JP6744304B2 - ナノピラー・アレイを使用してエンティティを分別する方法 - Google Patents
ナノピラー・アレイを使用してエンティティを分別する方法 Download PDFInfo
- Publication number
- JP6744304B2 JP6744304B2 JP2017526888A JP2017526888A JP6744304B2 JP 6744304 B2 JP6744304 B2 JP 6744304B2 JP 2017526888 A JP2017526888 A JP 2017526888A JP 2017526888 A JP2017526888 A JP 2017526888A JP 6744304 B2 JP6744304 B2 JP 6744304B2
- Authority
- JP
- Japan
- Prior art keywords
- array
- population
- gap
- nanopillar
- chemical modification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002061 nanopillar Substances 0.000 title claims description 181
- 238000003491 array Methods 0.000 title description 19
- 238000000034 method Methods 0.000 claims description 87
- 239000010410 layer Substances 0.000 claims description 67
- 238000007385 chemical modification Methods 0.000 claims description 59
- 239000002356 single layer Substances 0.000 claims description 40
- 239000012530 fluid Substances 0.000 claims description 35
- 239000003446 ligand Substances 0.000 claims description 32
- 102000004169 proteins and genes Human genes 0.000 claims description 25
- 108090000623 proteins and genes Proteins 0.000 claims description 25
- 238000005194 fractionation Methods 0.000 claims description 20
- 210000001808 exosome Anatomy 0.000 claims description 19
- 238000000926 separation method Methods 0.000 claims description 11
- 241000700605 Viruses Species 0.000 claims description 5
- 239000000090 biomarker Substances 0.000 claims description 5
- 238000003018 immunoassay Methods 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 123
- 230000008569 process Effects 0.000 description 41
- 235000012431 wafers Nutrition 0.000 description 32
- 239000000758 substrate Substances 0.000 description 27
- 239000011324 bead Substances 0.000 description 24
- 238000001020 plasma etching Methods 0.000 description 23
- 230000003647 oxidation Effects 0.000 description 18
- 238000007254 oxidation reaction Methods 0.000 description 18
- 239000000243 solution Substances 0.000 description 18
- 230000008859 change Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 108020004414 DNA Proteins 0.000 description 13
- 102000053602 DNA Human genes 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000005530 etching Methods 0.000 description 13
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000001000 micrograph Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 230000003993 interaction Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000000059 patterning Methods 0.000 description 10
- 229920002477 rna polymer Polymers 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 7
- 238000001502 gel electrophoresis Methods 0.000 description 7
- 239000002202 Polyethylene glycol Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 239000002105 nanoparticle Substances 0.000 description 6
- 229920001223 polyethylene glycol Polymers 0.000 description 6
- 238000004626 scanning electron microscopy Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000000609 electron-beam lithography Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000000499 gel Substances 0.000 description 5
- 238000001459 lithography Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000012620 biological material Substances 0.000 description 4
- 210000004027 cell Anatomy 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 125000005647 linker group Chemical group 0.000 description 4
- 238000001127 nanoimprint lithography Methods 0.000 description 4
- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000005046 Chlorosilane Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000006664 bond formation reaction Methods 0.000 description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 238000004255 ion exchange chromatography Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- -1 siloxane chains Chemical group 0.000 description 3
- 238000005549 size reduction Methods 0.000 description 3
- 150000003573 thiols Chemical class 0.000 description 3
- 238000007704 wet chemistry method Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 102000007474 Multiprotein Complexes Human genes 0.000 description 2
- 108010085220 Multiprotein Complexes Proteins 0.000 description 2
- 108091093037 Peptide nucleic acid Proteins 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 239000007853 buffer solution Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000035876 healing Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 102000039446 nucleic acids Human genes 0.000 description 2
- 108020004707 nucleic acids Proteins 0.000 description 2
- 150000007523 nucleic acids Chemical class 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000010186 staining Methods 0.000 description 2
- UTAYJAPVYHZXDU-BUWQGBSHSA-N (3R,8S,9S,10R,13R,14S,17R)-10,13-dimethyl-17-[(2R)-6-methylheptan-2-yl]-3-(8-silyloctoxy)-1,2,4,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-3-ol Chemical compound [SiH3]CCCCCCCCO[C@]1(CC2=CC[C@H]3[C@@H]4CC[C@@H]([C@]4(CC[C@@H]3[C@]2(CC1)C)C)[C@H](C)CCCC(C)C)O UTAYJAPVYHZXDU-BUWQGBSHSA-N 0.000 description 1
- OHJMURWWRISZLI-UHFFFAOYSA-N 6-pyren-2-yloctylsilane Chemical compound C1=C(C=C2C=CC3=CC=CC4=CC=C1C2=C34)C(CCCCC[SiH3])CC OHJMURWWRISZLI-UHFFFAOYSA-N 0.000 description 1
- 229920000936 Agarose Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- 238000012357 Gap analysis Methods 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910003849 O-Si Inorganic materials 0.000 description 1
- 229910003872 O—Si Inorganic materials 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008827 biological function Effects 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010839 body fluid Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 231100000315 carcinogenic Toxicity 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000005754 cellular signaling Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- QABCGOSYZHCPGN-UHFFFAOYSA-N chloro(dimethyl)silicon Chemical compound C[Si](C)Cl QABCGOSYZHCPGN-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000000276 deep-ultraviolet lithography Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000007877 drug screening Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- ZMMJGEGLRURXTF-UHFFFAOYSA-N ethidium bromide Chemical compound [Br-].C12=CC(N)=CC=C2C2=CC=C(N)C=C2[N+](CC)=C1C1=CC=CC=C1 ZMMJGEGLRURXTF-UHFFFAOYSA-N 0.000 description 1
- 229960005542 ethidium bromide Drugs 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000008241 heterogeneous mixture Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000000025 interference lithography Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 239000002102 nanobead Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 229920001542 oligosaccharide Polymers 0.000 description 1
- 150000002482 oligosaccharides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 239000011860 particles by size Substances 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 102000004196 processed proteins & peptides Human genes 0.000 description 1
- 108090000765 processed proteins & peptides Proteins 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
- 150000004819 silanols Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000006884 silylation reaction Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- HMFIMGLEOXRSEB-UHFFFAOYSA-N trichloro(octadecan-9-yl)silane Chemical compound CCCCCCCCCC([Si](Cl)(Cl)Cl)CCCCCCCC HMFIMGLEOXRSEB-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502753—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B1/00—Sieving, screening, sifting, or sorting solid materials using networks, gratings, grids, or the like
- B07B1/46—Constructional details of screens in general; Cleaning or heating of screens
- B07B1/4609—Constructional details of screens in general; Cleaning or heating of screens constructional details of screening surfaces or meshes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
- B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G01N15/01—
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N2015/0288—Sorting the particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Hematology (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Molecular Biology (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
- Micromachines (AREA)
- Peptides Or Proteins (AREA)
Description
Claims (14)
- 分別の方法であって、
第1の集団および第2の集団を含むエンティティをナノピラー・アレイに導入することであって、前記ナノピラー・アレイが、前記第1の集団および第2の集団の一方を他方から分離するギャップを有するように配置されたナノピラーを含み、前記ナノピラーが、あるアレイ角を流体流方向に対して有するように整列されている、導入することと、
前記エンティティの前記第1の集団が第1の方向に出力され、前記エンティティの前記第2の集団が前記第1の方向とは異なる第2の方向に出力されるように、前記エンティティを、分別されることに基づいて受けることと、を含み、
前記ギャップのギャップ・サイズが、前記第1の集団を前記第1の方向に、また前記第2の集団を前記第2の方向に分別するように調整され、前記ギャップ・サイズが、前記ナノピラー・アレイの前記ナノピラーに配置された酸化物層の厚さにより調整され、
前記ナノピラーの上部および底部よりも細い中心部が、前記ナノピラーに配置された前記酸化物層で埋められていて、前記ギャップの前記ギャップ・サイズが、前記上部から前記底部まで均一である、
方法。 - 前記ナノピラーが化学修飾を有し、前記ギャップ・サイズが、前記化学修飾によって調整される、請求項1に記載の方法。
- 前記ギャップ・サイズが前記酸化物層によって調整される場合、前記酸化物層が前記ギャップ・サイズを第1の寸法にまで低減する、請求項2に記載の方法。
- 前記ギャップ・サイズが前記化学修飾によって調整される場合、前記化学修飾により前記ギャップ・サイズを第2の寸法にまでさらに低減し、
前記第2の寸法が前記第1の寸法よりも小さい、請求項3に記載の方法。 - 前記第1の寸法が、前記ギャップ・サイズを20ナノメートルにまで低減する前記酸化物層に対応するとともに、前記ギャップは均一のままである、請求項3に記載の方法。
- 前記第2の寸法が、前記ギャップ・サイズを20ナノメートル未満にまで低減する前記化学修飾に対応する、請求項4に記載の方法。
- 前記ギャップ・サイズが前記化学修飾によって調整される場合、前記化学修飾により前記ギャップ・サイズを第1の寸法にまで低減する、請求項2に記載の方法。
- 前記化学修飾により単分子層を前記ナノピラー上に、前記第1の集団が前記単分子層に対する親和性を持ち、前記第2の集団が前記単分子層に対する親和性を持たないように形成し、
前記単分子層に対する前記親和性を持つことにより、前記エンティティの前記第1の集団を前記第1の方向に出力されるように導く、請求項7に記載の方法。 - 前記エンティティに、生物マーカ、生物分子、細胞以下構成要素、エキソソーム、ウイルス、イムノアッセイ、およびタンパク質凝集物のうちの少なくとも1つが含まれる、請求項1または2に記載の方法。
- 分別の方法であって、
第1の集団および第2の集団を含むエンティティをナノピラー・アレイに導入することであって、前記ナノピラー・アレイが、あるアレイ角を流体流方向に対して有するように整列配置されたナノピラーを含み、前記ナノピラーが化学修飾を有する、導入することと、
分別後に前記エンティティを受けることであって、前記エンティティの前記第1の集団が、前記第1の集団が前記化学修飾に対する親和性を持つことに基づいて第1の方向に出力され、前記エンティティの前記第2の集団が前記第1の方向とは異なる第2の方向に出力される、受けることと、
を含み、
前記ナノピラーの上部および底部よりも細い中心部が、前記ナノピラーに配置された酸化物層で埋められていて、前記ナノピラー間のギャップのギャップ・サイズが、前記上部から前記底部まで均一である、
方法。 - 前記化学修飾が、前記ナノピラーに付着したリガンドであり、前記リガンドが、前記ナノピラーに付着する結合基、いくつかのスペーサ分子からなる骨格、前記エンティティと相互作用する末端基を含む、請求項10に記載の方法。
- 前記第2の集団が前記化学修飾に対する前記親和性を持たない、請求項10または11に記載の方法。
- 前記化学修飾に対する前記親和性を前記第2の集団が持たないことによって、前記第2の集団が前記第2の方向に出力される、請求項12に記載の方法。
- 前記エンティティに、生物マーカ、生物分子、細胞以下構成要素、エキソソーム、ウイルス、イムノアッセイ、およびタンパク質凝集物のうちの少なくとも1つが含まれる、請求項10または11に記載の方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462084647P | 2014-11-26 | 2014-11-26 | |
US62/084,647 | 2014-11-26 | ||
US14/697,072 | 2015-04-27 | ||
US14/697,072 US10058895B2 (en) | 2014-11-26 | 2015-04-27 | Continuous flow, size-based separation of entities down to the nanometer scale using nanopillar arrays |
US14/749,309 US9975147B2 (en) | 2014-11-26 | 2015-06-24 | Continuous flow, size-based separation of entities down to the nanometer scale using nanopillar arrays |
US14/749,309 | 2015-06-24 | ||
PCT/IB2015/059033 WO2016083975A1 (en) | 2014-11-26 | 2015-11-23 | Continuous flow, size-based separation of entities down to the nanometer scale using nanopillar arrays |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017536824A JP2017536824A (ja) | 2017-12-14 |
JP6744304B2 true JP6744304B2 (ja) | 2020-08-19 |
Family
ID=56009280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017526888A Active JP6744304B2 (ja) | 2014-11-26 | 2015-11-23 | ナノピラー・アレイを使用してエンティティを分別する方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US10058895B2 (ja) |
JP (1) | JP6744304B2 (ja) |
CN (1) | CN107075435B (ja) |
DE (1) | DE112015005304B4 (ja) |
GB (1) | GB2549627B (ja) |
WO (1) | WO2016083975A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11009464B2 (en) * | 2015-12-11 | 2021-05-18 | International Business Machines Corporation | Smartphone compatible on-chip biodetection using integrated optical component and microfluidic channel with nanopillar array |
US9559240B1 (en) * | 2015-12-17 | 2017-01-31 | International Business Machines Corporation | Nano-pillar-based biosensing device |
US10386276B2 (en) | 2016-09-20 | 2019-08-20 | International Business Machines Corporation | Phosphoprotein detection using a chip-based pillar array |
US10253350B2 (en) | 2016-09-20 | 2019-04-09 | International Business Machines Corporation | Separation of molecules using nanopillar arrays |
US10010883B2 (en) | 2016-09-20 | 2018-07-03 | International Business Machines Corporation | Deterministic lateral displacement arrays |
