JP6713448B2 - Door device and glove box - Google Patents

Description

The present invention relates to a door device and a glove box, and more particularly to a door device and a glove box that can be easily opened and closed and that can stably seal the inside of a chamber.

Generally, a glove box has a space inside and an opening is formed on one side. Further, the glove box is provided with a door formed according to the shape of the opening so that the opening can be opened and closed. For example, if the inside of the glove box is filled with N ₂ gas, outside air or flows into the glove box, N ₂ gas inside the glove box in order to prevent or to flow out, Grove door The inside of the box can be sealed.

Conventionally, the door was crimped to the box using a clamp unit. That is, the door is located above the opening of the glove box, and the plurality of clamp units urge the door toward the box. For this reason, the opening of the box is covered with the door, the gap between the box and the door is eliminated, and the inside of the box is sealed.

However, about 100 clamp units are required to crimp the door to the box to eliminate the gap, and even if a small door is crimped, about 40 to 50 clamp units are required. Therefore, when at least a part of the plurality of clamp units does not operate normally, a gap may occur between the door and the box. Note that it is necessary to operate all of the plurality of clamp units to open and close the door, and thus it may take a long time to open and close the door. In addition, since the clamp unit gives a shock to the door every time the door is opened and closed, the door is easily damaged.

Korean Published Patent No. 2011-0127586

An object of the present invention is to provide a door device and a glove box that can be easily opened and closed and that can stably seal the inside of the chamber.

Another object of the present invention is to provide a door device and a glove box that facilitate maintenance of equipment.

A door device according to the present invention devised to achieve the above object is a door device that has an internal space and is arranged in a chamber having an opening formed on one surface thereof. A cover unit for covering, a first magnetic unit arranged in the cover unit or the chamber, and a first magnetic unit arranged in the chamber or the cover unit so as to face the first magnetic unit, and the polarity can be changed. , And a second magnetic unit that is detachably coupled to the first magnetic unit.

Preferably, the first magnetic unit is fixed, and the second magnetic unit has a changeable position of polarity.

Further, preferably, the second magnetic unit includes a support member arranged in the chamber or the cover unit and a magnet member rotatably arranged inside the support member.

Furthermore, preferably, the second magnetic unit includes an electromagnet and a power supply that supplies a current to the electromagnet.

Furthermore, preferably, the door device further includes a position sensing unit that senses the position of the cover unit, and a control unit that is connected to the position sensing unit and controls the operation of the power supply unit.

Furthermore, preferably, the first magnetic unit includes at least one of a metal member and a magnet.

Still further, preferably, the door device has one of the first magnetic unit and the second magnetic unit so as to reduce an impact between the first magnetic unit and the second magnetic unit. It further comprises a buffer unit disposed in at least one of them.

Still further, preferably, the chamber includes a first flange portion that surrounds a peripheral edge of the opening portion and a second flange portion that surrounds a peripheral edge of the first flange portion, and the cover unit includes the opening portion. A first cover for covering and a second cover which is connected to the first cover and covers a gap between the first cover and the first flange portion and is capable of contacting with the second flange portion. Prepare

Furthermore, preferably, the door device further includes a sealing unit that is disposed in the cover unit so as to block a gap between the chamber and the cover unit and that can contact the chamber.

Furthermore, preferably, the sealing unit is at least one of a first sealing member arranged on the first cover and a second sealing member arranged on the second cover. With one side.

A glove box according to the present invention devised to achieve the above object has a chamber having an internal space and an opening formed on one side thereof, and an inert gas is supplied to the inside of the chamber. It is characterized by comprising a gas supply device arranged and a door arranged so as to open and close the opening by a magnetic force.

Preferably, the door includes a cover unit that covers the opening, a first magnetic unit disposed in the cover unit or the chamber, and the chamber or the cover unit so as to face the first magnetic unit. And a second magnetic unit in which the polarity of the portion facing the first magnetic unit can be changed.

Further, preferably, a plurality of the first magnetic units and the second magnetic units are provided and are arranged along the peripheral edge of the opening.

Further, preferably, the door is disposed in the cover unit so as to be able to contact the chamber, and is formed along the peripheral edge of the opening so that the first magnetic unit and the second magnetic unit are formed. It further comprises a sealing unit arranged at at least one of the inside and the outside of the peripheral edge.

Furthermore, preferably, at least a part of the sealing unit is projected to the outside of the cover unit, and the door further comprises a biasing unit arranged so as to bring the sealing unit into close contact with the chamber. Prepare

Furthermore, preferably, the urging unit includes a first magnetic body arranged in the cover unit and a second magnetic body arranged in the chamber, and the sealing unit includes the first magnetic body. Is interposed between the magnetic body and the second magnetic body.

Furthermore, preferably, the glove box is an oxygen measuring device arranged to measure the oxygen concentration inside the chamber, and the polarity of the second magnetic unit based on the measurement result of the oxygen measuring device. And a controller that is changeable.

Furthermore, preferably, the glove box further includes an oxygen supplier arranged to supply an oxygen-containing gas into the chamber.

Furthermore, preferably, the glove box has a gate provided in the chamber, the gate being arranged to open and close the gate, and the glove box being arranged inside the chamber so as to convey the substrate through the gate. And a transporter provided.

According to the embodiment of the present invention, the magnetic unit whose polarity direction can be changed is provided in the cover unit that opens and closes the chamber or the opening of the chamber. Therefore, the polarity of the magnetic unit can be changed to attach the cover unit to the chamber or remove the cover unit from the chamber. Therefore, the opening of the box can be opened and closed quickly and easily by controlling the operation of the magnetic unit.

In addition, the chamber and the cover unit may be brought into close contact with each other by the magnetic force of the magnetic unit to block the gap between the chamber and the cover unit. Therefore, it is possible to suppress or prevent the gas inside the chamber from flowing out and the gas outside the chamber from flowing into the chamber.

Furthermore, the impact applied to the cover unit can be reduced more than when using the clamp unit. Therefore, the life of the cover unit can be extended and the maintenance of the equipment becomes easy.

FIG. 1 is a perspective view conceptually showing the outer shape of a glove box according to the embodiment of the present invention. 2A and 2B are cross-sectional views conceptually showing the outer shape of the glove box according to the embodiment of the present invention. 3(a) and 3(b) are diagrams showing the operation structure of the first magnetic unit and the second magnetic unit according to the embodiment of the present invention. 4(a) to 4(c) are views showing the structure of the door device according to the embodiment of the present invention. 5(a) and 5(b) are diagrams showing the operating structure of the urging unit according to the embodiment of the present invention. FIG. 6 is a diagram showing a structure of a door device according to another embodiment of the present invention. FIG. 7 is a diagram showing the structure of the glove box according to the embodiment of the present invention. FIG. 8 is a plan view showing the structure of the glove box according to the embodiment of the present invention.

Hereinafter, a door device and a glove box according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but is embodied in various different forms, and these embodiments merely complete the disclosure of the present invention, and It is provided to inform those with knowledge of the scope of the invention. In describing the door device and the glove box according to the embodiment of the present invention, the same reference numerals are given to the same components, and the door device and the glove box according to the embodiment of the present invention will be described in detail. Therefore, the drawings may be exaggerated, and the same reference numerals indicate the same components in the drawings.

FIG. 1 is a perspective view conceptually showing the outer shape of a glove box according to the embodiment of the present invention. The glove box according to the embodiment of the present invention will be described below.

Referring to FIG. 1, the glove box 1000 includes a chamber 200, a gas supplier, and a door. The glove box 1000 may further include a gas exhauster, an oxygen measuring device, a controller, and a carrier.

The chamber 200 may be formed in a rectangular tube shape and has a space inside. At least a part of one surface (for example, the upper surface) of the chamber 200 may be opened to form an opening. The opening may be formed in a rectangular shape following the planar shape of the chamber 200.

Further, the chamber 200 may include a first flange portion 210 that surrounds the peripheral edge of the opening and a second flange portion 220 that surrounds the outer peripheral edge of the first flange portion 210. The vertical positions of the first flange 210 and the second flange 220 may be different from each other, and a difference in level may occur due to the difference in the vertical positions of the first flange 210 and the second flange 220. It may be formed. For example, the first flange 210 may be located at a higher position than the second flange 220. That is, the first flange 210 and the second flange 220 may have different heights. On the contrary, the second collar portion 220 may be located at a higher position than the first collar portion 210.

A plurality of entrances and exits through which the substrate can enter and exit may be formed on the side surface of the chamber 200. That is, the doorway may be formed on a surface different from the surface on which the opening is formed. The chamber 200 may be internally communicated with another device that processes a substrate through the doorway. At this time, a plurality of gates may be provided at the doorways to open and close each doorway. For example, the gate may be a gate valve. Therefore, by controlling the operation of the gate, the inside of the chamber 200 and the inside of another device can be connected or disconnected. However, the structure and shape of the chamber 200 are not limited to this, and can be variously modified.

The door serves to open and close the opening of the chamber 200. The door may open and close the opening of the chamber 200 by magnetic force. Therefore, the door can suppress or prevent the gas inside the chamber 200 from flowing out and the gas outside from flowing into the chamber 200.

FIG. 2 is a sectional view conceptually showing the outer shape of the glove box according to the embodiment of the present invention, and FIG. 3 shows the first magnetic unit and the second magnetic unit according to the embodiment of the present invention. It is a figure which shows an actuation structure. Hereinafter, the structure of the door device according to the embodiment of the present invention will be described in detail.

Referring to FIGS. 2 and 3, the door device 100 is a door device that has an internal space and is arranged in a chamber 200 having an opening formed on one surface. The door device 100 includes a cover unit 110, a first magnetic unit 120, and a second magnetic unit 150. The door device 100 may further include a hinge unit 130, a sealing unit 140, a position sensing unit 170, and a buffer unit (not shown). At this time, door device 100 may be a door provided in glove box 1000 according to the embodiment of the present invention.

The cover unit 110 plays a role of opening and closing the opening of the chamber 200. The cover unit 110 includes a first cover 111 that covers the opening of the chamber 200, and a gap between the first cover 111 and the first flange 210 that is connected to the first cover 111 and covers the first cover 111. It may be provided with the 2nd collar part 220 and the 2nd cover 112 which can contact.

The first cover 111 serves to cover the opening of the chamber 200. The first cover 111 may be formed in a rectangular plate shape following the shape of the opening of the chamber 200. The area of the first cover 111 may be formed larger than the area of the opening. Therefore, when the first cover 111 is positioned above the opening, the first cover 111 covers the opening of the chamber 200 and the opening is closed. However, the shape of the first cover 111 is not limited to this and can be variously changed.

The second cover 112 plays a role of covering a gap between the first cover 111 and the first flange portion 210. The second cover 112 may be formed in a rectangular ring shape following the shape of the peripheral edge of the first cover 111 or the first collar portion 210, and is connected to the lower portion of the first cover 111. Good. That is, the second cover 112 may be connected to the first cover 111 and project downward, or may surround the periphery of the opening.

Further, the vertical length of the second cover 112 may be equal to or longer than the vertical length of the first collar portion 210, and the lower surface of the second cover 112 may have a lower surface of the second collar portion 220. It may be in contact with the upper surface. Therefore, if the second cover 112 is placed on the second flange portion 220, the first cover 111 can cover the opening of the chamber 200, and the first cover 111 and the first flange portion can be covered. The second cover 112 may cover the gap between the first cover 112 and the second cover 112. However, the structure and shape of the second cover 112 are not limited to this, and can be variously modified.

