JP6724265B1 - ナノワイヤ付きフィルム及びナノワイヤの製造方法 - Google Patents
ナノワイヤ付きフィルム及びナノワイヤの製造方法 Download PDFInfo
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- JP6724265B1 JP6724265B1 JP2020001840A JP2020001840A JP6724265B1 JP 6724265 B1 JP6724265 B1 JP 6724265B1 JP 2020001840 A JP2020001840 A JP 2020001840A JP 2020001840 A JP2020001840 A JP 2020001840A JP 6724265 B1 JP6724265 B1 JP 6724265B1
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- nanowire
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- 239000002070 nanowire Substances 0.000 title claims abstract description 91
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 35
- 229920006038 crystalline resin Polymers 0.000 claims abstract description 13
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 8
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 56
- 229920001721 polyimide Polymers 0.000 claims description 42
- 239000011787 zinc oxide Substances 0.000 claims description 27
- 238000001027 hydrothermal synthesis Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 19
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 238000004381 surface treatment Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 6
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 6
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 3
- 239000004312 hexamethylene tetramine Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000851 scanning transmission electron micrograph Methods 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- -1 for example Polymers 0.000 description 1
- 238000010335 hydrothermal treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
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- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
本発明に係るナノワイヤの製造方法は、結晶性樹脂からなる基材を用意する工程(a)と、基材の表面に、微細な凹凸構造を形成する工程(b)と、基材を水熱合成溶液に浸漬させて、金属酸化物からなるナノワイヤを、基材の表面に形成した凹凸構造の上に直接成長させる工程(c)とを含む。
10A 微細な凹凸構造
20 ZnOナノワイヤ
30 容器
40 水熱合成溶液
50 治具
Claims (7)
- 結晶性樹脂からなる基材と、
前記基材上に直接成長した金属酸化物からなるナノワイヤと
を備えたナノワイヤ付きフィルムであって、
前記基材の表面に、大きさが2〜100nmで、深さが5〜30nmの微細な凹凸構造が形成され、該凹凸構造から前記ナノワイヤが直接成長している、ナノワイヤ付きフィルム。 - 前記結晶性樹脂は、ポリイミドまたはポリエステルからなる、請求項1に記載のナノワイヤ付きフィルム。
- 前記ナノワイヤは、酸化亜鉛または酸化チタンからなる、請求項1または2に記載のナノワイヤ付きフィルム。
- 結晶性樹脂からなる基材を用意する工程(a)と、
前記基材の表面に、大きさが2〜100nmで、深さが5〜30nmの微細な凹凸構造を形成する工程(b)と、
前記基材を水熱合成溶液に浸漬させて、金属酸化物からなるナノワイヤを、前記基材の表面に形成した前記凹凸構造の上に直接成長させる工程(c)と
を含むナノワイヤの製造方法。 - 前記工程(b)は、前記基材を表面処理する工程からなる、請求項4に記載のナノワイヤの製造方法。
- 前記結晶性樹脂は、ポリイミドまたはポリエステルからなる、請求項4または5に記載のナノワイヤの製造方法。
- 前記ナノワイヤは、酸化亜鉛または酸化チタンからなる、請求項4〜6の何れかに記載のナノワイヤの製造方法。
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JP2020001840A JP6724265B1 (ja) | 2020-01-09 | 2020-01-09 | ナノワイヤ付きフィルム及びナノワイヤの製造方法 |
US17/791,267 US20230349047A1 (en) | 2020-01-09 | 2020-12-14 | Nanowire-equipped film and nanowire manufacturing method |
PCT/JP2020/046475 WO2021140835A1 (ja) | 2020-01-09 | 2020-12-14 | ナノワイヤ付きフィルム及びナノワイヤの製造方法 |
CN202080092107.7A CN114901588A (zh) | 2020-01-09 | 2020-12-14 | 带纳米线的膜及纳米线的制造方法 |
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JP2020001840A JP6724265B1 (ja) | 2020-01-09 | 2020-01-09 | ナノワイヤ付きフィルム及びナノワイヤの製造方法 |
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US8025960B2 (en) * | 2004-02-02 | 2011-09-27 | Nanosys, Inc. | Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production |
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