JP6792502B2 - Board processing system, control method and program of board processing system - Google Patents

Description

The present invention relates to a substrate processing system, a control method and a program of the substrate processing system. In particular, the present invention relates to a control technique for a substrate processing system in which a liquid exchange operation occurs depending on the life of a treatment liquid containing a chemical liquid. The substrates to be processed include, for example, a semiconductor substrate, a liquid crystal display substrate, a plasma display substrate, a FED (Field Emission Display) substrate, an optical disk substrate, a magnetic disk substrate, a photomagnetic disk substrate, and a photomask. Substrates, ceramic substrates, solar cell substrates, etc. are included.

In the substrate processing apparatus, processing using a processing liquid such as a chemical solution is performed on the substrate. However, this treatment liquid has a limited life. Therefore, for example, the liquid treatment is replaced when the lifetime that defines the life of the treatment liquid is extended (see, for example, Patent Document 1).

In the technique of Patent Document 1, for example, before the start of substrate processing, a liquid exchange schedule is arranged according to the time when the life of the processing liquid is reached, and for this liquid exchange schedule, for each lot composed of a plurality of substrates. The usage timing of each part is arranged so that the usage timing of each part of the substrate processing apparatus used for processing does not overlap. Then, for example, when there is a waiting time between the liquid exchange schedule and the use timing of each part used for processing each lot, the liquid exchange schedule should be shifted backward according to the use timing of each part. Therefore, the waste of the life of the treatment liquid is reduced.

Japanese Patent No. 5118530

However, in the technique of Patent Document 1, for example, a schedule is created so as to use each part of the substrate processing apparatus used for processing each lot so as to avoid a liquid exchange schedule. Therefore, for example, it is not possible to execute the substrate processing using the processing liquid being replaced during the period when the treatment liquid is replaced. That is, the operating rate of the substrate processing apparatus is lowered.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate processing system, a control method and a program of the substrate processing system, which can easily improve the operating rate of the substrate processing apparatus. To do.

In order to solve the above problems, the substrate processing system according to the first aspect includes one or more processing units, a storage unit, a liquid storage unit, an acquisition unit, a setting unit, a detection unit, and a recognition unit. And a detection unit. The one or more processing units process the substrate with a processing liquid. The storage unit includes a first continuous process of sequentially processing a plurality of substrates included in the first substrate group in the one or more processing units, and a plurality of substrates included in the second substrate group. The processing plan information indicating the execution timing for the second continuous processing in which the processing is sequentially performed and the plurality of continuous processing related to the plurality of substrate groups including the second continuous processing is stored. The liquid storage unit stores the treatment liquid used in the one or more treatment units. The acquisition unit acquires a numerical value related to the state of the treatment liquid. The setting unit sets the replacement time of the treatment liquid stored in the liquid storage unit based on the numerical value acquired by the acquisition unit and the preset rule relating to the life of the treatment liquid. To do. The detection unit detects a standby state in which any continuous processing of the plurality of continuous processing is not executed by the one or more processing units at the replacement time. The recognition unit recognizes the duration of the standby state based on the processing plan information. The detection unit detects a liquid exchangeable state in which the duration is equal to or longer than a preset reference time.

The substrate processing system according to the second aspect is the substrate processing system according to the first aspect, which is a liquid exchange unit that executes a liquid exchange process for exchanging the processing liquid stored in the liquid storage unit. Further provided, the liquid exchange unit executes the liquid exchange process in response to the detection of the liquid exchangeable state by the detection unit.

The substrate processing system according to the third aspect is the substrate processing system according to the second aspect, and the liquid exchange unit does not detect the liquid exchangeable state by the detection unit at the exchange time. When the exchange time has passed, the liquid exchange process is executed in response to the completion of the continuous process being executed in the one or more processing units of the plurality of continuous processes.

The substrate processing system according to the fourth aspect is the substrate processing system according to the second aspect, in which a plurality of substrates housed in a carrier are carried out from the carrier toward the one or more processing units. The liquid exchange unit is further provided with a transport unit, and when the exchangeable state is not detected by the detection unit at the exchange time and the exchange time has passed, the liquid exchange unit is used by the carrier unit to perform the above 1 from the carrier. The liquid exchange process is executed in response to the completion of the process in the one or more processing units for all the substrates that have already been carried out to the one or more processing units.

The substrate processing system according to the fifth aspect is the substrate processing system according to the fourth aspect, and the transport unit is described without the detection unit detecting the liquid exchangeable state at the exchange time. When the replacement period has passed, the unloading of the substrate from the carrier to the one or more processing units is stopped from the end of the replacement period to the completion of the liquid exchange process.

The substrate processing system according to the sixth aspect is the substrate processing system according to the second aspect, and the liquid exchange unit does not detect the liquid exchangeable state by the detection unit at the exchange time. When the replacement time has passed, all the substrates already located in the one or more processing units are exchanged in response to the completion of the processing in the one or more processing units. Execute the process.

The substrate processing system according to the seventh aspect is the substrate processing system according to the sixth aspect, and the one or more processing units are from the start to the completion of the execution of the liquid exchange process by the liquid exchange unit. Until, the execution of processing on the board is stopped.

The substrate processing system according to the eighth aspect is the substrate processing system according to the first aspect, and in response to the detection of the liquid exchangeable state by the detection unit, a user-recognizable first output is output. It also has an output unit to perform.

The substrate processing system according to the ninth aspect is the substrate processing system according to the eighth aspect, and the output unit is described without the detection unit detecting the liquid exchangeable state at the exchange time. In response to the replacement time having passed, a second output recognizable by the user is produced.

The substrate processing system according to the tenth aspect is the substrate processing system according to any one of the first to ninth aspects, and is a substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus. And have. The substrate processing apparatus includes the one or more processing units, the liquid storage unit, the acquisition unit, the setting unit, and the detection unit. The management device includes the storage unit, the recognition unit, and the detection unit. The substrate processing device further includes a transmission unit that transmits a first signal to the management device in response to detection of the standby state by the detection unit. The management device further includes a receiving unit that receives the first signal from the transmitting unit. In the management device, in response to the reception of the first signal by the receiving unit, the recognition unit recognizes the duration based on the processing plan information, and the detecting unit determines the liquid exchangeable state. To detect.

The substrate processing system according to the eleventh aspect is the substrate processing system according to the tenth aspect, and the transmission unit satisfies the specific conditions set in advance by the numerical values acquired by the acquisition unit. In response, the second signal is transmitted to the management device, and after the management device receives the second signal by the receiving unit, the recognition unit responds to the reception of the first signal by the receiving unit. Recognizes the duration based on the processing plan information, and the detection unit detects the liquid exchangeable state.

The substrate processing system according to the twelfth aspect is the substrate processing system according to any one of the first to ninth aspects, and is a substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus. And have. The substrate processing apparatus includes the one or more processing units, the liquid storage unit, the acquisition unit, the setting unit, and the detection unit. The management device includes the storage unit, the recognition unit, and the detection unit. The substrate processing device transmits the replacement time information related to the replacement time set by the setting unit to the management device, and sends a first signal to the management device in response to the detection of the standby state by the detection unit. Further includes a transmitter to transmit. The management device further includes the exchange time information transmitted by the transmission unit and a reception unit that receives the first signal. In the management device, in response to the reception of the first signal by the receiving unit at the exchange time, the recognition unit recognizes the duration based on the processing plan information, and the detecting unit recognizes the duration. Detect the liquid exchangeable state.

The substrate processing system according to the thirteenth aspect is the substrate processing system according to the twelfth aspect, and the transmission unit satisfies the specific conditions set in advance by the numerical values acquired by the acquisition unit. In response, the second signal is transmitted to the management device, and after the management device receives the second signal by the receiving unit, it responds to the reception of the first signal by the receiving unit at the exchange time. The recognition unit recognizes the duration based on the processing plan information, and the detection unit detects the liquid exchangeable state.

The control method of the substrate processing system according to the fourteenth aspect is that one or more processing units that process the substrates using the processing liquid and a plurality of substrates of the first substrate group in the one or more processing units. Execution timing for a plurality of continuous processes related to a plurality of board groups including a first continuous process in which processing is sequentially performed on a plurality of substrates and a second continuous processing in which a plurality of substrates in the second substrate group are sequentially processed. A control method for a substrate processing system including a storage unit for storing processing plan information indicating the above, and a liquid storage unit for storing the processing liquid used in the one or more processing units. It has a step, a setting step, a detection step, a recognition step, and a detection step. In the acquisition step, a numerical value related to the state of the treatment liquid is acquired. In the setting step, the replacement time of the treatment liquid stored in the liquid storage unit is set based on the numerical value acquired in the acquisition step and the preset rule relating to the life of the treatment liquid. To do. In the detection step, a standby state in which any continuous processing of the plurality of continuous processing is not executed by the one or more processing units is detected at the replacement time. In the recognition step, the duration of the standby state is recognized based on the processing plan information. In the detection step, a liquid exchangeable state in which the duration is equal to or longer than a preset reference time is detected.

The control method of the substrate processing system according to the fifteenth aspect is the control method of the substrate processing system according to the fourteenth aspect, and the liquid storage unit responds to the detection of the liquid exchangeable state by the detection step. It further comprises a first liquid exchange step of performing a liquid exchange process for exchanging the treatment liquid stored in the.

The control method of the substrate processing system according to the sixteenth aspect is the control method of the substrate processing system according to the fifteenth aspect, in which the liquid exchangeable state is not detected in the detection step at the exchange time. When the exchange time has passed, a second liquid exchange step of executing the liquid exchange process in response to the completion of the continuous process being executed in the one or more processing units of the plurality of continuous processes. , Further have.

The method for controlling the substrate processing system according to the seventeenth aspect is the method for controlling the substrate processing system according to the fifteenth aspect, in which a plurality of substrates housed in a carrier are processed by one or more of the above carriers. It further has a unloading step for unloading to the unit, and when the replacement time has passed without the liquid exchangeable state being detected in the detection step at the replacement time, the carrier to the unloading step A second liquid exchange step of executing the liquid exchange process in response to the completion of processing in the one or more processing units for all the substrates that have already been carried out to the one or more processing units. , Further have.

The control method of the substrate processing system according to the eighteenth aspect is the control method of the substrate processing system according to the seventeenth aspect, in which the liquid exchangeable state is not detected in the detection step at the exchange time. When the replacement period has passed, the unloading of the substrate from the carrier to the one or more processing units in the unloading step is stopped from the end of the replacement period to the completion of the liquid exchange process.

The control method of the substrate processing system according to the nineteenth aspect is the control method of the substrate processing system according to the fifteenth aspect, in which the liquid exchangeable state is not detected in the detection step at the exchange time. When the replacement time has passed, all the substrates already located in the one or more processing units are exchanged in response to the completion of the processing in the one or more processing units. It further has a second liquid exchange step, which performs the process.

The control method of the substrate processing system according to the twentieth aspect is the control method of the substrate processing system according to the nineteenth aspect, and the one or more processing units are the liquid exchange processing in the second liquid exchange step. Stops the execution of processing on the board from the start to the end of the execution of.

The control method of the substrate processing system according to the twenty-first aspect is the control method of the substrate processing system according to the fourteenth aspect, and can be recognized by the user in response to the detection of the liquid exchangeable state in the detection step. It also has a first output step, which produces a first output.

The control method of the substrate processing system according to the 22nd aspect is the control method of the substrate processing system according to the 21st aspect, in which the liquid exchangeable state is not detected in the detection step at the exchange time. It further has a second output step, which produces a second output recognizable by the user in response to the replacement time.

The control method of the substrate processing system according to the 23rd aspect is the control method of the substrate processing system according to any one of the 14th to 22nd aspects, and the substrate processing system includes the substrate processing apparatus and the substrate. It includes a management device that is communicatively connected to the processing device. The substrate processing apparatus includes the one or more processing units and the liquid storage unit. The management device includes the storage unit. Further, the control method of the board processing system includes a first signal transmission step of transmitting a first signal to the management device in response to detection of the standby state in the detection step in the board processing device, and the management device. In response to the reception of the first signal in the first signal receiving step in the management device, the processing plan in the recognition step has a first signal receiving step for receiving the first signal. The duration is recognized based on the information, and the liquid exchangeable state is detected in the detection step.

The control method of the substrate processing system according to the 24th aspect is the control method of the substrate processing system according to the 23rd aspect, and the specific value acquired in the acquisition step is preset in the substrate processing apparatus. It further has a second signal transmission step of transmitting a second signal to the management device in response to satisfying the condition, and a second signal reception step of receiving the second signal in the management device. In the management device, after receiving the second signal in the second signal receiving step, in response to receiving the first signal in the first signal receiving step, based on the processing plan information in the recognition step. The duration is recognized, and the liquid exchangeable state is detected in the detection step.

The control method of the substrate processing system according to the 25th aspect is the control method of the substrate processing system according to any one of the 14th to 22nd aspects, and the substrate processing system includes the substrate processing apparatus and the substrate. It includes a management device that is communicatively connected to the processing device. The substrate processing apparatus includes the one or more processing units and the liquid storage unit. The management device includes the storage unit. Further, the control method of the board processing system includes a time information transmission step of transmitting the replacement time information related to the replacement time set in the setting step to the management device in the board processing device, and the board processing device. The first signal transmission step of transmitting the first signal to the management device in response to the detection of the standby state in the detection step, the time information receiving step of receiving the exchange time information in the management device, and the above. The management device has a first signal receiving step for receiving the first signal, and the management device responds to the reception of the first signal in the first signal receiving step at the exchange time. The recognition step recognizes the duration based on the processing plan information, and the detection step detects the liquid exchangeable state.

The control method of the substrate processing system according to the 26th aspect is the control method of the substrate processing system according to the 25th aspect, and the specific value acquired in the acquisition step is preset in the substrate processing apparatus. It further has a second signal transmission step of transmitting a second signal to the management device in response to satisfying the condition, and a second signal reception step of receiving the second signal in the management device. After receiving the second signal in the second signal receiving step in the management device, in response to the reception of the first signal in the first signal receiving step at the exchange time, the recognition step The duration is recognized based on the processing plan information, and the liquid exchangeable state is detected in the detection step.

The program according to the 27th aspect is executed by the arithmetic processing unit included in the substrate processing system to make the substrate processing system function as the substrate processing system according to any one of the first to thirteenth aspects. ..

By any of the substrate processing system according to the first to thirteenth aspects, the control method of the substrate processing system according to the fourteenth to twenty-sixth aspects, and the program according to the 27th aspect, for example, the numerical value related to the state of the processing liquid can be obtained. At the processing liquid replacement time set based on the above, the standby state of one or more processing units is detected, and the liquid exchangeable state in which the duration of this standby state is equal to or longer than the reference time is detected. Thereby, for example, the processing liquid stored in the liquid storage unit can be replaced in response to the detection of the liquid exchangeable state. Therefore, for example, the processing liquid in the liquid storage unit should be replaced by effectively utilizing a sufficiently long duration in which one or more processing units are on standby at the replacement period having a certain width. Can be done. As a result, for example, the operating rate of one or more processing units can be improved. Therefore, the operating rate of the substrate processing apparatus can be easily improved.

Regardless of the control method of the substrate processing system according to the second aspect and the control method of the substrate processing system according to the fifteenth aspect, for example, at the time of exchanging the processing liquid, the standby state is longer than the reference time for exchanging the processing liquid. If the above continues, the treatment liquid is automatically replaced. Thereby, for example, the treatment liquid can be replaced at an appropriate timing.

By any of the control methods of the substrate processing system according to the third aspect and the substrate processing system according to the sixteenth aspect, for example, even if the exchangeable state of the liquid is not detected and the exchange time of the processing liquid has passed, 1 When the continuous processing for one substrate group is completed, the processing liquid is replaced. This reduces, for example, the number of substrates that are treated with the degraded treatment liquid. Further, for example, continuous processing for one substrate group is not interrupted, and the operating rate of one or more processing units is less likely to decrease.

By any of the control methods of the substrate processing system according to the fourth and fifth aspects and the substrate processing system according to the seventeenth and eighteenth aspects, for example, the timing of exchanging the processing liquid without detecting the liquid exchangeable state is detected. Even after that, the processing liquid is replaced when the processing for all the substrates already carried out from the carrier is completed. This reduces, for example, the number of substrates that are treated with the degraded treatment liquid. Further, for example, in the continuous processing for one substrate group, the processing conditions for a plurality of substrates are less likely to vary, so that the characteristics of the substrates after the processing are less likely to vary.

By any of the control methods of the substrate processing system according to the fifth aspect and the substrate processing system according to the eighteenth aspect, for example, if the exchangeable state of the liquid is not detected and the exchange time of the processing liquid has passed, the exchange time is reached. From the end of the process to the completion of the processing liquid exchange process, the transfer of the substrate from the carrier to one or more processing units is stopped. As a result, for example, the contents of transport and processing for a plurality of substrates accommodated in the carrier are less likely to vary, and the transfer and processing of the substrates can be easily controlled.

By any of the control methods of the substrate processing system according to the sixth and seventh aspects and the substrate processing system according to the nineteenth and twentieth aspects, for example, one or more treatments even after the treatment liquid replacement time has passed. When the processing for all the substrates already located in the unit is completed, the processing liquid is replaced. As a result, for example, the replacement of the treatment liquid is executed at an early stage, and it becomes difficult to carry out the substrate treatment using the deteriorated treatment liquid.

In any of the control methods of the substrate processing system according to the seventh aspect and the substrate processing system according to the twentieth aspect, the execution of the processing on the substrate is stopped from the start to the completion of the exchange of the treatment liquid, for example. .. This facilitates control of substrate processing in, for example, one or more processing units.

By any of the control methods of the substrate processing system according to the eighth and ninth aspects and the substrate processing system according to the 21st and 22nd aspects, for example, for exchanging the treatment liquid at the time of exchanging the treatment liquid. If the standby state continues for the reference time or longer, the first output recognizable by the user is performed. Thereby, for example, the user can easily know when the exchange of the treatment liquid may be started.

In any of the control methods of the substrate processing system according to the ninth aspect and the substrate processing system according to the 22nd aspect, for example, the user indicates that the processing liquid exchange time has passed without detecting the liquid exchangeable state. Can be notified to. This makes it difficult to process the substrate using the deteriorated processing liquid.

By any of the control methods of the substrate processing system according to the tenth and eleventh aspects and the substrate processing system according to the twenty-third and twenty-fourth aspects, for example, in the management apparatus for managing the substrate processing plan, the substrate processing apparatus The liquid exchangeable state can be detected even if the information regarding the exchange timing of the treatment liquid is not obtained.

By any of the control methods of the substrate processing system according to the eleventh aspect and the control method of the substrate processing system according to the twenty-fourth aspect, for example, in a management device that manages a substrate processing plan, when the processing liquid in the substrate processing apparatus is replaced. Even if such information cannot be obtained, the liquid exchangeable state is detected after the time for exchanging the treatment liquid has arrived. Thereby, for example, the operating rate of one or more processing units can be easily improved. As a result, the operating rate of the substrate processing apparatus can be easily improved.

By any of the control methods of the substrate processing system according to the twelfth and thirteenth aspects and the substrate processing system according to the twenty-fifth and twenty-sixth aspects, for example, in the management apparatus for managing the substrate processing plan, the substrate processing apparatus. A liquid exchangeable state can be detected at the time when the treatment liquid is replaced.

By any of the control methods of the substrate processing system according to the thirteenth aspect and the substrate processing system according to the twenty-sixth aspect, for example, in a management device that manages a substrate processing plan, a substrate is used after the time for exchanging the processing liquid has arrived. A liquid exchangeable state can be detected at the time of exchanging the processing liquid in the processing apparatus.

It is a figure which shows an example of the schematic structure of the substrate processing system which concerns on one Embodiment. It is a block diagram which shows an example of the electric structure of a host computer. It is a schematic plan view which shows an example of the schematic structure of the substrate processing apparatus. It is a figure which shows typically one configuration example of a processing unit. It is a block diagram which shows an example of the electric structure of a control unit. It is a block diagram which shows an example of the functional structure realized by the arithmetic processing part. It is a timing chart which shows an example of the operation of a substrate processing system. It is a timing chart which shows another example of operation of a substrate processing system. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of a substrate processing system. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of a substrate processing system. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of a substrate processing system. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of a substrate processing system. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of the substrate processing system which concerns on 1st modification. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of the substrate processing system which concerns on 2nd modification. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of the substrate processing system which concerns on 2nd modification. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of the substrate processing system which concerns on 2nd modification. It is a flow chart which shows an example of the operation flow which concerns on the liquid exchange processing of the substrate processing system which concerns on 2nd modification. It is a block diagram which shows an example of the electric structure of the control unit which concerns on 3rd modification. It is a block diagram which shows an example of the functional structure realized by the arithmetic processing part which concerns on 3rd modification. It is a timing chart which shows one reference example of operation of a substrate processing system.

In the substrate processing apparatus, processing using a processing liquid such as a chemical solution is performed on the substrate. However, this treatment liquid has a limited life. Therefore, for example, it is conceivable to perform the treatment liquid replacement work when the lifetime that defines the life of the treatment liquid is extended.

FIG. 20 shows a case where the substrate processing apparatus has the first to fourth load ports LP1 to LP4 as a mechanism for holding four containers (also referred to as carriers) accommodating a plurality of substrates, respectively. It is a figure which shows an example of the relationship between the timing of the above and the timing of exchange of a treatment liquid.

As shown in FIG. 20, for example, during the period from time t01 to time t02, the substrate is sequentially carried out from the first load port LP1 while the substrate is processed by the processing unit using the processing liquid. Further, during the period from time t02 to time t03, the substrate is sequentially carried out from the second load port LP2, and the substrate is processed by the processing unit using the processing liquid. During the period from time t03 to time t04, the processing unit performs substrate processing using the processing liquid while sequentially carrying out the substrates from the third load port LP3. Here, for example, when the life of the treatment liquid reaches the end of the life of the treatment liquid at the time t0c between the time t03 and the time t04, the treatment liquid is exchanged from the time t04 to the time t05, and then from the time t05 to the time t06. During the period, the substrate is processed by the processing unit using the processing liquid while the substrates are sequentially carried out from the fourth load port LP4. When such processing is performed, originally, during the period from time t04 to time t06, the substrate processing using the processing liquid is performed in the processing unit while the substrates are sequentially carried out from the fourth load port LP4. The processing liquid is exchanged from time t04 to time t05. As a result, for example, the time from the time t04 to the time t05 becomes a standby time during which the substrate processing cannot be performed, which causes a decrease in the operating rate of the substrate processing apparatus.

To solve such a problem, for example, in a host computer that manages a processing plan for board processing in a plurality of board processing devices, it is conceivable to optimize a schedule for exchanging the processing liquid in the board processing device based on the processing plan. Be done.

However, for example, the time when the treatment liquid reaches the end of its life does not always coincide with the time when the operation of the substrate processing apparatus starts or ends in one day. Further, for example, the life of the treatment liquid often extends to several days or more. On the other hand, for example, on a host computer, a processing plan is often created every day. Therefore, in the host computer, it is difficult to optimize the schedule for exchanging the processing liquid in the substrate processing apparatus based on the processing plan to improve the operating rate in the substrate processing apparatus.

In such a case, for example, in the substrate processing apparatus, it is conceivable to individually manage the values related to the life of the processing liquid such as the usage time or the number of times of use of the treatment liquid to determine the timing for replacing the treatment liquid. Be done. However, the permissible period during which the substrate treatment using the treatment liquid may be continued without replacing the treatment liquid after the time to replace the treatment liquid has arrived varies greatly depending on the type of the treatment liquid. It is also difficult for, for example, the operator of the substrate processing apparatus to predict what will occur before and after the exchange of the processing liquid. Therefore, for example, it is not easy for the operator of the substrate processing apparatus to determine the timing for exchanging the processing liquid.

Therefore, the inventor of the present application has created a technique capable of easily improving the operating rate of the substrate processing apparatus. Hereinafter, one embodiment and various modifications will be described with reference to the drawings. In the drawings, parts having the same configuration and function are designated by the same reference numerals, and duplicate description will be omitted in the following description. In addition, the drawings are schematically shown.

<1. Outline configuration of board processing system>
FIG. 1 is a diagram showing an example of a schematic configuration of a substrate processing system 1 according to an embodiment.

As shown in FIG. 1, the substrate processing system 1 includes, for example, a host computer 10 and a plurality of substrate processing devices 20. The plurality of substrate processing devices 20 include, for example, a first substrate processing device 20a, a second substrate processing device 20b, and a third substrate processing device 20c. Here, the host computer 10 and the plurality of board processing devices 20 are communicably connected via the communication line 5. The communication line 5 may be, for example, a wired line or a wireless line.

<2. Host computer configuration>
FIG. 2 is a block diagram showing an example of the electrical configuration of the host computer 10. The host computer 10 is a device (also referred to as a management device) for comprehensively managing a plurality of board processing devices 20.

As shown in FIG. 2, the host computer 10 is realized by, for example, a computer or the like, and is connected via the bus line Bu1, a communication unit 11, an input unit 12, an output unit 13, a storage unit 14, and a control unit 15. And a drive 16.

The communication unit 11 has, for example, a function as a transmission unit capable of transmitting a signal to each board processing device 20 via the communication line 5. Further, the communication unit 11 has a function as a receiving unit capable of receiving signals from each board processing device 20 via, for example, the communication line 5.

The input unit 12 can input a signal according to the operation of the user who uses the host computer 10, for example. The input unit 12 may include, for example, an operation unit, a microphone, various sensors, and the like. The operation unit may include a mouse, a keyboard, and the like capable of inputting signals according to the user's operation. The microphone can input a signal according to the user's voice. Various sensors can input signals according to the movement of the user.

The output unit 13 can output various information, for example. The output unit 13 may include, for example, a display unit and a speaker. The display unit can visually output various types of information in a manner that can be recognized by the user, for example. Here, this display unit may have the form of a touch panel integrated with the input unit 12. The speaker can audibly output various types of information in a manner that can be recognized by the user, for example.

The storage unit 14 can store various types of information, for example. The storage unit 14 may be composed of a storage medium such as a hard disk and a flash memory. The storage unit 14 employs, for example, a configuration having one storage medium, a configuration having two or more storage media integrally, or a configuration having two or more storage media divided into two or more portions. May be done. Various information such as program P1 and processing plan information (also referred to as processing plan information) PP1 can be stored in the storage unit 14. The storage unit 14 may include a memory 15b described later. The processing plan information PP1 describes, for each substrate processing apparatus 20, a plurality of continuous substrate processing (also referred to as continuous processing) relating to a plurality of substrate groups in the processing units 21 (see FIG. 3 and the like) of N units (N is a natural number) described later. Indicates the timing of execution (also referred to as execution timing). Here, the substrate group is composed of, for example, a plurality of substrates W (see FIG. 4 and the like) constituting one lot. The plurality of continuous processes related to a plurality of substrate groups include, for example, a continuous process (also referred to as a first continuous process) in which a plurality of substrates W included in the first substrate group are sequentially processed (also referred to as a first continuous process) and a second substrate. A continuous process (also referred to as a second continuous process) in which a plurality of substrates W included in the group are sequentially processed (also referred to as a second continuous process) may be included.

The control unit 15 includes, for example, an arithmetic processing unit 15a that acts as a processor, a memory 15b that temporarily stores information, and the like. As the arithmetic processing unit 15a, for example, an electric circuit such as a central arithmetic unit (CPU) may be adopted, and as the memory 15b, for example, a random access memory (RAM) or the like may be adopted. In the arithmetic processing unit 15a, for example, the function of the substrate processing system 1 can be realized by reading and executing the program P1 stored in the storage unit 14. Various information temporarily obtained by various information processing in the control unit 15 can be appropriately stored in the memory 15b or the like.

The drive 16 is, for example, a portion where the portable storage medium RM1 can be attached and detached. In the drive 16, for example, data can be exchanged between the storage medium RM1 and the control unit 15 while the storage medium RM1 is mounted. Further, a mode may be adopted in which the program P1 is read and stored in the storage unit 14 from the storage medium RM1 by mounting the storage medium RM1 in which the program P1 is stored in the drive 16.

<3. Configuration of board processing equipment>
FIG. 3 is a schematic plan view showing an example of a schematic configuration of the substrate processing apparatus 20. The substrate processing apparatus 20 is, for example, a single-wafer type apparatus capable of performing various processing by supplying a processing liquid to the surface of the substrate W. Here, a semiconductor substrate (wafer) is used as an example of the substrate W. The various treatments include, for example, a chemical treatment for etching with a chemical solution, a cleaning treatment for removing stains with a liquid, a rinsing treatment for rinsing with water, and a coating treatment for applying a resist or the like.

The substrate processing apparatus 20 processes the substrate W and the Mth load port LPM (M is a natural number, M is 1 to 4 in this embodiment) as a container holding mechanism for holding a plurality of carriers C as a container. Includes N processing units (12 in this embodiment) and processing units 21. Specifically, for example, three sets of processing units 21 each composed of four processing units 21 arranged in a plane are arranged so as to be stacked in the vertical direction. Here, the carrier C is placed on the first to fourth load ports LP1 to LP4 by, for example, a mechanism for transporting the carrier C (also referred to as a carrier transport mechanism).

The substrate processing device 20 further includes, for example, an indexer robot IR, a center robot CR, a liquid storage unit 22, a control unit 23, and a liquid exchange unit 24.

The indexer robot IR can transfer the substrate W between the first to fourth load ports LP1 to LP4 and the center robot CR, for example. The center robot CR can, for example, convey the substrate W between the indexer robot IR and each processing unit 21. In other words, the indexer robot IR and the center robot CR function as a transport unit TR that carries out a plurality of substrates W housed in the carrier C from the carrier C toward the N processing units 21.

The liquid storage unit 22 can store, for example, the processing liquid Lq0 (see FIG. 4 and the like) used in the N processing units 21. The liquid storage unit 22 may include, for example, one or more tanks for N processing units 21, or for each one or more processing units 21 out of N processing units 21. One or more tanks may be included. Here, the same type of treatment liquid Lq0 may be stored in each tank, or different types of treatment liquid Lq0 may be stored in each tank.

The control unit 23 can control, for example, the operation of each part provided in the substrate processing device 20 and the opening / closing of a valve.

For example, the liquid exchange unit 24 can execute a process of exchanging the processing liquid stored in the liquid storage unit 22 (also referred to as a liquid exchange process) in response to a command from the control unit 23. The liquid exchange unit 24 has, for example, a liquid discharge unit 241 and a liquid supply unit 242. The liquid discharge unit 241 can discharge the processing liquid Lq0 from the liquid storage unit 22 by opening and closing a valve, for example. The liquid supply unit 242 can supply the treatment liquid Lq0 from the supply source of the treatment liquid Lq0 to the liquid storage unit 22 by opening and closing a valve, for example. The supply source of the processing liquid Lq0 is located, for example, outside the substrate processing system 1, a tank that stores the processing liquid Lq0, a piping unit that connects this tank and the liquid storage unit 22, and liquid storage from the tank. It has a pump or the like that sends out the processing liquid Lq0 toward the unit 22. According to the liquid exchange unit 24, for example, after all the treatment liquid Lq0 is discharged from the liquid storage unit 22 by the liquid discharge unit 241, the treatment liquid Lq0 is supplied to the liquid storage unit 22 by the liquid supply unit 242. As a result, the liquid exchange process is executed.

Here, as shown in FIG. 3, the first to fourth load ports LP1 to LP4 and each processing unit 21 are arranged at intervals in the horizontal direction. In the first to fourth load ports LP1 to LP4, the plurality of carriers C accommodating the plurality of substrates W forming one substrate group are arranged along the horizontal arrangement direction D when viewed in a plan view. Here, the indexer robot IR can, for example, transfer a plurality of substrates W from the carrier C to the center robot CR one by one, and transfer a plurality of substrates W from the center robot CR to the carrier C one by one. can do. Similarly, the center robot CR can, for example, carry a plurality of boards W from each processing unit 21 into each processing unit 21 one by one, and transfer a plurality of boards W from each processing unit 21 to the indexer robot IR. It can be transported one by one. Further, for example, the center robot CR can transfer the substrate W between the plurality of processing units 21 as needed.

In the example of FIG. 3, the indexer robot IR has two U-shaped hands H in a plan view. The two hands H are arranged at different heights. Each hand H can support the substrate W in a horizontal posture. The indexer robot IR can move the hand H in the horizontal direction and the vertical direction. Further, the indexer robot IR can change the direction of the hand H by rotating (rotating) about an axis along the vertical direction. The indexer robot IR moves along the arrangement direction D in the path 25 passing through the delivery position (the position where the indexer robot IR is drawn in FIG. 3). The delivery position is a position where the indexer robot IR and the center robot CR face each other in a direction orthogonal to the arrangement direction D when viewed in a plan view. The indexer robot IR can face the hand H to any carrier C and center robot CR, respectively. Here, for example, the indexer robot IR can perform a carry-in operation of carrying the substrate W into the carrier C and a carry-out operation of carrying out the substrate W from the carrier C by moving the hand H. Further, for example, the indexer robot IR can perform a delivery operation of moving the substrate W from one of the indexer robot IR and the center robot CR to the other at the delivery position in cooperation with the center robot CR.

In the example of FIG. 3, the center robot CR has two U-shaped hands H in a plan view, similar to the indexer robot IR. The two hands H are arranged at different heights. Each hand H can support the substrate W in a horizontal posture. The center robot CR can move each hand H in the horizontal direction and the vertical direction. Further, the center robot CR can change the direction of the hand H by rotating (rotating) about an axis along the vertical direction. The center robot CR is surrounded by a plurality of processing units 21 when viewed in a plan view. The center robot CR can face the hand H to any of the processing unit 21 and the indexer robot IR. Here, for example, the center robot CR can perform a carry-in operation of carrying the board W into each processing unit 21 and a carry-out operation of carrying out the board W from each processing unit 21 by moving the hand H. it can. Further, for example, the center robot CR can perform a delivery operation of moving the substrate W from one of the indexer robot IR and the center robot CR to the other in cooperation with the indexer robot IR.

FIG. 4 is a diagram schematically showing a configuration example of the processing unit 21. The processing unit 21 can process the substrate W with the processing liquid Lq0. In the processing unit 21, for example, various treatments are performed on the upper surface Us1 of the substrate W by supplying the processing liquid Lq0 to Us1 on one main surface (also referred to as the upper surface) of the substrate W rotating in a plane. Can be done. As the treatment liquid Lq0, for example, a liquid generally used for treating a fluid substrate such as water having a relatively low viscosity or a chemical liquid is applied. As shown in FIG. 4, the processing unit 21 includes, for example, a holding unit 211, a rotation mechanism 212, and a processing liquid supply system 213.

The holding unit 211 can, for example, hold the substrate W in a substantially horizontal posture and rotate it. The holding portion 211 includes, for example, a vacuum chuck having an upper surface 211u capable of vacuum-adsorbing another main surface (also referred to as a lower surface) Bs1 opposite to the upper surface Us1 of the substrate W, or a plurality of peripheral portions of the substrate W capable of being sandwiched. A holding type chuck having three chuck pins or the like is applied.

The rotation mechanism 212 can rotate the holding portion 211, for example. The rotation mechanism 212 includes, for example, a rotation support shaft 212s in which a holding portion 211 is connected to an upper end portion and extends along the vertical direction, and a virtual rotation shaft 212s of the rotation support shaft 212s along the vertical direction. A configuration having a rotary drive unit 212 m having a motor or the like capable of rotating around Ax1 is applied. Here, for example, the rotation drive unit 212m rotates the rotation support shaft 212s around the rotation shaft Ax1, so that the holding unit 211 is rotated in a substantially horizontal plane. As a result, for example, the substrate W held on the holding portion 211 is rotated about the rotation axis Ax1. Here, for example, if the upper surface Us1 and the lower surface Bs1 of the substrate W are substantially circular, the rotation axis Ax1 passes through the center of the upper surface Us1 and the lower surface Bs1 of the substrate W. The presence / absence and speed of rotation of the rotation support shaft 212s by the rotation drive unit 212m, that is, rotation of the holding unit 211 and the substrate W are controlled by, for example, the control unit 23.

