JP6964375B1 - Heat treatment equipment and heat treatment method - Google Patents

Abstract

A heat treatment apparatus 1 has a rectangular parallelepiped shape, has an opening 10a on a bottom surface, and includes a heating furnace 10 fixed at a predetermined height h from a ground G. The moving ascending control unit 101 configures a sealed container in which the object to be processed, which is installed on the lower lid for the bottom surface of the heating furnace 10 is covered with the box c, as the cassette d of the carbonization chamber, and uses the mobile elevating device 11. Then, the cassette d is moved to just below the heating furnace 10, and the lower lid 10b of the cassette d is raised to the opening 10a of the heating furnace 10. When the lower lid 10b rises to the opening 10a of the heating furnace 10, the fixed heating control unit 102 fixes the lower lid 10b to the heating furnace 10 and heats the heating furnace 10 at a predetermined temperature for a predetermined time. When the heating of the heating furnace 10 is completed, the descending movement control unit 103 releases the fixing of the lower lid 10b to the heating furnace 10 and lowers the cassette d to just below the heating furnace 10 by using the mobile elevating device 11. The cassette d is moved to a place different from the place where the heating furnace 10 is installed. [Selection diagram] Fig. 1

Description

The present invention relates to a heat treatment apparatus and a heat treatment method.

Conventionally, there has been a technique for improving the efficiency of a heat treatment apparatus (also referred to as a carbonization apparatus or a carbonization furnace) that heat-treats an object to be treated by applying heat.

For example, Japanese Patent Application Laid-Open No. 2004-196891 (Patent Document 1) discloses a batch-type carbonization furnace that heats a solid organic substance in a substantially oxygen-free atmosphere to carbonize it. This carbonization furnace is provided with a heat exchanger that circulates low-temperature fluid to exchange heat, and a delivery pipe that sends out the high-temperature gas after carbonization treatment in the carbonization furnace to the heat exchanger is connected to the upper part of the carbonization furnace. Then, the return pipe from the heat exchanger is connected to the lower part of the carbonization furnace so that the high temperature gas in the carbonization furnace is circulated with the heat exchanger to be cooled. As a result, the high-temperature gas in the furnace is naturally convected and circulated with the heat exchanger without using a separate blower, etc., and the inside of the furnace can be cooled evenly in a short time with a simple configuration. There is.

Further, in Japanese Patent Application Laid-Open No. 2005-194422 (Patent Document 2), a batch type in which the outer wall of a carbonization chamber for heating and carbonizing an object to be treated is formed of metal and the outer wall on the side surface thereof is covered with a heat insulating material. Carbonization equipment is disclosed. The heat insulating material that covers the outer wall on the side surface of the carbonization chamber is movable so as to be spaced from the outer surface of the outer wall. As a result, when cooling the inside of the furnace, the heat insulating material is moved to create a parallel space between the heat insulating material and the outer surface of the outer wall, and an updraft is generated between the heat insulating material having this space and the outer wall. It is said that the time for cooling the inside of the furnace can be shortened by convection cooling the outer wall with airflow.

Further, Japanese Patent Application Laid-Open No. 2015-59171 (Patent Document 3) describes a carbonization furnace for carbonizing wastes mainly composed of organic substances and a combustion furnace for burning dried products having a water content of 15% by weight or less. Disclosed is an organic matter treatment / heat utilization device in which a heat exchanger for heat utilization is incorporated in the combustion furnace. A pair of combustion furnaces are provided so as to sandwich the carbonization furnaces, and a communication chamber for communicating each combustion furnace is configured as a carbonization furnace, and a carbonization box containing a material to be processed is continuously sent into this communication passage. Provide a feed mechanism that can be used. Further, the carbonization box sent to the carbonization furnace is heated at a temperature of at least 300 degrees or higher so that the object to be processed inside can be carbonized, and the carbonization box is accumulated inside at a predetermined position. A gas release section capable of releasing the carbonized gas is provided. Further, the heat exchanger for heat utilization is arranged in the furnace of the combustion furnace on at least one side of the pair of combustion furnaces. As a result, a carbonization furnace that carbonizes wastes mainly composed of organic substances and a series of waste treatment facilities that burn dried products dried to a water content of 15% or less can be made compact. In addition, since the heat sources of the pair of combustion furnaces can be used as the heat source for the carbonization treatment, the carbonization treatment can be efficiently performed and the generation of dioxin can be suppressed.

Japanese Unexamined Patent Publication No. 2004-196891 Japanese Unexamined Patent Publication No. 2005-194422 Japanese Unexamined Patent Publication No. 2015-59171

In a batch type heat treatment device, a carbonization chamber (also called a carbonization box) and a heating furnace are usually integrated, a basket containing an object to be processed is placed in the carbonization chamber, and the heating furnace is heated to a predetermined heating temperature (for example,). , 900 degrees) to heat the outside of the carbonization chamber. The heating means is, for example, a burner. Thermal efficiency may be improved by circulating superheated steam in the carbonization chamber to be indirectly heated.

When the temperature inside the basket reaches a predetermined decomposition temperature (for example, around 400 degrees), the object to be treated (for example, organic waste) in the basket is thermally decomposed to generate carbonization gas. This carbonization gas contains hydrogen and carbon monoxide, and by using this carbonization gas as an auxiliary fuel for a burner of a heating means, it is possible to completely burn the carbonization gas and reduce the running cost of the heat treatment apparatus.

A batch-type heat treatment device that uses a burner and superheated steam as the heating means is known as an environment-friendly ecology technology because it is an external heat type and thermally decomposes the object to be treated under completely oxygen-free conditions. By using carbonization gas, a carbonization / resource recycling system combined with energy-saving technology will be constructed.

Here, when, for example, wood-based waste, sludge-based waste, business-based waste, and waste plastic are adopted as the waste to be treated, these can be thermally decomposed, and they can be thermally decomposed in the thermal decomposition step. Heat recovery is also possible, and there is a possibility that the remaining ash can be used. On the other hand, if non-ferrous metals are used as the objects to be treated, they can be recovered as unused resources.

