JP6846594B2 - Fan filter unit - Google Patents

Description

The present invention is installed in a clean room such as a liquid crystal panel factory where a clean environment is required, a semiconductor manufacturing apparatus which is a manufacturing facility, a clean booth, etc., and an air blower allows air containing dust and chemical components to pass through a filter. It relates to a fan filter unit that purifies and supplies purified air to the required space.

Conventionally, a fan filter unit is equipped with a filter that collects suspended dust, chemical components, and the like, and is used for the purpose of supplying purified air to an area that requires a clean environment. As a usage environment of the fan filter unit, it is often arranged in a clean room such as a liquid crystal panel factory, a semiconductor manufacturing apparatus which is a manufacturing facility, or a ceiling portion such as a clean booth.

In recent years, in manufacturing equipment, there are an increasing number of cases where a fan filter unit is arranged inside the manufacturing equipment in order to optimize the air passage according to the design of the equipment appearance and the manufacturing process. In addition, the shape of the fan filter unit tends to become more complicated according to the internal layout of the equipment.

The configuration of the conventional fan filter unit is shown in FIG. The fan filter unit 100 houses a blower unit 101 composed of a fan and a motor inside, and has an air supply port 102 at the top for communicating with the blower unit 101 and sucking air from an unpurified area such as outside air. A box-shaped chamber 103 having an open bottom is provided. The chamber 103 has a chamber bending portion 104 extending inward from the bottom edge portion, and the chamber bending portion 104 is provided with a chamber locking hole 105. A packing 106 for preventing air leakage is attached to the chamber bent portion 104, and the chamber bent portion 104 is connected to the plate-shaped cover 107. The cover 107 is provided with a cover locking hole 109 on the outer periphery that matches the chamber locking hole 105, and is fixed to the chamber 103 while crushing the packing 106 with a rod-shaped fastener 110 such as a nut and a screw or a rivet. The integrated chamber 103 and the inner wall of the cover 107 form a purification standby air passage 112.

The cover 107 is provided with a cover discharge port 111 in the center, and the cover discharge port 111 is crimped so as to face the filter air supply port 114 of the filter 113 that purifies the air in the purification standby air passage 112. The air purified by the filter is discharged from the filter exhaust port 115 provided below the filter.

FIG. 17 shows an example of installation in a conventional fan filter unit manufacturing facility. The conventional fan filter unit 100 is joined to the air supply port 102 provided in the chamber 103 and the air supply port 116 provided in the manufacturing equipment, and is installed in the manufacturing equipment 117.

The unpurified air sucked by the blower unit 101 is purified by the filter 113 and supplied to 117 in the manufacturing facility.

With the above configuration, the fan filter unit 100 purifies unpurified air such as outside air, and supplies purified air to a space that requires a clean environment. As a technique similar to the above fan filter unit 100, the publication described in Patent Document 1 is exemplified.

Japanese Unexamined Patent Publication No. 11-309325

Clean rooms such as semiconductor manufacturing equipment, clean booths, and LCD panel factories that require a clean environment require a fan filter unit to remove unpurified air with a filter and send it into a space that requires cleanliness. ..

Conventionally, since the fan filter unit has been used for purifying unclean air such as outside air and sending it into the apparatus, it is often mounted on the ceiling outside the manufacturing equipment. In recent years, the number of cases where the fan filter unit is placed inside the manufacturing equipment in order to optimize the air passage according to the design of the appearance of the manufacturing equipment and the manufacturing process is increasing, and the thickness is reduced according to the layout inside the manufacturing equipment. The shape of the fan filter unit is becoming more complicated due to requests.

Air is always sent by a fan into the purification standby air passage before passing through the filter to create positive pressure, so if there is a gap, unpurified air will leak out. To ensure airtightness, means such as welding each member without gaps or sealing the gaps between each member with a caulking material can be considered, but the more complicated the structure, the more time is required for the work. Leakage may occur due to human error such as insufficient ability of the worker or forgetting to work. Therefore, assembly is performed using packing that can ensure stable and reliable airtightness regardless of human ability, but if chamber locking holes, cover locking holes, and rod-shaped fasteners are present in the purification standby air passage, these are used. It is necessary to take measures to prevent communication, so a blind nut with a closed tip is attached to the chamber locking hole, and caulking is applied to the gap between the chamber diameter stop hole and the blind nut caulking part. Additional measures were needed to depend on it.

