JP6712812B2 - Probe scanning mechanism, probe device, and scanning probe microscope - Google Patents

Description

The present invention relates to a probe scanning mechanism, a probe device, and a scanning probe microscope.

The scanning probe microscope is a microscope that acquires physical information on the sample surface such as unevenness or chemical properties of the sample as a signal by scanning the probe with respect to the sample.

Examples of the scanning probe microscope include an atomic force microscope (AFM), a scanning tunneling microscope (STM), a scanning magnetic force microscope (MFM), a scanning capacitance microscope (SCaM), and a scanning near field light microscope ( SNOM), scanning thermal microscope (SThM), scanning ion conduction microscope (SICM), and the like. In these scanning probe microscopes, a probe or a sample is scanned in the horizontal direction (XY direction) and the vertical direction (Z direction), and the physical information or chemical properties of the obtained sample are sequentially displayed to display the physical property of the sample. Information or chemistry is dynamically represented as an image.

The scanning probe microscope includes a scanning mechanism (X scanner, Y scanner, Z scanner) movable in each of X, Y, and Z directions in order to scan a probe or a sample in a horizontal direction and a vertical direction ( For example, see Patent Document 1). Patent Document 1 discloses a scanning mechanism for a probe microscope, and shows a configuration in which one end in the Z direction of a piezoelectric element that expands and contracts in the Z direction is fixed (fixed end) and the probe or sample is attached to the other end (free end). Has been done.

JP, 2006-126145, A

In order to acquire images at high speed in a scanning probe microscope, it is necessary for a scanning mechanism (scanner) in each axial direction to scan the probe or sample at high speed. The scanning frequency in each direction of the scanner is limited by the resonance frequency of the scanner (X scanner, Y scanner, Z scanner) in the corresponding direction. In particular, the Z scanner needs to scan at the highest speed, and the image acquisition speed is often limited by the resonance frequency of the Z scanner.

However, the conventional scanning probe microscope has a problem that the resonance frequency of the Z scanner is extremely low, and the Z scanner cannot be scanned at high speed to acquire an image. For example, in SICM, a glass pipette is used as a probe, but since the holder structure for attaching and detaching the probe to the Z scanner is large and heavy, the resonance frequency of the Z scanner is significantly large when the probe is attached to the piezoelectric element of the Z scanner. Fall to. As a result, there is a problem that the probe cannot be scanned at high speed in the Z direction.

In view of the above problems, it is an object of the present invention to provide a probe scanning mechanism, a probe device and a scanning probe microscope capable of scanning a probe at high speed.

In order to solve the above problems, a probe scanning mechanism according to the present invention is a probe scanning mechanism for scanning a long probe, and a first penetrating penetrating both ends in the same direction as the long direction of the probe. A piezoelectric element having a hole for scanning the probe inserted in the first through hole in the longitudinal direction of the probe, a cylindrical housing that houses the piezoelectric element, one end of the housing, and A pair of support members fixed to the other end and supporting the piezoelectric element with the piezoelectric element interposed therebetween, and one of the pair of support members is fixed to one end of the piezoelectric element in the longitudinal expansion/contraction axis direction. A fixing member that fixes the other one of the supporting members to the other end of the piezoelectric element in the expansion/contraction axis direction, and a holding member that holds the probe inside the first through hole at least at the tip end side of the probe.

As a result, the probe can be easily attached and detached, and even if the probe is attached, the resonance frequency hardly decreases, so that the probe can be scanned at high speed. Therefore, it is possible to provide a probe scanning mechanism capable of scanning the probe in the Z direction at high speed. Therefore, by using this probe scanning mechanism, it is possible to realize a probe device capable of acquiring a measurement image at high speed, and a scanning probe microscope using this probe device acquires a high-resolution image in a short time. can do.

Further, the fixing member has a second through hole that penetrates both ends in the same direction as the expansion and contraction axis direction of the piezoelectric element, and the holding member has a tip end side of the probe and a rear end side of the probe. In, the probe may be held inside the second through hole.

Accordingly, the probe can be stably held inside the second through hole of the fixing member, so that the probe can be scanned in the Z direction at high speed.

Further, the holding member may hold the front end side of the probe more firmly than the rear end side of the probe.

As a result, the front end side of the probe is held more firmly than the rear end side, so that the probe is displaced along with the displacement of the piezoelectric element, and it is possible to suppress undesired vibrations from entering the probe due to the displacement of the piezoelectric element. Therefore, the tip side of the probe can be stably held.

Further, the holding member may be formed of an elastic member.

Accordingly, even when the displacement of the piezoelectric element is large, the holding force on the front end side and the rear end side of the probe can be changed by appropriately changing the elasticity. Therefore, the probe can be held more stably.

Further, the elastic member may be an adhesive.

This allows the adhesive to easily hold the probe inside the first through hole. Further, when the probe is detached from the probe scanning mechanism, the rear end side of the probe is pressed by the protrusion to remove the adhesive, and the probe can be easily pushed out from the second through hole.

Further, an insertion member that is inserted into the second through hole is provided between the probe and the fixing member, the insertion member has a screw thread on a side surface, and the fixing member is the second member. A thread groove may be provided on the inner side surface of the through hole, and the insertion member may be screwed into the second through hole with the thread engaging with the thread groove.

This allows the probe to be held inside the second through hole via the insertion member.

