JP5529517B2 - Closed booth and substrate processing system - Google Patents

Description

  The present invention relates to a sealed booth that forms a sealed work space inside, and in particular, a sealed type that forms a sealed environment required for the device by surrounding the device used in a clean room. The present invention relates to a booth and a substrate processing system using such a sealed booth.

  Conventionally, a clean booth surrounding a device used in a clean room is made of stainless steel after forming a frame structure by assembling a plurality of aluminum frames (bone members) using means such as bolting or welding. A structure in which a panel member made of aluminum, aluminum, or resin is attached to the frame structure is employed. Furthermore, in such a clean booth, a system is adopted in which a HEPA filter unit with a fan is assembled on the ceiling of the booth to make the booth space a clean environment (see, for example, Patent Document 1).

  By using such a conventional clean booth, a clean environment (for example, class 100 to 1000) required for the apparatus can be formed in the clean booth, and a predetermined work process by the apparatus can be performed. .

Japanese Patent No. 4089036 JP 2004-174659 A

  In recent years, as technological innovation of products manufactured in a clean room advances, environmental conditions required for processing apparatuses used in the manufacturing process of products are also diversifying. For example, in a substrate processing apparatus used in the manufacturing process of an organic EL display panel which is a kind of flat display panel, as a required environmental condition, in addition to a clean environment, Some require a low oxygen environment with a reduced oxygen concentration. More specifically, in a manufacturing process of an organic EL display panel, a solar cell, or the like, in a substrate processing apparatus called a coater that performs a coating process for forming a film by applying a coating liquid on a substrate such as a glass panel, As an environmental condition, an inert gas environment such as nitrogen gas is required in addition to a clean environment.

  In order to meet such a demand for nitrogen gas environment, the conventional clean booth needs to have a sealed structure, and the panel member or the like is sealed using a sealing member such as an O-ring with the frame being welded. Alternatively, it is conceivable to use a caulking agent to fill the gap.

  However, in a structure in which the frame is welded and an O-ring is used to seal the panel member, it is difficult to cope with a relatively large booth in which a substrate processing apparatus such as a coater is disposed. . In other words, the booth in which such a device is arranged inside is larger in size than a so-called glove box device (see, for example, Patent Document 2), and considering the workability of booth transportation and the like, It is desirable to assemble in a clean room. However, accompanying the on-site welding operation reduces workability in booth assembly and may cause a problem of particle generation in the clean room.

  Also, a structure in which a gap is filled with a caulking agent cannot be said to have good on-site workability, and a problem of generation of particles occurs due to deterioration of the caulking agent.

  Further, with such a conventional structure, there is a problem that it is difficult to attach / detach and disassemble the frame when performing maintenance work of the clean booth or moving work of the booth. In particular, when the frame is welded, it is almost impossible to detach and disassemble the frame, and particularly when particles are sealed using a caulking agent, such as particle processing during decomposition, That work becomes extremely difficult.

  Accordingly, an object of the present invention is to solve the above-mentioned problems, and it is possible to form a sealed work space inside the sealed booth that can surely realize a tight seal while improving workability in assembly. Another object of the present invention is to provide a substrate processing system using such a closed booth.

  In order to achieve the above object, the present invention is configured as follows.

  According to the first aspect of the present invention, there is provided a hermetic booth including a plurality of frame members coupled to each other and a plurality of panel members supported by the plurality of frame members, the first frame member, A second frame member connected to the frame member; an elastic member disposed at a connection portion between the first frame member and the second frame member; and sealing the connection portion; a first frame member; a second frame; The surface of each of the member and the elastic member is arranged between the panel sealing region formed continuously and the panel member, and continuously seals between the panel sealing region and the panel member. Provided is a closed booth having a connected sealing structure including a sealing member.

