JPH0443750U - - Google Patents
Info
- Publication number
- JPH0443750U JPH0443750U JP8583090U JP8583090U JPH0443750U JP H0443750 U JPH0443750 U JP H0443750U JP 8583090 U JP8583090 U JP 8583090U JP 8583090 U JP8583090 U JP 8583090U JP H0443750 U JPH0443750 U JP H0443750U
- Authority
- JP
- Japan
- Prior art keywords
- filter unit
- fan filter
- fan
- electric motor
- placed under
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Description
第１図はこの考案の実施例を示すクリーンルー
ム設備の垂直断面図、第２図は第１図の天井部の
一部を拡大して示す平面図、第３図は第１図のフ
アンフイルタユニツトの部分を拡大して示す正面
図、第４図は第３図のフアンフイルタユニツトの
側面図、第５図は縦ビームの部分を拡大して示す
横断面図、第６図は横ビームの部分を拡大して示
す横断面図である。
１……室、２，３……ビーム、４……フアンフ
イルタユニツト、５……パンチング板、１８……
照明灯、２１……電動モータ、２２……フアン、
２４……フイルタ。
Figure 1 is a vertical sectional view of clean room equipment showing an embodiment of this invention, Figure 2 is a plan view showing an enlarged part of the ceiling in Figure 1, and Figure 3 is the fan filter unit in Figure 1. 4 is a side view of the fan filter unit shown in FIG. 3, FIG. 5 is an enlarged cross-sectional view of the vertical beam, and FIG. 6 is a cross-sectional view of the horizontal beam. FIG. 1... Chamber, 2, 3... Beam, 4... Fan filter unit, 5... Punching plate, 18...
Lighting lamp, 21... electric motor, 22... fan,
24...Filter.
Claims (1)
れ、電動モータ、電動モータにより駆動されるフ
アンおよびフイルタを備えたフアンフイルタユニ
ツトがビームの間の空間に配置され、多数の穴が
開けられたパンチング板がビームおよびフアンフ
イルタユニツトの下に配置されているクリーンル
ーム設備において、 下面が開口したみぞ形材よりなるビームの内部
に照明灯が取付けられ、パンチング板がビームお
よびフアンフイルタユニツトより下方に間隔をあ
けて配置されていることを特徴とするクリーンル
ーム設備。[Claim for Utility Model Registration] A plurality of vertical and horizontal horizontal beams are arranged on the ceiling of a room, and a fan filter unit equipped with an electric motor, a fan driven by the electric motor, and a filter is arranged in the space between the beams. In a clean room facility where a punched plate with many holes is placed under the beam and fan filter unit, a lighting lamp is installed inside the beam made of a groove shaped member with an open bottom, and the punched plate is placed under the beam. and a fan filter unit, the clean room equipment is arranged below the fan filter unit at an interval.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990085830U JP2524214Y2 (en) | 1990-08-13 | 1990-08-13 | Clean room equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990085830U JP2524214Y2 (en) | 1990-08-13 | 1990-08-13 | Clean room equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0443750U true JPH0443750U (en) | 1992-04-14 |
| JP2524214Y2 JP2524214Y2 (en) | 1997-01-29 |
Family
ID=31635158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990085830U Expired - Fee Related JP2524214Y2 (en) | 1990-08-13 | 1990-08-13 | Clean room equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2524214Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003139351A (en) * | 2001-11-06 | 2003-05-14 | Mitsubishi Electric Corp | Air conditioner system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59185923A (en) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | Location-changeable formation of tunnel type clean room in compartment |
| JPS6138614A (en) * | 1984-07-31 | 1986-02-24 | Kondo Kogyo Kk | Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room |
| JPS62138635A (en) * | 1985-12-12 | 1987-06-22 | Kumagai Gumi Ltd | Full surface blow off ceiling facilities in vertical laminar flow type clean room |
| JPS62288433A (en) * | 1986-06-09 | 1987-12-15 | Takasago Thermal Eng Co Ltd | Air blow-off facilities for clean room |
-
1990
- 1990-08-13 JP JP1990085830U patent/JP2524214Y2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59185923A (en) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | Location-changeable formation of tunnel type clean room in compartment |
| JPS6138614A (en) * | 1984-07-31 | 1986-02-24 | Kondo Kogyo Kk | Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room |
| JPS62138635A (en) * | 1985-12-12 | 1987-06-22 | Kumagai Gumi Ltd | Full surface blow off ceiling facilities in vertical laminar flow type clean room |
| JPS62288433A (en) * | 1986-06-09 | 1987-12-15 | Takasago Thermal Eng Co Ltd | Air blow-off facilities for clean room |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003139351A (en) * | 2001-11-06 | 2003-05-14 | Mitsubishi Electric Corp | Air conditioner system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2524214Y2 (en) | 1997-01-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |