CN207148228U - A kind of MEMS electric-field sensors of insulation and sealing structure - Google Patents
A kind of MEMS electric-field sensors of insulation and sealing structure Download PDFInfo
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- CN207148228U CN207148228U CN201720830018.3U CN201720830018U CN207148228U CN 207148228 U CN207148228 U CN 207148228U CN 201720830018 U CN201720830018 U CN 201720830018U CN 207148228 U CN207148228 U CN 207148228U
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Abstract
A kind of MEMS electric-field sensors of insulation and sealing structure, including：Insulated enclosure shell, it is cavity structure that it is internal；And MEMS electric field measurement modules, it is arranged in the cavity structure, for detecting external electrical field.
Description
Technical field
It the utility model is related to sensor technical field, and in particular to a kind of MEMS electric field sensings of insulation and sealing structure
Device.
Background technology
Atmospheric electric field monitors has important answer in fields such as Aero-Space, meteorology, electric power, petrochemical industries with Lightning Warning
Use demand.Aircraft may be naturally struck by lightning or be induced during launching and be launch aed surprise attack, and cause it directly to damage or indirectly
Damage.The mankind are since solar-system operation is carried out, and there occurs the major accident of multiple thunderbolt aircraft, loss are huge in succession.Thunder
Hit and endangered seriously to caused by power network, including line flashover, lightning stroke trip, power transmission and transforming equipment failure and circuit unplanned outage
Deng directly affecting the safe operation and normal power supply behavior of power network.Petroleum chemical enterprise needs to store in process of production, using substantial amounts of
Combustible material, inflammable gas, dust are easily produced, once meeting with thunderbolt, great economic loss and casualties may be caused.
Therefore, by being monitored and analyzed to changes such as atmospheric electric field intensity size, polarity, the air to lightning risk may be caused
Electric field change is identified, early warning is carried out before disaster arriving, and lightning protection mitigation work is had very important significance.
The electrostatic field sensor having been commercialized both at home and abroad substantially uses traditional mechanical manufacturing technology, exists easy to wear
Mechanical part, also there are some problems in volume, power consumption and other performance etc., can not extensive use.
Utility model content
In view of above-mentioned technical problem, in order to overcome the above-mentioned deficiencies of the prior art, the utility model proposes one kind to insulate
The MEMS electric-field sensors of sealing structure.
According to one side of the present utility model, there is provided a kind of MEMS electric-field sensors of insulation and sealing structure, including：Absolutely
Edge sealing shell, it is cavity structure that it is internal；And MEMS electric field measurement modules, it is arranged in the cavity structure, for visiting
Survey external electrical field.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, the MEMS electric field measurements module includes：
MEMS electric field-sensitive chips, detection external electrical field produce sensor current signal；And driving testing circuit unit, for driving
MEMS electric field-sensitives chip operation and the resolving for detecting the tested electric field information of sensor current signal realization of its output.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, it is at the top of the encapsulation of MEMS electric field-sensitive chips
Metal cover board, the MEMS electric field measurements module also include metal detection pole plate, metal detection pole plate and metal cover board electricity
Connection.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, the insulation crust includes, and upper shell is with
Housing, the junction of the upper shell and lower house are sealed using fluid sealant and/or sealing ring, form the cavity structure of sealing.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, it is characterised in that the lower house bottom is set
Fixed column is put, the fixed column fixes the MEMS electric field measurement modules that support is contained in the cavity structure.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, at least one in the upper shell and lower house
Individual inner surface metal cladding, the metal level electrically connect with the metal detection pole plate or metal cover board.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, humiture is additionally provided with the cavity structure
Monitoring and controlling unit, for feeding back and/or adjusting the temperature around MEMS electric field measurement modules and monitor wet in cavity structure
Degree change.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, the temperature-humidity monitoring control unit includes：
Temperature sensor；Humidity sensor；A/D converter, and the temperature sensor and humidity sensor, for the mould that will be detected
Intend signal and be converted to data signal；Central processing unit, receive A/D converter send data signal, and send control signal and/
Or alarm signal；Temperature-adjusting device, the temperature in cavity structure is adjusted based on the control signal；And alarm dress
Put, the sealing state of MEMS electric-field sensors is reminded based on the alarm signal.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, the temperature-adjusting device includes heating and filled
Put.