Further, an intermediate member may be provided between the probe and the insertion member, and the probe may be held inside the second through hole via the intermediate member.

With this, by disposing the intermediate member between the probe and the insertion member, even if the probe and the insertion member are materials that are difficult to bond with the adhesive, the probe is attached to the insertion member with the adhesive through the intermediate member. Can be joined.

In addition, the pair of support members may have elasticity.

As a result, the support member vibrates according to the displacement of the piezoelectric element, so that the piezoelectric element can be stably supported.

Further, the support member may have a diaphragm structure.

Accordingly, since the supporting member is a plate-shaped and so-called plate spring having a spring function, the supporting member can be elastically fixed to the housing while sandwiching both ends of the piezoelectric element. Therefore, the piezoelectric element can be stably supported.

Further, the pair of support members may have the same configuration.

As a result, even if the support member vibrates according to the displacement of the piezoelectric element supported between the pair of support members, the impact forces of the vibrations of the support members cancel each other out, so that the center of gravity of the piezoelectric element does not shift. , The resonance frequency of the piezoelectric element does not decrease.

Further, in order to solve the above problems, a probe apparatus according to the present invention includes a probe scanning mechanism having the above-described characteristics, and a probe held by the probe scanning mechanism.

As a result, it is possible to provide a probe device that can acquire a measurement image at high speed by using the probe scanning mechanism having the above-described characteristics.

Further, in order to solve the above problems, a scanning probe microscope according to the present invention includes a probe device having the above-described characteristics and a stage on which a sample is mounted.

As a result, it is possible to scan the measurement sample mounted on the stage at high speed and acquire a high-resolution measurement image in a short time by the scanning probe microscope using the probe device having the above-described characteristics. The scanning probe microscope may have a configuration in which the XY scanning mechanism is mounted on the probe device instead of the stage.

According to the present invention, it is possible to provide a probe scanning mechanism, a probe device and a scanning probe microscope capable of scanning a probe at high speed.

FIG. 1 is a schematic view showing the outer appearance of the probe device according to the first embodiment. FIG. 2 is an exploded view of the probe device according to the first embodiment. FIG. 3 is a cross-sectional view taken along the line III-III shown in FIG. FIG. 4 is a schematic diagram of the housing of the probe scanning mechanism according to the first embodiment. FIG. 5A is a schematic diagram of a support member of the probe scanning mechanism according to the first exemplary embodiment. FIG. 5B is a bottom view of the support member of the probe scanning mechanism according to the first exemplary embodiment. FIG. 6 is a diagram for explaining the procedure for attaching the probe. FIG. 7 is a schematic diagram showing the operation of the probe scanning mechanism according to the first embodiment. FIG. 8 is a graph showing the characteristics of the probe scanning mechanism according to the first embodiment. FIG. 9 is a schematic diagram showing the configuration of the scanning probe microscope according to the first embodiment. FIG. 10 is a bottom view showing another configuration of the support member of the probe scanning mechanism according to the modification of the first embodiment. FIG. 11 is a sectional view of the probe device according to the second embodiment. FIG. 12 is a sectional view of the probe device according to the third embodiment.

Embodiments according to the present invention will be described below with reference to the drawings. In addition, in the drawings, constituent elements denoted by the same reference numerals indicate the same or similar constituent elements.

Further, the embodiment described below shows a preferred specific example of the present invention. Numerical values, shapes, materials, constituent elements, arrangement positions of constituent elements, connection forms, steps, order of steps, and the like shown in the following embodiments are examples, and are not intended to limit the present invention. Further, among the constituent elements in the following embodiments, the constituent elements that are not described in the independent claims showing the highest concept of the present invention will be described as arbitrary constituent elements constituting a more desirable form.

(Embodiment 1)
The scanning probe microscope 100 in the present embodiment is, for example, a SICM (also referred to as a scanning ion conduction microscope or an ion conductance microscope).

The SICM uses a glass pipette whose inside is filled with an electrolyte as a probe, and uses an ionic current generated between a control electrode and an electrode inside the pipette, which are placed in an electrolytic solution outside the glass pipette, as a signal. This ionic current changes when the tip of the glass pipette is shielded close to the sample. SICM utilizes this phenomenon to scan a glass pipette to image the three-dimensional shape of the sample surface. The measurement sample is a soft living eukaryotic cell or the like, and the SICM is a microscope capable of stereoscopically observing a living eukaryotic cell or the like in an electrolyte solution alive.

In the conventional SICM, the shape of the sample surface is obtained by scanning the probe or the stage on which the sample is placed in the XYZ directions. In a scanning probe microscope, when highly sensitive measurement is performed in a state where the probe and the sample surface are not in contact with each other, the measurement is performed while keeping the distance between the probe and the sample surface constant. Therefore, in SICM, it is necessary to scan the probe in the Z direction according to the uneven shape of the sample surface, and scanning in the Z direction is required to be faster than scanning in the XY directions.

[Configuration of probe scanning mechanism and probe device]
First, the configurations of the probe scanning mechanism and the probe device according to the present embodiment will be described with reference to FIGS. FIG. 1 is a schematic view showing the outer appearance of the probe device according to the present embodiment. FIG. 2 is an exploded view of the probe device according to the present embodiment. FIG. 3 is a cross-sectional view taken along the line III-III shown in FIG. FIG. 4 is a schematic view of the housing of the probe scanning mechanism according to the present embodiment. FIG. 5A is a schematic view of a support member of the probe scanning mechanism according to the present embodiment. FIG. 5B is a bottom view of the support member of the probe scanning mechanism according to the present embodiment.

