JP6771399B2 - Irradiation device - Google Patents

Irradiation device Download PDF

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JP6771399B2
JP6771399B2 JP2017017512A JP2017017512A JP6771399B2 JP 6771399 B2 JP6771399 B2 JP 6771399B2 JP 2017017512 A JP2017017512 A JP 2017017512A JP 2017017512 A JP2017017512 A JP 2017017512A JP 6771399 B2 JP6771399 B2 JP 6771399B2
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ultraviolet light
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睦 糀屋
睦 糀屋
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Nikkiso Co Ltd
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Description

本発明は、流体に紫外光を照射するための照射装置に関する。 The present invention relates to an irradiation device for irradiating a fluid with ultraviolet light.

紫外光には殺菌能力があることが知られており、医療や食品加工の現場などでの殺菌処理に紫外光を照射する装置が用いられている。また、水などの流体に紫外光を照射することで、流体を連続的に殺菌する装置も用いられている。このような装置として、例えば、直管状の金属パイプで形成される流路の管端部内壁に紫外線ＬＥＤを配置した装置が挙げられる（例えば、特許文献１参照）。 It is known that ultraviolet light has a sterilizing ability, and a device that irradiates ultraviolet light is used for sterilizing treatment at medical sites and food processing sites. In addition, a device for continuously sterilizing a fluid by irradiating a fluid such as water with ultraviolet light is also used. Examples of such a device include a device in which an ultraviolet LED is arranged on the inner wall of a pipe end of a flow path formed of a straight tubular metal pipe (see, for example, Patent Document 1).

特開２０１１−１６０７４号公報Japanese Unexamined Patent Publication No. 2011-16704

流路内を流れる流体に高効率で紫外光を照射するためには、流路内壁面での紫外光反射率が高い構造とすることが望ましい。 In order to irradiate the fluid flowing in the flow path with ultraviolet light with high efficiency, it is desirable to have a structure having a high ultraviolet light reflectance on the inner wall surface of the flow path.

本発明はこうした課題に鑑みてなされたものであり、その例示的な目的のひとつは、紫外光の照射効率を高めた照射装置を提供することにある。 The present invention has been made in view of these problems, and one of the exemplary objects thereof is to provide an irradiation device having improved irradiation efficiency of ultraviolet light.

本発明のある態様の照射装置は、算術平均粗さが４μｍ以上１００μｍ以下のフッ素系樹脂材料で流路内壁面の少なくとも一部が構成される流路構造と、流路構造の内部に向けて紫外光を照射する光源と、を備える。 The irradiation device of one aspect of the present invention has a flow path structure in which at least a part of the inner wall surface of the flow path is formed of a fluororesin material having an arithmetic mean roughness of 4 μm or more and 100 μm or less, and toward the inside of the flow path structure. It includes a light source that irradiates ultraviolet light.

この態様によると、流路内壁面にフッ素系樹脂材料を用いることにより、紫外光に対する耐久性が高い流路構造にするとともに、流路内壁面での紫外光反射率を高めて流体に効率的に紫外光を照射することができる。また、フッ素系樹脂材料の表面粗さを４μｍ以上１００μｍ以下にすることで、流路内壁面に気泡を付着させやすくでき、流体と気泡の界面での反射を利用して紫外光を流路に沿って高効率に伝搬させることができる。これにより、光源から離れた位置まで高強度の紫外光を照射することができ、流体に作用する紫外光量を高めることができる。 According to this aspect, by using a fluorine-based resin material for the inner wall surface of the flow path, a flow path structure having high durability against ultraviolet light is formed, and the reflectance of ultraviolet light on the inner wall surface of the flow path is increased to be efficient for fluids. Can be irradiated with ultraviolet light. Further, by setting the surface roughness of the fluororesin material to 4 μm or more and 100 μm or less, it is possible to easily attach bubbles to the inner wall surface of the flow path, and ultraviolet light is sent to the flow path by utilizing the reflection at the interface between the fluid and the bubbles. It can be propagated along with high efficiency. As a result, it is possible to irradiate high-intensity ultraviolet light to a position away from the light source, and it is possible to increase the amount of ultraviolet light acting on the fluid.

