JP6777116B2 - レーザ式ガス分析計 - Google Patents
レーザ式ガス分析計 Download PDFInfo
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- JP6777116B2 JP6777116B2 JP2018092398A JP2018092398A JP6777116B2 JP 6777116 B2 JP6777116 B2 JP 6777116B2 JP 2018092398 A JP2018092398 A JP 2018092398A JP 2018092398 A JP2018092398 A JP 2018092398A JP 6777116 B2 JP6777116 B2 JP 6777116B2
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
- G01N2021/8514—Probe photometers, i.e. with optical measuring part dipped into fluid sample with immersed mirror
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Description
測定対象ガスにレーザ光を照射する発光部と、
測定対象ガスを通過した前記レーザ光を反射する反射部と、
該反射部からの前記レーザ光を受光する受光部と、
前記発光部を制御し、前記受光部からの出力信号を処理する制御部と、
前記発光部と前記反射部との間に配置され、測定対象ガスが流入及び流出する開口を有する筒状の測定対象ガス通過部と、
該測定対象ガス通過部の前記発光部側に配置され、測定対象成分が含まれないパージガスが充填される第1パージ領域部と、
前記測定対象ガス通過部と前記第1パージ領域部との境界を画定し、前記レーザ光が通過可能な開孔を有する第1隔壁部と
を備え、
前記第1隔壁部には、前記発光部に対向する面に、前記レーザ光の散乱を促進する微小凹凸が形成されるか、又は前記レーザ光の散乱又は吸収を促進する表面処理が施されており、
測定対象ガスが流入及び流出する前記開口のうち、測定対象ガスが流入する少なくとも一部の上流側開口は、光軸方向の寸法が、光軸方向に直交する方向の寸法よりも短く、前記第1隔壁部に隣接して配置されていることを特徴とする。
11 発光部
11a レーザ光
13 受光部
15 制御部
20 プローブ部
21 ハウジング
21c 中央ハウジング
21s サイドハウジング
22 測定対象ガス通過部
22a 上流側開口
22b 下流側開口
24 パージ領域部(第1パージ領域部)
25 パージ領域部(第2パージ領域部)
26 セパレーションウォール部(第1隔壁部)
27 セパレーションウォール部(第2隔壁部)
26a,27a 開孔
26b,27b ブラスト処理面
26d、27d 案内面
26e,27e 嵌合部
26w,27w 壁部
28 反射部
29 フランジ
30 配管
100 レーザ式ガス分析計
Claims (4)
- 測定対象ガスにレーザ光を照射する発光部と、
測定対象ガスを通過した前記レーザ光を反射する反射部と、
該反射部からの前記レーザ光を受光する受光部と、
前記発光部を制御し、前記受光部からの出力信号を処理する制御部と、
前記発光部と前記反射部との間に配置され、測定対象ガスが流入及び流出する開口を有する筒状の測定対象ガス通過部と、
該測定対象ガス通過部の前記発光部側に配置され、測定対象成分が含まれないパージガスが充填される第1パージ領域部と、
前記測定対象ガス通過部と前記第1パージ領域部との境界を画定し、前記レーザ光が通過可能な開孔を有する第1隔壁部と
を備え、
前記第1隔壁部には、前記発光部に対向する面に、前記レーザ光の散乱を促進する微小凹凸が形成されるか、又は前記レーザ光の散乱又は吸収を促進する表面処理が施されており、
測定対象ガスが流入及び流出する前記開口のうち、測定対象ガスが流入する少なくとも一部の上流側開口は、光軸方向の寸法が、光軸方向に直交する方向の寸法よりも短く、前記第1隔壁部に隣接して配置されていることを特徴とするレーザ式ガス分析計。 - 前記測定対象ガス通過部の前記反射部側に配置され、前記パージガスが充填される第2パージ領域部と、
前記測定対象ガス通過部と前記第2パージ領域部との境界を画定し、前記レーザ光が通過可能な開孔を有する第2隔壁部と
を更に備え、
前記第2隔壁部には、前記発光部に対向する面に、前記レーザ光の散乱を促進する微小凹凸が形成されるか、又は前記レーザ光の散乱又は吸収を促進する表面処理が施されている、請求項1に記載のレーザ式ガス分析計。 - 前記表面処理は、ブラスト処理である、請求項1又は2に記載のレーザ式ガス分析計。
- 前記第1隔壁部に対して、発光部の位置を光軸に直交する方向に調整可能である、請求項1乃至3のいずれか一項に記載のレーザ式ガス分析計。
Priority Applications (4)
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JP2018092398A JP6777116B2 (ja) | 2018-05-11 | 2018-05-11 | レーザ式ガス分析計 |
EP19171691.9A EP3567365B1 (en) | 2018-05-11 | 2019-04-29 | Laser gas analyzer |
US16/406,793 US10488337B1 (en) | 2018-05-11 | 2019-05-08 | Laser gas analyzer |
CN201910381958.2A CN110470631B (zh) | 2018-05-11 | 2019-05-08 | 激光式气体分析仪 |
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JP2018092398A JP6777116B2 (ja) | 2018-05-11 | 2018-05-11 | レーザ式ガス分析計 |
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JP2019197028A JP2019197028A (ja) | 2019-11-14 |
JP6777116B2 true JP6777116B2 (ja) | 2020-10-28 |
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US (1) | US10488337B1 (ja) |
EP (1) | EP3567365B1 (ja) |
JP (1) | JP6777116B2 (ja) |
CN (1) | CN110470631B (ja) |
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CN114354297A (zh) * | 2022-03-21 | 2022-04-15 | 朗思传感科技(深圳)有限公司 | 一种滤网探针 |
Family Cites Families (10)
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JPS62184458U (ja) * | 1986-05-13 | 1987-11-24 | ||
US7319524B2 (en) * | 2005-03-28 | 2008-01-15 | Honeywell International, Inc. | Air purged optical densitometer |
EP2416187B1 (en) * | 2010-08-04 | 2013-05-08 | HORIBA, Ltd. | Air-driven shutter device and optical analyzer |
EP2416146B1 (en) * | 2010-08-04 | 2018-12-26 | HORIBA, Ltd. | Probe for gas analysis |
US9651488B2 (en) * | 2010-10-14 | 2017-05-16 | Thermo Fisher Scientific (Bremen) Gmbh | High-accuracy mid-IR laser-based gas sensor |
EP2604999A1 (de) * | 2011-12-15 | 2013-06-19 | Mettler-Toledo AG | Gasmessgerät |
EP2610607B1 (en) * | 2011-12-27 | 2019-10-30 | HORIBA, Ltd. | Gas analyzing apparatus |
JP2013245951A (ja) * | 2012-05-23 | 2013-12-09 | Mitsubishi Heavy Ind Ltd | 濃度測定装置及び脱硝装置 |
GB2528976B (en) * | 2014-08-08 | 2016-12-28 | Servomex Group Ltd | Alignment device and transmitter/receiver system with two angular degrees of freedom |
EP3029451B1 (en) * | 2014-12-01 | 2020-11-11 | Yokogawa Electric Corporation | Laser gas analyzer |
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2018
- 2018-05-11 JP JP2018092398A patent/JP6777116B2/ja active Active
-
2019
- 2019-04-29 EP EP19171691.9A patent/EP3567365B1/en active Active
- 2019-05-08 CN CN201910381958.2A patent/CN110470631B/zh active Active
- 2019-05-08 US US16/406,793 patent/US10488337B1/en active Active
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Publication number | Publication date |
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EP3567365A1 (en) | 2019-11-13 |
JP2019197028A (ja) | 2019-11-14 |
EP3567365B1 (en) | 2022-03-02 |
CN110470631A (zh) | 2019-11-19 |
US10488337B1 (en) | 2019-11-26 |
US20190346366A1 (en) | 2019-11-14 |
CN110470631B (zh) | 2022-06-03 |
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