According to a kind of MEMS electric-field sensors of embodiment of the utility model, through hole is provided with the lower house, is used for
The electric wire to MEMS electric field measurements module for power supply or signal interaction is worn, the through hole is sealed after the electric wire is worn.
It can be seen from the above technical proposal that the utility model has the advantages that：
Using the MEMS electric field-sensitive chip technologies of low-power consumption, no motor mechanical part easy to wear, power consumption is reduced, easily
Batch production, and improve the reliability of product.
Chip package cover plate electrically connects metal detection pole plate, increases electric field induction area, improves the sensitive of sensor
Degree.
Designed using temperature control, it is suppressed that the temperature drift of sensor, improve zero stability.
Using design of Sealing Structure, influence of the ambient humidity to MEMS electric field-sensitive chip packages is avoided, improves electricity
The degree of accuracy of field detection and long-time stability.
Designed using humidity detection, monitor the sealing state of MEMS electric-field sensors, improve electric field detecting data can
By property.
Brief description of the drawings
Fig. 1 is a kind of section view of the MEMS electric-field sensor structures of insulation and sealing structure of the embodiment of the utility model one
Figure；
Fig. 2 is the sectional view of insulation crust in Fig. 1；
Fig. 3 is the sectional view of the insulation crust upper shell of insulation and sealing structure MEMS electric-field sensors in an embodiment；
Fig. 4 is the sectional view of the insulation crust lower house of insulation and sealing structure MEMS electric-field sensors in an embodiment；
Fig. 5 is the temperature-humidity monitoring control of the insulation and sealing structure MEMS electric-field sensors in another embodiment of the utility model
The structured flowchart of unit processed.
Embodiment
The some embodiments of the utility model will be done with reference to appended accompanying drawing in rear and more comprehensively describe to property, some of but simultaneously
Not all embodiment will be illustrated.In fact, various embodiments of the present utility model can be realized in many different forms, without
Embodiments set forth herein should be construed as limited to；Relatively, there is provided these embodiments cause the utility model to meet to be applicable
Legal requirement.
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with specific embodiment, and
Referring to the drawings, the utility model is further described.
The embodiment of the utility model one provides a kind of MEMS electric-field sensors of insulation and sealing structure, and Fig. 1 is that this practicality is new
The sectional view of the MEMS electric-field sensor structures of a kind of insulation and sealing structure of the embodiment of type one, as shown in figure 1, edge sealing structure
It is cavity structure that MEMS electric-field sensors, which include its inside of insulation crust 1,；And MEMS electric field measurement modules, it is arranged on the sky
In cavity configuration, for detecting external electrical field.
MEMS electric field measurements module includes MEMS electric field-sensitives chip 2 and driving testing circuit unit 3, MEMS electric field-sensitives
Chip 2 is used to detect external electrical field generation sensor current signal；Driving testing circuit unit 3 drives MEMS electric field-sensitives chip 2
The sensor current signal for working and detecting its output realizes the resolving of tested electric field information.As shown in figure 1, MEMS electric field-sensitive cores
Piece 2 and driving testing circuit unit 3, which stack, to be set, and both can also use other arrangement modes in other embodiments, than
As horizontally disposed or be arranged side by side.
MEMS electric field-sensitives chip 2 detects external electrical field by electric charge induction principle, and its pedestal encapsulated is insulating materials,
Top is metal cover board；MEMS electric field measurements module can also include metal detection pole plate 4, and it is used for the spirit for increasing electric field detecting
Sensitivity, punched in the center of metal detection pole plate 4 or non-central location, be easy to be welded and fixed with the package metals cover plate,
Directly it is welded and fixed or is adhesively fixed alternatively, it is also possible to does not punch.The shape of metal detection pole plate 4 can be it is circular,
Rectangle, square, rule or irregular polygon, can also be arc, cuboid, square, it is spherical, other it is regular or
Irregular three-dimensional shape, or different faces and body then combine.