  According to the second aspect of the present invention, the concave portion into which the elastic member is inserted is formed at the connecting portion between the first frame member and the second frame member, and the elastic member is formed to protrude from the edge of the concave portion, The elastic member is elastically compressed and deformed in the depth direction of the recess by the panel member via the sealing member, so that the surfaces of the first frame member, the second frame member, and the elastic member are substantially the same. A sealed booth according to the first aspect is provided, in which panel sealing regions continuously connected at a height are formed.

  According to the third aspect of the present invention, the first frame member, the second frame member, and the elastic member form an adjacent panel extending region that seals an edge of at least two panel members. In the connecting portion between the first frame member and the second frame member, at least a portion between the sealing members disposed in the respective panel sealing regions is sealed by the elastic member. An enclosed booth according to an aspect is provided.

  According to the fourth aspect of the present invention, the first frame member is a connecting frame member that connects the second frame member and the third frame member in a state in which the second frame member and the third frame member are arranged in a direction orthogonal to each other, and the elastic member As a first elastic member that is disposed at a connecting portion between the connecting frame member and the second frame member and seals the connecting portion, and a connecting portion between the connecting frame member and the third frame member. And a second elastic member that seals the connecting portion, and the respective surfaces of the connecting frame member, the second frame member, the third frame member, the first elastic member, and the second elastic member are continuous. In any one of the first to third aspects, the space between the panel sealing area formed continuously and one panel member is continuously sealed by one sealing member. Provide the enclosed booth .

  According to the fifth aspect of the present invention, the sealed booth according to any one of the first to fourth aspects, an inert gas filling means for filling a space in the sealed booth with an inert gas, Provided is a substrate processing system including a substrate processing apparatus that is disposed in a closed booth filled with an inert gas and performs processing on a substrate.

  According to the present invention, since the elastic member is arranged at the connecting portion between the first frame member and the second frame member, the connecting portion between the frame members can be reliably sealed by the elastic member. Furthermore, between the panel member and the panel sealing region formed by continuously connecting the surfaces of the first frame member, the second frame member, and the elastic member that are connected and sealed to each other, and the panel member Since the sealing member is extended and arranged, the space between the panel sealing region and the panel member can be continuously sealed. Particularly, in the panel sealing region, the elasticity of the elastic member is effectively used by arranging the surface of the elastic member between the surface of the first frame member and the surface of the second frame member. And it can seal reliably between panel members. Therefore, the first and second frame members, the elastic members, the sealing members, and the panel members can be easily assembled, and the connection between the connecting portions of the frame members and the panel members can be reliably sealed to ensure the sealing performance. A secured sealed booth can be provided.

1 is a schematic external view of a sealed clean booth according to an embodiment of the present invention. A schematic perspective view of the corner connection part in an exploded state CC arrow view in the corner connection part of FIG. DD line arrow view in the corner connection part of FIG. Schematic perspective view of the corner joint from the inside of the clean booth in FIG. The figure which shows the arrangement | positioning relationship (outer seal structure) of the rubber member for sealing with respect to a block member Schematic explanatory diagram of a connected sealing structure using a rubber member for sealing and an O-ring Schematic explanatory diagram of a connected sealing structure using a rubber member for sealing and an O-ring The figure which shows the arrangement | positioning relationship (inner seal structure) of the rubber member for sealing with respect to a block member Schematic perspective view of disassembled state of T-shaped connecting part Schematic perspective view of assembled state of T-shaped connecting part EE arrow view in the T-shaped connection part of FIG.

  Embodiments according to the present invention will be described below in detail with reference to the drawings.

  FIG. 1 shows a schematic diagram of the appearance of a sealed clean booth 1 that is an example of a sealed booth according to an embodiment of the present invention. As shown in FIG. 1, the sealed clean booth 1 of the present embodiment has a box-like frame shape in which a plurality of frame members (bone members) arranged in the X direction, the Y direction, and the Z direction are connected to each other. And a plurality of panel members 3 fixed and supported on the frame structure 2 so as to cover a plurality of openings of the frame structure 2. Further, the connecting portion of each frame member and the space between the panel member 3 and the frame structure 2 are sealed (sealed) by a sealing member or the like as will be described later, and the rectangular parallelepiped internal space of the clean booth 1 However, it is in the state sealed with respect to the exterior of the clean booth 1. In FIG. 1, an X direction, a Y direction, and a Z direction are directions orthogonal to each other.