The processing liquid supply system 213 includes, for example, a nozzle 213n, a piping unit 213p, a discharge valve 213v, and a liquid supply unit 213t. The nozzle 213n can discharge the processing liquid Lq0 toward the substrate W held by the holding portion 211, for example. For example, when the treatment liquid Lq0 is rinse water or a chemical liquid, as the nozzle 213n, for example, a straight nozzle that discharges the treatment liquid Lq0 in a continuous flow state is adopted. For example, at least the nozzle 213n and the holding portion 211 may be arranged in the processing chamber (chamber) partitioned by the partition wall of the processing unit 21. The piping unit 213p connects the liquid feeding unit 213t and the nozzle 213n, and forms a path through which the processing liquid Lq0 flows. The discharge valve 213v is arranged in the middle of the piping portion 213p, for example, and can be opened and closed in response to a signal from the control unit 23. Here, for example, when the discharge valve 213v is opened, the liquid feeding unit 213t and the nozzle 213n are in communication with each other. Further, for example, when the discharge valve 213v is closed, the liquid feeding unit 213t and the nozzle 213n are not in communication with each other. For example, the liquid feeding unit 213t can supply the processing liquid Lq0 from the liquid storage unit 22 toward the piping unit 213p in response to a signal from the control unit 23. For example, a pump is applied to the liquid feeding unit 213t. Here, the processing liquid Lq0 discharged from the nozzle 213n toward the substrate W is collected by, for example, a cup provided from the side of the substrate W to the bottom, and returned to the liquid storage unit 22. In other words, the treatment liquid Lq0 stored in the liquid storage unit 22 is repeatedly used for substrate treatment so as to circulate. At this time, for example, the treatment liquid Lq0 tends to gradually deteriorate. When the treatment liquid Lq0 is returned from the treatment unit 21 to the liquid storage unit 22, the treatment liquid Lq0 may be purified by a filter or the like.

FIG. 5 is a block diagram showing an example of the electrical configuration of the control unit 23. As shown in FIG. 5, the control unit 23 is realized by, for example, a computer or the like, and is connected via the bus line Bu2, and has a communication unit 231, an input unit 232, an output unit 233, a storage unit 234, and a control unit 235. And a drive 236.

The communication unit 231 has a function as a transmission unit capable of transmitting a signal to the host computer 10 via the communication line 5, for example. Further, the communication unit 231 has a function as a reception unit capable of receiving a signal from the host computer 10 via the communication line 5, for example.

The input unit 232 can input a signal according to, for example, an operation of a user who uses the substrate processing device 20. The input unit 232 may include, for example, an operation unit, a microphone, various sensors, and the like. The operation unit may include a mouse, a keyboard, and the like capable of inputting signals according to the user's operation. The microphone can input a signal according to the user's voice. Various sensors can input signals according to the movement of the user.

The output unit 233 can output various information, for example. The output unit 233 may include, for example, a display unit and a speaker. The display unit can visually output various types of information in a manner that can be recognized by the user, for example. Here, this display unit may have the form of a touch panel integrated with the input unit 232. The speaker can audibly output various types of information in a manner that can be recognized by the user, for example.

The storage unit 234 can store various types of information, for example. The storage unit 234 may be composed of a storage medium such as a hard disk and a flash memory. The storage unit 234 employs, for example, a configuration having one storage medium, a configuration having two or more storage media integrally, or a configuration having two or more storage media divided into two or more portions. May be done. For example, the program P2 and various information D2 can be stored in the storage unit 234. The storage unit 234 may include a memory 235b, which will be described later.

The control unit 235 includes, for example, an arithmetic processing unit 235a that acts as a processor, a memory 235b that temporarily stores information, and the like. As the arithmetic processing unit 235a, for example, an electronic circuit such as a central arithmetic unit (CPU) may be adopted, and as the memory 235b, for example, a random access memory (RAM) or the like may be adopted. In the arithmetic processing unit 235a, for example, the function of the substrate processing system 1 can be realized by reading and executing the program P2 stored in the storage unit 234. Various information temporarily obtained by various information processing in the control unit 235 can be appropriately stored in the memory 235b or the like.

The drive 236 is, for example, a removable portion of the portable storage medium RM2. In the drive 236, for example, data can be exchanged between the storage medium RM2 and the control unit 235 while the storage medium RM2 is mounted. Further, a mode may be adopted in which the program P2 is read and stored in the storage unit 234 from the storage medium RM2 by mounting the storage medium RM2 in which the program P2 is stored in the drive 236.

<4. Functional configuration of board processing system>
FIG. 6 is a block diagram showing an example of a functional configuration realized by the arithmetic processing units 15a and 235a. FIG. 6 shows various functions related to data processing realized by executing the program P1 in the arithmetic processing unit 15a of the host computer 10, and data processing realized by executing the program P2 in the arithmetic processing unit 235a of the board processing apparatus 20. Various functions related to the above are illustrated.

As shown in FIG. 6, the arithmetic processing unit 15a has a recognition unit 151 and a detection unit 152 as a functional configuration to be realized. For example, the memory 15b is used as a workspace in the processing in each of these parts 151 and 152. Further, the arithmetic processing unit 235a has an acquisition unit 2351, a setting unit 2352, a detection unit 2353, and a determination unit 2354 as a functional configuration to be realized. For example, the memory 235b is used as a workspace in the processing in each of these parts 2351 to 2354.

The acquisition unit 2351 can acquire, for example, a numerical value (also referred to as a liquid state value) related to the state of the processing liquid Lq0 stored in the liquid storage unit 22. As the liquid state value, for example, a measured value such as the elapsed time from the start of use of the treatment liquid Lq0, the number of times of use or the use time, the concentration of the treatment liquid Lq0 or the hydrogen ion index (pH: power of hydrogen) is adopted. To. Here, as the start of use of the treatment liquid Lq0, for example, the time when the treatment liquid Lq0 is stored in the liquid storage unit 22 is adopted. The start of use can be acquired based on, for example, the time function of the control unit 23 and the control timing of the liquid exchange unit 24. The elapsed time from the start of use may be, for example, simply the elapsed time. The elapsed time can be acquired, for example, by the time function of the control unit 23 and the time information at the time of disclosure of use. The number of times of use from the start of use may be, for example, the number of times that the substrate W is treated with the treatment liquid Lq0 in the processing unit 21. The number of times of use can be obtained, for example, by integrating the number of times of control of the processing unit 21 in the control unit 23. The usage time from the start of use may be, for example, the time during which the substrate W is treated with the treatment liquid Lq0 in the treatment unit 21. The usage time can be obtained, for example, by accumulating the time when the processing liquid Lq0 is used in the processing unit 21 in the control unit 23. Further, the concentration of the treatment solution Lq0 can be acquired in real time by, for example, a chemical solution concentration monitor. The pH of the treatment liquid Lq0 can be obtained in real time, for example, with a pH meter.

The setting unit 2352 is stored in the liquid storage unit 22 based on, for example, the liquid state value acquired by the acquisition unit 2351 and a preset rule (also referred to as a life rule) relating to the life of the processing liquid Lq0. It is possible to set the replacement time of the processing liquid Lq0. Here, the setting unit 2352 may determine, for example, whether or not the replacement time of the processing liquid Lq0 has arrived, based on the liquid state value and the life rule.

Here, examples of the treatment liquid Lq0 for which the replacement time is set include, for example, an aqueous solution of hydrofluoric acid (HF), a mixed solution of sulfuric acid / hydrogen peroxide solution (SPM: Sulfuric acid / hydrogen peroxide Mixture), and aqueous ammonia / hydrogen peroxide. Mixed solution of hydrogen peroxide water (APM (Ammonia Hydroxide / Hydrogen Peroxide Mixture), SC1 (Standard Clean 1)), Mixed solution of hydrochloric acid / hydrogen peroxide solution (HPM (Hydrochloride / Hydrogen Peroxide Mixture), SC2 (Standard Clean 2)) ) And so on.

The life rule is defined based on, for example, an experimental result or a simulation result using the treatment liquid Lq0. The life rule may be described in, for example, program P2. Depending on the liquid state value acquired on the substrate processing apparatus 20, the replacement time is such that the substrate processing using the treatment liquid Lq0 is continued without starting the replacement of the treatment liquid Lq0 from the time when the replacement time of the treatment liquid Lq0 arrives. Indicates a period that does not cause any problems. The length of the replacement period may be predetermined for, for example, the type of the treatment liquid Lq0, or may be arbitrarily set by the operator in advance. For example, a plurality of types of treatment liquid Lq0 may be stored in the liquid storage unit 22, and the length of the replacement period may be set for each type of treatment liquid Lq0. However, in the following description, in order to avoid complication of the description, a case where one type of treatment liquid Lq0 is stored in the liquid storage unit 22 will be described as an example.

Here, for example, if the liquid state value is the elapsed time, the first elapsed time and the second elapsed time may be defined by the life rule. In this case, for example, the setting unit 2352 determines that the replacement time has arrived when the elapsed time reaches the first elapsed time, and the period from the first elapsed time to the second elapsed time is the replacement time. Is set as. Further, for example, if the liquid state value is the number of uses, the life rule may specify the first use number and the second use number. In this case, for example, when the number of uses reaches the first number of uses, the setting unit 2352 determines that the replacement time has arrived, and the period from the first use number to the second use number is the replacement time. Is set as. Further, for example, if the liquid state value is the usage time, the first usage time and the second usage time may be defined by the life rule. In this case, for example, the setting unit 2352 determines that the replacement time has arrived when the usage time reaches the first usage time, and the period from the first usage time to the second usage time is the replacement time. Is set as. Further, for example, if the liquid state value is a measured value, the first reference value and the second reference value may be defined by the life rule. In this case, for example, when the measured value reaches the first reference value, the setting unit 2352 determines that the replacement time has come, and the measured value changes from the first reference value to the second reference value. The period is set as the replacement period. Here, for example, when the liquid state value is a measured value, the start time point and the end time point of the replacement period may be defined from the degree of change in the measured value. The time of disclosure and the time of end may be defined by, for example, the elapsed time, the number of times of use, or the time of use. In this way, for example, it is possible to set a replacement period having a certain width.

For example, the detection unit 2353 detects a state (also referred to as a standby state) in which none of the continuous processes of the plurality of continuous processes related to the plurality of substrate groups is executed by the N processing units 21 at the time of replacement. be able to. Here, the standby state can be detected, for example, according to the control status of the processing unit 21 by the control unit 23. As the standby state, for example, the timing at which all the substrates W existing in the substrate processing apparatus 20 return to the first to fourth load ports LP1 to LP4 is adopted.

In the present embodiment, for example, in response to the detection of the standby state by the detection unit 2353, the communication unit 231 having a function as a transmission unit in the board processing device 20 transmits the first signal to the host computer 10. The first signal may be, for example, a signal for notifying the host computer 10 that a standby state has been detected. At this time, in the host computer 10, for example, the communication unit 11 having a function as a receiving unit can receive the first signal from the communication unit 231 of the board processing device 20. As a result, the host computer 10 can be notified of the standby state of the N processing units 21.

The recognition unit 151 can recognize, for example, the time during which the standby state continues (also referred to as the duration) based on the processing plan information PP1 stored in the storage unit 14. In the present embodiment, in the host computer 10, for example, in response to the reception of the first signal by the communication unit 11, the recognition unit 151 can recognize the duration based on the processing plan information PP1.

For example, the detection unit 152 can detect a state in which the duration recognized by the recognition unit 151 is equal to or longer than a preset reference time (also referred to as a liquid exchangeable state). Here, the reference time may be, for example, longer than the time required for exchanging the treatment liquid Lq0 stored in the liquid storage unit 22. In the present embodiment, in the host computer 10, for example, the length of the duration recognized by the detection unit 152 based on the processing plan information PP1 by the recognition unit 151 in response to the reception of the first signal by the communication unit 11. It is possible to detect the liquid exchangeable state according to the above. As a result, for example, the host computer 10 that manages the substrate processing plan can detect the liquid exchangeable state even if the information regarding the exchange time of the processing liquid Lq0 in the substrate processing apparatus 20 is not obtained.

Further, for example, the processing liquid Lq0 stored in the liquid storage unit 22 may be replaced in response to the detection of the liquid exchangeable state by the detection unit 152. As a result, for example, the processing liquid Lq0 of the liquid storage unit 22 is exchanged by effectively utilizing the sufficiently long duration in which the N processing units 21 are on standby at the exchange time having a certain width. can do. As a result, for example, the operating rate of N processing units 21 can be improved. Therefore, the operating rate of the substrate processing apparatus 20 can be easily improved.

In the present embodiment, for example, the liquid exchange unit 24 exchanges the processing liquid Lq0 stored in the liquid storage unit 22 in response to the detection of the liquid exchangeable state by the detection unit 152 (liquid exchange process). Can be executed. In other words, for example, at the time of exchanging the treatment liquid Lq0, if the standby state continues for the reference time for exchanging the treatment liquid Lq0 or more, the exchange of the treatment liquid Lq0 is automatically performed. Thereby, for example, the treatment liquid Lq0 can be replaced at an appropriate timing. Further, for example, the operator who is a user does not have to give an instruction and work for exchanging the processing liquid Lq0. Therefore, the operating rate of N processing units 21 can be easily improved. In the present embodiment, for example, if the communication unit 11 transmits a third signal for notifying the substrate processing device 20 of the liquid exchangeable state in response to the detection of the liquid exchangeable state by the detection unit 152. , The substrate processing apparatus 20 can recognize the liquid exchangeable state.