At this time, a handle (not shown) may be provided on the cover unit 110. For example, the handle may be arranged on at least one of the upper surface of the first cover 111, the upper surface of the second cover 112, and the side surface of the second cover 112. In that case, an operator can open and close the cover unit 110 using the handle.

Further, the cover unit 110 may be provided with a static electricity removing member (not shown). The static electricity removing member may be an electric wire formed of conductive fiber, one end of which is connected to at least one of the first cover 111, the second cover 112, and the handle, and the other end of which is connected. May be grounded. According to this, it is possible to prevent static electricity from being generated when an operator opens and closes the cover unit 110. However, the structure and shape of the cover unit 110 are not limited to this, and can be variously modified.

As shown in FIG. 2, the hinge unit 130 serves to rotatably connect the cover unit 110 to the chamber 200. The hinge unit 130 includes a plate 131, a first hinge 132 that rotatably connects one side of the cover unit 110 and the plate 131, and a second hinge 132 that rotatably connects the other side of the chamber 200 and the plate 131. And a hinge 133.

The plate 131 may be formed in a rectangular plate shape, and protrusions may be formed on the upper side and the lower side. One or a plurality of plates 131 may be provided. The plate 131 may be extended in the extension direction of the first cover 111 or in a direction intersecting the extension direction, or a plurality of the plates 131 may be arranged side by side. However, the structure and shape of the plate 131 are not limited to this, and can be variously modified.

The first hinge 132 may be rotatably connected to the plate 131 and fixed to the second cover 112. For example, the first hinge 132 may include a rotation shaft that rotatably penetrates the upper protrusion of the plate 131. The rotation shaft may be attached to the side surface of the second cover 112. As a result, the cover unit 110 can rotate in the vertical direction about the first hinge 132. Therefore, when the cover unit 110 is rotated upward, the opening of the chamber 200 is opened, and when the cover unit 110 is rotated downward, the opening of the chamber 200 is covered and closed by the cover unit 110. It However, the structure of the first hinge 132 is not limited to this and can be variously modified.

The second hinge 133 may be rotatably connected to the plate 131 and fixed to the chamber 200. For example, the second hinge 133 may include a rotation shaft that rotatably penetrates the lower protrusion of the plate 131. The rotation shaft may be attached to the side surface of the chamber 200. As a result, the plate 131 can rotate in the vertical direction about the second hinge 133. Therefore, when the plate 131 is rotated, the cover unit 110 can be rotated together. However, the structure of the second hinge 133 is not limited to this and can be variously modified.

As described above, the cover unit 110 and the chamber 200 may be connected by the hinge unit 130 having a double hinge structure. As a result, the cover unit 110 can be double rotated by the hinge unit 130, so that when the cover unit 110 is opened and closed, it is possible to suppress or prevent interference with the flange portion of the chamber 200. Therefore, the cover unit 110 is easily opened and closed, and it is possible to suppress or prevent the cover unit 110 and the flange portion of the chamber 200 from colliding and being damaged. However, the structure of the hinge unit 130 is not limited to this, and can be variously modified.

The first magnetic unit 120 may be arranged in the cover unit 110 or the chamber 200. For example, the first magnetic unit 120 may be arranged on the lower surface of the first cover 111. The first magnetic unit 120 may include at least one of a metal member containing an iron component and a magnet (or a permanent magnet). Therefore, the first magnetic unit 120 is coupled to or separated from the second magnetic unit 150 by a magnetic force.

In addition, the first magnetic unit 120 may be formed in a rectangular ring shape following the shape of the peripheral edge of the opening, or may be formed in a plurality of plate shapes and arranged along the peripheral edge of the opening. Good. When the first magnetic unit 120 is a magnet, the positions of the polarities of the first magnetic unit 120, that is, the positions of the N pole and the S pole are fixed. However, the structure, shape, and arrangement position of the first magnetic unit 120 are not limited to this, and can be variously changed.

The second magnetic unit 150 may be arranged in the chamber 200 or the cover unit 110 so as to face the first magnetic unit 120. That is, when the first magnetic unit 120 is arranged in the cover unit 110, the second magnetic unit 150 is arranged in the chamber 200, and when the first magnetic unit 120 is arranged in the chamber 200, The second magnetic unit 150 may be arranged in the cover unit 110. For example, the second magnetic unit 150 may be disposed on the upper surface of the first flange portion 210 so as to face the first magnetic unit 120, and the second magnetic unit 150 may be disposed by the magnetic force. It may be detachably connected.

Further, the second magnetic unit 150 may include a support member 151 provided in the chamber 200 or the cover unit 110, and a magnet member 152 rotatably provided inside the support member 151. The second magnetic unit 150 can change the positions of the north pole and the south pole. Therefore, the position of the polarity of the second magnetic unit 150 is changed to couple the second magnetic unit 150 to the first magnetic unit 120 or separate the first magnetic unit 120 from the second magnetic unit 150. You can

At this time, a plurality of first magnetic units 120 and second magnetic units 150 may be provided and arranged along the peripheral edge of the opening. When the length of the peripheral edge of the chamber 200 is larger than the length of the first magnetic unit 120 and the second magnetic unit 150, even if a plurality of the first magnetic unit 120 and the second magnetic unit 150 are provided. Good. Even if the first magnetic unit 120 (or the second magnetic unit 150) is separated from each other by the attractive force of the first magnetic unit 120 and the second magnetic unit 150, the cover unit 110 and the chamber 200 are in close contact with each other. Is cut off. Another member such as the hinge unit 130 may be interposed between the first magnetic unit 120 (or the second magnetic unit 150).

