided on the outer periphery of the opening of the cover case.
The vibration according to any one of claims 1 to 3, wherein the outer peripheral portion of the damper is sandwiched between the end surface of the opening portion of the cover case and the end surface of the peripheral edge portion of the damper cover. Actuator.

The damper cover includes a bottom portion that closes the opening of the case, and a peripheral wall portion provided at the peripheral edge portion of the bottom portion toward the end face side of the opening portion of the case.
The vibration actuator according to any one of claims 1 to 4, wherein the outer peripheral portion of the damper is sandwiched between the end surface of the peripheral wall portion and the end surface of the opening of the case.

The damper is from a leaf spring provided with an annular support to which the mover is attached, an annulus attached to the case, and a plurality of spiral arms connecting the support to the annulus. Configured,
The vibration actuator according to any one of claims 1 to 5, wherein the annular portion is sandwiched between an end surface of an opening portion of the case and an end surface of a peripheral edge portion of the damper cover. ..

The damper cover is provided with a through hole, and the case is provided with a female screw hole.
The damper cover and the damper are opened in the case while the outer peripheral portion of the damper is sandwiched between the damper cover and the case by a screw inserted through the through hole and screwed into the female screw hole. The vibration actuator according to any one of claims 1 to 6, wherein the vibration actuator is mounted on the side.

A notch formed toward the center side of the damper is provided at a position corresponding to the through hole of the damper cover on the outer peripheral edge of the annular portion, and the screw penetrates the notch portion. The vibration actuator according to claim 7.

The vibration actuator according to any one of claims 1 to 8, wherein the mover includes a magnet, a pole piece, and a weight.

The vibration actuator according to any one of claims 1 to 9, wherein the case body is composed of a member separate from the case body and has a protrusion for positioning the coil.