フッ素系樹脂材料は、ポリテトラフルオロエチレン（ＰＴＦＥ）であってもよい。 The fluororesin material may be polytetrafluoroethylene (PTFE).

流路構造は、フッ素系樹脂材料で構成される直管を含んでもよい。光源は、直管の内部に向けて直管の軸方向に紫外光を照射するよう配置されてもよい。 The flow path structure may include a straight pipe made of a fluororesin material. The light source may be arranged so as to irradiate ultraviolet light toward the inside of the straight tube in the axial direction of the straight tube.

光源は、波長が２５０ｎｍ〜３００ｎｍの紫外光を出力してもよい。 The light source may output ultraviolet light having a wavelength of 250 nm to 300 nm.

本発明によれば、流路内での紫外光の照射効率を高めることができる。 According to the present invention, the irradiation efficiency of ultraviolet light in the flow path can be increased.

実施の形態に係る照射装置の構成を概略的に示す断面図である。It is sectional drawing which shows schematic the structure of the irradiation apparatus which concerns on embodiment. 流路内の照度分布を模式的に示すグラフである。It is a graph which shows typically the illuminance distribution in a flow path. 実施の形態に係る浄化装置の構成を模式的に示す図である。It is a figure which shows typically the structure of the purification apparatus which concerns on embodiment.

以下、図面を参照しながら、本発明を実施するための形態について詳細に説明する。なお、説明において同一の要素には同一の符号を付し、重複する説明を適宜省略する。 Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In the description, the same elements are designated by the same reference numerals, and duplicate description will be omitted as appropriate.

図１は、実施の形態に係る照射装置１０の構成を概略的に示す断面図である。照射装置１０は、流路構造１２と、光源１４とを備える。流路構造１２は、直管２０と、流入管２６と、流出管２８と、照射窓３０と、端部壁３２とを備える。照射装置１０は、直管２０の内部を流れる水などの流体に紫外光を照射して殺菌処理や浄化処理を施すために用いられる。 FIG. 1 is a cross-sectional view schematically showing the configuration of the irradiation device 10 according to the embodiment. The irradiation device 10 includes a flow path structure 12 and a light source 14. The flow path structure 12 includes a straight pipe 20, an inflow pipe 26, an outflow pipe 28, an irradiation window 30, and an end wall 32. The irradiation device 10 is used to irradiate a fluid such as water flowing inside the straight tube 20 with ultraviolet light to perform a sterilization treatment or a purification treatment.

光源１４は、流路構造１２の内部に紫外光を照射するよう構成される。光源１４は、直管２０の第１端部２２に配置され、照射窓３０を介して直管２０の内部に向けて直管２０の軸方向に紫外光を照射する。光源１４は、例えば、紫外光を発するＬＥＤ（Light Emitting Diode）を含み、殺菌効率が高い波長である２５０ｎｍ〜３００ｎｍ付近の紫外光を出力する。光源１４は、照射対象が水の場合、２６５ｎｍ〜２８５ｎｍの紫外光を出力するよう構成されることが好ましく、例えば、２７０ｎｍ、２７５ｎｍ、または、２８０ｎｍの紫外光を出力する。光源１４は、紫外光ＬＥＤから出力される紫外光の照射方向を整えるためのレンズやリフレクタといった光学素子を含んでもよい。 The light source 14 is configured to irradiate the inside of the flow path structure 12 with ultraviolet light. The light source 14 is arranged at the first end 22 of the straight tube 20, and irradiates ultraviolet light in the axial direction of the straight tube 20 toward the inside of the straight tube 20 through the irradiation window 30. The light source 14 includes, for example, an LED (Light Emitting Diode) that emits ultraviolet light, and outputs ultraviolet light in the vicinity of 250 nm to 300 nm, which is a wavelength having high sterilization efficiency. When the irradiation target is water, the light source 14 is preferably configured to output ultraviolet light of 265 nm to 285 nm, and outputs, for example, ultraviolet light of 270 nm, 275 nm, or 280 nm. The light source 14 may include an optical element such as a lens or a reflector for adjusting the irradiation direction of the ultraviolet light output from the ultraviolet light LED.

直管２０は、第１端部２２から第２端部２４に向けて軸方向に延在する。直管２０は、フッ素系樹脂材料で構成され、例えば、全フッ素化樹脂であるポリテトラフルオロエチレン（ＰＴＦＥ）で構成される。ＰＴＦＥは、化学的に安定した材料であり、耐久性、耐熱性および耐薬品性に優れ、紫外光の反射率が高い材料である。直管２０をＰＴＦＥなどのフッ素系樹脂で構成することにより、光源１４からの紫外光を内壁面１８で反射させ、直管２０の軸方向に紫外光を伝搬させることができる。 The straight pipe 20 extends axially from the first end 22 to the second end 24. The straight pipe 20 is made of a fluorinated resin material, for example, made of polytetrafluoroethylene (PTFE), which is a completely fluorinated resin. PTFE is a chemically stable material, excellent in durability, heat resistance and chemical resistance, and has a high reflectance of ultraviolet light. By forming the straight tube 20 with a fluorine-based resin such as PTFE, the ultraviolet light from the light source 14 can be reflected by the inner wall surface 18 and propagated in the axial direction of the straight tube 20.

なお、直管２０は、その全体がＰＴＦＥで構成されている必要はなく、流体と接触する内壁面１８がＰＴＦＥで構成されていればよい。例えば、他の樹脂材料もしくは金属材料で構成される管の内面にＰＴＦＥのライナを取り付けて直管２０を構成してもよい。 The straight pipe 20 does not have to be entirely made of PTFE, and the inner wall surface 18 in contact with the fluid may be made of PTFE. For example, the straight pipe 20 may be formed by attaching a PTFE liner to the inner surface of a pipe made of another resin material or metal material.

直管２０の第１端部２２には、光源１４からの紫外光を透過させる照射窓３０が設けられる。照射窓３０は、石英（ＳｉＯ２）やサファイア（Ａｌ２Ｏ３）、非晶質のフッ素系樹脂などの紫外光の透過率が高い部材で構成される。直管２０の第２端部２４には、端部壁３２が設けられる。端部壁３２は、直管２０と同様にＰＴＦＥなどのフッ素系樹脂材料で構成される。端部壁３２は、その全体がＰＴＦＥで構成されなくてもよく、少なくとも端部壁３２の内面３４がＰＴＦＥで構成されていればよい。 The first end 22 of the straight tube 20 is provided with an irradiation window 30 that transmits ultraviolet light from the light source 14. The irradiation window 30 is made of a member having a high transmittance of ultraviolet light such as quartz (SiO 2 ), sapphire (Al 2 O 3 ), and an amorphous fluororesin. An end wall 32 is provided at the second end 24 of the straight pipe 20. The end wall 32 is made of a fluororesin material such as PTFE, like the straight pipe 20. The end wall 32 does not have to be entirely composed of PTFE, and at least the inner surface 34 of the end wall 32 may be composed of PTFE.

流入管２６は、直管２０の第１端部２２付近に設けられ、直管２０の軸方向と直交する径方向に延在する。流出管２８は、直管２０の第２端部２４付近に設けられ、直管２０の径方向に延在する。したがって、照射装置１０は、光源１４に近い位置から流体が流入され、光源１４から離れる方向に直管２０の内部を流れてから排出される。なお、流体の流れの方向が逆になるように構成されてもよく、流入管２６が流出側、流出管２８が流入側となるように構成してもよい。 The inflow pipe 26 is provided near the first end portion 22 of the straight pipe 20, and extends in the radial direction orthogonal to the axial direction of the straight pipe 20. The outflow pipe 28 is provided near the second end portion 24 of the straight pipe 20, and extends in the radial direction of the straight pipe 20. Therefore, in the irradiation device 10, the fluid flows in from a position close to the light source 14, flows inside the straight tube 20 in the direction away from the light source 14, and then is discharged. The flow direction of the fluid may be reversed, and the inflow pipe 26 may be on the outflow side and the outflow pipe 28 may be on the inflow side.

