JP6850818B2 - センサ装置 - Google Patents
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- JP6850818B2 JP6850818B2 JP2018568784A JP2018568784A JP6850818B2 JP 6850818 B2 JP6850818 B2 JP 6850818B2 JP 2018568784 A JP2018568784 A JP 2018568784A JP 2018568784 A JP2018568784 A JP 2018568784A JP 6850818 B2 JP6850818 B2 JP 6850818B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/80—Manufacturing details of magnetic targets for magnetic encoders
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Description
−読取ユニットが要求を送信する。
−計算ユニットは、2つのセンサシステムから位置情報を同期して要求する。
−計算ユニットは、2つの位置情報から新たな位置情報を計算する。
−新しい位置情報が読取ユニットに送り返される。
102 : 光学センサシステムの測定ユニット
103 : 処理部
104 : 回路
105 : 演算部
106 : データストリーム
200 : ハイブリッドゲージ
201 : 表面層
202 : 材料層
203 : 磁気センサシステムのゲージ
204 : キャリア層
205 : 接着材料
210 : ゲージ本体
220 : 光学センサシステムのゲージ
302 : キャリア要素
306 : 光学測定ユニットの測定表面からの距離
307 : 磁気測定ユニットの測定表面からの距離
308 : 共通の測定表面
400 : ゲージの信号の周期
401 : 光学センサシステムの位置データ
402 : 磁気センサシステムの位置データ
403 : 2つのゲージの信号の周期の遷移点までの最大距離の位置
405 : 2つのゲージの信号の周期の遷移点
406 : 2つのゲージの信号の周期の遷移点
Claims (14)
- 直線的又は回転的に移動可能な物体の絶対位置に関する測定データを検出するためのセンサ装置であって、
光学センサシステムと、
磁気センサシステムと、
計算ユニット(105)と、を備え、
前記光学センサシステムは、測定ユニット(102)と、前記測定ユニット(102)と協働するゲージ(220)とを有し、
前記光学センサシステムは、位置測定のためにゼロ次反射のみを使用し、前記光学センサシステムは、可動体の決定されるべき位置に応じて第1のセンサ出力信号(401)を発し、
前記磁気センサシステムは、測定ユニット(101)と、前記測定ユニットと協働するゲージ(203)とを有し、可動体の決定されるべき位置に応じて第2のセンサ出力信号(402)を発し、
前記光学センサシステムの前記ゲージ(220)と前記磁気センサシステムの前記ゲージ(203)とが共通のゲージ本体(210)に一体化され、
前記光学センサシステムの前記測定ユニット(102)と前記磁気センサシステムの前記測定ユニット(101)は、前記ゲージ本体(210)の表面に面するように、前記光学センサシステムの前記ゲージ(220)及び前記磁気センサシステムの前記ゲージ(203)が配置されており、
前記光学センサシステムは、前記磁気センサシステムよりも高い分解能を有し、1つの位置における前記磁気センサシステムの位置情報の最大偏差が、前記光学センサシステムの信号周期よりも小さく、
前記計算ユニット(105)は、前記第1のセンサ出力信号(401)及び前記第2のセンサ出力信号(402)を取得し、前記第1のセンサ出力信号(401)及び前記第2のセンサ出力信号(402)から組み合わせのセンサ出力信号を生成するために設けられ、前記第1のセンサ出力信号及び前記第2のセンサ出力信号に基づいて一意の絶対位置情報を計算することを特徴とするセンサ装置。 - 前記光学センサシステムの前記ゲージ(220)は、前記ゲージ本体(210)の共通の測定表面(309)の平面に配置されることを特徴とする請求項1に記載のセンサ装置。
- 前記磁気センサシステムの前記ゲージ(203)は、前記光学センサシステムの前記測定ユニット(102)及び前記磁気センサシステムの前記測定ユニット(101)と対向し、かつ、前記ゲージ本体(210)の共通の測定表面(309)から離間していることを特徴とする請求項1又は2に記載のセンサ装置。
- 前記磁気センサシステムからの前記センサ出力信号(402)は、前記光学センサシステムからの前記センサ出力信号(401)とは別のデジタルデータ形式であることを特徴とする請求項1〜3のいずれか一項に記載のセンサ装置。
- 前記光学センサシステムの前記ゲージ(220)の、最大延伸方向における幾何学的寸法は、前記磁気センサシステムの前記ゲージ(203)の、最大延伸方向における幾何学的寸法に本質的に対応することを特徴とする請求項1〜4のいずれか一項に記載のセンサ装置。
- 前記光学センサシステムが増分センサシステムであり、前記磁気センサシステムが絶対測定センサシステムであることを特徴とする請求項1〜5のいずれか一項に記載のセンサ装置。
- センサ装置の分解能が前記光学センサシステムの分解能と同一であることを特徴とする請求項1〜6のいずれか一項に記載のセンサ装置。
- 前記光学センサシステムの前記ゲージ(220)は、格子構造であって、1mmあたり3〜20本のラインがあることを特徴とする請求項1〜7のいずれか一項に記載のセンサ装置。
- 前記格子構造は、エッチング又はレーザによって製造されることを特徴とする請求項8に記載のセンサ装置。
- 前記光学センサシステムの前記ゲージ(220)用の材料の熱膨張係数が、前記磁気センサシステムの前記ゲージ(203)用の材料の熱膨張係数に本質的に対応することを特徴とする請求項1〜9のいずれか一項に記載のセンサ装置。
- 総合的な分解能は、線形位置測定においては100nmよりも高く、回転位置測定においては100μradよりも高いことを特徴とする請求項1〜10のいずれか一項に記載のセンサ装置。
- 前記光学センサシステムの前記測定ユニット(102)及び/又は前記磁気センサシステムの前記測定ユニット(101)が集積回路として実現されることを特徴とする請求項1〜11のいずれか一項に記載のセンサ装置。
- センサ装置の測定データ項目は、高次ユニットのデジタルデータ形式で送信されることを特徴とする請求項1〜12のいずれか一項に記載のセンサ装置。
- 請求項1〜13のいずれか一項に記載のセンサ装置を使用して直線的又は回転的に移動可能な物体の絶対位置に関する測定データを検出する方法であって、
両方のセンサシステムのセンサ出力信号(401、402)が、冗長性を高め、障害発生時に警告を生成するために、計算ユニット(105)において互いに比較されることを特徴とする測定データ検出方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016112062.6 | 2016-07-01 | ||
DE102016112062 | 2016-07-01 | ||
PCT/DE2017/100543 WO2018001416A1 (de) | 2016-07-01 | 2017-06-29 | Sensoreinrichtung |
Publications (2)
Publication Number | Publication Date |
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JP2019525157A JP2019525157A (ja) | 2019-09-05 |
JP6850818B2 true JP6850818B2 (ja) | 2021-03-31 |
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JP2018568784A Active JP6850818B2 (ja) | 2016-07-01 | 2017-06-29 | センサ装置 |
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US (1) | US10627263B2 (ja) |
EP (1) | EP3479069B1 (ja) |
JP (1) | JP6850818B2 (ja) |
CN (1) | CN109564108B (ja) |
WO (1) | WO2018001416A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112013768B (zh) * | 2019-05-29 | 2022-09-02 | 深圳市立林智感科技有限公司 | 用于位移测量的信号携带体装置、系统及设备 |
CN112033254B (zh) * | 2019-06-03 | 2022-06-24 | 西安铁路信号有限责任公司 | 一种检测线性往复运动零件位置的装置及方法 |
US20220373360A1 (en) * | 2021-05-19 | 2022-11-24 | Novanta Corporation | Position encoder with fusion of different sensor types |
Family Cites Families (16)
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DE2811807A1 (de) * | 1978-03-16 | 1979-09-20 | Joachim Dr Ing Wernicke | Digital-absoluter winkelkodierer nach dem nonius-prinzip |
US4991125A (en) | 1989-04-19 | 1991-02-05 | Mitutoyo Corporation | Displacement detector |
JPH05118879A (ja) * | 1991-10-29 | 1993-05-14 | Omron Corp | 位置検出装置 |
JP3471971B2 (ja) * | 1995-05-10 | 2003-12-02 | キヤノン株式会社 | 複合型のロータリーエンコーダ |
DE19520299A1 (de) | 1995-06-02 | 1996-12-05 | Bosch Gmbh Robert | Einrichtung zur Lageerkennung |
DE19727352A1 (de) * | 1996-07-10 | 1998-01-15 | Heidenhain Gmbh Dr Johannes | Verfahren zur Positionsbestimmung und hierzu geeignetes Meßsystem |
DE10050392A1 (de) | 2000-10-12 | 2002-04-18 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung |
US7027156B2 (en) * | 2002-08-01 | 2006-04-11 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
US7070405B2 (en) * | 2002-08-01 | 2006-07-04 | Molecular Imprints, Inc. | Alignment systems for imprint lithography |
FR2851650B1 (fr) * | 2003-02-25 | 2005-06-17 | Skf Ab | Dispositif de detection de parametre de rotation et palier a roulement. |
JP2005172696A (ja) * | 2003-12-12 | 2005-06-30 | Seiko Epson Corp | アブソリュートエンコーダ |
JP2009036637A (ja) | 2007-08-01 | 2009-02-19 | Sony Corp | 変位測定装置 |
DE102008022027A1 (de) * | 2008-05-02 | 2009-11-05 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP5553669B2 (ja) * | 2010-04-16 | 2014-07-16 | 株式会社ミツトヨ | 光学式絶対位置測長型エンコーダ |
JP6251126B2 (ja) * | 2014-06-11 | 2017-12-20 | Dmg森精機株式会社 | 変位検出装置 |
US10422666B2 (en) * | 2016-12-23 | 2019-09-24 | Mitutoyo Corporation | Electronic position encoder and method for reducing short range errors |
-
2017
- 2017-06-29 WO PCT/DE2017/100543 patent/WO2018001416A1/de unknown
- 2017-06-29 EP EP17743248.1A patent/EP3479069B1/de active Active
- 2017-06-29 CN CN201780049881.8A patent/CN109564108B/zh active Active
- 2017-06-29 US US16/313,037 patent/US10627263B2/en active Active
- 2017-06-29 JP JP2018568784A patent/JP6850818B2/ja active Active
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US20190234772A1 (en) | 2019-08-01 |
CN109564108B (zh) | 2021-07-27 |
CN109564108A (zh) | 2019-04-02 |
US10627263B2 (en) | 2020-04-21 |
EP3479069A1 (de) | 2019-05-08 |
EP3479069B1 (de) | 2020-09-16 |
WO2018001416A1 (de) | 2018-01-04 |
JP2019525157A (ja) | 2019-09-05 |
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