JP6808928B2 - 感光性樹脂組成物 - Google Patents

感光性樹脂組成物 Download PDF

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Publication number
JP6808928B2
JP6808928B2 JP2015219205A JP2015219205A JP6808928B2 JP 6808928 B2 JP6808928 B2 JP 6808928B2 JP 2015219205 A JP2015219205 A JP 2015219205A JP 2015219205 A JP2015219205 A JP 2015219205A JP 6808928 B2 JP6808928 B2 JP 6808928B2
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carbon atoms
group
general formula
acid
compound
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JP2017090619A (ja
JP2017090619A5 (https=
Inventor
南橋　克哉
克哉 南橋
泰 柳澤
泰 柳澤
大公 渡辺
大公 渡辺
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Toray Industries Inc
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Toray Industries Inc
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Electroluminescent Light Sources (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2015219205A 2015-11-09 2015-11-09 感光性樹脂組成物 Active JP6808928B2 (ja)

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JP2015219205A JP6808928B2 (ja) 2015-11-09 2015-11-09 感光性樹脂組成物

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JP2015219205A JP6808928B2 (ja) 2015-11-09 2015-11-09 感光性樹脂組成物

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JP2017090619A JP2017090619A (ja) 2017-05-25
JP2017090619A5 JP2017090619A5 (https=) 2018-12-13
JP6808928B2 true JP6808928B2 (ja) 2021-01-06

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102149966B1 (ko) * 2018-03-09 2020-08-31 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 감광성 수지막 및 전자 소자
JP7252020B2 (ja) * 2018-04-16 2023-04-04 旭化成株式会社 ネガ型感光性樹脂組成物及び硬化レリーフパターンの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5421585B2 (ja) * 2008-12-24 2014-02-19 旭化成イーマテリアルズ株式会社 感光性樹脂組成物
JP5920345B2 (ja) * 2011-06-15 2016-05-18 日立化成デュポンマイクロシステムズ株式会社 感光性樹脂組成物、該樹脂組成物を用いたパターン硬化膜の製造方法及び電子部品

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