Fig. 2 is the sectional view of insulation crust in Fig. 1, and the shape of insulation crust 1 can be cylinder, elliptical cylinder-shape, rectangular
The bodily form, the square bodily form or other regular or irregular polygon bodily forms etc., as shown in Fig. 2 insulation crust 1, using insulating materials
It is made, including upper shell 11, lower house 12, the section of upper shell 11 is convex, naturally it is also possible to is flat-top shape or arcs of recesses
Deng, lower house 12 is open-topped cylinder, and MEMS electric field measurement modules are arranged in lower house 12, by upper shell 11 with
Housing 12 is fastened and connected, and the cavity structure of accommodating MEMS electric field measurement modules is formed, as shown in figure 1, the bottom of lower house 12 may be used also
To be provided with fixed column 13, fixed column 13 fixes the MEMS electric field measurement modules that support is contained in the cavity structure.Lower casing
Through hole is provided with body 12, for wearing the electric wire to MEMS electric field measurements module for power supply or signal interaction, the through hole can be set
Put on the bottom wall of lower house or side wall, be preferably provided at the center of bottom wall.The connecting sewing of upper shell 11 and lower house 12
At gap and lower house 12 penetrates the through hole spin coating fluid sealant of electric wire and realizes the sealings of insulation crust internal cavity structures, may be used also
Sealed with being realized in insulation crust internal cavity structures canning sealing glue, fluid sealant can be glass cement, silicon rubber, AB glue, ring
Oxygen glue etc..
Fig. 3 is the sectional view of insulation crust upper shell in an embodiment, and Fig. 4 is insulation crust lower house in an embodiment
Sectional view, as Fig. 3, the inner surface of upper shell 11 at least a portion electroplate the first metal layer 111, as shown in figure 4, in lower house 12
At least a portion plating second metal layer 121 on surface.The first metal layer 111 and/or second metal layer 121 and metal detection pole
Plate 4 or metal cover board electrical connection, further increase the sensitivity of electric field detecting.
In another embodiment of the utility model, as shown in figure 1, being additionally provided with temperature in cavity structure in insulation crust 1
Humidity detection control unit 5, for feeding back and/or adjusting the temperature around MEMS electric field measurement modules and monitor in cavity structure
Humidity change.
Fig. 5 is the structured flowchart of the temperature-humidity monitoring control unit in another embodiment of the utility model, as shown in figure 5,
Temperature-humidity monitoring control unit includes：Temperature sensor, humidity sensor, A/D converter, central processing unit (CPU), temperature are adjusted
Regulating device and warning device；Temperature sensor is used to monitor the temperature near MEMS electric field-sensitives chip 2；Humidity sensor is used
In the humidity change of monitoring insulation crust internal cavity, for evaluating the sealing property of insulation crust, A/D converter is used to gather
Temperature sensor and humidity data are simultaneously converted to data signal and are sent in CPU, and CPU confirms whether temperature is located at MEMS
The suitable operating temperature section of electric field measurement module, if it is not, then controlling temperature-adjusting device regulation MEMS electric field measurement modules
Environment temperature is to above-mentioned suitable operating temperature section.For example, when temperature sensor detects temperature and is less than certain value, CPU
Temperature dispensing device, such as heater is controlled to be heated to the MEMS electric field-sensitives chip of MEMS electric field measurement modules.CPU also sentences
Whether measured humidity of breaking changes within a certain range, if exceeding the scope, judges the sealing property failure of insulation crust,
Seal failure is provided by warning device to remind.
In one embodiment, the MEMS electric-field sensors of insulation and sealing structure may be also secured on metallic support and carry out greatly
Pneumoelectric field measurement.Metallic support can be grounded, can also be earth-free, and support can also be other material supports, such as wood, modeling
Material etc., can not also use support in other embodiments, be mounted directly on certain devices or be placed on progress electricity on ground
Field measurement.
The MEMS electric-field sensors of insulation and sealing structure in the utility model embodiment are in addition to measuring atmospheric electric field, also
It can be applied to Lightning Warning, industrial staticelectricity measures, in power network direct current or Alternating current field measurement and associated electrostatic field measurement device.
It should be noted that the shape and size of each part do not reflect actual size and ratio in accompanying drawing, and only illustrate this practicality new
The content of type embodiment.
The direction term mentioned in embodiment, such as " on ", " under ", "front", "rear", "left", "right" etc., only it is with reference to attached
The direction of figure, not it is used for limiting the scope of protection of the utility model.And above-described embodiment can be based on design and reliability
Consider, the collocation that is mixed with each other uses using or with other embodiment mix and match, i.e., the technical characteristic in different embodiments can be with
Freely form more embodiments.
It should be noted that in accompanying drawing or specification text, the implementation that does not illustrate or describe is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace.
Particular embodiments described above, the purpose of this utility model, technical scheme and beneficial effect are carried out to enter one
Step describes in detail, it should be understood that the foregoing is only specific embodiment of the utility model, is not limited to this reality
It is all within the spirit and principles of the utility model with new, any modification, equivalent substitution and improvements done etc., it all should include
Within the scope of protection of the utility model.
