JP2005273948A - Mounting structure of blow-out opening unit for clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting structure of a blow-out opening unit for a clean room capable of securely maintaining the clean environment of the clean room by preventing a sealing member at a joint part between a ceiling and a blow-out opening unit from being peeled off by the vibration of the blow-out opening unit or the ceiling. <P>SOLUTION: A frame 13 is formed all around the peripheral edge of an opening part 12b on the lower side of a box-like blow-out opening unit 12. An erected wall 32 vertically formed toward a ceiling material 4 is formed on the all the periphery of the frame 13 on a side opposed to the ceiling material 14 at a position slightly on the inside of the outer edge part of the frame 13. The blow-out opening unit 12 is fitted to the ceiling, the erected wall 32 of the frame 13 is brought into contact with the ceiling material 4, the blow-out opening unit 12 is fixed, and an annular groove part 37 formed of the ceiling material 14, the frame 13, and the erected wall 32 and surrounding the blow-out opening unit 12 is formed. A sealant 22 is filled in all the periphery of the groove part 27. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a mounting structure for an air outlet unit for a clean room in which an air filter is mounted and attached to an air conditioning duct of a clean room.

  For example, in a semiconductor manufacturing factory, a pharmaceutical factory, a precision machine manufacturing factory, and the like, a clean room is used in order to prevent the production equipment and products from being adversely affected by dust. An air conditioning duct is provided at the ceiling of the clean room, and an air filter is installed inside a clean room outlet unit connected to the duct and provided at the outlet of the ceiling. And the air supplied from a blower outlet is filtered with an air filter, and supplies clean air indoors.

  As the air filter provided in the air outlet unit of the clean room ceiling, for example, an ultra-high performance particulate filter such as a HEPA (High Efficiency Particulate Airfilter) filter having a trapping efficiency of 0.3 μm particles of 99.97% or more is used.

  As shown in FIG. 9, the air outlet unit is fixed to the ceiling material 4 by contacting the turn 3 a of the frame 3 of the air outlet unit 2 to the surface of the ceiling material 4. Sealing material 6 such as silicone resin is applied to the corners of the two surfaces formed by the outer surface of the folded back 3a and the surface of the ceiling material 4 to prevent passage of unfiltered air behind the ceiling. . Further, the opening of the air outlet unit 2 is covered with a cover member 8 in which a number of punching holes are formed, and the cover member 8 is fixed to the frame 3 of the air outlet unit 2 by means of mounting screws 9.

  The sealing method of the sealing material 6 is to apply the sealing material 6 from the indoor side to the corners of the ceiling material 4 and the folded portion 3a of the frame 3 of the outlet unit 2 that is in contact with the ceiling material 4. The cross section of the sealing material 6 after drying is formed in a right triangle shape with the abutting portion of the folding member 3a of the ceiling material 4 and the frame 3 as a vertex, and after drying, the bottom side portion of the right triangle is curved toward the vertex side. It becomes a state to do. Thereby, since the sealing material 6 has elasticity even after drying and curing, no gap is generated even by minute vibrations transmitted from the air outlet unit 2 or the ceiling material 4, and the airtightness is maintained.

JP 2003-247738 A

  The sealing structure of the conventional sealing material 6 has a right triangle shape with the abutting portion between the ceiling material 4 and the folded portion 3a of the frame 3 of the outlet unit 2 as the apex. The thickness of the sealing material 6 was gradually reduced as it went on. Therefore, due to vibrations and other forces transmitted from the air outlet unit 2 or the ceiling material 4, the sealing material 6 is gradually peeled off from a thin portion, and a gap may eventually be formed. In particular, in the case of a small gap, it is difficult to find, and as a result, the air behind the ceiling that does not pass through the filter leaks into the clean room, and the clean environment of the clean room may not be maintained due to the entry of dust etc. . Even if the amount of the sealant 6 applied is increased to increase the thickness of the sealant 6, only the sealant 6 is attached to the corners of the triangle, so that dripping occurs and there is a limit to thick application. was there. Moreover, even if it is applied thickly, the cross section of the seal portion has a right triangle shape, so that peeling from a thin portion cannot be prevented.

  The present invention has been made in view of the above-described problems of the prior art, and prevents peeling of the sealing material due to vibration of the air outlet unit or the ceiling at the joint portion between the ceiling and the air outlet unit, so that the clean room is clean. An object of the present invention is to provide a mounting structure for a clean room air outlet unit that can reliably maintain the environment.

  The present invention is a mounting structure for a clean room air outlet unit that is attached to the ceiling of a clean room and blows out clean air, and has a frame around the entire periphery of the opening below the box-shaped air outlet unit. A standing wall that is provided over the entire circumference on the side facing the ceiling portion and is positioned slightly inward from the outer edge portion of the frame and is erected toward the ceiling portion; The frame is provided with an upright wall abutting against the ceiling material to fix the outlet unit, and an annular groove portion is formed by the ceiling material, the frame and the upright wall so as to surround the outlet unit. It is the attachment structure of the blower outlet unit formed by filling a sealing material in the perimeter of a groove part. The upright wall is fixed to the frame by spot welding.

  According to the mounting structure of the clean room air outlet unit of the present invention, the joint between the air outlet unit and the ceiling can be filled with the sealing material thickly and evenly and can be reliably sealed. Furthermore, since the sealing material is filled thickly, peeling of the sealing material due to vibration of the air outlet unit or the ceiling material is prevented, and the airtight state can be reliably maintained.

  Hereinafter, an embodiment of a gap filling structure for an outlet unit according to the present invention will be described with reference to FIGS. The blowout unit 12 of this embodiment is installed in the opening part 10 for air-conditioning ducts provided in the clean room ceiling part, such as a semiconductor manufacturing factory and a pharmaceutical manufacturing factory.

  As shown in FIG. 1, the air outlet unit 12 is inserted into the air conditioning duct opening 10, and the frame 13 at the lower end of the air outlet unit 12 faces the surface side of the ceiling member 14. As shown in FIG. 3, the air outlet unit 12 is suspended by a suspension bolt 16 having one end fixed to a ceiling slab 11 of the building. The suspension bolt 16 is fixed to the upper surface side of the outlet unit 12 by a pair of nuts 17 and 19. The nut 17 is for adjusting the position of the outlet unit 12, and the nut 19 is for fixing the outlet unit 12 at that position.

  A duct 24 for feeding air is connected to the opening 12 a on the upper side of the air outlet unit 12. The opening 12a to which the duct 23 is attached is closed by a baffle plate 25 that can be ventilated. Further, the opening 12b below the blowout unit 12 and the entire frame 13 are covered with a cover member 18 in which a number of punching holes are formed, and the cover member 18 is fixed to the frame 13 of the blowout unit 12 with mounting screws 21. Has been.

  As shown in FIG. 2, an upright wall 32 fixed to the ceiling material 14 side of the frame 13 extends over the entire periphery of the frame 13 between the frame 13 of the blowout unit 12 and the surface side of the ceiling material 14. Is provided. The standing wall 32 is fixed by a spot welding portion 33 at a position slightly below the opening 12 b on the inner side from the outer edge portion of the frame 13.

  A U-shaped receiving member 20 is fixed to the central portion of the inner wall surface of the air outlet unit 12 by welding over the entire circumference in the horizontal direction. Furthermore, a sealing material 22 is applied to the entire periphery of the corner portion on the indoor side of the welded portion between the receiving material 20 and the inner wall surface of the outlet unit 12. The sealing material 22 is a flexible sealing airtight agent such as silicone resin.

  A frame of an air filter 24 such as a HEPA filter is in contact with the lower surface of the receiving member 20, and the air filter 24 is fixed by a fixing bracket 26. The fixing bracket 26 is supported by a bolt 30 having one end attached to the receiving member 20 and fixed by a nut 28, a nut 35 screwed to the lower end of the bolt 30, and a nut 35, and the bolt 30 is inserted. And a filter receiver 34. The air filter 24 abuts on the lower surface of the receiving member 20 via the packing 36 and is fixed by a nut 35.

  Further, a pipe 38 for performance test of the air filter 24 is appropriately provided at the center of the inner wall surface of the air outlet unit 12 depending on the use of the clean room. The performance test pipe 38 has an upper end fitted into the receiving member 20 and fixed by a nut 40 and is attached in an airtight state by the sealing member 22. The lower end portion of the performance test pipe 38 passes through the filter receiver 34, and a cap 41 is fitted into the opening portion, so that the airtight state can be maintained when not in use.

  The facing portion between the frame 13 and the ceiling member 14 of the air outlet unit 12 is formed on the ceiling material 14 over the entire circumference so that the standing wall 32 fixed to the frame 13 surrounds the opening 12 b below the air outlet unit 12. It is in contact. Thereby, a groove portion 37 having a U-shaped cross section is formed between the frame 13 of the outlet unit 12 and the ceiling member 14. The space in the groove portion 37 is filled with the sealing material 22 over the entire circumference.

  Next, the attachment method of the blower outlet unit 12 of this embodiment is demonstrated below. In attaching the air outlet unit 12, first, as shown in FIG. 3, the suspension bolt 16 of the air outlet unit 12 is provided on the ceiling slab 11 of the building, and the air outlet unit 12 is suspended from the suspension bolt 16 for adjustment. It is positioned and held by the nut 17 and temporarily fixed by the fixing nut 19.

  Next, as shown in FIG. 4, an air conditioning duct 23 is connected to the opening 12 a above the air outlet unit 12. Furthermore, as shown in FIG. 5, a ceiling suspension bolt 40 is provided from the ceiling slab 11 of the building, and a ceiling base material 42 is suspended and fixed to the ceiling suspension bolt 40. A ceiling material 14 such as a ceiling finishing material is attached to the ceiling base material 42 so as to face from the indoor side.

  Next, the nut 19 screwed into the bolt 16 that suspends the air outlet unit 12 is loosened and raised, and the nut 17 is tightened, and the standing wall 32 provided on the frame 13 of the air outlet unit 12 is attached to the ceiling member 14. Make contact. And as shown in FIG. 6, the sealing material 22 is filled over the perimeter to the groove part 37 of the cross-sectional U shape between the frame 13 of the blower outlet unit 12, and the ceiling material 14. As shown in FIG. At this time, the sealing material 22 sufficiently fills the volume of the groove portion 37.

  After the filling of the sealing material 22 is completed, the air filter 24 is attached as shown in FIG. The air filter 24 is inserted from the opening 12 b below the air outlet unit 12, the packing 36 is brought into contact with the receiving member 20, and is fixed by the fixing bracket 26. The fixture 20 holds the air filter 24 by the filter receiver 34 and tightens the nut 35 to securely fix the air filter 24.

  Thereafter, a performance test or the like of the air filter 24 is performed as necessary. Finally, the cover member 18 is fixed to the frame 13 of the air outlet unit 12 with the attachment screw 21, and the attachment of the air outlet unit 12 is completed.

  According to the mounting structure of the air outlet unit 12 for the clean room of this embodiment, the U-shaped groove portion 37 is formed at the joint portion between the frame 13 of the air outlet unit 12 and the ceiling member 14, and the groove portion 37. Since the sealing material 22 is sufficiently filled, the sealing material 22 is not peeled off even with minute vibrations from the air outlet unit 12 or the ceiling portion, and the airtightness is not broken, and extremely high reliability. It contributes to clean rooms and the like that require higher cleanliness.

  In addition, the attachment structure of the blower outlet unit of this invention is not limited to the said embodiment, The shape of a blower outlet unit, the shape of a frame, etc. can be set suitably.

It is a schematic longitudinal cross-sectional view which shows the attachment structure of the blower outlet unit for clean rooms of one Embodiment of this invention. It is the elements on larger scale of the frame of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view which shows the attachment process of the blower outlet unit for clean rooms of this embodiment. It is a schematic longitudinal cross-sectional view showing the attachment structure of the conventional blower outlet unit for clean rooms.

Explanation of symbols

12 Outlet Unit 13 Frame 14 Ceiling Material 18 Cover Member 20 Receiving Material 22 Sealing Material 24 Air Filter 26 Fixing Bracket 32 Standing Wall 37 Groove

Claims (2)

  In the mounting structure of the air outlet unit for the clean room, which is attached to the ceiling portion of the clean room and from which clean air is blown out, the frame has a frame around the periphery of the opening below the box-shaped air outlet unit and faces the ceiling portion of the frame. A standing wall that is provided over the entire circumference of the frame and is located slightly inward from the outer edge of the frame and is erected toward the ceiling, and the blowout unit is attached to the ceiling to An upright wall is brought into contact with the ceiling material to fix the air outlet unit, and an annular groove portion is formed by the ceiling material, the frame and the upright wall so as to surround the air outlet unit, and a sealing material is formed around the groove portion. A structure for mounting the outlet unit, wherein The blower unit mounting structure according to claim 1, wherein the upright wall is fixed to the frame by spot welding.

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