JP6891260B1 - Airtight structure on the ceiling of an explosion-proof clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably secure airtightness of a gap portion between an outer peripheral end portion of a ceiling portion of an in-ceiling pressure chamber type explosion-proof clean room and a building component such as a wall material for a long period of time. To provide a ceiling airtight structure. SOLUTION: A fixing portion 30 fixed to one surface of a building constituent member (20) and a gap H1 formed from the fixing portion 30 in a substantially horizontal direction (T1, T2) to one surface of the building constituent member (20) are vertically installed. A spacer member 26 including a hanging portion 31 to be formed, a protruding portion 32 projecting from the lower end side of the hanging portion 31 below the ceiling portion 15 with a gap H2 formed between the ceiling portion 15 and the vertical direction T3, and a spacer member 26. , It extends in the substantially horizontal direction (T1, T2) along the outer peripheral end portion 15a of the ceiling portion 15. Further, a first airtight member 27 is interposed between the ceiling portion 15 and the projecting portion 32, and a second airtight member 28 is interposed between the building constituent member (20) and the hanging portion 31 to form a building. A third airtight member 29 is interposed between the component member (20) and the fixing portion 30. [Selection diagram] Fig. 4

Description

The present invention relates to an airtight ceiling structure of an explosion-proof clean room.

Conventionally, in various technical fields such as semiconductors, liquid crystals, precision equipment, pharmaceutical manufacturing, research and development, outside air and return air are treated with external air conditioners, air conditioners, high-performance filters, etc. for purification, temperature control, etc. A clean room is used that is configured to supply and circulate conditioned air and maintain the work space in a clean positive pressure environment.

On the other hand, in an explosion-proof clean room that handles explosive and ignitable chemicals and articles such as flammable gas and reactive gas due to the reaction of chemicals, high airtightness of the work space is required as well as explosion-proof.

Further, in the technical fields related to the manufacture of semiconductors and liquid crystals, there is an increasing demand for explosion-proof super clean rooms that require a high level of cleanliness, such as satisfying the standards of Class1 to Class3 of ISO14644-1 as well as explosion-proof and airtightness. ing.

Here, in Patent Document 1, in a general clean room, the airtightness between the wall side end portion of the ceiling portion of the suspended ceiling provided with the lattice-shaped ceiling base and the ceiling material (ceiling panel) and the wall material. The structure for ensuring the above is disclosed.

The ceiling airtight structure of the clean room of Patent Document 1 is formed in a substantially U shape with a vertical piece, a lower horizontal piece, and an upper horizontal piece, and the upper end side of the vertical piece is fixed to a wall material with screws. The parting green of the aluminum spacer member arranged between the outer peripheral end of the ceiling and the wall material is interposed between the lower horizontal piece and the lower surface of the ceiling material to block this gap. It is configured to include the silicon caulking of the airtight member 1 and the silicon caulking of the second airtight member interposed between the lower end side of the vertical piece and the wall material to block the gap portion.

Japanese Unexamined Patent Publication No. 11-93321

On the other hand, in a general clean room, for example, a fan filter unit (hereinafter referred to as FFU) equipped with a high-performance filter such as a ULPA filter or a HEPA filter and a fan is supported on the ceiling base to form a ceiling portion, and the outside is formed. The air processed by the air conditioner or air conditioner is driven by a fan to supply air from the attic space, that is, from the ceiling pocket to the indoor work space through a high-performance filter.

However, when trying to adopt such a configuration in an explosion-proof clean room, for example, an FFU having a very large and heavy explosion-proof specification, which is more than twice as thick in the height direction as an FFU for a normal clean room, should be used. Is required. Therefore, an excessive height of the ceiling interior is required according to the thickness, which leads to an increase in cost and a decrease in structural space efficiency.

In addition, the FFU with explosion-proof specifications has low quietness, and its laying rate (the area where FFUs are installed with respect to the area (total area) where FFUs can be installed on the ceiling excluding necessary equipment such as ceiling bases and equipment with explosion-proof specifications (total area) Increasing the ratio of the FFU installation area) causes the inconvenience of generating noise that hinders work in the work space.
In an explosion-proof super clean room where high cleanliness is required as well as explosion-proof, the effect of noise becomes more serious because the laying rate of explosion-proof FFU is designed to approach 100%.

For these reasons, it is not realistic to install an explosion-proof FFU on the ceiling of a suspended ceiling in an explosion-proof clean room including an explosion-proof super clean room, and other methods and means for ensuring cleanliness are strongly required. Was there.

On the other hand, the inventor of the present application uses the space behind the ceiling as a pressure chamber and supports a filter (including a unit equipped with a high-performance filter and no fan) on the ceiling base instead of the FFU to prevent explosion. It has been found that the above inconvenience can be solved by configuring the ceiling of the clean room.

That is, the inventor of the present application is a ceiling portion consisting of a grid-like ceiling base and an explosion-proof filter installed by supporting the ceiling base with a plurality of hanging bolts connected to the upper building frame such as the floor slab on the upper floor. Is suspended and supported to form an attic space, and the air processed by an external air conditioner and an air conditioner is supplied to use the attic space as a pressure chamber, and the space on the high pressure side is automatically filtered through the attic space. It has been found that the above inconvenience can be solved by supplying clean air to the work space on the low pressure side.

However, when an attempt is made to apply a structure that uses the space behind the ceiling as a pressure chamber to an explosion-proof clean room, it is possible to ensure airtightness in the gap between the outer peripheral end of the ceiling and the wall surface of the wall material. A new challenge has arisen that it is difficult.

That is, when applying a structure that uses the space behind the ceiling as a pressure chamber to an explosion-proof clean room, the gap between the outer peripheral end of the ceiling and the wall surface of the wall material has a higher degree of airtightness (blocking property, It was confirmed by the diligent research of the inventor of the present application that airtightness) is required.
For example, in the case of adopting the airtight structure disclosed in Patent Document 1, since the pressure on the ceiling back space side is higher than that on the work space side, the fixed portion where the upper end side of the vertical piece of the parting edge is fixed to the wall material ( Pressurized air from the vertical piece of the parting edge and the wall material) fills the gap between the lower end side of the vertical piece of the parting edge and the wall material into the silicon caulking (second airtight member). It has been confirmed by the diligent research of the inventor of the present application that the pressing action is applied from above and the silicon caulking in the gap portion is deformed and the airtightness is impaired at an early stage.

Therefore, it is very important to ensure airtightness in the pressure chamber type explosion-proof clean room in the ceiling, and the airtightness of the gap between the outer peripheral end of the ceiling and the wall material (building component) is maintained for a long period of time. There was an urgent need to develop a method that can secure a stable structure, that is, a highly reliable airtight structure.

One aspect of the ceiling airtight structure of the explosion-proof clean room of the present invention is an in-ceiling pressure chamber type explosion-proof clean room that uses the ceiling pocket space partitioned by the ceiling as a pressure chamber, and an outer peripheral end portion of the ceiling. It is a structure for ensuring airtightness between the outer peripheral end portion and one surface of a building component member facing in a substantially horizontal direction, from a fixing portion fixed to one surface of the building component member and the fixing portion. A hanging portion that is vertically hung with a gap substantially horizontal to one surface of the building component, and a protrusion with a vertical gap between the hanging portion and the ceiling portion below the ceiling portion from the lower end side of the hanging portion. A first spacer member including a projecting portion to be provided extends in a substantially horizontal direction along an outer peripheral end portion of the ceiling portion and is interposed between the ceiling portion and the projecting portion of the spacer member. Between the airtight member, the second airtight member interposed between one surface of the building component and the hanging portion of the spacer member, and between one surface of the building component and the fixed portion of the spacer member. It is configured to include a third airtight member to be interposed.

According to one aspect of the ceiling airtight structure of the explosion-proof clean room of the present invention, the ceiling pressure chamber system is provided by providing not only the first airtight member and the second airtight member but also the third airtight member in a suitable place. The airtightness of the gap between the outer peripheral edge of the ceiling of the explosion-proof clean room and the building components such as wall materials can be stably secured for a long period of time, and a highly reliable airtight structure can be realized. It will be possible.

It is a front view (vertical sectional view) which shows the explosion-proof clean room of one aspect. It is a plan sectional view (ceiling looking-up view) which shows one aspect of the explosion-proof clean room, and the ceiling part (ceiling base). It is a perspective view which shows the ceiling base of the ceiling part of one aspect. (A) is a vertical sectional view showing the ceiling airtight structure of the explosion-proof clean room of one aspect, and (b) is a perspective view showing the screw fixing mechanism of the spacer member of the ceiling airtight structure of the explosion-proof clean room of one aspect. (A) is a front view (elevation view) showing a wall material and a ceiling portion airtight structure of one aspect of an explosion-proof clean room, and (b) is a view showing an S portion of (a), and is a joint portion of a wall panel. It is a plan sectional view which shows the connecting part of a spacer member. It is a vertical sectional view which shows the modification example of the ceiling part airtight structure of the explosion-proof clean room of one aspect. It is a perspective view from the front side and the upper side of the wall material which shows the connecting part of the spacer member adjacent to each other of the ceiling part airtight structure in the corner part of the explosion-proof clean room of one aspect. It is a vertical sectional view which shows the connecting part of the spacer member adjacent to each other in the ceiling part airtight structure of the explosion-proof clean room of one aspect.

Hereinafter, the ceiling airtight structure of the explosion-proof clean room according to the embodiment will be described with reference to FIGS. 1 to 8.

First, the explosion-proof clean room 1 of the present embodiment is an explosion-proof clean room including an explosion-proof super clean room. As shown in FIG. 1, the attic space 2 is used as a pressure chamber and the filter 4 is integrated with the ceiling base 3. Air A supplied to the attic space 2 through the external air conditioner 5 and the air conditioner 6 is processed by the filter 4 and supplied to the indoor work space 7, and the air in the work space 7 is supplied through the floor 8 and the like. By taking A out to the outside and returning the air to the air conditioner 6, a series of circulation paths are formed to circulate the indoor air A.

More specifically, in the air conditioning system of the explosion-proof clean room 1, an air conditioner 6 for indoor load processing and an external air conditioner 5 for outside air load processing are installed in the wall shaft 19, and these air conditioners 6 and external air conditioner 5 are used. The treated air A is sent from the wall shaft 19 to make the ceiling space 2 higher than the work space 7, and the clean air A (SA) is passed through a plurality of filters 4 while using the ceiling space 2 as a pressurizing chamber. It is configured to supply air to the work space 7.

The suspended ceiling structure 10 provided in the explosion-proof clean room 1 of the present embodiment to form the ceiling space 2 is a so-called system ceiling or grid ceiling, and its specific configuration is shown in FIGS. 1, 2, and 2. As shown in 3, a plurality of mains formed in a substantially inverted T-shape in cross section, extended in one horizontal direction T1 and arranged at predetermined intervals in another direction T2 orthogonal to one direction T1. A bar 11 and a plurality of hanging bolts 12 arranged so that the upper end is fixed to the upper structure of the building and the lower end side is connected to the main bar 11, and both ends are attached to the adjacent main bar 11 extending in the other direction T2. Each of them is connected and bridged by using a connecting metal fitting, and is arranged in a unidirectional T1 at a predetermined interval in a grid pattern (omitted) consisting of a plurality of sub-bars 13, a plurality of main bars 11, and a plurality of sub-bars 13. It is composed of a plurality of explosion-proof filters 4 that are integrally attached to the ceiling base 3 (including a grid pattern).

The ceiling portion 15 is composed of a grid-shaped ceiling base 3 and a plurality of filters 4, and necessary equipment (not shown) such as an explosion-proof lighting device is attached to the ceiling portion 15.

The filter 4 equipped with a high-performance filter such as a ULPA filter or a HEPA filter is an abbreviated square having a size corresponding to an opening 16 formed by an adjacent main bar 11 and an adjacent sub bar 13 of a grid-like ceiling base 3. It is formed in a box shape, and is installed in the plurality of openings 16 so as to be placed on the overhanging portions of the inverted T-shaped main bar 11 and sub bar 13 protruding in the substantially horizontal direction, respectively. At this time, as shown in FIG. 4A, the upper surface which is the support surface of each of the overhanging portions of the adjacent main bar 11 and the adjacent sub bar 13 forming the opening 16 and the outer peripheral edge side of the substantially square box-shaped filter 4. An airtight member 17 for installing a filter is interposed so that a gap is not formed between the filter 4 and the lower surface of the filter 4 to ensure the airtightness of this portion, and the filter 4 is installed so as to close each opening 16.

When the explosion-proof clean room 1 of the present embodiment is an explosion-proof super clean room, for example, a plurality of filters 4 are installed on the ceiling base 3 so that the laying rate is 100%, but the laying rate is not necessarily 100%. Good.

Further, as shown in FIG. 5A (FIGS. 1, 2, and 4A), the explosion-proof clean room 1 of the present embodiment uses a wall panel 21 in which the wall material 20 is an explosion-proof finishing panel. Is formed. The wall material 20 is formed by arranging a plurality of wall panels 21 side by side in the horizontal direction and filling a joint portion 22 extending in the vertical direction T3 between adjacent wall panels 21 with a sealing material 23.