本実施の形態では、直管２０の内壁面１８の算術平均粗さＲａが４μｍ以上となるように構成されている。例えば、表面に微細な凹凸が設けられた金型を用いて直管２０を成形することにより、内壁面１８の表面粗さＲａを４μｍ以上にできる。その他、成形された直管２０の内壁面１８にサンドブラスト処理等を加えて内壁面１８を粗面化してもよい。また、直管２０がＰＴＦＥである場合、ＰＴＦＥの圧縮成形に用いる樹脂ペレットの粒径を適切に選択することで内壁面１８に微細な凹凸が生じるようにしてもよい。 In the present embodiment, the arithmetic average roughness Ra of the inner wall surface 18 of the straight pipe 20 is configured to be 4 μm or more. For example, the surface roughness Ra of the inner wall surface 18 can be made 4 μm or more by molding the straight pipe 20 using a mold having fine irregularities on the surface. In addition, the inner wall surface 18 of the molded straight pipe 20 may be roughened by sandblasting or the like. Further, when the straight pipe 20 is PTFE, the inner wall surface 18 may have fine irregularities by appropriately selecting the particle size of the resin pellets used for compression molding of PTFE.

直管２０の内壁面１８を構成するフッ素系樹脂材料は、表面エネルギーが高いために超撥水性を示す。そのため、内壁面１８に微細な凹凸が存在すると、その凹凸に気泡が付着しやすく、気泡がいったんできると除去されにくい。本発明者らの知見によれば、ＰＴＦＥ表面の算術平均粗さＲａが４μｍ以上となると、表面に気泡の付着が確認され、Ｒａが９μｍ以上となると多数の気泡が付着することが分かっている。一方、ＰＴＦＥ表面の表面粗さＲａが４μｍ未満となり、例えば、表面粗さＲａが２μｍ以下となると気泡の付着がほとんど確認されない。 The fluororesin material constituting the inner wall surface 18 of the straight pipe 20 exhibits super water repellency due to its high surface energy. Therefore, if fine irregularities are present on the inner wall surface 18, bubbles are likely to adhere to the irregularities, and once the bubbles are formed, they are difficult to remove. According to the findings of the present inventors, it is known that when the arithmetic mean roughness Ra of the PTFE surface is 4 μm or more, adhesion of bubbles is confirmed on the surface, and when Ra is 9 μm or more, a large number of bubbles are attached. .. On the other hand, when the surface roughness Ra of the PTFE surface is less than 4 μm, for example, when the surface roughness Ra is 2 μm or less, adhesion of bubbles is hardly confirmed.

直管２０の内壁面１８に気泡が付着すると、流体と気泡の屈折率差により気泡表面で反射ないし散乱が生じ、直管２０の内部の紫外光照度分布に影響を及ぼす。フッ素系樹脂材料の表面では拡散反射が主体的であり、入射する紫外光が様々な方向に散乱されるのに対し、気泡表面では鏡面反射が主体的であり、入射する紫外光が特定の方向に強く反射されやすい。その結果、流路内壁面に多数の気泡を生じさせると、流路内壁面で紫外光を鏡面反射させて紫外光をより遠くまで伝搬させることができる。本実施の形態では、気泡を発生させて紫外光の伝搬距離を長くする目的のため、内壁面１８の算術平均粗さＲａを４μｍ以上としている。 When bubbles adhere to the inner wall surface 18 of the straight tube 20, reflection or scattering occurs on the surface of the bubbles due to the difference in refractive index between the fluid and the bubbles, which affects the ultraviolet light illuminance distribution inside the straight tube 20. Diffuse reflection is the main component on the surface of the fluororesin material, and incident ultraviolet light is scattered in various directions, whereas specular reflection is the main component on the surface of bubbles, and the incident ultraviolet light is in a specific direction. It is strongly reflected by. As a result, when a large number of bubbles are generated on the inner wall surface of the flow path, the ultraviolet light can be specularly reflected on the inner wall surface of the flow path and the ultraviolet light can be propagated farther. In the present embodiment, the arithmetic average roughness Ra of the inner wall surface 18 is set to 4 μm or more for the purpose of generating bubbles and lengthening the propagation distance of ultraviolet light.

