JP6106525B2 - Material feeder - Google Patents

Material feeder Download PDF

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Publication number
JP6106525B2
JP6106525B2 JP2013108415A JP2013108415A JP6106525B2 JP 6106525 B2 JP6106525 B2 JP 6106525B2 JP 2013108415 A JP2013108415 A JP 2013108415A JP 2013108415 A JP2013108415 A JP 2013108415A JP 6106525 B2 JP6106525 B2 JP 6106525B2
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outer container
inert gas
material
container
inner
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JP2014226610A (en
Inventor
孝之 家城
孝之 家城
忠幸 長野
忠幸 長野
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株式会社堀場エステック
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Description

  The present invention relates to a material supply apparatus for supplying a material used in, for example, semiconductor manufacturing.

  There is an apparatus described in Patent Document 1 as this type of material supply apparatus.

  This apparatus includes a filling container filled with a material, a pressurized gas introduction pipe for introducing a pressurized gas into the filling container, and a supply pipe for supplying the material in the filling container to the outside. By introducing pressurized gas from the pressurized gas introduction pipe and pressurizing the gas layer in the filling container, the material is pushed out to the supply pipe and supplied to the outside of the filling container.

JP 2011-25104 A

  However, in the case where materials must be handled with extreme caution, such as when the material is pyrophoric, when replacing the filling container, the material should not leak from the pressurized gas introduction piping or supply piping. It is necessary to work carefully.

  Accordingly, the main object of the present invention is to provide a material supply device that is less likely to leak material during replacement of a filling container and can be operated safely.

  The material supply device of the present invention includes an outer container for storing an inner container having a discharge port for storing the material and leading out the material, separated from the outside air, and a predetermined outside of the outer container. A connection joint for connecting a supply pipe for supplying material to the apparatus to the outlet port, and the connection joint disposed in the outer container while maintaining a state isolated from the outside from the outside of the outer container And a joint operating mechanism capable of operating.

  If it is such a structure, the user can perform the replacement | exchange operation | work of an inner container from the outer side of an outer container by the joint operation mechanism in the state in which the inner container was stored separately from the external air. Therefore, even if the material leaks from the outlet port of the inner container during the replacement operation, the leaked material stays inside the outer container, so that safety can be ensured.

  A leakage monitor for monitoring leakage of material in the internal space of the outer container, a lock mechanism provided on the door of the outer container for taking in and out the inner container, and a material leakage amount detected by the leakage monitor is a predetermined amount. If it exceeds the threshold, if it further comprises a control unit that activates the lock mechanism and prohibits the opening of the door, an unexpected situation occurs, and the material should be put in the outer container. Even if there is a leak, the leak is detected by the leak monitor, and the door provided on the outer container is locked by the lock mechanism so that it cannot be opened. Can do.

  If the leakage monitor includes at least two or more detectors that detect leakage of material in the inner space of the outer container, if one detector has an error, the other detector Can detect detector errors. Moreover, even if one detector causes an error, the other detector can detect the leakage of the material, so that the leakage of the material in the inner space of the outer container can be reliably monitored.

  If the material further has an inert gas filling mechanism for filling the inner space of the outer container with an inert gas, when the material has reactivity such as spontaneous ignition, the inert gas is put into the outer container. By filling the material, it is possible to prevent the material from reacting (for example, ignition) even if the material leaks into the outer container.

  In a preferred embodiment, when the outlet port of the used inner container is removed from the connection joint in order to replace the used inner container with a new inner container, an inert gas is supplied from the supply pipe to the inner space of the outer container. Can be mentioned.

With such a configuration, the material remaining in the supply pipe can be purged, and the end of the purge can be confirmed by a leakage monitor.
In addition, even if the predetermined time has elapsed, if the amount of material leakage detected by the leakage monitor exceeds a predetermined threshold, it can be seen that there is a possibility that the material is leaking into the outer container.
Furthermore, during the purge, the leak monitor monitors the inner space of the outer container, and the door provided on the outer container is locked by the lock mechanism, so that it is possible to prevent the user from accidentally opening the door during the purge. .

  As described above, according to the material supply device of the present invention, when the filling container is replaced, the material hardly leaks, and it is possible to work safely.

Schematic which shows the material supply apparatus of this invention. The perspective view showing the outer container of this invention.

  An embodiment of the material supply apparatus of the present invention will be described below.

  The material supply apparatus 1 of this embodiment constitutes a part of a semiconductor manufacturing apparatus, and as shown in FIGS. 1 and 2, a semiconductor material (for example, a liquid material having ignitability such as trimethylaluminum) is used. An inner container 2 for housing, an outer container 3 for housing the inner container 2 isolated from the outside air, and connected to the inner container 2 through the outer container 3 and supplying the liquid material to a predetermined chamber such as a semiconductor manufacturing chamber And a supply pipe 6b to be supplied to the apparatus.

  The inner container 2 includes a hollow casing 2a for storing the liquid material, a first tubular body 2c provided so as to penetrate the upper wall of the casing 2a, and a second tubular body 2b projected from the upper wall of the casing 2a. It has.

  The lower end of the first tubular body 2c extends to the vicinity of the bottom surface of the casing 2a and is immersed in the liquid material, and the upper end corresponds to the outlet port 20 in the claims. The outlet port 20 is disposed in the inner space of the outer container 3.

  The second tubular body 2b communicates with the internal space of the casing 2a. When an inert gas is pumped into the casing 2a through the second tubular body 2b, the liquid material is transferred to the first tubular body 2c by the pressure. Through the outlet port 20.

  The outer container 3 separates and stores the inner container 2 from the outside air, and as shown in FIGS. 1 and 2, a transparent window 3a and an inner container in which glass or the like for visually confirming the inside is fitted. 2 is provided with a door 3b.

  One end of the supply pipe 6b passes through the upper wall of the outer container 3 and is connected to the outlet port 20 of the first tubular body 2c, and the other end is connected to a semiconductor manufacturing chamber or the like. Then, the liquid material led out from the inside of the casing 2a to the lead-out port 20 by the pressure of the inert gas fed by pressure is supplied to the semiconductor manufacturing chamber or the like through the supply pipe 6b. Further, a valve is provided on the upper end side of the supply pipe 6b, and this valve is appropriately opened and closed according to the material supply state.

  In this embodiment, in addition to the supply pipe 6b, there is provided a pressure feed pipe 6a for sending an inert gas into the inner container 2 to increase the internal pressure and to lead out the liquid material from the supply pipe 6b.

  One end of the pumping pipe 6a is connected to a gas cylinder or the like in which an inert gas is stored, the other end is connected to the second tubular body 2b, and the inert gas is introduced into the casing 2a through the second tubular body 2b. It is to be pumped.

  Here, the lower ends of the pressure feed pipe 6a and the supply pipe 6b are connected to the second tubular body 2b or the first tubular body 2c via connection joints 4a and 4b, respectively.

  For example, one end of the connection joint 4a, 4b is attached to the supply pipe 6b and the pressure feed pipe 6a, and the other end can be brought into contact with or separated from the upper end of the second tubular body 2b or the first tubular body 2c by turning a nut. It can be attached to.

  In addition to the above configuration, the material supply device 1 of the present embodiment is provided with a joint operation mechanism 5 that operates the connection joint 4 (4a, 4b) while maintaining a state isolated from the outside air from the outside of the outer container 3. ing.

The joint operating mechanism 5 is configured by a glove that is attached so as to close a pair of through holes provided in the side wall of the outer container 3 and protrudes toward the inner space of the outer container 3.
And while a user fits this glove and turns the nut provided in the one end part of connection joint 4a, 4b, while connecting the upper end part of the 2nd tubular body 2b, the upper end part of the 1st tubular body 2c is attached. To connect. The joint operating mechanism 5 and the connection joints 4a and 4b are preferably provided so that the distance from the bottom surface of the outer container 3 is the same. This is because the joint operating mechanism 5 can more easily operate the connection joints 4a and 4b by being configured in this way.

  This glove is made of, for example, rubber gloves having resistance to materials, and has a length that can reach the connection joint 4 (4a, 4b) when the user puts a hand into the glove.

  Furthermore, the material supply apparatus 1 of the present embodiment includes an inert gas filling mechanism 9 that fills the internal space of the outer container 3 with an inert gas in case the liquid material leaks into the inner space of the outer container 3. A leakage monitor 13 for monitoring the leakage of the liquid material in the inner space of the outer container 3, a lock mechanism 16 for prohibiting the opening of the door 3b provided in the outer container 3, and an outer container provided on the upper wall of the outer container 3 3 is provided with an alarm 7 for notifying the user that there is material leakage in the internal space 3 and a control unit for operating the lock mechanism 16 to prohibit the opening of the door and to activate the alarm 7.

  The inert gas filling mechanism 9 is for filling the inner space of the outer container 3 with an inert gas, and an inert gas introduction pipe 9a inserted so as to penetrate the side wall of the outer container 3, and an inert gas introduction pipe The mass flow controller 12 provided in 9a is provided.

  One end of the inert gas introduction pipe 9 a extends to the inside of the outer container 3, and the other end is connected to a cylinder in which an inert gas such as nitrogen gas is stored outside the outer container 3. Then, the inert gas released from the cylinder through the inert gas introduction pipe 9 a is introduced into the outer container 3.

  The mass flow controller 12 adjusts the flow rate of the inert gas flowing through the inert gas introduction pipe 9a. For example, a thermal type is used.

  The inert gas filling mechanism 9 of the present embodiment further includes an inert gas outlet pipe 9b through which the inert gas overflowing from the outer container 3 is led out.

  One end of the inert gas outlet pipe 9 b extends inside the outer container 3, and the other end is disposed outside the outer container 3. When the inert gas introduced into the outer container 3 from the inert gas outlet pipe 9b fills the outer container 3, the overflowing inert gas passes through the inert gas outlet pipe 9b to the outside of the outer container 3. Derived. Further, a leakage monitor 13 is provided in the inert gas outlet pipe 9b.

  The leak monitor 13 monitors whether or not the material has leaked into the internal space of the outer container 3 by detecting the material contained in the inert gas flowing through the inert gas outlet pipe 9b. The leak monitor 13 includes a gas concentration monitor 14a and a gas detector 14b.

  The gas concentration monitor 14a uses, for example, infrared spectroscopy that detects the material contained in the inert gas by irradiating the inert gas flowing through the inert gas outlet pipe 9b with infrared light, and uses the inert gas outlet pipe 9b. The material contained in the inert gas which flows through is detected.

  The gas detector 14b samples a part of the inert gas flowing through the inert gas outlet pipe 9b, for example, and flows the sampled gas through the inert gas outlet pipe 9b using a semiconductor sensor, a catalyst sensor, an optical sensor, or the like. The material contained in the inert gas is detected.

  The material leakage amount detected by the gas concentration monitor 14a and the material leakage amount detected by the gas detector 14b are sent to the control unit.

  The controller is structurally a so-called computer circuit having a CPU, an internal memory, an I / O buffer circuit, an AD converter, and the like. Information processing is performed by operating according to a program stored in a predetermined area of the internal memory, and the lock mechanism 16 and the alarm 7 are activated.

  Specifically, this receives the material leakage amount transmitted from the gas concentration monitor 14a and the gas detector 14b, and one of these material leakage amounts exceeds a predetermined threshold (normal concentration value). In this case, the lock mechanism 16 is actuated to prohibit the opening of the door 3b and the alarm 7 is actuated.

  Next, the usage method of the material supply apparatus 1 in this embodiment is demonstrated.

<When using the material supply device 1>
When the user takes out the material stored in the inner container 2, the user sends an inert gas from the inert gas introduction pipe 9 a into the outer container 3 to fill the inner space of the outer container 3 with the inert gas. At this time, the lock mechanism 16 provided on the door 3b of the outer container 3 is activated, and the opening of the door 3b is prohibited.

  Next, the user looks at the micro differential pressure gauges 11 a and 11 b that detect the pressure in the inner space of the outer container 3 and confirms that the inner space of the outer container 3 is in a pressurized state more than the outside of the outer container 3. Then, it is determined that the inert gas has filled the internal space of the outer container 3, and the inert gas is introduced into the pressure feeding pipe 6a. The inert gas introduced into the pressure feeding pipe 6a passes through the connecting joint 4a and the second tubular body 2b in this order and is pressure fed to the inner container 2. Then, the liquid material accommodated in the inner container 2 with this pressure passes through the first tubular body 2c from the outlet port 20 to the supply pipe 6b via the connection joint 4b. Then, the user opens a valve provided at the upper end of the supply pipe 6b to supply the material flowing through the supply pipe 6b to the semiconductor manufacturing chamber or the like.

At this time, the user checks the liquid detector 10 that detects the liquid in the internal space of the outer container 3 to check whether or not the material has leaked into the internal space of the outer container 3.
Furthermore, the internal space of the outer container 3 is monitored by a gas concentration monitor 14a and a gas detector 14b, and the amount of material leakage detected by the gas concentration monitor 14a and the gas detector 14b is transmitted to the control unit.

  When one of the material leakage amounts received from the gas concentration monitor 14a or the gas detector 14b exceeds a predetermined threshold value (normal concentration value), the control unit maintains the state in which the lock mechanism 16 is operated, Activate alarm 7.

  When the alarm 7 is activated, the user determines that the material is leaking into the outer container 3 and stops using the material supply device 1.

<When replacing the inner container 2 of the material supply device 1>
When the user replaces the inner container 2, the inert gas is introduced from the upper ends of the pressure feed pipe 6 a and the supply pipe 6 b, and the material remaining in the pressure feed pipe 6 a and the supply pipe 6 b is purged into the inner container 2. To do. At this time, the lock mechanism 16 provided on the door 3b of the outer container 3 is activated, and the opening of the door 3b is prohibited.

The user checks the liquid detector 10 while purging the pressure feed pipe 6 a and the supply pipe 6 b to check whether or not material is leaking into the internal space of the outer container 3.
Furthermore, the internal space of the outer container 3 is monitored by a gas concentration monitor 14a and a gas detector 14b, and the amount of material leakage detected by the gas concentration monitor 14a and the gas detector 14b is transmitted to the control unit.

  When either one of the material leakage amounts transmitted by the gas concentration monitor 14a or the gas detector 14b exceeds the threshold, the control unit keeps the lock mechanism 16 activated and activates the alarm 7.

  When the alarm 7 is activated, the user determines that the material has leaked into the outer container 3, stops the purge, and interrupts the replacement operation.

  On the other hand, when the alarm 7 is not activated, the user continues to introduce the inert gas into the pressure feed pipe 6a and the supply pipe 6b until the purge is completed. When the pressure sensor 15 provided in the pressure feed pipe 6a connected to the connection joint 4a is depressurized and the purge is completed, the liquid detector 10 does not detect the liquid and the alarm 7 is activated. When it is confirmed that there is no leakage, it is determined that there is no leakage of material in the internal space of the outer container 3, and the connecting joint 4 (4a, 4b) is pressurized.

  Then, in order to release the connection between the pressure feed pipe 6a and the supply pipe 6b and the inner container 2, the user puts the glove of the joint operation mechanism 5 in both hands and is placed in the outer container 3 while looking through the transparent window 3a. The upper end of the second tubular body 2 is removed from one end of the connection joint 4a by turning the nuts provided in the connection joints 4a and 4b using a tool and the like, and the upper end of the first tubular body 2c (lead-out port 20) Is removed from one end of the connection joint 4b.

  At this time, the pressure applied to the connection joint 4a is detected by the pressure sensor 15 and transmitted to the control unit.

  The control unit counts a predetermined time from the time when the pressure received from the pressure sensor 15 becomes equal to or lower than a preset pressure, and the material leakage amount transmitted by the gas concentration monitor 14a or the gas detector 14b during this time. If neither exceeds the threshold value, the lock mechanism 16 is released and the door 3b of the outer container 3 is opened.

  In order to replace the inner container 2, the user removes the used inner container 2 stored in the outer container 3 and puts a new inner container 2 on the load cell 8 provided on the bottom surface of the outer container 3. After placing, the door 3b provided in the outer container 3 is closed. When the load cell 8 receives the load of the inner container 2, it detects it and transmits it to the control unit.

  When the control unit receives an electrical signal notifying that the load cell 8 has sensed the load, the control unit operates the lock mechanism 16 of the door 3b provided in the outer container 3.

  When the user confirms that the locking mechanism 16 of the door 3b of the outer container 3 has been operated, the glove of the joint operating mechanism 5 is again held in both hands in order to connect the replaced inner container 2 to the pressure feeding pipe 6a and the supply pipe 6b. And tighten the nuts of the connection joints 4a and 4b to connect the upper end of the second tubular body 2 to the connection joint 4a using a tool or the like while looking through the transparent window 3a, and the upper end of the first tubular body 2c Port 20) is connected to the connecting joint 4b. Then, an inert gas is caused to flow from the inert gas introduction pipe 9a to the inner space of the outer container 3, and the air mixed in the inner space of the outer container 3 by opening and closing the door 3b from the inert gas outlet pipe 9b together with the inert gas. Derived outside the outer container 3. Thereafter, when the micro differential pressure gauges 11a and 11b are viewed and it is confirmed that the inner space of the outer container 3 is in a pressurized state from the outside of the outer container 3, it is determined that the air has been removed and the inert gas is introduced. The introduction of the inert gas from the pipe 9a is stopped.

When the control unit releases the lock mechanism 16 for replacement of the inner container 2, the pressure sensor 15 provided in the pressure feeding pipe 6a connected to the connection joint 4a is depressurized and the purge is completed. A predetermined time may be counted from the time. In this case, the user releases the connection between the pressure feed pipe 6a and the supply pipe 6b and the inner container 2 without pressurizing the connection joints 4a and 4b.

<When material leaks into the inner space of the outer container 3>
If the material leaks into the inner space of the outer container 3 and the alarm 7 is activated, the user checks the gas concentration monitor 14a, the gas detector 14b, the liquid detector 10, etc. Check for leaks.

  Then, an inert gas is allowed to flow from the inert gas introduction pipe 9a to the inner space of the outer container 3 to vaporize the material leaked into the inner space of the outer container 3, and this material gas is discharged from the inert gas outlet pipe 9b. It is led out of the outer container 3 together with the active gas.

  And a user waits until the value which the gas concentration monitor 14a and the gas detector 14b detected falls below a threshold value.

When the values detected by the gas concentration monitor 14a and the gas detector 14b fall below the threshold value, the control unit stops the alarm 7 and releases the lock mechanism 16.
At this time, the control unit lowers the value detected by the gas concentration monitor 14a and the gas detector 14b below the threshold value, stops the alarm 7 and releases the lock mechanism 16 when a predetermined time elapses after the value falls below the threshold value. You may comprise.

  According to the material supply device 1 of the present embodiment configured as described above, the following effects are obtained.

  Since the joint operation mechanism 5 capable of operating the connection joint 4 (4a, 4b) is maintained while maintaining a state isolated from the outside air from the outside of the outer container 3, the user can use the inner container. In a state where 2 is stored separately from the outside air, the inner container 2 can be replaced from the outside of the outer container 3. Therefore, even if the material leaks from the outlet port 20 of the inner container 2 during the replacement work, the leaked material stays inside the outer container 3, so that safety can be ensured.

  Even if material leaks into the outer container 3, the leakage is detected by the leak monitor 13, and the door 3b provided in the outer container 3 is locked by the lock mechanism 16 and cannot be opened. It is possible to reliably prevent a person from accidentally opening the door 3b.

  Since the leakage monitor 13 includes a gas concentration monitor 14a and a gas detector 14b that detect material leakage in the internal space of the outer container 3, if an error occurs in one detector, the other detector You can check for errors in the detector. Moreover, even if one detector causes an error, the other detector can detect the leakage of the material, so that the leakage of the material in the inner space of the outer container can be reliably monitored.

  Since the glove which is attached to the joint operation mechanism 5 so as to close the through hole provided in the outer wall of the outer container 3 and protrudes toward the inner space of the outer container 3 is used, the user puts his hand on the glove. The connecting joint 4 can be operated from the outside of the outer container 3 simply by inserting it, and since the glove can freely move the five fingers, it is possible to provide an easy-to-use apparatus with a simple configuration.

  Since the inert gas filling mechanism 9 that fills the inner space of the outer container 3 with an inert gas is further provided, the material can be made to have reactivity such as spontaneous ignition by filling the outer container 3 with the inert gas. When it has, even if material leaks in an outer container, it can prevent that a material reacts (for example, ignition etc.).

When the used inner container 2 is replaced with a new inner container 2, an inert gas is introduced into the inner container 2 from the pressure feed pipe 6a and the supply pipe 6b, so that the material remaining in the pressure feed pipe 6a and the supply pipe 6b is purged. In addition, the end of the purge can be confirmed by the leak monitor 13.
In addition, even when the predetermined time has elapsed, if the amount of material leakage detected by the leakage monitor 13 exceeds a predetermined threshold, it can be seen that there is a possibility that the material is leaking into the outer container 3.
In addition, during the purge, the leakage monitor 13 monitors the internal space of the outer container 3, and the door 3b provided in the outer container 3 is locked by the lock mechanism 16, so that the user accidentally opens the door 3b during the purge. You can prevent the situation of opening.

  The present invention is not limited to the above embodiment.

  In the present embodiment, a liquid material is used as the material, but a gas material, a solid material, or the like may be used, for example.

  The inner container can be appropriately changed according to the material. That is, for example, both the first tubular body and the second tubular body may be configured to protrude from the casing, or both the first tubular body and the second tubular body may be configured to penetrate the casing.

  Moreover, although the joint operation mechanism of this embodiment is comprised with the glove which a user can work by itself, you may comprise with apparatuses, such as a manipulator which a user operates remotely. If comprised in this way, the user can perform the replacement | exchange operation | work of an inner container, ensuring its own safety reliably.

  The outer container can be appropriately changed according to the configurations of the inner container and the joint operation mechanism. That is, for example, in the case where the joint operation mechanism is remotely operated, it is possible to separately provide an imaging device for imaging the inside of the outer container without providing a transparent window in the outer container.

  In the above embodiment, the control unit activates the lock mechanism and the alarm when either the gas concentration monitor or the material leakage amount transmitted by the gas detector exceeds the threshold value. The lock mechanism and alarm may be activated when both the amount of material leakage transmitted by the device exceeds the threshold, or the detection signal detected by the liquid detector or the detection signal detected by the micro differential pressure gauge is used. It may be configured to operate.

  In the above embodiment, the micro differential pressure gauge is checked in order to determine that the inert gas is full. This is because the gas concentration monitor and the gas detector in the above embodiment use only a liquid material such as trimethylaluminum. This is because it was a specification to detect. Therefore, when the gas concentration monitor and the gas detector can detect, for example, oxygen or the like, it may be confirmed whether or not the inert gas is filled by checking the gas concentration monitor and the gas detector. In this case, since it is not necessary to arrange a micro differential pressure gauge, the apparatus configuration can be simplified.

  In order to perform zero point correction of the gas concentration monitor and the gas detector, a pipe line directly connecting the inert gas introduction pipe 9a and the inert gas outlet pipe 9b may be provided.

  In the above embodiment, the load cell is arranged in the internal space of the outer container, but the load cell may not be arranged. In this case, the control unit can actuate the lock mechanism by detecting that the user has closed the door provided in the outer container.

  In the above-described embodiment, the mass flow controller is arranged in the inert gas introduction flow path. However, instead of the mass flow controller, a mass flow meter may be used, a needle valve that manually adjusts the flow rate of the inert gas, or the like. Can also be used.

  The present invention can be variously modified without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Material supply apparatus 2 ... Inner container 20 ... Outlet port 3 ... Outer container 4 ... Connection joint 5 ... Joint operation mechanism 6a ... Pressure feed piping 6b ... Supply piping

Claims (6)

  1. An outer container for containing an ignitable material and an inner container having a lead-out port for leading the material away from the outside air;
    A connection joint for connecting a supply pipe for supplying a material to a predetermined device outside the outer container to the outlet port;
    A joint operating mechanism capable of operating the connection joint disposed in the outer container while maintaining a state isolated from the outside air from the outside of the outer container;
    An inert gas filling mechanism for filling the inner space of the outer container with an inert gas ,
    The inert gas filling mechanism is
    An inert gas introduction pipe for introducing an inert gas into the internal space of the outer container;
    An inert gas outlet pipe for leading inert gas from the inner space of the outer container to the outside,
    The material supply apparatus, wherein the inert gas introduced from the inert gas introduction pipe is blown to the bottom in the internal space of the outer container .
  2. A leakage monitor for monitoring leakage of material in the internal space of the outer container;
    A locking mechanism provided on the door of the outer container for taking in and out the inner container;
    2. The material according to claim 1, further comprising: a control unit that activates the lock mechanism to prohibit the opening of the door when the amount of material leakage detected by the leakage monitor exceeds a predetermined threshold value. Feeding device.
  3.   The material supply apparatus according to claim 2, wherein the leakage monitor includes at least two detectors that detect leakage of the material in the internal space of the outer container.
  4. To replace a used inner container to a new inner container, according to claim 1 Disconnecting the outlet port of the used inner container from the connection joint, the inert gas in the internal space of the outer container from the supply pipe is introduced The material supply apparatus in any one of 2 or 3 .
  5. An inner container having a lead-out port for containing a material having ignitability and leading out the material, an outer container for storing the inner container in isolation from the outside air, and disposed in the outer container. A material supply device comprising a connection joint for connecting the outlet port to a supply pipe for supplying material to a predetermined device outside the outer container,
    From the outside of the outer container, a joint operating mechanism capable of operating the connection joint while maintaining a state isolated from the outside air ,
    An inert gas filling mechanism for filling the inner space of the outer container with an inert gas;
    The inert gas filling mechanism is
    An inert gas introduction pipe for introducing an inert gas into the internal space of the outer container;
    An inert gas outlet pipe for leading inert gas from the inner space of the outer container to the outside,
    The material supply apparatus, wherein the inert gas introduced from the inert gas introduction pipe is blown to the bottom in the internal space of the outer container .
  6. An outer container for containing the material and containing an inner container having a lead-out port for leading the material away from the outside air;
      A connection joint for connecting a supply pipe for supplying a material to a predetermined device outside the outer container to the outlet port;
      A joint operating mechanism capable of operating the connection joint disposed in the outer container while maintaining a state isolated from the outside air from the outside of the outer container;
      In order to replace the used inner container with a new inner container, when the outlet port of the used inner container is removed from the connection joint, an inert gas is introduced from the supply pipe into the inner space of the outer container. Material supply device.

JP2013108415A 2013-05-22 2013-05-22 Material feeder Active JP6106525B2 (en)

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JP2013108415A JP6106525B2 (en) 2013-05-22 2013-05-22 Material feeder

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Application Number Priority Date Filing Date Title
JP2013108415A JP6106525B2 (en) 2013-05-22 2013-05-22 Material feeder
KR1020140007704A KR20140137285A (en) 2013-05-22 2014-01-22 Material supply apparatus
CN201410036927.0A CN104183520B (en) 2013-05-22 2014-01-26 Material feeding apparatus
TW103110382A TWI603780B (en) 2013-05-22 2014-03-19 Material supply device

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JP2014226610A JP2014226610A (en) 2014-12-08
JP6106525B2 true JP6106525B2 (en) 2017-04-05

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CN (1) CN104183520B (en)
TW (1) TWI603780B (en)

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WO2017104542A1 (en) * 2015-12-14 2017-06-22 山東新華医療器械股▲分▼有限公司 Liquid supplying system

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JP2014226610A (en) 2014-12-08
CN104183520B (en) 2019-04-09
TW201444618A (en) 2014-12-01
TWI603780B (en) 2017-11-01
CN104183520A (en) 2014-12-03

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