Further, here, for example, in the communication unit 231 having a function as a transmission unit in the substrate processing device 20, the liquid state value acquired by the acquisition unit 2351 satisfies a specific condition (also referred to as a specific condition) in advance. The second signal may be transmitted to the host computer 10 in response to. Examples of the specific condition include a condition in which the liquid state value reaches a numerical value corresponding to the arrival of the replacement time of the treatment liquid Lq0. Here, for example, if the liquid state value is the elapsed time, a condition in which the liquid state value reaches the first elapsed time defined by the life rule can be adopted as a specific condition. For example, if the liquid state value is the number of times of use, a condition in which the liquid state value reaches the first number of times of use specified in the life rule can be adopted as a specific condition. For example, if the liquid state value is the usage time, a condition in which the liquid state value reaches the first usage time specified by the life rule is adopted as a specific condition. For example, if the liquid state value is a measured value, a condition in which the measured value reaches the first reference value defined by the life rule is adopted as a specific condition. Further, the second signal may be, for example, a signal indicating that the liquid state value satisfies the specific condition, that is, a signal for notifying the arrival of the replacement time.

Here, in the host computer 10, for example, after the second signal is received by the communication unit 11 as the receiving unit, the recognition unit responds to the reception of the first signal related to the standby state by the communication unit 11 as the receiving unit. 151 may recognize the duration based on the processing plan information PP1. In this case, for example, in the host computer 10, after the duration is recognized, the detection unit 152 can detect the liquid exchangeable state according to the length of the duration. As a result, for example, in the host computer 10, even if the information regarding the replacement time of the processing liquid Lq0 in the substrate processing apparatus 20 cannot be obtained, the liquid exchangeable state can be detected after the replacement time of the treatment liquid Lq0 has arrived.

FIG. 7 is a timing chart showing an example of the operation of the substrate processing system 1 according to the present embodiment. In FIG. 7, in order from the top, the operation of the host computer 10, the operation of the board processing device 20, and N for a plurality of boards W (board groups) in the carrier C held by the first to fourth load ports LP1 to LP4. The timing at which the continuous processing in the processing unit 21 of the machine and the processing unit 21 is executed is shown.

In the example of FIG. 7, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the first load port LP1 during the period from time t1 to time t2. During the period from time t2 to time t4, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the second load port LP2. During the period from time t3 to time t6, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the fourth load port LP4. During the period from time t4 to time t7, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the third load port LP3.

Here, at time t5, in response to the liquid state value acquired by the acquisition unit 2351 satisfying the specific condition, the communication unit 231 sets the replacement time of the processing liquid Lq0 from the substrate processing device 20 to the host computer 10. A second signal is transmitted notifying that it has arrived. At this time, the setting unit 2352 sets the replacement time Tr0 (the period from time t5 to time t12) of the processing liquid Lq0. After that, at time t7, continuous processing for the plurality of substrates W (board group) in the carrier C held by the third load port LP3 is completed, and the standby state is detected by the detection unit 2353. Here, in response to the detection of the standby state by the detection unit 2353, the communication unit 231 transmits a first signal notifying the host computer 10 of the standby state from the board processing device 20. At this time, in response to the reception of the first signal by the communication unit 11, the host computer 10 recognizes the duration (for example, the period from time t7 to time t11) based on the processing plan information PP1 by the recognition unit 151. .. Next, at time t8, the detection unit 152 detects a liquid exchangeable state if the duration is equal to or longer than a preset reference time. Here, the communication unit 11 transmits a third signal for notifying the substrate processing device 20 of the liquid exchangeable state from the host computer 10. In the substrate processing apparatus 20, in response to the reception of the third signal by the communication unit 231, the liquid exchange unit 24 performs the liquid exchange process during the period from time t9 to time 10. Then, during the period from time t11 to time 13, continuous processing is performed on the plurality of substrates W (substrate group) in the carrier C held by the first load port LP1. From time t13, continuous processing on a plurality of substrates W (substrate group) in the carrier C held by the second load port LP2 is started.

Further, the determination unit 2354 can determine, for example, whether or not the replacement period set by the setting unit 2352 has ended.

By the way, for example, the replacement time Tr0 may be passed without the detection unit 152 detecting the liquid exchangeable state. In this case, for example, when the replacement time has passed, in response to the completion of the continuous processing being executed by the N processing units 21 of the plurality of continuous processing, the liquid exchange unit 24 is controlled by the control unit 23. May forcibly execute the liquid exchange process. The forced liquid exchange process after such a replacement period has passed is hereinafter also referred to as a "first forced liquid exchange process". Here, for example, if a setting (also referred to as a first setting) for executing the first forced liquid exchange process is specified in advance when the exchange time has passed without detecting the liquid exchangeable state, the first setting is made. 1 Forced liquid exchange processing is executed. The designation of the first setting, eg, may be performed by the operator. In this case, for example, the determination unit 2354 determines whether or not the first setting is specified and whether or not the continuous processing being executed by the N processing units 21 of the plurality of continuous processes is completed. May be done. When determining whether or not the continuous processing during execution has been completed, the substrate processing for all the substrates W of the substrate group (also referred to as the target substrate group) in the carrier C that is the target of the continuous processing during execution It suffices to determine whether or not is completed. Here, as the timing at which the continuous processing being executed by the processing unit 21 is completed, for example, the timing at which all the substrates W related to the continuous processing being executed have returned to the first to fourth load ports LP1 to LP4 is adopted. ..

As described above, for example, if the treatment liquid Lq0 is replaced in response to the completion of continuous treatment for one substrate group even after the replacement time of the treatment liquid Lq0 has passed, the treatment can be performed using the deteriorated treatment liquid Lq0. The number of substrates W to be applied is reduced. Further, for example, continuous processing for one substrate group is not interrupted, and the operating rate of N processing units 21 is less likely to decrease. Further, in this case, for example, when the exchangeable state is not detected by the detection unit 152 and the exchange time has passed, the carrier C for the first to fourth load ports LP1 to LP4 of the substrate processing device 20 by the carrier transfer mechanism. The placement of the information (also referred to as instruction information) indicating the instruction of the processing content related to the carrier C may be stopped from the host computer 10 to the substrate processing device 20.

FIG. 8 is a timing chart showing another example of the operation of the substrate processing system 1 according to the present embodiment. In FIG. 8, similarly to FIG. 7, the operation of the host computer 10, the operation of the substrate processing apparatus 20, and the plurality of substrates W in the carrier C held by the first to fourth load ports LP1 to LP4 are in order from the top. The timing at which the continuous processing in the N processing units 21 for the (board group) and the execution is executed is shown.

In the example of FIG. 8, during the period from time t1 to time t2, continuous processing is performed on the plurality of substrates W (substrate group) in the carrier C held by the first load port LP1. During the period from time t2 to time t4, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the second load port LP2. During the period from time t3 to time t6, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the fourth load port LP4. During the period from time t4 to time t7, continuous processing is performed on a plurality of boards W (board groups) in the carrier C held by the third load port LP3.

Here, at time t5, in response to the liquid state value acquired by the acquisition unit 2351 satisfying the specific condition, the communication unit 231 sets the replacement time of the processing liquid Lq0 from the substrate processing device 20 to the host computer 10. A second signal is transmitted notifying that it has arrived. At this time, the setting unit 2352 sets the replacement time Tr0 (the period from time t5 to time t10) of the processing liquid Lq0. After that, at time t7, continuous processing for the plurality of substrates W (board group) in the carrier C held by the third load port LP3 is completed, and the standby state is detected by the detection unit 2353. At this time, in response to the detection of the standby state by the detection unit 2353, the communication unit 231 transmits a first signal notifying the host computer 10 of the standby state from the board processing device 20. Here, in the host computer 10, the recognition unit 151 recognizes the duration (the period from time t7 to time t8) based on the processing plan information PP1. If the duration is less than the preset reference time, the detection unit 152 does not detect the liquid exchangeable state. At this time, the communication unit 11 does not transmit the third signal notifying the liquid exchangeable state from the host computer 10 to the substrate processing device 20. Next, during the period from time t8 to time t11, continuous processing is performed on the plurality of substrates W (substrate group) in the carrier C held by the first load port LP1. At this time, at time t10, the replacement time Tr0 ends. However, from time t10 to time t11, the liquid exchange unit 24 executes the liquid exchange process until the continuous processing for the plurality of substrates W (board group) in the carrier C held by the first load port LP1 is completed. Wait without doing. Then, at time t11, the substrate processing apparatus 20 controls the control unit 23 in response to the completion of continuous processing on the plurality of substrates W (board group) in the carrier C held by the first load port LP1. The liquid exchange process is forcibly executed by the liquid exchange unit 24.

By executing this forced liquid exchange process, the start time of the continuous process for the plurality of substrates W (substrate group) in the carrier C held by the second load port LP2 is shifted from the time t11 to the time t12. Then, during the period from time t12 to time 13, continuous processing is performed on the plurality of substrates W (substrate group) in the carrier C held by the second load port LP2. From time t13, continuous processing on a plurality of substrates W (substrate group) in the carrier C held by the third load port LP3 is started.

Further, for example, when the exchangeable state is not detected by the detection unit 152 and the exchange time has passed, all the components that have already been carried out from the carrier C to the processing units 21 of N units by the transport unit TR. In response to the completion of the processing in the N processing units 21, the liquid exchange unit 24 may forcibly execute the liquid exchange processing with respect to the substrate W of the above. The forced liquid exchange process after such a replacement period has passed is hereinafter also referred to as a "second forced liquid exchange process". Here, for example, if a setting (also referred to as a second setting) for executing the second forced liquid exchange process is specified in advance when the exchange time has passed without detecting the liquid exchangeable state, the second setting is made. 2 Forced liquid exchange processing is executed. The specification of the second setting can be performed, for example, by an operator. In this case, whether or not the second setting is specified, and whether or not the processing for all the unloaded boards W that have been carried out from the carrier C to the N processing units 21 by the transport unit TR is completed. For example, the determination unit 2354 may determine whether or not. Here, as the timing at which the processing for all the carried-out substrates W is completed, for example, the timing when all the carried-out substrates W return to the first to fourth load ports LP1 to LP4 is adopted.

As described above, for example, when the replacement time of the treatment liquid Lq0 has passed, if the treatment liquid Lq0 is replaced in response to the completion of the treatment on the substrate W already carried out from the carrier C, the deteriorated treatment liquid is deteriorated. The number of substrates W to be treated with Lq0 is reduced. Further, for example, in continuous processing for one substrate group, the processing conditions for a plurality of substrates W are less likely to vary, so that the characteristics of the substrate W after processing are less likely to vary. Further, in this case, for example, when the exchangeable state is not detected by the detection unit 152 and the exchange time has passed, the control unit 23 controls from the end of the exchange time to the completion of the liquid exchange process. The transfer of the substrate W from the carrier C to the processing units 21 of N units by the transport unit TR may be stopped. As a result, for example, the contents of transport and processing for the plurality of substrates W accommodated in the carrier C are less likely to vary, and the transport and processing of the substrate W can be easily controlled.

Further, for example, when the exchangeable state is not detected by the detection unit 152 and the exchange time has passed, N units are processed for all the substrates W already located in the N processing units 21. In response to the completion of the processing in the unit 21, the liquid exchange unit 24 may forcibly execute the liquid exchange processing. The forced liquid exchange process after the replacement period has passed is also referred to as a "third forced liquid exchange process" below. Here, for example, if a setting (also referred to as a third setting) for executing the third forced liquid exchange process is specified in advance when the exchange time has passed without detecting the liquid exchangeable state, the third setting is made. 3 The forced liquid exchange process is executed. The designation of the third setting can be performed, for example, by an operator. In this case, for example, the determination unit 2354 determines whether or not the third setting is specified and whether or not the processing for all the substrates W already located in the N processing units 21 is completed. You can. Here, as the timing at which the processing for all the substrates W already located in the N processing units 21 is completed, for example, the processing liquid for all the substrates W already located in the N processing units 21. The timing at which the substrate processing using Lq0 is completed may be adopted, or the timing at which all the substrates W already located in the N processing units 21 return to the first to fourth load ports LP1 to LP4 may be adopted. It may be adopted.

As described above, for example, when the replacement time of the treatment liquid Lq0 has passed, the treatment liquid Lq0 is replaced in response to the completion of the treatment for all the substrates W already located in the N processing units 21. If so, the replacement of the treatment liquid Lq0 is executed at an early stage. This makes it difficult to execute substrate processing using, for example, the deteriorated processing liquid Lq0. In this case, for example, under the control of the control unit 23, the execution of the processing on the substrate W may be stopped by the N processing units 21 from the start to the completion of the execution of the liquid exchange processing by the liquid exchange unit 24. .. From another point of view, for example, the delivery of the substrate W to the N processing units 21 may be stopped from the start to the end of the execution of the liquid exchange process by the liquid exchange unit 24. This facilitates control of substrate processing in, for example, N processing units 21.

In the present embodiment, for example, when the carrier C is mounted on the first to fourth load ports LP1 to LP4 by the carrier transport mechanism, the host computer 10 mounts the carrier C on the substrate processing device 20. Instruction information indicating the instruction of the processing content is sent. The instruction information includes, for example, information such as the number of substrates W stored in the carrier C and a recipe indicating the contents of the substrate processing. In the substrate processing apparatus 20, for example, based on the instruction information, the transfer unit TR transfers the substrate W and the N processing units 21 execute the substrate processing.

<5. Control method related to liquid exchange processing of substrate processing system>
9 to 12 are flow charts showing an example of an operation flow of the control method related to the liquid exchange process of the substrate processing system 1. Here, for example, the program P1 is executed by the arithmetic processing unit 15a of the host computer 10, and the program P2 is executed by the arithmetic processing unit 235a of the board processing apparatus 20, so that the host computer 10 and the substrate processing apparatus 20 cooperate with each other. As a result, the operation flow related to the liquid exchange process is realized. Here, an example will be described in which the processing plan information PP1 is stored in the storage unit 14 of the host computer 10 and the processing liquid Lq0 is stored in the liquid storage unit 22 at the time when the main operation flow is started.

First, in step Sp1 of FIG. 9, the acquisition unit 2351 acquires a numerical value (liquid state value) related to the state of the processing liquid Lq0 stored in the liquid storage unit 22.

Next, in step Sp2, whether or not the replacement time of the treatment liquid Lq0 has arrived based on the liquid state value acquired in step Sp1 and the life rule related to the life of the treatment liquid Lq0. judge. Here, for example, if the liquid state value satisfies a preset specific condition, it may be determined that the replacement time has come. Here, if the replacement time has not arrived, the process returns to step Sp1. On the other hand, if the replacement time has come, the process proceeds to step Sp3.

In step Sp3, in the board processing apparatus 20, the communication unit 231 transmits a second signal notifying the arrival of the replacement time to the host computer 10. At this time, in the host computer 10, the communication unit 11 receives the second signal. As a result, for example, the host computer 10 can recognize the arrival of the replacement time.

Next, in step Sp4, the setting unit 2352 stores the processing liquid Lq0 in the liquid storage unit 22 based on the liquid state value acquired in step Sp1 and the life rule related to the life of the processing liquid Lq0. Set the replacement time for.

Next, in step Sp5, it is determined whether or not the detection unit 2353 has detected a standby state in which none of the continuous processes of the plurality of continuous processes is executed by the N processing units 21 at the time of replacement. Here, if the standby state is detected, the process proceeds to step Sp6. On the other hand, if the standby state is not detected, the process proceeds to step Sp7.

In step Sp6, the determination unit 2354 determines whether or not the replacement period has ended. Here, if the replacement period has not ended, the process returns to step Sp5. On the other hand, if the replacement period has been completed, the process proceeds to step Sp21 in FIG. In other words, when the replacement time has passed without the detection unit 152 detecting the liquid exchangeable state at the replacement time, the process proceeds to step Sp21 in FIG.

In step Sp7, in the board processing device 20, the communication unit 231 transmits a first signal notifying the standby state in response to the detection of the standby state to the host computer 10. At this time, in the host computer 10, the communication unit 11 receives the first signal. As a result, for example, the host computer 10 can recognize the arrival of the standby state.

Next, in step Sp8, in the host computer 10, the recognition unit 151 recognizes the duration of the standby state based on the processing plan information PP1.

Next, in step Sp9, the host computer 10 determines whether or not the detection unit 152 has detected a liquid exchangeable state in which the duration recognized in step Sp8 is equal to or longer than a preset reference time. Here, if the liquid exchangeable state is not detected, the process proceeds to step Sp10. On the other hand, if the liquid exchangeable state is detected, the process proceeds to step Sp11. At this time, the host computer 10 recognizes the duration in response to the reception of the first signal and exchanges the liquid, for example, even if the information regarding the replacement time of the processing liquid Lq0 in the substrate processing apparatus 20 is not obtained. The possible state can be detected.

In this operation flow, when the following three conditions [Condition 1] to [Condition 3] are satisfied, the detection unit 152 detects the liquid exchangeable state.

[Condition 1] A second signal for notifying the arrival of the replacement time is transmitted from the substrate processing device 20 to the host computer 10.

[Condition 2] The board processing device 20 transmits a first signal notifying the host computer 10 that the standby state has been detected.

[Condition 3] In the N processing units 21, the standby state until the substrate processing of the next lot is started continues for a sufficient time equal to or longer than the reference time.

In step Sp10, the determination unit 2354 determines whether or not the replacement period has ended. Here, if the replacement period has not ended, the process returns to step Sp9. On the other hand, if the replacement period has been completed, the process proceeds to step Sp21 in FIG. In other words, when the replacement time has passed without the detection unit 152 detecting the liquid exchangeable state at the replacement time, the process proceeds to step Sp21 in FIG.

On the other hand, for example, the processing liquid Lq0 stored in the liquid storage unit 22 can be exchanged by the following steps Sp11 to Sp13 in response to the detection of the liquid exchangeable state by the detection unit 152. As a result, for example, the processing liquid Lq0 of the liquid storage unit 22 is exchanged by effectively utilizing the sufficiently long duration of standby of the N processing units 21 at the exchange period having a certain width. can do. As a result, for example, the operating rate of N processing units 21 can be improved. Therefore, the operating rate of the substrate processing apparatus 20 can be easily improved.

In step Sp11, in the host computer 10, the communication unit 11 transmits a third signal notifying the substrate processing device 20 of the liquid exchangeable state. At this time, in the substrate processing device 20, the communication unit 231 receives the reception of the third signal. Thereby, for example, the liquid exchangeable state can be recognized on the substrate processing apparatus 20 side.

In step Sp12, the liquid exchange unit 24 starts executing the liquid exchange process of the treatment liquid Lq0 stored in the liquid storage unit 22. Thereby, for example, at the time of exchanging the processing liquid Lq0, the exchange of the processing liquid Lq0 is automatically performed when the standby state continues for the reference time for exchanging the processing liquid Lq0 or more. As a result, for example, the treatment liquid Lq0 can be replaced at an appropriate timing. Therefore, the operating rate of N processing units 21 can be easily improved.

In step Sp13, it is determined whether or not the execution of the liquid exchange process by the liquid exchange unit 24 is completed for the treatment liquid Lq0 stored in the liquid storage unit 22. This determination can be performed, for example, by the determination unit 2354 or the like. Here, the determination in step Sp13 is repeated until the execution of the liquid exchange process is completed. On the other hand, when the execution of the liquid exchange process is completed, the process proceeds to step Sp14.

In step Sp14, the acquisition unit 2351 initializes the liquid state value and returns to step Sp1. Here, for example, if the liquid state value is the elapsed time from the start of use of the treatment liquid Lq0, the elapsed time is reset so that the elapsed time becomes 0. For example, if the liquid state value is the number of uses since the start of use, the number of uses is reset so that the number of uses becomes 0. For example, if the liquid state value is the usage time from the start of use, the usage time is reset so that the usage time becomes 0. However, for example, if the liquid state value is a measured value that can be acquired in real time, such as the concentration or pH of the treatment liquid Lq0, the liquid state value does not have to be initialized.

In step Sp21 of FIG. 10, the determination unit 2354 determines whether or not the first setting is specified. Here, for example, if the first setting for executing the first forced liquid exchange process among the first setting to the third setting is specified in advance by the operator, the process proceeds to step Sp22. On the other hand, for example, if the first setting for executing the first forced liquid exchange process is not specified in advance by the operator, the process proceeds to step Sp31 in FIG.

In steps Sp22 to Sp25, the liquid exchange unit 24 executes the liquid exchange process in response to the completion of the continuous process being executed in the N processing units 21 of the plurality of continuous processes. As a result, for example, even if the replacement time of the treatment liquid Lq0 has passed, if the treatment liquid Lq0 is replaced in response to the completion of the continuous treatment for one substrate group, the treatment is performed using the deteriorated treatment liquid Lq0. The number of substrates W to be formed is reduced. Further, for example, continuous processing for one substrate group is not interrupted, and the operating rate of N processing units 21 is less likely to decrease.

Specifically, in step Sp22, the transport unit TR carries out the substrate W included in the new substrate group from the carriers C mounted on the first to fourth load ports LP1 to LP4 to the processing units 21 of N units. To cancel.

In step Sp23, the determination unit 2354 determines all the substrates W of the substrate group (target substrate group) in the carrier C that is the target of the continuous processing being executed by the N processing units 21 of the plurality of continuous processes. It is determined whether or not the substrate processing for the product is completed. Here, for example, the determination in step Sp23 is repeated until the processing for all the substrates W of the target substrate group is completed, and when the processing for all the substrates W of the target substrate group is completed, the process proceeds to step Sp24.

In step Sp24, the liquid exchange unit 24 starts executing the liquid exchange process of the treatment liquid Lq0 stored in the liquid storage unit 22.

In step Sp25, it is determined whether or not the execution of the liquid exchange process by the liquid exchange unit 24 is completed for the treatment liquid Lq0 stored in the liquid storage unit 22. This determination can be performed, for example, by the determination unit 2354 or the like. Here, the determination in step Sp25 is repeated until the execution of the liquid exchange process is completed. On the other hand, when the execution of the liquid exchange process is completed, the process proceeds to step Sp26.

In step Sp26, the acquisition unit 2351 initializes the liquid state value and proceeds to step Sp27 in the same manner as in step Sp14 of FIG.

Next, in step Sp27, the transport unit TR carries out the substrate W toward the N processing units 21 from the new substrate group in the carrier C mounted on the first to fourth load ports LP1 to LP4. It resumes and returns to step Sp1 of FIG.

In step Sp31 of FIG. 11, the determination unit 2354 determines whether or not the second setting is specified. Here, for example, if the second setting for executing the second forced liquid exchange process among the first to third settings is specified in advance by the operator, the process proceeds to step Sp32. On the other hand, for example, if the second setting for executing the second forced liquid exchange process is not specified in advance by the operator, the process proceeds to step Sp41 in FIG.

In steps Sp32 to Sp35, the transport unit TR responds to the completion of processing in the N processing units 21 for all the substrates W that have already been carried out from the carrier C to the N processing units 21. Then, the liquid exchange unit 24 executes the liquid exchange process. As a result, the number of substrates W to be treated with the deteriorated treatment liquid Lq0 is reduced. Further, for example, in continuous processing for one substrate group, the processing conditions for a plurality of substrates W are less likely to vary, so that the characteristics of the substrate W after processing are less likely to vary.

Specifically, in step Sp32, the transport unit TR stops carrying out the new substrate W from the carriers C mounted on the first to fourth load ports LP1 to LP4 to the N processing units 21. As a result, for example, the contents of transport and processing for the same lot of substrates W composed of a plurality of substrates W housed in one carrier C are less likely to vary, and the transfer and processing of the substrates can be easily controlled. Become.

In step Sp33, the determination unit 2354 determines whether or not the processing for all the unloading substrates W that have already been unloading from the carrier C to the N processing units 21 has been completed. Here, for example, the determination in step Sp33 is repeated until the processing for all the unloaded substrates W is completed, and when the processing for all the unloaded substrates W is completed, the process proceeds to step Sp34.

In step Sp34, the liquid exchange unit 24 starts executing the liquid exchange process of the treatment liquid Lq0 stored in the liquid storage unit 22.

In step Sp35, it is determined whether or not the execution of the liquid exchange process by the liquid exchange unit 24 is completed for the treatment liquid Lq0 stored in the liquid storage unit 22. This determination can be performed, for example, by the determination unit 2354 or the like. Here, the determination in step Sp35 is repeated until the execution of the liquid exchange process is completed. On the other hand, when the execution of the liquid exchange process is completed, the process proceeds to step Sp36.