  As each frame member constituting the frame structure 2, for example, a metal member can be used as a rigid material that can be used in a clean environment, and is made of aluminum in consideration of cost and versatility. These members are used. Further, as the panel member 3, a member made of stainless steel, aluminum, or resin can be used, and a material can be set according to a required cleanliness level or other environmental conditions. Moreover, in order to make the inside of the clean booth 1 visible from the outside, a panel member formed of a transparent material may be used as the panel member 3.

  As shown in FIG. 1, as a typical type of the connection sealing structure of each frame member in the frame structure 2, there are roughly two types of connection sealing structures, a corner connection part A and a T-shaped connection part B. There is. Hereinafter, the frame member connection structure, the panel member 3 support structure, and the sealing structure (that is, the connection sealing structure) in the corner connection portion A and the T-shaped connection portion B will be described in detail with reference to the drawings.

  First, with respect to the structure of the corner connecting portion A, a schematic perspective view of the disassembled state is shown in FIG. 2, a CC arrow view at the corner connecting portion A is shown in FIG. 3, and a DD arrow view is shown. 4 shows. FIG. 5 shows a schematic perspective view (partially disassembled state) in which the corner connection portion A is viewed from the inside of the clean booth 1. 4 and 5, the detailed shape of the frame member and the like is shown in a simplified manner as compared with FIG.

  As shown mainly in FIG. 2 and FIG. 5, the frame structure 2 in the corner connection portion A includes three frame members 11, 12, 13 (arranged along the X direction, the Y direction, and the Z direction, respectively). It is an example of a second frame member or a third frame member.) And a corner block member 14 that connects these three frame members 11 to 13 to each other (an example of a first frame member and a connecting frame member). ).

  As shown in FIG. 2, the aluminum frame members 11 to 13 have a hollow cross-sectional shape, and a plurality of grooves (for example, the grooves 11 a) for attaching the panel member 3 to the outer peripheral surface thereof in the longitudinal direction. And a plurality of bolt connection holes (for example, bolt connection holes 11b) for connection to the block member 14 are formed in the cross-sectional portion thereof.

  The corner block member 14 has a substantially cubic shape formed of an aluminum material, and has three connection surfaces 14x, 14y, and 14z connected to the respective frame members 11 to 13 on its three surfaces. Yes. Bolt connection holes 14a for connecting through bolt connection holes (11b) of the frame members 11 to 13 and bolts are formed in the connection surfaces 14x, 14y, and 14z.

  The end surfaces of the respective frame members 11 to 13 are connected to each other by bolts (not shown) through bolt connection holes 14a and 11b in a state where the end surfaces of the frame members 11 to 13c are in contact with the connection surfaces 14x, 14y and 14z of the block member 14, respectively. Thereby, the frame structure 2 of the corner connection part A in which the frame members 11 to 13 are connected via the block member 14 is configured.

  As shown in FIG. 2, each connection surface 14x, 14y, 14z in the block member 14 is formed slightly smaller than the end surface of each frame member 11-13 connected. Therefore, in a state where the block member 14 and the frame members 11 to 13 are connected, the concave portion 15 is formed on the outer peripheral surface of the connecting portion between them. A rubber member 16 for sealing, which is an example of an elastic member, is inserted and disposed in the recess 15. The rubber member 16 for sealing has a substantially L-shape, and each recess 15 is sealed so as to seal the outer surface side of the clean booth 1 at each connecting portion between the frame members 11 to 13 and the block member 14. Inserted and placed inside. The sealed portion on the outer surface side of the clean booth 1 is, for example, the illustrated lower side portion and the right side portion in the connecting portion between the frame member 11 and the block member 14 in the X direction in FIG. 2, and the concave portion 15 corresponding to this portion. By inserting and arranging the L-shaped sealing rubber member 16 therein, these portions are sealed. In order to make it easier to understand the arrangement position of the sealing rubber member 16, a schematic exploded view of the block member 14 and the three sealing rubber members 16 is shown in FIG. The sealing rubber member 16 may be made of an elastic material. For example, a rubber material having a hardness of about 50 to 90 degrees is used, and the sealing rubber member 16 is inserted and disposed in the recess 15 without a gap. Is formed.

  Next, at the corner connection portion A, the three panel members 3 are fixed to the frame structure 2 having such a connection sealing structure so that the space between the panel member 3 and the frame structure 2 is ensured. The structure to be sealed will be described.

  In the DD line arrow view in the corner connection part A shown in FIG. 4, on the inner edge side surface of the frame structure 2, the surface of the frame member 11 in the X direction, the surface of the sealing rubber member 16, the block member 14, the surface of another sealing rubber member 16, and the surface of the frame member 13 in the Z direction are continuously formed in a substantially L-shaped region in the figure along the longitudinal direction of each frame member 11, 13. Is formed (a band-like region indicated by a dotted line in FIG. 4). A region on the frame structure 2 is defined as a panel sealing region R, and an O-ring 17 (an example of a sealing member) is disposed between the panel sealing region R and the panel member 3, thereby providing a panel sealing region. The space between R and the panel member 3 is continuously sealed. In FIG. 4, the sealing structure of the panel member 3 disposed on the XZ plane has been described as an example. However, the sealing structure of the panel member 3 disposed on another plane, for example, the YZ plane (or XY plane). The same applies to. In addition, as shown in FIG. 4, in the corner connection part A, the structure where the panel member 3 is arrange | positioned on each of three planes, XZ plane, YZ plane, and XY plane, is employ | adopted. FIG. 4 illustrates the structure of the frame structure 2 in a state where the panel member 3 disposed on the XZ plane is transmitted.

  On the edge of the panel member 3, a recess 3a (see FIGS. 3 and 4) for disposing the O-ring 17 is formed continuously along the periphery, that is, over the entire periphery. . The panel member 3 is releasably fixed to the frame members 11 to 13 using fixing means (not shown). When bolts and nuts are used as such fixing means, the grooves 11a of the frame members 11 to 13 are used as bolt fixing grooves. In the structure shown in FIG. 4, the frame members 11 and 13 correspond to the first frame member and the third frame member, and the sealing rubber member 16 and another sealing rubber member 16 are the first elastic member and the second elastic member. The block member 14 corresponds to a connecting frame member.

  In the present embodiment, an example in which an O-ring is used as a sealing member for sealing between the panel sealing region and the panel member is exemplified, but various other forms of members are used as the sealing member. Can be applied. That is, as the sealing member, a member having an elongated annular shape arranged along the entire periphery of the edge of the panel member 3 and having elasticity can be applied. In addition to the O-ring, an X-ring or the like may be applied as a sealing member.

  Here, the connection sealing structure using the sealing rubber member 16 and the O-ring 17 will be described in more detail with reference to schematic explanatory views shown in FIGS. 7A and 7B. 7A and 7B, in order to facilitate understanding of the connection sealing structure of the present embodiment, each constituent member such as a frame member and a block member is further schematically illustrated to conceptually illustrate the connection sealing structure. Show.

  FIG. 7A schematically shows, for example, a state where the connecting portion between the frame member 13 and the block member 14 in the Z direction is viewed from the X direction. As shown in FIG. 7A, a concave portion 15 (upper surface in the drawing) is formed in a connecting portion between the frame member 13 and the block member 14 that are connected to each other. A rubber member 16 for sealing is inserted and disposed in the recess 15. When the panel member 3 is not disposed and the frame member 13 and the block member 14 are not connected, the sealing rubber member 16 disposed in the recess 15 of the block member 14 is moved to the panel member 3 side. The sealing rubber member 16 is formed in a size and shape so as to project by the projecting height h and project by the projecting width w toward the frame member 13 side. That is, in a state where the sealing rubber member 16 is not elastically compressed and deformed, the sealing rubber member 16 has an opening edge of the concave portion 15 in the depth direction (the vertical direction in the drawing) and the width direction (the horizontal direction in the drawing). The rubber member 16 for sealing is formed so as to protrude from the portion.

  Thereafter, when the frame member 13 and the block member 14 are connected, the rubber member 16 for sealing that is protruded from the end surface of the block member 14 by the protruding width w is elastically compressed and deformed. Furthermore, as shown in FIG. 7B, when the panel member 3 is arranged via the O-ring 17 in an area corresponding to the panel sealing area R, it protrudes from the surface of the frame member 13 and the block member 14 by the protruding height h. The rubber member 16 for sealing in the state where it was made is elastically compressed and deformed. Due to this elastic compression deformation, the sealing rubber member 16 is compressed by a height h and a width w, so that the surface of the frame member 13, the surface of the block member 14, and the surface of the sealing rubber member 16 are substantially the same. A panel sealing region R continuously formed at a height is formed.

  Thus, the rubber member 16 for sealing is elastically compressed and deformed, and the surface of the frame member 13 and the surface of the block member 14 are connected to the surface of the rubber member 16 for sealing at substantially the same height position. As a result, the connection between the frame member 13 and the block member 14 and the panel member 3 can be reliably sealed by the O-ring 17. Further, the sealing rubber member 16 can be securely sealed at the connecting portion between the frame member 13 and the block member 14 by being elastically compressed and deformed also in the width direction of the recess 15. In particular, since the sealing rubber member 16 and the O-ring 17 are in contact with each other and elastically deformed between the connecting portion and the panel member 3, the sealing effect is enhanced. Can do. Furthermore, the sealing rubber member 16 is elastically compressed and deformed in the height direction and the width direction, thereby enhancing the sealing effect in the concave portion 15, that is, the sealing effect in the connecting portion between the frame member 13 and the block member 14. it can.

  Such a protruding height h and protruding width w of the sealing rubber member 16 can also be referred to as “crushing allowance” due to elastic compression deformation. The crushing allowances h and w can be set to optimum values according to specifications such as the material, hardness, shape, and pressure required for the sealed clean booth 1 of the elastic member used for the rubber member 16 for sealing. . The O-ring 17 can be made of an elastic material having a hardness of about 50 to 90 degrees, for example. From the viewpoint of reliably elastically deforming the sealing rubber member 16 by the crushing amount h, the sealing rubber member 16 is preferably made of a material having a hardness lower than that of the O-ring 17.

  Further, as shown in FIGS. 3 and 4, when two panel members 3 are supported by one frame member 11 to 13, 2 that comes in contact with one sealing rubber member 16. The connecting portion between the contact positions P <b> 1 and P <b> 2 with the two O-rings 17 needs to be continuously sealed by the sealing rubber member 16. From such a viewpoint, the sealing rubber member 16 having a substantially L shape is used in the sealing structure of the corner connecting portion A.

  7A and 7B, the case where the sealing rubber member 16 has a protruding height h and a protruding width w with respect to the recess 15 has been described as an example. However, the shape of the sealing rubber member 16 is described. Is not limited to such cases only. The sealing rubber member 16 may be in a form that is elastically compressed and deformed at least in the depth direction of the recess 15, and the sealing rubber member 16 has only a protrusion height h with respect to the recess 15. May be. However, it is preferable that the rubber member 16 for sealing has the protrusion height h and the protrusion width w from a viewpoint of sealing both between a panel member and the connection part of a frame member more reliably.

