JP6964473B2 - ガス供給装置及び成膜装置 - Google Patents
ガス供給装置及び成膜装置 Download PDFInfo
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- JP6964473B2 JP6964473B2 JP2017176441A JP2017176441A JP6964473B2 JP 6964473 B2 JP6964473 B2 JP 6964473B2 JP 2017176441 A JP2017176441 A JP 2017176441A JP 2017176441 A JP2017176441 A JP 2017176441A JP 6964473 B2 JP6964473 B2 JP 6964473B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
- C23C16/14—Deposition of only one other metal element
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
- G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
- G05D16/08—Control of liquid pressure
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02697—Forming conducting materials on a substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
第1実施形態のガス供給装置を備える成膜装置について説明する。図1は、第1実施形態のガス供給装置を備える成膜装置の概略断面図である。第1実施形態の成膜装置は、原子層堆積(ALD:Atomic Layer Deposition)法による成膜、及び化学的気相成長(CVD:Chemical Vapor Deposition)法による成膜が実施可能な装置として構成されている。
第2実施形態のガス供給装置を備える成膜装置について説明する。図4は、第2実施形態のガス供給装置を備える成膜装置の概略断面図である。第2実施形態の成膜装置は、開閉バルブ105の2次側に、図1に示されるオリフィス107に代えて、バッファタンク109、圧力計109a、及び自動圧力制御(APC:Auto Pressure Control)バルブ108が設けられている。なお、その他の構成については、第1実施形態と同様の構成とすることができるので、以下では第1実施形態と同様の構成については説明を省略する。
5 処理ガス供給機構
51 WCl6ガス供給機構
73 開閉バルブ
80 バッファタンク
104 エバックライン
105 開閉バルブ
107 オリフィス
108 APCバルブ
109 バッファタンク
109a 圧力計
110 圧力調整用ガス供給ライン
111 圧力調整用ガス供給源
112 マスフローコントローラ
113 開閉バルブ
W ウエハ
Claims (6)
- 原料ガスをバッファタンク及び第1の高速開閉弁を介して処理容器内へ間欠的に供給可能なガス供給装置であって、
前記バッファタンクの2次側に接続され、前記バッファタンク内を排気可能なエバックラインと、
前記エバックラインに設けられた第2の高速開閉弁と、
を有し、
前記第2の高速開閉弁の2次側には、オリフィスが設けられている、
ガス供給装置。 - 原料ガスをバッファタンク及び第1の高速開閉弁を介して処理容器内へ間欠的に供給可能なガス供給装置であって、
前記バッファタンクの2次側に接続され、前記バッファタンク内を排気可能なエバックラインと、
前記エバックラインに設けられた第2の高速開閉弁と、
を有し、
前記第2の高速開閉弁の2次側には、前記エバックラインの圧力を検出する圧力計と、前記圧力計により検出される圧力に基づいて開度が調整される圧力制御バルブと、が設けられている、
ガス供給装置。 - 原料ガスをバッファタンク及び第1の高速開閉弁を介して処理容器内へ間欠的に供給可能なガス供給装置であって、
前記バッファタンクの2次側に接続され、前記バッファタンク内を排気可能なエバックラインと、
前記エバックラインに設けられた第2の高速開閉弁と、
を有し、
前記第2の高速開閉弁の2次側には、前記エバックラインに圧力調整用ガスを供給する圧力調整用ガス供給ラインが接続されている、
ガス供給装置。 - 前記第2の高速開閉弁の2次側には、前記エバックラインに供給される前記原料ガスを貯留するバッファタンクが設けられている、
請求項2に記載のガス供給装置。 - 前記第2の高速開閉弁は、前記第1の高速開閉弁と同一又は略同一の速度で開閉可能である、
請求項1乃至4のいずれか一項に記載のガス供給装置。 - 処理容器と、
請求項1乃至5のいずれか一項に記載のガス供給装置と、
を備えた、
成膜装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017176441A JP6964473B2 (ja) | 2017-09-14 | 2017-09-14 | ガス供給装置及び成膜装置 |
TW107130251A TW201920754A (zh) | 2017-09-14 | 2018-08-30 | 氣體供給裝置及成膜裝置 |
KR1020180105402A KR102245116B1 (ko) | 2017-09-14 | 2018-09-04 | 가스 공급 장치 및 성막 장치 |
US16/123,393 US20190078207A1 (en) | 2017-09-14 | 2018-09-06 | Gas supply apparatus and film forming apparatus |
CN201811050750.4A CN109504952B (zh) | 2017-09-14 | 2018-09-10 | 气体供给装置和成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017176441A JP6964473B2 (ja) | 2017-09-14 | 2017-09-14 | ガス供給装置及び成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019052346A JP2019052346A (ja) | 2019-04-04 |
JP6964473B2 true JP6964473B2 (ja) | 2021-11-10 |
Family
ID=65630716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017176441A Active JP6964473B2 (ja) | 2017-09-14 | 2017-09-14 | ガス供給装置及び成膜装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190078207A1 (ja) |
JP (1) | JP6964473B2 (ja) |
KR (1) | KR102245116B1 (ja) |
CN (1) | CN109504952B (ja) |
TW (1) | TW201920754A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7149788B2 (ja) * | 2018-09-21 | 2022-10-07 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
JP7382893B2 (ja) | 2020-04-17 | 2023-11-17 | 東京エレクトロン株式会社 | 原料供給装置及び成膜装置 |
JP2022055823A (ja) * | 2020-09-29 | 2022-04-08 | 東京エレクトロン株式会社 | 粉体搬送装置、ガス供給装置及び粉体除去方法 |
US20220262600A1 (en) * | 2021-02-12 | 2022-08-18 | Applied Materials, Inc. | Fast gas exchange apparatus, system, and method |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5186120A (en) * | 1989-03-22 | 1993-02-16 | Mitsubishi Denki Kabushiki Kaisha | Mixture thin film forming apparatus |
US6916398B2 (en) * | 2001-10-26 | 2005-07-12 | Applied Materials, Inc. | Gas delivery apparatus and method for atomic layer deposition |
JP3973605B2 (ja) * | 2002-07-10 | 2007-09-12 | 東京エレクトロン株式会社 | 成膜装置及びこれに使用する原料供給装置、成膜方法 |
JP3908625B2 (ja) * | 2002-07-30 | 2007-04-25 | 東京エレクトロン株式会社 | 基板処理装置 |
JP4423914B2 (ja) * | 2003-05-13 | 2010-03-03 | 東京エレクトロン株式会社 | 処理装置及びその使用方法 |
US20070269596A1 (en) * | 2006-05-19 | 2007-11-22 | Asm America, Inc. | Valve failure detection |
JP5219562B2 (ja) * | 2007-04-02 | 2013-06-26 | 株式会社日立国際電気 | 基板処理装置、基板処理方法及び半導体装置の製造方法 |
US8742441B2 (en) * | 2008-09-10 | 2014-06-03 | Tsmc Solid State Lighting Ltd. | Light-emitting diode with embedded elements |
JP2010202912A (ja) * | 2009-03-02 | 2010-09-16 | Mitsui Eng & Shipbuild Co Ltd | 原子層成長装置および方法 |
JP5270476B2 (ja) * | 2009-07-07 | 2013-08-21 | 株式会社日立国際電気 | 半導体装置の製造方法及び基板処理装置 |
JP6225837B2 (ja) * | 2014-06-04 | 2017-11-08 | 東京エレクトロン株式会社 | 成膜装置、成膜方法、記憶媒体 |
JP6706903B2 (ja) | 2015-01-30 | 2020-06-10 | 東京エレクトロン株式会社 | タングステン膜の成膜方法 |
JP6478813B2 (ja) * | 2015-05-28 | 2019-03-06 | 東京エレクトロン株式会社 | 金属膜の成膜方法 |
-
2017
- 2017-09-14 JP JP2017176441A patent/JP6964473B2/ja active Active
-
2018
- 2018-08-30 TW TW107130251A patent/TW201920754A/zh unknown
- 2018-09-04 KR KR1020180105402A patent/KR102245116B1/ko active IP Right Grant
- 2018-09-06 US US16/123,393 patent/US20190078207A1/en not_active Abandoned
- 2018-09-10 CN CN201811050750.4A patent/CN109504952B/zh active Active
Also Published As
Publication number | Publication date |
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JP2019052346A (ja) | 2019-04-04 |
CN109504952A (zh) | 2019-03-22 |
KR20190030604A (ko) | 2019-03-22 |
US20190078207A1 (en) | 2019-03-14 |
CN109504952B (zh) | 2021-07-06 |
TW201920754A (zh) | 2019-06-01 |
KR102245116B1 (ko) | 2021-04-26 |
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