JP6818336B2 - Cleaning liquid contamination degree determination device and contamination degree determination method - Google Patents

Description

The present invention relates to a cleaning liquid contamination degree determination device and a contamination degree determination method.

The cleaning liquid used for cleaning machines such as machined parts is contaminated with the operation of the cleaning machine. This is because oil and contamination adhering to machined parts and the like are mixed with the cleaning liquid during the cleaning process. If the cleaning liquid is contaminated, the cleaning capacity is reduced and cleaning accuracy cannot be ensured.

Figure 1 2 is a typical washing machine, contamination level management of the cleaning liquid used for washing machine, set up a filtration mechanism, such as the recovery mechanism and a bag filter of floating oil with oil skimmer washer, The degree of contamination of the cleaning liquid was judged visually. Then, the cleaning solution used for a certain period of time was replaced regularly.

In addition, most of the cleaning liquids used in this type of cleaning machine are weak alkaline cleaning agents containing a surfactant as the main component diluted with water, and the degree of contamination of such cleaning liquids is measured by measuring the following items. In some cases, the cleaning solution is controlled by chemical analysis (see, for example, Patent Document 1 or 2).

Japanese Unexamined Patent Publication No. 9-196877 Japanese Unexamined Patent Publication No. 10-73583

However, all of these measurement factors require familiarity and labor in chemical analysis, and evaluation of the analytical values of individual measurement factors also requires experience and insight in chemical analysis. The cleaning solution is not controlled by measurement and analysis. Therefore, as described above, the current situation is that the cleaning liquid is replaced regularly.

Further, for example, it is possible to measure and manage one of the above-mentioned factors, but the progress of the degree of contamination of the cleaning liquid is complicated, and even if the number of times the cleaning liquid is used increases, the numerical value of the degree of contamination in that factor does not necessarily increase. This is not always the case (see Tables 2, 3 and 4).

In addition, depending on the type of parts to be cleaned, the factor that greatly affects the cleaning performance is oil concentration or turbidity, and the content of pollution degree control of the cleaning liquid is one. Not like. In addition, there are many types of cleaning agents used for cleaning liquids, and there is a limit to maintaining and managing cleaning performance by measuring and managing only one factor that contaminates the cleaning liquid. On the other hand, measuring multiple factors to determine the degree of pollution is extremely complicated and difficult, as it requires experience and insight for each.

The present invention has been made in view of the above problems, and is an apparatus for determining the degree of contamination of a cleaning liquid, which can control the degree of contamination of the cleaning liquid corresponding to a plurality of objects to be cleaned and can easily determine the degree of contamination of the cleaning liquid. The purpose is to provide a method for determining the degree of pollution.

In order to solve the above problems, the cleaning liquid contamination degree determination device according to the present invention is a determination device for determining the contamination degree of the cleaning liquid used for cleaning the object to be cleaned, and measures the turbidity T of the cleaning liquid. The degree of contamination is calculated using the measuring unit, the conductivity measuring unit that measures the conductivity σ of the cleaning liquid, the pH measuring unit that measures the pH of the cleaning liquid, the storage unit that stores each measured value, and the measured values. It is characterized by having a calculation unit.

The inventor of the present invention spends a lot of test research and a lot of time, and first of all, as factors related to the degree of contamination of the cleaning solution, oil concentration, turbidity, conductivity, pH, and factors are used to determine the degree of contamination of the cleaning solution. I found it to be an important factor. However, in the measurement of oil concentration, the oil is often emulsified by the action of a surfactant or the like, various extraction solvents are required, and the measurement is complicated and time-consuming. Therefore, it is not suitable to use the oil concentration factor to determine the degree of contamination of the cleaning liquid in a short time. Therefore, the inventor further conducted a test study and found that there was a certain correlation between the oil concentration and the turbidity, and as a factor related to the degree of contamination of the cleaning liquid, the turbidity and the conductivity that can substitute the oil concentration. It was found that the turbidity of the cleaning solution can be quantitatively and stably determined in a short time by using the three factors of pH in combination.