一方で、表面粗さＲａが１００μｍを超えると、ＰＴＦＥ表面に均一に気泡を生じさせることが難しい。したがって、気泡を利用して流路内の照度分布を高めるためには、内壁面１８の算術平均粗さＲａを４μｍ以上１００μｍ以下とすることが好ましい。例えば、内壁面１８の表面粗さＲａとして、４μｍ、９μｍ、１５μｍ、３０μｍ程度のものを用いることができる。 On the other hand, if the surface roughness Ra exceeds 100 μm, it is difficult to uniformly generate bubbles on the PTFE surface. Therefore, in order to increase the illuminance distribution in the flow path by utilizing the bubbles, it is preferable that the arithmetic average roughness Ra of the inner wall surface 18 is 4 μm or more and 100 μm or less. For example, as the surface roughness Ra of the inner wall surface 18, those having about 4 μm, 9 μm, 15 μm, and 30 μm can be used.

図２は、流路内の径方向の照度分布を模式的に示すグラフである。グラフＡは、実施例に係る照度分布を示し、流路内壁面に算術平均粗さＲａが４μｍのＰＴＦＥを用いている。グラフＢは、比較例に係る照度分布を示し、流路内壁面に算術平均粗さＲａが１．８μｍのＰＴＦＥを用いている。実施例と比較例のいずれも、内直径が４０ｍｍのＰＴＦＥ管の内部に純水を満たした状態で、光源から１５０ｍｍ離れた位置で照度分布を計測した。実施例および比較例において、光源の出力は同じである。図２では、比較例に係るグラフＢの光強度の最大値を１として規格化している。 FIG. 2 is a graph schematically showing the radial illuminance distribution in the flow path. Graph A shows the illuminance distribution according to the example, and uses PTFE having an arithmetic mean roughness Ra of 4 μm on the inner wall surface of the flow path. Graph B shows the illuminance distribution according to the comparative example, and uses PTFE having an arithmetic mean roughness Ra of 1.8 μm on the inner wall surface of the flow path. In both the examples and the comparative examples, the illuminance distribution was measured at a position 150 mm away from the light source in a state where the inside of the PTFE tube having an inner diameter of 40 mm was filled with pure water. In the examples and comparative examples, the output of the light source is the same. In FIG. 2, the maximum value of the light intensity of the graph B according to the comparative example is standardized as 1.

グラフより、実施例に係る光強度は、流路内の径方向の全体にわたって比較例よりも高いことがわかる。特に、光強度が最大となる中心位置において、実施例の光強度は、比較例よりも６０％以上高い。このことから、流路内壁面の表面粗さＲａを４μｍとすることにより、表面粗さＲａが１．８μｍとする場合よりも流路内の光強度を高くでき、光源からの紫外光をより遠くまで効率的に伝搬させることができる。流体に作用する紫外光量は、紫外光の照度（Ｗ／ｃｍ２）と紫外光の照射時間（ｓ）の積である積算照度（Ｊ／ｃｍ２）により決まるため、より高強度の紫外光をより遠くまで伝搬させることで、流体に作用する積算照度を高めることができる。 From the graph, it can be seen that the light intensity according to the example is higher than that of the comparative example over the entire radial direction in the flow path. In particular, at the central position where the light intensity is maximum, the light intensity of the examples is 60% or more higher than that of the comparative examples. From this, by setting the surface roughness Ra of the inner wall surface of the flow path to 4 μm, the light intensity in the flow path can be increased as compared with the case where the surface roughness Ra is set to 1.8 μm, and the ultraviolet light from the light source can be increased. It can be efficiently propagated to a long distance. Since the amount of ultraviolet light acting on the fluid is determined by the integrated illuminance (J / cm 2 ), which is the product of the illuminance of the ultraviolet light (W / cm 2 ) and the irradiation time (s) of the ultraviolet light, higher intensity ultraviolet light can be obtained. By propagating farther, the integrated illuminance acting on the fluid can be increased.

図３は、実施の形態に係る浄化装置７０の構成を模式的に示す図であり、上述の照射装置１０の応用例を示す。浄化装置７０は、照射装置１０と、処理装置６０とを備える。浄化装置７０は、二段階の浄化処理をするための浄化システムであり、処理装置６０にて前処理がなされた後、照射装置１０にて後処理がなされる。 FIG. 3 is a diagram schematically showing the configuration of the purification device 70 according to the embodiment, and shows an application example of the above-mentioned irradiation device 10. The purification device 70 includes an irradiation device 10 and a processing device 60. The purification device 70 is a purification system for performing a two-step purification treatment, and after the pretreatment is performed by the treatment device 60, the post-treatment is performed by the irradiation device 10.

処理装置６０は、処理槽６２と、曝気装置６４とを有する。処理装置６０は、微生物を利用して浄化処理をするための装置である。処理槽６２の内部には、好気性微生物が付着する接触材が設けられる。曝気装置６４は、処理槽６２の内部の流体に空気を供給し、好気性微生物の働きにより流入路７１から供給される流体が浄化されるようにする。処理槽６２にて処理された流体は、固形物が除去された後、接続路７２を通じて照射装置１０に供給される。 The processing device 60 includes a processing tank 62 and an aeration device 64. The treatment device 60 is a device for purifying treatment using microorganisms. A contact material to which aerobic microorganisms adhere is provided inside the treatment tank 62. The aeration device 64 supplies air to the fluid inside the treatment tank 62 so that the fluid supplied from the inflow path 71 is purified by the action of aerobic microorganisms. The fluid treated in the treatment tank 62 is supplied to the irradiation device 10 through the connecting path 72 after the solid matter is removed.

照射装置１０は、処理装置６０から接続路７２を通じて供給される流体に紫外光を照射して浄化処理をし、処理後の流体を流出路７３から排出する。処理装置６０では曝気装置６４を通じて空気が供給されるため、接続路７２を通じて供給される流体は、溶存空気量が比較的高く、気泡が生じやすい。照射装置１０では、流路内壁面の表面粗さＲａが４μｍ以上に設定されているため、流路内壁面に好適に気泡を付着させることができる。その結果、照射装置１０において高効率に紫外光を照射することができ、浄化装置７０の処理能力を向上させることができる。 The irradiation device 10 irradiates the fluid supplied from the processing device 60 through the connecting path 72 with ultraviolet light to purify the fluid, and discharges the treated fluid from the outflow path 73. Since air is supplied through the aeration device 64 in the processing device 60, the fluid supplied through the connecting path 72 has a relatively high amount of dissolved air, and bubbles are likely to be generated. In the irradiation device 10, since the surface roughness Ra of the inner wall surface of the flow path is set to 4 μm or more, air bubbles can be suitably attached to the inner wall surface of the flow path. As a result, the irradiation device 10 can irradiate ultraviolet light with high efficiency, and the processing capacity of the purification device 70 can be improved.

以上、本発明を実施の形態にもとづいて説明した。本発明は上記実施の形態に限定されず、種々の設計変更が可能であり、様々な変形例が可能であること、またそうした変形例も本発明の範囲にあることは、当業者に理解されるところである。 The present invention has been described above based on the embodiments. It is understood by those skilled in the art that the present invention is not limited to the above-described embodiment, various design changes are possible, various modifications are possible, and such modifications are also within the scope of the present invention. It is about to be.

