JP6977640B2 - Processing equipment and processing method - Google Patents

Description

The present invention relates to a processing apparatus and a processing method for processing a workpiece.

Conventionally, as a processing device and a processing method for processing a workpiece (work), as described in, for example, Japanese Patent Application Laid-Open No. 2003-62752, a processing tool is provided along a trajectory programmed based on a target shape. Devices and processing methods for moving and processing are known. In this processing device and processing method, the processing load is averaged by moving the laser measuring instrument together with the tool to detect the unevenness of the surface of the workpiece, and moving the tool quickly in the concave portion of the surface and slowly in the convex portion. It is processed like this.

Japanese Unexamined Patent Publication No. 2003-62752

However, with the above-mentioned processing apparatus and processing method, it is difficult to accurately smooth out steep irregularities. That is, in the above-mentioned processing apparatus and processing method, the processing tool moves along a preset trajectory, so if the surface of the workpiece has steep irregularities such as steps, only such irregularities are scraped. It is not possible to smooth the surface shape of the work piece.

Therefore, it is desired to develop a processing apparatus and a processing method capable of accurately processing the surface of the workpiece.

The processing device according to one aspect of the present disclosure is a processing device in which a processing tool is attached to a spindle and the processing tool is moved along the surface of the work piece to process the surface of the work piece. It was detected by a detector that moves with the tool and detects the unevenness of the surface processed by the machining tool, a detector that detects the degree of change in the unevenness of the surface of the workpiece based on the detection information of the detector, and a detector. A setting unit that sets the force that presses the machining tool against the surface of the workpiece according to the degree of change, and a machining control unit that presses the machining tool against the surface of the workpiece by the force set by the setting unit. The setting unit sets the force of pressing the machining tool against the surface of the workpiece as the degree of change detected by the detection unit increases. According to this processing apparatus, the surface processing is performed by pressing the processing tool against the surface of the workpiece according to the degree of change in the unevenness of the surface of the workpiece. Therefore, it is possible to process only the uneven portion of the surface shape of the workpiece. Therefore, it is possible to accurately remove the unevenness of the surface shape of the workpiece. In addition, according to this processing device, the greater the degree of change in the unevenness of the surface of the workpiece, the stronger the processing tool presses against the surface of the workpiece to perform machining, so that steep irregularities can be largely scraped. , The surface of the work piece can be smoothed accurately.

The processing method according to one aspect of the present disclosure is a processing method in which a processing tool is attached to a spindle and the processing tool is moved along the surface of the work piece to process the surface of the work piece. A detection process in which the detector is moved together with the tool to detect the unevenness of the surface processed by the machining tool, and a detection process in which the degree of change in the surface unevenness of the workpiece is detected based on the detection information of the detector. , A setting process that sets the force to press the machining tool against the surface of the workpiece according to the degree of change detected in the detection process, and a machining tool that is pressed against the surface of the workpiece by the force set by the setting process. In the setting process, the greater the degree of change detected in the detection step, the greater the force with which the machining tool is pressed against the surface of the workpiece. According to this processing method, the surface processing is performed by pressing the processing tool against the surface of the workpiece according to the degree of change in the unevenness of the surface of the workpiece. Therefore, it is possible to process only the uneven portion of the surface shape of the workpiece. Therefore, it is possible to accurately remove the unevenness of the surface shape of the workpiece. Further , according to this processing method, the greater the degree of change in the unevenness of the surface of the workpiece, the stronger the processing tool presses against the surface of the workpiece to perform machining, so that steep irregularities can be largely scraped. , The surface of the work piece can be smoothed accurately.

According to the present disclosure, the surface processing of the workpiece can be accurately performed.

It is a schematic diagram which shows the structure of the processing apparatus which concerns on embodiment of this disclosure. It is a flowchart which shows the operation of the processing apparatus of FIG. 1 and the processing method which concerns on embodiment. It is explanatory drawing of the processing path in the processing apparatus of FIG. It is explanatory drawing of the setting of the pressing force in the operation of the processing apparatus of FIG. 2 and the processing method. It is explanatory drawing of the machining control in the operation and the machining method of the machining apparatus of FIG. It is explanatory drawing of the modification of the processing apparatus of FIG. It is explanatory drawing of the modification of the processing apparatus of FIG. It is a figure which shows the comparative example of a processing apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicate description will be omitted.

FIG. 1 is a schematic diagram of the configuration of the processing apparatus 1 according to the embodiment of the present invention. As shown in FIG. 1, the processing apparatus 1 is an apparatus for processing the surface of the work W by moving the processing tool 2 attached to the spindle 4 along the surface of the work W. The work W is a work piece to be machined by the machining apparatus 1, and is fixed and held on the work holding table 91. Any component can be applied as the work W. Examples of the work W include a mold, an engine component, and the like. In the present embodiment, as surface processing, a case where processing for smoothing the unevenness of the surface of the work W will be described.

The processing device 1 includes a robot arm 3 that adjusts the position and posture of the processing tool 2. The robot arm 3 functions as an operating unit that adjusts the position and posture of the processing tool 2. The robot arm 3 has a plurality of link portions 31 to 34 and a plurality of joint portions 35 to 37, and is configured to be able to change the position and posture of the processing tool 2. The link portions 31 to 34 are configured as, for example, rod-shaped members extending in the axial direction. The link portion 31 is directed in the vertical direction, and its base end side is attached to the upper surface of the base member 38. The link portion 31 is configured to be rotatable about the axis of the link portion 31. A link portion 32 is attached to the tip end side of the link portion 31 via a joint portion 35. The joint portion 35 is configured to be rotatable about an axis in the horizontal direction. Due to the rotational operation of the joint portion 35, the link portion 32 rotates about the rotation axis of the joint portion 35.

A link portion 33 is attached to the tip end side of the link portion 32 via a joint portion 36. The joint portion 36 is configured to be rotatable about an axis in the horizontal direction. Due to the rotational operation of the joint portion 36, the link portion 33 rotates about the rotation axis of the joint portion 36. The link portion 33 is configured to be rotatable about the axis of the link portion 33. A link portion 34 is attached to the tip end side of the link portion 33 via a joint portion 37. The joint portion 37 is configured to be rotatable about an axis in the horizontal direction. Due to the rotational movement of the joint portion 37, the link portion 34 rotates about the rotation axis of the joint portion 37. The link portion 34 is configured to be rotatable about the axis of the link portion 34.

A force sensor 5 is attached to the tip end side of the link portion 34. The force sensor 5 is a sensor that detects an external force acting on the processing tool 2. The external force corresponds to, for example, the reaction force when the processing tool 2 is pressed against the work W. As the force sensor 5, for example, a six-axis sensor capable of measuring a force in the orthogonal three-axis direction and a torque around each axis is used. Therefore, the force sensor 5 can detect the external force having six degrees of freedom acting on the processing tool 2 and the torque around the three axes. Further, the work W can be machined by force control by pressing the tool 2 against the work W so that the force sensor 5 detects a predetermined external force. As the force sensor for detecting the external force, a sensor other than the force sensor 5 may be used as long as the external force acting on the tool 2 can be detected.

A distance sensor 6 is attached to the tip end side of the force sensor 5. The distance sensor 6 is a detector that detects the unevenness of the surface of the work W, and detects the distance from the distance sensor 6 to the surface of the work W. The distance sensor 6 moves together with the spindle 4 and the processing tool 2 by being fixed to the link portion 34. As the distance sensor 6, for example, a laser range finder is used. The distance sensor 6 emits the laser beam A toward the work W and detects the distance to the surface of the work W based on the irradiation position of the laser beam A. By operating the robot arm 3 to move the position of the laser beam A and detecting the change in the distance to the surface of the work W, it is possible to detect the unevenness of the surface of the work W. As a sensor for detecting the unevenness of the surface of the work W, a sensor other than the distance sensor 6 may be used. For example, in the present embodiment, a non-contact type distance sensor is used, but a contact type sensor may be used.

A spindle 4 is attached to the tip end side of the force sensor 5. The spindle 4 is provided at a position deviated from the moving direction of the distance sensor 6 and the processing tool 2. For example, a connecting portion 39 extending in the radial direction of the link portion 34 is provided on the tip end side of the force sensor 5, and a spindle 4 is provided on the tip end side of the connecting portion 39 toward the work W. As the connecting portion 39, for example, a plate-shaped member or a rod-shaped member is used. In this way, the spindle 4 and the distance sensor 6 are attached to the tip side of the force sensor 5, respectively. Therefore, the distance sensor 6 can move together with the spindle 4 and the processing tool 2 to detect the unevenness of the surface processed by the processing tool 2.

The spindle 4 functions as a rotation actuating unit for rotating the processing tool 2. For example, as the spindle 4, a spindle motor having a built-in motor is used. As the rotation operating portion of the processing device 1, if the processing tool 2 can be rotated, a device other than the spindle 4 may be used, and for example, the spindle and the motor may be configured separately.

A processing tool 2 is attached to the tip end side of the spindle 4. The processing tool 2 is a member that processes the work W by being brought into contact with the work W in a rotated state. As the processing tool 2, for example, a rotary bar is used, and more specifically, a carbide rotary bar is used. Specifically, the processing tool 2 is configured by attaching a cylindrical processing portion 22 to the tip of the shaft 21. The machined portion 22 is a portion for cutting the work W, and may have a shape other than the cylindrical shape depending on the type of the work W, the intended use of the work, and the like. The processing tool 2 is used by attaching the base end side of the shaft 21 to the spindle 4. The shaft 21 and the machined portion 22 rotate according to the rotation of the spindle 4, the machined portion 22 is brought into contact with the work W, and the work W is machined. The processing tool 2 may be a processing tool other than the rotary bar, and may be, for example, a grindstone, an end mill, or the like.

In FIG. 1, the processing apparatus 1 includes a control unit 8. The control unit 8 functions as a processing control unit that controls processing of the processing apparatus 1. The control unit 8 may be configured by, for example, one computer or an electronic control unit, or may be configured by a personal computer and a controller. In response to the input of the target machining data of the machining tool 2, the control unit 8 operates the robot arm 3 while rotating the machining tool 2 to move the machining tool 2 to perform surface machining of the work W. For example, the control unit 8 sets the movement path of the machining tool 2 for the region to be machined of the work W, and sets the pressing force for pressing the machining tool 2 against the work W. The control unit 8 outputs a control signal to the robot arm 3 based on the set path and the pressing force, outputs a control signal to the spindle 4 to rotate the machining tool 2, and performs machining control.

As shown in FIG. 1, the control unit 8 is electrically connected to the robot arm 3 and outputs control signals to the joint portions 35 to 37 and the link portions 31, 33, 34 to output the joint portions 35 to 37 and the link. The rotational movements of the portions 31, 33, and 34 are adjusted. Further, the control unit 8 inputs rotation information of the joint portions 35 to 37 and the link portions 31, 33, 34, and recognizes the rotation state of the joint portions 35 to 37 and the link portions 31, 33, 34. The control unit 8 is electrically connected to the force sensor 5, inputs a detection signal of the force sensor 5, and recognizes the pressing force of the processing tool 2. Further, the control unit 8 is electrically connected to the distance sensor 6, inputs the detection signal of the distance sensor 6, and detects the unevenness of the surface of the work W based on the detection signal.

Further, the control unit 8 functions as a detection unit for detecting the degree of change in the unevenness of the surface of the work W. The degree of change in the unevenness is the rate of change or the amount of change in the unevenness with respect to the position of the surface in the moving direction of processing. For example, the greater the change in the unevenness of the surface of the work W, the greater the degree of change in the unevenness is detected. Further, the control unit 8 functions as a setting unit for setting a force for pressing the processing tool 2 against the surface of the work W according to the degree of change in the unevenness of the surface of the work W. For example, the control unit 8 sets the pressing force of the processing tool 2 against the surface of the work W to be larger as the degree of change in the unevenness of the surface of the work W is larger. For example, the pressing force of the processing tool 2 may be set to be larger in proportion to the degree of change in the unevenness of the surface of the work W, or the greater the degree of change in the unevenness of the surface of the work W, the more the pressing force of the processing tool 2 is pressed. The force may be set gradually larger. Further, when the pressing force of the processing tool 2 against the surface of the work W is set to be larger as the degree of change in the unevenness of the surface of the work W is larger, the upper limit value of the pressing force may be set. As a result, it is possible to prevent the processing tool 2 from being excessively pressed against the surface of the work W. By setting the pressing force in this way, the processing tool 2 is strongly pressed against the surface of the work W in a steep uneven portion to perform processing, and in a flat location, the processing tool 2 has a small pressing force or is pressed. The force is zero. The details of setting the pressing force of the processing tool 2 will be described later.

The processing apparatus 1 performs surface processing of the work W by, for example, force control and position control of the processing tool 2. The control unit 8 operates the robot arm 3 so that the machining tool 2 presses the work W with the set pressing force to control the force. As described above, since the reaction force of the actual pressing force of the tool 2 is input to the control unit 8 by the detection signal of the force sensor 5, feedback control of the pressing force is possible. Further, the control unit 8 controls the position with respect to the traveling direction of the machining tool 2. That is, the control unit 8 operates the robot arm 3 so that the machining tool 2 moves along the target path set in the machining range of the work W, and controls the position of the machining tool 2. By performing such force control and position control, even if the surface of the work W is a curved surface, the processing tool 2 can be moved along the surface of the work W while being pressed by the set pressing force. Therefore, it is not necessary to set data in advance for the processing position (height) of the processing tool 2 with respect to the surface of the work W. Therefore, it becomes easy to set the data before processing.

Next, the operation and the processing method of the processing apparatus 1 according to the present embodiment will be described.

FIG. 2 is a flowchart showing the operation of the processing apparatus 1. The control process of each step in FIG. 2 is executed by, for example, the control unit 8. FIG. 3 is an explanatory diagram showing a machining path of the machining tool 2 in the machining apparatus 1, and is a view of the work W as viewed from above.

First, as shown in step S10 of FIG. 2 (hereinafter, simply referred to as “S10”; the same applies to the subsequent steps), the machining path is set. The processing for setting the processing path is a processing for setting and storing a locus in which the processing tool 2 moves along the surface in the surface processing of the work W. This machining path is set based on the machining path data input to the control unit 8. As shown in FIG. 3, for example, the processing path is a path reciprocating on the surface of the work W.

Next, the process shifts to S12 in FIG. 2, and the calculation process of the degree of change in the unevenness is performed. The calculation process of the degree of change of the unevenness is a process of calculating the degree of change of the unevenness on the surface of the work W. The control unit 8 calculates the degree of change in the unevenness of the surface of the work W based on the detection information of the distance sensor 6. For example, when the surface of the work W is flat, the degree of change in the unevenness becomes zero, and the larger the change in the unevenness on the surface, the larger the degree of change in the unevenness is calculated.

Then, the process shifts to S14, and the pressing force setting process is performed. This setting process is a process of setting a pressing force that presses the processing tool 2 against the surface of the work W. Machining of the machining apparatus 1 is performed by force control and position control of the machining tool 2. The machining tool 2 is moved by position control in the horizontal direction along the surface of the work W, and the machining tool 2 is operated by force control in the direction perpendicular to the surface of the work W. The pressing force set here is a pressing force used for force control, and is a force for pressing the machining tool 2 against the work W during machining. The pressing force is set according to the degree of change in the unevenness calculated in S12. For example, the greater the degree of change in the unevenness of the surface of the work W, the larger the pressing force is set, and the smaller the degree of change in the unevenness of the surface of the work W, the smaller the pressing force is set, and the degree of change in the unevenness of the surface of the work W is set. If it is zero, the pressing force is set to zero.

FIG. 4 is an explanatory diagram of setting the pressing force of the processing tool 2. FIG. 4A is a side view of the work W, showing the unevenness of the work W in the traveling direction of the processing tool 2. In FIG. 4A, a convex portion W1 that protrudes steeply exists on the surface of the work W. FIG. 4B is data on the height of the surface of the work W generated based on the detection signal of the distance sensor 6. The horizontal axis is the position of the work W in the traveling direction of the processing tool 2, and the vertical axis is the height of the surface of the work W. In FIG. 4B, the height is increased at the position of the convex portion W1. The data of this height may be generated based on the difference between the target value of the machining height and the detection data determined in advance. FIG. 4C shows the degree of change in the unevenness at the position of the work W. FIG. 4 (c) is generated by, for example, high-pass filtering the height of (b). By performing the high-pass filter processing, it becomes possible to extract discontinuities on the surface of the work W. That is, by performing the high-pass filter processing, it is possible to accurately extract sharply changing discontinuities such as corners of steps on the surface of the work W. In (c) of FIG. 4, the degree of change sharply increases and gradually approaches zero at the rising portion of the convex portion W1, and the degree of change sharply decreases and gradually approaches zero at the falling portion of the convex portion W1. ing.

FIG. 4D is data in which the degree of change in unevenness at the position of the work W is corrected. That is, (d) in FIG. 4 is data in which the positive and negative of the data in the falling portion of the data in (c) are inverted and converted into line symmetry centered on the point in the falling portion. By correcting the change degree data in this way, it is possible to process the falling corner portion of the convex portion W1 into a smooth shape. FIG. 4 (e) shows the pressing force at the position of the work W. In FIG. 4 (e), an upper limit value is set for the data of (d), and a portion of the data of (d) that exceeds a preset upper limit value is set as the upper limit value. By setting this upper limit value, it is possible to prevent the pressing force from becoming excessively large at the rising portion. Further, when the data of (e) is generated, a gain may be applied to the data of (d) to adjust the magnitude of the pressing force. In this way, the pressing force of the processing tool 2 at each position of the work W is set by the distance sensor 6 based on the detection signal of the distance to the surface of the work W. The pressing force of the processing tool 2 is not limited to the above-mentioned method, and may be set by another method. For example, a predetermined pressing force (for example, a pressing force having a profile as shown in FIG. 4 (e)) may be set at the rising and falling positions of the unevenness of the work W.

Then, the process shifts to S16 in FIG. 2, and the machining control process is performed. The machining control process is a process of rotating the machining tool 2 and moving it along the surface of the work W to perform surface machining of the work W. The control unit 8 outputs a control signal to the spindle 4 to rotate the machining tool 2. Further, the control unit 8 outputs a control signal to the robot arm 3, operates the robot arm 3, and moves along the surface of the work W while pressing the machining tool 2 against the surface of the work W with a preset pressing force. Let me.

FIG. 5 is a diagram showing a processing state of the work W by the processing tool 2. As shown in FIG. 5A, when the machining tool 2 is moving on a flat portion of the surface of the work W, the degree of change in the unevenness of the surface is zero, so that the pressing force of the machining tool 2 is zero. Therefore, it will move without being processed by the processing tool 2. As shown in FIG. 5B, since the pressing force of the processing tool 2 is set to be large at the rising corner of the convex portion W1, the processing tool 2 is pressed against the surface of the work W with a strong pressing force. Is processed. As a result, the corners of the convex portion W1 are scraped off to form a smooth shape. Further, as shown in FIG. 5C, the pressing force of the processing tool 2 is set to gradually increase at the falling corner of the convex portion W1. As a result, the corners of the convex portion W1 are scraped off to form a smooth shape. As shown in FIG. 5D, when the machining tool 2 is moving on a flat portion of the surface of the work W, the degree of change in the unevenness of the surface is zero, so that the pressing force of the machining tool 2 is zero. Therefore, it moves without being processed by the processing tool 2. In addition, in FIGS. 4 and 5, the case where the convex portion W1 is formed on the surface of the work W has been described, but even when the concave portion is formed on the surface of the work W, the concave portion may fall down. It is also possible to process the rising corners into a smooth shape.

Then, the processing shifts to S18 in FIG. 2, and it is determined whether or not the processing end condition of the work W is satisfied. The case where the processing end condition of the work W is satisfied corresponds to, for example, the case where the processing of the area to be processed of the work W is completed. That is, it is the case where the processing is completed for all the processing paths. The case where the processing end condition of the work W is not satisfied corresponds to, for example, the case where the processing of the area to be processed of the work W is not completed. If it is determined in S18 that the processing end condition of the work W is not satisfied, the control process returns to S12. On the other hand, when it is determined in S18 that the processing end condition of the work W is satisfied, the series of control processing of FIG. 2 is terminated.

As described above, according to the processing apparatus 1 and the processing method according to the present embodiment, the processing tool 2 is pressed against the surface of the work W according to the degree of change in the unevenness of the surface of the work W to perform surface processing. Therefore, it is possible to selectively process the uneven portion of the surface shape of the work W. Therefore, the processing for removing the unevenness of the surface shape of the work W can be accurately performed, and the discontinuous shape of the surface of the work W can be accurately removed.

If the processing tool 2 is pressed against the surface of the work W with a constant pressing force to perform surface processing, the flat portion of the work W is also processed, and accurate processing cannot be performed as necessary. For example, as shown in FIG. 8, when the processing tool 2 is pressed against the surface of the work W with a constant pressing force to perform surface processing, the corners of the convex portion W1 have a smooth shape, but the work W is flat. The shaded area in FIG. 8 where the portion is also scraped is the region scraped by processing. On the other hand, in the processing apparatus 1 and the processing method according to the present embodiment, in order to detect the degree of change on the surface of the work W and process the work W according to the degree of change, only the corner portion of the convex portion W1 is scraped. The surface shape of the work W can be smoothed, and accurate surface processing can be performed.

Further, according to the processing apparatus 1 and the processing method according to the present embodiment, the processing tool 2 is pressed against the surface of the work W according to the degree of change in the unevenness of the surface of the work W to perform surface processing, so that the surface is processed before processing. It is possible to process only the uneven portion of the surface shape of the work W without measuring the unevenness of the entire processing region of the work W. For example, before machining the work W, it is conceivable to measure the unevenness of the entire machining area by laser measurement or the like, and perform machining according to the state of the unevenness. On the other hand, in the processing apparatus 1 according to the present embodiment, the degree of change in the unevenness of the surface of the work W is detected at the same time as the processing, and the pressing force of the processing tool 2 is set according to the degree of change in the processing. As a result, it is possible to accurately process only the uneven portion on the surface of the work W without measuring the unevenness of the entire processing region before processing.

Further, according to the processing apparatus 1 and the processing method according to the present embodiment, since the surface processing of the work W is performed without measuring the unevenness of the entire processing area before processing, the positional deviation between the measurement position of the unevenness and the processing position can be determined. Stable processing can be performed without worrying about it. That is, when the unevenness of the entire machining area before machining is measured and the surface of the work W is machined based on the measurement data, if the measurement position and the machining position deviate from each other, the machining becomes inappropriate. On the other hand, in the processing apparatus 1 according to the present embodiment, since the distance sensor 6 is moved together with the processing tool 2 to perform processing at the same time as measuring the unevenness, the deviation between the measurement position of the unevenness and the processing position is unlikely to occur. Therefore, appropriate surface processing can be reliably performed.

Further, according to the processing apparatus 1 and the processing method according to the present embodiment, the larger the degree of change in the unevenness of the work W is, the larger the pressing force of the processing tool 2 is set, and the larger the degree of change in the unevenness on the surface of the work W is. Processing is performed by strongly pressing the processing tool 2. Therefore, it is possible to sharpen a steep uneven portion greatly, and it is possible to accurately smooth the surface of the work W.

As described above, the processing apparatus 1 and the processing method according to the embodiment of the present invention have been described, but the present invention is not limited to the above-described embodiment. The present invention can take various modifications without departing from the gist of the claims.

For example, in the above-described embodiment, the processing tool 2 is reciprocated with respect to the surface of the work W for processing, and when one path is processed, the processing tool 2 is reciprocated so as to process the adjacent path. On the other hand, as shown in FIG. 6, the processing tool 2 may be reciprocated in one path. In this case, as shown in FIG. 7A, when the convex portion W1 is present on the surface of the work W, processing may be performed so as to scrape only the rising portion of the convex portion W1. That is, in the movement of the outward route, it becomes the falling portion of the convex portion W1, but when the return route is moved in the opposite direction, it is recognized as the rising portion of the convex portion W1, so that processing can be performed when the return route is moved. It will be. In such machining control, the surface height data is detected with respect to the position of the work W in FIG. 7 (b), and the convex portion W1 is subjected to the high-pass filter processing in FIG. 7 (c). A falling part and a falling part are detected. Then, in (d) of FIG. 7, the data of the falling portion is deleted. Then, the pressing force of the rising portion is set in (e) of FIG. 7, and the corner portion of the rising portion of the convex portion W1 is scraped as shown in (f) of FIG. 7, and the surface of the work W is smoothed. To. Even with such a processing apparatus, the same operation and effect as that of the processing apparatus 1 according to the above-described embodiment can be obtained.

Further, in the above-described embodiment, the case of smoothing the unevenness of the surface as the surface processing of the work W has been described, but the surface processing may be other surface processing such as polishing of the work W.

1 Processing device 2 Processing tool 3 Robot arm 4 Spindle 5 Force sensor 6 Distance sensor (detector)
8 Control unit (detection unit, setting unit, machining control unit)
A Laser light W work (workpiece)
W1 convex part

Claims (2)

A processing device that attaches a processing tool to a spindle and moves the processing tool along the surface of the workpiece to process the surface of the workpiece.
A detector that moves together with the spindle and the processing tool and detects surface irregularities processed by the processing tool.
A detection unit that detects the degree of change in the unevenness of the surface of the workpiece based on the detection information of the detector, and
A setting unit that sets a force for pressing the processing tool against the surface of the workpiece according to the degree of change detected by the detection unit, and a setting unit.
A machining control unit that presses the machining tool against the surface of the workpiece by a force set by the setting unit to perform machining is provided.
The setting unit sets a force for pressing the processing tool against the surface of the workpiece as the degree of change detected by the detecting unit increases.
Processing equipment. It is a processing method in which a processing tool is attached to a spindle and the processing tool is moved along the surface of the workpiece to process the surface of the workpiece.
A detection process in which a detector is moved together with the spindle and the processing tool, and the surface irregularities processed by the processing tool are detected by the detector.
A detection step that detects the degree of change in the unevenness of the surface of the workpiece based on the detection information of the detector, and
A setting step of setting a force for pressing the machining tool against the surface of the workpiece according to the degree of change detected in the detection step, and a setting step.
A machining control step of pressing the machining tool against the surface of the workpiece by a force set by the setting step to perform machining is included.
In the setting step, the larger the degree of change detected in the detection step, the greater the force for pressing the machining tool against the surface of the workpiece.
Processing method.

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