In addition, the cleaning liquid contamination determination device includes a pipe to which the turbidity measuring unit, the conductivity measuring unit, and the pH measuring unit are connected, and each calibration liquid connected to the pipe and calibrating each measuring unit. A plurality of containers for storing, a plurality of valves for controlling the flow of each liquid to the piping, a three-way valve for controlling the flow of cleaning liquid and calibration liquid to the turbidity measuring unit and the pH measuring unit, and the cleaning liquid. And a plurality of pumps for circulating each of the calibration solutions to the pipe. According to this configuration, the accuracy of measurement and contamination degree determination is improved by calibrating each measuring part after measuring the cleaning liquid. In addition, by arranging pumps and valves in the piping, it becomes easy to configure the configuration to automate the determination of the degree of contamination of the cleaning liquid.

Preferably, the cleaning liquid contamination degree determination device further includes means for the calculation unit to convert the pH into the hydrogen ion concentration ratio P. According to this configuration, the change in pH due to contamination of the cleaning liquid is small, but by converting the pH to the hydrogen ion concentration ratio, this change can be amplified and the change in the degree of contamination of the cleaning liquid can be easily recognized. Become. Here, for the hydrogen ion concentration ratio, for example, the hydrogen ion concentration of the cleaning liquid after replacement with a new liquid of the cleaning liquid is set to 1.

Preferably, this cleaning fluid contamination degree determining apparatus includes means for converting the turbidity T of the calculation unit is determined to a number Ka of 0-100%, measured the conductivity sigma, 0-100% of the numerical value It is provided with a means for converting to Kb and a means for converting the measured hydrogen ion concentration ratio P into a numerical value Kc of 0-100%. According to this configuration, a complicated numerical value representing the degree of contamination of each factor is represented by 0-100%, and the degree of contamination of each factor can be easily determined.

In addition, the cleaning liquid contamination degree determination device includes means for the calculation unit to convert a numerical value calculated by the following formula ( A, B, C are coefficients ) into a numerical value of 0-100%. According to this configuration, by combining the three factors, it becomes easy to determine the degree of contamination of the cleaning liquid in a stable manner according to the type of the object to be cleaned.
(Formula) A × Ka + B × Kb + C × Kc

Further, the contamination degree determination device for this cleaning liquid is A = B = C. According to this configuration, by using the three factors of turbidity, conductivity, and hydrogen ion concentration ratio on average, it is possible to determine the degree of contamination of a general-purpose cleaning liquid according to a plurality of objects to be cleaned.

Further, in this cleaning liquid contamination degree determination device, one or two numerical values of A, B, and C are larger than the other numerical values. According to this configuration, it is possible to determine the degree of contamination of the cleaning liquid even in a special case where any of the factors of turbidity, conductivity, and hydrogen ion concentration ratio is important.

Further, the contamination degree determination device for the cleaning liquid may include means for the calculation unit to convert the numerical value calculated by the following formula ( D, E, F are coefficients ) into a numerical value of 0-100%. .. If the values of turbidity T, conductivity σ, and hydrogen ion concentration ratio P are not required and only the degree of contamination of the cleaning liquid is required, this configuration can be used.
(Formula) D × T + E × σ + F × P

In addition, the cleaning liquid contamination degree determination device includes means for the calculation unit to convert a numerical value calculated by the following formula ( G, H, I is a coefficient ) into a numerical value of 0-100%. This configuration can also be used when pH is not used as the hydrogen ion concentration ratio, turbidity T, conductivity σ, and pH are not required, and only the degree of contamination of the cleaning liquid is required.
(Formula) G × T + H × σ + I × pH

Further, in this cleaning liquid contamination degree determination device, the turbidity measuring unit has a light source and a light receiving unit, and measures the turbidity by irradiating the cleaning liquid contained in a predetermined measuring unit container with light.

Further, in this cleaning liquid contamination degree determination device, the conductivity measuring unit has two electrodes arranged at predetermined intervals, and an electric current is passed through the cleaning liquid put in the predetermined measuring unit container to measure the conductivity. To do.

Further, in this cleaning liquid contamination degree determination device, the pH measuring unit has two electrodes in contact with the reference internal liquid and the test liquid, and the pH is at the potential generated by the cleaning liquid put in a predetermined measuring unit container. To measure. Here, the reference internal liquid refers to a reference liquid whose pH is known in advance. The test liquid is a liquid to be measured for measuring pH, and is a cleaning liquid to be measured in this contamination degree determination device. Then, the pH of the cleaning liquid to be measured is calculated from the potential difference between the two liquids.

The cleaning liquid pollution degree determination method according to the present invention is a determination method for determining the contamination degree of the cleaning liquid used for cleaning the object to be cleaned, and is a turbidity measuring step for measuring the turbidity T of the cleaning liquid and the conductivity of the cleaning liquid. A conductivity measurement step for measuring σ, a pH measurement step for measuring the pH of the cleaning solution, a storage step for storing the measured turbidity T, conductivity σ, and pH, and contamination using the measured values. The calculation step includes a calculation step of calculating the degree, and the calculation step includes a step of converting pH to a hydrogen ion concentration ratio P, a step of converting the measured turbidity T to a numerical value Ka of 0-100%, and measurement. The step of converting the obtained conductivity σ to a numerical value Kb of 0-100%, the step of converting the measured hydrogen ion concentration ratio P to a numerical value Kc of 0-100%, and the following formulas ( A, B, C includes a step of converting the numerical value calculated by the coefficient ) into a numerical value of 0-100%.
(Formula) A × Ka + B × Kb + C × Kc

As described above, according to the cleaning liquid contamination degree determination device and the contamination degree determination method according to the present invention, it is possible to stably determine the contamination degree of the cleaning liquid in response to a plurality of objects to be cleaned. In addition, the degree of contamination of the cleaning liquid can be easily determined regardless of experience or insight.

It is a figure which shows the structure of the pollution degree determination apparatus which concerns on one Embodiment of this invention. It is a front view of the pollution degree determination device. It is a rear view of the pollution degree determination device. It is a figure which shows the flow of the cleaning liquid of the measurement target in the contamination degree determination apparatus. It is a figure which shows the flow of the calibration liquid of each measuring part in a contamination degree determination apparatus. It is a table which shows the measurement result of the conductivity, the turbidity, the pH, and the hydrogen ion concentration ratio of a cleaning liquid. It is a table which converted the conductivity, turbidity, and hydrogen ion concentration ratio of a cleaning liquid into 0-100%. It is a table in which numerical values indicating the degree of contamination of the cleaning liquid are added to the table of FIG. It is a graph which shows the relationship between the electric conductivity, turbidity, hydrogen ion concentration ratio of a cleaning liquid, and the elapsed days. It is a graph which shows the relationship between the degree of contamination of a cleaning liquid, and the elapsed days. It is a graph which shows the relationship between the degree of contamination of the cleaning liquid in each modification, and the elapsed days. It is a figure which shows the conventional cleaning apparatus.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments.

<Embodiment>
[Configuration of pollution degree judgment device]
FIG. 1 is a diagram showing a configuration of a pollution degree determination device according to an embodiment of the present invention. FIG. 2 is a front view of the pollution degree determination device, and FIG. 3 is a rear view of the pollution degree determination device.

As shown in FIG. 1, the pollution degree determination device 1 includes a computer 2, a display unit 3, a conductivity measurement unit 4, and a pH / turbidity measurement unit 5 as main configurations. In addition, the contamination degree determination device 1 includes a cleaning liquid as a sample to be measured, a calibration liquid used for the conductivity measuring unit 4, the pH / turbidity measuring unit 5, and an in-machine cleaning liquid for cleaning each measuring unit and piping. It is provided with a pipe 100 through which pure water, air, etc. flow.

A pump or a solenoid valve that sucks up a fluid such as a calibration liquid is connected to the pipe 100. The pump includes a pump 8A that sucks up the cleaning liquid, a pump 8B that sucks up each solution, and a pump 8C that discharges the cleaning liquid after measurement. Solenoid valves include solenoid valves 61-71 that control the flow rate of liquids such as each solution and air, and containers 91-97 that store each solution through these solenoid valves and cleaning liquids before and after measurement. A container 98 for storing and a container 99 for waste liquid from which each solution after measurement is discharged are arranged.

A part of the pipe 100 and the containers 91-97 for storing each solution and the like are arranged on the back surface of the contamination degree determination device 1 so that each solution can be easily replenished (Fig.). 3).

The computer 2 includes a CPU 21 that performs calculations and a memory 22 that stores data. The computer 2 is connected to a display unit 3, a conductivity measuring unit 4, and a pH / turbidity measuring unit 5, respectively. A microcomputer is used as an example in the computer 2 of the present embodiment, but the computer 2 is not limited to this, and a PC or the like may be used.

The CPU 21 is used for calculations such as calculating the degree of contamination of the cleaning liquid using the numerical values measured by the conductivity measuring unit 4, the pH / turbidity measuring unit 5, and the like. The memory 22 stores programs such as the above calculation, measured values, calculated pollution degree data, and graphs. These data and graphs are displayed on the display unit 3 (see FIG. 2).

The conductivity measuring unit 4 includes a conductivity sensor 41. The conductivity sensor 41 includes two electrodes arranged at a predetermined distance from each other, and a current is passed through the electrodes to measure the impedance and calculate the conductivity. The pH / turbidity measuring unit 5 includes a pH sensor 51, a turbidity sensor 52, and a stirrer 53. The pH sensor 51 includes two electrodes arranged at a predetermined distance from each other, a current is passed through the electrodes, a potential difference is measured, and the pH is calculated from the difference from the pH of the reference solution.

The turbidity sensor 52 includes a light source that irradiates light and a light receiving unit that receives light. The light from the light source is applied to the cleaning liquid to be measured, and the transmitted light that remains parallel and the light whose angle has changed due to scattering in the turbidity in the cleaning liquid are detected by the light receiving unit (integrating sphere). The turbidity of the cleaning liquid is measured by calculating the intensity ratio of the transmitted light and the scattered light. The stirrer 53 is used to stir the cleaning liquid in the measuring unit, and is used to stir these solutions when calibrating and cleaning the inside of the measuring unit.

[Operation of pollution degree judgment device]
Next, a method for determining the degree of contamination of the cleaning liquid using the contamination degree determination device will be described. FIG. 4 is a diagram showing the flow of the cleaning liquid to be measured in the contamination degree determination device. FIG. 5 is a diagram showing the flow of the calibration liquid of each measuring unit in the contamination degree determination device. The pollution degree determination device 1 determines the degree of contamination of the cleaning liquid used or used in the cleaning device.

As shown in FIG. 4, when the contamination degree determination device 1 is operated, the cleaning liquid is sucked up by the pump 8A from the container 98 in which the cleaning liquid is stored, and flows into the conductivity measuring unit 4 through the pipe. Then, in the electric conductivity measuring unit 4, the electric conductivity sensor 41 measures the electric conductivity of the cleaning liquid. The measured conductivity data is transmitted to the computer 2 and stored in the memory 22. Further, the cleaning liquid after the conductivity measurement is returned to the container 98 by the pump 8A.

Next, the pH and turbidity of the cleaning solution are measured. When the upper parts of the solenoid valve 61 and the solenoid valve 70 are opened and the pumps 8A and 8B are operated, the cleaning liquid is sent from the container 98 to the pH / turbidity measuring unit 5. In the pH / turbidity measuring unit 5, the pH of the cleaning liquid is measured by the pH sensor 51. The measured pH data is transmitted to the computer 2 and stored in the memory 22. Then, the CPU 21 converts the pH data into numerical data of the hydrogen ion concentration ratio and stores it in the memory 22. The hydrogen ion concentration ratio is calculated assuming that the hydrogen ion concentration of the cleaning liquid before use is 1.

On the other hand, in the pH / turbidity measuring unit 5, the turbidity of the cleaning liquid is also measured by the turbidity sensor 52. At this time, the stirrer 53 is appropriately operated to stir the cleaning liquid. The measured turbidity data is transmitted to the computer 2 and stored in the memory 22. Further, the cleaning liquid after measuring the pH and turbidity is returned to the container 98 by opening the lower part of the solenoid valve 71 and operating the pump 8C.

In these conductivity measurement, pH measurement, and turbidity measurement, the solenoid valves 68 and 69 are opened as appropriate and pure water or air is used. Pure water is used to dilute the cleaning solution when measuring dilution. Air is used to improve the liquid flow in the pipe 100.

Through the above steps, the conductivity data, hydrogen ion concentration ratio data, and turbidity data of the cleaning liquid are stored in the memory 22 of the computer 2. Then, the CPU 21 converts each of these numerical data to 0-100%, and the numerical data is stored in the memory 22. Specifically, the conductivity data converts 0-2.0 mS / cm to 0-100%. Turbidity data converts 0-10,000 FNU to 0-100%. The hydrogen ion concentration ratio 0-10 is converted to 0-100%.

Then, the CPU 21 determines the degree of contamination of the cleaning liquid using these. Here, the numerical value of the conductivity converted to 0-100% is referred to as the conductivity data Ka, the numerical value of the same turbidity is referred to as the turbidity data Kb, and the numerical value of the hydrogen ion concentration is referred to as the hydrogen ion concentration data Kc. ..

Using these Ka, Kb, and Kc, the CPU 21 calculates the degree of pollution from the following equation 1, converts the value to 0-100%, and stores the degree of pollution data K in the memory 22. In this embodiment, A = B = C = 1.
(Equation 1)
A × Ka + B × Kb + C × Kc

As a result, the degree of contamination of the cleaning liquid is quantified, and the numerical value is displayed on the display unit 3. The degree of pollution can be determined from this value. The contamination degree determination device 1 of the present embodiment is provided with a printing unit, and these results can be printed.

On the other hand, every time the cleaning liquid is measured and the degree of contamination is determined, the conductivity measuring unit 4, the pH / turbidity measuring unit 5, and the piping 100 are calibrated and cleaned. This is to eliminate residues and accurately measure each value and determine the degree of contamination.

As shown in FIG. 5, the conductivity measuring unit 4 is calibrated after the measurement of the cleaning liquid and the determination of the degree of contamination are completed. First, the solenoid valve 63 is opened, the pump 8B is operated, and the conductivity calibration liquid is stored between the solenoid valve 63 and the solenoid valve 70. At this time, the solenoid valve 70 is in a closed state. Then, in this state, the solenoid valve 61 is opened to allow the conductivity calibration liquid to flow into the conductivity measuring unit 4, and the inside of the conductivity measuring unit 4 is calibrated. This step is performed a plurality of times, and the liquid is sent to the conductivity measuring unit 4 a plurality of times. Further, the conductivity calibration liquid after calibration is discharged to the container 99. As an example, sodium chloride or potassium chloride is used as the conductivity calibration solution.

Next, the pH / turbidity measuring unit 5 is calibrated. First, the upper parts of the solenoid valves 63, 64, and 70 are opened, the pump 8B is operated, and two liquids of the turbidity calibration solution are made to flow into the pH / turbidity measuring unit 5, and the inside of the pH / turbidity measuring unit 5 is used. To calibrate. Then, after calibrating the turbidity inside the pH / turbidity measuring unit 5, the pump 8C is operated to discharge the turbidity calibration solution into the container 99. As the turbidity calibration solution, for example, formagine standard solution, kaolin standard solution, mixed polystyrene standard solution, etc. are used.

Similarly, the upper part of the solenoid valves 66, 67, 70 is opened, the pump 8B is operated, and the two pH calibration solutions are made to flow into the pH / turbidity measuring unit 5, and the pH / turbidity measuring unit 5 is used. Calibrate the inside of. Then, after the pH calibration inside the pH / turbidity measuring unit 5, the pump 8C is operated to discharge the pH calibration solution into the container 99. As the pH calibration solution, pH 4.0 and pH 7.0 calibration solutions are used as an example.

Further, the solenoid valve 62 is opened and the in-machine cleaning liquid is circulated to the piping and each measuring unit to clean the entire inside of the cleaning degree determination device 1. At this time, the solenoid valves 68 and 69 may be opened as appropriate and pure water or air may be used.

In addition, each measurement of the above-mentioned cleaning liquid, calculation of the degree of contamination, calibration, and a series of cleaning steps are performed a plurality of times according to the number of days elapsed. Multiple times is, as an example, measured for each number of days elapsed from the start date of use of the cleaning solution. Then, the degree of contamination of the cleaning liquid according to the number of days elapsed is quantified and graphed. This makes it possible to easily determine the degree of contamination of the cleaning liquid according to the number of days elapsed.

It is also possible to set a predetermined threshold value for the numerical value of the degree of pollution in advance and store it in the memory 22. For example, set the threshold value to 50% pollution. Then, when the degree of contamination of the cleaning liquid exceeds the threshold value, numerical values and graphs may be displayed in red or red lines, or notification may be made by voice.

Next, examples in which these steps have been performed will be described. In this example, as an example, the degree of contamination was determined on the 0th, 4th, 9th, and 14th days after the start date of use of the cleaning solution. 6 to 10 show a table in which the cleaning liquid is measured and the degree of contamination is determined twice for each of these elapsed days, and the conductivity, turbidity, pH (hydrogen ion concentration ratio), and the degree of contamination of the cleaning liquid are quantified. It is a graph.

FIG. 6 is a table of the conductivity, turbidity, pH, and hydrogen ion concentration ratio of the cleaning liquid for each elapsed day. In addition, FIG. 7 is a table in which the conductivity, turbidity, and hydrogen ion concentration ratio are converted to 0-100%. As you can see from these, it can be seen that each numerical value changes according to the number of elapsed days, and that not all the numerical values increase or decrease constantly even if the number of elapsed days increases.

In FIG. 8, in the table of FIG. 7, the conductivity Ka, the hydrogen ion concentration ratio Kb, and the turbidity Kc converted to 0-100% are shown in the above formula 1: A × Ka + B × Kb + C × Kc (A = B = C). The value of the degree of pollution is added by setting the value calculated from = 1) to 0-100%. Further, FIG. 9 is a graph of the conductivity Ka, the hydrogen ion concentration ratio Kb, and the turbidity Kc, and FIG. 10 is a graph of the numerical values of the degree of contamination of the cleaning liquid.

As shown in the table of FIG. 8 and the graph of FIG. 10, the degree of contamination of the cleaning liquid was 13.0 / 13.0 on the 0th day, 43.3 / 21.5 on the 4th day, and 50. on the 9th day. 1 / 36.0, 14th day: 52.4 / 41.5, and it can be seen that the degree of contamination of the cleaning liquid increases according to the number of elapsed days in any of the judgments.

From the above, by using the contamination degree determination of the cleaning liquid of the present embodiment, the factors of conductivity, pH (hydrogen ion concentration ratio), and turbidity that do not necessarily depend on the elapsed days are used as the contamination degree of the cleaning liquid according to the elapsed days. A stable judgment can be made. Further, by displaying the numerical value of the degree of contamination from 0 to 100%, the degree of contamination of the cleaning liquid can be easily recognized regardless of the experience and insight of the user.

(Modification example)

Further, the contamination degree determination device 1 of the present embodiment can change the coefficients of A, B, and C in the above formula 1: A × Ka + B × Kb + C × Kc. This is to cope with the case where a predetermined factor has an extremely large influence when cleaning with a special part or a cleaning liquid. In FIG. 11, when A = 2.0 / B = 1.0 / C = 0.2, when A = 0.5 / B = 2.0 / C = 0.5, A = 0.2. The graph in the case of / B = 1.0 / C = 2.0 is shown.

<Effect of this embodiment>
The above-described cleaning liquid contamination degree determination device of the present embodiment has the following effects.
By determining the degree of contamination by combining the factors of conductivity, PH (hydrogen ion concentration ratio), and turbidity of the cleaning solution, the degree of contamination of the cleaning solution can be determined easily and stably.

In addition, by displaying the numerical value indicating the degree of pollution from 0 to 100%, it is possible to easily evaluate the degree of pollution regardless of the experience and insight of the user.

Moreover, by not using the oil concentration as a factor, the degree of pollution can be determined in a short time. The influence of oil concentration on the degree of contamination of the cleaning liquid is relatively large, and it has been widely used in the past. However, when measuring oil concentration, a measuring reagent and an oil extraction solvent are required, and a great deal of time and labor is required for the measurement. Because. For the same reason, the device can be miniaturized.

As described above, the embodiments of the present invention have been described with reference to the drawings, but various additions, changes, or deletions can be made without departing from the spirit of the present invention. For example, in the present embodiment, the conductivity, the hydrogen ion concentration ratio, and the turbidity are each confirmed as 0-100% values, but the present invention is not limited to this, and the cleaning liquid is not limited to 0-100%. It is also possible to display only the degree of contamination of 0-100%. It is also possible to realize this by using the numerical value of pH without using the hydrogen ion concentration ratio. Therefore, such a thing is also included in the scope of the present invention.

1 Contamination degree judgment device 2 Computer 21 CPU
22 Memory 3 Display 4 Conductivity measurement unit 41 Conductivity sensor 5 pH / turbidity measurement unit 51 pH sensor 52 Turbidity sensor 53 Stirrer 61-71 Solenoid valve 8A, 8B, 8C Pump 91-99 Container 100 Piping

Claims (10)

It is a judgment device that judges the degree of contamination of the cleaning liquid used for cleaning the object to be cleaned.
A turbidity measuring unit that measures the turbidity T of the cleaning liquid,
A conductivity measuring unit that measures the conductivity σ of the cleaning liquid,
A pH measuring unit that measures the pH of the cleaning solution,
A storage unit that stores each measured value and
It is equipped with a calculation unit that calculates the degree of pollution using each of the measured values.
The calculation unit is a cleaning liquid pollution degree determination device including means for converting the pollution degree into a numerical value calculated by the following formula 1 ( G, H, I are coefficients ) into a numerical value of 0-100%.
(Equation 1)
G × T + H × σ + I × pH It is a judgment device that judges the degree of contamination of the cleaning liquid used for cleaning the object to be cleaned.
A turbidity measuring unit that measures the turbidity T of the cleaning liquid,
A conductivity measuring unit that measures the conductivity σ of the cleaning liquid,
A pH measuring unit that measures the pH of the cleaning solution,
A storage unit that stores each measured value and
It is equipped with a calculation unit that calculates the degree of pollution using each of the measured values.
The calculation unit
Means for converting pH to hydrogen ion concentration ratio P,
The degree of contamination of the following formula 2 (D, E, F is a coefficient) comprises means for calculating by converting the value calculated by the 0-100% of the numerical value, the cleaning solution of the contamination level determination device.
(Equation 2)
D × T + E × σ + F × P It is a judgment device that judges the degree of contamination of the cleaning liquid used for cleaning the object to be cleaned.
A turbidity measuring unit that measures the turbidity T of the cleaning liquid,
A conductivity measuring unit that measures the conductivity σ of the cleaning liquid,
A pH measuring unit that measures the pH of the cleaning solution,
A storage unit that stores each measured value and
It is equipped with a calculation unit that calculates the degree of pollution using each of the measured values.
The calculation unit
Means for converting pH to hydrogen ion concentration ratio P,
A means for converting the measured turbidity T into a numerical value Ka of 0-100%,
A means for converting the measured conductivity σ into a numerical value Kb of 0-100%,
A means for converting the measured hydrogen ion concentration ratio P into a numerical value Kc of 0-100%, and
The degree of contamination of the following formula 3 (A, B, C is a coefficient) comprises means for calculating by converting the value calculated by the 0-100% of the numerical value, the cleaning solution of the contamination level determination device.
(Equation 3)
A × Ka + B × Kb + C × Kc A = B = C,
The device for determining the degree of contamination of the cleaning liquid according to claim 3. One or two numbers of A, B, C are larger than the other numbers,
The device for determining the degree of contamination of the cleaning liquid according to claim 3. The piping to which the turbidity measuring unit, the conductivity measuring unit, and the pH measuring unit are connected,
A plurality of containers connected to the piping and storing each calibration solution for calibrating each measurement unit,
Multiple valves that control the flow of each liquid to the pipe,
A three-way valve that controls the flow of cleaning liquid and calibration liquid to the turbidity measuring unit and the pH measuring unit.
A plurality of pumps for distributing the cleaning liquid and each calibration liquid to the piping, and
To prepare
The device for determining the degree of contamination of a cleaning liquid according to any one of claims 1 to 5. The turbidity measuring unit
It has a light source and a light receiving part.
Measure the turbidity by shining light on the cleaning liquid placed in the specified measuring unit container.
The device for determining the degree of contamination of the cleaning liquid according to any one of claims 1 to 6. The conductivity measuring unit is
It has two electrodes arranged at a predetermined interval,
Measure the electrical conductivity by passing an electric current through the cleaning liquid placed in the specified measuring unit container.
The device for determining the degree of contamination of the cleaning liquid according to any one of claims 1 to 7. The pH measuring unit
It has two electrodes that come into contact with both the reference internal fluid and the test fluid.
Measure the pH at the potential generated by the cleaning solution placed in the specified measuring unit container.
The device for determining the degree of contamination of the cleaning liquid according to any one of claims 1 to 8. It is a judgment method for determining the degree of contamination of the cleaning liquid used for cleaning the object to be cleaned.
A turbidity measurement step for measuring the turbidity T of the cleaning liquid, and
Conductivity measurement process for measuring the conductivity σ of the cleaning liquid, and
A pH measurement process for measuring the pH of the cleaning solution and
A storage process for storing the measured values of turbidity T, conductivity σ, and pH, and
It is provided with a calculation process for calculating the degree of contamination using each of the measured values.
The calculation process is
The process of converting pH to hydrogen ion concentration ratio P and
The process of converting the measured turbidity T to a numerical value Ka of 0-100%, and
The process of converting the measured conductivity σ into a numerical value Kb of 0-100%, and
The process of converting the measured hydrogen ion concentration ratio P to a numerical value Kc of 0-100%, and
A method for determining the degree of contamination of a cleaning liquid, which comprises a step of converting a numerical value calculated by the following formula 4 ( A, B, C are coefficients ) into a numerical value of 0-100%.
(Equation 4)
A × Ka + B × Kb + C × Kc