In step Sp36, the acquisition unit 2351 initializes the liquid state value in the same manner as in step Sp14 of FIG.

In step Sp37, the transport unit TR resumes carrying out the new substrate W from the carriers C mounted on the first to fourth load ports LP1 to LP4 toward the processing units 21 of N units, and in step Sp1 of FIG. Return to.

In steps Sp41 to Sp44, the liquid exchange unit 24 causes the liquid exchange unit 24 to respond to the completion of processing in the N processing units 21 for all the substrates W already located in the N processing units 21. Perform the exchange process. As a result, for example, the replacement of the treatment liquid Lq0 is executed at an early stage, and the substrate treatment using the deteriorated treatment liquid Lq0 becomes difficult to be executed.

Specifically, in step Sp41, the transfer of the new substrate W to the N processing units 21 by the transfer unit TR is stopped.

In step Sp42, the determination unit 2354 determines whether or not the processing for all the substrates W already located in the N processing units 21 has been completed. Here, for example, the determination in step Sp42 is repeated until the processing for all the substrates W already located in the N processing units 21 is completed, and all the substrates W already located in the N processing units 21 are determined. When the processing for the substrate W is completed, the process proceeds to step Sp43.

In step Sp43, the liquid exchange unit 24 starts executing the liquid exchange process of the treatment liquid Lq0 stored in the liquid storage unit 22.

In step Sp44, it is determined whether or not the execution of the liquid exchange process by the liquid exchange unit 24 is completed for the treatment liquid Lq0 stored in the liquid storage unit 22. This determination can be performed, for example, by the determination unit 2354 or the like. Here, the determination in step Sp44 is repeated until the execution of the liquid exchange process is completed. On the other hand, when the execution of the liquid exchange process is completed, the process proceeds to step Sp45.

In step Sp45, the acquisition unit 2351 initializes the liquid state value in the same manner as in step Sp14 of FIG.

In step Sp46, the transfer of the new substrate W to the N processing units 21 by the transport unit TR and the substrate processing in the N processing units 21 are restarted, and the process returns to step Sp1 of FIG. As described above, here, the N processing units 21 stop the execution of the processing on the substrate W from the start to the completion of the execution of the liquid exchange processing. This facilitates control of substrate processing in, for example, N processing units 21.

<6. Summary>
As described above, in the substrate processing system 1 according to the first embodiment and the control method related to the liquid exchange processing thereof, for example, at the exchange time of the processing liquid Lq0 set in the substrate processing apparatus 20, the substrate processing apparatus 20 is N. The standby state of the processing unit 21 of the unit is detected, and the host computer 10 detects a liquid exchangeable state in which the duration of the standby time is equal to or longer than the reference time. Thereby, for example, the processing liquid Lq0 stored in the liquid storage unit 22 of the substrate processing device 20 can be replaced in response to the detection of the liquid exchangeable state. In other words, for example, the timing for exchanging the processing liquid Lq0 is not determined only by the processing plan information PP1 of the host computer 10, but the exchange is set according to the numerical value related to the state of the processing liquid Lq0 in the substrate processing apparatus 20. The liquid exchangeable state is detected based on the timing and the processing plan information PP1 managed by the host computer 10. Therefore, for example, the processing liquid Lq0 of the liquid storage unit 22 is replaced by effectively utilizing the sufficient length of the duration in which the N processing units 21 are on standby at the replacement period having a certain width. can do. As a result, for example, the operating rate of N processing units 21 can be improved. Therefore, the operating rate of the substrate processing apparatus 20 can be easily improved.

Further, for example, in the substrate processing device 20, the communication unit 231 transmits a second signal to the host computer 10 in response to the numerical value acquired by the acquisition unit 2351 satisfying a preset specific condition. At this time, in the host computer 10, after the communication unit 11 receives the second signal, the recognition unit 151 responds to the reception of the first signal notifying the standby state by the communication unit 11 at the exchange time, and the recognition unit 151 performs the processing plan information. The duration is recognized based on PP1, and the detection unit 152 detects the liquid exchangeable state. As a result, for example, in the host computer 10 that manages the substrate processing plan, the liquid exchangeable state can be detected at the time for exchanging the processing liquid Lq0 in the substrate processing apparatus 20 after the time for exchanging the processing liquid Lq0 has arrived.

<7. Modification example>
The present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the gist of the present invention.

<7-1. First modification>
For example, in the above embodiment, the communication unit 231 of the board processing device 20 may transmit the exchange time information related to the exchange time set by the setting unit 2352 to the host computer 10. In this case, for example, the communication unit 11 of the host computer 10 receives the exchange time information. At this time, for example, in the host computer 10, in response to the reception of the first signal by the communication unit 11 at the exchange time, the recognition unit 151 recognizes the duration of the standby state based on the processing plan information PP1, and the detection unit 152. Detects a liquid exchangeable state. Thereby, for example, in the host computer 10 that manages the substrate processing plan, the liquid exchangeable state can be detected at the time of exchanging the processing liquid Lq0 in the substrate processing apparatus 20.

FIG. 13 is a flow chart showing an example of an operation flow of the control method related to the liquid exchange process of the substrate processing system 1 according to the first modification. The operation flow of FIG. 13 is based on the operation flow of FIG. 9, in which step Sp4 is divided into two steps, steps Sp4a and Sp4b, and step Sp8 is changed to step Sp8A.

Here, in step Sp4a of FIG. 13, the setting unit 2352 sets the replacement time in the same manner as in step Sp4 of FIG. Next, in step Sp4b of FIG. 13, for example, the communication unit 231 of the board processing device 20 transmits the exchange time information related to the exchange time set in step Sp4a to the host computer 10, and the communication unit of the host computer 10 11 receives the exchange time information. In step Sp8A of FIG. 13, for example, in the host computer 10, the recognition unit 151 continues the standby state based on the processing plan information PP1 in response to the reception of the first signal by the communication unit 11 in step Sp7 at the exchange time. The time is recognized, and the detection unit 152 detects the liquid exchangeable state.

When the above configuration is adopted, when four conditions obtained by adding one condition (next [condition 4]) to the three conditions [condition 1] to [condition 3] in the above embodiment are satisfied. A liquid exchangeable state is detected.

[Condition 4] The substrate processing apparatus 20 notifies the host computer 10 of the replacement time.

<7-2. Second modification>
For example, in the above embodiment and the above first modification, for example, at least one of the output unit 13 and the output unit 233 can be recognized by the operator as a user in response to the detection of the liquid exchangeable state by the detection unit 152. First output may be performed. As a result, for example, at the time of exchanging the processing liquid Lq0, if the standby state continues for the reference time for exchanging the processing liquid Lq0 or more, the first output recognizable by the user is performed. Therefore, the operator can easily know, for example, the timing at which the exchange of the treatment liquid Lq0 may be started.

Further, for example, at least one of the output unit 13 and the output unit 233 is operated by the operator as a user in response to the fact that the exchangeable state is not detected by the detection unit 152 at the exchange time and the exchange time has passed. A recognizable second output may be made. As a result, for example, the user can replace the processing liquid Lq0 by notifying the user that the replacement time of the processing liquid Lq0 has passed. As a result, for example, it becomes difficult to perform substrate treatment using the deteriorated treatment liquid Lq0.

Here, for example, each of the user-recognizable first output and the second output is a visually recognizable output of text information by, for example, at least one of the output unit 13 and the output unit 233. Lighting or blinking of a lamp, audible recognizable voice or warning sound output, etc. may be included. Further, here, for example, when the output unit 13 of the host computer 10 performs the first output or the second output, it responds to the signal input by the input unit 12 according to the operation of the operator of the host computer 10. Therefore, it is conceivable that the liquid exchange process by the liquid exchange unit 24 of the substrate processing device 20 is executed. Further, here, for example, when the output unit 233 of the board processing device 20 performs the first output or the second output, the signal input by the input unit 232 is changed according to the operation of the operator of the board processing device 20. In response, the liquid exchange process by the liquid exchange unit 24 of the substrate processing apparatus 20 may be executed. Further, here, for example, the operator of the substrate processing apparatus 20 may perform the liquid exchange process by replacing the tank of the liquid storage unit 22.

14 to 17 are flow charts showing an example of an operation flow of the control method related to the liquid exchange process of the substrate processing system 1 according to the second modification. Here, an example in which the first output and the second output are performed by the output unit 233 of the substrate processing apparatus 20 will be described. The operation flow of FIGS. 14 to 17 is based on the operation flow of FIGS. 9 to 12 according to the above embodiment, step Sp12 of FIG. 9 is changed to step Sp12B of FIG. 14, and step Sp24 of FIG. 10 is shown in FIG. It was changed to step Sp24B of FIG. 15, step Sp34 of FIG. 11 was changed to step Sp34B of FIG. 16, and step Sp43 of FIG. 12 was changed to step Sp43B of FIG.

Here, in step Sp12B of FIG. 14, the output unit 233 of the substrate processing apparatus 20 performs the first output that can be recognized by the operator. Thereby, for example, the operator can easily know the timing at which the exchange of the processing liquid Lq0 may be started. In step Sp24B of FIG. 15, step Sp34B of FIG. 16, and step Sp43B of FIG. 17, the output unit 233 of the substrate processing apparatus 20 performs a second output recognizable by the operator. As a result, for example, the user is notified that the replacement time of the treatment liquid Lq0 has passed, so that the user can replace the treatment liquid Lq0.

However, here, for example, as shown in steps Sp21 to Sp24B of FIG. 15, a plurality of continuous processes are performed after the replacement time has passed without the detection unit 152 detecting the liquid exchangeable state at the replacement time. The output unit 233 may output a second output in response to the completion of the continuous processing being executed in the N processing units 21 of the above. As a result, for example, even if the replacement period of the treatment liquid Lq0 has passed, the continuous treatment for one substrate group is not interrupted by replacing the treatment liquid Lq0 after the continuous treatment for one substrate group is completed. , The operating rate of N processing units 21 is less likely to decrease.

Further, for example, as shown in steps Sp31 to 34B of FIG. 16, the transport unit TR is transferred from the carrier C after the replacement time has passed without the detection unit 152 detecting the liquid exchangeable state at the replacement time. Even if the output unit 233 performs a second output in response to the completion of the processing in the N processing units 21 for all the boards W that have already been carried out to the N processing units 21. Good. As a result, for example, if the operator performs a liquid exchange process in response to the second output, the number of substrates W to be processed with the deteriorated processing liquid Lq0 can be reduced. Further, for example, in continuous processing for one substrate group, the processing conditions for a plurality of substrates W are less likely to vary, so that the characteristics of the substrate W after processing are less likely to vary.

Further, for example, as shown in steps Sp41 to Sp43B of FIG. 17, the detection unit 152 does not detect the liquid exchangeable state, and after the exchange time has passed, it is already located in the N processing units 21. The output unit 233 may perform a second output in response to the completion of processing in the N processing units 21 for all the substrates W. As a result, for example, the operator can replace the processing liquid Lq0 at an early stage according to the second output, and the substrate processing using the deteriorated processing liquid Lq0 is less likely to be executed.

<7-3. Others>
Further, in the above embodiment and each of the above modifications, for example, as shown in FIGS. 18 and 19, the arithmetic processing unit 235a of the substrate processing device 20 is realized by executing the program P2C in the storage unit 234. As a functional configuration, in addition to the acquisition unit 2351, the setting unit 2352, the detection unit 2353, and the determination unit 2354, even if the recognition unit 2355C corresponding to the recognition unit 151 and the detection unit 2356C corresponding to the detection unit 152 are provided. Good. In this case, for example, if the processing plan information (processing plan information) PP2 related to the board processing device 20 is transmitted from the host computer 10, the recognition unit 2355C in the board processing device 20 stores, for example, in the storage unit 234. Based on the processing plan information PP2, the duration of the standby state can be recognized. Further, in the substrate processing apparatus 20, for example, the detection unit 2356C can detect a liquid exchangeable state in which the duration recognized by the recognition unit 2355C is equal to or longer than a preset reference time. In this case, for example, the first signal, the second signal, and the third signal need not be transmitted and received between the host computer 10 and the board processing device 20.

Further, in the above embodiment and each of the above modifications, for example, if the storage unit 14 of the host computer 10 stores information related to the life rule, the arithmetic processing unit 15a of the host computer 10 is based on the life rule. , The replacement time of the treatment liquid Lq0 may be set. In this case, for example, it is not necessary to transmit the replacement time information related to the replacement time from the board processing device 20 to the host computer 10.

Needless to say, all or a part of the above-described embodiment and various modifications can be combined as appropriate within a consistent range.

1 Board processing system 5 Communication line 10 Host computer 11 Communication unit (transmitter, receiver)
12 Input unit 13 Output unit 14 Storage unit 15 Control unit 15a Arithmetic processing unit 20 Board processing equipment 20a to 20c 1st to 3rd board processing equipment 21 Processing unit 22 Liquid storage unit 23 Control unit 24 Liquid exchange unit 151, 355C Recognition Unit 152,2356C Detection unit 231 Communication unit (transmitter, receiver)
232 Input unit 233 Output unit 234 Storage unit 235 Control unit 235a Arithmetic processing unit 2351 Acquisition unit 2352 Setting unit 2353 Detection unit 2354 Judgment unit C carrier LP1 to LP4 1st to 4th load ports Lq0 Processing liquid P1, P2, P2C Program PP1, PP2 processing plan information TR transport unit Tr0 replacement time W board

Claims (27)

One or more processing units that process the substrate with the processing liquid
In the one or more processing units, the first continuous processing in which the plurality of substrates included in the first substrate group are sequentially processed, and the first continuous processing in which the plurality of substrates included in the second substrate group are sequentially processed. A storage unit that stores processing plan information indicating execution timing for a plurality of continuous processes related to a plurality of substrate groups including a second continuous process for performing the process.
A liquid storage unit that stores the treatment liquid used in the one or more treatment units, and a liquid storage unit.
An acquisition unit that acquires a numerical value related to the state of the treatment liquid, and
A setting unit for setting a replacement time of the processing liquid stored in the liquid storage unit based on a numerical value acquired by the acquisition unit and a preset rule relating to the life of the treatment liquid.
A detection unit that detects a standby state in which none of the continuous processing of the plurality of continuous processing is executed by the one or more processing units at the replacement time.
A recognition unit that recognizes the duration of the standby state based on the processing plan information,
A substrate processing system including a detection unit that detects a liquid exchangeable state in which the duration is equal to or longer than a preset reference time. The substrate processing system according to claim 1.
A liquid exchange unit for executing a liquid exchange process for exchanging the treatment liquid stored in the liquid storage unit is further provided.
The liquid exchange unit is a substrate processing system that executes the liquid exchange process in response to the detection of the liquid exchangeable state by the detection unit. The substrate processing system according to claim 2.
In the liquid exchange unit, when the exchangeable state is not detected by the detection unit at the exchange time and the exchange time has passed, in the one or more processing units of the plurality of continuous processes. A substrate processing system that executes the liquid exchange process in response to the completion of the continuous process being executed. The substrate processing system according to claim 2.
A transport unit for carrying out a plurality of substrates housed in the carrier from the carrier toward the one or more processing units is further provided.
The liquid exchange unit is directed from the carrier to the one or more processing units by the transport unit when the exchangeable state is passed without the detection unit detecting the liquid exchangeable state at the exchange time. A substrate processing system that executes the liquid exchange processing in response to the completion of processing in the one or more processing units for all the substrates that have already been carried out. The substrate processing system according to claim 4.
When the exchangeable state is passed without the detection unit detecting the liquid exchangeable state at the exchange time, the transport unit is described from the end of the exchange period to the completion of the liquid exchange process. A substrate processing system that stops carrying out a substrate from a carrier to the one or more processing units. The substrate processing system according to claim 2.
All the liquid exchange units are already located in the one or more processing units when the exchange time has passed without the detection unit detecting the liquid exchangeable state at the exchange time. A substrate processing system that executes the liquid exchange processing on a substrate in response to the completion of processing in the one or more processing units. The substrate processing system according to claim 6.
A substrate processing system in which the one or more processing units stop execution of processing on a substrate from the start to the end of execution of the liquid exchange processing by the liquid exchange unit. The substrate processing system according to claim 1.
A substrate processing system further comprising an output unit that outputs a first output recognizable by the user in response to the detection of the liquid exchangeable state by the detection unit. The substrate processing system according to claim 8.
The output unit outputs a second output recognizable by the user in response to the passage of the exchange time without detecting the liquid exchangeable state by the detection unit at the exchange time. Processing system. The substrate processing system according to any one of claims 1 to 9.
A substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus are provided.
The substrate processing apparatus includes the one or more processing units, the liquid storage unit, the acquisition unit, the setting unit, and the detection unit.
The management device includes the storage unit, the recognition unit, and the detection unit.
The substrate processing device further includes a transmission unit that transmits a first signal to the management device in response to detection of the standby state by the detection unit.
The management device further includes a receiving unit that receives the first signal from the transmitting unit.
In the management device, in response to the reception of the first signal by the receiving unit, the recognition unit recognizes the duration based on the processing plan information, and the detecting unit determines the liquid exchangeable state. A board processing system to detect. The substrate processing system according to claim 10.
The transmitting unit transmits a second signal to the management device in response to the numerical value acquired by the acquiring unit satisfying a preset specific condition.
In the management device, after receiving the second signal by the receiving unit, in response to the reception of the first signal by the receiving unit, the recognition unit recognizes the duration based on the processing plan information. The detection unit is a substrate processing system that detects the liquid exchangeable state. The substrate processing system according to any one of claims 1 to 9.
A substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus are provided.
The substrate processing apparatus includes the one or more processing units, the liquid storage unit, the acquisition unit, the setting unit, and the detection unit.
The management device includes the storage unit, the recognition unit, and the detection unit.
The substrate processing device transmits the replacement time information related to the replacement time set by the setting unit to the management device, and sends a first signal to the management device in response to the detection of the standby state by the detection unit. Including the transmitter to transmit
The management device further includes the exchange time information transmitted by the transmitter and a receiver that receives the first signal.
In the management device, in response to the reception of the first signal by the receiving unit at the exchange time, the recognition unit recognizes the duration based on the processing plan information, and the detecting unit recognizes the duration. A substrate processing system that detects the liquid exchangeable state. The substrate processing system according to claim 12.
The transmitting unit transmits a second signal to the management device in response to the numerical value acquired by the acquiring unit satisfying a preset specific condition.
In the management device, after receiving the second signal by the receiving unit, the recognition unit responds to the reception of the first signal by the receiving unit at the exchange time, based on the processing plan information. A substrate processing system that recognizes the duration and the detection unit detects the liquid exchangeable state. One or more processing units that process the substrates using the processing liquid, and the first continuous processing and the first continuous processing that sequentially process a plurality of substrates in the first substrate group in the one or more processing units. A storage unit that stores processing plan information indicating execution timing for a plurality of continuous processes related to a plurality of board groups including a second continuous process that sequentially processes a plurality of boards of the two board groups, and the above 1 A method for controlling a substrate processing system including a liquid storage unit for storing the processing liquid used in one or more processing units.
An acquisition step for acquiring a numerical value related to the state of the treatment liquid, and
A setting step for setting a replacement time of the treatment liquid stored in the liquid storage unit based on the numerical value acquired in the acquisition step and a preset rule relating to the life of the treatment liquid.
A detection step for detecting a standby state in which none of the continuous processes of the plurality of continuous processes is executed in the one or more processing units at the exchange time.
A recognition step that recognizes the duration of the standby state based on the processing plan information, and
A control method for a substrate processing system, comprising a detection step for detecting a liquid exchangeable state in which the duration is equal to or longer than a preset reference time. The control method for a substrate processing system according to claim 14.
It further comprises a first liquid exchange step, which executes a liquid exchange process for exchanging the treatment liquid stored in the liquid storage unit in response to the detection of the liquid exchangeable state by the detection step. How to control the board processing system. The control method for a substrate processing system according to claim 15.
When the exchangeable state is not detected in the detection step at the exchange time and the exchange time has passed, the continuous processing being executed in the one or more processing units of the plurality of continuous processes is performed. A method of controlling a substrate processing system, further comprising a second liquid exchange step, which performs the liquid exchange process in response to completion. The control method for a substrate processing system according to claim 15.
Further, it has a carry-out step of carrying out a plurality of substrates housed in the carrier from the carrier toward the one or more processing units.
The liquid exchangeable state was not detected in the detection step at the exchange time, and when the exchange time passed, the liquid was already carried out from the carrier toward the one or more processing units in the carry-out step. A method for controlling a substrate processing system, further comprising a second liquid exchange step of executing the liquid exchange process in response to the completion of processing in the one or more processing units for all the substrates. .. The control method for a substrate processing system according to claim 17.
When the exchangeable state is not detected in the detection step at the exchange time and the exchange time has passed, from the end of the exchange time to the completion of the liquid exchange process, the said in the carry-out step. A control method for a substrate processing system that stops carrying out a substrate from a carrier to the one or more processing units. The control method for a substrate processing system according to claim 15.
The liquid exchangeable state is not detected in the detection step at the exchange time, and when the exchange time has passed, all the substrates already located in the one or more processing units are described. A method of controlling a substrate processing system, further comprising a second liquid exchange step of performing the liquid exchange process in response to the completion of the process in one or more processing units. The control method for a substrate processing system according to claim 19.
A method for controlling a substrate processing system, wherein the one or more processing units stop execution of processing on a substrate from the start to the end of execution of the liquid exchange processing in the second liquid exchange step. The control method for a substrate processing system according to claim 14.
A method of controlling a substrate processing system, further comprising a first output step of producing a user-recognizable first output in response to detection of the liquid exchangeable state in the detection step. The control method for a substrate processing system according to claim 21.
Further, a second output step of performing a second output recognizable by the user in response to the passage of the exchange time without detecting the liquid exchangeable state in the detection step at the exchange time. A control method for the substrate processing system. The method for controlling a substrate processing system according to any one of claims 14 to 22.
The substrate processing system includes a substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus.
The substrate processing apparatus includes the one or more processing units and the liquid storage unit.
The management device includes the storage unit.
The control method of the substrate processing system further describes.
In the substrate processing apparatus, a first signal transmission step of transmitting a first signal to the management apparatus in response to detection of the standby state in the detection step, and
The management device includes a first signal receiving step for receiving the first signal.
In the management device, in response to the reception of the first signal in the first signal reception step, the duration is recognized based on the processing plan information in the recognition step, and the liquid exchangeable state is recognized in the detection step. How to control the board processing system to detect. The control method for a substrate processing system according to claim 23.
In the substrate processing apparatus, a second signal transmission step of transmitting a second signal to the management apparatus in response to the numerical value acquired in the acquisition step satisfying a preset specific condition,
The management device further includes a second signal receiving step for receiving the second signal.
In the management device, after receiving the second signal in the second signal receiving step, in response to receiving the first signal in the first signal receiving step, the recognition step is based on the processing plan information. A control method for a substrate processing system that recognizes the duration and detects the liquid exchangeable state in the detection step. The method for controlling a substrate processing system according to any one of claims 14 to 22.
The substrate processing system includes a substrate processing apparatus and a management apparatus communicably connected to the substrate processing apparatus.
The substrate processing apparatus includes the one or more processing units and the liquid storage unit.
The management device includes the storage unit.
The control method of the substrate processing system is further described.
In the substrate processing apparatus, a timing information transmission step of transmitting exchange timing information related to the exchange timing set in the setting step to the management apparatus, and
In the substrate processing apparatus, a first signal transmission step of transmitting a first signal to the management apparatus in response to detection of the standby state in the detection step, and
In the management device, the time information receiving step of receiving the exchange time information and
The management device includes a first signal receiving step for receiving the first signal.
In the management device, at the exchange time, in response to the reception of the first signal in the first signal reception step, the recognition step recognizes the duration based on the processing plan information, and the detection step recognizes the duration. A control method for a substrate processing system that detects the liquid exchangeable state. The control method of the substrate processing system according to claim 25.
In the substrate processing apparatus, a second signal transmission step of transmitting a second signal to the management apparatus in response to the numerical value acquired in the acquisition step satisfying a preset specific condition,
The management device further includes a second signal receiving step for receiving the second signal.
After receiving the second signal in the second signal receiving step in the management device, in response to the reception of the first signal in the first signal receiving step at the exchange time, the processing in the recognition step. A control method for a substrate processing system that recognizes the duration based on planning information and detects the liquid exchangeable state in the detection step. A program that causes the substrate processing system to function as the substrate processing system according to any one of claims 1 to 13, when executed by an arithmetic processing unit included in the substrate processing system.

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