As shown in FIGS. 1 to 3, the probe device 1 according to the present embodiment includes a probe scanning mechanism 10 and a probe 20 held by the probe scanning mechanism 10.

As shown in FIG. 2, the probe scanning mechanism 10 includes a housing 11, support members 12a and 12b, a screw member 13, a fixing member 14, a piezoelectric element 15, a holding member 16, and an insertion member 17. I have it.

As shown in FIG. 4, the outer appearance of the housing 11 is in the shape of a substantially quadrangular prism with one side of about 10 mm. Then, in the shape of a quadrangular prism, a cavity 11a is formed so as to penetrate both ends in one direction. The shape of the cavity 11a at both ends of the housing 11 is a circle having a diameter of about 8 mm. A piezoelectric element 15, which will be described later, is inserted into the cavity 11a. The housing 11 is made of, for example, stainless steel, duralumin, or titanium alloy.

The support member 12a has a substantially square shape in a plan view, as shown in FIGS. 5A and 5B. When the support member 12a is viewed in a plan view, fixing holes 31 are formed at the four corners of the support member 12a, respectively. Further, when the support member 12a is viewed in a plan view, an opening 32 is formed at the center of the support member 12a. Further, as shown in FIG. 5A, a recess 33 is formed on the upper surface of the support member 12a so as to surround the opening 32. Further, as shown in FIG. 5B, the recess 33 is not formed on the bottom surface of the support member 12a. The recess 33 may be formed on the bottom surface of the support member 12a. The bottom surface of the support member 12a on which the recess 33 is not formed is fixed by abutting on the housing 11.

As for the size of the support member 12a, for example, one side of the square of the support member 12a is 10 mm, the thickness is 1 mm, the diameter of the fixing hole 31 is 1.5 mm, the diameter of the opening 32 is 3 mm, and the diameter of the recess 33 is 5. The depth of the recess 33 is 1 mm and the depth of the recess 33 is 0.5 mm.

A groove 34 is formed between each of the recess 33 and the fixing hole 31. The groove 34 is formed at a position of, for example, 4 mm from the center of the opening 32 and along the circumferential direction of a circle centered on the center of the opening 32. The groove 34 has a circumferential length of 4 mm and the groove 34 has a width of 0.5 mm. With such a configuration, the support member 12a has elasticity in the axial direction passing through the center of the opening 32. The axial direction passing through the center of the opening 32 is the same as the expansion/contraction axial direction of the piezoelectric element 15 described later. The support member 12a has a so-called diaphragm structure. At this time, the spring constant of the support member 12a is preferably about 1/5 or less of the spring constant of the piezoelectric element 15 described later.

With this configuration, the support member 12a can vibrate in the axial direction passing through the center of the opening 32. The support member 12a is made of, for example, duralumin.

The support member 12b has the same structure as the support member 12a. Therefore, detailed description of the support member 12b is omitted. Even if the support member 12a and the support member 12b vibrate according to the displacement of the piezoelectric element 15 supported between the support member 12a and the support member 12b, the support member 12b and the support member 12a have the same configuration. Since the impact forces of the vibrations of the support member 12a and the support member 12b cancel each other out, the center of gravity of the piezoelectric element 15 does not shift and the piezoelectric element 15 can be stably supported.

As shown in FIGS. 1 and 3, the support members 12a and 12b are fixed to the housing 11 by screw members 13 at both ends of the cavity 11a. The support member 12a is arranged on the front end side of the probe 20, and the support member 12b is arranged on the rear end side of the probe 20.

The support member 12a and the support member 12b may be the same in material and shape, or may be different in shape. When the support member 12a and the support member 12b are made of different materials, the support member 12a and the support member 12b are formed in shapes such as thickness so that the support member 12a and the support member 12b have the same spring constant. It is desirable to adjust.

The screw member 13 is a screw that fixes the support member 12 a and the support member 12 b to the housing 11. The screw member 13 is fixed to the screw hole 11b of the housing 11 through the fixing holes of the support member 12a and the support member 12b.

The piezoelectric element 15 is composed of, for example, a laminated piezoelectric element in which a plurality of cylindrical piezoelectric elements are laminated. The piezoelectric element 15 has, for example, a bottom surface having a diameter of 5 mm and a length of 10 mm, a resonance frequency of free vibration of about 120 kHz, and a displacement of about 10 μm. The direction in which the piezoelectric element 15 expands and contracts is called the expansion and contraction axis direction, and the expansion and contraction axis direction corresponds to the longitudinal direction of the probe. The piezoelectric element 15 has a first through hole that penetrates both ends in the expansion/contraction axis direction. That is, the piezoelectric element 15 is formed with the first through holes 15a penetrating both ends in the stacking direction. The diameter of the first through hole 15a is, for example, 3 mm. The piezoelectric element 15 expands and contracts in the stacking direction, that is, the longitudinal direction of the probe in response to the voltage application. The central axis of the piezoelectric element 15 is arranged so as to pass through the center of gravity of the probe scanning mechanism 10.

The piezoelectric element 15 has a support member 12a and a support member 12b fixed to both ends in the expansion/contraction axis direction by fixing members 14 described later. That is, the piezoelectric element 15 is sandwiched at both ends in the expansion/contraction axis direction by the support member 12a and the support member 12b, and is further connected to the housing 11. As a result, the support member 12a and the support member 12b vibrate as the piezoelectric element 15 expands and contracts.

As shown in FIGS. 2 and 3, the fixing member 14 has a cylindrical shape, and has a diameter on one end side larger than that on the other end side. The diameter of the one end side of the fixing member 14 is substantially the same as the recess 33 formed in the support member 12a and the support member 12b. The diameter of the fixed member 14 on the other end side is substantially the same as the diameter of the first through hole 15a formed in the piezoelectric element 15. Further, the fixing member 14 has second through holes penetrating both ends in the same direction as the expansion/contraction axis direction of the piezoelectric element 15. That is, the fixing member 14 is formed with the second through hole 14a penetrating from the one end side to the other end side. Inside the second through hole 14a, a screw groove is formed in a part of the above-mentioned one end side. Further, the other end side inside the second through hole 14a is formed so that the diameter of the second through hole 14a becomes smaller. The diameter of the second through hole 14a is larger than the diameter of the probe 20.

As shown in FIG. 3, the fixing member 14 has the other end penetrating the openings 32 of the supporting member 12a and the supporting member 12b and inserted into the first through hole 15a of the piezoelectric element 15. At this time, the one end side of the fixing member 14 is configured to be fitted into the recess 33 of the support member 12a and the support member 12b. As a result, the fixing member 14 is fixed by abutting the supporting member 12a and the supporting member 12b on the piezoelectric element 15. At this time, the upper surfaces of the support members 12a and 12b are flush with the other end surface of the fixing member 14. The fixing member 14 is made of, for example, stainless steel, duralumin, titanium alloy, or the like.

As shown in FIG. 3, the holding member 16 is arranged inside the second through hole 14 a formed in the fixing member 14 and between the inner wall of the second through hole 14 a and the probe 20. The holding member 16 is formed of an elastic member. For example, the holding member 16 may be formed of a silicone tube. As a result, the holding member 16 holds the probe 20 inside the second through hole 14 a formed in the fixing member 14.

The holding member 16 is not limited to an elastic member, and may be any member as long as it can fix the probe 20 to the fixing member 14.

The insertion member 17 is a member that is arranged between the probe 20 and the fixing member 14 and inserts the holding member 16 into the second through hole 14 a formed in the fixing member 14. The insertion member 17 is made of, for example, stainless steel, duralumin, titanium alloy, or the like. The insertion member 17 has a cylindrical shape having a diameter substantially the same as the inner diameter of the second through hole 14a of the fixing member 14, and has a thread on the cylindrical side surface. The insertion member 17 is screwed into the second through hole 14a with a screw thread engaging with a thread groove formed on the inner side surface of the second through hole 14a of the fixing member 14.

Therefore, by disposing the holding member 16 around the probe 20 and screwing the insertion member 17, the holding member 16 is inserted into the second through hole 14a of the fixing member 14 while the holding member 16 is crushed. can do. Thereby, the probe 20 can be held in the second through hole 14 a of the fixing member 14 via the insertion member 17.

The probe 20 is held in the second through hole 14 a of the fixing member 14 by the holding member 16 and the inserting member 17 in the fixing member 14 fixed to each of the supporting member 12 a and the supporting member 12 b. That is, the holding member 16 holds the probe 20 inside the second through hole 14 a of the fixing member 14 on the front end side and the rear end side of the probe 20. At this time, by changing the size or material of the holding member 16 between the front end side and the rear end side of the probe 20, the holding member 16 holds the probe 20 more firmly than the rear end side. Good. For example, the holding member 16 arranged on the front end side of the probe 20 may be formed of a material harder than the holding member 16 arranged on the rear end side, or the holding member 16 arranged on the front end side of the probe 20 may be formed. It may be larger than the holding member 16 arranged on the rear end side. Accordingly, the tip of the probe 20 can be stably held inside the second through hole 14a of the fixing member 14. Therefore, the tip of the probe 20 can be stably held inside the first through hole 15a of the piezoelectric element 15.

The probe 20 is composed of, for example, a glass pipette. The probe 20 has, for example, a diameter of 1 mm and a length of about 10 mm. The weight of the probe 20 is 20 mg or less, which is 1% or less of the mass of the piezoelectric element 15. Inside the probe 20, a conductor wire 20 a is arranged in the longitudinal direction of the probe 20.

As shown in FIG. 3, the probe 20 is held by the holding member 16 inside the second through hole 14 a formed in the fixing member 14. The probe 20 is held by the piezoelectric element 15 at two points on the front end side and the rear end side of the probe 20. At this time, the tip of the probe 20 projects about 1 mm from the support member 12a.

As a result, the piezoelectric element 15 expands and contracts in the longitudinal direction of the probe, and the probe 20 also displaces in the longitudinal direction. The displacement amount of the probe 20 at this time is such that the amplitude of the piezoelectric element 15 is 10 to 12 μm and the amplitude of the probe 20 is 5 to 6 μm.

The probe 20 is not limited to the glass pipette, and may be appropriately changed depending on the type of the scanning probe microscope.

[Probe mounting procedure]
Next, a procedure for attaching the probe 20 to the probe scanning mechanism 10 will be described. FIG. 6 is a diagram for explaining the procedure for attaching the probe.