However, such a batch type heat treatment apparatus has the following problems. First, a basket containing an object to be processed is placed in the carbonization chamber of the heating furnace, the heating furnace is heated to thermally decompose the object to be processed, and then the temperature is raised to a high temperature in order to take out the object to be processed in the basket. It is necessary to cool the carbonization chamber that has become. The carbonization chamber is usually cooled by a cooling device provided in the heating furnace for about half a day, and the object to be processed in the basket is taken out from the carbonization chamber after the heating furnace is cooled. Here, for example, the heating time of the basket in the carbonization chamber is 5 to 8 hours, and the cooling time of the basket in the carbonization chamber is 10 to 15 hours. Therefore, there is a problem that the heat treatment cycle of the object to be treated is limited to once a day. Further, since the cooling of the basket involves the cooling of the carbonization chamber, it is necessary to heat the carbonization chamber after cooling from the beginning in the next day's heating, which causes a problem that the energy cost is high.

Further, in the carbonization chamber of the conventional heating furnace, an opening is provided on the side surface, and a door is provided so that the opening can be opened and closed. When the basket is put into the carbonization chamber, the worker opens the door on the side of the carbonization chamber and puts the basket into the carbonization chamber with a forklift or takes out the cooled basket from the carbonization chamber. However, the operator who operates the forklift is required to have a high level of operating skill. That is, even if the operator pays sufficient attention, the basket may be damaged or deformed by hitting the basket somewhere when the basket is taken in and out. Further, if the cooling of the carbonization chamber is insufficient, there is a problem that the work of putting in and taking out the basket is very dangerous.

Here, the technique described in Patent Document 1 can evenly cool the inside of the furnace in a short time. Further, in the technique described in Patent Document 2, the time for cooling the inside of the furnace can be shortened. However, in these techniques, it is necessary to cool the heating furnace in the same manner as described above. Further, in the technique described in Patent Document 3, the carbonized box can be continuously heated by continuously feeding the carbonized box into the communication chamber by the feeding mechanism, but the feeding mechanism is basically 300 degrees or more. It is necessary to use a heat-resistant material (for example, high chrome) that can withstand the temperature of the above, and there is a problem that the production is difficult and the production cost becomes very high.

Therefore, the present invention has been made to solve the above problems, and by separating the carbonization chamber itself from the heating furnace, the heating furnace is not cooled, and the heating furnace is hardly interrupted while the heating furnace is hot. It enables batch operation, and it is possible to safely cool the object to be treated inside the carbonization chamber by separating the carbonization chamber containing the object to be treated from the heating furnace and cooling the separated carbonization chamber as it is. It is an object of the present invention to provide a possible heat treatment apparatus and heat treatment method.

The heat treatment apparatus according to the present invention basically moves, ascends, descends, moves, and naturally cools a carbonization chamber (carbonization box) loaded with an object to be processed with respect to a heating furnace fixed from the ground to a high place. It is configured as follows. In the present invention, the bottom surface of the carbonization chamber also serves as the lower lid of the heating furnace. The cassette of the heat treatment apparatus according to the present invention is formed by placing a basket on which an object to be processed is placed on a lower lid and covering it with a box to form a sealed carbonization chamber.

That is, the heat treatment apparatus according to the present invention has a rectangular parallelepiped shape, has an opening at the bottom surface, includes a heating furnace fixed at a predetermined height from the ground, and has a movement ascending control unit, a fixed heating control unit, and a descending movement. It includes a control unit. The moving rise control unit configures a sealed container in which the object to be processed is covered with a box, which is installed on the lower lid for the bottom surface of the heating furnace, as a cassette in the carbonization chamber, and uses the mobile lifting device to raise the cassette. Is moved to just below the heating furnace, and the lower lid of the cassette is raised to the opening of the heating furnace. When the lower lid rises to the opening of the heating furnace, the fixed heating control unit fixes the lower lid to the heating furnace and heats the heating furnace at a predetermined temperature for a predetermined time. When the heating of the heating furnace is completed, the descending movement control unit releases the fixing of the lower lid to the heating furnace, and uses the mobile elevating device to lower the cassette to just below the heating furnace. The cassette is moved to a place different from the place where the heating furnace is installed, and the cassette is naturally cooled.

The heat treatment method of the heat treatment apparatus according to the present invention is configured to move, raise, lower, move, and naturally cool the cassette to the heating furnace in the same manner as described above. That is, the heat treatment method of the heat treatment apparatus according to the present invention includes a movement ascending control step, a fixed heating control step, and a descending movement control step. Each step of the heat treatment method corresponds to each control unit of the heat treatment apparatus.

According to the present invention, by separating the carbonization chamber itself from the heating furnace, it is possible to perform batch operation with almost no interruption while the heating furnace is hot without cooling the heating furnace, and carbonization containing an object to be processed is possible. It is possible to safely cool the object to be processed inside the carbonization chamber by separating the chamber from the heating furnace and cooling the separated carbonization chamber as it is while keeping the chamber hot.

It is the schematic which shows an example of the functional block of the heat treatment apparatus which concerns on embodiment of this invention. It is a flowchart for showing the execution procedure of the heat treatment method of the heat treatment apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows an example of the case where the lower lid of the heat treatment apparatus which concerns on embodiment of this invention is moved directly under a heating furnace. It is a schematic diagram which shows an example of the case where the lower lid of the heat treatment apparatus which concerns on embodiment of this invention is raised from right under a heating furnace to an opening of a heating furnace. It is the schematic which shows an example of the case where the basket is installed in the next lower lid of the heat treatment apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows an example of the case where the lower lid of the heat treatment apparatus which concerns on embodiment of this invention is moved to the cooling zone by lowering to just below the heating furnace after heating. It is a schematic diagram which shows an example of the case where the next lower lid of the heat treatment apparatus which concerns on embodiment of this invention is moved directly under a heating furnace and is raised to the opening of a heating furnace. It is a schematic diagram which shows an example of the case where the lower lid of the heat treatment apparatus which concerns on embodiment of this invention is moved to a loading zone after cooling, and a basket is conveyed. It is the schematic which shows an example of the case where two heating furnaces of the heat treatment apparatus which concerns on embodiment of this invention are provided adjacent to each other. It is the schematic which shows an example of the case where two cassettes are fixed adjacent to each other in the heating furnace of the heat treatment apparatus which concerns on embodiment of this invention. It is a schematic photograph which shows an example of the heat treatment apparatus of the comparative example 1. FIG. It is a schematic photograph which shows an example of the heat treatment apparatus of Example 1.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings for the purpose of understanding the present invention. It should be noted that the following embodiment is an example embodying the present invention and does not limit the technical scope of the present invention.

As shown in FIG. 1, the heat treatment apparatus 1 according to the present invention includes a heating furnace 10. The heating furnace 10 has a rectangular parallelepiped shape and has an opening 10a on the bottom surface. That is, the bottom surface of the heating furnace 10 is in an open state. The heating furnace 10 is fixed at a predetermined height h from the ground G. The heating furnace 10 is lifted and fixed at a predetermined height h by installing columns at each of the four corners of the bottom surface 10a, for example.

The heating method of the heating furnace 10 is not particularly limited, and examples thereof include a burning means (heating device) for a burner using combustion gas. Further, the heating furnace 10 is provided with a pipe (not shown), and by putting superheated steam in this pipe and circulating the superheated steam inside the heating furnace 10 or the cassette d described later, the inside of the heating furnace 10 is eliminated. It can be heated efficiently as an oxygen state.

Here, a lower lid 10b for the bottom surface of the heating furnace 10 is installed directly under the heating furnace 10. The lower lid 10b also serves as a bottom surface for closing the opening 10a of the heating furnace 10. The lower lid 10b is mounted on the mobile lifting device 11, and the lower lid 10b can be moved in the horizontal direction by the mobile lifting device 11 traveling on the ground G, and the mobile lifting device 11 can move the lower lid 10b. By moving up and down, the lower lid 10b can be moved in the vertical direction.

The configuration of the mobile lifting device 11 is not particularly limited, and for example, a base 11a having wheels at each of the four corners of the lower surface and a telescopic panter arm 11b (X-shaped arm) provided on the upper surface of the base 11a. A table 11c provided on the upper surface of the panter arm 11b is provided. Specific examples of the mobile lifting device 11 include a mobile table lift in which a table lift is installed on the upper surface of the carriage.

An object to be processed is installed on the upper surface of the lower lid 10b, but the installation form of the object to be processed is not particularly limited. For example, the object to be processed is stored in the basket b and installed on the upper surface of the lower lid 10b according to its shape. The basket b is not particularly limited, but is composed of, for example, a metal box having heat resistance such as iron. The material to be treated is not particularly limited, but for example, sludge (muddy substance) of metal or aluminum, medical waste, plastics, unused biomass such as rice husk, food residue, organic matter such as wood, etc. Examples include waste and exterminated vermin.

Here, the basket b (or the object to be processed) of the lower lid 10b is covered with the box c, and the lower lid 10b and the box c are integrated to form a sealed state. The box c has, for example, a rectangular parallelepiped shape smaller than that of the heating furnace 10, and has a structure in which the bottom surface is an opening. This means that there is no window. The lower lid 10b and the box c serve as a container for storing the object to be processed, and form a cassette d. In the specification of the present invention, the container in a sealed state in which the object to be processed, which is installed on the lower lid for the bottom surface of the heating furnace 10, is covered with the box c, is referred to as a cassette d. This cassette d corresponds to a carbonization chamber (carbonization box) separated from the heating furnace 10. The carbonization chamber corresponds to a pyrolysis chamber or a carbonization box of a conventional heating furnace. Here, the shape of the cassette d depends on the shape of the lower lid 10b and the shape of the box c, but the shape is not particularly limited, and examples thereof include a rectangular parallelepiped shape.

Here, the predetermined height h where the opening 10a of the heating furnace 10 is located is the height of the mobile elevating device 11 in which the cassette d of the lower lid 10b covered by the box c is loaded and the cassette d is positioned downward. It is set higher than that. As a result, the mobile lifting device 11 loaded with the cassette d can freely travel below the heating furnace 10.

In the heat treatment apparatus 1 according to the present invention, for example, the place where the heating furnace 10 is installed is set as the heating zone B, and the place on one side (for example, the left side) of the heating furnace 10 is set as the loading zone A. The location on the other side (for example, the right side) is configured as the cooling zone C. As a result, the object to be processed can be efficiently loaded, heated (for example, carbonized), and cooled.

A loading device 12 such as a forklift can come and go in the loading zone A, and the basket b (or the object to be processed) is installed on the upper surface of the lower lid 10b of the loading zone A by the loading device 12.

A transport device 13 such as a hoist is provided above the loading zone A, and the transport device 13 allows the box c to be placed on the basket b (or the object to be processed) to move in the vertical direction and the horizontal direction. The box c is made of a metal box having heat resistance such as stainless steel.

In the heating zone B, a heating furnace 10 is installed at a predetermined height h, and a space below the heating furnace 10 is provided so that the mobile lifting device 11 can come and go.

The cooling zone C is provided with a space in which the cassette d can be installed, and the basket b (or the object to be processed) in the cassette d is cooled by installing the heated cassette d.

Here, the installation form and the moving form of the cassette d are not particularly limited, but for example, the cassette d extends horizontally from the loading zone A to the cooling zone C via the heating zone B, with a predetermined interval in the depth direction. A gantry 14 composed of the two provided beams is provided, and the gantry 14 supports both ends of the lower surface of the lower lid 10b of the cassette d in the depth direction, and the lower lid 10b of the cassette d can be installed. On the other hand, the table 11c of the mobile lifting device 11 is configured to be smaller than the distance between the two beams of the gantry 14.

As a result, when the mobile lifting device 11 raises the table 11c below the gantry 14, the table 11c passes through the space between the two beams of the gantry 14 and is located above. Here, when the lower lid 10b is installed on the gantry 14, the mobile lifting device 11 raises the table 11c so that the upper surface of the table 11c is brought into contact with the lower surface of the lower lid 10b and is lowered from the gantry 14. The lid 10b can be lifted.

By moving the mobile lifting device 11 in this state, the lower lid 10b (that is, the cassette d) can be moved to various places on the gantry 14. On the other hand, when the mobile lifting device 11 lowers the table 11c, first, both ends of the lower surface of the lower lid 10b in the depth direction are installed on the gantry 14, and the upper surface of the table 11c is separated from the lower surface of the lower lid 10b.

As a result, the mobile lifting device 11 lowers the table 11c below the gantry 14, so that the lower lid 10b installed on the upper surface of the table 11c can be installed on the gantry 14.

Further, a rail 15 that extends horizontally from the loading zone A to the cooling zone C via the heating zone B and on which the mobile lifting device 11 can travel may be provided below the gantry 14. By mounting the wheels of the mobile lifting device 11 on the rail 15, it is possible to limit the traveling location of the mobile lifting device 11, and it is possible to accurately move the lower lid 10b.

By the way, the heating furnace 10 and the mobile elevating device 11 are controlled by each control unit described later. Each control unit is composed of, for example, a terminal device, a mobile terminal device, a microcomputer, and has a built-in CPU, ROM, RAM, etc. (not shown). Execute the stored program. Further, each part described later is also realized by the CPU executing a program.

