JP6728732B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

The present invention relates to a technique of ejecting a liquid such as ink.

A liquid ejecting head that ejects liquid such as ink filled in a pressure chamber from a nozzle has been conventionally proposed. For example, in Patent Document 1, a liquid is supplied to a pressure chamber from a common liquid chamber in which a liquid chamber empty space formed in a communication substrate and a liquid chamber formation empty space of a unit case fixed to the communication substrate communicate with each other. A structure is disclosed.

JP, 2013-129191, A

To reduce the size of the liquid jet head, it is required to reduce the wall thickness of the unit case. However, there is a problem that it becomes difficult to secure the mechanical strength of the liquid jet head due to the reduction of the wall thickness. In consideration of the above circumstances, it is an object of the present invention to improve the mechanical strength of an element forming a space filled with a liquid.

In order to solve the above problems, a liquid ejecting head according to the present invention includes a pressure chamber substrate in which a pressure chamber space is formed, a first surface on which the pressure chamber substrate is installed, and a second surface opposite to the first surface. A flow path substrate including a surface, a first space, a supply hole that communicates the first space with the pressure chamber space, and a communication hole that communicates with the pressure chamber space; and a second surface of the flow path substrate. A nozzle plate having a nozzle formed therein and communicating with the communication hole; and a casing unit having a second space formed on the first surface of the flow path substrate and communicating with the first space of the flow path substrate. A flexible compliance portion that is installed on the second surface of the flow path substrate and seals the communication hole and the first space; and a first beam-shaped portion that extends between the inner wall surfaces of the second space in the housing portion. To do. With the above configuration, since the first beam-shaped portion is installed in the housing portion, it is possible to improve the mechanical strength of the housing portion as compared with the configuration in which the first beam-shaped portion is not installed.

In a preferred aspect of the present invention, the first beam-shaped portion is installed at a position separated from the first surface. In the above aspect, the possibility that the adhesive adheres to the first beam-shaped portion is reduced in the step of applying the adhesive to the joint surface that is joined to the first surface of the housing portion. Therefore, there is an advantage that it is possible to reduce the possibility that the adhesive that has adhered to the first beam-shaped portion and is hardened may impede the flow of the ink in the second space.

A liquid jet head according to a preferred aspect of the present invention includes a second beam-shaped portion extending between inner wall surfaces of the first space in the flow path substrate. In the above aspect, since the second beam-shaped portion is installed on the flow path substrate in addition to the first beam-shaped portion of the casing, the above-described effect that the mechanical strength of the liquid ejecting head is improved is exceptional. It is remarkable.

In a preferred aspect of the present invention, the housing portion includes a side surface portion that projects from the second surface along the peripheral edge of the flow channel substrate, and a top surface portion that is located on the opposite side of the flow channel substrate with the second space interposed therebetween. , An inlet formed in the top surface portion and communicating with the second space, and forming a flow path from the inlet to the side surface side. In the above aspect, since the flow path extending from the inlet to the side surface is formed inside the housing, there is an advantage that the capacity of the second space can be sufficiently secured.

A liquid ejecting apparatus according to a preferred aspect of the present invention includes the liquid ejecting head according to each aspect described above. A good example of the liquid ejecting apparatus is a printing apparatus that ejects ink, but the application of the liquid ejecting apparatus according to the present invention is not limited to printing.

FIG. 1 is a configuration diagram of a printing apparatus according to a first embodiment. FIG. 3 is an exploded perspective view of a liquid jet head. FIG. 3 is a sectional view of the liquid ejecting head (a sectional view taken along line III-III in FIG. 2 ). It is a top view of a channel substrate. It is a top view of a housing part. FIG. 6 is a cross-sectional view (cross-sectional view taken along the line VI-VI of FIG. 3) of the housing and the flow path substrate. It is explanatory drawing of the process of installing a housing|casing part on a flow path board. FIG. 6 is a cross-sectional view of a liquid jet head according to a second embodiment. FIG. 6 is a plan view of a liquid jet head according to a second embodiment. FIG. 11 is a sectional view of a liquid jet head according to a third embodiment. It is a block diagram of the liquid jet head which concerns on a modification.

<First Embodiment>
FIG. 1 is a partial configuration diagram of an inkjet type printing apparatus 10 according to a first embodiment of the present invention. The printing apparatus 10 according to the first embodiment is a preferable example of a liquid ejecting apparatus that ejects an ink, which is an example of a liquid, onto a medium (ejection target) 12 such as a printing sheet, and as illustrated in FIG. 22, a transport mechanism 24, a carriage 26, and a plurality of liquid ejecting heads 100. A liquid container (for example, a cartridge) 14 that stores ink is attached to the printing apparatus 10.

The control device 22 centrally controls each element of the printing device 10. The transport mechanism 24 transports the medium 12 in the X direction under the control of the controller 22. Each liquid ejecting head 100 ejects ink onto the medium 12 from a plurality of nozzles under the control of the controller 22. The plurality of liquid ejecting heads 100 are mounted on the carriage 26. The controller 22 causes the carriage 26 to reciprocate in the Y direction that intersects the X direction. A desired image is formed on the surface of the medium 12 by each of the liquid ejecting heads 100 ejecting ink onto the medium 12 in parallel with the conveyance of the medium 12 by the conveyance mechanism 24 and the repeated reciprocation of the carriage 26. The direction perpendicular to the XY plane (for example, the plane parallel to the surface of the medium 12) will be referred to as the Z direction below. The ink ejection direction (typically the vertical direction) of each liquid ejection head 100 corresponds to the Z direction.

2 is an exploded perspective view of any one liquid jet head 100, and FIG. 3 is a cross-sectional view taken along the line III-III in FIG. As illustrated in FIG. 2, the liquid jet head 100 includes a plurality of nozzles N arranged along the X direction. The plurality of nozzles N of the first embodiment are divided into a first row L1 and a second row L2. The position of the nozzle N in the X direction is different between the first row L1 and the second row L2. That is, the plurality of nozzles N are staggered (staggered). As can be understood from FIG. 2, in the liquid jet head 100 of the first embodiment, the elements related to the plurality of nozzles N in the first row L1 and the elements related to the plurality of nozzles N in the second row L2 are substantially linear. The structure is symmetrically arranged. Therefore, in the following description, the elements related to the nozzles N of the first row L1 will be focused on for convenience, and the description of the elements related to the nozzles N of the second row L2 will be appropriately omitted.

As illustrated in FIGS. 2 and 3, the liquid jet head 100 according to the first embodiment includes the flow path substrate 32. The flow path substrate 32 is a plate-shaped member including the first surface F1 and the second surface F2. The first surface F1 is the surface on the negative side in the Z direction, and the second surface F2 is the surface on the side opposite to the first surface F1 (the positive side in the Z direction). On the surface of the first surface F1 of the flow path substrate 32, the pressure chamber substrate 34, the vibrating portion 36, the plurality of piezoelectric elements 37, the protective member 38, and the housing portion 40 are installed, and on the surface of the second surface F2. A nozzle plate 52 and a compliance section 54 are installed in the. Each element of the liquid ejecting head 100 is a plate-shaped member that is elongated in the X direction, similar to the flow path substrate 32, and is joined to each other using, for example, an adhesive.

The nozzle plate 52 is a plate-shaped member on which a plurality of nozzles N are formed, and is installed on the second surface F2 of the flow path substrate 32 using, for example, an adhesive. Each nozzle N is a through hole through which ink passes. The nozzle plate 52 of the first embodiment is manufactured by processing a silicon (Si) single crystal substrate using a semiconductor manufacturing technique (for example, etching). However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the nozzle plate 52.

The flow path substrate 32 is a plate-shaped member for forming a flow path of ink. FIG. 4 is a plan view of the second surface F2 of the flow path substrate 32. As illustrated in FIGS. 2 to 4, a space R1 (an example of the first space), a plurality of supply holes 322, and a plurality of communication holes 324 are formed in the flow path substrate 32 of the first embodiment. The space R1 is an opening formed in a long shape along the X direction in plan view (that is, viewed from the Z direction), and the supply hole 322 and the communication hole 324 are through holes (that is, the first holes) formed for each nozzle N. It is an opening extending over the first surface F1 and the second surface F2). The plurality of supply holes 322 are arranged in the X direction, and the plurality of communication holes 324 are also arranged in the X direction. The array of the plurality of supply holes 322 is located between the array of the plurality of communication holes 324 and the space R1. Further, as illustrated in FIGS. 3 and 4, a plurality of branch passages 326 corresponding to different supply holes 322 are formed on the second surface F2 of the flow passage substrate 32. Each branch passage 326 is a groove-like passage extending along the Y direction so as to connect the space R1 and the supply hole 322. On the other hand, one arbitrary communication hole 324 overlaps with one nozzle N in a plan view. That is, the nozzle N communicates with the communication hole 324.

As illustrated in FIGS. 2 and 3, the pressure chamber substrate 34 is a plate-shaped member in which a plurality of pressure chamber spaces 342 are arranged along the X direction, and, for example, an adhesive is used to form the flow channel substrate 32. It is installed on the first surface F1. The pressure chamber space 342 is a long through hole that is formed for each nozzle N and extends along the Y direction in a plan view. As illustrated in FIG. 3, an end portion of the arbitrary one pressure chamber space 342 on the positive side in the Y direction overlaps one communication hole 324 of the flow path substrate 32 in a plan view. Therefore, the pressure chamber space 342 and the nozzle N communicate with each other through the communication hole 324.

On the other hand, the end of the pressure chamber space 342 on the negative side in the Y direction overlaps one supply hole 322 of the flow path substrate 32 in a plan view. As can be understood from the above description, the supply hole 322 of the first embodiment functions as a throttle flow passage that connects the space R1 and the pressure chamber space 342 with a predetermined flow passage resistance, so that the pressure chamber substrate 34 is throttled. It is not necessary to form a flow path. Therefore, in the pressure chamber substrate 34 of the first embodiment, a simple rectangular pressure chamber space 342, which maintains a predetermined flow channel width over the entire length in the Y direction, is formed. That is, the throttle channel whose channel area is partially narrowed is not formed in the pressure chamber substrate 34. Therefore, the size required for the pressure chamber substrate 34 is reduced as compared with the configuration in which the throttle channel is formed in the pressure chamber substrate 34, and thus the liquid jet head 100 can be downsized.

The flow path substrate 32 and the pressure chamber substrate 34 are manufactured by processing a silicon (Si) single crystal substrate using, for example, a semiconductor manufacturing technique, similarly to the nozzle plate 52 described above. However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the flow path substrate 32 and the pressure chamber substrate 34.

As illustrated in FIGS. 2 and 3, a vibrating section 36 is installed on the surface of the pressure chamber substrate 34 on the opposite side of the flow channel substrate 32. The vibrating portion 36 of the first embodiment is a plate-shaped member (vibrating plate) that can elastically vibrate. 2 and 3, the vibrating portion 36, which is separate from the pressure chamber substrate 34, is fixed to the pressure chamber substrate 34, but in the pressure chamber space 342 of the plate-shaped member having a predetermined plate thickness. By selectively removing a part of the corresponding region in the plate thickness direction, the pressure chamber substrate 34 and the vibrating portion 36 can be integrally formed.

As can be seen from FIG. 3, the first surface F1 of the flow path substrate 32 and the vibrating portion 36 face each other inside the pressure chamber spaces 342 of the pressure chamber substrate 34 with a space therebetween. A space located inside the pressure chamber space 342 between the first surface F1 of the flow path substrate 32 and the vibrating portion 36 functions as a pressure chamber SC for applying pressure to the ink filled in the space. The pressure chamber SC is individually formed for each nozzle N. As understood from the above description, the pressure chamber space 342 formed in the pressure chamber substrate 34 is a space to be the pressure chamber SC.

As illustrated in FIGS. 2 and 3, a plurality of piezoelectric elements 37 corresponding to different nozzles N are installed on the surface of the vibrating portion 36 opposite to the pressure chambers SC. The piezoelectric element 37 is a passive element that vibrates when a drive signal is supplied. The plurality of piezoelectric elements 37 are arranged in the X direction so as to correspond to each pressure chamber SC. The piezoelectric element 37 of the first embodiment is composed of a pair of electrodes facing each other and a piezoelectric layer laminated between the electrodes. The protective member 38 shown in FIGS. 2 and 3 is a structure for protecting the plurality of piezoelectric elements 37, and is fixed to the surface of the vibrating portion 36 with, for example, an adhesive. A plurality of piezoelectric elements 37 are housed inside the space (recess) formed in the surface of the protective member 38 facing the vibrating portion 36.

The housing 40 is a case for storing the ink supplied to the plurality of pressure chambers SC. The surface of the case portion 40 on the positive side in the Z direction (hereinafter referred to as the “joint surface”) is fixed to the first surface F1 of the flow path substrate 32 with an adhesive, for example. The casing 40 of the first embodiment is formed of a material different from that of the flow path substrate 32 and the pressure chamber substrate 34. For example, the housing 40 can be manufactured by injection molding a resin material. However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the housing unit 40.

As the material of the housing portion 40, for example, a synthetic fiber such as polyparaphenylenebenzobisoxazole (Zylon [registered trademark]/hereinafter referred to as “PBO fiber”) or a resin material such as a liquid crystal polymer can be preferably used. However, in consideration of various advantages described below, a liquid crystal polymer (LCP: Liquid Crystal Polymer) is preferable as a material of the casing 40 as compared with PBO fiber.
Since the liquid crystal polymer has a lower linear expansion coefficient than PBO fiber, thermal deformation of the housing 40 (particularly warpage with respect to the flow path substrate 32) is suppressed.
The liquid crystal polymer has a lower viscosity and higher fluidity than PBO fibers (the liquid crystal polymer can sufficiently spread to every corner of the injection molding die), so that the dimensional error of the casing 40 and the defective molding occur. Suppressed.
・Since the viscosity of liquid crystal polymer rises sharply during cooling compared to PBO fiber (solidification progresses rapidly), burrs are generated due to the material entering the gap of the mold during the solidification process. It is suppressed and the time required to form the casing 40 is shortened.
The liquid crystal polymer has a lower permeability to liquids (for example, water) and gases (for example, water vapor and oxygen) than PBO fibers, so that it is possible to prevent liquids or gases from entering the inside of the casing 40.
The PBO fiber tends to easily react with, for example, a solvent ink, while the liquid crystal polymer has a low reactivity with various kinds of ink including a solvent ink. Deterioration is suppressed.

FIG. 5 is a plan view of the housing unit 40 viewed from the flow path substrate 32 side (the positive side in the Z direction). As illustrated in FIGS. 3 and 5, the housing 40 of the first embodiment is a structure in which a space R2 (an example of the second space) is formed. The space R2 is a recess that is open on the side of the flow path substrate 32, and is formed in a shape elongated in the X direction. As illustrated in FIG. 3, the space R2 includes a first portion r1 and a second portion r2. The second portion r2 is a space on the flow path substrate 32 side (downstream side of the ink flow) as viewed from the first portion r1. An accommodation space 45 for accommodating the protection member 38 and the pressure chamber substrate 34 is formed between the space R2 corresponding to the first row L1 and the space R2 corresponding to the second row L2.

As illustrated in FIGS. 2 and 3, the housing portion 40 of the first embodiment includes a top surface portion 42 and a side surface portion 44. The side surface portion 44 is a portion fixed to the first surface F1 so as to project from the first surface F1 to the negative side in the Z direction along the peripheral edge of the flow path substrate 32. The bottom surface of the side surface portion 44 is bonded to the first surface F1 of the flow path substrate 32 as a bonding surface. As understood from FIG. 3, the outer wall surface of the side surface portion 44 (the surface opposite to the inner wall surface on the space R2 side) and the side end surface of the flow path substrate 32 are located substantially in the same plane (so-called flush). .. That is, the outer shape of the flow path substrate 32 and the outer shape of the housing section 40 viewed from the Z direction substantially match, and the outer shape of the housing section 40 does not project to the outside of the outer peripheral edge of the flow path substrate 32. Therefore, there is an advantage that the liquid jet head 100 can be downsized as compared with the configuration in which the casing 40 is larger than the flow path substrate 32.

