JP6780871B2 - 磁気トンネルダイオード及び磁気トンネルトランジスタ - Google Patents
磁気トンネルダイオード及び磁気トンネルトランジスタ Download PDFInfo
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- JP6780871B2 JP6780871B2 JP2018541516A JP2018541516A JP6780871B2 JP 6780871 B2 JP6780871 B2 JP 6780871B2 JP 2018541516 A JP2018541516 A JP 2018541516A JP 2018541516 A JP2018541516 A JP 2018541516A JP 6780871 B2 JP6780871 B2 JP 6780871B2
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- 230000002441 reversible effect Effects 0.000 claims description 7
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- 229910052738 indium Inorganic materials 0.000 claims description 6
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- -1 Z'= C. Inorganic materials 0.000 claims description 5
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66984—Devices using spin polarized carriers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Hall/Mr Elements (AREA)
Description
Claims (15)
- 電気回路に接続するための2つの端子とトンネル接合(160)を含み、前記トンネル接合(160)が、半金属磁石(108)の材料層と、トンネルバリア(110)と、スピンギャップレス半導体(112)の材料層を有する、磁気トンネルダイオード(100)。
- 前記半金属磁石(108)の材料層が固定された磁化方向を有し、かつ、前記スピンギャップレス半導体(112)の材料層が再構成可能な磁化方向を有するか、もしくは前記半金属磁石(108)の材料層が再構成可能な磁化方向を有し、かつ、前記スピンギャップレス半導体(112)の材料層が固定された磁化方向を有する、請求項1に記載の磁気トンネルダイオード(100)。
- 前記半金属磁石(108)の材料層又は前記スピンギャップレス半導体(112)の材料層のいずれかの磁化方向を固定するための固定層(106)であって、トンネル接合(160)に隣接する固定層(106)を有する、請求項1又は2に記載の磁気トンネルダイオード(100)。
- 前記半金属磁石(108)の材料層の層厚が、少なくとも0.1nm、及び/又は最大50nmである、請求項1〜3の何れかに記載の磁気トンネルダイオード(100)。
- 前記スピンギャップレス半導体(112)の材料層の層厚が、少なくとも0.1nm、及び/又は最大40nmである、請求項1〜4の何れかに記載の磁気トンネルダイオード(100)。
- 前記スピンギャップレス半導体(112)の材料層が、FeCrXZ、FeVXZ’、及び/又はMnVXZ”を含み、ここで、X=Ti、Zr又はHf、Z=B、Al、Ga又はIn、Z’=C、Si、Ge又はSn、Z”=N、P、As又はSbである、請求項1〜5の何れかに記載の磁気トンネルダイオード(100)。
- 前記スピンギャップレス半導体(112)の材料層が、FeVTiSi、FeVZrSi、及び/又はFeVZrGeを含む、請求項1〜6の何れかに記載の磁気トンネルダイオード(100)。
- 前記スピンギャップレス半導体(112)の材料層は、1原子層のみの厚さを有する材料を含むか、又はそれからなる、請求項1〜7の何れかに記載の磁気トンネルダイオード(100)。
- 前記スピンギャップレス半導体(112)の材料層が、水和グラフェン、VX2及び/又はNbX2を含むか、又はそれらからなり、ここで、X=O、S、Se、Teである、請求項1〜8の何れかに記載の磁気トンネルダイオード(100)。
- 請求項1〜9のいずれか1項に記載の磁気トンネルダイオードを2つ有する磁気トランジスタ(200)であって、一つの磁気トンネルダイオードが、半金属磁石(108)の材料層と、トンネルバリア(110)と、スピンギャップレス半導体(112)の材料層を有し、他の磁気トンネルダイオードが、半金属磁石(108)の材料層と、トンネルバリア(110)と、スピンギャップレス半導体(112)の材料層を有し、前記一つの磁気トンネルダイオードのスピンギャップレス半導体(112)の材料層と、前記他の磁気トンネルダイオードのスピンギャップレス半導体(112)の材料層が共通する層である、磁気トンネルトランジスタ(200)。
- 請求項1〜9の何れかに記載の磁気トンネルダイオード(100)において電流通過方向を構成及び/又は再構成する方法であって、スピンギャップレス半導体(112)又は半金属磁石(108)の磁化方向を逆転させるために、動作電流より大きい電流が印加されるか、又は外部磁界が活性化される、電流通過方向を構成及び/又は再構成する方法。
- 請求項10に記載の磁気トンネルトランジスタ(200)において電流通過方向を構成及び/又は再構成する方法であって、スピンギャップレス半導体(212)の材料層の磁化方向を逆転させるために、動作電流より大きい電流が印加されるか、又は外部磁界が活性化される、電流通過方向を構成及び/又は再構成する方法。
- 請求項1〜9の何れかに記載の磁気トンネルダイオード(100)の前記スピンギャップレス半導体(112)の使用、又は、請求項10に記載の磁気トンネルトランジスタ(200)のスピンギャップレス半導体層(212)の使用であって、電流通過方向の不揮発性及び/又は再構成可能性の特性を得るための使用。
- 請求項1〜9の何れかに記載の磁気トンネルダイオード(100)の前記スピンギャップレス半導体(112)の使用、又は、請求項10に記載の磁気トンネルトランジスタ(200)のスピンギャップレス半導体層(212)の使用であって、逆トンネル磁気抵抗効果を得るための使用。
- 前記請求項13又は14に記載の使用であって、請求項1〜9の何れかに記載の磁気トンネルダイオード(100)の前記半金属磁石(108)の材料層が、強磁性材料又はフェリ磁性材料からなる、前記請求項13又は14に記載の使用。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015221521.0 | 2015-11-03 | ||
DE102015221521.0A DE102015221521A1 (de) | 2015-11-03 | 2015-11-03 | Tunneldiode und -transistor |
PCT/EP2016/076041 WO2017076763A1 (de) | 2015-11-03 | 2016-10-28 | Magnetische tunneldiode und magnetischer tunneltransistor |
Publications (2)
Publication Number | Publication Date |
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JP2018533227A JP2018533227A (ja) | 2018-11-08 |
JP6780871B2 true JP6780871B2 (ja) | 2020-11-04 |
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JP2018541516A Active JP6780871B2 (ja) | 2015-11-03 | 2016-10-28 | 磁気トンネルダイオード及び磁気トンネルトランジスタ |
Country Status (6)
Country | Link |
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US (1) | US10644227B2 (ja) |
EP (1) | EP3371836B1 (ja) |
JP (1) | JP6780871B2 (ja) |
CN (1) | CN108352446B (ja) |
DE (1) | DE102015221521A1 (ja) |
WO (1) | WO2017076763A1 (ja) |
Families Citing this family (3)
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US11094361B2 (en) | 2018-09-05 | 2021-08-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistorless memory cell |
CN110190181B (zh) * | 2019-05-21 | 2021-09-14 | 四川师范大学 | 一种基于铁磁斯格明子的二极管 |
CN113036032A (zh) * | 2019-12-24 | 2021-06-25 | Tdk株式会社 | 磁阻效应元件 |
Family Cites Families (17)
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DE10141341C2 (de) * | 2001-08-23 | 2003-08-21 | Siemens Ag | Elektronisches Bauelement umfassend wenigstens einen Kondensator |
JP3571034B2 (ja) | 2002-06-18 | 2004-09-29 | 独立行政法人 科学技術振興機構 | 磁気抵抗ランダムアクセスメモリー装置 |
KR100492482B1 (ko) * | 2002-09-04 | 2005-06-03 | 한국과학기술연구원 | Pembe로 제조된 상온 자성반도체 및 그 소자 |
JP2004158750A (ja) * | 2002-11-08 | 2004-06-03 | Hitachi Ltd | 磁気抵抗効果素子、磁気記録素子およびこれらを利用した装置 |
FR2848727B1 (fr) * | 2002-12-13 | 2005-02-18 | Thales Sa | Transistor a vanne de spin a haut rendement |
US7012832B1 (en) * | 2003-10-31 | 2006-03-14 | Western Digital (Fremont), Inc. | Magnetic memory cell with plural read transistors |
CN100379018C (zh) * | 2004-09-24 | 2008-04-02 | 中国科学院物理研究所 | 基于双势垒隧道结共振隧穿效应的晶体管 |
CN1606170A (zh) * | 2004-09-24 | 2005-04-13 | 中国科学院物理研究所 | 基于双势垒隧道结共振隧穿效应的晶体管 |
US7450327B2 (en) * | 2004-09-30 | 2008-11-11 | Intematix Corporation | Coherent spin valve and related devices |
CN100426521C (zh) * | 2004-10-11 | 2008-10-15 | 财团法人工业技术研究院 | 自旋晶体管 |
JP5040105B2 (ja) * | 2005-12-01 | 2012-10-03 | ソニー株式会社 | 記憶素子、メモリ |
US7936028B2 (en) * | 2007-11-09 | 2011-05-03 | Samsung Electronics Co., Ltd. | Spin field effect transistor using half metal and method of manufacturing the same |
KR20100135254A (ko) | 2008-03-12 | 2010-12-24 | 유니버시티 오브 울롱공 | 새로운 타입의 갭리스 반도체 물질 |
KR101598542B1 (ko) * | 2009-01-13 | 2016-02-29 | 삼성전자주식회사 | 스핀 전계효과 트랜지스터를 이용한 논리소자 |
US8233249B2 (en) | 2010-01-04 | 2012-07-31 | International Business Machines Corporation | Magnetic tunnel junction transistor device |
JP5649605B2 (ja) * | 2012-03-26 | 2015-01-07 | 株式会社東芝 | スピントランジスタおよびメモリ |
CN105449097B (zh) * | 2015-11-27 | 2018-07-17 | 中国科学院物理研究所 | 双磁性势垒隧道结以及包括其的自旋电子学器件 |
-
2015
- 2015-11-03 DE DE102015221521.0A patent/DE102015221521A1/de not_active Withdrawn
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2016
- 2016-10-28 JP JP2018541516A patent/JP6780871B2/ja active Active
- 2016-10-28 WO PCT/EP2016/076041 patent/WO2017076763A1/de active Application Filing
- 2016-10-28 CN CN201680060273.2A patent/CN108352446B/zh active Active
- 2016-10-28 EP EP16788508.6A patent/EP3371836B1/de active Active
- 2016-10-28 US US15/765,923 patent/US10644227B2/en active Active
Also Published As
Publication number | Publication date |
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US20180309047A1 (en) | 2018-10-25 |
DE102015221521A8 (de) | 2017-07-06 |
JP2018533227A (ja) | 2018-11-08 |
US10644227B2 (en) | 2020-05-05 |
DE102015221521A1 (de) | 2017-05-04 |
CN108352446B (zh) | 2021-08-24 |
EP3371836B1 (de) | 2019-11-06 |
WO2017076763A1 (de) | 2017-05-11 |
EP3371836A1 (de) | 2018-09-12 |
CN108352446A (zh) | 2018-07-31 |
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