Claims (10)
- A kind of 1. MEMS electric-field sensors of insulation and sealing structure, it is characterised in that including：Insulated enclosure shell (1), it is cavity structure that it is internal；AndMEMS electric field measurement modules, are arranged in the cavity structure, for detecting external electrical field.
- 2. MEMS electric-field sensors according to claim 1, it is characterised in that the MEMS electric field measurements module includes：MEMS electric field-sensitives chip (2), detection external electrical field produce sensor current signal；AndDriving testing circuit unit (3), for driving MEMS electric field-sensitives chip (2) to work and detecting the induced-current of its output Signal realizes the resolving of tested electric field information.
- 3. MEMS electric-field sensors according to claim 2, it is characterised in that：The encapsulation of MEMS electric field-sensitives chip (2) Top is metal cover board, and the MEMS electric field measurements module also includes metal detection pole plate (4), metal detection pole plate (4) and institute State metal cover board electrical connection.
- 4. according to any described MEMS electric-field sensors in claim 1-3, it is characterised in that insulation crust (1) bag Include, upper shell (11) and lower house (12), the junction of the upper shell (11) and lower house (12) is using fluid sealant and/or close Seal seals, and forms the cavity structure of sealing.
- 5. MEMS electric-field sensors according to claim 4, it is characterised in that lower house (12) bottom, which is set, to be fixed Post (13), the fixed support of the fixed column (13) are contained in the MEMS electric field measurement modules in the cavity structure.
- 6. MEMS electric-field sensors according to claim 4, it is characterised in that the upper shell (11) and lower house (12) In at least one inner surface metal cladding, the metal level can be electrically connected with the metal detection pole plate (4) or metal cover board Connect.
- 7. MEMS electric-field sensors according to claim 4, it is characterised in that be additionally provided with the cavity structure warm and humid Monitoring and controlling unit (5) is spent, for feeding back and/or adjusting the temperature around MEMS electric field measurement modules and monitor in cavity structure Humidity change.
- 8. MEMS electric-field sensors according to claim 7, it is characterised in that the temperature-humidity monitoring control unit bag Include：Temperature sensor；Humidity sensor；A/D converter, and the temperature sensor and humidity sensor, for the analog signal detected to be converted into digital letter Number；Central processing unit, the data signal that A/D converter is sent is received, and send control signal and/or alarm signal；Temperature-adjusting device, the temperature in cavity structure is adjusted based on the control signal；AndWarning device, the sealing state of MEMS electric-field sensors is reminded based on the alarm signal.
- 9. MEMS electric-field sensors according to claim 8, it is characterised in that the temperature-adjusting device includes heating and filled Put.
- 10. MEMS electric-field sensors according to claim 4, it is characterised in that be provided with the lower house (12) logical Hole, for wearing the electric wire to MEMS electric field measurements module for power supply or signal interaction, the through hole is sealed after the electric wire is worn.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2017206225633 | 2017-05-31 | ||
| CN201720622563 | 2017-05-31 |
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| Publication Number | Publication Date |
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| CN207148228U true CN207148228U (en) | 2018-03-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107228989A (en) * | 2017-05-31 | 2017-10-03 | 北京中科飞龙传感技术有限责任公司 | A kind of MEMS electric-field sensors of insulation and sealing structure |
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2017
- 2017-07-10 CN CN201720830018.3U patent/CN207148228U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107228989A (en) * | 2017-05-31 | 2017-10-03 | 北京中科飞龙传感技术有限责任公司 | A kind of MEMS electric-field sensors of insulation and sealing structure |
| CN107228989B (en) * | 2017-05-31 | 2024-05-03 | 北京中科飞龙传感技术有限责任公司 | MEMS electric field sensor with insulating sealing structure |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200409 Address after: 330000 no.428, aixihu 4th Road, Nanchang high tech Industrial Development Zone, Nanchang City, Jiangxi Province (factory building) Patentee after: Nanchang Zhongke Feilong Sensor Technology Co., Ltd Address before: 100083 NO.201, building C, Zhizao street, Zhongguancun, No.45, Chengfu Road, Haidian District, Beijing Patentee before: Beijing Tflying Transducer Technology Co.,Ltd. |
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| TR01 | Transfer of patent right |