上述の実施の形態では、直管形状の流路構造を用いる場合を示したが、流路構造の形状は特に限定されない。変形例においては、流路全体が直線状に構成されるのではなく、流路の少なくとも一部に屈曲部が設けられてもよい。また、流路の断面形状は円形であってもよいし、多角形であってもよい。 In the above-described embodiment, the case where a straight pipe-shaped flow path structure is used is shown, but the shape of the flow path structure is not particularly limited. In the modified example, the entire flow path is not formed in a straight line, but a bent portion may be provided in at least a part of the flow path. Further, the cross-sectional shape of the flow path may be circular or polygonal.

上述の実施の形態では、流路内壁面の全体にフッ素系樹脂材料を用いる場合を示した。変形例においては、流路内壁面の一部にフッ素系樹脂材料が用いられてもよい。流路の配壁面の一部に用いられるフッ素系樹脂材料について表面粗さＲａを４μｍ以上１００μｍ以下にすることにより、フッ素系樹脂表面に均一に気泡を付着させ、流路内を伝搬する紫外光の強度を高めることができる。 In the above-described embodiment, a case where a fluororesin material is used for the entire inner wall surface of the flow path is shown. In the modified example, a fluorine-based resin material may be used for a part of the inner wall surface of the flow path. By setting the surface roughness Ra of the fluorine-based resin material used for a part of the wall surface of the flow path to 4 μm or more and 100 μm or less, bubbles are uniformly attached to the surface of the fluorine-based resin, and ultraviolet light propagating in the flow path. Can increase the strength of.

上述の実施の形態では、光源１４として紫外光ＬＥＤを用いる場合を示した。変形例においては、紫外線ランプを光源として用いてもよく、中心波長またはピーク波長が２５０ｎｍ〜２６０ｎｍ、例えば２５４ｎｍの紫外線ランプを用いてもよい。 In the above-described embodiment, a case where an ultraviolet LED is used as the light source 14 is shown. In the modified example, an ultraviolet lamp may be used as a light source, or an ultraviolet lamp having a center wavelength or a peak wavelength of 250 nm to 260 nm, for example, 254 nm may be used.

１０…照射装置、１２…流路構造、１４…光源、１８…内壁面、２０…直管。 10 ... Irradiation device, 12 ... Channel structure, 14 ... Light source, 18 ... Inner wall surface, 20 ... Straight tube.

Claims (4)

算術平均粗さが４μｍ以上１００μｍ以下のフッ素系樹脂材料で流路内壁面の少なくとも一部が構成される流路構造と、
前記流路構造の内部に向けて紫外光を照射する光源と、を備えることを特徴とする照射装置。 A flow path structure in which at least a part of the inner wall surface of the flow path is made of a fluororesin material having an arithmetic mean roughness of 4 μm or more and 100 μm or less.
An irradiation device including a light source that irradiates ultraviolet light toward the inside of the flow path structure. 前記フッ素系樹脂材料は、ポリテトラフルオロエチレン（ＰＴＦＥ）であることを特徴とする請求項１に記載の照射装置。 The irradiation device according to claim 1, wherein the fluororesin material is polytetrafluoroethylene (PTFE). 前記流路構造は、前記フッ素系樹脂材料で構成される直管を含み、
前記光源は、前記直管の内部に向けて前記直管の軸方向に紫外光を照射するよう配置されることを特徴とする請求項１または２に記載の照射装置。 The flow path structure includes a straight pipe made of the fluororesin material.
The irradiation device according to claim 1 or 2, wherein the light source is arranged so as to irradiate ultraviolet light in the axial direction of the straight tube toward the inside of the straight tube. 前記光源は、波長が２５０ｎｍ〜３００ｎｍの紫外光を出力することを特徴とする請求項１から３のいずれか一項に記載の照射装置。 The irradiation device according to any one of claims 1 to 3, wherein the light source outputs ultraviolet light having a wavelength of 250 nm to 300 nm.
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