US10471425B2 (en) * | 2017-02-16 | 2019-11-12 | International Business Machines Corporation | Automated machine for sorting of biological fluids |
US11161281B2 (en) | 2017-12-22 | 2021-11-02 | International Business Machines Corporation | Structure and method for monitoring directed self-assembly pattern formation |
US10830724B2 (en) | 2017-12-22 | 2020-11-10 | International Business Machines Corporation | Micro-capacitance sensor array containing spaced apart first and second overlapping and parallel electrode plates for sensing analytes |
US10946380B2 (en) * | 2018-01-19 | 2021-03-16 | International Business Machines Corporation | Microfluidic chips for particle purification and fractionation |
US11458474B2 (en) | 2018-01-19 | 2022-10-04 | International Business Machines Corporation | Microfluidic chips with one or more vias |
US20190226953A1 (en) | 2018-01-19 | 2019-07-25 | International Business Machines Corporation | Microscale and mesoscale condenser devices |
US11185861B2 (en) | 2018-06-13 | 2021-11-30 | International Business Machines Corporation | Multistage deterministic lateral displacement device for particle separation |
KR102083845B1 (ko) * | 2018-07-31 | 2020-03-03 | 광주과학기술원 | 혈액 진단 소자 |
US11192101B2 (en) | 2018-08-28 | 2021-12-07 | International Business Machines Corporation | Method to create multilayer microfluidic chips using spin-on carbon as gap filling materials |
US11084032B2 (en) | 2018-08-28 | 2021-08-10 | International Business Machines Corporation | Method to create multilayer microfluidic chips using spin-on carbon as gap fill and spin-on glass tone inversion |
KR102401909B1 (ko) * | 2018-08-30 | 2022-05-24 | 주식회사 엘지화학 | 반응 최적화를 위한 고속 스크리닝 분석 시스템 |
US11033901B2 (en) | 2018-10-23 | 2021-06-15 | International Business Machines Corporation | Biomarker detection using integrated purification-detection devices |
US10685906B2 (en) * | 2018-11-13 | 2020-06-16 | International Business Machines Corporation | Electrically conductive deterministic lateral displacement array in a semiconductor device |
CN112044479A (zh) * | 2019-06-05 | 2020-12-08 | 曦医生技股份有限公司 | 微流道装置 |
KR20220019824A (ko) * | 2019-06-18 | 2022-02-17 | 어플라이드 머티어리얼스, 인코포레이티드 | 편평한 광 디바이스들을 위한 공극 캡슐화된 유전체 나노기둥들 |
US11255769B2 (en) * | 2019-08-01 | 2022-02-22 | International Business Machines Corporation | Up-concentration and size sorting of nanoparticles in microfluidic devices |
US11266989B2 (en) | 2019-08-07 | 2022-03-08 | International Business Machines Corporation | Immunodetection and separation on nanoDLD |
US11565262B2 (en) | 2020-03-10 | 2023-01-31 | International Business Machines Corporation | Continous band-pass filter size separation using a negative angle DLD array |
CN114433485B (zh) * | 2022-04-11 | 2022-07-12 | 天津美腾科技股份有限公司 | 风力分选的控制方法及系统 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US583715A (en) | 1897-06-01 | Burial rough box | ||
WO2002065515A2 (en) * | 2001-02-14 | 2002-08-22 | Science & Technology Corporation @ Unm | Nanostructured devices for separation and analysis |
US7014747B2 (en) | 2001-06-20 | 2006-03-21 | Sandia Corporation | Dielectrophoretic systems without embedded electrodes |
CA2396408C (en) * | 2001-08-03 | 2006-03-28 | Nec Corporation | Fractionating apparatus having colonies of pillars arranged in migration passage at interval and process for fabricating pillars |
US7115305B2 (en) | 2002-02-01 | 2006-10-03 | California Institute Of Technology | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials |
CA2482566C (en) | 2002-04-16 | 2010-07-20 | Princeton University | Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof |
EP1585583B1 (en) | 2002-10-23 | 2010-04-07 | The Trustees of Princeton University | Method for continuous particle separation using obstacle arrays asymmetrically aligned to fields |
JP2006087372A (ja) | 2004-09-24 | 2006-04-06 | Fuji Photo Film Co Ltd | 核酸の分離精製方法を行うためのマイクロデバイス |
US20070090026A1 (en) * | 2005-10-06 | 2007-04-26 | Jongyoon Han | Continuous biomolecule separation in a nanofilter |
US8137912B2 (en) * | 2006-06-14 | 2012-03-20 | The General Hospital Corporation | Methods for the diagnosis of fetal abnormalities |
WO2010006174A2 (en) * | 2008-07-10 | 2010-01-14 | Reichenbach Steven H | Method and apparatus for sorting particles using asymmetrical particle shifting |
WO2010011934A2 (en) | 2008-07-24 | 2010-01-28 | The Trustees Of Princeton University | Bump array device having asymmetric gaps for segregation of particles |
WO2010124155A1 (en) | 2009-04-23 | 2010-10-28 | Logos Energy, Inc. | Lateral displacement array for microfiltration |
CA2844056A1 (en) | 2011-08-04 | 2013-02-07 | Sage Science, Inc. | Systems and methods for processing fluids |
JP6388605B2 (ja) * | 2013-02-08 | 2018-09-12 | コーネル ユニバーシティー | 生体分子処理プラットフォーム及びその使用 |
CN105264127B (zh) * | 2013-03-15 | 2019-04-09 | Gpb科学有限责任公司 | 颗粒的片上微流体处理 |
US10324011B2 (en) * | 2013-03-15 | 2019-06-18 | The Trustees Of Princeton University | Methods and devices for high throughput purification |
US20160250637A1 (en) | 2013-10-25 | 2016-09-01 | Monash University | Virtual deterministic lateral displacement for particle separation using surface acoustic waves |
-
2015
- 2015-04-27 US US14/697,072 patent/US10058895B2/en active Active
- 2015-06-24 US US14/749,309 patent/US9975147B2/en active Active
- 2015-11-23 CN CN201580060721.4A patent/CN107075435B/zh active Active
- 2015-11-23 DE DE112015005304.2T patent/DE112015005304B4/de active Active
- 2015-11-23 JP JP2017526888A patent/JP6744304B2/ja active Active
- 2015-11-23 GB GB1708235.5A patent/GB2549627B/en active Active
- 2015-11-23 WO PCT/IB2015/059033 patent/WO2016083975A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
CN107075435B (zh) | 2020-06-12 |
GB201708235D0 (en) | 2017-07-05 |
US20160144405A1 (en) | 2016-05-26 |
JP2017536824A (ja) | 2017-12-14 |
DE112015005304B4 (de) | 2022-02-24 |
US10058895B2 (en) | 2018-08-28 |
US20160144406A1 (en) | 2016-05-26 |
GB2549627B (en) | 2021-10-13 |
DE112015005304T5 (de) | 2017-08-24 |
US9975147B2 (en) | 2018-05-22 |
CN107075435A (zh) | 2017-08-18 |
GB2549627A (en) | 2017-10-25 |
WO2016083975A1 (en) | 2016-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6744304B2 (ja) | ナノピラー・アレイを使用してエンティティを分別する方法 | |
US10393642B2 (en) | Pillar array structure with uniform and high aspect ratio nanometer gaps | |
US9835539B2 (en) | Biopolymer separation using nanostructured arrays | |
US11292713B2 (en) | Integrated analysis device analysis techniques | |
US10781475B2 (en) | Separation of molecules using nanopillar arrays | |
JP3603886B2 (ja) | 分離装置およびその製造方法 | |
US20070289943A1 (en) | Block copolymer mask for defining nanometer-scale structures | |
US10247700B2 (en) | Embedded noble metal electrodes in microfluidics | |
US7150812B2 (en) | Method for continuous particle separation using obstacle arrays asymmetrically aligned to fields | |
US20060065528A1 (en) | Nanostructured devices for separation and analysis | |
US20020125192A1 (en) | Nanostructured devices for separation and analysis | |
EP2048497B1 (en) | Column for chromatography and method for producing the same | |
US11648557B2 (en) | Metal assisted chemical etching for fabricating high aspect ratio and straight silicon nanopillar arrays for sorting applications | |
US9914118B2 (en) | Nanogap structure for micro/nanofluidic systems formed by sacrificial sidewalls | |
JP4661125B2 (ja) | 成分分離素子およびその製造方法 | |
KAJI et al. | Nanopillars and Nanoballs for DNA Analysis | |
Andagana Junta | Nanofabrication of Optofluidic Photonic Crystal Resonators for Biosensing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180725 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190806 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191106 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200414 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200707 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200721 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200730 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6744304 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |