JP6726639B2 - Force sensor - Google Patents

Description

The invention relates in particular to an improved force or bolt sensor that can be formed to measure clamping forces in bolted or screwed joints.

Conventionally, various embodiments of force sensors are known. An example force sensor is described in US Pat. An example force sensor utilizes one or more pressure sensitive resistors applied to a carrier material in thick film technology. In one example of Patent Document 1, a force sensor is described in which six resistors to which a load is applied and two reference resistors to which no load is applied are bridge-connected to each other.

British Patent Application Publication No. 2326719

An object of the present invention is to provide an improved force sensor. A further object of the present invention is to provide a system with an improved force sensor and evaluation electronics. Further issues will become clear from the description below.

According to one aspect of the present invention, a force sensor includes a first component and a second component that are flat. The force sensor, and thus the first and second parts, house a common axially extending object, for example a bolt, a shaft or a threaded rod, and are common for cooperating with the object. It has an opening. The elongated objects may be bolts and especially screws. At least one first piezoresistive resistor is provided between the first component and the second component. The force sensor is formed such that when a longitudinal object exerts an axial pressure load on the force sensor, at least the first piezoresistive resistor is loaded by the force resulting from the axial pressure load. There is.

In the context, the term "bolt" also comprises each elongated object suitable for fixing, in particular a screw. The terms "loaded" and "unloaded" refer to a piezoresistive resistor in the context of axial pressure loading or axial force (i.e., the direction of extension of an elongated object or bolt). It can be understood that the resistor is either loaded or unloaded when () is applied.

Advantageously, the first part and the second part are formed and provided to cooperate to define a preferably tightly closed interior chamber. The interior chamber may optionally be filled with a protective gas, for example nitrogen. The encapsulation also allows the sensor to be used in particularly harsh, eg corrosive environments. Generally, the sensor has a long service life.

Additionally, the force sensor according to the present invention has a very flat structure as compared with existing force sensors, and thus can be easily incorporated into existing bolt and/or screw joints.

According to an advantageous aspect of the invention, the force sensor may comprise at least one second piezoresistive resistor, the second piezoresistive sensor being provided with an axial pressure load on the force sensor. The sex resistor remains unloaded. An unloaded piezoresistive resistor may be used as a reference during measurement and/or evaluation of measured data in order to minimize undesired effects on the accuracy of the measured value, such as the temperature dependence of the resistor. Used as.

According to a further advantageous aspect, the force sensor further comprises at least one third piezoresistive resistor and a fourth piezoresistive resistor. When an axial pressure load is applied to the force sensor, the force will be applied by the force generated in the third piezoresistive resistor. When the force sensor is axially pressure loaded, the fourth piezoresistive resistor may remain unloaded. In this way the accuracy of the measurements can be further improved. When utilizing at least four piezoresistive resistors, these piezoresistive resistors may be connected in the force sensor, for example in a Wheatstone bridge connection. The Wheatstone bridge also allows the measurement of very small resistance changes in the loaded resistor and offsets temperature effects.

According to a further advantageous aspect, the force sensor may additionally comprise at least one fifth to eighth piezoresistive resistor. Thereby the force sensor may comprise a total of eight piezoresistive resistors. At that time, the first component and the second component are the first piezoresistive resistor, the third piezoresistive resistor, the fifth piezoresistive resistor and the seventh piezoresistive resistor. Are respectively loaded by the force generated from the axial pressure load of the force sensor, and each of the second piezoresistive resistor, the fourth piezoresistive resistor, the sixth piezoresistive resistor, and the eighth piezoresistive resistor. The piezoresistive resistor is formed such that it remains unloaded. Advantageously, these resistors may also be connected in a Wheatstone bridge connection. Advantageously, two loaded piezoresistive resistors or two unloaded piezoresistive resistors may be integrated to form one resistor in a Wheatstone bridge connection. The force sensor according to this advantageous aspect of the invention can have an advantageous force flow. The force sensor thus gives better or more accurate results.

According to a further advantageous aspect of the invention, a loaded piezoresistive resistor, ie for example a first piezoresistive resistor, a third piezoresistive resistor, a fifth piezoresistive resistor. The body and the seventh piezoresistive resistor may be circumferentially, preferably evenly spaced from one another and/or spaced apart from the opening around the opening in the inner chamber. By way of example, there may be 180 degrees between two piezoresistive resistors or 90 degrees each between four piezoresistive resistors. By so providing a piezoresistive resistor, in particular a loaded piezoresistive resistor, the force of the axial pressure load of the force sensor causes the loaded piezoresistive resistor to It will be distributed evenly and introduced.

According to a further advantageous aspect of the invention, the piezoresistive resistors may form pairs of resistors, each pair of resistors being unloaded with one loaded piezoresistive resistor. It may include one piezoresistive resistor. In other words, a force sensor with 8 piezoresistive resistors may comprise 4 resistor pairs. Of the eight piezoresistive resistors, four may be loaded resistors and four may be unloaded resistors. Each of the four resistor pairs may include one loaded piezoresistive resistor and one unloaded piezoresistive resistor, respectively. Grouping each two resistors into one resistor pair can have a favorable effect on the production process, especially if the same resistor pair is used in one force sensor.

According to a further advantageous aspect of the invention, the loaded piezoresistive resistor may be closer to the opening than the unloaded piezoresistive resistor. With such a further advantageous aspect of the invention, the provision of such a resistor can make the force sensor more robust and the production process more efficient. Alternatively, it is possible to place the unloaded piezoresistive resistor closer to the opening and the loaded piezoresistive resistor further away from the opening.

According to a further advantageous aspect of the invention, the loaded piezoresistive resistor may be arranged substantially concentrically around the center point of the opening. If provided in this way, the flow of force can be advantageously influenced.

According to a further advantageous aspect of the invention, the second component may comprise at least one protruding area. The projecting region may project axially with respect to the second region of the second component on the side of the second component facing the first component or facing away from the first component. The projecting region may project either on the surface facing the first component or on the surface facing away from the first component. The protruding region can introduce a force, which occurs when the force sensor is subjected to an axial pressure load, to one or more loaded piezoresistive resistors.

According to a further advantageous aspect of the invention, the resistor pairs are provided circumferentially and preferably evenly spaced from one another and/or spaced from the opening around the opening. You can By so providing, along with further advantageous aspects of the invention, the force sensor can be further optimized.

According to a further advantageous aspect of the invention, the resistor pair comprises a first to a third contact, respectively. The first contact may be electrically conductively connected to the loaded piezoresistive resistor. Additionally, the loaded piezoresistive resistor is conductively connected to the second contact. Additionally, the second contact is also electrically conductively connected to the unloaded piezoresistive resistor. Furthermore, a piezoresistive resistor, which is not loaded, is also conductively connected to the third contact. Therefore, the resistor pair comprises one series connection. In other words, in the series connection, the first contact portion is followed by the loaded piezoresistive resistor, the loaded piezoresistive resistor is followed by the second contact portion, and the second contact portion is loaded. An unloaded piezoresistive resistor follows, and this unloaded piezoresistive resistor is followed by a third contact. If a pair of resistors having a contact portion is formed in series connection, electrical connection or wiring inside the force sensor can be simplified.

According to a further advantageous aspect of the invention, the at least two resistor pairs may be formed substantially similar and preferably identical, in particular with regard to layout and contact position. Thus, the adjustment of the measurement bridge can be further simplified and possible measurement failures are reduced. In this way, the work steps for electrically connecting or wiring the resistors can also be made efficient.

According to a further advantageous aspect of the invention, the piezoresistive resistor may consist of a piezoresistive alloy such as manganin or zelanine. Both materials are otherwise commonly applied in the production of dynamic pressure sensors. The name manganin includes copper-manganese alloys, especially alloys with a copper proportion of 83-87%, a manganese proportion of about 12-13% and a nickel proportion of 0-4%. By way of example, manganin may contain 84% copper, 12% manganese and 4% nickel. Manganin has a large beneficial piezoresistive effect, while resistance is less temperature dependent. Manganin is particularly suitable for production in thin film or film technology because of its material properties. Zelanine may be utilized as an alternative material. Zelanine is also a copper-manganese compound. Zeranin has a copper content of about 90%, a manganese content of 7%, a tin content of about 2.3%, and a slight mixture of aluminum, iron and nickel. The above alloys and other similar materials are well suited for the above purposes because of their material properties.

According to a further advantageous aspect of the invention, the piezoresistive resistor may be made in thin film technology or film technology. Advantageously, the resistor pair may be made of one piece or of one piece. As carrier sheet and/or cover sheet, polyimide or other high-performance polymers (PEEK, polysulphone or the like) are preferably used.

According to a further advantageous aspect of the invention, the second component of the force sensor may be connected to the first component at the first support region and the second support region. In other words, the second component may be mounted on the first component in the first support area and the second support area. Advantageously, the first part and the second part may be connected form-connecting or material-connecting. By way of example, the second part and the first part may be provided with mutually engaging contours in the first support area and the second support area and may be welded over the entire length of the support area.

According to a further advantageous aspect of the invention, the second component may comprise a first spring region and a second spring region, the spring region being able to elastically deform the second component axially. Is formed in order to do so. The already mentioned protruding region may be provided between the first spring region and the second spring region. As an example, the second component may be thin on both sides of the protruding area. The spring area allows an advantageous elastic deformation of the second part, so that the protruding area of the second part moves like a stamp in the direction of the loaded resistors and contacts them. Then, the force generated from the axial pressure load of the force sensor is introduced into each of the loaded piezoresistive resistors.

According to a further advantageous aspect of the invention, the inner chamber of the force sensor may have an inner height of 0.2 mm to 3 mm and an inner width of at least 0.2 mm to 3 mm. The dimensions of the inner chamber allow for easy contact of the resistor and also ensure that the unloaded resistor is not loaded by the axial pressure load of the force sensor.

According to a further advantageous aspect of the invention, the first component may be provided with a line opening in the outer circumferential surface. The connecting line may be passed through the line opening to the inner chamber, and may be electrically connected to the resistor in the inner chamber, for example, by using a contact portion. This allows the force sensor to facilitate simple mounting or use of the disc ring.

According to a further advantageous aspect of the invention, the inner chamber has a passage in the surface of the first part facing the second part. Suitably, the passage may circulate partially or completely in the region outside the first part. Suitably, the passages may have a passage height and passage width of 0.2 mm to 3 mm. The connecting line may be laid at least partially in the passage.

According to a further advantageous aspect of the invention, the inner chamber may be at least partially filled with polymer. Advantageously, at least the passage may be filled around the line opening in order to ensure a tight seal of the inner chamber.

According to a further aspect of the invention there is provided a system comprising a force sensor and evaluation electronics according to the invention. The evaluation electronics are suitable for evaluating the measurement signal of the force sensor. Furthermore, the evaluation electronics are suitable for sending messages to the message receiver, for example using the network infrastructure and/or the message bus. The message may include a rating or part of a rating or other data. The system can simplify the control of preload for bolted or screwed joints.

According to a further advantageous aspect of the invention, the system may comprise an energy store, the evaluation electronics being able to operate autonomously with the energy stored in the energy store. The self-sustaining operation allows, for example, measuring or continuous monitoring of screw or bolt joints to be carried out even at inaccessible points.

According to a further advantageous aspect of the invention, the evaluation electronics may be suitable for charging the energy store with available energy. The available energy can be prepared, for example, from solar cells, wind power generators or by energy harvesting. Energy harvesting is a method for parasitically using electromagnetic waves from the environment.

It is a top view of the force sensor concerning the present invention. It is sectional drawing of the force sensor along the AA line. It is a partially expanded view of the area|region X of FIG. It is a partially expanded view of the area|region Y of FIG. It is sectional drawing of the force sensor along line BB. FIG. 6 is a partially enlarged view of a region Y′ of FIG. 6 is a partially enlarged view of a region X'of FIG. It is a figure which shows the force sensor of FIG. 1 which has a connection line. FIG. 9 is a circuit diagram of the force sensor described in FIG. 8. It is a figure which shows the pair of resistive elements of a force sensor. It is an exploded view of a force sensor having a washer and a bolt. 1 is a diagram showing a system according to the present invention having a force sensor.

Hereinafter, the features and aspects of the present invention will be described in more detail based on the embodiments and the drawings.

1 to 11 show an exemplary force sensor according to the present invention.

FIG. 1 is a plan view, and the force sensor 1 is formed in a flat (flat) and ring shape and has an opening 50 penetrating therethrough. As shown in FIG. 11, bolts or screws can be guided through the openings. A first piezoresistive resistor 401 is provided between the first component 10 and a second component 20 (not shown).

As shown in the section taken along the line AA in FIG. 2, when the force sensor 1 is subjected to an axial pressure load by the vertically long object 2, the first piezoresistive resistor 401 is affected by the axial pressure load. The load is applied by the force Fres that is generated. Specifically, the axial pressure load of the force sensor 1 results in a pair of forces Fres acting in the axial direction by the first component 10 from below and from the second component 20 from above. Through the protruding area 201, the force Fres is introduced into the first piezoresistive resistor 401, as shown enlarged in FIG.

The first part 10 and the second part 20 cooperate to define an advantageously tightly sealed (sealed) inner chamber 30.

Advantageously, the force sensor comprises a second piezoresistive resistor 402, as shown here. The force sensor 1 is formed so that the second piezoresistive resistor 402 remains unloaded when an axial pressure load is applied to the force sensor 1. As can be seen from the detailed view of FIG. 3, the second piezoresistive resistor is arranged such that no force is introduced into the second piezoresistive resistor 402 through the second component. .. In particular, the second piezoresistive resistor 402 is arranged so as not to contact the second component 20 even when a pressure load in the axial direction is applied.

FIG. 1 likewise shows a third piezoresistive resistor 403 and a fourth piezoresistive resistor 404. Also in the third piezoresistive resistor 403, a force Fres of a predetermined ratio of the force acting by the axial pressure load is introduced into this piezoresistive resistor 403. The fourth piezoresistive resistor 404 is likewise a non-loaded reference.

The force sensor 1 of FIG. 1 shows a particularly advantageous embodiment with a total of eight piezoresistive resistors 401-408, four of which have axes associated with the force sensor 1. Pressure Fres is applied when a directional pressure load is applied, and the other four piezoresistive resistors 402, 404, 406, 408 can serve as unloaded references.

The force sensor shown shows an advantageous arrangement of piezoresistive resistors which are evenly spaced in the circumferential direction and are evenly distributed.

Similarly in FIG. 8, the force sensor 1 of FIG. 1 is depicted. It can be seen that each one loaded and unloaded resistor is grouped into one resistor pair 441-444. As shown in FIG. 1 and FIG. 8 or FIG. 2 and FIG. 5, the loaded piezoresistive resistors 401, 403, 405, 407 are compared to the unloaded piezoresistive resistors 402, 404, 406, 408. If it is also close to the opening 50, the guidance of the line is greatly simplified.

Alternatively, it is possible to place the unloaded piezoresistive resistor closer to the opening 50 and the loaded piezoresistive resistor further away from the opening 50.

Although an arrangement of loaded piezoresistive resistors 401, 403, 405, 407 is shown, here the resistors are concentrically provided around the center point 51 of the opening 50.

As shown in FIG. 10, the resistor pairs are similarly formed and rotate in a 90 degree step width in the inner chamber 30 between the first part 10 and the second part 20. It can be clearly recognized that they are provided symmetrically.

As shown in FIGS. 2 and 5, the projecting region 201 is configured with a thickness in an advantageous embodiment, so that the projecting region 201 is oriented in a direction opposite to the first part 10. To another area. At the same time, the thickened region 201 of the second component 20 also projects axially towards the first component 10. Therefore, the projecting region is in this embodiment configured like a push die and allows the introduction of force into the loaded piezoresistive resistor.

Further advantageous features can be seen well in FIG. 2 and in FIG. Therefore, the first component 10 includes one edge portion that extends in the axial direction in each of the inner region and the outer region that surrounds the opening 50. Immediately next to the outer edge, the inner passage 31 can be seen. Like the inner chamber 30, the passage 31 has dimensions that allow the connection lines to be laid easily and reliably. Advantageously, the passage height KH and the passage width KB may be at least 0.2 mm to 3 mm. The line opening 32 is enlarged and drawn in FIG. A connection line (not shown) is guided through the line opening 32 and laid in the passage 31 along the circumferential direction.

The second part 20 comprises, on both sides of the projecting area 201, thinner spring areas 221, 222. It can be recognized that the orbiting spring region 221 is juxtaposed to the opening 50 and has a width that is clearly smaller in the radial direction Ra than the second spring region 222. In this configuration, in order to avoid the peak load, the edge portion 231 facing inward on the side opposite to the short first spring region 221 has an R portion. Due to the different widths of the spring regions 221, 222, the protruding region 201, which in the present embodiment is configured as a ring, will twist slightly. In the inner support area 211 and the outer support area 212, the second component 20 rests in corresponding recesses on the edges of the first component 10. In addition to the form-fitting connection under pressure, the first part and the second part may be joined by welding over the entire length in the support regions 212, 211.

Advantageously, the passage 31 and the inner chamber 30 are at least filled with polymer to the extent that the inner chamber 30 is sealed and the laid lines are fixed. The lines may be electrically connected to the piezoresistive resistors 401-408 via the contact portions 411-414, 421-424, 431-434 of the resistor pairs 441-444.

An advantageous configuration of a resistor pair, as used in the force sensor of FIGS. 1-12, is depicted in FIG.

The resistor pair 441 includes a meander-shaped piezoresistive resistor 401 to which a load is applied, a meander-shaped piezoresistive resistor 402 to which no load is applied, and three contact portions 411, 421, and 431. A series connection is revealed in which the first contact portion 411 is connected at one end to the loaded meander-shaped resistor 401. A second contact portion 421 is connected to the first loaded resistor 401, and then a second piezoresistive resistor 402 is connected to the second contact portion 421. The second piezoresistive resistor 402 is not loaded even if an axial pressure load is applied to the force sensor 1. The third contact portion 431 is connected to the unloaded piezoresistive resistor 402 and, together with the first contact portion 411 and the second contact portion 421, integrates the resistor pair 441 into one electrical circuit. Contribute to do.

The first piezoresistive resistor 401 and the second piezoresistive resistor 402 have the same overall length of the piezoresistive material through which an electric current flows, for example, manganin or zelanine, in the illustrated meander-shaped configuration. ..

In the meander-shaped structure, each conductor loop 500 facing to the left is followed by a conductor having a prescribed length 501 and a small cross section. Connected to the conductor is a conductor loop 502 pointing to the right, and another piezoresistive conductor 503. This piezoresistive conductor 503 is also followed by another conductor loop 504, which also faces to the left.

The illustrated layout of the resistor pair 441 stands out in terms of its compactness.

The contact parts 411, 421, 431 may be formed, for example, as brazed tags.

The arrangement of the loaded piezoresistive resistor 401 on the inside and the unloaded piezoresistive resistor 402 on the outside and the three contacts makes it possible to achieve the simple contact connection described above. In particular, it is not necessary to pass the conductor through the area under pressure.

To achieve the illustrated Wheatstone bridge connection, the first piezoresistive resistor 401 of the first piezoresistive resistor pair 441 is the fifth piezoresistive resistor in the third resistor pair 443. It is joined to the sex resistor 405. Similarly, the sixth piezoresistive resistor 406, which is within the third resistor pair 443, is joined to the fourth piezoresistive resistor 404 of the second resistor pair 442. Similarly for the third piezoresistive resistor 403 in the second resistor pair 442. The piezoresistive resistor 403 is bonded to the seventh piezoresistive resistor 407 of the fourth resistor pair 444. The eighth piezoresistive resistor 408 is connected to the second piezoresistive resistor 402 of the first resistor pair 441.

When a voltage is applied to the second contact portions 423, 424 of the third and fourth resistor pair 443, 444, respectively, the second contact portion of each of the first and second resistor pairs 441, 442 is applied. Target measurement values are generated at 421 and 422.

Using the conductors 52 to 55, the force sensor 1 can be connected to the evaluation electronics (evaluation electronics) 5, as shown in FIG. The system 4 with the force sensor 1 and the evaluation electronics 5 further comprises communication means suitable for transmitting a message with an evaluation of the measurement signal, for example via a network infrastructure. Suitably, the network infrastructure may be formed by wireless, but may be formed by wire.

The message can be received and processed by a suitable message receiver. The message receiver can process the messages of the evaluation electronics with force sensors and output them to the operator at suitable points.

In an advantageous embodiment, the system with the evaluation electronics and the force sensor additionally comprises an energy store. The evaluation electronics can thus be operated independently without external energy supply.

In a particularly advantageous configuration, the evaluation electronics are additionally suitable for charging the energy store, for example from solar cells, wind power generators or with the energy available from energy harvesting.

DESCRIPTION OF SYMBOLS 1 Force sensor 2 Longitudinal object 3 Washer 4 Measuring system 5 Evaluation electronics 5 Energy storage device 10 Energy storage device 10 First component 20 Second component 30 Inner chamber 31 Passage 32 Line opening 50 Opening 51 Center point 52 Conductor 53 Conductor 54 Conductor 55 Conductor 107 Loaded piezoresistive resistor 108 Loadless piezoresistive resistor 201 Protruding region 202 Second region 211 First support region 212 Second support region 221 Thinned spring region 222 Thinned Spring region 231 Back edge 401 Piezoresistive resistor 402 Piezoresistive resistor 403 Piezoresistive resistor 404 Piezoresistive resistor 405 Piezoresistive resistor 406 Piezoresistive resistor 407 Piezoresistive resistor Body 408 Piezoresistive resistor 411 Contact part 412 Contact part 413 Contact part 414 Contact part 421 Contact part 422 Contact part 423 Contact part 424 Contact part 431 Contact part 432 Contact part 433 Contact part 434 Contact part 441 Resistor pair 442 Body pair 443 Resistor pair 444 Resistor pair 500 Conductor loop 501 Specified length 502 Conductor loop 503 Piezoresistive conductor 504 Conductor loop Ax Axial Fres Resulting force KB Passage width KH Passage height LB Inner width LH Inner length Ra Radial direction

Claims (28)

A force sensor (1) including a first part (10) and a second part (20),
Between the first component (10) and the second component (20), at least one first piezoresistive resistor (401) and at least one second piezoresistive resistor (402). ) Is provided,
When an axial pressure load is applied to the force sensor (1) by the object (2), at least the first piezoresistive resistor (401) is loaded by a force (Fres) generated from the axial pressure load. In this way, and when the force sensor (1) is subjected to the axial pressure load, the force sensor so that the second piezoresistive resistor (402) remains unloaded. (1) is formed,
The second part (20) comprises at least one protruding area (201) and a second area (202), the protruding area (201) facing the first part (10) and/or Alternatively, the surface facing the side opposite to the first component (10) projects in the axial direction (Ax) with respect to the second region (202), and the force sensor receives the axial pressure load. If, introduced only to the force resulting from the axial direction of the pressure load (Fres) one or more of the load is applied piezoresistive resistor (401,403,405,407),
The loaded piezoresistive resistors (401, 403, 405, 407) and the unloaded piezoresistive resistors (402) are the first component (10) and the second component (20). A force sensor (1) provided in the inner chamber (30) between and around the opening (50) that accommodates the object (2) extending in the axial direction (Ax ). The first part (10) and the second part (20) are formed and provided so as to cooperate to define a close closure of the inner chamber (30). The force sensor (1) according to claim 1. The third piezoresistive device includes at least one third piezoresistive resistor and a fourth piezoresistive resistor, and when the force sensor (1) is subjected to the axial pressure load. The force sensation is applied to the resistor (403) by the force (Fres) resulting from the axial pressure load, such that the fourth piezoresistive resistor (404) remains unloaded. The force sensor (1) according to claim 1, wherein the sensor (1) is formed. When at least one fifth to eighth piezoresistive resistor is provided and the force sensor (1) is subjected to the axial pressure load, a fifth and seventh piezoresistive resistor (405, 407) is respectively loaded by the force (Fres) resulting from said axial pressure loading, such that the sixth and eighth piezoresistive resistors (406, 408) remain unloaded. Force sensor (1) according to claim 3 , wherein the force sensor (1) is formed. Piezoresistive resistors the load is not applied piezoresistive resistor (401,403,405,407) and said load take are respectively provided around the concentric center point of the opening (50) (51) The force sensor (1) according to any one of claims 1 to 4, which is provided. Each of said load is applied piezoresistive resistor and the load is applied not piezoresistive resistor to claim 5, characterized in that it is spaced apart from one another spaced by that and / or the center point (51) The force sensor described (1). The force sensor (1) according to claim 6 , wherein the piezoresistive resistor to which the load is applied and the piezoresistive resistor to which the load is not applied are equally spaced from each other. The piezoresistive resistors (401-408) form resistor pairs (441-444), and each of the resistor pairs (441-444) is loaded with the piezoresistive resistor (401). , one of 403, 405, 407), wherein the load contains one of piezoresistive resistors (402, 404, 406, 408) is not applied, the force according to any one of claims 1 to 7 Sensor (1). The loaded piezoresistive resistors (401, 403, 405, 407) are on a radius different from the radius of the unloaded piezoresistive resistors (402, 404, 406, 406). Item 9. The force sensor (1) according to any one of items 1 to 8 . The resistor pairs (441-444) are concentrically spaced apart from each other and/or the center point (51) of an opening (50) accommodating the object (2) extending in the axial direction (Ax). The force sensor (1) according to claim 8 , wherein the force sensor (1) is provided around the center point (51) at a distance from. The pair of resistors (441-444) are concentrically and evenly spaced apart from each other and/or spaced apart from the center point (51) and arranged around the center point (51). Item 10. A force sensor (1) according to item 10 . The pair of resistors (441 to 444) includes one each of the first to third contact portions (411 to 414, 421 to 424, 431 to 434), and the first contact portion (411 to 414). Are electrically conductively connected to the loaded piezoresistive resistors (401, 403, 405, 407), the loaded piezoresistive resistors additionally comprising a second contact (421). To 424), the second contact portion (421 to 424) is additionally conductive to the unloaded piezoresistive resistor (402, 404, 406, 408). Since the unloaded piezoresistive resistor (402, 404, 406, 408) is additionally joined to the third contact portion (431 to 434), Force sensor (1) according to claim 8 , wherein each pair of resistors (441-444) comprises one series connection. 11. The force sensor (1) according to claim 8 or claim 10 , comprising at least two pairs of resistors (441-444), the pairs of resistors being similarly or identically formed. The force sensor (1) according to any one of items 1 to 12 . The piezoresistive resistors (401-408) is composed of piezoresistive alloy such as manganin or Zeranin claim 1 from the force sensor according to any one of 13 (1). The force sensor (1) according to any one of claims 1 to 14 , wherein the piezoresistive resistor is manufactured by thin film technology and/or film technology. The force sensor (1) according to any one of claims 1 to 15 , wherein the second component (20) is connected to the first component (10) at an outer peripheral portion (211) thereof. .. The second part (20) comprises thinned first and second spring regions (221, 222), the projecting region (201) in the radial direction the first spring region (221). The force sensor (1) according to any one of claims 1 to 16 , wherein the force sensor (1) is provided between the second spring region (222) and the second spring region (222). The interior chamber (30) between the unloaded piezoresistive resistor (402, 404, 406, 408) and the second region (202) of the second component (20) is of internal construction. The force sensor (1) according to any one of claims 1 to 17 , wherein the height (LH) is 0.2 mm to 3 mm and the inner width (LB) is at least 0.2 mm to 3 mm. The first component (10) is provided with a line opening (32) on the circumscribing edge surface, and the connection lines (52 to 54) pass through the line opening (32) to the inner chamber (30). Force sensor (1) according to any one of claims 1 to 18, which is passed. The inner chamber (30) has a passageway (31) in the first component (10), the passageway (31) being at least partially in an area outside the first component (10). 20. A force sensor (1) according to claim 19 , circling, wherein the connection lines (52-54) are laid at least partially in the passage (31). 21. Force sensor (1) according to claim 20 , wherein the passage (31) is completely circular and has a passage width (KB) and a passage height (KH) of between 0.2 mm and 3 mm. .. 22. A force sensor (1) according to any one of claims 1 to 21 , wherein the inner chamber (30) is at least partially filled with a polymer. A force sensor (1) including a first component (10) and a second component (20),
Between the first component (10) and the second component (20), at least one first piezoresistive resistor (401) and at least one second piezoresistive resistor (402). ) Is provided,
When an axial pressure load is applied to the force sensor (1) by the object (2), at least the first piezoresistive resistor (401) is loaded by a force (Fres) generated from the axial pressure load. Like this, and
The force sensor (1) is formed such that when the force sensor (1) is subjected to the axial pressure load, the second piezoresistive resistor (402) remains unloaded. Has been done,
The second part (20) comprises at least one protruding area (201) and a second area (202), the protruding area (201) facing the first part (10) and/or Alternatively, the surface facing the side opposite to the first component (10) projects in the axial direction (Ax) with respect to the second region (202), and the force sensor receives the axial pressure load. In this case, the force (Fres) resulting from the pressure load in the axial direction (Ax) is introduced only into one or a plurality of the piezoresistive resistors (401, 403, 405, 407) to which the load is applied,
Is formed with an opening (50) to accommodate the object (2) extending in the axial direction (Ax),
The loaded piezoresistive resistors (401, 403, 405, 407) are on a radius different from the radius of the unloaded piezoresistive resistors (402, 404, 406, 406). Sensor (1). A force sensor (1) including a first component (10) and a second component (20),
Between the first component (10) and the second component (20), at least one first piezoresistive resistor (401) and at least one second piezoresistive resistor (402). ) Is provided,
When an axial pressure load is applied to the force sensor (1) by the object (2), at least the first piezoresistive resistor (401) is loaded by a force (Fres) generated from the axial pressure load. Like this, and
The force sensor (1) is formed such that when the force sensor (1) is subjected to the axial pressure load, the second piezoresistive resistor (402) remains unloaded. Has been done,
The second part (20) comprises at least one protruding area (201) and a second area (202), the protruding area (201) facing the first part (10) and/or Alternatively, the surface facing the side opposite to the first component (10) projects in the axial direction (Ax) with respect to the second region (202), and the force sensor receives the axial pressure load. In this case, the force (Fres) resulting from the axial pressure load is introduced only into one or more of the load-bearing piezoresistive resistors (401, 403, 405, 407),
The second part (20) comprises thinned first and second spring regions (221, 222), the projecting region (201) in the radial direction of the first spring region (221). And a force sensor (1) provided between the second spring region (222) and the second spring region (222). A force sensor (1) including a first component (10) and a second component (20),
Between the first component (10) and the second component (20), at least one first piezoresistive resistor (401) and at least one second piezoresistive resistor (402). ) Is provided,
When an axial pressure load is applied to the force sensor (1) by the object (2), at least the first piezoresistive resistor (401) is loaded by a force (Fres) generated from the axial pressure load. Like this, and
The force sensor (1) is formed such that when the force sensor (1) is subjected to the axial pressure load, the second piezoresistive resistor (402) remains unloaded. Has been done,
The second part (20) comprises at least one protruding area (201) and a second area (202), the protruding area (201) facing the first part (10) and/or Alternatively, the surface facing the side opposite to the first part (10) projects in the axial direction (Ax) with respect to the second region (202), and the force sensor receives the axial pressure load. In this case, the force (Fres) resulting from the axial pressure load is introduced only into one or more of the loaded piezoresistive resistors (401, 403, 405, 407),
The first part (10) is provided with a line opening (32) on the circumferential edge surface, and the connection lines (52 to 54) pass through the line opening (32) and the first part ( A force sensor (1) that is passed through an inner chamber (30) between 10) and the second part (20). A measuring system (4) comprising a force sensor (1) according to any one of claims 1 to 25 and evaluation electronics (5),
The evaluation electronics (5) are suitable for evaluating the measurement signal of the force sensor (1) and for producing an evaluation,
The evaluation electronics (5) is furthermore suitable for sending a message containing said evaluation to a message receiver (4), for example using a network infrastructure and/or a message bus. 27. The measurement system according to claim 26 , further comprising an energy store (6), the evaluation electronics (5) being able to operate autonomously by the energy stored in the energy store (6). (4). It further comprises an energy store (6), said evaluation electronics (5) charging said energy store (6) with available energy, for example from a solar cell, a wind power generator or by energy harvesting. Measuring system (4) according to claim 26 , which is particularly suitable.

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