JP2014163847A - Surface deposit measurement instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface deposit detection device which has a small-sized probe and is capable of detecting various elements included in deposits on a surface of a measurement object.SOLUTION: A surface deposit detection device includes: a probe 2 which is arranged so as to be in contact with a measurement object T and elutes surface deposits of the measurement object T into an introduced liquid to obtain a solution and discharges the solution; analysis means 5 which analyzes ions included in the solution discharged from the probe 2; and a liquid circulating mechanism 4 which circulates the liquid between the probe 2 and the analysis means 5. The analysis means 5 includes an analyzer 51 capable of measuring an ion concentration of the solution and a detector 53 capable of detecting an ion concentration of a specific component included in the solution.

Description

  The present invention relates to a surface deposit measuring apparatus capable of detecting a surface deposit on a measurement object.

  For example, in the case of a structure (measurement object) such as a tank of a thermal power plant, the surface of the structure is attached to determine whether the structure needs to be painted or to estimate the progress of corrosion of the structure. Analysis of kimono (salt content) has been carried out. Also, analyzing the amount of salt in this way is important from the viewpoint of quality control of the structure.

  In the conventional salt content analysis, for example, after adding distilled water to the gauze, the gauze is applied to the measurement site, the surface salt is wiped off and the salt content is collected on the gauze side, and then the gauze salt content is extracted to obtain a predetermined value. This is done by measuring with an analyzer. In this method, there is a problem that the process of preparing the gauze and the process of extraction and analysis require time and the number of instruments used for measurement increases.

  In order to avoid the complexity of the measurement method using gauze as described above, Patent Document 1 discloses a probe for salinity measurement, which can measure the amount of salinity by contacting the surface of the structure. A probe is described. This probe has a sensor, a stirrer, an air vent and the like inside.

  On the other hand, in Patent Document 2, as a method for measuring the salt concentration, a calibration curve indicating the relationship between the concentration of sodium chloride in the standard solution and the electrical conductivity is prepared in advance, and the electrical conductivity of the measurement object is measured. A method for analyzing the concentration of sodium chloride by correlating the measured electrical conductivity with the calibration curve described above is disclosed.

International Publication No. 2011/115284 Japanese Patent No. 3089867

  However, the surface deposit measurement apparatus described in Patent Document 1 has a problem that it is difficult to reduce the size because it has a sensor, a stirrer, and an air vent in the probe. Therefore, it could not be applied to small diameter steel pipes.

  Further, in the method described in Patent Document 2, the salt concentration can be analyzed by measuring the electrical conductivity or the like, but it has not been able to cope with the identification of salts. In addition, in the deposit (salt content) on the surface of the structure, an analysis of the amount of specific components (for example, Na, Cl, etc.) may be required, and there is a technique for grasping the concentration of various elements. It has been demanded.

  The present invention has been made in view of the above-described circumstances, and has a small probe and is capable of detecting various elements contained in the deposit on the surface of the measurement object. The purpose is to provide.

  In order to solve the above-mentioned problem, the surface deposit measurement apparatus of the present invention is arranged so as to come into contact with the measurement object, and the surface deposit on the measurement object is eluted into the introduced liquid to form a solution. And a probe for discharging the solution, an analysis means for analyzing ions contained in the solution discharged from the probe, and a liquid circulation mechanism for circulating the liquid between the probe and the analysis means. The analyzing means includes an analyzer capable of measuring an ion concentration of the solution, and a detector capable of detecting an ion concentration of a specific component contained in the solution.

According to the surface deposit measurement apparatus of the present invention, since the solution from which the surface deposit is eluted is discharged by the probe, the analyzer has an analyzer that can measure the ion concentration of the solution discharged by the probe. The total ion concentration contained in can be grasped. Specific examples of the analyzer include an electric conductivity meter.
Furthermore, since the above-mentioned surface deposit measurement apparatus has a detector that can detect the ion concentration of a specific component contained in a solution, the ion concentration of a specific component among the dissolved components of the surface deposit is grasped. can do. Specific examples of the detector include an ion electrode, a portable ion chromatograph, and a portable plasma emission analysis. Further, as the ion concentration of a specific component, for example, the ion concentration of Na ion, Cl ion, K ion, F ion, or the like is analyzed.

Here, by comparing the ion concentration of a specific component measured by the detector with the total ion concentration measured by the above analyzer, how much component other than the component (ion) measured by the detector is measured It is possible to grasp whether it is included.
In the above configuration, since the mechanism for circulating the liquid is independent from the probe, the probe can be reduced in size, and a narrower measurement object can be measured.

  When using the surface deposit measuring apparatus of the present invention for cleaning confirmation, measure the total ion concentration with an analyzer, measure the ion concentration of a specific component with a detector, and perform the same after washing. The total ion concentration and the ion concentration of a specific component are measured. Then, the concentration reduction rates of various components are calculated, and in the next and subsequent cleaning confirmations, based on this reduction rate, only the component with the lowest concentration reduction rate is measured to determine the cleaning status, thereby collecting the solution. It is possible to reduce time and time required for analysis.

Furthermore, it is preferable that the analysis means further includes a measuring meter capable of measuring the pH of the solution.
In this case, it is possible to grasp the balance between cations and anions of dissolved components contained in the solution. In addition, the measurement accuracy of the detector may change depending on the pH and total ion concentration. By knowing the pH and total ion concentration in advance, it is possible to determine whether the components contained in the solution can be measured by the detector. Judgment can be made.

It is preferable to provide an adjustment liquid introduction mechanism for introducing an adjustment liquid for adjusting at least one of pH and ion concentration of the solution.
In this case, even when the pH and ion concentration of the solution do not satisfy the detection conditions of the detector, the solution can be adjusted to an appropriate pH and ion concentration, and therefore can be measured by the detector.

The liquid circulation mechanism includes a circulation channel through which the liquid circulates, a circulation pump provided on the upstream side of the probe on the circulation channel, and a first provided on the upstream side of the circulation pump. The circulation flow is connected to the circulation flow path through one branch path, and through a water supply tank containing the liquid, and a second branch path provided between the first branch path and the analyzer. A waste liquid tank that is connected to the passage and stores the solution, a first stop valve provided on the first branch passage, a second stop valve provided on the second branch passage, and the circulation passage. And a third stop valve provided between the first branch path and the second branch path.
In this configuration, since the used liquid can be discharged to the waste liquid tank and liquid (fresh water) can be supplied from the water supply tank, the circulation channel can be cleaned and the deposits on the surface of the measurement object can be continuously measured. Thus, a plurality of locations can be measured.

The probe has an opening at one end and a probe main body provided with a liquid holding chamber for holding the liquid therein, and a liquid supply for supplying the liquid circulating in the circulation channel to the liquid holding chamber It is preferable to have a channel and a liquid discharge channel for discharging the solution to the circulation channel.
In this case, the analyzer is equipped with a liquid supply path for dissolving the deposit on the surface of the measurement object in the liquid holding chamber and supplying a liquid and a liquid discharge path for discharging the solution in which the deposit is dissolved. The solution can be surely sent to the analysis means having the vessel.

  ADVANTAGE OF THE INVENTION According to this invention, the surface deposit | attachment detection apparatus which has a small probe and can detect the various elements contained in the deposit | attachment on the surface of a measuring object can be provided.

It is a schematic explanatory drawing of the surface deposit measurement apparatus concerning 1st embodiment of this invention. It is a schematic explanatory drawing of the probe of FIG. It is a flowchart explaining the measuring method of the surface deposit which concerns on 1st embodiment. It is a flowchart of the modification of the measuring method of the surface deposit which concerns on 1st embodiment. It is a schematic explanatory drawing of the surface deposit measurement apparatus which concerns on 2nd embodiment of this invention. It is a flowchart of the measuring method of the surface deposit which concerns on 2nd embodiment of this invention.

(First embodiment)
Embodiments of the present invention will be described below in detail with reference to the drawings. First, a first embodiment of the present invention will be described.
As shown in FIG. 1, the surface deposit measurement apparatus 1 according to the first embodiment is a measurement apparatus for salt content (attachment) adhered to the surface of the measurement target T. The surface deposit measurement apparatus 1 includes a probe 2 disposed so as to be in contact with the measurement target T, a liquid circulation mechanism 4 for circulating water in the liquid holding chamber 3 in the probe 2, and a circulating water. Analyzing means 5 for analyzing ions in an aqueous solution from which salt (adhered matter) is eluted (dissolved).
The probe 2 is introduced with clean water (distilled water), and the aqueous solution from which the salt content is eluted is discharged, and the discharged aqueous solution is sent to the analysis means 5 through the circulation channel 6 of the liquid circulation mechanism 4. is there.