Next, the configuration and the execution procedure according to the embodiment of the present invention will be described with reference to FIG. First, the first lower lid 10b1 (referred to as the first lower lid 10b1) is installed on the gantry 14 of the loading zone A, and the first object to be processed (for example, aluminum chips, briquettes, etc.) is placed on the first lower lid 10b1. The first basket b1 (referred to as the first basket b1) containing the object to be processed is installed (FIG. 2: S101) (installation of the cassette).

Here, the method of installing the first lower lid 10b1 and the first basket b1 is not particularly limited, but for example, the operator uses the forklift of the loading device 12 as shown in FIG. The lower lid 10b1 is installed on the gantry 14 of the loading zone A, and the first basket b1 containing the first object to be processed is installed on the upper surface of the first lower lid 10b1. The first object to be processed is pre-stored in the first basket b1 by, for example, an operator.

Here, the operator uses the hoist of the transport device 13 to move the first box c1 (referred to as the first box c1) directly above the first basket b1 and lower it as it is. The first box c1 is put on the first basket b1. The first box c1 covers the first basket b1 and is in close contact with the upper surface of the lower lid 10b, so that the inside of the first box c1 is sealed and the first cassette d1 (for example, a closed heat treatment chamber, carbonization) is provided. It can be formed as a room). In particular, by putting the first cassette d1 inside the heating furnace 10, it becomes possible to heat in a double-structured closed type, and it is possible to completely carbonize the first object to be treated.

Next, when the operator instructs the terminal device 100 of the heat treatment device 1 to move the first cassette d1, the movement ascending control unit 101 of the terminal device 100 uses the mobile lifting device 11 to move the first cassette d1. Is moved to just below the heating furnace 10 and the first lower lid 10b1 of the first cassette d1 is raised to the opening 10a of the heating furnace 10 (FIG. 2: S102) (movement and raising of the cassette).

Here, the method of moving and ascending the first cassette d1 is not particularly limited, but for example, the movement ascending control unit 101 contracts the panter arm 11b of the mobile elevating device 11 as shown in FIG. The table 11c is made lower than the height of the gantry 14, and the mobile lifting device 11 in that state is moved to the loading zone A along the rail 15 and directly below the first lower lid 10b1. Next, the movement ascending control unit 101 extends the panter arm 11b of the mobile lifting device 11 and lifts the table 11c higher than the height of the gantry 14 by a predetermined height hs, so that the first surface of the table 11c is raised. The lower surface of the lower lid 10b1 is placed. As a result, the first cassette d1 is installed on the upper surface of the table 11c. Further, the movement ascending control unit 101 lifts the first lower lid 10b1 from the gantry 14 on the table 11c by extending the panter arm 11b. As a result, the first cassette d1 can be moved via the mobile lifting device 11. Then, the movement rise control unit 101 moves the mobile lifting device 11 in a state where the first cassette d1 is lifted to just below the heating furnace 10.

Further, as shown in FIG. 4, the mobile elevating control unit 101 further extends the panter arm 11b of the mobile elevating device 11 to move the table 11c upward and lower the first of the first cassette d1. The lid 10b1 is raised to the opening 10a of the heating furnace 10. As a result, the first lower lid 10b1 functions as the bottom surface of the heating furnace 10 and closes the opening 10a of the heating furnace 10. That is, when the first cassette d1 is installed inside the heating furnace 10 from below, the first cassette d1 functions as a carbonization chamber in the heating furnace 10.

When the moving rise control unit 101 completes the rise of the first lower lid 10b1, the fixed heating control unit 102 of the terminal device 100 then fixes the first lower lid 10b1 to the heating furnace 10 and heats the furnace. 10 is heated at a predetermined temperature (for example, 800 degrees) for a predetermined time (for example, 3 hours) (FIG. 2: S103) (fixing and heating of a cassette).

Here, the method of fixing the first lower lid 10b1 and heating the heating furnace 10 is not particularly limited, but for example, the fixed heating control unit 102 is fixedly cured in advance in the vicinity of the opening 10a of the heating furnace 10. By connecting the tool 10c (for example, a stopper) to the heating furnace 10 and the first lower lid 10b1, the first lower lid 10b1 is fixed to the opening 10a of the heating furnace 10. As a result, the heating furnace 10 can be sealed, and the first cassette d1 containing the first object to be processed can be confined inside the heating furnace 10.

Then, the fixed heating control unit 102 drives a heating device such as a burner to burn the burner with the combustion gas to heat the heating furnace 10. Then, the fixed heating control unit 102 continues heating of the heating furnace 10 until a predetermined time.

Here, the fixed heating control unit 102 further introduces superheated steam into the piping provided in the heating furnace 10 and circulates the superheated steam inside the heating furnace 10 or the first cassette d1 to circulate the superheated steam in the heating furnace 10. The inside of the furnace may be anoxic. By charging the superheated steam into the heating furnace 10, the superheated steam promotes heat transfer and the superheated steam is compared with the case where the first cassette d1 is heated inside the heating furnace 10 in the absence of the superheated steam. Due to the high enthalpy of the furnace, it is possible to significantly improve the thermal efficiency. Further, since the superheated steam circulates inside the heating furnace 10 or the first cassette d1, the temperature inside the first cassette d1 can be easily made uniform, and the contact area of the superheated steam with respect to the first object to be treated can be increased. It is greatly expanded, and it becomes possible to quickly heat the first object to be processed.

By the way, when the first object to be processed is heated to a predetermined temperature (for example, 300 degrees) and carbonization gas is generated by the thermal decomposition of the first object to be processed, the dry distillation inside the heating furnace 10 is performed. A carbonization gas may be used as a fuel gas by separately providing a pipe for guiding the gas to the burner and supplying the carbonization gas of the heating furnace 10 to the burner through the pipe. As a result, the dry distillation gas can be effectively used as heat energy, the running cost can be suppressed, and smokelessness and deodorization in the heating furnace 10 can be realized. In this case, the energy-saving heat treatment apparatus 1 is used.

Further, when the fixed heating control unit 102 heats the heating furnace 10 by burning the carbonization gas generated from the first object to be processed with a burner, for example, it detects the amount of carbonization gas generated inside the heating furnace 10. The heating furnace 10 is provided with a generation amount detecting device for detecting the amount of heat generated, and the heating furnace 10 is provided with a temperature detecting device for detecting the temperature inside the heating furnace 10. Then, the fixed heating control unit 102 may adjust the combustion condition of the burner based on the amount of carbonization gas generated and the temperature inside the heating furnace 10. This makes it possible to semi-automatically heat the heating furnace 10.