On the other hand, the ceiling airtight structure 25 of the explosion-proof clean room 1 of the present embodiment has the outer peripheral end portion 15a of the ceiling portion 15 and the outer peripheral end portion 15a in a substantially horizontal direction (as shown in FIGS. 1 and 4A). It is a structure for ensuring airtightness with the wall surface of the wall material 20 facing T1 and T2).

In the present embodiment, the wall material 20 will be described below assuming that the building constituent member facing the outer peripheral end portion 15a of the ceiling portion 15 in the substantially horizontal direction (T1, T2) is the wall material 20. It does not have to be limited to, and may be a beam material or a pillar material. In the present embodiment, it is assumed that the outer peripheral end portion 15a of the ceiling portion 15 is formed by the main bar 11 arranged on the outer periphery of the ceiling portion 15, but the outer peripheral end portion of the ceiling portion 15 is formed by a ceiling material such as a ceiling panel. The portion 15a may be formed. Further, the above-mentioned "substantially horizontal direction" means a lateral direction (T1, T2) including a horizontal direction.

As shown in FIG. 4A, the airtight ceiling portion 25 of the explosion-proof clean room of the present embodiment is fixed to the wall surface of the wall material 20 and is arranged between the outer peripheral end portion 15a of the ceiling portion 15 and the wall material 20. Airtightness between the spacer member 26 to be provided, the outer peripheral end portion 15a of the ceiling portion 15 and the wall material 20, in other words, at least the first airtight member 27 and the second for ensuring the airtightness and the airtightness. The airtight member 28 and the third airtight member 29 are provided.

The spacer member 26 is made of metal, for example, and has a fixing portion 30 fixed to the wall surface of the wall material 20 and a gap H1 from the fixing portion 30 in a substantially horizontal direction (T1, T2) to the wall surface of the wall material 20. A hanging portion 31 to be vertically provided, and a protruding portion 32 protruding from the lower end side of the hanging portion 31 below the ceiling portion 15 with a gap H2 in the vertical direction T3 and the ceiling portion 15 formed. Has been done.

In the spacer member 26 of the present embodiment, the fixing portion 30, the hanging portion 31, and the protruding portion 32 are separate bodies.

As shown in FIGS. 4A and 4B, the fixing portion 30, that is, the member constituting the fixing portion is, for example, an extruded product made of aluminum, and is formed in a square tubular shape having a rectangular cross section. A plurality of fixing portions 30 are provided on each of the pair of left and right side wall portions at predetermined intervals in the length direction along the axis O1 direction of the square tubular fixing portion 30 having through holes penetrating from the outer surface to the inner surface. ing.

The fixing portion 30 is arranged so that the side surface of the one side wall portion faces the wall surface of the wall material 20, and the axis line O1 direction is directed in the substantially horizontal direction (T1, T2) along the outer peripheral end portion 15a of the ceiling portion 15 and the wall surface. , The through hole is fixed to the wall material 20 with a screw as a screw insertion hole. When fixing the one side wall portion of the fixing portion 30 to the wall material 20, the shaft portion and the head of the screw 33 are passed through the through holes of the other side wall portion, and the shaft of the screw 33 is passed through the through hole of the one side wall portion. The head of the screw 33 is locked to the inner surface of the one side wall portion by screwing it into the wall material 20 while inserting the portion.

The hanging portion 31 and the protruding portion 32, that is, the members constituting the hanging portion 31 and the protruding portion 32 are, for example, extruded products or bent products made of aluminum, and are formed in a plate shape and a substantially L-shaped cross section. There is. A plurality of through holes penetrating from the outer surface, which is the front surface, to the inner surface, which is the back surface, are provided on the upper end side of the hanging portion 31 at predetermined intervals in the length direction.

The upper end portion of the hanging portion 31 extends and penetrates in a substantially horizontal direction (T1, T2) along the outer peripheral end portion 15a of the ceiling portion 15 and the wall surface while keeping the back surface in surface contact with the side surface of the other side wall portion of the fixing portion. The hole is screwed to the wall material 20 as a screw insertion hole and fixed to the fixing portion 30.

That is, in the present embodiment, as shown in FIGS. 4A and 4B, the fixing portion 30 is fixed to the wall material 20 by the screw 33, and the hanging portion 31 is fixed to the fixing portion 30 and the wall material 20 by the screw 36. It is stuck.

In a state where the hanging portion 31 is fixed to the fixing portion 30 with screws, the hanging portion 31 is arranged so that the lower end portion side thereof protrudes downward from the lower surface on the outer peripheral end portion 15a side of the ceiling portion 15, and the lower end portion of the hanging portion 31. The protruding portion 32 protruding from the side in the substantially horizontal direction (T1, T2) is arranged so that a predetermined gap H2 is formed between the upper surface thereof and the lower surface of the ceiling portion 15 on the outer peripheral end portion 15a side.

The first airtight member 27 is, for example, silicon caulking of a sealing material, and is interposed between the ceiling portion 15 and the protruding portion 32 of the spacer member 26 so as to block the gap H2 portion to ensure airtightness. It is provided in.

The first airtight member 27 is, for example, a round bar-shaped backup material 34 having a substantially circular cross section, such as a foaming body, in a substantially horizontal direction along the outer peripheral end portion 15a of the axial direction O2 ceiling portion 15 which is the length direction thereof. By inserting it into the gap H2 between the ceiling portion 15 and the protruding portion 32 of the spacer member 26 toward (T1, T2) and filling the gap space partitioned by the backup material 34 with the sealing material (27). It is provided so as to block the gap H2 portion and ensure airtightness.

In the present embodiment, in FIG. 4A, the outer peripheral end portion 15a of the ceiling portion 15 is formed by the main bar 11 of the ceiling base 3, and the gap between the lower surface of the ceiling base 3 and the protruding portion 32 of the spacer member 26. Although H2 is shown so as to be blocked by the first airtight member 27 to ensure airtightness, a ceiling material (not shown) such as a ceiling panel in which the outer peripheral end portion 15a of the ceiling portion 15 is supported by the ceiling base 3 is used. When formed, of course, the gap H2 between the ceiling surface on the lower surface of the ceiling material and the protruding portion 32 of the spacer member 26 is blocked by the first airtight member 27 to ensure airtightness. do it.

The second airtight member 28 is, for example, silicon caulking of a sealing material, which is interposed between the wall surface of the wall material 20 and the hanging portion 31 of the spacer member 26, and blocks the gap H1 portion to ensure airtightness. It is provided to do so.

The second airtight member 28 is a backup material 35 having a round bar shape such as a foam body and a substantially circular cross section, and the axial direction O3, which is the length direction thereof, is substantially horizontal so as to be along the outer peripheral end portion 15a of the ceiling portion 15. It is inserted into the gap H1 between the wall surface of the wall material 20 and the hanging portion 31 of the spacer member 26 in the direction (T1, T2), and the gap space partitioned by the backup material 35 is filled with the sealing material (28). As a result, the gap H1 portion is blocked to ensure airtightness.

As a result, the first airtight member 27 is disposed at least on the protruding portion 32 of the gap H2 between the protruding portion 32 of the spacer member 26 and the ceiling portion 15, and is provided with the second airtightness. The member 28 is arranged at least on the lower end side of the hanging portion 31 of the gap H1 between the hanging portion 31 of the spacer member 26 and the wall surface of the wall material 20, and the first airtight member 27 and the second airtight member. Each of the 28 is exposed to the work space 7 side on the indoor side partitioned by the ceiling portion 15.

The third airtight member 29 is, for example, a viscoelastic body (adhesive) such as butyl rubber having high adhesiveness at least during construction, and is a side surface of one side wall of the fixing portion 30 of the spacer member 26 and a wall surface of the wall material 20. It is provided so as to block the gap H3 in this portion to ensure airtightness.

The third airtight member 29 is, for example, butyl rubber formed in a band shape, and when the fixing portion 30 is fixed to the wall surface of the wall material 20 by screwing, the side surface of one side wall portion of the fixing portion 30 or the side surface of the fixing portion 30 in advance. The fixing portion 30 is attached to the predetermined position of the wall material 20 by adhering it to a predetermined position on the wall surface of the wall material 20, and is interposed between the side surface of one side wall portion of the fixing portion 30 and the wall surface of the wall material 20.

Further, as shown in FIG. 4B, in the third airtight member 29, the fixing portion 30 is screwed to the wall material 20 and is strongly attached to the side surface of one side wall portion of the fixing portion 30 and the wall surface of the wall material 20. It adheres tightly and enters the through hole provided on one side wall of the fixing portion 30 to adhere to the screw 36. As a result, the third airtight member 29 ensures that the gap H3 between the side surface of one side wall of the fixing portion 30 and the wall surface of the wall material 20 and the gap of the through hole portion are blocked.

An airtight member (adhesive) such as butyl rubber, which has high adhesiveness at least during construction, is placed between the side surface of the other side wall portion of the fixing portion 30 of the spacer member 26 and the back surface of the hanging portion 31. (Not shown) may be provided so as to ensure the airtightness of this portion.

