JP6928745B2 - スピンオン・カーボンの平坦化のための技術 - Google Patents
スピンオン・カーボンの平坦化のための技術 Download PDFInfo
- Publication number
- JP6928745B2 JP6928745B2 JP2017562993A JP2017562993A JP6928745B2 JP 6928745 B2 JP6928745 B2 JP 6928745B2 JP 2017562993 A JP2017562993 A JP 2017562993A JP 2017562993 A JP2017562993 A JP 2017562993A JP 6928745 B2 JP6928745 B2 JP 6928745B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light source
- substrate
- etchback
- soc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 8
- 229910052799 carbon Inorganic materials 0.000 title claims description 8
- 238000000034 method Methods 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 48
- 238000004377 microelectronic Methods 0.000 claims description 18
- 239000002904 solvent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 12
- 230000003993 interaction Effects 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 11
- 238000002955 isolation Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000011368 organic material Substances 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 238000003302 UV-light treatment Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 23
- 229910052760 oxygen Inorganic materials 0.000 description 22
- 239000001301 oxygen Substances 0.000 description 22
- 230000008569 process Effects 0.000 description 20
- 239000007789 gas Substances 0.000 description 16
- 239000010408 film Substances 0.000 description 14
- 239000012528 membrane Substances 0.000 description 14
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 9
- 239000003642 reactive oxygen metabolite Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000001354 calcination Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- -1 oxygen radicals Chemical class 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000002250 absorbent Substances 0.000 description 3
- 230000002745 absorbent Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- WVYWICLMDOOCFB-UHFFFAOYSA-N 4-methyl-2-pentanol Chemical compound CC(C)CC(C)O WVYWICLMDOOCFB-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000003837 high-temperature calcination Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Formation Of Insulating Films (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
Claims (19)
- マイクロエレクトロニクス基板を支持するように構成された基板ホルダと、
前記マイクロエレクトロニクス基板の表面に向けて紫外(UV)光を放射するように構成された光源と、
前記光源と前記マイクロエレクトロニクス基板との間に配置された隔離窓と、
前記隔離窓と前記マイクロエレクトロニクス基板との間の領域にガスを注入するように構成されたガス分配ユニットと、
前記マイクロエレクトロニクス基板のUV光処理の不均一性を低減するように構成されたエッチバック・レベリング機構と、
を備え、
前記ガス分配ユニットは、前記光源とタンデムで移動するように構成されている、
装置。 - 前記エッチバック・レベリング機構は、前記隔離窓の少なくとも一部に配置された光相互作用層をさらに備える、
請求項1記載の装置。 - 前記光相互作用層は、拡散、反射、及び吸収から成る群から選択された相互作用機構による光エネルギーと相互作用するように構成された層をさらに備える、
請求項2記載の装置。 - 前記エッチバック・レベリング機構は、
前記隔離窓上に配置された複数の第1光相互作用領域と、
前記隔離窓上に配置された複数の第2光相互作用領域と、をさらに備え、
前記複数の第2光相互作用領域は、前記複数の第1光相互作用領域と異なる少なくとも1つの光学特性を有する、
請求項2記載の装置。 - 前記隔離窓は1つ以上の第1領域を備え、前記第1領域は1つ以上の第2領域よりも大きい厚さを有する、
請求項1記載の装置。 - 前記エッチバック・レベリング機構は、前記光源と前記マイクロエレクトロニクス基板との間に配置されたアパーチャデバイスをさらに備える、
請求項1記載の装置。 - 前記エッチバック・レベリング機構は、前記マイクロエレクトロニクス基板を前記光源と関連して移動するように構成されている、
請求項1記載の装置。 - 前記エッチバック・レベリング機構は、前記マイクロエレクトロニクス基板を軸周りに回転するように構成されている、
請求項7記載の装置。 - 前記エッチバック・レベリング機構は、前記マイクロエレクトロニクス基板を前記光源が配置される平面に対して平行な平面に沿ってスライドする構成されている、
請求項7記載の装置。 - 前記エッチバック・レベリング機構は、前記マイクロエレクトロニクス基板の前記表面に関して前記光源を移動するように構成されている、
請求項1記載の装置。 - 前記隔離窓は前記光源に連結されており、前記マイクロエレクトロニクス基板に関して前記光源と移動するように構成されている、
請求項10記載の装置。 - 前記ガス分配ユニットは、前記隔離窓と前記マイクロエレクトロニクス基板との間の領域の外部でエッチ液成分を生成するように構成されている、
請求項1記載の装置。 - 前記ガス分配ユニットは、
前記光源に平行に隣接して配置されたガス分配ノズルを備え、
前記ガス分配ノズルは、
前記光源の少なくとも一部に沿って延在するノズル長と、前記ノズル長に沿って分布する複数のガス出口とを有する、
請求項1記載の装置。 - 前記基板ホルダは、複数の加熱素子さらに備え、
前記加熱素子は、前記マイクロエレクトロニクス基板に対する加熱プロファイルを動的に制御するように構成されている、
請求項1記載の装置。 - 請求項1乃至14いずれか1項記載の装置を用いて行われる方法であって、
パターニングされた下地層の上に配置された第1層を有する基板を受け取るステップであって、前記第1層は第1不均一性を有する表面を備える、ステップと、
第1焼成のために、前記第1層に対する溶解度制御に適した第1温度に前記第1層を曝露するステップと、
前記第1層を液体溶媒に曝露することによって、前記第1層の少なくとも一部を除去するステップと、
前記第1層の第2コーティングを塗布するステップと、第2焼成のために、前記第1層を硬化させる第2温度に前記第1層を曝露するステップであって、前記第1層は、前記第1不均一性より小さい第2不均一性を有する表面を備える、ステップと、
を含む方法。 - 前記第1層は有機材料を含む、
請求項15記載の方法。 - 前記有機材料はスピンオン・カーボン(SOC)を含む、
請求項16記載の方法。 - 前記第1温度は150℃から250℃の間の範囲にある、
請求項15記載の方法。 - 前記第2温度は500℃から700℃の間の範囲にある、
請求項15記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562170024P | 2015-06-02 | 2015-06-02 | |
US62/170,024 | 2015-06-02 | ||
PCT/US2016/035438 WO2016196739A1 (en) | 2015-06-02 | 2016-06-02 | Techniques for Spin-on-Carbon Planarization |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018520511A JP2018520511A (ja) | 2018-07-26 |
JP6928745B2 true JP6928745B2 (ja) | 2021-09-01 |
Family
ID=57441883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017562993A Active JP6928745B2 (ja) | 2015-06-02 | 2016-06-02 | スピンオン・カーボンの平坦化のための技術 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20160358786A1 (ja) |
JP (1) | JP6928745B2 (ja) |
KR (1) | KR102538281B1 (ja) |
CN (2) | CN107710384A (ja) |
TW (1) | TWI608521B (ja) |
WO (1) | WO2016196739A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11315810B2 (en) * | 2019-05-17 | 2022-04-26 | Taiwan Semiconductor Manufacturing Company Ltd. | Apparatus for wafer processing |
US11476108B2 (en) * | 2020-08-03 | 2022-10-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Spin on carbon composition and method of manufacturing a semiconductor device |
CN113126441B (zh) * | 2021-03-29 | 2024-06-07 | 上海华力集成电路制造有限公司 | 一种改善光刻前层薄膜吸附水导致光刻缺陷的优化方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236119A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | 加熱処理装置 |
US5679610A (en) * | 1994-12-15 | 1997-10-21 | Kabushiki Kaisha Toshiba | Method of planarizing a semiconductor workpiece surface |
JP3166065B2 (ja) * | 1996-02-08 | 2001-05-14 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
WO1999009587A2 (en) * | 1997-08-13 | 1999-02-25 | Applied Materials, Inc. | Method of etching copper for semiconductor devices |
JP2002176046A (ja) * | 2000-12-07 | 2002-06-21 | Oki Electric Ind Co Ltd | 真空紫外光cvd装置 |
JP4369091B2 (ja) * | 2001-07-18 | 2009-11-18 | 東京エレクトロン株式会社 | 基板処理方法 |
US7160813B1 (en) * | 2002-11-12 | 2007-01-09 | Novellus Systems, Inc. | Etch back process approach in dual source plasma reactors |
JP2005197348A (ja) * | 2004-01-05 | 2005-07-21 | Semiconductor Leading Edge Technologies Inc | 半導体製造装置及び半導体装置の製造方法 |
JP2006114848A (ja) * | 2004-10-18 | 2006-04-27 | Apex Corp | 紫外線照射処理装置、紫外線照射処理方法及び半導体製造装置 |
CN102947919B (zh) * | 2010-06-23 | 2015-11-25 | 日产化学工业株式会社 | 碳化硅基板研磨用组合物和碳化硅基板的研磨方法 |
JP2012049305A (ja) * | 2010-08-26 | 2012-03-08 | Hitachi High-Technologies Corp | 真空紫外光処理装置 |
US8865599B2 (en) * | 2011-11-08 | 2014-10-21 | Brewer Science Inc. | Self-leveling planarization materials for microelectronic topography |
US9287154B2 (en) * | 2012-06-01 | 2016-03-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | UV curing system for semiconductors |
US8753449B2 (en) * | 2012-06-25 | 2014-06-17 | Applied Materials, Inc. | Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film |
JP5934665B2 (ja) * | 2013-02-22 | 2016-06-15 | 東京エレクトロン株式会社 | 成膜方法、プログラム、コンピュータ記憶媒体及び成膜システム |
CN104051298B (zh) * | 2013-03-14 | 2017-09-19 | 台湾积体电路制造股份有限公司 | 可精细控制温度的晶圆加热系统 |
EP2981985B1 (en) * | 2013-04-03 | 2021-03-10 | Brewer Science, Inc. | Highly etch-resistant polymer block for use in block copolymers for directed self-assembly |
JP5783472B2 (ja) * | 2013-06-10 | 2015-09-24 | ウシオ電機株式会社 | アッシング装置 |
JP5917459B2 (ja) * | 2013-08-05 | 2016-05-18 | 東京エレクトロン株式会社 | 紫外線照射装置及び基板処理方法 |
US9349604B2 (en) * | 2013-10-20 | 2016-05-24 | Tokyo Electron Limited | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications |
US10170354B2 (en) * | 2015-04-12 | 2019-01-01 | Tokyo Electron Limited | Subtractive methods for creating dielectric isolation structures within open features |
-
2016
- 2016-06-02 WO PCT/US2016/035438 patent/WO2016196739A1/en active Application Filing
- 2016-06-02 CN CN201680037660.4A patent/CN107710384A/zh active Pending
- 2016-06-02 TW TW105117330A patent/TWI608521B/zh active
- 2016-06-02 CN CN202210741104.2A patent/CN115101447A/zh active Pending
- 2016-06-02 KR KR1020177036849A patent/KR102538281B1/ko active IP Right Grant
- 2016-06-02 US US15/171,188 patent/US20160358786A1/en not_active Abandoned
- 2016-06-02 JP JP2017562993A patent/JP6928745B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
TW201705214A (zh) | 2017-02-01 |
KR20180004827A (ko) | 2018-01-12 |
TWI608521B (zh) | 2017-12-11 |
CN115101447A (zh) | 2022-09-23 |
US20160358786A1 (en) | 2016-12-08 |
CN107710384A (zh) | 2018-02-16 |
KR102538281B1 (ko) | 2023-05-30 |
WO2016196739A1 (en) | 2016-12-08 |
JP2018520511A (ja) | 2018-07-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI608871B (zh) | Substrate processing method, substrate processing apparatus, substrate processing system, and memory medium | |
US9741559B2 (en) | Film forming method, computer storage medium, and film forming system | |
US9530645B2 (en) | Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium | |
JP5484373B2 (ja) | パターン形成方法 | |
TWI538745B (zh) | 圖案形成方法、圖案形成裝置及電腦可讀取記憶媒體 | |
JP6928745B2 (ja) | スピンオン・カーボンの平坦化のための技術 | |
US20130284204A1 (en) | Method for uv based silylation chamber clean | |
TW201515086A (zh) | 基板處理方法及基板處理裝置 | |
US20150136186A1 (en) | System for processing substrates with two or more ultraviolet light sources that provide different wavelengths of light | |
US20110262870A1 (en) | Purge ring with split baffles for photonic thermal processing systems | |
JP5758846B2 (ja) | パターン形成方法、パターン形成装置、及びコンピュータ可読記憶媒体 | |
WO2018173344A1 (ja) | 露光装置、基板処理装置、基板の露光方法および基板処理方法 | |
US20120138084A1 (en) | Cleaning device using UV-ozone and cleaning method using the device | |
CN107833847B (zh) | 蚀刻装置、基板处理装置、蚀刻方法以及基板处理方法 | |
US20230004088A1 (en) | Apparatus and Method for Spin Processing | |
US11862457B2 (en) | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | |
JP2008141146A (ja) | 基材処理装置および基材処理方法 | |
JP5294678B2 (ja) | 露光装置、露光方法、及び表示用パネル基板の製造方法 | |
WO2022014323A1 (ja) | 基板処理方法および基板処理装置 | |
KR102217194B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR100834242B1 (ko) | 반도체 소자 제조용 설비 | |
JP2005183629A (ja) | 薄膜形成装置および薄膜形成方法 | |
JP2011158814A (ja) | ペリクル膜の製造方法および装置 | |
KR100664379B1 (ko) | 균일한 온도 분포를 갖는 베이크 장치 | |
KR20050109132A (ko) | 반도체 애싱 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190530 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200721 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201015 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201208 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210305 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210420 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20210517 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210517 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6928745 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |