JPS62138635A - Full surface blow off ceiling facilities in vertical laminar flow type clean room - Google Patents
Full surface blow off ceiling facilities in vertical laminar flow type clean roomInfo
- Publication number
- JPS62138635A JPS62138635A JP60278054A JP27805485A JPS62138635A JP S62138635 A JPS62138635 A JP S62138635A JP 60278054 A JP60278054 A JP 60278054A JP 27805485 A JP27805485 A JP 27805485A JP S62138635 A JPS62138635 A JP S62138635A
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- room
- filter
- blown
- laminar flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電子関係の機械器具や部品あるいはその他
の機械器具や部品等を製作する垂直層流式クリーンルー
ムにおける全面吹出天井設備に関するものである。[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a full-blown ceiling facility in a vertical laminar flow clean room in which electronic equipment and parts or other machinery equipment and parts are manufactured. .
従来、垂直層流式クリーンルームにおける吹出天井設備
としては、第８図および第９図に示すように、天井部に
おいて左右方向に延長する多数のチャンネル部材６と前
後方向に延長する多数のチャンネル部材７とを継手８〜
１１を介して連結して格子状フレーム１２を構成し、そ
の格子状フレーム１２を、天井のスラブによりターンバ
ックル１６を有する多数の吊り材１４を介して吊下支持
し、かつ格子状フレーム１２における広巾フレームにフ
ィルター１５をセットすると共に、前記格子状フレーム
１２における狭巾フレームに照明器具１６をセットした
構造のものが知られている。Conventionally, as shown in FIGS. 8 and 9, the blowout ceiling equipment in a vertical laminar flow clean room includes a large number of channel members 6 extending in the left-right direction and a large number of channel members 7 extending in the front-rear direction in the ceiling. and fitting 8~
11 to form a lattice-like frame 12, and the lattice-like frame 12 is suspended and supported by a ceiling slab via a large number of hanging members 14 having turnbuckles 16. A structure in which a filter 15 is set in a wide frame and a lighting fixture 16 is set in a narrow frame in the lattice frame 12 is known.
しかるに、この構造の吹出天井設備における天井におけ
るフィルター面積率の最大限界値は約８０％であって比
較的小さく、また第１０図および第１１図に示すように
、チインネル部材６．７や照明器具１６が気流の乱れを
引き起こし、そのため微細粉塵排出の大きな障害になっ
ていた。However, the maximum limit value of the filter area ratio on the ceiling in the ceiling blowout equipment of this structure is about 80%, which is relatively small, and as shown in FIGS. 16 caused airflow turbulence, which was a major obstacle to fine dust evacuation.
この発明は前述の問題を有利に解決できる垂直層流式ク
リーンルームにおける全面吹出天井設備全提供すること
を目的とするものであって、この発明の要旨とするとこ
ろは、多数のフィルターユニット１が前後方向および左
右方向に並べられて相互に接合され、下部が開放されて
いる器具収容用筒体２を下端に備えている支持部材６に
おける下部は、対向する４つのフィルターユニット１の
隅部の間に介在され、前記支持部材６の上端部が天井の
スラグ４により支持されると共にフィルターユニット１
の隅部が支持部材６により支持され、前記器具収容用筒
体２の周壁にはフィルターユニット１よりも下方におい
て通気孔５が設けられていることを特徴とする垂直層流
式クリーンルームにおける全面吹出天井設備にある。The object of the present invention is to provide a full-blown ceiling facility for a vertical laminar flow clean room that can advantageously solve the above-mentioned problems. The lower part of the support member 6, which is equipped with instrument housing cylinders 2 at the lower end that are arranged and joined to each other in the horizontal and horizontal directions and whose lower part is open, is located between the corners of the four opposing filter units 1. The upper end of the support member 6 is supported by the slug 4 on the ceiling, and the filter unit 1
is supported by a support member 6, and a ventilation hole 5 is provided in the peripheral wall of the instrument housing cylinder 2 below the filter unit 1. It's in the ceiling equipment.
次にこの発明を図示の例によって詳細に説明する。 Next, the present invention will be explained in detail using illustrated examples.
第１図ないし第７図はこの発明の一実施例を示すもので
あって、鋼板１７の上面に複数のアンカ一部材１Ｂが溶
接により固着され、かつ前記鋼板１７の下面の周囲に垂
直な複数の螺杵１９の上端部が溶接により固着されると
共に、その螺杵１９に上部ナツト２０および下部ナツト
２１が螺合されて、レベル調整取付金具２２が構成され
、このように構成された多数のレベル調整取付金具２２
は前後方向および左右方向に直列に並ぶように配置され
、前記アンカ一部材１８が天井のスラブ４に埋設される
と共に、前記鋼板１７がスラブ４の下面に埋設されてい
る。1 to 7 show an embodiment of the present invention, in which a plurality of anchor members 1B are fixed to the upper surface of a steel plate 17 by welding, and a plurality of anchor members 1B are perpendicular to the lower surface of the steel plate 17. The upper end of the screw 19 is fixed by welding, and an upper nut 20 and a lower nut 21 are screwed onto the screw 19 to constitute a level adjustment fitting 22. Level adjustment mounting bracket 22
are arranged in series in the front-back and left-right directions, and the anchor member 18 is buried in the slab 4 of the ceiling, and the steel plate 17 is buried in the lower surface of the slab 4.
垂直な４角形断面の管体２６の上端部に取付用７ランジ
２４が溶接により固着され、管体２６の上端部を閉塞す
る蓋板２７は取付用フランジ２４に載置されて溶接によ
り固着され、前記管体２６の下端部外周に固着されたフ
ランジの外周に、４角形断面の器具収容用筒体２の上部
が固着でれ、かつその筒体２の下端部の外周に、上向き
に開口する支持溝２５が設けられて、鋼製支持部材６が
構成されている。また前記筒体２の周囲に複数の通気孔
５が設けられ、かつ筒体２内の下部にはアクリル樹脂か
らなるルーパー２６が架設固定されている。A seven mounting flange 24 is fixed by welding to the upper end of the tube body 26 having a vertical rectangular cross section, and a cover plate 27 that closes the upper end of the tube body 26 is placed on the mounting flange 24 and fixed by welding. , the upper part of the instrument housing cylinder 2 having a square cross section is fixed to the outer periphery of the flange fixed to the outer periphery of the lower end of the tube 26, and the upper part of the instrument housing cylinder 2 has an upward opening on the outer periphery of the lower end of the cylinder 2. A support groove 25 is provided to constitute the steel support member 6. Further, a plurality of ventilation holes 5 are provided around the cylindrical body 2, and a looper 26 made of acrylic resin is installed and fixed in the lower part of the cylindrical body 2.
このように構成された多数の支持部材６はそれぞれ前記
鋼板１７の下部に位置するように配置され、かつ筒体２
および管体２３における各平板状側壁は支持部材６の列
に対し４５°の角度で配置され、前記鋼板１７の下部に
配置された支承板２７とその下面に当接された前記取付
用フランジ２４とにわた・つて螺杵１９が挿通され、さ
らに前記上部ナツト２０が蓋板、２７の上面に係合され
ると共に、前記下部ナツト２１が取付用フランジ２４の
下面に係合され、前記上部ナツト２０および下部ナツト
２１により支持部材６が所定のレベルに固定されている
。A large number of support members 6 configured in this way are arranged so as to be located below the steel plate 17, and
Each flat side wall of the tube body 23 is arranged at an angle of 45° with respect to the row of support members 6, and the support plate 27 is arranged at the lower part of the steel plate 17, and the mounting flange 24 is in contact with the lower surface of the support plate 27. The screw punch 19 is then inserted, and the upper nut 20 is engaged with the upper surface of the cover plate 27, the lower nut 21 is engaged with the lower surface of the mounting flange 24, and the upper nut 20 is engaged with the upper surface of the cover plate 27. 20 and a lower nut 21 fix the support member 6 at a predetermined level.
４隅に４５°の角度の斜辺を有する４角形・ぐフランジ
メタルからなる通気性板体２８の周囲に、４隅に４５°
の角度の斜辺を有する４角形のフレーム２９が固定され
、そのフレーム２９における斜辺には、その長手方向に
延長すると共に下向きて突出する係止用フック６０が連
設されて、通気性天井パネル６１が構成され、対向する
４つの通気性天井パネル３１の間に筒体２の下部が介在
され、天井・ぐネル６１の隅部のフック３０は筒体２の
支持溝２５に挿入され、その支持溝２５により天井・ξ
ネル６１の隅部が支持されている。Around the breathable plate 28 made of rectangular flange metal with hypotenuses at 45° angles at the four corners,
A rectangular frame 29 having an oblique side at an angle of The lower part of the cylindrical body 2 is interposed between the four opposing ventilation ceiling panels 31, and the hooks 30 at the corners of the ceiling tunnel 61 are inserted into the support grooves 25 of the cylindrical body 2 to support its support. Ceiling ξ due to groove 25
The corners of the flannel 61 are supported.
４隅に４５°の角度の斜辺を有する４角形のフィルター
（例えば公知のＨＦＪＰＡフィルター）６２の周囲に、
４隅に４５°の斜辺を有する４角形のフレーム３３が固
定され、かつそのフレーム３５における斜辺の下部に斜
辺長手方向に延長する突条５４が設けられてフィルター
ユニット１が構成され、このように構成されたフィルタ
ーユニット１は前後方向および左右方向に並べられると
共に相互に接合され、対向する４つのフィルターユニッ
ト１の隅部に支持部材６における管体２３の下端部が介
在され、フィルターユニット１におけるフレーム６５の
斜辺が筒体２の上端部に載置されると共に、突条６４の
両側面と管体２５の外面および筒体２の上端部内面との
間に７リコンゴム製ンール等のシール材６５が介在され
ている。Around a rectangular filter (for example, a known HFJPA filter) 62 having hypotenuses at four corners at an angle of 45°,
The filter unit 1 is constructed by fixing a rectangular frame 33 having oblique sides of 45° at the four corners, and providing a protrusion 54 extending in the longitudinal direction of the oblique side at the lower part of the oblique side of the frame 35. The configured filter units 1 are arranged in the front-rear direction and the left-right direction and are joined to each other, and the lower ends of the tube bodies 23 of the support member 6 are interposed at the corners of the four opposing filter units 1. The oblique side of the frame 65 is placed on the upper end of the cylindrical body 2, and a sealing material such as a recon rubber ring is placed between both sides of the protrusion 64, the outer surface of the cylindrical body 25, and the inner surface of the upper end of the cylindrical body 2. 65 is interposed.
隣り合うフィルターユニット１の接合部の下面に形成さ
れた溝に、凸形のシリコンゴム製シール材６６における
上部突条が嵌入されて、接着剤により固定され、かつ照
明器具６７、放送用スピーカ６８あるいは煙感知器は、
適当位置の筒体２内に予め増付けられる。なお煙感知器
を収容する筒体２には通気孔５を設けない。The upper protrusion of the convex silicone rubber sealing material 66 is fitted into the groove formed on the lower surface of the joint of adjacent filter units 1 and fixed with adhesive, and the lighting equipment 67 and the broadcasting speaker 68 Or a smoke detector.
It is added in advance to the cylinder body 2 at an appropriate position. Note that the cylindrical body 2 that accommodates the smoke detector is not provided with a ventilation hole 5.
天井の壁際にもフィルターユニット１の隅部全支持する
支持部材３９が配置され、この支持部材６９の断面は直
角６角形になっているが、スラブ４に対する支持部材３
９のレベル調整取付構造および支持部材５９によるフィ
ルターユニット１の隅部の支持構造は前述の場合と同様
である。A support member 39 that supports all corners of the filter unit 1 is also arranged near the wall of the ceiling, and the cross section of this support member 69 is a right hexagon.
The level adjustment mounting structure 9 and the corner support structure of the filter unit 1 by the support members 59 are the same as those described above.
前記スラブ４と各フィルターユニット１との間に吹込ま
れた空気は、各フィルターユニット１を通過する際に浄
化され、各フィルターユニット１を通過した清浄空気は
、各通気性天井・ぐネル５１と筒体２における通気孔５
およびルーパー２６とを通過して、天井のほぼ全面から
層流状態で室内に吹出される。この場合、隣り合うフィ
ルターユニット１の接合部はシール材３６によりシール
され、かつフィルターユニット１と支持部材６との間は
シール材６５によりシールされているので、隣り合うフ
ィルターユニット１の間およびフィルターユニット１と
支持部材６との間から空気が漏洩することはない。The air blown between the slab 4 and each filter unit 1 is purified when passing through each filter unit 1, and the clean air that has passed through each filter unit 1 is passed through each permeable ceiling/gunnel 51. Ventilation hole 5 in cylinder body 2
and the looper 26, and is blown into the room from almost the entire surface of the ceiling in a laminar flow state. In this case, the joints between adjacent filter units 1 are sealed by the sealing material 36, and the space between the filter units 1 and the support member 6 is sealed by the sealing material 65, so that the joints between the adjacent filter units 1 and the filters are sealed. Air will not leak from between the unit 1 and the support member 6.
層流状態で室内に吹出された清浄空気は、室内の微細粉
塵を伴ってクリーンルームの床格子全通過し、再びスラ
ブ４とフィルターユニット１との間に吹込まれる。The clean air blown into the room in a laminar flow state passes through the entire floor grid of the clean room, accompanied by fine dust in the room, and is again blown between the slab 4 and the filter unit 1.
前述のように隣り合うフィルターユニット１の各辺は相
互に接合され、各フィルターユニット１における隅部の
みが支持部材６により支持てれているので、フィルター
面積率９０％以上に大きくすることが可能であり、また
工場の生産ラインにおいて予め支持部材６における筒体
２内に、照明器具６７、スピーカ３８あるいは煙感知器
等を組込んでおくことにより、天井全面吹出設備の工事
を省力化して迅速に施工することができる。As described above, each side of adjacent filter units 1 is joined to each other, and only the corners of each filter unit 1 are supported by the support member 6, so it is possible to increase the filter area ratio to 90% or more. In addition, by incorporating lighting equipment 67, speakers 38, smoke detectors, etc. into the cylindrical body 2 of the support member 6 in advance on the production line of the factory, the construction of the ceiling blowout equipment can be labor-saving and speedy. It can be constructed in
この発明を実施する場合、前記蓋板２７を取付用フラン
ジ２４に対し溶接により固着しないで単に載置してもよ
く、また取付用７ランジ２４を省略して蓋板２７を管体
２６の全周にわたって溶接し、その蓋板２７における管
体２３がら突出した部分を取付用フランジとしてもよい
。さらにまた筒体２および管体２６の断面を円形にして
もよく、この場合は、フィルターユニット１および通気
性天井・ぐネル５１の隅部を円弧状にする。When carrying out this invention, the cover plate 27 may be simply placed on the mounting flange 24 without being fixed by welding, or the seven mounting flange 24 may be omitted and the cover plate 27 may be attached to the entire tube body 26. The circumferential welding may be performed, and the portion of the cover plate 27 that protrudes from the tube body 23 may be used as a mounting flange. Furthermore, the cylinder body 2 and the pipe body 26 may have circular cross sections, and in this case, the corners of the filter unit 1 and the ventilation ceiling/gunnel 51 are formed into arc shapes.
この発明によれば、多数のフィルターユニット１におけ
る隅部のみが支持部材６により支持され、隣す合うフィ
ルターユニット１の各辺は相互に接合されているので、
従来の場合に比べてフィルター面積率を大きく垂直層流
通過性を向上させることができ、かつフィルターを通過
した清浄空気は通気孔５を備えている器具収容用筒体２
内からも室内に吹出されるので、清浄空気を天井のほぼ
全面から室内に吹出すことができ、そのため吹出清浄空
気に乱流が殆んど発生しないので、室内の微細粉塵を有
効に排出することができる等の効果が得られる。According to this invention, only the corners of a large number of filter units 1 are supported by the support member 6, and each side of adjacent filter units 1 is joined to each other.
Compared to the conventional case, the filter area ratio can be increased to improve vertical laminar flow permeability, and the clean air that has passed through the filter is provided with an instrument housing cylinder 2 equipped with ventilation holes 5.
Since clean air is blown into the room from the inside, clean air can be blown into the room from almost the entire surface of the ceiling, and as a result, there is almost no turbulence in the blown clean air, effectively discharging fine dust from the room. Effects such as being able to do this can be obtained.
第１図ないし第７図はこの発明の一実施例を示すもので
あって、第１図は天井全面吹出設備の横断平面図、第２
図は第１図の中間部を拡大して示す横断平面図、第６図
は第１図の隅部を拡大して示す横断平面図、第４図は第
２図のＡ−Ａ線断面図、第５図は第２図のＢ−Ｂ線拡大
断面図、第６図は第４図における照明器具設置部付近の
拡大縦断側面図、第７図は天井全面吹出設備の一部を示
す概略斜視図である。第８図は従来の天井吹出設備を示
す底面図、第９図は第８図のｃ−ｃｍ拡大断面図、第１
０図および第１１図は従来の天井吹出設備における乱流
発生状態を示す縦断側面図である。
図において、１はフィルターユニット、２ば；器具収容
用筒体、６は支持部材、４はスラブ、５は通気孔、１７
は鋼板、１８はアンカ一部材、１９は螺杵、２０け上部
ナツト、２１は下部ナツト、２２はレベル調整取付金具
、２３は管体、２４は増付用フランジ、２５は支持溝、
２６はルーパー、２８は通気性板体、２９はフレーム、
６０はフック、６１は通気性天井ノミネル、３２はフィ
ルター、３６はフレーム、６４は突条、６５および６６
はシール材、６７は照明器具、３８は放送用スピーカ、
６９は支持部材である。1 to 7 show an embodiment of the present invention, in which FIG.
The figure is a cross-sectional plan view enlarging the middle part of Fig. 1, Fig. 6 is a cross-sectional plan view enlarging the corner of Fig. 1, and Fig. 4 is a cross-sectional view taken along the line A-A of Fig. 2. , Fig. 5 is an enlarged sectional view taken along the line B-B in Fig. 2, Fig. 6 is an enlarged vertical sectional side view of the vicinity of the lighting equipment installation part in Fig. 4, and Fig. 7 is a schematic diagram showing a part of the ceiling-wide blow-out equipment. FIG. Fig. 8 is a bottom view showing the conventional ceiling blowing equipment, Fig. 9 is an enlarged c-cm sectional view of Fig. 8, and Fig. 1
FIG. 0 and FIG. 11 are vertical side views showing the state of turbulent flow in conventional ceiling blowing equipment. In the figure, 1 is a filter unit, 2 is a cylinder for housing instruments, 6 is a support member, 4 is a slab, 5 is a ventilation hole, 17
is a steel plate, 18 is an anchor member, 19 is a screw punch, 20 upper nuts, 21 is a lower nut, 22 is a level adjustment mounting bracket, 23 is a pipe body, 24 is an additional flange, 25 is a support groove,
26 is a looper, 28 is a breathable plate, 29 is a frame,
60 is a hook, 61 is a breathable ceiling panel, 32 is a filter, 36 is a frame, 64 is a protrusion, 65 and 66
is a sealing material, 67 is a lighting equipment, 38 is a broadcast speaker,
69 is a support member.
Claims (1)
に並べられて相互に接合され、下部が開放されている器
具収容用筒体２を下端に備えている支持部材３における
下部は、対向する４つのフィルターユニット１の隅部の
間に介在され、前記支持部材３の上端部が天井のスラブ
４により支持されると共にフィルターユニット１の隅部
が支持部材３により支持され、前記器具収容用筒体２の
周壁にはフィルターユニット１よりも下方において通気
孔５が設けられていることを特徴とする垂直層流式クリ
ーンルームにおける全面吹出天井設備。A large number of filter units 1 are arranged in the front-rear direction and left-right direction and are joined to each other, and the lower part of the support member 3, which is equipped with an instrument-accommodating cylinder 2 with an open lower part at the lower end, accommodates four opposing filters. The upper end of the support member 3 is supported by the ceiling slab 4, and the corner of the filter unit 1 is supported by the support member 3. A full-blown ceiling facility in a vertical laminar flow clean room, characterized in that a ventilation hole 5 is provided in a peripheral wall below a filter unit 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60278054A JPS62138635A (en) | 1985-12-12 | 1985-12-12 | Full surface blow off ceiling facilities in vertical laminar flow type clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60278054A JPS62138635A (en) | 1985-12-12 | 1985-12-12 | Full surface blow off ceiling facilities in vertical laminar flow type clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62138635A true JPS62138635A (en) | 1987-06-22 |
| JPH0350179B2 JPH0350179B2 (en) | 1991-07-31 |
Family
ID=17592011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60278054A Granted JPS62138635A (en) | 1985-12-12 | 1985-12-12 | Full surface blow off ceiling facilities in vertical laminar flow type clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138635A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02120638U (en) * | 1989-03-09 | 1990-09-28 | ||
| JPH03284730A (en) * | 1990-03-30 | 1991-12-16 | Hitachi Chem Co Ltd | Production of display panel for electrophoresis display device |
| JPH0443750U (en) * | 1990-08-13 | 1992-04-14 | ||
| EP0528696A2 (en) * | 1991-08-21 | 1993-02-24 | BROD & McCLUNG - PACE CO. | Directional air diffuser panel for clean room ventilation system |
| US5417610A (en) * | 1992-11-06 | 1995-05-23 | Daw Technologies, Inc. | Method and device for reducing vortices at a cleanroom ceiling |
| WO1995025933A1 (en) * | 1994-03-22 | 1995-09-28 | Daw Technologies, Inc. | Method and device for improved unidirectional airflow in cleanroom |
| US5613759A (en) * | 1991-06-24 | 1997-03-25 | Brod & Mcclung-Pace Co. | Light and filter support structure |
| KR100322389B1 (en) * | 2000-01-11 | 2002-03-18 | 이병구 | A light of Cleanroom |
| JP2002286265A (en) * | 2001-03-28 | 2002-10-03 | Nippon Spindle Mfg Co Ltd | Clean booth |
| CN103438556A (en) * | 2013-08-23 | 2013-12-11 | 无锡汉佳半导体科技有限公司 | Operating room air supply ceiling |
| JP2020094467A (en) * | 2018-12-07 | 2020-06-18 | エヌパット株式会社 | Swinging prevention device and construction method |
-
1985
- 1985-12-12 JP JP60278054A patent/JPS62138635A/en active Granted
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02120638U (en) * | 1989-03-09 | 1990-09-28 | ||
| JPH03284730A (en) * | 1990-03-30 | 1991-12-16 | Hitachi Chem Co Ltd | Production of display panel for electrophoresis display device |
| JPH0443750U (en) * | 1990-08-13 | 1992-04-14 | ||
| US5613759A (en) * | 1991-06-24 | 1997-03-25 | Brod & Mcclung-Pace Co. | Light and filter support structure |
| US5794397A (en) * | 1991-06-24 | 1998-08-18 | Cleanpak International, Inc. | Clean room ceiling structure light fixture wireway |
| EP0528696A2 (en) * | 1991-08-21 | 1993-02-24 | BROD & McCLUNG - PACE CO. | Directional air diffuser panel for clean room ventilation system |
| US5417610A (en) * | 1992-11-06 | 1995-05-23 | Daw Technologies, Inc. | Method and device for reducing vortices at a cleanroom ceiling |
| WO1995025933A1 (en) * | 1994-03-22 | 1995-09-28 | Daw Technologies, Inc. | Method and device for improved unidirectional airflow in cleanroom |
| US5620369A (en) * | 1994-03-22 | 1997-04-15 | Daw Technologies, Inc. | Method and device for unidirectional airflow in cleanroom |
| KR100322389B1 (en) * | 2000-01-11 | 2002-03-18 | 이병구 | A light of Cleanroom |
| JP2002286265A (en) * | 2001-03-28 | 2002-10-03 | Nippon Spindle Mfg Co Ltd | Clean booth |
| CN103438556A (en) * | 2013-08-23 | 2013-12-11 | 无锡汉佳半导体科技有限公司 | Operating room air supply ceiling |
| JP2020094467A (en) * | 2018-12-07 | 2020-06-18 | エヌパット株式会社 | Swinging prevention device and construction method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0350179B2 (en) | 1991-07-31 |
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