First, the probe scanning mechanism 10 is assembled. The piezoelectric element 15 is inserted into the cavity 11a formed in the housing 11, and both ends of the piezoelectric element 15 in the expansion/contraction axis direction are sandwiched and supported by the support members 12a and 12b. Then, the support member 12a and the support member 12b are fixed to the housing 11 by the screw member 13 (step S10).

Next, the fixing member 14 is attached to the first through hole 15a of the piezoelectric element 15 through the opening 32 formed in the supporting member 12a and the supporting member 12b. As a result, both ends of the piezoelectric element 15 in the longitudinal direction are fixed to the support member 12a and the support member 12b, respectively (step S12).

FIG. 7 is a schematic diagram showing the operation of the probe scanning mechanism according to the present embodiment. FIG. 7 shows that both ends of the piezoelectric element 15 in the longitudinal direction are sandwiched and supported by the support members 12a and 12b, the support members 12a and 12b are fixed to the housing 11 by the screw members 13, and the support members are further fixed. 12 is a front perspective view of the probe scanning mechanism 10 when the fixing member 14 fixes the support member 12b and the support member 12b to both ends of the piezoelectric element 15 in the expansion/contraction axis direction. FIG. In FIG. 7, the case 11 on the front side seen through is not shown.

As shown in FIG. 7, since the piezoelectric element 15 and the supporting member 12a and the supporting member 12b are fixed, the supporting member 12a and the supporting member 12b are arranged so that the piezoelectric element 15 and the housing 11 are expanded and contracted in accordance with the expansion and contraction of the piezoelectric element 15. Vibrates in the longitudinal direction. That is, in the probe device 1, by applying a voltage to the piezoelectric element 15, the probe 20 is displaced in the Z direction.

Next, the probe 20 is attached.

First, the probe 20 is inserted into the second through hole 14a of the fixing member 14 (step S14). The insertion member 17 and the holding member 16 are inserted from the rear end side of the probe 20 in advance and arranged at a predetermined position on the front end side. The positions of the insertion member 17 and the holding member 16 on the probe 20 are preferably arranged so that the tips thereof do not protrude as much as possible when the probe 20 is attached to the probe scanning mechanism 10. For example, the degree of protrusion is preferably 30 mm or less. Then, the probe 20 on which the insertion member 17 and the holding member 16 are arranged is inserted into the second through hole 14a of the fixing member 14 arranged on the support member 12a. At this time, the probe 20 is inserted into the second through hole 14a from the rear end side. This is to prevent damage to the tip of the probe 20.

Next, the holding member 16 is inserted between the fixed member 14 and the probe 20 by the insertion member 17 (step S16). At this time, the holding member 16 is pushed into the second through hole 14a of the fixing member 14 while screwing the insertion member 17 into the screw groove formed inside the second through hole 14a of the fixing member 14. As a result, the holding member 16 is pushed while being crushed into the second through hole 14a, so that the tip end side of the probe 20 can be elastically fixed to the fixing member 14 arranged on the support member 12a. The strength of fixing the probe 20 to the fixing member 14 can be adjusted by changing the insertion position of the insertion member 17 to change the crushing condition of the holding member 16.

Next, the other holding member 16 and the insertion member 17 are passed through the rear end side of the probe 20, and the holding member 16 is inserted by the insertion member 17 into the fixing member 14 and the probe arranged on the support member 12b in the same manner as the front end side. Insert between 20. Similar to the attachment on the tip side of the probe 20, while holding the insertion member 17 in the screw groove formed inside the second through hole 14 a of the fixing member 14, the holding member 16 is fixed to the second fixing member 14. It is pushed into the through hole 14a. As a result, the holding member 16 is pushed while being crushed into the second through hole 14a, so that the rear end side of the probe 20 can be elastically fixed to the fixing member 14 arranged on the support member 12b.

After that, the attachment of the probe 20 is completed by cutting the rear end side of the probe 20 into a desired length.

By the method of attaching the probe scanning mechanism 10 and the probe 20 described above, in SICM, for example, the size and weight of the probe device 1 can be reduced to 1/10 or less of the conventional one.

FIG. 8 is a graph showing the characteristics of the probe scanning mechanism 10 according to the present embodiment. FIG. 8 shows the displacement of the piezoelectric element 15 of the probe scanning mechanism 10 when the diameter of the bottom surface is 5 mm, the diameter of the first through hole 15a is 3 mm, the length is 10 mm, and the resonance frequency of free vibration is about 120 kHz. A vibration characteristic of the probe 20 when the probe 20 is attached to the probe scanning mechanism 10 is shown by using the one having a diameter of about 10 μm. In FIG. 8, the horizontal axis represents the frequency of the voltage signal (driving signal) for driving the piezoelectric element 15, and the left vertical axis represents the ratio (Gain) of the displacement of the tip of the probe 20 to the amplitude of each driving frequency.

Since the size and weight of the probe apparatus 1 can be reduced to 1/10 or less of the conventional one by the above-described attachment method of the probe scanning mechanism 10 and the probe 20, the displacement of the tip of the probe 20 is reduced as shown in FIG. From the resonance frequency of 100 Hz to the resonance frequency of about 120 kHz, there is no abrupt change or discontinuous change and it is stable. Although not shown, the change in the phase of the tip of the probe 20 is similar to the change in the displacement of the tip of the probe 20. From this result, it is understood that the resonance frequency of the probe device 1 in which the probe 20 is attached to the probe scanning mechanism 10 is approximately 120 kHz which is substantially the same as the resonance frequency of the probe scanning mechanism 10 before the probe 20 is attached. Therefore, in the probe scanning mechanism 10 in which the resonance frequency of the probe scanning mechanism 10 is about 120 kHz, it can be confirmed that the resonance frequency of the probe device 1 hardly decreases even when the probe 20 is attached to the probe scanning mechanism 10.

As a comparative example, a resonance frequency of a commercially available SICM Z scanner will be described. In a commercially available SICM Z scanner in which the displacement of the piezoelectric element is about 25 μm, the resonance frequency of the Z scanner is about 3 kHz when the probe is not attached, but is about 1 kHz when the probe is attached, and the probe is attached. It will be reduced to 1/3 of the case without it.

On the other hand, in the probe device 1 according to the present embodiment, the resonance frequency of the probe device 1 in which the probe 20 is attached to the probe scanning mechanism 10 is almost the same as the resonance frequency of the probe scanning mechanism 10 before the probe 20 is attached. there were. Therefore, it can be said that the probe scanning mechanism 10 according to the present embodiment, which has a resonance frequency of more than 100 kHz, can perform 100 times or more high speed operation of the Z scanner used in the commercially available SICM.

When replacing the probe 20, the probe 20 can be pulled out from the fixing member 14 by loosening the insertion member 17 along the screw groove to loosen the fixing of the holding member 16 to the probe 20. Then, a new probe 20 is inserted into the second through hole 14a of the fixing member 14 from the rear end side, and the inserting member 17 is tightened along the screw groove to crush the holding member 16 while the second member of the fixing member 14 is crushed. Insert into the through hole 14a. Thereby, the new probe 20 can be fixed to the fixing member 14 again. Therefore, with the configuration of the probe scanning mechanism 10 according to the present embodiment, the probe 20 can be easily attached and detached.

[Scanning probe microscope]
Next, a scanning probe microscope 100 including the above-described probe device 1 will be described. FIG. 9 is a schematic diagram showing the configuration of the scanning probe microscope 100 according to the present embodiment.

As shown in FIG. 9, the scanning probe microscope 100 according to the present embodiment includes the probe device 1 and a stage 110 on which the sample 200 is mounted. The stage 110 moves in a direction orthogonal to the scanning direction of the probe scanning mechanism 10. That is, the stage 110 on which the sample 200 is placed moves in the XY directions, and the probe apparatus 1 incorporating the probe 20 moves in the Z direction. The scanning probe microscope 100 may have a configuration in which the XY scanning mechanism is mounted on the probe device 1 instead of the stage 110.

Further, as shown in FIG. 9, the scanning probe microscope 100 includes a signal detection unit 120, a control unit 130, an XY drive unit 140, a Z drive unit 150, and a display unit 160.

The stage 110 has a transparent portion 110a formed of a transparent member in a part thereof. Then, the sample 200 is mounted on the transparent portion 110a. Thereby, the sample 200 mounted on the stage 110 can be visually recognized by an optical microscope or the like through the light transmitting section 110a.

The sample 200 may be covered with water droplets 210. In this case, the probe 20 measures the sample 200 in water, that is, in the water droplet 210.

The signal detection unit 120 detects the signal measured by the probe device 1 in the sample 200.

The control unit 130 performs control for moving the probe apparatus 1 and the stage 110 based on the signal measured on the sample 200.

The XY drive unit 140 supplies a signal for moving the stage 110 in the XY directions to the stage 110 based on the control signal from the control unit 130.

The Z drive unit 150 supplies the probe device 1 with a signal for moving the probe device 1 in the Z direction based on the control signal from the control unit 130.

Although the scanning probe microscope 100 described above is configured to move the stage 110 in the XY directions, the probe device 1 may be moved in the X, Y, and Z directions. In this case, the XY drive unit 140 is connected to the probe device 1, and the probe device 1 can move in the XY direction and the Z direction.

The display unit 160 is a monitor that displays an image of the signal detected by the signal detection unit 120.

With the above configuration, in the scanning probe microscope 100, information on the surface of the sample 200 can be obtained by scanning the stage 110 on which the sample 200 is mounted in the XY directions and the probe device 1 in the Z direction. At this time, the probe device 1 can be stably scanned in the Z direction at high speed, and thus the measurement image can be stably acquired at high speed.

[Effects, etc.]
As described above, according to the probe scanning mechanism 10 according to the present embodiment, the probe 20 can be easily attached and detached, and the tip of the probe 20 is stably held inside the second through hole 14a of the fixing member 14. be able to. Therefore, the tip of the probe 20 can be stably held inside the first through hole 15a of the piezoelectric element 15. Therefore, even if the probe 20 is attached, the resonance frequency hardly decreases. Thereby, the probe 20 can be scanned at high speed. Therefore, it is possible to provide a probe scanning mechanism capable of scanning the probe in the Z direction at high speed. Furthermore, by using this probe scanning mechanism, it is possible to realize a probe device that can acquire a measurement image at high speed. Can be obtained.

(Modification of Embodiment 1)
Next, a modified example of the present embodiment will be described. FIG. 10 is a bottom view showing another configuration of the support member of the probe scanning mechanism according to this modification.

The probe scanning mechanism according to this modification is different from the probe scanning mechanism according to the embodiment in that the configuration of the support member is different.

As shown in FIG. 10, the support member 312a according to the present modification has a substantially square shape in a plan view, like the support member 12a shown in the embodiment. Further, the support member 312a includes a fixing hole 31, an opening 32, a recess 33, a fixing hole 331 corresponding to the groove 34, an opening 332, a recess (not shown), and a groove 334 of the support member 12a.

Here, as shown in FIG. 10, the groove 334 has a cutout portion 335 and a cutout portion 336 for passing wiring. The notch portion 335 and the notch portion 336 have a radius such that the width of the groove 334 is increased in the vicinity of the center in the circumferential direction of the groove 334 formed along the circumferential direction of the circle centered on the center of the opening 332. It is formed in a semi-circular concave shape of about 0.5 mm.

Thereby, the wiring for supplying the voltage to the piezoelectric element 15 can be arranged so as to pass through the notch 335 or the notch 336 of the groove 334. Therefore, the voltage can be supplied to the piezoelectric element 15 with a simple configuration.

The size and shape of the notch 335 and the notch 336 are such that the mechanical rigidity of the support members 12a and 12b does not change significantly, and the wiring for supplying voltage to the piezoelectric element 15 can be passed through. Any shape may be used as long as it has a shape. Further, the position where the cutout portion 335 and the cutout portion 336 are provided in the groove 334 is not limited to the above-described position, and may be another position.

(Embodiment 2)
Next, a probe device according to the second embodiment will be described. FIG. 11 is a sectional view of the probe device according to the present embodiment. The sectional view shown in FIG. 11 is a sectional view at the same position as the line III-III shown in FIG. In addition, below, the structure different from the probe device 1 according to the first embodiment will be described, and the description of the same structure as the probe device 1 will be omitted.

The probe device according to the present embodiment is different from the probe device 1 according to the first embodiment in that in the probe scanning mechanism 300, the probe 20 is placed inside the first through hole 15a of the piezoelectric element 15 by the adhesive 316a. It is the point that is retained. More specifically, the probe 20 is bonded to the inside of the second through hole 14a formed in the insertion member 17 arranged in the first through hole 15a with the adhesive 316a, so that the first through hole is formed. It is held inside the hole 15a. That is, in the probe scanning mechanism 300, the elastic member is the adhesive 316a. By using the adhesive 316a as the elastic member, the probe 20 can be easily held inside the first through hole 15a. Further, when the probe 20 is detached from the probe scanning mechanism 300, the adhesive 316a can be peeled off by pressing the rear end side of the probe 20 with a protrusion, and the probe 20 can be easily pushed out from the second through hole 14a.

As shown in FIG. 11, in the probe scanning mechanism 300, an adhesive 316a is provided between the probe 20 and the insertion member 17, and the probe 20 and the insertion member 17 are joined by the adhesive 316a. Further, in the probe scanning mechanism 10 according to the first embodiment, the holding member 16 for holding the probe 20 in the first through hole 14a is used, but in the probe scanning mechanism 300, the length of the first through hole 15a is long. On the other hand, when the length of the insertion member 17 is short, the holding member 16 is replaced by a spacer 316.

The spacer 316 is provided to fill the gap between the size of the hole in the first through hole 15a and the outer periphery of the probe 20 so that the probe 20 does not move inside the first through hole 15a. The spacer 316 may be made of metal or plastic, for example. As a result, the probe 20 is stably held by the probe scanning mechanism 300.

The spacer 316 may or may not be bonded to at least one of the first through hole 15a and the probe 20 with an adhesive 316a.

(Embodiment 3)
Next, a probe device according to the third embodiment will be described. FIG. 12 is a sectional view of the probe device according to the present embodiment. The sectional view shown in FIG. 12 is a sectional view at the same position as the line III-III shown in FIG. 1. In addition, below, the structure different from the probe device 1 according to the first embodiment will be described, and the description of the same structure as the probe device 1 will be omitted.

The probe device according to the present embodiment is different from the probe device 1 according to the first embodiment in that the probe scanning mechanism 400 uses an adhesive as the holding member 16, and further, the insertion member 17 and the probe 20. The point is that the intermediate member 416 is provided therebetween.

As shown in FIG. 12, in the probe scanning mechanism 400, an intermediate member 416 is provided between the probe 20 and the insertion member 17. Further, the probe 20 and the intermediate member 416, and the intermediate member 416 and the insertion member 17 are respectively joined with an adhesive (not shown).

The intermediate member 416 is, for example, a polyimide resin tube. Although it is generally difficult to join the probe 20 formed of glass and the insertion member 17 formed of metal, by arranging the intermediate member 416 between the probe 20 and the insertion member 17, the intermediate member 416 is disposed. The probe 20 can be joined to the insertion member 17 with an adhesive via the. Therefore, the probe 20 can be easily fixed to the second through hole 14a.

When removing the probe 20 from the probe scanning mechanism 400, the probe 20 and the intermediate member 416 or the intermediate member 416 and the insertion member 17 are peeled off by pressing the rear end side of the probe 20 with a protrusion, and the probe 20 is removed. Can be easily pushed out from the second through hole 14a. Therefore, the user can reuse the probe scanning mechanism 400 by replacing the probe 20.

The probe scanning mechanism, the probe device, and the scanning probe microscope according to the present invention have been described above based on the embodiments, but the present invention is not limited to the embodiments. The present invention also includes forms obtained by making modifications to those skilled in the art by those skilled in the art, and other forms realized by arbitrarily combining the constituent elements of the plurality of embodiments.

For example, in the above-described embodiment, the scanning probe microscope uses SICM as an example and the probe is a glass pipette, but the probe is not limited to the glass pipette, and for example, a metal pipe, a polymer, an enzyme, or It may be a probe modified with carbon nanotubes or a conductive metal probe.

Further, in the above-described embodiment, the configuration in which the stage is moved in the XY direction and the probe is moved in the Z direction in the scanning probe microscope has been shown, but the present invention is not limited to this configuration, and for example, the probe is not limited to the Z direction but also in the XY direction. May also be configured to move. Alternatively, the stage may move in the Z direction.

Further, in the above-described embodiment, the laminated piezoelectric element is shown as an example of the piezoelectric element, but the piezoelectric element may not be the laminated type. The material of the piezoelectric element may be any material as long as it has a piezoelectric function. Further, the size and shape of the piezoelectric element may be changed appropriately.

Further, in the above-described embodiment, the pair of support members have the same configuration, but the pair of support members may have different configurations.

Further, in the above-described embodiment, the holding member is the elastic member, but the holding member is not limited to the elastic member and may be any one as long as the probe can be fixed to the fixing member. Good. For example, the holding member may be an adhesive, or may be a configuration in which an elastic member and an adhesive are combined. Further, instead of the elastic member, a spacer made of metal or resin may be used, and the probe and the spacer, and the spacer and the insertion member may be bonded with an adhesive. Further, the fixing member and the insertion member are not limited to the above-mentioned configurations, and may be those whose size and shape are changed.

Further, in the above-described embodiment, the supporting member is fixed to the piezoelectric element by the fixing member, but the supporting member may be fixed to the piezoelectric element by another method. For example, the support member may be fixed to the piezoelectric element with an adhesive.

Further, the configuration of the probe microscope is not limited to the above-mentioned one, and may be appropriately changed according to the type of the probe microscope. For example, when an optical fiber is used as the probe of the scanning probe microscope, a laser mechanism may be provided as a sensor for detecting the signal of the optical fiber.

INDUSTRIAL APPLICABILITY The probe scanning mechanism according to the present invention is useful for a scanning probe microscope that acquires physical information on the sample surface or chemical properties of the sample as a signal by scanning the probe with respect to the sample.

REFERENCE SIGNS LIST 1 probe device 10, 300, 400 probe scanning mechanism 11 housing 11a cavity 11b screw holes 12a, 12b, 312a support member 13 screw member 14 fixing member 14a second through hole 15 piezoelectric element 15a first through hole 16 holding member 17 Insertion Member 20 Probe 20a Conductor 31, 331 Fixing Hole 32, 332 Opening 33 Recess 34, 334 Groove 100 Scanning Probe Microscope 110 Stage 110a Light Transmitting Section 120 Signal Detecting Section 130 Control Section 140 XY Driving Section 150 Z Driving Section 160 Display unit 200 Sample 210 Water drop 316 Spacer 316a Adhesive 335, 336 Cutout 416 Intermediate member

Claims (12)

A probe scanning mechanism for scanning a long probe,
A piezoelectric element that has a first through hole that penetrates both ends in the same direction as the longitudinal direction of the probe, and that scans the probe inserted in the first through hole in the longitudinal direction of the probe,
A tubular housing that houses the piezoelectric element;
A pair of support members that are respectively fixed to one end and the other end of the housing and support the housing with the piezoelectric element interposed therebetween,
A fixing member that fixes one of the pair of support members to one end of the piezoelectric element in the expansion/contraction axis direction and fixes the other of the pair of support members to the other end of the piezoelectric element in the expansion/contraction axis direction,
A probe scanning mechanism, comprising: a holding member that holds the probe inside the first through hole at least at the tip side of the probe. The fixing member has second through holes penetrating both ends in the same direction as the expansion and contraction axis direction of the piezoelectric element,
The probe scanning mechanism according to claim 1, wherein the holding member holds the probe inside the second through hole on the front end side of the probe and the rear end side of the probe. The probe scanning mechanism according to claim 2, wherein the holding member holds the front end side of the probe more firmly than the rear end side of the probe. The probe scanning mechanism according to claim 1, wherein the holding member is formed of an elastic member. The probe scanning mechanism according to claim 4, wherein the elastic member is an adhesive. An insertion member inserted into the second through hole between the probe and the fixing member,
The insertion member has a thread on the side surface,
The fixing member has a thread groove on a side surface inside the second through hole,
The probe scanning mechanism according to claim 2, wherein the insertion member is screwed into the inside of the second through hole with the thread engaging with the thread groove. An intermediate member is provided between the probe and the insertion member,
The probe scanning mechanism according to claim 6, wherein the probe is held inside the second through hole via the intermediate member. The probe scanning mechanism according to claim 1, wherein the pair of support members have elasticity. The probe scanning mechanism according to claim 8, wherein the support member has a diaphragm structure. The probe scanning mechanism according to claim 1, wherein the pair of support members have the same configuration. A probe scanning mechanism according to any one of claims 1 to 10,
A probe device comprising a probe held by the probe scanning mechanism. A probe device according to claim 11,
A scanning probe microscope including a stage on which a sample is mounted.

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