The top surface portion 42 of the housing portion 40 is a portion located on the opposite side of the flow path substrate 32 with the space R2 interposed therebetween. The space surrounded by the side surface portion 44 and the top surface portion 42 corresponds to the space R2. As illustrated in FIGS. 2 and 3, the introduction port 43 is formed in the top surface portion 42 of the first embodiment. The introduction port 43 is a tubular portion that connects the space R2 of the housing 40 and the outside of the housing 40. As understood from FIG. 3, the introduction port 43 of the first embodiment is located on the side opposite to the side surface portion 44 (the positive side in the Y direction) across the second portion r2 of the space R2 in a plan view, It communicates with the first portion r1 of R2.

As illustrated in FIG. 3, the space R1 of the flow path substrate 32 and the space R2 of the housing portion 40 communicate with each other. The space composed of the space R1 and the space R2 functions as a liquid storage chamber (reservoir) SR. The liquid storage chamber SR is a common liquid chamber that extends over a plurality of nozzles N and stores the ink supplied from the liquid container 14 to the inlet 43. As described above, the introduction port 43 is located on the positive side in the Y direction with respect to the second portion r2. Therefore, the ink supplied from the liquid container 14 to the introduction port 43 flows to the side surface portion 44 side (the negative side in the Y direction) in the first portion r1 of the space R2, as shown by the dashed arrow in FIG. At the same time, it reaches the second portion r2 and flows to the positive side in the Z direction within the second portion r2. That is, a flow path from the introduction port 43 to the side surface portion 44 side is formed inside the housing portion 40. Then, the ink stored in the liquid storage chamber SR branches into a plurality of branch passages 326 and then passes through the supply hole 322 to be supplied and filled in parallel to the pressure chambers SC in accordance with the vibration of the vibrating section 36. Due to pressure fluctuation, the pressure chamber SC passes through the communication hole 324 and the nozzle N and is ejected to the outside. That is, the pressure chamber SC functions as a space for generating a pressure for ejecting ink from the nozzle N, and the liquid storage chamber SR stores a space (common liquid chamber) for storing the ink supplied to the plurality of pressure chambers SC. Function as.

As illustrated in FIGS. 2 and 3, the compliance portion 54 is installed on the second surface F2 of the flow path substrate 32. The compliance section 54 is a flexible film and functions as a vibration absorber that absorbs pressure fluctuations of the ink in the liquid storage chamber SR (space R1). As illustrated in FIG. 3, the compliance unit 54 is installed on the second surface F2 of the flow path substrate 32 so as to seal the space R1 of the flow path substrate 32, the plurality of branch paths 326, and the plurality of communication holes 324. This constitutes the bottom surface of the liquid storage chamber SR. That is, the pressure chamber SC faces the compliance portion 54 via the communication hole 324. In the example of FIG. 2, the space R1 corresponding to the first row L1 and the space R1 corresponding to the second row L2 are sealed by separate compliance sections 54, but one compliance section 54 is provided over both the spaces R1. It is also possible to continue.

On the other hand, as illustrated in FIGS. 2 and 3, an opening 422 is formed in the top surface portion 42 of the housing portion 40. Specifically, the openings 422 are formed on the positive side and the negative side in the X direction with the introduction port 43 interposed therebetween. The opening 422 is an opening that connects the space R2 of the housing 40 and the space outside the housing 40. As illustrated in FIG. 2, the compliance portion 46 is installed on the surface of the top surface portion 42. The compliance part 46 is a flexible film that functions as a vibration absorber that absorbs the pressure fluctuation of the ink in the liquid storage chamber SR (space R2), and is an outer wall surface of the top surface part 42 so as to seal the opening 422. Is installed in the liquid storage chamber SR to form the wall surface (specifically, the top surface). The compliance part 46 of the first embodiment is located on the upstream side of the compliance part 54 in the liquid storage chamber SR, and is arranged parallel to the first surface F1 of the flow path substrate 32 and the compliance part 54. In the example of FIG. 2, a separate compliance part 46 is provided for each opening 422, but a configuration in which one compliance part 46 is continuous over a plurality of openings 422 may also be adopted. As understood from the above description, in the first embodiment, the compliance section 54 and the compliance section 46 are installed to suppress the pressure fluctuation in the liquid storage chamber SR.

As illustrated in FIGS. 2 to 4, a beam-shaped portion 328 (an example of the second beam-shaped portion) is installed in the space R1 of the flow path substrate 32. In the first embodiment, one beam-shaped portion 328 is formed at the center position in the X direction in the space R1. The beam-shaped portion 328 is a beam-shaped portion extending between a pair of inner wall surfaces facing each other in the Y direction with a space therebetween in the space R1. That is, the beam-shaped portion 328 is formed in a shape that projects from one of the pair of inner wall surfaces parallel to the XZ plane in the space R1 in the Y direction and reaches the other. As illustrated in FIGS. 2 and 4, the space R1 can be expressed as a structure in which the space is divided into two spaces with the beam-shaped portion 328 as a boundary. The beam-shaped portion 328 of the first embodiment is integrally formed with the flow path substrate 32 by processing a silicon single crystal substrate. Although FIG. 4 exemplifies a configuration in which one beam-shaped portion 328 is formed in the space R1, a plurality of beam-shaped portions 328 can be formed in the space R1 at intervals in the X direction. is there.

As illustrated in FIGS. 3 and 5, a plurality of beam-shaped portions 48 (exemplification of the first beam-shaped portion) are formed in the space R2 of the housing portion 40. The beam-shaped portion 48 is a beam-shaped portion extending over a pair of inner wall surfaces facing each other in the Y direction with a space therebetween in the space R2. That is, the beam-like portion 48 is formed in a shape that projects from one of the pair of inner wall surfaces parallel to the XZ plane in the space R2 in the Y direction and reaches the other. A plurality of beam-shaped portions 48 are installed in the space R2 at intervals in the X direction. That is, in the first embodiment, the total number of beam-shaped portions 48 that exceed the beam-shaped portions 328 of the flow path substrate 32 are installed in the housing portion 40. The beam-shaped portion 328 of the first embodiment is formed integrally with the housing portion 40 by injection molding of a resin material, for example.

FIG. 6 is a sectional view taken along line VI-VI in FIG. That is, the structure of the cross section passing through the space R1 of the flow path substrate 32 and the space R2 of the housing portion 40 is shown in FIG. As illustrated in FIG. 6, the upper surface of the beam-shaped portion 328 is located in the same plane as the first surface F1 of the flow path substrate 32, and the lower surface of the beam-shaped portion 328 is formed of the first surface F1 and the second surface F2. Located in between. Therefore, the beam-shaped portion 328 and the compliance portion 54 are opposed to each other in the Z direction with a predetermined distance D1 therebetween.

As illustrated in FIG. 6, the surface of the beam-shaped portion 48 of the housing portion 40 on the side of the flow path substrate 32 is an inclined surface that is inclined with respect to the first surface F1 (XY plane) of the flow path substrate 32. Is. Specifically, the surface of the beam-shaped portion 48 of the first embodiment includes a pair of inclined surfaces (flat surface or curved surface) located on the positive side and the negative side in the X direction with a ridge line parallel to the Y direction as a boundary. .. That is, the lateral width (dimension in the X direction) of the beam-shaped portion 48 gradually decreases from the negative side to the positive side in the Z direction. As understood from FIG. 6, the beam-shaped portion 328 of the flow path substrate 32 is wider than the beam-shaped portion 48 of the housing portion 40. Further, as can be understood from FIG. 6, the plurality of beam-shaped portions 48 of the housing portion 40 are separated from the first surface F1 of the flow path substrate 32 to the negative side in the Z direction (the side opposite to the flow path substrate 32). It is installed in the position. Specifically, a predetermined distance D2 is secured between each beam-shaped portion 48 and the first surface F1. As described above, since the joint portion of the housing portion 40 is joined to the first surface F1, it can be said that the beam-shaped portions 48 and the joint surface are separated from each other by the distance D2.

FIG. 7 is an explanatory diagram of a process of installing the casing 40 on the first surface F1 of the flow path substrate 32. As illustrated in FIG. 7, by placing the casing 40 on the work surface to which the adhesive is applied in a uniform thickness, the adhesive is transferred to the joint surface (for example, the bottom surface of the side surface portion 44) and bonded. The casing 40 is bonded to the channel substrate 32 by disposing the casing 40 to which the agent is transferred on the first surface F1 of the channel substrate 32. In the first embodiment, since the plurality of beam-shaped portions 48 are installed at positions apart from the joint surface by the distance D2 in the housing portion 40, in the step of FIG. 7 in which the housing portion 40 is placed on the work surface. The possibility that the adhesive will adhere to the beam-shaped portion 48 together with the bonding surface, which is the original transfer target of the adhesive, is reduced. Therefore, there is an advantage that it is possible to reduce the possibility that the adhesive that has adhered to the beam-shaped portion 48 and is hardened will hinder the flow of the ink in the liquid storage chamber SR.

As described above, in the first embodiment, since the liquid storage chamber SR and the pressure chamber SC communicate with each other via the supply hole 322 (throttle channel) formed in the flow channel substrate 32, the pressure chamber space 342. The size required for the pressure chamber substrate 34 is reduced as compared with the structure in which the throttle channel is formed. Therefore, it is possible to realize miniaturization of the liquid jet head 100. Further, since the compliance part 54 is installed at a position close to the pressure chamber SC so as to face the pressure chamber SC with the communication hole 324 interposed therebetween, the pressure chamber SC propagates from the pressure chamber SC to the liquid storage chamber SR via the communication hole 324. There is also an advantage that the pressure fluctuation can be efficiently absorbed by the compliance unit 54. On the other hand, in the configuration in which the flow path substrate 32 is reduced in order to reduce the size of the liquid ejecting head 100, it is difficult to secure a sufficient area for the compliance section 54, and the compliance section 54 alone is enough to reduce the pressure in the liquid storage chamber SR. It is possible that fluctuations cannot be suppressed sufficiently. In the first embodiment, since the compliance section 46 is installed in the housing section 40 in addition to the compliance section 54 of the flow path board 32, the flow path board 32 is downsized as compared with the configuration in which the compliance section 46 is not installed. Even if it is done, there is an advantage that the pressure fluctuation in the liquid storage chamber SR can be effectively suppressed.

On the other hand, in order to downsize the liquid ejecting head 100, it is necessary to downsize the housing portion 40, but when the plate thickness of the side surface portion 44 or the top surface portion 42 is reduced to downsize the housing portion 40. However, the mechanical strength of the casing 40 may be insufficient. In the first embodiment, since the beam-shaped portion 48 is installed on the housing portion 40, the mechanical strength of the housing portion 40 is reduced even if the plate thickness of each portion is reduced to reduce the size of the housing portion 40. There is an advantage that can be maintained. In the first embodiment, since the beam-shaped portion 328 is installed on the flow path substrate 32 in addition to the beam-shaped portion 48 of the housing portion 40, the mechanical strength of the flow path substrate 32 (and by extension, the entire liquid jet head 100). Strength) can be maintained.

<Second Embodiment>
A second embodiment of the present invention will be described. Regarding the elements having the same functions and functions as those in the first embodiment in each of the following exemplary embodiments, the reference numerals used in the description of the first embodiment are used, and the detailed description of each is appropriately omitted.

FIG. 8 is a cross-sectional view of the liquid jet head 100 of the second embodiment, and FIG. 9 is a plan view of the liquid jet head 100 as viewed from the negative side in the Z direction. In FIG. 9, the subscript 1 is added to the end of the reference numerals of the elements corresponding to the plurality of nozzles N in the first row L1, and the subscript 2 is added to the end of the reference numerals of the elements corresponding to the plurality of nozzles N in the second row L2. Has been done. As illustrated in FIG. 9, in the top surface portion 42 of the casing 40 of the liquid ejecting head 100 according to the second embodiment, the introduction ports 431 and the second row L2 corresponding to the plurality of nozzles N of the first row L1 are formed. The inlets 432 corresponding to the plurality of nozzles N are arranged in the X direction. The casing 40 of the second embodiment is formed of a resin material such as liquid crystal polymer as in the first embodiment.

The inner wall surface of the liquid storage chamber SR1 (space R2) corresponding to the first row L1 includes the inclined surface 471 extending from the introduction port 431 to the negative side in the Y direction in plan view, and corresponds to the second row L2. The inner wall surface of the liquid storage chamber SR2 includes an inclined surface 472 extending from the introduction port 432 of the second row L2 to the positive side in the Y direction in plan view. As understood from FIG. 8, the inclined surface 471 and the inclined surface 472 are planes or curved surfaces inclined with respect to the XY plane. As can be understood from the above description, the ink supplied from the liquid container 14 to the introduction port 43 has the side surface portion 44 along the inclined surface 47 in the liquid storage chamber SR as shown by the broken line arrow in FIG. Flows to the side (negative side in the Y direction).

In contrast to the first embodiment in which the opening portion 422 is formed in the top surface portion 42 of the housing portion 40, in the second embodiment, an opening is formed in the side surface portion 44 of the housing portion 40 as illustrated in FIG. 8. The portion 442 is formed. Specifically, the side surface portion 44 is formed in a rectangular frame shape having a base portion 445 extending in the X direction along the peripheral edge of the flow path substrate 32 as a bottom side. The bottom surface of the base portion 445 is bonded to the first surface F1 of the channel substrate 32 as a bonding surface with, for example, an adhesive. Therefore, the base portion 445 projects from the first surface F1 to the negative side in the Z direction. As illustrated in FIG. 8, the compliance section 46 of the second embodiment is installed on the outer wall surface of the side surface section 44 and seals the opening section 442. That is, the compliance part 46 is fixed to the outer wall surface of the rectangular frame shape including the surface of the base part 445. The configuration in which the compliance portion 54 is installed on the second surface F2 of the flow path substrate 32 is the same as that of the first embodiment. That is, the compliance part 46 of the second embodiment is arranged perpendicular to the first surface F1 of the flow path substrate 32 and the compliance part 54. As can be understood from the above description, in the second embodiment as well, as in the first embodiment, both the compliance section 54 installed in the flow path substrate 32 and the compliance section 46 installed in the housing section 40 are provided. , Is used to absorb pressure fluctuations in the liquid storage chamber SR.

As illustrated in FIG. 8, a plurality of beam-shaped portions 48 similar to those in the first embodiment are installed on the inner wall surface of the base portion 445 of the side surface portion 44. Specifically, the plurality of beam-shaped portions 48 are arranged at intervals along the base portion 445 extending in the X direction. The plurality of beam-shaped portions 48 are located on the negative side in the Z direction by a distance D2 with respect to the first surface F1 of the flow path substrate 32 (or the bonding surface that is the bottom surface of the base portion 445). The configuration of the beam-shaped portion 328 of the flow path substrate 32 is similar to that of the first embodiment.

Also in the second embodiment, the same effect as that of the first embodiment is realized. In the second embodiment, since the opening 442 is formed in the side surface portion 44, the mechanical strength of the side surface portion 44, particularly the base portion 445, tends to be insufficient. In the second embodiment, since the beam-shaped portion 48 is installed on the base portion 445, there is an advantage that the mechanical strength of the base portion 445 can be effectively reinforced.

Further, in the second embodiment, since the compliance part 46 is installed on the side surface part 44 of the housing part 40, compared to the first embodiment in which the compliance part 46 is installed on the top surface part 42, the liquid viewed from the Z direction. It is possible to improve the performance of absorbing the pressure fluctuation in the liquid storage chamber SR while suppressing the size of the ejection head 100 (size in the XY plane). On the other hand, in the first embodiment, since the compliance portion 46 is installed on the top surface portion 42, compared with the second embodiment in which the compliance portion 46 is installed on the side surface portion 44, the height (Z direction) of the housing portion 40 is increased. It is possible to secure the performance of absorbing the pressure fluctuations in the liquid storage chamber SR while suppressing the size). Further, as the height of the casing 40 is suppressed, for example, the distance to move the bubbles mixed with the ink in the liquid storage chamber SR in order to discharge the bubbles from the nozzle N is shortened. That is, from the viewpoint of discharging bubbles, the first embodiment is more advantageous than the second embodiment.

Note that, for example, the side surface portion 44 of the housing portion 40 does not include the base portion 445 (for example, the bottom side of the opening 442 is defined by the first surface F1 of the flow path substrate 32. Hereinafter, referred to as "comparative". In (), the compliance portion 46 is installed over the outer wall surface of the side surface portion 44 and the side end surface of the flow path substrate 32. In the second embodiment, the compliance section 46 is installed on the outer wall surface of the side surface section 44 including the surface of the base section 445 of the housing section 40. Therefore, the compliance section 46 is provided on the outer wall surface of the side surface section 44 and the flow path substrate 32. The compliance portion 46 is firmly fixed as compared with the case where the ratio is proportional to the side end surface of the compliance portion 46. Therefore, there is an advantage that it is possible to reduce the possibility of trouble such as ink leakage from the joining portion of the compliance portion.

<Third Embodiment>
FIG. 10 is a cross-sectional view of the liquid jet head 100 according to the third embodiment. In the case part 40 of the third embodiment, two introduction ports 43 are arranged in the X direction, as in the second embodiment illustrated in FIG. 9, and the inner wall surface of the liquid storage chamber SR is an inclined surface 47 (471, 471). 472). As illustrated in FIG. 10, the housing 40 of the liquid jet head 100 according to the third embodiment has an inclined portion 49 whose outer wall surface is inclined with respect to the first surface F1 (XY plane) of the flow path substrate 32. Includes. Specifically, the inclined portion 49 is a portion substantially parallel to the inclined surface 47 of the liquid storage chamber SR. The casing 40 of the third embodiment is formed of a resin material such as liquid crystal polymer, as in the first embodiment.

In the third embodiment, the opening 492 is formed in the inclined portion 49 of the housing 40. The compliance part 46 of the third embodiment is installed on the outer wall surface of the inclined part 49 and seals the opening 492. The configuration in which the compliance portion 54 is installed on the second surface F2 of the flow path substrate 32 is the same as that of the first embodiment. Therefore, the compliance part 46 of the second embodiment is inclined with respect to the first surface F1 of the flow path substrate 32 and the compliance part 54. As can be understood from the above description, in the third embodiment as well, as in the first embodiment, both the compliance section 54 installed in the flow path substrate 32 and the compliance section 46 installed in the housing section 40 are provided. , Is used to absorb pressure fluctuations in the liquid storage chamber SR. The configurations of the beam-shaped portion 328 of the flow path substrate 32 and the beam-shaped portion 48 of the casing 40 are the same as those in the first embodiment.

Also in the third embodiment, the same effect as that of the first embodiment is realized. Further, in the third embodiment, the compliance section 46 is installed on the outer wall surface of the inclined section 49 of the housing section 40. Therefore, the size of the liquid ejecting head 100 in the XY plane is suppressed as compared with the configuration in which the compliance portion 46 is installed in parallel to the flow path substrate 32 as in the first embodiment, and the second embodiment is configured. As described above, there is an advantage that the size of the liquid jet head 100 in the Z direction can be suppressed as compared with the configuration in which the compliance portion 46 is installed vertically to the flow path substrate 32.

Note that, for example, in the configuration in which the top surface portion 42 and the side surface portion 44 are substantially orthogonal to each other as in the first embodiment and the second embodiment, the corner where the top surface portion 42 and the side surface portion 44 intersect in the liquid storage chamber SR. Ink tends to stay in the inner portion of the portion (for example, the area α in FIG. 8). In the third embodiment, since the casing 40 includes the inclined portion 49, the smooth flow of the ink in the liquid storage chamber SR is promoted as compared with the first embodiment and the second embodiment. Therefore, there is also an advantage that it is possible to reduce the possibility that bubbles mixed in the ink will stay in the liquid storage chamber SR.

<Modification>
Each of the forms illustrated above can be variously modified. Specific modes of modification will be exemplified below. Two or more aspects arbitrarily selected from the following exemplifications can be appropriately merged within a range not inconsistent with each other.

(1) In each of the above-described embodiments, one casing 40 is installed for one flow path substrate 32, but one is provided for a plurality of flow path substrates 32 as illustrated in FIG. It is also possible to install the casing 72 of the. Each of the plurality of liquid ejecting units 70 illustrated in FIG. 11 is an element other than the housing unit 40 in the liquid ejecting head 100 in each of the above-described embodiments. That is, any one liquid ejecting unit (head chip) 70 includes the flow path substrate 32, the pressure chamber substrate 34, the vibrating unit 36, the plurality of piezoelectric elements 37, the protective member 38, the nozzle plate 52, and the compliance unit 54. To have. As illustrated in FIG. 11, one casing 72 is commonly installed for the flow path substrates 32 of the plurality of liquid ejecting units 70. A plurality of spaces R2 (not shown) corresponding to the different liquid ejecting units 70 are formed in the casing 72 and communicate with the space R1 of the flow path substrate 32 of each liquid ejecting unit 70. An opening portion 722 is formed on the side surface of the housing portion 72 to extend over the plurality of liquid ejecting portions 70, and a compliance portion 74 that seals the opening portion 722 is installed on the outer wall surface of the housing portion 72. That is, one compliance part 74 is shared across the plurality of liquid ejecting parts 70. The configuration of FIG. 11 has an advantage that the configuration of the liquid ejecting head 100 is simplified as compared with the configuration in which the housing 72 and the compliance unit 74 are separately installed for each liquid ejecting unit 70. Note that, in FIG. 11, the compliance section 74 is installed on the side surface of the housing section 72, but it is also possible to install the compliance section 74 across the plurality of liquid ejecting sections 70 on the top surface (upper surface) of the housing section 72. ..

(2) In the first embodiment, the compliance section 46 is installed on the top surface section 42 of the housing section 40, and in the second embodiment, the compliance section 46 is installed on the side surface section 44 of the housing section 40. It is also possible to install the compliance portion 46 on both the top surface portion 42 and the side surface portion 44. A configuration in which the compliance portion 46 is installed on the inclined portion 49 and at least one of the top surface portion 42 and the side surface portion 44 of the housing portion 40 exemplified in the third embodiment can also be adopted. Note that it is possible to omit at least one of the compliance unit 54 and the compliance unit 46.

(3) The element (driving element) that applies a pressure to the inside of the pressure chamber SC is not limited to the piezoelectric element 37 illustrated in each of the above-described embodiments. For example, it is possible to use a heating element that generates bubbles in the pressure chamber SC by heating to change the pressure as a driving element. As can be understood from the above examples, the drive element is comprehensively expressed as an element for ejecting a liquid (typically an element that applies a pressure to the inside of the pressure chamber SC), and an operation method (piezoelectric method/piezoelectric method/ It does not matter whether it is a heat system) or the specific configuration.

(4) In each of the above-described embodiments, the beam-shaped portion 48 is formed integrally with the housing portion 40, but the beam-shaped portion 48 separate from the housing portion 40 can be fixed to the housing portion 40. is there. The same applies to the beam-shaped portion 328 of the channel substrate 32, and it is possible to fix the beam-shaped portion 328 separate from the channel substrate 32 to the channel substrate 32.

(5) In each of the above-described embodiments, the serial head in which the carriage 26 equipped with the plurality of liquid ejecting heads 100 moves in the Y direction has been illustrated. The invention can be applied.

(6) The printing device 10 exemplified in each of the above embodiments can be adopted not only in a device dedicated to printing but also in various devices such as a facsimile machine and a copying machine. However, the application of the liquid ejecting apparatus of the invention is not limited to printing. For example, a liquid ejecting apparatus that ejects a solution of a coloring material is used as a manufacturing apparatus that forms a color filter of a liquid crystal display device. A liquid ejecting apparatus that ejects a solution of a conductive material is used as a manufacturing apparatus that forms wirings and electrodes of a wiring board.

10... Printing device (liquid ejecting device), 12... Medium, 14... Liquid container, 22... Control device, 24... Conveying mechanism, 26... Carriage, 100... Liquid ejecting head, 32... Flow Road substrate, 322... Supply hole, 324... Communication hole, 326... Branch passage, 328... Beam portion, 34... Pressure chamber substrate, 342... Pressure chamber space, 36... Vibrating portion, 37... ...Piezoelectric element, 38...Protective member, 40...Case part, 42...Top part, 43...Introduction port, 44...Side part, 46...Compliance part, 48...Beam-shaped part, 49... ... Inclined part, 52 ... Nozzle plate, 54 ... Compliance part, SR ... Liquid storage chamber, SC ... Pressure chamber, N ... Nozzle.

Claims (6)

A pressure chamber substrate in which a pressure chamber space is formed,
A first space including a first surface on which the pressure chamber substrate is installed and a second surface opposite to the first surface, and a first space; and a supply hole that communicates the first space with the pressure chamber space, A flow path substrate in which a communication hole communicating with the pressure chamber space is formed,
A nozzle plate provided on the second surface of the flow path substrate and having a nozzle communicating with the communication hole;
A casing part that is installed on the first surface of the flow path substrate and has a second space that communicates with the first space of the flow path substrate;
A flexible compliance portion that is installed on the second surface of the flow path substrate and seals the communication hole and the first space;
A first beam-shaped portion provided between the inner wall surfaces of the second space in the housing portion and spaced apart over the plurality of pressure chamber spaces ;
The liquid jet head according to claim 1, wherein a surface of the first beam-shaped portion on the flow path substrate side is an inclined surface inclined with respect to the first surface . The liquid jet head according to claim 1, wherein the first beam-shaped portion is installed at a position separated from a third surface of the housing portion on the first surface side to an opposite side to the nozzle plate. A pressure chamber substrate in which a pressure chamber space is formed,
A first space including a first surface on which the pressure chamber substrate is installed and a second surface opposite to the first surface, and a first space; and a supply hole that communicates the first space with the pressure chamber space, A flow path substrate in which a communication hole communicating with the pressure chamber space is formed,
A nozzle plate provided on the second surface of the flow path substrate and having a nozzle communicating with the communication hole;
A casing part that is installed on the first surface of the flow path substrate and has a second space that communicates with the first space of the flow path substrate;
A flexible compliance portion that is installed on the second surface of the flow path substrate and seals the communication hole and the first space;
A first beam-shaped portion extending between inner wall surfaces of the second space in the housing portion,
The first beam-shaped portion is installed at a position away from the third surface of the housing portion on the first surface side to the opposite side to the nozzle plate ,
The surface of the channel substrate side of the first beam-like portion, said inclined inclined surfaces der Ru liquid ejecting head with respect to the first surface. The casing portion includes a side surface portion protruding from the first surface along a peripheral edge of the flow path substrate, a top surface portion located on a side opposite to the flow path substrate with the second space interposed therebetween, and the top portion. The liquid ejecting head according to claim 1, further comprising: an introduction port formed in a surface portion and communicating with the second space, the flow passage extending from the introduction port toward the side surface portion. The casing has a fourth surface that is a surface facing the inlet and that forms the flow path from the inlet to the side surface side.
The liquid jet head according to claim 4, wherein the first beam-shaped portion is installed at a position apart from the fourth surface. A liquid ejecting apparatus including any of the liquid jet head of claims 1 to 5.

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