Further, the first magnetic unit 120 and the second magnetic unit 150 may not be arranged at the corners of the opening. That is, the first magnetic unit 120 and the second magnetic unit 150 do not have to be disposed at the places where the extension direction bends. Therefore, since the magnet member 151 provided in the second magnetic unit 150 can be extended only in one direction, it becomes easy to rotate the magnet member 151 to change the position of the polarity. However, the present invention is not limited to this, and the first magnetic unit 120 and the second magnetic unit 150 may be provided one by one and formed along the peripheral edge of the opening.

The support member 151 plays a role of supporting the magnet member 152. For example, the support member 151 may be provided on the upper surface of the first flange 210. The inside of the support member 151 may be formed in a hollow shape, or the magnet member 152 may be fitted into the inside of the support member 151 to rotate. One or more support members 151 are provided and arranged along the peripheral edge of the opening.

When the polarities of the magnet member 151 and the first magnetic unit 120 are different and an attractive force is exerted, the upper surface of the support member 151 contacts the lower surface of the first magnetic unit 120 and is coupled by the magnetic force. However, the structure, shape, and disposition position of the supporting member 151 are not limited to this, and can be variously changed.

The magnet member 152 may be a permanent magnet having a magnetic force. The magnet member 152 may be formed in a circular rod shape, or may be arranged inside the support member 151 and rotate. That is, the positions of the N pole and the S pole of the magnet member 152 may change due to the rotation. A plurality of magnet members 152 may be provided and arranged so as to surround the peripheral edge of the opening. However, the structure and shape of the magnet member 152 are not limited to this, and can be variously modified.

Further, a lever (not shown) may be arranged on the magnet member 152 so as to rotate the magnet member 152. The lever may be formed in a rod shape and may rotate together with the magnet member 152. The lever may extend in a direction intersecting the extension direction of the magnet member 152, one end of which may be connected to the magnet member 152, and the other end of which may penetrate the cover unit 110. At this time, the cover unit 110 may be formed with a through hole (not shown) through which the lever can penetrate. The through hole forms a path through which the lever can rotate in the vertical direction. Therefore, when the other end of the lever is turned up and down about one end by the worker, the magnet member 152 becomes rotatable, and the polarity position changes while the magnet member 152 rotates. Therefore, the cover unit 110 and the chamber 200 may be combined or separated.

Alternatively, the magnet member 152 may be connected to a driver (not shown). The driver may be a motor or a rotary cylinder. The driver may be arranged in the chamber 200 or the cover unit 110. The driver may be connected to the rotation center axis of the magnet member 152. Therefore, the magnet member 152 can be rotated about the central axis by the operation of the driver. As a result, the positions of the S pole and the N pole of the magnet member 152 can be changed. At this time, one or more drivers may be provided and connected to at least one of the magnet members 152 provided in the plurality of second magnetic units 150. The controller 500 may control the operation of the driver to selectively open and close the opening 200 of the chamber. However, the method of rotating the magnet member 152 is not limited to this, and can be variously modified.

For example, when the first magnetic unit 120 is a metal member, the magnet member 152 may rotate at an angle of 80 to 120°. For example, when the north pole and the south pole of the magnet member 152 are kept horizontal, the magnet member 152 may be coupled to the first magnetic unit 120. At this time, since the pressure inside the chamber 200 is higher than the pressure outside, when the magnet member 152 is rotated, the coupling force between the first magnetic unit 120 and the magnet member 152 becomes weak, and the inside of the chamber 200 is weakened. The pressure causes the cover unit 110 to move upward. Therefore, the opening of the chamber 200 can be opened by rotating the magnet member 152.

Alternatively, when the first magnetic unit 120 is a permanent magnet, the first magnetic unit 120 is fixed and the position of the polarity of the first magnetic unit 120 does not change. The second magnetic unit 150 can rotate at an angle of 180° or more. Therefore, when the polarity of the upper surface of the second magnetic unit is made different from the polarity of the lower surface of the first magnetic unit 120 by rotating the second magnetic unit 150, the first magnetic unit 120 and the second magnetic unit 150 are rotated. The first magnetic unit 120 sticks to the second magnetic unit 150 due to the magnetic force of. Therefore, the cover unit 110 covers the opening of the chamber 200, and the inside of the chamber 200 can be sealed.

Conversely, when the second magnetic unit 150 is rotated to make the polarities of the facing portions of the first magnetic unit 120 and the second magnetic unit 150 the same, the first magnetic unit 120 and the second magnetic unit 150 become They will repel each other. Therefore, the cover unit 110 moves upward, and the opening of the chamber 200 can be opened. Therefore, the opening of the chamber 200 can be opened and closed by rotating the second magnetic unit 150.

The buffer unit (not shown) is at least one of the first magnetic unit 120 and the second magnetic unit 150 so as to reduce the impact between the first magnetic unit 120 and the second magnetic unit 150. It may be disposed on either side. The buffer unit may further protrude below the first magnetic unit 120, and may further protrude above the second magnetic unit 150. The buffer unit may be formed so as to surround the peripheral edge of the first magnetic unit 120 or the second magnetic unit 150. For example, when the buffer unit surrounds the peripheral edge of the first magnetic unit 120, the buffer unit may further protrude below the first magnetic unit 120, and may be elastically contracted or expanded. To do.

Therefore, when the facing portions of the first magnetic unit 120 and the second magnetic unit 150 have different polarities and attract each other, first, the buffer unit is provided on the upper surface of the first flange 210 or the second magnetic unit 150. After the upper surface is contacted and compressed, the first magnetic unit 120 and the second magnetic unit 150 can contact each other. Therefore, when the buffer unit is compressed, it is possible to suppress or prevent the first magnetic unit 120 and the second magnetic unit 150 from coming into contact and generating an impact. However, the structure, the shape, and the disposition position of the buffer unit are not limited to this, and can be variously modified.

FIG. 4 is a diagram showing the structure of the door device according to the embodiment of the present invention, and FIG. 5 is a diagram showing the operating structure of the biasing unit according to the embodiment of the present invention. Hereinafter, the sealing unit and the biasing unit according to the embodiment of the present invention will be described.

Referring to FIG. 4, the sealing unit 140 serves to block a gap between the chamber 200 and the cover unit 110. The sealing unit 140 may be formed along the peripheral edge of the opening and may be disposed inside or outside the peripheral edges of the first magnetic unit 120 and the second magnetic unit 150.

Further, the sealing unit 140 may be disposed in the cover unit 110 and at least a part thereof may protrude to the outside of the cover unit 110. At this time, the sealing unit 140 has elasticity and expands or contracts. Therefore, when the cover unit 110 is closed, the sealing unit 140 contacts the chamber 200 before the cover unit 110, and the cover unit 110 contacts the chamber 200 while the sealing unit 140 contracts. Therefore, the sealing unit 140 can reduce the impact between the cover unit 110 and the chamber 200, and can efficiently shut off the cover unit 110 and the chamber 200. The sealing unit 140 includes at least one of the first sealing member 141 provided on the first cover 111 and the second sealing member 142 provided on the second cover 112. May be

As shown in FIG. 4A, when only the first sealing member 141 is provided, the first sealing member 141 is provided at a position facing the first flange portion 210 of the first cover 111. Or may be in contact with the upper surface of the first flange 210. For example, a groove into which at least a part of the first cover 111 can be fitted may be formed in the lower portion of the first sealing member 141, and the first sealing member 141 may include the first cover 111. It may be fitted in the groove formed in the. The first sealing member 141 may play the role of an O-ring, and may block the gap between the first cover 111 and the first flange portion 210.

In addition, the first sealing member 141 may protrude below the lower surface of the first cover 111 and may have an elastic force. At this time, when the first magnetic unit 120 is disposed below the first cover 111, the first sealing member 141 may protrude below the lower surface of the first magnetic unit 120. Good. Therefore, if the first cover 111 is brought into close contact with the first flange portion 210, the first sealing member 141 becomes compressible between the first cover 111 and the first flange portion 210. .. Therefore, the first cover 111 can come into contact with the first flange portion 210. Alternatively, the first magnetic unit 120 can come into contact with the second magnetic unit 150 arranged in the first flange 210. The first sealing member 141 blocks all gaps between the first cover 111 and the first flange 210, and the inside of the chamber 200 can be hermetically sealed. However, the structure and position of the first sealing member 141 are not limited to this and can be variously changed.

As shown in FIG. 4B, when only the second sealing member 142 is provided, the second sealing member 142 is arranged at a position facing the second collar portion 220 of the second cover 112. It may be provided or may be in contact with the upper surface of the second flange portion 220. For example, a groove into which at least a part of the second cover 112 can be fitted may be formed in the lower portion of the second sealing member 142, and the second sealing member 142 may include the second cover 112. It may be fitted in the groove formed in the. The second sealing member 142 may play the role of an O-ring, and may block the gap between the second cover 112 and the second flange 220.

Further, the second sealing member 142 may protrude below the lower surface of the second cover 112 and may have an elastic force. Therefore, if the second cover 112 is brought into close contact with the second flange portion 220, the second sealing member 142 becomes compressible between the second cover 112 and the second flange portion 220. .. Therefore, the second cover 112 can come into contact with the second flange portion 220, and the second sealing member 142 blocks all gaps between the second cover 112 and the second flange portion 220. The inside of the chamber 200 can be sealed. However, the structure and position of the second sealing member 142 are not limited to this and can be variously changed.

As shown in FIG. 4C, both the first sealing member 141 and the second sealing member 142 may be provided. Therefore, the gap between the first cover 111 and the first flange portion 210 is primarily blocked by the first sealing member 141, and the second cover 112 and the second flange portion 220 are separated from each other. The gap between them can be secondarily blocked by the second sealing member 142. That is, it is possible to effectively prevent the inside of the chamber 200 from being doubly sealed so that the outside gas flows into the inside of the chamber 200 and the gas inside the chamber 200 flows out to the outside. However, the structure and constituent elements of the cover unit 110 are not limited to these, and various combinations are possible.

As shown in FIG. 5, the urging unit 190 urges the sealing unit 140 to be in close contact with the chamber 200. The urging unit 190 may include a first magnetic body 191 arranged in the cover unit 110 and a second magnetic body 192 arranged in the chamber 200.

The first magnetic body 191 may be arranged in the cover unit 110. For example, the first magnetic body 191 may be arranged in a groove into which the first sealing member 141 of the cover unit 110 can be fitted. The first magnetic body 191 may be a magnet having a magnetic force or an electromagnet. Alternatively, when the second magnetic body 192 is made of a material having a magnetic force, the first magnetic body 191 may be made of a metal having a magnet sticking property.

The second magnetic body 192 may be arranged in the chamber 200. The second magnetic body 192 may be arranged so as to face the sealing unit 140. In this case, when the cover unit 110 is closed, the sealing unit 140 is interposed between the first magnetic body 191 and the second magnetic body 192. That is, the first magnetic body 191, the sealing unit 140, and the second magnetic body 192 may be located on the same line in the vertical direction. The second magnetic body 192 may be a magnet having a magnetic force or an electromagnet. Alternatively, when the first magnetic body 191 is made of a material having a magnetic force, the second magnetic body 192 may be made of a metal having a magnet sticking property.

When the cover unit 110 is closed and the first magnetic body 191 and the second magnetic body 192 come close to each other, the first magnetic body 191 and the second magnetic body 192 are attracted to each other by a magnetic force. Therefore, the sealing unit 140 can be pressure-bonded between the first magnetic body 191 and the second magnetic body 192, and the cover unit 110 is stably closed in the chamber 200. The first magnetic unit 120 and the second magnetic unit 150 are stably attached to each other while the sealing unit 140 is pressure-bonded.

At this time, since the first magnetic body 191 and the second magnetic body 192 are separated from each other, the first magnetic unit 191 and the second magnetic unit 150 have a first force greater than a force generated between the first magnetic unit 120 and the second magnetic unit 150. The force generated between the magnetic body 191 and the second magnetic body 192 is smaller. Therefore, when a repulsive force is exerted between the first magnetic unit 120 and the second magnetic unit 150, the cover unit 110 can stably open the opening of the chamber 200. However, the method by which the biasing unit 190 biases the sealing unit 140 is not limited to this and can be variously modified.

FIG. 6 is a diagram showing a structure of a door device according to another embodiment of the present invention. The structure of the second magnetic unit 150 according to another embodiment of the present invention will be described below.

Referring to FIG. 6, the second magnetic unit 150 according to another embodiment of the present invention may include an electromagnet 155 and a power supply (not shown) that supplies power to the electromagnet 155.

The electromagnet 155 generates a magnetic force when power is supplied. Further, the electromagnet 155 changes its polarity depending on the direction of the supplied current. One or more electromagnets 155 may be arranged and arranged along the periphery of the opening. For example, the electromagnet 155 may be arranged on the upper surface of the first flange 210, and the upper surface of the electromagnet 155 is arranged so as to face the first magnetic unit 120 arranged on the lower surface of the first cover 111. May be. However, the arrangement position of the electromagnet 155 is not limited to this and can be variously changed.

The power supplier is connected to the electromagnet 155 to supply power to the electromagnet 155. Therefore, when the power supply device supplies power to the electromagnet 155, the electromagnet 155 has a magnetic force, and when the power supply is interrupted, the magnetic force of the electromagnet 155 disappears. That is, the power supply serves as a switch of the electromagnet 155. Therefore, when the cover unit 110 seals the chamber 200, power can be supplied to the electromagnet 155, and when opening the chamber 200, power supply to the electromagnet 155 can be interrupted. The power supply device may change the polarity position of the electromagnet 155 by changing the direction of the supplied current.

On the other hand, the first magnetic unit 120 may be a magnet. For example, the surface of the first magnetic unit 120 facing the electromagnet 155 may be the N pole. Therefore, if the polarity of the electromagnet 155 is changed so that the electromagnet 155 has a different polarity from the first magnetic unit 120, the electromagnet 155 sticks to the first magnetic unit 120 and the inside of the chamber 200 can be sealed. .. On the contrary, if the polarity of the electromagnet 155 is changed so that the electromagnet 155 has the same polarity as the first magnetic unit 120, the polarities of the facing surfaces of the electromagnet 155 and the first magnetic unit 120 become the same, so that they can be easily separated. can do.

Alternatively, the first magnetic unit 120 may be a metal member. Therefore, when the cover unit 110 is attached to the chamber 200, the power supply supplies electric current to the electromagnet 155, so that the electromagnet 155 is provided with a magnetic force. Conversely, when the cover unit 110 is removed from the chamber 200, the magnetic force of the electromagnet 155 is lost by interrupting the supply of current to the electromagnet 155 by the power supply. Accordingly, the cover unit 110 can easily open and close the opening of the chamber 200.

Alternatively, the first magnetic unit 120 may be an electromagnet. Therefore, when the inside of the chamber 200 is sealed, the cover unit 110 can be attached to the chamber 200 by making the polarities of the first magnetic unit 120 and the electromagnet 155 different, and when opening the inside of the chamber 200, By making the polarities of the magnetic unit 120 and the electromagnet 155 of No. 1 the same, the cover unit 110 can be removed from the chamber 200. Therefore, the polarities of the first magnetic unit 120 and the electromagnet 155 can be changed to automatically open and close the inside of the chamber 200.

However, the position of the polarity of the first magnetic unit 120 and the position of the electromagnet are not limited to this, and can be variously changed. Further, when the electromagnet 155 is arranged on the first cover 111, the first magnetic unit 120 is arranged at a position where the first magnetic unit 120 is in contact with the second magnetic unit 150 of the first flange portion 210. Good. Furthermore, a buffer unit 122b, which will be described later, may be disposed on at least a part of the periphery of the magnet member 152 or the electromagnet 155. Therefore, it is possible to suppress or prevent the occurrence of impact when the cover unit 110 and the chamber 200 are brought into contact with each other due to the magnetic force. On the other hand, the second magnetic unit 150 may be arranged on the second cover 112 or the second flange 220.

The position sensing unit 170 serves to sense the position of the cover unit 110. For example, the position sensing unit 170 may be a contact sensor, or may be disposed on the lower surface of the cover unit 110 and contact the upper surface of the chamber 200. Alternatively, the position sensing unit 170 may be disposed on the upper surface of the chamber 200 and contact the lower surface of the cover unit 110. Therefore, when the cover unit 110 or the chamber 200 contacts the position detecting unit 170, the position detecting unit 170 may detect that the cover unit 110 covers the opening of the chamber 200. Conversely, if the cover unit 110 or the chamber 200 does not contact the position sensing unit 170, the position sensing unit 170 may detect that the cover unit 110 does not cover the opening of the chamber 200. However, the method by which the position sensing unit 170 senses the position of the cover unit 110 is not limited to this, and can be variously modified.

At this time, the control unit 160 may be connected to the position sensing unit 170 to control the operation of the second magnetic unit 150. That is, the control unit 160 may control the operation of the second magnetic unit 150 according to the position of the cover unit 110 to bring the cover unit 110 into close contact with or separate from the chamber 200. For example, when the operator rotates the cover unit 110 downward to bring the cover unit 110 into contact with the chamber 200, the control unit 160 may supply power to the electromagnet 155. As a result, the cover unit 110 can be automatically kept in close contact with the chamber 200.

On the contrary, when the operator rotates the cover unit 110 upward to remove the cover unit 110 from the chamber 200, the control unit 160 changes the positions of the N pole and the S pole of the electromagnet or interrupts the power supply. You may This allows the cover unit 110 to keep the opening of the chamber 200 open.

Meanwhile, the control unit 160 may detect that an operator tries to open or close the cover unit 110. For example, the force of the operator applied to the cover unit 110 may be sensed. Therefore, when the force of the worker is applied to the handle, the control unit 160 can change the positions of the N pole and the S pole of the electromagnet, and can interrupt the supply of power. As a result, the operator can easily open the cover unit 110.

FIG. 7 is a diagram showing the structure of the glove box according to the embodiment of the present invention, and FIG. 8 is a plan view showing the structure of the glove box according to the embodiment of the present invention. In the following, a gas ejector, an oximeter and a controller according to an embodiment of the present invention will be described.

Referring to FIG. 8, the gas supplier 310 serves to supply an inert gas (eg, N ₂ gas) into the chamber 200. Therefore, the gas atmosphere inside the chamber 200 is different from the gas atmosphere outside. The gas supplier 310 may include a supply line 311 and a supply valve 312.

The supply line 311 forms a path along which the inert gas moves. One end of the supply line 311 is connected to a tank (not shown) in which the inert gas is stored, and the other end is connected to the upper portion of the chamber 200. Therefore, the inert gas stored in the tank can be supplied into the chamber 200 via the supply line 311. Therefore, the inside of the chamber 200 may be filled with the inert gas.

The supply valve 312 is arranged in the supply line 311. The supply valve 312 plays a role of opening and closing the moving path of the inert gas formed in the supply line 311. Therefore, the amount of the inert gas supplied to the chamber 200 can be adjusted by controlling the operation of the supply valve 312. However, the structure of the gas supplier 310 is not limited to this, and can be variously modified.

The gas discharger 320 serves to discharge the gas inside the chamber 200 to the outside. Therefore, the air inside the chamber 200 is removed and the inside of the chamber 200 can be filled only with the inert gas. Alternatively, the inert gas inside the chamber 200 may be removed. The gas ejector 320 may include an exhaust line 321 and an exhaust valve 322.

The exhaust line 321 forms a path along which the gas moves. One end of the exhaust line 321 is connected to an exhaust pump (not shown), and the other end is connected to a lower portion of the chamber 200. Therefore, the inert gas or air inside the chamber 200 can be discharged to the outside of the chamber 200 through the discharge line 321.

The discharge valve 322 is arranged in the discharge line 321. The discharge valve 322 plays a role of opening and closing the moving path of the gas formed in the discharge line 321. Therefore, the operation of removing the gas inside the chamber 200 can be selectively performed by controlling the operation of the exhaust valve 322. However, the structure of the gas discharger 320 is not limited to this and can be variously modified.

The carrier 600 is disposed in the internal space of the chamber 200. For example, the carrier 600 may be a carrier robot that carries a substrate. Therefore, the carrier 600 can carry the substrate through the doorway 230 formed in the chamber 200. For example, the substrate transferred from any one of the devices 51 for processing the substrate enters the inside of the chamber 200 by the transfer device 600, and the transfer device 600 transfers the substrate to another device 52 for processing the substrate which is in communication with the chamber 200. May be handed over. Since the inside of the chamber 200 is filled with the inert gas, the substrate can be prevented from being contaminated while being transported. At this time, the gate 240 provided in the chamber 200 operates together with the carrier 600 to carry out the work of carrying the substrate. However, inside the chamber 200, equipment for performing other processes may be provided instead of the transporter 600.

The oximeter 420 may be arranged in the chamber 200. The oximeter 420 may be a sensor that measures oxygen concentration. Therefore, the oxygen concentration inside the chamber 200 can be monitored via the oxygen measuring device 420.

The oxygen supplier 410 serves to supply an oxygen-containing gas into the chamber 200. Therefore, the oxygen concentration inside the chamber 200 can be increased. The oxygen supplier 410 may include an oxygen line 411 and a control valve 412.

The oxygen line 411 forms a path along which the oxygen-containing gas moves. One end of the oxygen line 411 is connected to an oxygen tank (not shown) that stores an oxygen-containing gas, and the other end is connected to the chamber 200. Therefore, the gas stored in the oxygen tank can be supplied into the chamber 200 through the oxygen line 411. Therefore, the inside of the chamber 200 can be filled with the oxygen-containing gas.

The control valve 412 is arranged in the oxygen line 411. The control valve 412 plays a role of opening and closing the moving path of the oxygen-containing gas formed in the oxygen line 411. Therefore, the amount of the oxygen-containing gas supplied to the chamber 200 can be adjusted by controlling the operation of the control valve 412. However, the structure of the oxygen supplier 410 is not limited to this and can be variously modified.

The controller 500 may change the polarity of the second magnetic unit based on the measurement result of the oximeter 420. When the oxygen concentration inside the chamber 200 is less than 20%, if the worker opens the inside of the chamber 200, there is a risk that the worker may suffocate. Therefore, when the operator controls the operation of the door device 100 of the chamber 200 to open the inside of the chamber 200, the controller 500 selectively selects the door device 100 according to the oxygen concentration inside the chamber 200. Can be opened.

For example, the controller 500 may compare the measurement value measured by the oximeter 420 with a preset concentration value. Therefore, if the measured value is smaller than the preset density value, the door device 100 can be controlled so as not to be opened by the operator. If the measured value is equal to or higher than the preset concentration value, the controller 500 can control the door device 100 so that it can be opened by an operator.

The controller 500 may also control the operation of the oxygen supplier 410. That is, when the operator tries to open the door device 100, if the measured value is smaller than the preset concentration value, the controller 500 controls the operation of the oxygen supplier 410 to generate oxygen in the chamber 200. A containing gas can be supplied. Therefore, when the oxygen concentration inside the chamber 200 rises and the worker opens the door apparatus 100, it is possible to prevent an accident of choking. On the other hand, the chamber 200 may be opened for repair or maintenance work when the equipment inside is damaged, and may be hermetically closed in other cases.

In this way, the second magnetic unit 150 whose polar position can be changed is provided in the cover unit 110 that opens and closes the chamber 200 or the opening of the chamber 200. Therefore, the polarity of the second magnetic unit 150 can be changed to attach the cover unit 110 to the chamber 200 or remove the cover unit 110 from the chamber 200. Therefore, the opening of the chamber 200 can be opened and closed quickly by controlling the operation of the second magnetic unit 150.

Further, the chamber 200 and the cover unit 110 may be in close contact with each other by the magnetic force of the second magnetic unit 150, and the gap between the chamber 200 and the cover unit 110 may be blocked. Therefore, it is possible to suppress or prevent the gas inside the chamber 200 from flowing out and the gas outside the chamber 200 from flowing into the box.

Furthermore, the impact applied to the cover unit 110 can be reduced more than when using the clamp unit. Therefore, the life of the cover unit 110 can be extended and the maintenance of the equipment can be facilitated.

As described above, although specific embodiments have been described in the detailed description of the present invention, various modifications can be made without departing from the scope of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined not only by the claims described below but also by the equivalents of the claims.

100: Door device 110: Cover unit 120: First magnetic unit
140: Sealing unit 150: Second magnetic unit
190: Energizing unit 200: Chamber 310: Gas supply device 320: Gas exhaust device 410: Oxygen supply device 420: Oxygen measuring device 500: Controller

Claims (16)

A door device having an internal space and arranged in a chamber having an opening formed on one side,
A cover unit for covering the opening,
A first magnetic unit disposed in the cover unit or the chamber,
A second magnetic unit disposed in the chamber or the cover unit so as to face the first magnetic unit, the polarity of which is changeable, and the second magnetic unit which is separably coupled to the first magnetic unit;
A sealing unit, which is disposed in the cover unit so as to block a gap between the chamber and the cover unit, and is capable of contacting with the chamber,
A biasing unit that biases the sealing unit so as to be in close contact with the chamber;
A position sensing unit for sensing the position of the cover unit;
When the position sensing unit senses the contact between the cover unit and the chamber, the polarity of the second magnetic unit is changed so as to maintain the close contact between the cover unit and the chamber, and the cover unit is opened. And a control unit for changing the polarity of the second magnetic unit so as to open the cover unit when it detects that a force for applying the force is applied to the cover unit . The door device according to claim 1, wherein the first magnetic unit is fixed, and the second magnetic unit can change the position of polarity. The door device according to claim 2, wherein the second magnetic unit includes a support member disposed in the chamber or the cover unit and a magnet member rotatably disposed inside the support member. The door device according to claim 1, wherein the second magnetic unit includes an electromagnet and a power supply that supplies a current to the electromagnet. Wherein the control unit, the coupled with the position sensing unit, the door system according to <br/> claim 4 that controls the operation of the power supply. The door device according to claim 1, wherein the first magnetic unit includes at least one of a metal member and a magnet. A buffer unit disposed in at least one of the first magnetic unit and the second magnetic unit so as to reduce the impact between the first magnetic unit and the second magnetic unit. The door device according to any one of claims 1 to 6, further comprising: The chamber includes a first collar portion that surrounds a peripheral edge of the opening portion and a second collar portion that surrounds a peripheral edge of the first collar portion,
The cover unit is connected to the first cover for covering the opening and the first cover to cover a gap between the first cover and the first flange portion, and the second flange portion. The door device according to any one of claims 1 to 6, further comprising: a second cover that can come into contact with the door device. The sealing unit includes at least one of a first sealing member disposed on the first cover and a second sealing member disposed on the second cover. The door device according to item 8. A chamber having an internal space and having an opening formed on one side;
A gas supplier arranged to supply an inert gas into the chamber;
The door device according to claim 1, wherein the door device is arranged to open and close the opening by a magnetic force .
An oximeter arranged to measure the oxygen concentration inside the chamber,
A glove box further comprising: a controller capable of changing the polarity of the second magnetic unit based on a measurement result of the oximeter . The glove box according to claim 10, wherein a plurality of the first magnetic units and the second magnetic units are arranged and arranged along the peripheral edge of the opening. The sealing unit is formed along a peripheral edge of the opening and is arranged at at least one of an inner side and an outer side of a peripheral edge of the first magnetic unit and the second magnetic unit. Item 10. The glove box according to Item 10. The glove box according to claim 10, wherein at least a part of the sealing unit projects to the outside of the cover unit. The urging unit includes a first magnetic body arranged in the cover unit and a second magnetic body arranged in the chamber,
The glove box according to claim 10, wherein the sealing unit is located between the first magnetic body and the second magnetic body. The glove box according to claim 10 , further comprising an oxygen supplier arranged to supply an oxygen-containing gas into the chamber. An entrance is provided in the chamber,
A gate arranged to open and close the doorway,
The glove box according to claim 10, further comprising a carrier arranged inside the chamber so as to carry the substrate through the doorway.