  In the above description, three sealing rubber members 16 are provided in FIG. 6 and the like so as to seal the outer surface side of the clean booth 1 at the connecting portion between the block member 14 and the respective frame members 11 to 13. Although the case where it is used as shown has been described as an example, the present embodiment is not limited only to such a case. Instead of the case shown in FIG. 6, an arrangement as shown in FIG. 8 may be adopted. In FIG. 8, at the connecting portion between the block member 14 and each of the frame members 11 to 13, it extends in three directions of the X direction, the Y direction, and the Z direction so as to seal the inner surface side of the clean booth 1. The formed sealing rubber member 26 is disposed.

  When the arrangement configuration of the sealing rubber member 16 shown in FIG. 6 is the outer seal structure and the arrangement configuration of the sealing rubber member 26 shown in FIG. 8 is the inner seal structure, the end of the sealing rubber member 26 is used in the inner sealing structure. Since the edge is a contact portion with each O-ring 17, it is difficult to manage the size of the crushing margin h of the rubber member 26 for sealing as compared with the outer seal structure. In the outer seal structure, by controlling the precision of the depth of the recess 15 and the width of the rubber member 16 for sealing, it is possible to manage the size of the crushing margin h of the rubber member 16 for sealing, and the management is relatively easy. Can be. Furthermore, since the main work can be performed from the outside of the clean booth 1 in the outer seal structure, the workability is improved.

  Next, with respect to the structure of the T-shaped connecting portion B, a schematic perspective view in an exploded state is shown in FIG. 9, a schematic perspective view in an assembled state is shown in FIG. Is shown in FIG. Basically, the connection sealing structure in the T-shaped connection portion B uses a concept substantially similar to the connection sealing structure in the corner connection portion A. Therefore, in the following description, it demonstrates centering on a different structure.

  As shown in FIGS. 9 and 10, the frame structure 2 in the T-shaped connecting portion B includes a frame member 31 arranged along the Y direction and a Z direction connected to the side surface of the frame member 31. The frame member 32 is provided, and a connecting plate member 33 (an example of a connecting frame member) that connects the two frame members 31 and 32 to each other.

  As shown in FIG. 9, a connecting plate member 33 is fixed to the end surface of the frame member 32 in the Z direction using bolts through bolt connecting holes 33a. The connecting plate member 33 is formed so that its width dimension is larger than the end face of the frame member 32, and in a state where it is fixed to the frame member 32, the flange portion 33 b protrudes from both sides. Bolt connection holes 33c are formed in the respective flange portions 33b. The flange portion 33b is fixed with a bolt to the groove 31a provided on the side surface of the frame member 31 in the Y direction through the bolt connection hole 33c, so that the frame member 32 is connected via the connection plate member 33. It is fixed to the side surface of the frame member 31.

  Further, as shown in FIG. 11 and the like, the connecting plate member 33 is provided with a notch, and the notch becomes a recess 35 in a state where the frame members 31 and 32 are connected to each other. A rubber member 36 for sealing is inserted and disposed in the recess 35, whereby the connecting portion of the frame members 31 and 32 is sealed.

  The sealing rubber member 36 has a crushing margin so as to protrude from the opening edge of the recess 35 in a state where the sealing rubber member 36 is not elastically compressed and deformed in the depth direction (vertical direction in FIG. 11). Yes. As shown in FIG. 10 and FIG. 11, the two rubber members 36 are arranged, whereby the sealing rubber member 36 is elastically compressed and deformed, and the surface of the frame member 31, the surface of the frame member 32, and the seal A panel sealing region R that is continuous with the surface of the rubber member 36 is formed. In the T-shaped connection portion B, two panel sealing regions R that are adjacently disposed along the inner edges of the frame members 31 and 32 are formed.

  An O-ring 37 is disposed between the two panel sealing regions R and the outer edges of the two panel members 3, thereby sealing between the panel member 3 and the frame members 31 and 32. Is called. It should be noted that the sealing rubber member 36 may be disposed between the two O-rings 37 so as to seal between the two O-rings 37 disposed on the two panel sealing regions R in the connection portion. . That is, in FIG. 10 and FIG. 11, a connecting portion between the contact position between one O-ring 37 and the sealing rubber member 36 and the contact position between the other O-ring 37 and the sealing rubber member 36 (that is, The inner peripheral surface of the concave portion 35 only needs to be sealed by the sealing rubber member 36, and the sealing rubber member 36 may not be disposed up to the flange portions 33b on both sides.

  Thus, the T-shaped connecting portion B also employs a connection sealing structure based on a concept substantially similar to that of the corner connecting portion A, so that the frame members 31 and 32 are connected via the connecting plate member 33. While being connected, the connecting portions can be reliably sealed with the rubber member 36 for sealing. At the same time, the surfaces of the frame members 31 and 32 and the surface of the sealing rubber member 36 are connected at substantially the same height, and the O-ring 37 is disposed on each of the surfaces. Thus, the space between the frame members 31 and 32 and the sealing rubber member 36 and the panel member 3 can be surely sealed.

  Although the connection sealing structure of the corner connection part A and the T-shaped connection part B in the sealed clean booth 1 of the present embodiment has been described, such a connection sealing structure includes other connection parts (for example, a cross connection part or L It can also be applied to character connecting portions).

  In the above description, the connection between the frame member and the block member and the connection between the frame member and the connecting plate member are described as examples using bolts and nuts. Means can be applied. When bolt connection is performed using bolt connection holes formed in the frame member or the like, it is preferable to seal the bolt connection holes using a sealing member such as packing, if necessary.

  In the hermetic clean booth 1 in which the frame structure 2 and the panel member 3 are connected and sealed as described above, the inside of the clean booth 1 is made a clean environment by installing a fan-equipped HEPA filter unit and the like. Can do.

  Moreover, an inert gas space can be formed by supplying an inert gas into the sealed clean booth 1 of the present embodiment using an inert gas filling means. Examples of such inert gas include nitrogen gas and argon gas. In addition, the space in the clean booth 1 can be maintained in a low oxygen environment or a dry environment.

  For example, a substrate processing apparatus (not shown) that performs predetermined processing on a substrate is disposed in the sealed clean booth 1 of the present embodiment, and the environment in the clean booth 1 is required for this substrate processing. Means for maintaining the environment, for example, an inert gas filling means may be installed to construct a substrate processing system using a closed clean booth.

  Examples of such a substrate processing apparatus include a processing apparatus used in a flat display panel manufacturing process, for example, a coating apparatus (coater) for forming a coating film on a substrate (panel) surface, an inspection apparatus, and a drying apparatus. In particular, in the manufacturing process of organic EL display panels and solar cells, it is necessary to perform substrate processing in an environment filled with an inert gas such as nitrogen gas. Therefore, the substrate processing system combining the substrate processing apparatus used in the manufacturing process of an organic EL display panel, a solar cell, and the like and the sealed clean booth 1 of the present embodiment is particularly in the manufacturing process of the organic EL display panel. It is valid.

  Moreover, in the closed type clean booth 1 of this embodiment, the set pressure of the internal space can be maintained at a desired pressure of, for example, 5 KPa or less by utilizing the sealing property of the connection sealing structure. However, even if the set pressure exceeds 5 KPa, it is possible to cope with it by using a similar structure by appropriately setting the material and thickness of each component member.

  According to this embodiment, since the sealing rubber member is arranged at the connecting portion of the frame members (including the block member) that are connected to each other, the connecting portion between the frame members is securely sealed by the sealing rubber member. Can be stopped. Further, an O-ring extends between the panel sealing region formed by continuously connecting the surfaces of the frame member and the sealing rubber member that are connected to each other and sealed, and the panel member. Therefore, the space between the panel sealing region and the panel member can be continuously sealed. Particularly, in the panel sealing region, the sealing rubber member is arranged so that the surface of the sealing rubber member is continuous between the surface of one frame member and the surface of the other frame member, thereby improving the elasticity of the sealing rubber member. It is possible to reliably seal between the panel members. Therefore, the sealing performance of the clean booth can be enhanced.

  In addition, the workability in connecting each frame member and sealing using a rubber member for sealing and an O-ring is good, and there is no work such as welding or sealing agent injection in the field such as a clean room. The assembly of the clean booth and the removal and disassembly of the frame when performing maintenance work and moving work are good.

  Moreover, as each frame member which comprises a frame structure, since the frame member currently distribute | circulated can be used, versatility is high.

  Therefore, it is possible to provide a hermetic clean booth having excellent hermeticity by securely sealing between the connecting portion of the frame member and the panel member while improving the assembling property.

  It is to be noted that, by appropriately combining arbitrary embodiments of the various embodiments described above, the effects possessed by them can be produced.

  According to the present invention, it is possible to provide a hermetic booth that can achieve both good assemblability and high hermeticity. Such a sealed booth can be used when an inert gas environment or the like is required in addition to a clean environment, and in particular, can be used in a manufacturing process of an organic EL display panel.

DESCRIPTION OF SYMBOLS 1 Sealing type clean booth 2 Frame structure 3 Panel member 11-13 Frame member 14 Corner block member 15 Recess 16 Seal rubber member 17 O-ring 31, 32 Frame member 33 Plate member 35 Recess 36 Seal rubber member 37 O-ring A Corner connecting part B T-shaped connecting part h Projection height (crushing allowance)
w Projection height (crushing allowance)
R Panel sealing area

Claims (4)

A sealed booth comprising a plurality of frame members connected to each other and a plurality of panel members supported by the plurality of frame members,
A first frame member;
A second frame member coupled to the first frame member;
An elastic member disposed at a connecting portion between the first frame member and the second frame member and sealing the connecting portion;
The respective surfaces of the first frame member, the second frame member, and the elastic member are arranged between the panel sealing region formed continuously and the panel member, and the panel sealing region and the panel member have a connecting sealing structure comprising a sealing member for continuously sealing between,
In the connected sealing structure,
A recess into which the elastic member is inserted is formed at a connection portion between the first frame member and the second frame member,
The elastic member is formed to protrude from the edge of the recess,
The elastic member is elastically compressed and deformed in the depth direction of the concave portion by the panel member through the sealing member, so that the surfaces of the first frame member, the second frame member, and the elastic member are continuously connected. A closed booth where a panel sealing area is formed . The first frame member, the second frame member and the elastic member form an adjacently extending panel sealing region that seals the edges of at least two panel members;
2. The connection portion between the first frame member and the second frame member, wherein at least a portion between the sealing members disposed in each panel sealing region is sealed by an elastic member. Sealed booth. The first frame member is a connecting frame member that connects the second frame member and the third frame member in a state in which the second frame member and the third frame member are arranged in a direction orthogonal to each other.
As said elastic member, it is arrange | positioned in the connection part between the frame member for connection, and the 2nd frame member, Between the 1st elastic member which seals the said connection part, A frame member for connection, and a 3rd frame member A second elastic member disposed in the connecting portion and sealing the connecting portion;
A panel sealing region formed by continuously connecting respective surfaces of the connecting frame member, the second frame member, the third frame member, the first elastic member, and the second elastic member; and one panel member The hermetic booth according to claim 1 or 2, wherein the space is continuously sealed by a single sealing member. A closed booth according to any one of claims 1 to 3,
An inert gas filling means for filling the space in the sealed booth with an inert gas;
A substrate processing system, comprising: a substrate processing apparatus that is disposed in a sealed booth filled with an inert gas and performs processing on a substrate.

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