The present invention provides a fan filter unit that secures stable airtightness without depending on human ability and prevents unpurified air from leaking into the manufacturing apparatus while using packing for maintaining airtightness. Is.

In order to achieve the above object, the present invention includes a blower unit that sucks air from a non-purification region and blows air into a purification standby air passage, and a filter that purifies the air in the purification standby air passage and discharges it to the purification region. A chamber on which the filter is mounted, a chamber that engages with the cover to form an inner wall of the purification standby air passage between the cover and the filter, and a cover locking hole provided on the cover. A chamber locking hole provided in the chamber, a packing provided between the cover locking hole and the chamber locking hole to prevent air from leaking from the purification standby air passage, and the cover locking hole. A rod-shaped fastener that penetrates the chamber locking hole and crimps the cover, the packing, and the chamber is provided, and both ends of the rod-shaped fastener are located outside the purification standby air passage. The packing overlaps the first packing extending from the purification standby air passage side of the rod-shaped fastener to the outer peripheral side of the rod-shaped fastener, and the first packing only on the purification standby air passage side of the rod-shaped fastener. A fan filter unit equipped with a packing is used to achieve the intended purpose.

According to the present invention, it is possible to provide a fan filter unit that prevents contaminated air before being purified by a filter from flowing out into a manufacturing facility from a gap or the like of a locking tool joint.

Installation perspective view inside the manufacturing equipment Exploded view showing the component configuration of the fan filter unit Sectional view Exploded view Folded side explanatory cross section Side sectional view of manufacturing equipment Exploded view of fan filter unit with thin structure Thin structure Fan filter unit AA sectional view Thin structure fan filter unit AA cross-sectional view exploded view Explanatory cross-sectional view of the folding side of the thin structure fan filter unit Side view of the fixed state when the packing thickness is increased BB cross-sectional view when the packing thickness is increased Planar sectional view of the purification standby air passage of the packing reinforced structure Fixed state side view of packing reinforced structure CC sectional view of packing reinforced structure The figure which shows the structure of the conventional fan filter unit The figure which shows the installation example in the manufacturing equipment of the conventional fan filter unit

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings for the purpose of understanding the present invention. The following embodiments are examples that embody the present invention, and do not limit the technical scope of the present invention. In addition, the same signs are attached throughout all the drawings, and the second and subsequent explanations are omitted.
(Embodiment 1)
First, an example of internal installation of the fan filter unit 2 according to the present invention will be described with reference to a perspective view of installation inside the manufacturing equipment 1 of FIG.

A non-purifying area 3 exists below the manufacturing equipment 1, such as a dust generating device mounted below the inside of the manufacturing equipment 1 or an outside air air supply port below, and a product manufacturing space 4 requiring purified air supply above. It shows an installation example when it is held. Here, the non-purified region is a region that may contain fine dust or the like, and refers to a region such as dust in which an object to be purified by a filter described later may exist. On the other hand, the purification region is a region where the air discharged mainly through the filter exists, and refers to the region where the object to be purified is excluded by the filter.

A filter in which the back flat portion 5 of the fan filter unit 2 is installed side by side on one side wall inside the device, and the air in the unpurified area 3 below the device, that is, the unpurified air is supplied by the blower unit 6 and provided above. The purified air purified through 7 is discharged to the product manufacturing space 4. The details of the fan filter unit configuration will be described later with reference to the cross-sectional position diagram described in this figure.

FIG. 2 is an exploded view showing a component configuration of the fan filter unit 2.

The fan filter unit 2 has a chamber 8 capable of accommodating a blower unit 6 that sucks air from a non-purified region 3 such as outside air, and an opening 9 provided in the chamber 8 is covered with a plate-shaped cover 10. The cover 10 has an annular rectangular shape with an opening in the center.

The chamber 8 and the cover 10 are integrated with a packing A11 for ensuring airtightness, and form a purification standby air passage 12. The cover 10 has an exhaust port 13 and is connected to a filter 7 which is provided with a fibrous filter medium inside and collects or adsorbs contaminants.

Next, the details of the purification standby air passage 12 will be described. FIG. 3 is a cross-sectional view taken at the plane cross-sectional position shown in FIG. 1, and FIG. 4 is a cross-sectional exploded view.

The chamber 8 communicating with the blower unit 6 has a box shape and includes a bent portion 14 located outside the rising edge of the outer circumference. The bent portion 14 has a chamber locking hole 15, and a packing A11 for ensuring airtightness is attached. The packing A11 may be provided with a hole that matches the chamber locking hole 15 of the bent portion 14, or may be attached to the inside of the chamber locking hole 15 while avoiding the chamber locking hole 15.

Although the inside of the bent portion 14 is an opening, it is closed by the plate-shaped cover 10 to form a purification standby air passage 12. The outer periphery 16 of the cover of the cover 10 has a cover locking hole 17 that matches the chamber locking hole 15, and the chamber locking hole 15 and the cover locking hole 17 have a rod shape such as a nut, a screw, or a rivet. It is penetrated by the fastener 18 and fixed while crimping the packing A11.

If the chamber locking hole 15 and the cover locking hole 17 are arranged outside the purification standby air passage 12, the airtightness of the purification standby air passage 12, which is a positive pressure region, is tight even if it is penetrated by the rod-shaped fastener 18. It will be kept. In other words, since both ends of the rod-shaped fastener 18 are located outside the purification standby air passage 12, the minute gaps between the chamber locking hole 15 and the cover locking hole 17 only communicate with each other in the purification region and are airtight. It has nothing to do with the retention of.

The cover 10 is provided with an exhaust port 13 in the center, and is connected to a filter air supply port 19 provided in the filter 7 to supply purified air from a filter exhaust port 50 provided below the filter.

Further, as shown in the cross-sectional view for explaining the folding side of FIG. 5, if the outer peripheral end of the cover 10 is provided with the folding side 20 perpendicular to the chamber 8, the outer peripheral portion of the cover 10 is reinforced and the packing A11 is crushed. Can be obtained.
(Embodiment 2)
Subsequently, the thinning of the fan filter unit 2 will be described with reference to the side sectional view of the manufacturing equipment 1 shown in FIG.

In the first embodiment, the back surface flat portion 5 of the fan filter unit 2 is installed side by side on one side wall inside the manufacturing equipment 1, and the air blower unit 6 supplies air from the non-purification region 3 below the apparatus. Purified air is discharged to the product manufacturing space 4 through the filter 7 provided above. In order to widen the product manufacturing space 4, it is desired to reduce the product thickness 22 of the product manufacturing space portion 21 of the fan filter unit 2.

FIG. 7 is an exploded view showing a component configuration of the fan filter unit 23 having a thin structure.

In the second embodiment, the fan filter unit 2 has a chamber 8 capable of accommodating a blower unit 6 that sucks air from a non-purified region 3 such as outside air. The opening 9 provided in the chamber 8 is covered with a plate-shaped cover 10 via the packing A11. The cover 10 has a connection opening 24, and is connected to the filter arranging member 26 from the windward side of the connection opening 24 via the packing B25. The filter arranging member 26 has a box shape with an opening on the front surface, and has a purification opening 27 on the back surface. The filter arranging member 26 includes a filter arranging member bending portion 28 extending inward from the front edge portion of the filter arranging member 26, and the filter arranging member bending portion 28 is connected to the outer circumference of the connection opening 24 of the cover 10. To. As a result, the purification standby air passage 12 is formed on the inner wall of the chamber, the inner wall of the cover, and the outer wall of the filter arranging member (outside in the box shape).

On the back surface of the filter arranging member 26, the purification opening 27 is crimped to the filter air supply port 19. By fitting the filter 7 into the filter arranging member 26 and arranging the filter 7, it is possible to reduce the thickness of the product 22 at the product manufacturing space portion 21 of the fan filter unit 23 having a thin structure by the fitting depth. Become.

Next, the details of the purification standby air passage 12 of the fan filter unit 23 having a thin structure will be described. FIG. 8 is a cross-sectional view taken along the line AA of the fan filter unit 23 having a thin structure at the product manufacturing space portion 21 shown in FIG. 6, and FIG. 9 is a cross-sectional exploded view.

The chamber 8 communicating with the blower unit 6 has a box shape forming a part of the inner wall of the purification standby air passage 12, and is a bent portion located outside the outer peripheral rising edge, that is, outside the purification standby air passage 12. It has 14. The bent portion 14 has a chamber locking hole 15, and a packing A11 for ensuring airtightness is attached. The packing A11 may be provided with a hole that matches the chamber locking hole 15 of the bent portion 14, or may be attached to the inside of the chamber locking hole 15 while avoiding the chamber locking hole 15. The inside of the bent portion 14 is an opening, but is closed by the plate-shaped cover 10. The outer periphery 16 of the cover of the cover 10 has a cover locking hole 17 that matches the chamber locking hole 15, and the chamber locking hole 15 and the cover locking hole 17 have a rod shape such as a nut, a screw, or a rivet. It is penetrated by the fastener 18 and fixed while crimping the packing A11.

The cover 10 is provided with a connection opening 24 and is connected to the filter arranging member 26. The filter arranging member 26 has a box shape with an open front surface and a purification opening 27 on the back surface, and includes a filter arranging member bending portion 28 extending inward from the front edge portion of the filter arranging member 26. The filter arranging member bending portion 28 has a filter arranging member locking hole 29, and a packing B25 for ensuring airtightness is attached. The packing B25 may be provided with a hole that matches the filter arranging member locking hole 29, or may be attached to the outside of the filter arranging member locking hole 29 while avoiding the filter arranging member locking hole 29.

A cover opening locking hole 30 that matches the filter arranging member locking hole 29 is provided on the outer periphery of the connection opening 24 of the cover 10, and the filter arranging member locking hole 29 and the cover opening locking hole 30 are nuts. It is pierced by a screw or a rod-shaped fastener 18 such as a rivet, and is fixed while crimping the packing B25. As a result, the purification standby air passage 12 is formed on the inner wall of the chamber, the inner wall of the cover, and the outer wall of the filter arranging member. If the chamber locking hole 15, the cover locking hole 17, the filter arranging member locking hole 29, and the cover opening locking hole 30 are arranged outside the purification standby air passage 12, even if they are penetrated by the rod-shaped fastener 18. The airtightness of the purification standby air passage 12 that becomes positive pressure is maintained without any gap.

The filter arranging member 26 is provided with a purification opening 27, and is connected to the filter air supply port 19 provided in the filter 7 to supply purified air from the filter exhaust port 50 provided below the filter.

Further, as shown in FIG. 10, if the outer peripheral end of the cover 10 and the inner peripheral end of the opening are provided with a folding side 20 perpendicular to the chamber 8, the outer peripheral portion and the opening of the cover 10 are reinforced, and the packing A11 and the packing The effect of increasing the crushing force of B25 can be obtained.

Next, the airtightness strengthening structure of the fan filter unit 2 to which the packing is added will be described. First, as an example, FIG. 11 shows a fixed state diagram in the case where the thickness of the packing A11 provided between the outer circumference 16 of the cover and the bent portion 14 of the chamber 8 is increased by using the plate-shaped cover 10 having no folding edge. If the thickness of the packing A11 is increased and crushed, the airtightness is improved, but if the repulsive force of the packing A11 is increased and the strength of the bent portion 14 of the chamber 8 and particularly the outer peripheral portion 16 of the cover without folds is weak. The outer circumference 16 of the cover is deformed due to the repulsive force of the packing A11.
Since stress is concentrated on the outer peripheral side 31 of the rod-shaped fastener, as shown in the CC cross section, the distance between the members between the bent portion 14 of the chamber 8 and the outer peripheral portion 16 of the cover is narrow at the rod-shaped fastener adjacent portion 32. As shown in the BB cross section, the strength of the member such as the outer peripheral portion 16 of the cover is lost to the repulsive force of the packing A11 at the rod-shaped fastener non-adjacent portion 33, and the distance between the members between the bent portion 14 of the chamber 8 and the outer peripheral portion 16 of the cover is reduced. Become wider. On the other hand, on the purification standby air passage side 34 of the rod-shaped fastener, the members are widely communicated and the stress is dispersed, so that the amount of deformation is small. FIG. 12 shows the state of the packing A11 before fixing the chamber 8 and the cover 10 with the rod-shaped fasteners.

Next, FIG. 13 shows a plan sectional view of the purification standby air passage 12 when the second packing 35 is additionally stacked only on the purification standby air passage side 34 of the rod-shaped fastener. In this figure, the second packing is attached to the purification standby air passage side of the cover locking hole, and the packing is doubled to increase the thickness only on the purification standby air passage side of the first packing attached to the chamber bending part and the rod-shaped fastener. It is a thing.

Next, FIG. 14 shows the state of the fixed portion when the second packing 35 is added. Purification of the rod-shaped fastener Since the packing thickness is increased only on the standby air passage side 34, only the reaction force of the packing A11 is applied to the outer peripheral side 31 of the rod-shaped fastener, and the rod-shaped fastener non-adjacent portion 33 and the rod-shaped fastener are applied. Neither the fastener non-adjacent portion 33 is significantly deformed. As a result, the amount of deformation of the rod-shaped fastener non-adjacent portion 33 shown in the DD cross section and the rod-shaped fastener adjacent portion 32 shown in the EE cross section does not change significantly. The packing thickness is also increased on the purification standby air passage side 34 of the rod-shaped fastener, but the amount of deformation is reduced because the members are widely communicated and the stress is dispersed. Therefore, in this structure, the airtightness can be enhanced without causing an appearance defect. This structure is an example of the chamber bent portion and the cover outer peripheral portion shown in FIGS. 3 and 8, but the same effect can be obtained at the cover opening outer peripheral portion and the filter arrangement member bent portion shown in FIGS. 5 and 10. FIG. 15 shows the state of the packing A11 and the second packing 35 before fixing the chamber 8 and the cover 10 with the rod-shaped fasteners.

Therefore, in this structure, the airtightness can be enhanced without causing an appearance defect.

This structure is an example of the chamber bent portion and the cover outer peripheral portion shown in FIGS. 3 and 8, but the same effect can be obtained at the cover opening outer peripheral portion and the filter arrangement member bent portion shown in FIG.
(Summary of Embodiment)
The fan filter unit according to the present invention includes a blower unit that sucks air from a non-purification region and blows air into a purification standby air passage, a filter that purifies the air in the purification standby air passage and discharges the air to the purification region, and the filter. In the chamber to which the cover is attached, a chamber that engages with the cover to form an inner wall of the purification standby air passage between the cover and the filter, a cover locking hole provided in the cover, and the chamber. A provided chamber locking hole, a packing provided between the cover locking hole and the chamber locking hole to prevent air from leaking from the purification standby air passage, the cover locking hole and the chamber. A rod-shaped fastener that penetrates the locking hole and crimps the cover, the packing, and the chamber is provided, and both ends of the rod-shaped fastener are located outside the purification standby air passage.

Further, the chamber has a box shape with an open top surface, the inside of the box shape forms an inner wall of the purification standby air passage, and the chamber extends outward from the top surface edge portion in the box shape. A bent portion is provided, the chamber bent portion is provided with the chamber locking hole, and the cover has a plate shape and has a purification opening in which the filter is arranged in the center of the plate shape, and around the plate shape. The rod-shaped fastener includes the cover locking hole, and the rod-shaped fastener has a configuration in which the cover, the packing, and the chamber are crimped through the chamber bending portion extending to the outside and the cover locking hole. May be.

Further, the cover may be configured to include a folded side that is erected from the peripheral edge portion of the plate shape toward the chamber side.

Further, the rod-shaped fastener penetrating the cover locking hole and the chamber locking hole may be further provided with a second packing that overlaps with the packing only on the purification standby air passage side.

Further, the fan filter unit according to the present invention includes a blower unit that sucks air from a non-purification region and blows air into a purification standby air passage, and a filter that purifies the air in the purification standby air passage and discharges it to the purification region. A cover for mounting the filter, a chamber forming an inner wall of the purification standby air passage between the cover and the filter, a rod-shaped fastener for locking the cover and the chamber, and the purification standby air passage. The chamber is provided with a packing for preventing air from leaking from the chamber, and the chamber has a box shape with an open top surface, and the inside of the box shape forms an inner wall of the purification standby air passage, and the chamber of the chamber. The cover comprises a chamber bend extending outward from the edge of the top surface in the shape and a chamber locking hole provided in the chamber bend, and the cover provided a purification opening for arranging the filter. The filter arranging member includes the filter arranging member, the engaging member that engages with the chamber, and the filter arranging member has a box shape with an open top surface, and the outside of the box shape stands by for purification. The inner wall of the air passage is formed, the purification opening is formed on the bottom surface of the box shape of the filter arranging member, the filter arranging space in which the filter is arranged in the internal space of the box shape of the filter arranging member, and the filter arranging member. A cover bending portion extending inward in the box shape of the filter arranging member from the top edge portion and a cover locking hole provided in the cover bending portion are provided, and the engaging member has an annular rectangular shape. An outer peripheral locking hole for locking the chamber locking hole around the outer periphery of the annular rectangle, and an inner peripheral locking hole for locking the cover locking hole around the inner circumference of the annular rectangle. , The rod-shaped fastener penetrates the chamber locking hole and the outer peripheral side locking hole, crimps the engaging member, the packing, and the chamber, and the cover locking hole and the inside. The engaging member, the packing, and the filter arranging member may be crimped through the peripheral locking hole, and both ends of the rod-shaped fastener may be located outside the purification standby air passage.

Further, the engaging member may be configured to include a folded side that stands upright from the outer peripheral circumference of the annular rectangle toward the chamber side.

Further, the rod-shaped fastener penetrating the chamber locking hole and the outer peripheral side locking hole may be further provided with a second packing that overlaps with the packing only on the purification standby air passage side.

Further, the rod-shaped fastener penetrating the cover locking hole and the inner peripheral side locking hole may be further provided with a third packing that overlaps with the packing only on the purification standby air passage side.

The fan filter unit according to the present invention is useful as a fan filter unit mounted inside equipment such as a semiconductor manufacturing apparatus and a clean booth.

1 Manufacturing equipment 2 Fan filter unit 3 Non-purified area 4 Product manufacturing space 5 Back flat surface 6 Blower unit 7 Filter 8 Chamber 9 Opening 10 Cover 11 Packing A
12 Purification standby air passage 13 Exhaust port 14 Bending part 15 Chamber locking hole 16 Cover outer circumference 17 Cover locking hole 18 Rod-shaped fastener 19 Filter air supply port 50 Filter exhaust port 20 Folded side 21 Product manufacturing space part 22 Product thickness 23 Fan Filter unit 24 Connection opening 25 Packing B
26 Filter placement member 27 Purification opening 28 Filter placement member Bending part 29 Filter placement member Locking hole 30 Cover opening locking hole 31 Outer side of rod-shaped fastener 32 Rod-shaped fastener adjacent part 33 Rod-shaped fastener non-adjacent part 34 Rod-shaped fastener Purification standby air passage side 35 Second packing 100 Fan filter unit 101 Blower unit 102 Air supply port 103 Chamber 104 Chamber bending part 105 Chamber locking hole 106 Packing 107 Cover 109 Cover locking hole 110 Rod-shaped fastener 111 Cover discharge port 112 Purification Standby air passage 113 Filter 114 Filter air supply port 115 Filter exhaust port 116 Air supply port for manufacturing equipment 117 Inside the manufacturing equipment

Claims (3)

A blower unit that sucks air from the non-purified area and blows it out to the purification standby air passage,
A filter that purifies the air in the purification standby air passage and discharges it to the purification area.
The cover on which the filter is installed and
A chamber that engages with the cover to form an inner wall of the purification standby air passage between the cover and the filter.
The cover locking hole provided on the cover and
The chamber locking hole provided in the chamber and
A packing provided between the cover locking hole and the chamber locking hole to prevent air from leaking from the purification standby air passage, and
A rod-shaped fastener that penetrates the cover locking hole and the chamber locking hole and crimps the cover, the packing, and the chamber is provided.
Both ends of the rod-shaped fastener
Located outside the purification standby air passage ,
The packing is
The first packing from the purification standby air passage side of the rod-shaped fastener to the outer peripheral side of the rod-shaped fastener,
A fan filter unit including a second packing that overlaps with the first packing only on the purification standby air passage side of the rod-shaped fastener. The chamber
It has a box shape with an open top surface, and the inside of the box shape forms the inner wall of the purification standby air passage.
A chamber bending portion extending outward from the top edge portion in the box shape is provided.
The chamber bending part is
With the chamber locking hole
The cover is
A purification opening having a plate shape and arranging the filter in the center of the plate shape,
A cover locking hole is provided around the plate shape.
The rod-shaped fastener is
The fan filter unit according to claim 1, wherein the cover, the packing, and the chamber are crimped through the bent portion of the chamber extending to the outside and the cover locking hole. The cover is
The fan filter unit according to claim 2, further comprising a folded edge erected from the peripheral edge of the plate shape toward the chamber side.

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