Further, in the present embodiment, since the spacer member 26 is made of aluminum, welding cannot be performed. Therefore, as shown in FIGS. 4A and 4B, the fixing portion 30, the hanging portion 31, and the protruding portion 32 of the spacer member 26 are formed. Although it is assumed that the connection is fixed by screwing, if welding is possible depending on the material of the member, it may be connected by other means such as welding. Further, as shown in FIG. 6, it is not necessary to limit the fixing portion 30 of the spacer member 26 to the hanging portion 31 and the protruding portion 32 into separate bodies. The fixing portion 30 does not necessarily have to be formed in a square tubular shape, and may have another shape such as a plate shape.

Here, as shown in FIG. 7, at the entrance corner 40 where the wall panels 21 of the adjacent wall materials 20 intersect, such as the corner portion of the explosion-proof clean room 1, the one is installed on one of the adjacent wall materials 20 (20a). It is necessary to connect the spacer member 26 of No. 1 and the other spacer member 26 installed on the other wall material 20 (20b). In the present embodiment, as shown in FIG. 8, for example, a spacer member 41 for the inside corner, which is bent and formed according to the angle of the inside corner 40 and has an L-shape in a plan view, is used, and the spacer for the inside corner is used. The connecting member 42 is used while abutting one end 41a of the member 41 and the end 26a of one spacer member 26, the other end 41b of the spacer member 41 for the inside corner and the end 26a of the other spacer member 26, respectively. To connect.

For example, the connecting member 42 includes a vertical piece 42a and a horizontal piece 42b and is formed in a substantially L-shaped cross section, and the vertical pieces 42a are overlapped on the back surface of the hanging portion 31 on the end side of the adjacent spacer members 26 and 41, respectively. , Are fixed to the hanging portions 31 on the end portions (26a and 41a, 26a and 41b) of the adjacent spacer members 26 and 41, respectively, by screwing or the like. A viscoelastic body (adhesive) such as butyl rubber is interposed between the vertical piece 42a of the connecting member 42 and the hanging portion 31 of the spacer members 26 and 41 as a fourth airtight member 38 to improve the airtightness of this portion. It is preferable to secure it.

As a result, the adjacent spacer members 26 and 41 are integrally connected via the vertical piece 42a of the connecting member 42 in a state where the ends (26a and 41a, 26a and 41b) are butted against each other. Further, with the spacer members 26 and 41 connected to each other by the connecting member 42, the lateral pieces 42b of the connecting member 42 project from the end portions (26a and 41a, 26a and 41b) of the adjacent spacer members 26 and 41. It is arranged below the lower surface of the 32 so as to overlap with a predetermined gap H4 in the vertical direction T3.

Then, a backup material 43 having a round bar shape such as a foaming body and a substantially circular cross section is inserted into the gap H4 between the horizontal piece 42b of the connecting member 42 and the protruding portion 32 of each of the spacer members 26 and 41, and this backup material is inserted. The gap space partitioned by 43 is filled with a sealing material for the sixth airtight member 44 such as silicon caulking. As a result, the gap H4 (H1) portion is blocked to ensure airtightness.

Even if it is not the inside corner of the wall as shown in FIG. 7, it is conceivable that one wall surface of the explosion-proof clean room 1 is long in the horizontal direction and it is necessary to install the spacer member 26 having a unit length while connecting the spacer member 26. .. Also in this case, for example, the connecting members 42 are used to connect the ends of the spacer members 26, 26 adjacent to each other while abutting each other, and the horizontal piece 42b of the connecting member 42 and the protruding portion 32 of the spacer members 26, 26 are connected to each other. The backup material 43 may be inserted into the gap H4 (H1) between them, and the sealing material of the fifth airtight member 44 may be filled.

As described above, as shown in FIG. 4A, in the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, the ceiling portion 15 is interposed between the ceiling portion 15 and the protruding portion 32 of the spacer member 26. In addition to the first airtight member 27, the second airtight member 28 interposed between the wall surface of the wall material 20 and the hanging portion 31 of the spacer member 26, one side wall portion of the fixing portion 30 of the spacer member 26. It is configured to include a third airtight member 29 interposed between the side surface and the wall surface of the wall material 20.

As a result, even when the structure that uses the attic space 2 as a pressurized chamber is applied to the explosion-proof clean room 1, the pressurized air A from the attic space 2 side indicated by the arrow in FIG. 4A is generated. It is blocked by the third airtight member 29 and can prevent the second airtight member 28 from being pressed from above.

Therefore, according to the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, the pressurized air A from the ceiling back space 2 side acts as in the conventional case, causing deformation of the second airtight member 28 and the like. The airtightness of the airtight member 28 of 2 is not impaired at an early stage, and between the outer peripheral end portion 15a of the ceiling portion 15 of the explosion-proof clean room 1 of the pressure chamber type in the ceiling and the building constituent material such as the wall material 20. The airtightness of the gap portion can be stably ensured for a long period of time, and a highly reliable airtight structure can be realized.

In the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, the first airtight member 27 such as silicon caulking and the second airtight member 28 are each partitioned by the ceiling 15 on the 7 side of the work space (indoor). It is exposed to the ceiling.

As a result, when the first airtight member 27 and the second airtight member 28 are deformed such as thinning due to aged deterioration or the like, the worker does not enter the ceiling space 2 and the work space 7 is viewed from the side. It becomes possible to replace the airtight member 27 of 1 and the second airtight member 28, that is, perform seal maintenance.

In the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, by using butyl rubber (viscoelastic body) as the third airtight member 29, the fixing portion 30 of the spacer member 26 is screwed to the wall material 20 of the building constituent member. The butyl rubber can be stopped and the butyl rubber can be crushed so that the side wall of the one side wall of the fixing portion 30 of the spacer member 26 and the wall surface of the wall material 20 can be strongly adhered to each other.
This makes it possible to easily and suitably secure the airtightness of the third airtight member 29.

Here, when butyl rubber is used as the third airtight member 29, the fixing portion 30 of the spacer member 26 is screwed to the wall material 20 of the building constituent member and the butyl rubber is crushed, so that the fixing portion 30 of the spacer member 26 is fixed. It protrudes outward from between the side surface of the one side wall portion and the wall surface of the wall material 20. When butyl rubber having high adhesiveness protrudes during construction in this way, it is difficult to cleanly remove the protruding unnecessary butyl rubber, and the protruding black or other butyl rubber may impair the appearance from the work space side. ..

On the other hand, in the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, a second airtight member having a color suitable for the interior of the explosion-proof clean room is located between the wall surface of the wall material 20 and the hanging portion 31 of the spacer member 26. Since the 28 is interposed, even when a viscoelastic body such as butyl rubber is used for the third airtight member 29, the unnecessary portion of the protruding third airtight member 29 can be seen from the work space 7 side. There is no.
As a result, the appearance from the work space side can be appropriately maintained even if the unnecessary third airtight member 29 that protrudes is left behind.

As shown in FIG. 5A, in the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, the wall material 20 arranges a plurality of wall panels 21 in the horizontal direction and is between adjacent wall panels 21. The joint portion 22 extending in the vertical direction T3 is filled with the sealing material 23. For this reason, the sealing material 23 of the joint portion 22 may be deformed due to aged deterioration or the like, and a gap may be formed at the intersection where the fixing portion 30 of the spacer member 26 and the joint portion 22 of the wall material 20 overlap.

On the other hand, the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment uses a viscoelastic body such as butyl rubber as the third airtight member 29, and therefore, as shown in FIG. 5B, a wall material. Even when the sealing material 23 of the joint portion 22 of 20 is deformed such as thinning, it is possible to prevent a gap from being formed in this portion due to the deformation followability of the third airtight member 29.
This makes it possible to realize a more reliable airtight structure.

In the ceiling airtight structure 25 of the explosion-proof clean room of the present embodiment, the fixing portion 30 of the spacer member 26 is formed in a square tubular shape, so that the fixing portion 30 as shown in FIG. 6 is formed in a plate shape, for example. It is possible to more easily secure the rigidity (proof stress) of the fixed portion 30 as compared with the case where the fixed portion 30 is used.
As a result, it is possible to prevent the fixing portion 30 from being deformed when the fixing portion 30 is screwed to the wall material 20, and the gap H3 between the fixing portion 30 and the wall material 20 is ensured by the third airtight member 29. Moreover, it can be easily and suitably blocked.

By the way, when connecting the sub-bar 13 to the main bar 11 to construct (form) the grid-like ceiling base 15, the end of the sub-bar 13 is abutted against the side surface of the main bar 11 and connected via the connecting metal fittings. Of course, it is also important to ensure the airtightness of the parts.

The ceiling airtight structure (25) of the portion where the end portion of the sub bar 13 is abutted against the side surface of the main bar 11 and is connected is, for example, a viscoelastic body (adhesive or the like) such as butyl rubber having high adhesiveness at least during construction. An airtight member) is provided between the end of the sub bar 13 and the side surface of the main bar 11 to block the gap in this portion to ensure airtightness.

Further, when adopting a configuration in which a viscoelastic body such as butyl rubber is interposed between the end portion of the sub bar 13 and the side surface of the main bar 11, all the main bars 11 are assembled in advance and straightened in a plan view. A plurality of sub-bars 13 arranged side by side on the line are attached in order (see FIG. 2). At this time, the installation work of the plurality of sub-bars 13 arranged side by side in a straight line is performed in a straight line from the central portion side of the ceiling portion 15, that is, the central portion side of the ceiling base 3, as shown by the broken line arrow in FIG. It is preferable to sequentially attach a plurality of sub-bars 13 toward both outer peripheral portions of the above to complete the grid-shaped ceiling base 3.

In this way, when a plurality of sub-bars 13 are sequentially attached from the central portion side of the ceiling portion 15 toward both outer peripheral portions on a straight line, the attachment position of the sub-bars 13 approaches the outer peripheral portion side of the ceiling portion 15. Since the thickness of the viscoelastic body interposed between the end of the sub bar 13 and the side surface of the main bar 11 gradually increases, the abutting force (pressing pressure) between the end of the sub bar 13 and the side surface of the main bar 11 increases. Ceiling. Therefore, as the installation of the sub-bar 13 progresses, the adhesive force of the viscoelastic body interposed between the end portion of the sub-bar 13 and the side surface of the main bar 11 acts preferably.
This makes it possible to suitably secure the airtightness between the end portions of all the sub bars 13 and the side surfaces of the main bar 11.

Further, when connecting the end portions of the main bars 11 having a unit length, it is desirable to distribute and attach the main bars 11 from the central portion side to both outer peripheral portions for the same reason as described above.
This makes it possible to suitably ensure the airtightness of the end connections between all the main bars 11.

Although one embodiment of the ceiling airtight structure of the explosion-proof clean room according to the present invention has been described above, the present invention is not limited to the above-described embodiment and can be appropriately changed without departing from the spirit of the present invention.

1 Explosion-proof clean room (explosion-proof clean room)
2 Attic space (ceiling pocket)
3 Ceiling base 4 Filter 7 Work space (indoor)
10 Suspended ceiling structure (suspended ceiling)
11 Main bar 13 Sub bar 15 Ceiling 15a Outer peripheral edge 16 Ceiling base opening (filter installation position)
20 Wall material 21 Wall panel 22 Joint 23 Sealing material 25 Explosion-proof clean room ceiling airtight structure 26 Spacer member 27 First airtight member 28 Second airtight member 29 Third airtight member 30 Fixed part 31 Hanging portion 32 Protruding part H1 to H4 Gap T1 One direction (approximately horizontal direction)
T2 Other direction (approximately horizontal direction)
T3 vertical direction

Claims (3)

The outer peripheral end of the ceiling of the in-ceiling pressure chamber type explosion-proof clean room that uses the ceiling space partitioned by the ceiling as a pressure chamber, and the building components that face the outer peripheral end in a substantially horizontal direction. It is a structure to ensure airtightness with one side,
A fixing portion formed in a square tubular shape having a rectangular cross section, which is fixed to one surface of the building component,
A hanging portion formed separately from the fixed portion and vertically hung from the fixed portion with a gap substantially horizontal to one surface of the building constituent member.
The ceiling portion includes a spacer member that is integrally formed with the hanging portion and is formed from a lower end side of the hanging portion to a lower portion of the ceiling portion with a protruding portion that protrudes from the ceiling portion with a vertical gap. Extends approximately horizontally along the outer edge of the
A first airtight member interposed between the ceiling portion and the protruding portion of the spacer member,
A second airtight member interposed between one surface of the building component and the hanging portion of the spacer member, and
A third airtight member, which is a band-shaped viscoelastic body having high adhesiveness, is interposed between one surface of the building constituent member and a fixed portion of the spacer member.
The ceiling of the explosion-proof clean room is airtight. The first airtight member and the second airtight member are each exposed to the indoor side partitioned by the ceiling portion.
The ceiling airtight structure of the explosion-proof clean room according to claim 1. The wall material, which is a building component, is formed by arranging a plurality of wall panels side by side in the horizontal direction and filling joints extending in the vertical direction between adjacent wall panels with a sealing material.
The ceiling airtight structure of the explosion-proof clean room according to claim 1 or 2.

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