As described above, in the present invention, the heating furnace 10 and the first cassette d1 of the carbonization chamber are separated from each other instead of inserting the first cassette d1 (or the first object to be processed) from the side surface of the carbonization chamber of the heating furnace. The first cassette d1 is inserted from the bottom surface of the heating furnace 10. Therefore, first, in the present invention, since the entrance / exit of the heating furnace 10 is one place of the opening 10a on the bottom surface, it is difficult for air to flow and heat is trapped inside the heating furnace 10. As a result, the heat of the heating furnace 10 is hard to escape to the outside, and the thermal efficiency is improved. Further, it is not necessary for the operator to insert the first cassette d1 into the heating furnace 10 with the loading device 12 such as a forklift, and for example, the first cassette d1 is inserted from the bottom surface of the heating furnace 10 using the mobile lifting device 11. Therefore, it is possible to safely put the first cassette d1 into the heating furnace 10. The configuration is extremely safe for workers. In particular, in the present invention, the heating furnace 10 and the first cassette d1 are separated, and the first lower lid 10b1 of the first cassette d1 is moved up and down with respect to the bottom surface of the heating furnace 10, so that the first cassette The structure is such that d1 is taken in and out of the heating furnace 10. Therefore, there is no possibility that the first lower lid 10b1 will tip over during ascending / descending due to the weight of the first cassette d1. Further, since the mobile lifting device 11 can be automatically operated by mechanical control, the number of personnel can be reduced.

Now, when the fixed heating control unit 102 heats the heating furnace 10, the repetition control unit 104 of the heat treatment apparatus 1 determines whether or not to prepare the next cassette d2 (referred to as the second cassette d2) (FIG. 2). : S104) (Necessity of preparing the next cassette).

Here, the determination method of the repetitive control unit 104 is not particularly limited, but for example, when it is necessary to prepare the second cassette d2, the operator sends a signal indicating the existence of the second cassette d2 to the terminal device 100. Upon input, the repetitive control unit 104 of the terminal device 100 receives the input of this signal and determines that the second cassette d2 exists (the second cassette d2 should be prepared) (FIG. 2: S104YES). A second cassette d2 is prepared (FIG. 2: S105).

Here, the method of preparing the second cassette d2 of the repetitive control unit 104 is not particularly limited. For example, in order to prepare the second cassette d2, the repetitive control unit 104 is placed on the gantry 14 of the loading zone A. The second lower lid 10b2 is transported and installed.

The method of installing the second lower lid 10b2 of the repetitive control unit 104 is not particularly limited. For example, as shown in FIG. 5, the repetitive control unit 104 is a mobile elevating / lowering unit that has completed the ascent of the first lower lid 10b1. The device 11 is operated to retract the panter arm 11b so that the table 11c is lower than the height of the gantry 14.

Here, when the second lower lid 10b2 is arranged on the gantry 14 of the cooling zone C, the repetitive control unit 104 puts the mobile lifting device 11 with the panter arm 11b contracted into the cooling zone C along the rail 14. The mobile elevating device 11 is moved to just below the second lower lid 10b2 arranged on the gantry 14 of the cooling zone C.

Then, the repetitive control unit 104 extends the panter arm 11b of the mobile lifting device 11 to lift the table 11c higher than the height of the gantry 14, and puts the lower surface of the second lower lid 10b2 on the upper surface of the table 11c. Further, the repetitive control unit 104 moves the mobile lifting device 11 with the second lower lid 10b2 mounted on the table 11c to the loading zone A along the rail 14, and moves the mobile lifting device 11 to the loading zone A. Move to the pedestal 14 of.

Next, the repetitive control unit 104 contracts the panter arm 11b of the mobile lifting device 11 to make the table 11c lower than the height of the gantry 14, so that the second lower lid 10b2 placed on the table 11c is placed in the loading zone A. It is installed on the gantry 14. As a result, the preparation for loading the second basket b2 (or the second object to be processed) on the second lower lid 10b2 is completed.

Here, the operator uses, for example, the forklift of the loading device 12 to install the second basket b2 containing the second object to be processed on the upper surface of the second lower lid 10b2. Further, the operator moves the second box c2 directly above the second basket b2 using the hoist of the transport device 13 and lowers the second box c2 as it is, thereby moving the second box c2 to the second basket. Cover b2. As a result, the second cassette d2 is prepared, and the preparation for heating of the second cassette d2 is completed.

On the other hand, in S104, when it is not necessary to prepare the second cassette d2 (FIG. 2: S104NO), the heat treatment of the additional cassette is completed. In this case, it will be described later.

Now, when the preparation of the second cassette d2 is completed, the fixed heating control unit 102 continues to heat the heating furnace 10, and a predetermined time elapses from the time when the heating is started, the heat treatment of the first cassette d1 is completed. do. Therefore, the fixed heating control unit 102 completes the heating of the heating furnace 10, and the descending movement control unit 103 of the terminal device 100 releases the fixing of the first lower lid 10b1 to the heating furnace 10 to release the first cassette d1. The first cassette d1 is naturally cooled by lowering it to just below the heating furnace 10 and moving the first cassette d1 to a cooling zone C at a location different from the installation location (heating zone B) of the heating furnace 10 (FIG. 2: S106) (unfixing the cassette, lowering the cassette, moving / cooling).

Here, there is no particular limitation on the method of releasing the first lower lid 10b1 of the lowering movement control unit 103 and lowering and moving the first cassette d1. For example, the descending movement control unit 103 contracts the panter arm 11b of the mobile lifting device 11 to make the table 11c lower than the height of the gantry 14, and heats the mobile lifting device 11 in that state along the rail 14. It is moved directly under the heating furnace 10 of B. Next, the descending movement control unit 103 extends the panter arm 11b of the mobile lifting device 11 and lifts the table 11c to the first lower lid 10b1 of the first cassette d1 fixed to the heating furnace 10. The upper surface of the table 11c is brought into contact with the lower surface of the first lower lid 10b1. Further, the descending movement control unit 103 removes the first lower lid 10b1 from the opening 10a of the heating furnace 10 by removing the fixing jig 10c from the heating furnace 10 and the first lower lid 10b1 to remove the first lower lid 10b1 from the heating furnace 10 and the first lower lid 10b1. The fixing of the first lower lid 10b1 to 10 is released.