  The liquid circulation mechanism 4 is a mechanism for circulating the liquid between the probe 2 and the analysis means 5 via the circulation channel 6. The circulation flow path 6 includes a first circulation flow path 7 that connects the discharge port 12 of the analysis means 5 and the liquid supply path 9 of the probe 2, a liquid discharge path 10 of the probe 2, and an introduction port 11 of the analysis means 5. It consists of the 2nd circulation flow path 8 to connect.

  In the first circulation channel 7, a water supply tank 14 for supplying fresh water to the probe 2, a first pump 15 for circulating the liquid in the circulation channel 6, and an aqueous solution discharged from the analysis means 5 are contained. A waste liquid tank 16 to be introduced is provided.

  Specifically, when the upstream side of the first circulation channel 7 is the analysis means 5 side and the downstream side is the probe 2 side, the first circulation channel 7 includes a first pump 15 on the upstream side of the probe 2. A first branch path 17 that branches from the first circulation path 7 is provided on the upstream side of the first pump 15, and is upstream of the first branch path 17 and between the first branch path 17 and the analysis means 5. A second branch path 18 is provided between them.

  In the first circulation channel 7, a water supply tank 14 for supplying fresh water to the probe 2, a first pump 15 for circulating the liquid in the circulation channel 6, and an aqueous solution discharged from the analysis means 5 are contained. A waste liquid tank 16 to be introduced is provided.

The water supply tank 14 is connected to the first circulation flow path 7 via the first branch path 17, and the waste liquid tank 16 is connected to the first circulation flow path 7 via the second branch path 18.
A first stop valve 19 is provided on the first branch path 17, and water supply from the water supply tank 14 to the first circulation flow path 7 can be controlled. Similarly, a second stop valve 20 is provided on the second branch path 18, and the flow path of the aqueous solution from the first circulation path 7 to the waste liquid tank 16 can be controlled.

Further, a third stop valve 21 is provided on the first circulation channel 7 between the first branch channel 17 and the second branch channel 18, and the first branch channel 17 and the second branch channel are provided. It is possible to control the flow of the circulation channel 6 between the channel 18.
The first stop valve 19, the second stop valve 20, and the third stop valve 21 are open / close valves such as electromagnetic valves, for example.

  The second circulation channel 8 is provided with a second pump 22 for circulating the liquid in the circulation channel 6. In addition, the instrument for circulating the liquid provided in the 2nd circulation flow path 8 is not restricted to an above-described pump, It is also possible to utilize an ejector.

  As shown in FIG. 2, the probe 2 has a substantially cylindrical probe main body 24, and is a part where one end of the probe main body 24 is brought into contact with the measurement target T. Note that the shape of the probe 2 is not limited to a cylindrical shape, and it is sufficient that a surface that contacts the measurement object T can be formed at one end. For example, a box shape or a polygonal column shape may be used.

  The probe main body 24 has a circular opening 25 at one end and a liquid holding chamber 3 for holding a liquid therein. Around the opening 25, an annular seal member 26 for preventing leakage of liquid is attached.

  The probe main body 24 has a liquid supply path 9 for supplying liquid from the other end side of the probe main body 24 to the liquid holding chamber 3 and a liquid discharge for discharging liquid from the liquid holding chamber 3 to the other end side of the probe main body 24. A path 10 is formed. As described above, the liquid supply path 9 is connected to the first circulation flow path 7, and the liquid discharge path 10 is connected to the second circulation flow path 8.

  The analysis means 5 is included in the solution, an analyzer 51 that can measure the ion concentration in the solution from which the salinity (adhesion) on the surface of the structure is eluted, a pH meter 52 that can measure the pH in the solution, and the like. And a detector 53 capable of detecting the ion concentration of a specific component.

  The analyzer 51 is a so-called flow cell (also called a flow cytometer or flow cytometry), and is an analyzer that can measure the electrical conductivity of the circulating liquid. In this embodiment, it is set as the structure which grasps | ascertains the total ion amount contained in a solution by measuring electrical conductivity.

The pH meter 52 is for grasping the balance between the cation concentration and the anion concentration contained in the solution, and an existing pH meter can be used.
The detector 53 is a device that can detect a specific component among components dissolved in a solution. Specific components contained in the solution include, for example, Na ions, K ions, Cl ions, F ions, Cs ions, Fe ions, and Ca ions.
Specific examples of the detector 53 include an ion electrode, a portable ion chromatograph, a portable plasma emission analysis, and the like, and a plurality of these may be used in combination.
In the first embodiment, the case where the analysis unit 5 includes the pH meter 52 will be described, but the pH meter 52 may not be included.

Next, a method for measuring a surface deposit according to the present embodiment will be described with reference to the flowchart of FIG.
First, the probe 2 is fixed to the surface of the measurement object T (structure) (S11). The probe 2 can be fixed by pressing the probe 2 with an operator's hand.
Since the liquid fed by the first pump 15 is sucked in a balanced manner by the second pump 22, even if the probe 2 moves away from the measuring object T, the liquid is maintained without dripping. Can be appropriately moved. At this time, the probe is moved with respect to a predetermined surface area of the measurement object.

    Next, the first stop valve 19 is opened, and a fixed amount of water is supplied from the water supply tank 14 using the first pump 15 (S12). The supplied water flows into the first circulation channel 7.

Next, water is supplied to the probe 2 by the first pump 15 and then circulated back to the first pump 15 after passing through the analyzing means 5 (S13).
Here, the water supplied to the probe 2 by the first pump 15 flows into the liquid holding chamber 3 of the probe 2, and the water in the liquid holding chamber 3 is attached with salt or the like attached to the surface of the measurement target T. The kimono elutes. The aqueous solution from which the deposits are eluted is discharged from the probe 2 and flows into the second circulation channel 8.
Further, the aqueous solution passes through the analysis means 5 and flows into the first circulation channel 7. When the entire circulation channel 6 is filled with water, the first stop valve 19 is closed and the first pump 15 and the second pump 22 are operated to circulate water.

    The output of electrical conductivity is monitored by the analyzer 51 of the analysis means 5 (S14). Monitoring continues until the output stabilizes. The stability of the output is determined based on the standard deviation of a plurality of measured values. Note that the standard value of the standard deviation from which it can be determined that the output is stable can be arbitrarily set.

When the output is stabilized, the electric conductivity is measured by the analyzer 51 (S15), whereby the salinity concentration contained in the aqueous solution can be measured. The relationship between the electrical conductivity and the salinity concentration (ion concentration) is known in advance.
Here, the salinity concentration grasped by the electric conductivity means a concentration calculated on the assumption that all of the dissolved components contained in the solution are specific salts (for example, NaCl or the like).

  Next, the pH of the solution is measured by the pH meter 52 included in the analysis means 5 (S16). Thereby, the balance between the cation and the anion in the solution can be grasped.

Next, the ion concentration of the specific component is measured by the detector 53 included in the analysis means 5 (S17). Here, the detector 53 may select a detector necessary for detecting a specific component to be measured. In addition, when there are a plurality of detectors, the detectors can be switched at any time, and a minimum number of detectors may be used as necessary.
Specifically, in this embodiment, Na ions, K ions, and Cl ions are measured by a detector.

Here, the total ion concentration obtained in S15 is compared with the ion concentration obtained in S17 (S18), that is, from the ion concentration measured for a specific component (the total concentration of Na ions, K ions, and Cl ions). The estimated electrical conductivity is compared with the electrical conductivity obtained from the electrical conductivity measured by the analyzer, and the ion concentrations of components other than the specific component obtained as described above are grasped (S19). . In addition, when analyzing in detail about components other than a specific component, what is necessary is just to analyze in a laboratory etc. by another analysis method.
As described above, the method for measuring a surface deposit according to the present embodiment is completed.

Next, a method for cleaning the circulation channel 6 of the surface deposit measurement apparatus 1 will be described.
First, the first stop valve 19 provided in the first branch passage 17 connecting the water supply tank 14 and the circulation flow path 6 is opened, and the first pump 15 is operated to supply water from the water supply tank 14. As a result, the measured liquid is pushed out and drained into the waste liquid tank 16. At this time, the second stop valve 20 provided in the second branch path 18 connecting the waste liquid tank 16 and the circulation path 6 is opened, and the gap between the first branch path 17 and the second branch path 18 is set. The third stop valve 21 is closed.

Subsequently, water is supplied from the water supply tank 14 to clean the probe 2 and the analysis means 5. At this time, the waste liquid is drained to the waste liquid tank 16 as needed.
Next, the output of electrical conductivity is monitored by the analyzer 51. Monitoring is continued until the output stabilizes at the baseline (electric conductivity value of fresh water).
When the output is stable at the baseline, cleaning is complete. Water supply from the water supply tank 14 is stopped, and the first stop valve 19 is closed.

  In the case of an abnormality such as at least a part of the circulation channel 6 being blocked by foreign matter, it is possible to reverse the flow of the liquid with a pump and remove the foreign matter.

According to the surface deposit measuring apparatus 1 according to the present embodiment configured as described above, the solution from which the surface deposit is eluted is discharged by the probe 2, and the ion concentration of the solution discharged by the probe 2 is measured. A possible analyzer 51 is provided, and the total ion concentration (salt content) contained in the solution can be grasped by measuring the electrical conductivity.
Furthermore, since the surface deposit measurement apparatus 1 according to the present embodiment includes the detector 53 that can detect the ion concentration of a specific component contained in the solution, a specific component among the dissolved components of the surface deposit. The ion concentration of can be grasped.

  Then, by comparing the specific ion concentration measured by the detector 53 with the total ion concentration measured by the analyzer 51, a component (ion) other than the component (ion) measured by the detector 53 It is possible to grasp how much is included.

Further, in the surface deposit measuring apparatus 1 according to the present embodiment, the mechanism for circulating the liquid is made independent of the probe 2, so that the probe 2 can be miniaturized, and the narrower measuring object T is measured. It becomes possible to do.
Furthermore, since the detector 53 of the analysis means 5 can be carried, it can be configured without increasing the size of the surface deposit measuring device 1, and after collecting the surface deposit on the measuring object T, it is carried to a laboratory for analysis. Therefore, it is possible to continuously analyze the surface deposits on the spot while collecting the surface deposits.

  When the surface deposit measurement apparatus 1 of the present invention is used for cleaning confirmation, the total ion concentration is measured by the analyzer 51, the ion concentration of a specific component is measured by the detector 53, and even after washing. Similarly, the total ion concentration and the ion concentration of a specific component are measured. Then, the concentration reduction rate of each component is calculated, and in the next cleaning check, the solution collection time is determined by measuring only the component with the highest concentration reduction rate based on this reduction rate and determining the cleaning status. And the time required for analysis can be shortened.

  Further, in the surface deposit measurement apparatus 1 according to the present embodiment, the used liquid can be discharged to the waste liquid tank 16 and the liquid (fresh water) can be supplied from the water supply tank 14. Cleaning can be performed, and a plurality of locations can be continuously measured for the deposit on the surface of the measurement target T.

  Further, the probe 2 according to the present embodiment dissolves the deposit on the surface of the measurement target T in the liquid holding chamber 3, and supplies a liquid supply path 9 for supplying the liquid and a liquid discharge path for discharging the solution in which the deposit is dissolved. 10, the solution can be reliably sent to the analysis means 5 side having the analyzer 51 and the detector 53.

  FIG. 4 shows a flowchart of a modification of the method for measuring a surface deposit according to the present embodiment. As shown in FIG. 4, before measuring the ion concentration of a specific component by a detector, it may be determined whether or not the ion concentration of the specific component can be detected (S17a). When the ion concentration of a specific component in a solution is measured by a detector such as an ion electrode, the measurement accuracy of the detector may change depending on the pH range or the total ion concentration.

Therefore, the electrical conductivity (total ion concentration) and pH in the solution are measured, whether the ion concentration in the solution is in the proper range, and whether the pH of the solution is in the proper range from these measurement results. To determine whether the ion concentration of a specific component can be detected by the detector. In this manner, only measurable components can be selected and measured, and unnecessary measurements can be eliminated in advance, and the reliability of the analysis results can be sufficiently ensured.
For example, when a liquid film Na ion electrode is applied as the ion electrode, the pH of the solution needs to be in the range of about 6-12. Even when other electrodes are used, a strong alkaline solution (pH> 12) cannot be analyzed accurately.

(Second embodiment)
Next, the surface deposit measurement apparatus 101 according to the second embodiment of the present invention will be described. The surface deposit measurement apparatus 101 according to the second embodiment is configured such that the surface deposit measurement apparatus 1 according to the first embodiment further includes the adjustment liquid introduction mechanism 120, and is similar to the surface deposit measurement apparatus 1. The components having the structure are denoted by the same reference numerals and detailed description thereof is omitted.

The surface deposit measurement apparatus 101 according to the second embodiment includes an adjustment liquid introduction mechanism 120 that introduces an adjustment liquid capable of adjusting the pH and ion concentration of a circulating solution. For example, the adjustment liquid introduction mechanism 120 is provided to introduce the adjustment liquid into the second circulation channel 8 as shown in FIG.
The adjustment liquid is a solution for adjusting the pH and ion concentration of the solution. For example, dilute sulfuric acid or phosphoric acid can be used as the adjustment solution when the solution in which the surface deposits are dissolved is alkaline, and slaked lime, magnesium hydroxide, caustic soda, or the like can be used when the solution is acidic. . In addition, it is necessary that the neutralizing agent to be used and the component to be measured do not coincide with each other, and an adjustment liquid can be selected as appropriate.

  Next, a method for measuring a surface deposit according to the second embodiment will be described with reference to the flowchart of FIG. The method for measuring surface deposits according to the second embodiment is the same as the method for measuring surface deposits according to the modification of the first embodiment described with reference to FIG. The configuration is the same except that (adjustment) is performed (S17b).

  Specifically, when the detector 53 determines whether the analysis of the ion concentration is possible (S17a), if the detector 53 determines that the analysis is impossible, the adjustment liquid introduction mechanism 120 supplies a necessary amount of the adjustment liquid. It introduce | transduces in a 2nd circulation flow path, and adjusts at least any one among pH of a solution, or ion concentration (total ion concentration) to an appropriate range. In this way, the ion concentration of a specific component can be accurately measured by the detector 53.

  The surface adhering matter measuring apparatus according to the embodiment of the present invention has been described above, but the present invention is not limited to this, and can be appropriately changed without departing from the technical idea of the present invention.

  For example, in the above-described embodiment, the probe 2 is configured to be pressed against the measurement target T by the operator's hand, but is not limited thereto, and is fixed to the surface of the measurement target T with an adhesive attachment or the like. Also good. Moreover, when the measuring object T is formed of a magnetic material, it can be fixed with an attachment using a magnet.

  Moreover, in each said embodiment, although it was set as the structure which supplies water from the water supply tank connected via the branch path using the circulation pump, it does not restrict to this. For example, if a tank having a direct water supply / drainage function is provided in the circulation pump and water can be sent from the circulation pump, the water supply tank and the waste liquid tank can be omitted.

DESCRIPTION OF SYMBOLS 1,101 Surface deposit measurement apparatus 2 Probe 3 Liquid holding chamber 4 Liquid circulation mechanism 5 Analyzing means 6 Circulation channel 7 First circulation channel 8 Second circulation channel 9 Liquid supply channel 10 Liquid discharge channel 14 Water supply tank 15 Pump 16 Waste liquid tank 17 First branch path 18 Second branch path 51 Analyzer 52 pH meter (measurement meter)
53 Detector 120 Adjustment liquid introduction mechanism

Claims (5)

A probe that is arranged in contact with the measurement object, elutes the surface deposits of the measurement object into the introduced liquid to form a solution, and discharges the solution;
Analyzing means for analyzing ions contained in the solution discharged from the probe;
A liquid circulation mechanism for circulating the liquid between the probe and the analysis means,
The surface adhering matter measuring apparatus, wherein the analyzing means includes an analyzer capable of measuring an ion concentration of the solution and a detector capable of detecting an ion concentration of a specific component contained in the solution.   The analysis means further includes a measuring instrument capable of measuring the pH of the solution.   The surface adhering matter measuring apparatus according to claim 2, further comprising an adjustment liquid introduction mechanism that introduces an adjustment liquid for adjusting at least one of pH and ion concentration of the solution. The liquid circulation mechanism is
A circulation channel through which the liquid circulates;
A circulation pump provided on the circulation flow path and upstream of the probe;
A water supply tank connected to the circulation flow path via a first branch path provided on the upstream side of the circulation pump, and containing the liquid;
A waste liquid tank that is connected to the circulation flow path via a second branch path provided between the first branch path and the analyzer, and stores the solution;
A first stop valve provided on the first branch path;
A second stop valve provided on the second branch path;
4. A third stop valve provided on the circulation flow path and between the first branch path and the second branch path. The surface deposit measuring apparatus according to 1. The probe is
A probe body having an opening at one end and a liquid holding chamber for holding the liquid therein;
A liquid supply path for supplying the liquid circulating in the circulation flow path to the liquid holding chamber;
5. The surface deposit measurement apparatus according to claim 1, further comprising: a liquid discharge path that discharges the solution to the circulation flow path.

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