When the fixing of the first lower lid 10b1 to the heating furnace 10 is released, the first cassette d1 is installed on the table 11c, so that the descending movement control unit 103 contracts the panter arm 11b of the mobile elevating device 11. Then, the first cassette d1 is separated from the heating furnace 10. As a result, the first cassette d1 is removed from the heating furnace 10. Here, in the present invention, since the heating furnace 10 and the first cassette d1 in the carbonization chamber are separated, by lowering the first cassette d1 from the heating furnace 10, the first cassette from the heating furnace 10 is immediately first. Cassette d1 can be separated. Then, as shown in FIG. 6, the descending movement control unit 103 stops the table 11c at a position higher than the height of the gantry 14 of the heating zone B by a predetermined height hs, thereby mounting the first lower lid 10b1 on the gantry. The first cassette d1 can be moved via the mobile elevating device 11 in a state of being floated directly above the 14.

Then, the descending movement control unit 103 moves the mobile lifting device 11 with the first cassette d1 mounted on the table 11c along the rail 14 to the gantry 14 in the cooling zone C. Further, the descending movement control unit 103 contracts the panter arm 11b of the mobile lifting device 11 in the cooling zone C to make the table 11c lower than the height of the gantry 14, and the first cassette d1 of the table 11c is first. The lower lid 10b1 is installed on the gantry 14 of the cooling zone C. As a result, the first cassette d1 is placed on the gantry 14 of the cooling zone C, and the first basket b1 (or the first object to be processed) of the first cassette d1 is placed in the external environment instead of the inside of the heating furnace 10. It is possible to cool with.

Here, the cooling method of the first cassette d1 is not particularly limited, but for example, by leaving the first cassette d1 in the cooling zone C, the first cassette d1 can be naturally cooled.

In this case, since it is not necessary to forcibly cool the heating furnace 10, it is possible to omit the conventionally required cooling of the heating furnace 10. Further, the portion of the heating furnace 10 that receives high heat is only the lower lid 10b, and the mobile lifting device 11, the gantry 14, and the rail 15 do not need to be made of a heat-resistant material, and can be carried out at low cost. It will be possible.

Now, when the descending movement control unit 103 moves the first cassette d1 to the cooling zone C, the preparation of the second cassette d2 is completed, so that the repeating control unit 104 returns to S102 and moves up and down. The second lower lid 10b2 of the second cassette d2 is moved to just below the heating furnace 10 via the control unit 101, and the second lower lid 10b2 is raised to the opening 10a of the heating furnace 10 (FIG. 2: FIG. S102) (moving and raising the cassette). The method of moving and raising the second lower lid 10b2 is not particularly limited and is the same as described above.

Next, as shown in FIG. 8, the repetitive control unit 104 fixes the second lower lid 10b2 to the heating furnace 10 via the fixed heating control unit 102, and keeps the heating furnace 10 at a predetermined temperature for a predetermined time. , Heat (FIG. 2: S103). The method of fixing the second lower lid 10b2 and heating the heating furnace 10 is not particularly limited and is the same as described above.

Here, since the heating furnace 10 is not cooled, the first lower lid 10b2 is removed, so that the heating furnace 10 is cooled to some extent in the external environment, but is kept at a high temperature. That is, by fixing the second lower lid 10b2 to the opening 10a of the heating furnace 10 in the high temperature state, the heat in the heating furnace 10 is utilized as it is, and the second lower lid 10b2 is installed in the second lower lid 10b2. The basket b2 (or the second object to be treated) can be heated quickly. Further, in the present invention, by separating the heating furnace 10 and the cassette d of the carbonization chamber, the cassette d serving as another carbonization chamber can be directly put into the heating furnace 10 without requiring a cooling step. That is, it is possible to perform batch operation with almost no interruption in heating the cassette d, and it is possible to improve the operating rate and the fuel efficiency.

Now, when the fixed heating control unit 102 starts heating the second cassette d2, the process returns to S104, and the repetitive control unit 104 determines whether or not to prepare the next cassette d3 (referred to as the third cassette d3). Judgment (FIG. 2: S104) (necessity of preparing the next cassette).

Here, when the repeat control unit 104 determines that the third cassette d3 exists (FIG. 2: S104YES), the third cassette d3 is prepared in the same manner as described above (FIG. 2: S105).

Here, when the repetitive control unit 104 prepares the third cassette d3, the first lower lid 10b1 of the first cassette d1 after cooling can be used at the timing when the first cassette d1 is cooled. You can. Therefore, when the first cassette d1 is cooled and a predetermined time elapses from the time when the cooling is started, the first basket b1 (or the first object to be processed) of the first cassette d1 is cooled. The repeating control unit 104 conveys the first cassette d1 after cooling from the gantry 14 in the cooling zone C to the gantry 14 in the loading zone A.

Here, the method of transporting the first cassette d1 of the repetitive control unit 104 is not particularly limited. For example, the repetitive control unit 104 contracts the panter arm 11b of the mobile elevating device 11 to load the table 11c into the loading zone A. The mobile lifting device 11 is moved to the cooling zone C along the rail 14 so as to be lower than the gantry 14 of the above, and directly under the first lower lid 10b1 of the first cassette d1 in the gantry 14 of the cooling zone C. Move it. Next, the repetitive control unit 104 extends the panter arm 11b of the mobile lifting device 11 and lifts the table 11c to a position higher than the gantry 14 of the cooling zone C by a predetermined height hs, and lowers the first. The lower surface of the lid 10b1 is placed on the upper surface of the table 11c, and the first cassette d1 is placed on the table 11c.

Next, the repetitive control unit 104 moves the mobile lifting device 11 along the rail 14 to the gantry 14 in the loading zone A. Then, the repetitive control unit 104 contracts the panter arm 11b so that the table 11c is lower than the gantry 14 of the loading zone A, and the first lower lid 10b1 of the first cassette d1 is placed on the gantry 14 of the loading zone A. Install. As a result, the first cassette d1 can be conveyed to the loading zone A.

Here, as shown in FIG. 8, the operator uses the hoist of the transport device 13 to grab the first box c1 covering the first basket b1 in the first cassette d1 and raise it upward as it is. This moves the first box c1 directly above the first basket b1 and removes the first box c1 from the first basket b1.

Then, the operator uses the forklift of the loading device 12 to move the first basket b1 after the heat treatment to another place to convey the first basket b1. This makes it possible to complete the process from heat treatment to cooling of the first object to be processed in the first cassette d1.

When the transportation of the first basket b1 after the heat treatment is completed, the first lower lid 10b1 on which the first basket b1 is installed is installed on the gantry 14 of the loading zone A. As a result, the preparation for loading the next basket b3 (referred to as the third basket b3) (or the third object to be processed) on the first lower lid 10b1 is completed.

Therefore, in the same manner as described above, the operator installs the third basket b3 containing the object to be processed on the upper surface of the first lower lid 10b1 by using the forklift of the loading device 12, and hoists the transport device 13. In use, the first box c1 is placed over the third basket b3. As a result, the third cassette is prepared, and the preparation for heating the third basket b3 is completed.

In this way, the heating furnace 10 is cooled by separately configuring the heating furnace 10 and the first cassette d1 in the carbonization chamber and cooling the first cassette d1 in a cooling zone C different from the heating zone B. It is possible to continuously heat the cassette d without doing so. Since the steps after S105 are the same as those described above, they will be omitted.

On the other hand, in S104, for example, when it is not necessary to prepare the next cassette d3, the operator inputs a signal indicating the absence of the next cassette d3 to the terminal device 100. When the repetitive control unit 104 receives a signal indicating the absence of the next cassette d3, it determines that the next cassette d3 does not exist (FIG. 2: S111NO). In this case, since the first cassette d1 is installed on the gantry 14 of the cooling zone C, the repetitive control unit 104 determines the first cassette d1 after cooling at the timing when the first cassette d1 is cooled. Is transported from the gantry 14 in the cooling zone C to the gantry 14 in the loading zone A (FIG. 2: S107). The transport of the first cassette d1 is the same as described above.

Then, when the transfer of the first cassette d1 is completed, the operator transfers the first box c1 and the first basket b1 in the same manner as described above, and the heat treatment to the cooling of the first object to be processed are performed. Complete. In this case, the first lower lid 10b1 is installed on the gantry 14 of the loading zone A.

When the heating of the second cassette d2 in the heating furnace 10 is completed, the repeating control unit 104 releases the fixing of the second lower lid 10b2 to the heating furnace 10 via the descending movement control unit 103, and the second lower lid 10b2 is released. The second cassette d2 is lowered to just below the heating furnace 10, the second cassette d2 is moved to the cooling zone C, and the second cassette d2 is naturally cooled (FIG. 2: S108). S108 is the same as S106.

Then, when the cooling of the second cassette d2 is completed, the repetitive control unit 104 transfers the cooled second cassette d2 from the gantry 14 of the cooling zone C to the loading zone A at the timing when the second cassette d2 is cooled. It is conveyed to the gantry 14 (FIG. 2: S109). The transfer of the second cassette d1 is the same as described above.

Here, since the first lower lid 10b1 is installed on the gantry 14 of the loading zone A, for example, the repeat control unit 104 first first installs the first lower lid 10b1 on the gantry 14 of the loading zone A. Is temporarily fixed in the heating furnace 10.

Then, since there is nothing in the gantry 14 of the loading zone A, the repetitive control unit 104 conveys the second cassette d2 to the gantry 14 of the loading zone A. Then, the operator conveys the second box c2 and the second basket b2 in the same manner as described above, and the process from heat treatment to cooling of the second object to be processed is completed. In this case, the second lower lid 10b2 is in a state of being installed on the gantry 14 of the loading zone A. Then, for example, the repetitive control unit 104 transports the first lower lid 10b1 fixed to the heating furnace 10 to the gantry 14 of the cooling zone C and installs it. This returns to the initial state. Therefore, when heat-treating the next object to be processed, it is possible to start from S101. The installation positions of the first lower lid 10b1 and the second lower lid 10b2 in the initial stage are not particularly limited.

As described above, in the present invention, by separating the carbonization chamber itself from the heating furnace, it is possible to perform batch operation with almost no interruption while the heating furnace is hot without cooling the heating furnace, and an object to be processed is contained. It is possible to safely cool the object to be treated inside the carbonization chamber by separating the carbonization chamber from the heating furnace and cooling the separated carbonization chamber as it is. In particular, in the present invention, the cassette d can be easily taken in and out of the heating furnace 10 by raising and lowering the lower lid 10b by using the mobile lifting device 11, so that the operator can use it. In addition to not requiring advanced operation skills, the mobile lifting device can also automatically move the cassette d into and out of the heating furnace 10 using the control unit, making it possible to safely heat-treat the object to be processed. It becomes.

By the way, in the heat treatment apparatus 1 according to the present invention, as shown in FIG. 1, it is assumed that the box c covers the object to be processed (including the basket b), but other configurations may be used.

Further, in the heat treatment apparatus 1 according to the present invention, as shown in FIG. 1, it is assumed that one heating furnace 10 is lifted and fixed from the ground G to a predetermined height h, but other configurations may be used. .. For example, as shown in FIG. 9, two or more (for example, two) heating furnaces 10 lifted to a predetermined height h may be arranged adjacent to each other in series. As a result, two or more cassettes d can be continuously heated, and the heat treatment of the object to be processed can be efficiently performed.

Further, two or more cassettes d may be adjacent to and fixed to one heating furnace 10. As shown in FIG. 10, two cassettes d may be placed adjacent to each other in one heating furnace 10, fixed, and heated. As a result, similarly to the above, it becomes possible to continuously heat two or more cassettes d, and the heat treatment of the object to be processed can be efficiently performed.

Further, when the dry distillation gas is generated from the object to be processed, the fuel gas for heating the heating furnace 10 may be minimized to save energy by effectively using the dry distillation gas. For example, as shown in FIG. 1, one cassette d is contained in one heating furnace 10, the object b to be processed in the cassette d is aluminum, and it takes four hours to heat-treat the aluminum, and the heat-treated aluminum. It is assumed that dry distillation gas is generated from. In this case, in the heat treatment of aluminum for the first 2 hours, the heating furnace 10 is heated by a burner using fuel gas, but dry distillation gas is generated from the aluminum 2 hours after heating. Therefore, in the heat treatment of aluminum for the last 2 hours, the generated dry distillation gas is added to the fuel gas to ignite the burner, so that the amount of fuel gas used can be reduced and the heat treatment of aluminum can be performed.

Further, as shown in FIG. 10, in a configuration in which two cassettes d are fixed adjacent to one heating furnace 10, even when carbonization gas is generated from an object to be processed such as aluminum, energy saving is similarly performed. Can be achieved. For example, first, the first cassette d1 is put in one position (for example, the position on the left side) of the heating furnace 10, and the heating furnace 10 is heated by a burner using fuel gas. Here, in the heat treatment for the first 2 hours, the heating is performed by the fuel gas, but the dry distillation gas is generated from the object to be treated 2 hours after the heating. Therefore, when the dry distillation gas is generated, next, the second cassette d2 is put in the other position (for example, the position on the right side) of the heating furnace 10, and the dry distillation gas is used together with the fuel gas to operate the heating furnace 10. Heat. This makes it possible to heat the two cassettes d by using the carbonization gas generated from the object to be processed of the first cassette d1 as an auxiliary. Then, when the heat treatment of the first cassette d1 is completed, the first cassette d1 is taken out and moved to the cooling zone C for natural cooling. However, since the dry distillation gas is generated from the second cassette d2, the dry distillation gas is generated here. By using it, energy saving can be achieved. Further, a third cassette d3 is prepared separately, and after the first cassette d1 is taken out, the third cassette d3 is placed in one position of the heating furnace 10 in which the first cassette d1 is installed. Therefore, it is possible to continuously heat the plurality of cassettes d by continuously using the carbonization gas. If the fourth cassette d4 is present, the fourth cassette d4 will be put in the place after the second cassette d2 is taken out. In particular, in the present invention, since it is not necessary to cool the heating furnace 10, it is possible to realize such continuous heating of two or more objects to be processed.

Now, examples and comparative examples of the present invention will be specifically described. For example, in the conventional heat treatment apparatus 2 according to Comparative Example 1, as shown in FIG. 11, an opening is provided on the side surface of the heating furnace 20, and the opening is opened and closed by the door 20a. A carbonization chamber is provided inside the heating furnace 20. Therefore, it is necessary for the worker to put the basket into the carbonization chamber in the heating furnace 20 by using a forklift with the door 20a opened in advance, so that the worker needs a high skill as described above. Or, an accident occurred in which the basket collided with the opening of the heating furnace 20.

On the other hand, in the heat treatment apparatus 1 according to the first embodiment of the present invention, as shown in FIG. 12, an opening is provided in the bottom surface of the heating furnace 10, and the box c is installed by using the mobile lifting apparatus 11. The cassette d of the lid 10b is treated as a carbonization chamber. Then, in the first embodiment, the cassette d is raised from directly below the heating furnace 10, the lower lid 10b is installed at the opening of the heating furnace 10, and the cassette d is put inside the heating furnace 10. That is, the heating furnace 10 and the cassette d in the carbonization chamber are completely separated and handled. Therefore, the operator does not need a high level of skill, and the mobile lifting device 11 can semi-automatically move the lower lid 10b, so that the cassette d in the carbonization chamber can be safely put into the heating furnace 10. At the time of cooling, the cassette d may be taken out from the heating furnace 10 and cooled at another place, so that the cassette d can be cooled safely. Further, since it is not necessary to cool the heating furnace 10 and another cassette d can be put into the heating furnace 10 as it is, batch operation can be performed almost without interruption while the heating furnace is hot.

In the embodiment of the present invention, the heat treatment apparatus 1 is configured to include each control unit, but it can also be provided as a heat treatment method having a step of executing each control unit.

As described above, the heat treatment apparatus and the heat treatment method according to the present invention are useful not only for the carbonization apparatus but also for any heat treatment apparatus for heating the object to be processed at a high temperature. Allows batch operation with almost no interruption while the heat treatment furnace is hot, without cooling the heat treatment chamber, and separates the carbonization chamber containing the object to be treated from the heating furnace and cools the separated carbonization chamber as it is. Therefore, it is effective as a heat treatment apparatus and a heat treatment method capable of safely cooling the object to be processed inside the carbonization chamber.

1 Heat treatment equipment 10 Heating furnace 11 Mobile lifting device 12 Loading device 13 Transporting device 14 Stand 15 Rail 101 Moving ascending control unit 102 Fixed heating control unit 103 Downward moving control unit 104 Repeating control unit

Claims (3)

A heat treatment device having a rectangular parallelepiped shape, having an opening on the bottom surface, and having a heating furnace fixed at a predetermined height from the ground.
A sealed container in which the object to be processed is covered with a box, which is installed on the lower lid for the bottom surface of the heating furnace, is configured as a cassette in the carbonization chamber, and the cassette is placed directly under the heating furnace by using a mobile lifting device. A movement rise control unit that moves the cassette to the opening of the heating furnace and raises the lower lid of the cassette.
When the lower lid rises to the opening of the heating furnace, the lower lid is fixed to the heating furnace, and the heating furnace is heated at a predetermined temperature for a predetermined time, and a fixed heating control unit.
When the heating of the heating furnace is completed, the lower lid is released from the fixing to the heating furnace, the cassette is lowered to just below the heating furnace by using the mobile elevating device, and the cassette is moved to the heating furnace. A descending movement control unit that moves the cassette to a location different from the installation location and naturally cools the cassette.
A heat treatment device equipped with. When the cassette moves to the different location, the mobile lifting device is used to move the next lower lid of the next cassette to just below the heating furnace and the next lower lid to the opening of the heating furnace. A repetitive control unit for raising the heating furnace, fixing the heating furnace, and heating the heating furnace is further provided.
The heat treatment apparatus according to claim 1. It is a heat treatment method of a heat treatment apparatus having a rectangular parallelepiped shape, a bottom surface as an opening, and a heating furnace fixed at a predetermined height from the ground.
A sealed container in which the object to be processed is covered with a box, which is installed on the lower lid for the bottom surface of the heating furnace, is configured as a cassette in the carbonization chamber, and the cassette is placed directly under the heating furnace by using a mobile lifting device. The movement rise control step of moving the cassette to the opening of the heating furnace and raising the lower lid of the cassette to the opening of the heating furnace.
When the lower lid rises to the opening of the heating furnace, the lower lid is fixed to the heating furnace, and the heating furnace is heated at a predetermined temperature for a predetermined time, and a fixed heating control step.
When the heating of the heating furnace is completed, the lower lid is released from the fixing to the heating furnace, the cassette is lowered to just below the heating furnace by using the mobile elevating device, and the cassette is moved to the heating furnace. A downward movement control process that moves the cassette to a location different from the installation location and naturally cools the cassette.
A heat treatment method comprising.

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