JP2000258330A - Scanning-type probe microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain high detection sensitivity without fixing a probe and a piezoelectric body in one piece by flexibly pinching the probe with first and second elastic bodies and allowing the first elastic body to have a piezoelectric body. SOLUTION: In an elastic body 201 for pinching a probe 101 flexibly, a piezoelectric body 202 is formed on a surface, and an elastic body 206 also plays a role of a vibrator. A probe 101 that is excited up and down in the elastic body 206 is bent and vibrated with a part in contact with the elastic body 201 as a support, and at the same time the elastic body 201 causes bending deformation with the contact part as a pressure cone apex since compliance is large. Therefore, at the moment when the probe 101 moves up and down, the elastic body 201 is bent and deformed in a peripheral direction, the piezoelectric body 202 expands and contracts to generate a bipolar voltage. In this case, when the frequency of the elastic body 206 is swept, the vibration amplitude of the probe 101 increases closer to a mechanical, natural frequency. As the amplitude increases, the expansion and contraction of the piezoelectric body 202 also increases and a generated voltage increases. By monitoring the change in the generated voltage, the resonance characteristics of the probe 101 can be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope for observing the shape and surface properties of a sample surface by scanning the probe along the surface of the sample. The present invention relates to a so-called dynamic control scanning probe microscope that controls a distance between a sample surface and a tip of a probe by detecting a change in a vibration state, and more particularly to a scanning probe microscope using an optical fiber as a probe.

[0002]

2. Description of the Related Art A case of observing a sample surface with a conventional dynamic control scanning probe microscope will be considered. Dynamically controlled scanning probe microscopes
There are two types depending on the type of force detected by the probe. One is an atomic force feedback method that uses a cantilever-shaped probe to detect the atomic force and controls the distance between the probe and the sample.
The other is a shear force feedback system that detects the shear force using a straight probe and controls the distance between the probe and the sample. In either method, the probe is caused to resonate and vibrate near the mechanical resonance frequency by the vibrator to approach the sample surface. When the distance between the probe tip and the sample surface is about 10 nm or less, an atomic force or a shear force acts. This force changes the resonance characteristics. The change is a change in amplitude or a change in phase. If the distance between the probe and the sample is controlled by a scanner so that the amount of change in amplitude and the amount of change in phase are constant, and the control signal is imaged, the surface shape of the sample can be observed. The difference between the two systems is that in the atomic force feedback system, the probe is vibrated perpendicular to the sample surface, whereas in the shear force feedback system, the probe is vibrated in parallel to the sample surface.

In both the atomic force feedback system and the shear force feedback system described above, an optical method such as an optical lever method or an optical interference method is used to detect a change in the vibration characteristic of the probe. Has been mainly used. In particular, the optical lever method is used in most scanning probe microscopes because of its high detection sensitivity and relatively easy adjustment.

[0004] However, such an optical detection method requires an optical mechanism, and is mechanically complicated and large in size, and is limited in the device configuration. In order to solve such problems, proposals have been made to use a quartz oscillator for detecting a change in the oscillation characteristics of a probe for an atomic force microscope, as disclosed in Japanese Patent Application Laid-Open Nos. 63-309803 and 4-1.
02008.

Japanese Patent Application Laid-Open No. 9-089911 discloses a method of non-optically detecting a scanning near-field microscope by integrating a tuning-fork type crystal unit and an optical fiber to constitute a scanning near-field microscope. FIG. 9 is a schematic view showing an example of a scanning probe microscope of the type disclosed in Japanese Patent Application Laid-Open No. 9-089911, in which a change in the vibration characteristics of a probe is detected using a tuning-fork type crystal resonator. This scanning probe microscope is of a shear force feedback type in which a straight probe is vibrated in parallel to a sample surface. The probe 901 is arranged close to the surface of the sample 902, and the sample 902 is mounted on the sample table 903. The sample table 903 is fixed on the scanner 904. The scanner 904 is of a type including a single piezo tube, and is widely used in a scanning probe microscope. On the outer peripheral side of the scanner 904,
An X electrode 908, a Y electrode 909, and a Z electrode 910 are formed, and by applying a voltage to each of them, the piezo scanner can be independently deformed in each of the XYZ directions.

[0006] The probe 901 is attached to displacement detecting means 905 including the probe 901. The details of the displacement detection means 905 will be clearly shown in the description of FIG. 10 described later, but the excitation means of the probe 901 and the probe 901
And a tuning fork type crystal resonator 1001 as a vibration detecting means. The signal from the displacement detection means 905 is a signal indicating the vibration state of the probe 901 and changes according to the distance between the probe 901 and the sample 902. This signal is introduced to the feedback controller 906. The feedback controller 906 amplifies and modulates this signal, applies a voltage to the Z electrode 910 of the scanner 904, and keeps the distance between the probe 901 and the sample 902 constant. On the other hand, the scanner controller 907
A voltage can be independently applied to the X electrode 908 and the Y electrode 909. By linking these two applied voltages, the scanner 904 can be deformed so as to trace an arbitrary area. At this time, the voltage applied to each of the X electrode 908 and the Y electrode 909 and the voltage applied to the Z electrode 910 from the feedback controller 906 are input to the oscilloscope 909 and mapped in a time series. Can be reproduced as an image.

The operation state will be described in more detail. Now, the probe 901 is excited in parallel with the surface of the sample 902. That is, it vibrates right and left on the paper. Probe 9
The vibration state of 01 changes due to a shear force (shear force) acting between the probe 901 and the sample 902. This shearing force (shear force) is generated by moisture or contamination on the surface of the sample 902, and changes exponentially depending on the distance between the probe 901 and the sample 902. Therefore, by detecting a change in the vibration state of the probe 901, the probe 901 and the sample 90 are detected.
2 can be known. At this time, in order to increase the detection sensitivity, the probe 901 is caused to resonate and vibrate near its natural frequency. However, as described in FIG.
Since the probe 901 and the tuning-fork type quartz resonator are integrally fixed, the natural frequency referred to here is exactly the same as that of the tuning fork-type quartz resonator 1001 in a state where the probe 901 is added to the tuning-fork quartz resonator 1001. This is the natural frequency.

[0008] Here, the probe 901 is brought close to the surface of the sample 902, and thereafter, the X electrode 908 of the scanner 904.
And a voltage is periodically applied to the Y electrode 909 and the sample 902 is scanned with respect to the probe 901. First,
The probe 901 and the tuning-fork type crystal unit 1001 are vibrated by the excitation means in a no-load state, and their resonance characteristics are measured. This is performed by converting a change in vibration of the probe 901 into a change in voltage signal by the tuning fork type crystal resonator 1001. When the probe 901 is made to approach the sample 902 while vibrating in the vicinity of the natural frequency of the tuning-fork type quartz resonator 1001 (which is close to the natural frequency and does not match the natural frequency), a shear force (shear force) is generated. Probe 9
The vibration state of 01 changes. The change is, for example, a change in amplitude or a change in phase. If these changes are set to a certain value, the distance between the probe 901 and the sample 902 is uniquely determined.

In this state, the sample 9 is scanned by the scanner 904.
02 is scanned in the X and Y directions. The surface of the sample 902 has minute irregularities, and by scanning the sample 902, the distance between the probe 901 and the sample 902 changes.
The vibration state of 01 changes. This change amount is detected by the feedback controller 906, and the scanner 9 is moved so that the distance between the probe 901 and the sample 902 returns to the original state.
A feedback voltage is applied to the Z electrode 910 of FIG.
By repeating this, the probe 901 traces the surface of the sample 902 while keeping the distance to the sample 902 constant.

[0010] At this time, the feedback voltage applied to the Z electrode 910 and the voltage applied to the X electrode 908 and the Y electrode 909 are input to the oscilloscope 909 and mapped in a time series. Can be reproduced as an image. As described above, this scanning probe microscope controls the distance between the probe and the sample using shear force (shear force), and is therefore called a shear force feedback scanning probe microscope.

FIG. 10 shows in detail the structure of the displacement detecting means 905 in the structure of the shear force feedback scanning probe microscope shown in FIG. In FIG. 10, a probe 901 is a tuning fork type quartz oscillator 10.
01 is fixed to one arm. The fixing is generally performed by adhesion. The tuning fork type crystal resonator 1001 is
002. In many cases, an adhesive is used to fix the tuning-fork type crystal unit 1001 and the vibrating body 1002. Although electrodes and terminals are formed on the tuning-fork type crystal resonator 1001, they are omitted in FIG. A signal line is drawn out from a terminal portion of the electrode, and is connected to the feedback controller 906 shown in FIG. The tuning-fork type crystal unit 1001 generates a voltage when the arm is deformed in a direction perpendicular to the arm.

Further, the vibrating body 1002 is fixed to a probe holder 1003, and a probe fixed body 1004 holding a probe 901 is fixed to the probe holder 1003. A driving circuit 912 that generates a voltage waveform for vibrating the vibrating body 1002 is connected to the vibrating body 1002.

Next, the operation state will be described. Now, it is assumed that the tuning fork type crystal resonator 1001 and the probe 901 are excited by the vibrating body 1002 in the left and right directions (in the direction of the arrow) of the drawing. As described above, the tuning fork type crystal unit 1001 and the probe 901 resonate near the mechanical natural frequency of the tuning fork type crystal unit 1001 in order to increase the detection sensitivity.
The natural frequency of a crystal oscillator that is easily available and used for watches and the like is about 32 kHz. When the tip of the probe 901 approaches the sample 902, the probe 901 receives a shear force (shear force), and the vibration state changes. For example, a change in amplitude or a change in phase. This change can be read from the change in the voltage signal transmitted from the crystal unit 1001. This voltage signal is sent to the feedback controller 906, and the surface shape of the sample 9702 can be reproduced through the operation described with reference to FIG.

FIG. 11 shows in detail the structure of a displacement detecting means 905 of another embodiment of the structure of the shear force feedback scanning probe microscope shown in FIG. In FIG. 11, a piezoelectric body for excitation 1101
And the vibration detecting piezoelectric body 1102 are integrally disposed on the probe holder 1103. The probe 901 is fixed to both of these two piezoelectric bodies. The fixing is generally performed by adhesion. Electrodes and terminals are formed on the excitation piezoelectric body 1101 and the vibration detection piezoelectric body 1102, but they are omitted in FIG. A signal line is drawn from a terminal portion of the electrode of the excitation piezoelectric body 1101 and connected to the drive circuit 912 shown in FIG. The excitation piezoelectric body 1101 is
The probe 901 vibrates in a direction perpendicular to the voltage waveform applied from the drive circuit 912. On the other hand, a signal line is drawn out from a terminal portion of an electrode of the vibration detecting piezoelectric body 1102 and connected to the feedback controller 906 shown in FIG. The piezoelectric body for vibration detection 1102 generates a voltage in response to deformation in a direction perpendicular to the probe 901.

Further, a probe fixing body 1104 holding a probe 901 is fixed to the probe holder 1103. Next, the operation state will be described. Now, probe 901
Are excited to the left and right (in the direction of the arrow) on the paper surface by the excitation piezoelectric body 1102. The probe 901 is resonated at the mechanical natural frequency of the vibration detecting piezoelectric body 1101. When the tip of the probe 901 approaches the sample 902, the probe 901 receives a shear force (shear force), and the vibration state changes. For example, a change in amplitude or a change in phase. This change can be read from the change in the voltage signal transmitted from the vibration detecting piezoelectric body 1101. This voltage signal is supplied to the feedback controller 906
Is sent to the sample 902 through the operation described with reference to FIG.
Can be reproduced.

[0016]

With the above proposal, the configuration of the scanning probe microscope is becoming simpler. However, a new problem has occurred due to the configuration of the detecting means. In any of the prior art examples, a piezoelectric vibrator, such as a quartz vibrator with a probe, resonates and vibrates in the vicinity of its natural frequency. That is what we are trying to detect. The sensor is configured as a so-called narrow-band resonance type sensor, and has a high Q
Values were needed. When such a detecting means is configured, it is necessary to integrally fix the probe and the piezoelectric vibrator, which causes a problem and a problem that the characteristic of the displacement detecting means is determined by the characteristic of the piezoelectric vibrator. Get up. This will be specifically described below.

For example, Japanese Patent Laid-Open Publication No.
No. 89911 uses a tuning fork type quartz resonator for detecting a change in vibration characteristics. As a configuration, as described with reference to FIG. 8, a probe made of an optical fiber is bonded to an arm on one side of the tuning fork type quartz resonator. When the optical fiber probe is bonded to the arm of the tuning-fork type quartz resonator, the bonding portion is an extremely small area. For example, when an optical fiber having a diameter of 125 μm is used, the area is about 100 μm square. Therefore, while the bonding operation is difficult, the bonding position,
The reproducibility of adhesive strength is also low. In addition, there is a problem that the mechanical characteristic value of the tuning fork type quartz oscillator + probe tends to vary depending on the bonding state. That is, it is a spring constant and a Q value. In particular, the Q value is an element that determines the detection sensitivity of the change in the resonance frequency characteristic, and is preferably a constant value.

On the other hand, there is a problem that the Q value of this tuning-fork type crystal resonator is too high for performing feedback control. In the case of the above-mentioned tuning fork type quartz resonator, the Q value is close to 10,000 under no load. In the example of Japanese Patent Application Laid-Open No. 9-089911, even when the probe is
It shows a Q value of 000 or more. When the Q value is high,
As the vibration decay time increases, the response speed decreases, and the speed of scanning the sample by the scanner decreases.

On the other hand, currently available quartz oscillators are for clocks and have a resonance frequency of about 32 k.
Hz. In a non-contact mode scanning probe microscope that resonates the probe, it is necessary to make the natural frequency of the crystal unit and the natural frequency of the probe unit equal or close to each other, so the available probe is uniquely determined. . For this reason, the spring constant of the probe is uniquely determined, and there is a problem that it is not possible to properly use probes having several kinds of spring constants in order to cope with various kinds of samples.

Another problem is that the crystal oscillator and the piezoelectric element have a large spring constant, that is, they are hard. The spring constant of a general non-contact observation cantilever probe for a scanning probe microscope is 3 to 4.
The spring constant of a straight optical fiber probe for a scanning force microscope of the shear force feedback type is 0 to 70 N / m, whereas the spring constant of the quartz oscillator is 3200 N / m. In the conventional scanning probe microscope, since the quartz oscillator and the probe are integrally used, the spring constant of the probe is substantially equal to that of the quartz oscillator. When the distance between the probe and the sample surface is observed, the probe and the sample surface do not come into contact with each other, and the hardness of the crystal unit does not matter, and high sensitivity is achieved by the high mechanical Q value of the crystal unit. You can take advantage of the feature. However, when the distance between the probe and the sample surface is reduced to improve the spatial resolution, the probe may come into contact with the sample. When the sample to be observed is an organism or an organic thin film, there is a problem that the sample is damaged.

An object of the present invention is to form a non-resonant displacement sensor by using a flexible elastic body and a wide band (soft) piezoelectric body having high compliance without fixing the probe and the piezoelectric body integrally. This is to solve the problems of the prior art.

[0022]

In order to solve the above-mentioned problems, a probe having a sharpened tip, a probe vibrator for vibrating the probe, and a displacement detector for detecting a change in the vibration characteristic of the probe vibration. Means, a scanner that three-dimensionally scans the sample with respect to the probe, and a probe made of an elastic body in a scanning probe microscope having a feedback circuit that amplifies or modulates a displacement signal of the displacement detection means and feeds it back to the scanner. It has two elastic bodies holding the probe, namely, a first elastic body and a second elastic body, and the probe is flexibly sandwiched between the first elastic body and the second elastic body. A scanning probe microscope has been devised in which one elastic body or probe has a piezoelectric body to constitute a displacement detecting means.

With such a configuration, 1) there is no need to perform an operation of bonding a piezoelectric element such as a quartz oscillator to a probe, and the mechanical characteristics of the quartz oscillator and the probe tend to vary depending on the state of adhesion. Lost. 2) Since a piezoelectric polymer material having a small Q value and having no specific natural frequency can be used, the displacement detecting means can be configured as a broadband non-resonant displacement sensor. This allows
It is not necessary to adjust the natural frequency of the probe, and it is possible to detect a change in the vibration state as it is, and it is possible to use various kinds of probes having different natural frequencies.

3) Since a piezoelectric polymer material having a small Q value can be used, a decrease in the response speed caused by a high Q value can be prevented, and a fast sample can be scanned. 4) Since the probe is flexibly and elastically held by the displacement detecting means, the vibration of the probe can be attenuated by adjusting the holding force, and the Q value of the probe can be properly adjusted.

5) Since the displacement detecting means is soft, it does not affect the spring constant of the probe and does not damage the soft sample. Further, various probes having different spring constants can be used. It has an excellent effect.

[0026]

Embodiment 1 Embodiment 1 of the present invention will be described below with reference to the drawings. FIG.
1 shows a configuration of a scanning probe microscope according to Embodiment 1 of the present invention. The configuration of FIG. 1 is not a shear force feedback scanning probe microscope using a straight probe described in the prior art of FIG. 9, but an atomic force feedback scanning probe microscope using a cantilever probe. It is an example. The probe 101 is arranged close to the vicinity of the surface of the sample 102, and the sample 102 is mounted on the sample table 103. The sample stage 103 is fixed on a scanner 104. The scanner 104 is of a type including a single piezo tube, and is generally used in a scanning probe microscope. An X electrode 108, a Y electrode 109, and a Z electrode 110 are formed on the outer peripheral side surface of the scanner 104, and by applying a voltage to each of them, the piezo scanner can be independently deformed in each of the XYZ directions. .

The probe 101 is attached to a displacement detecting means 105 including the probe 101. Although the details of the displacement detecting means 105 will be clearly shown in the description of FIG. 2 described later, the displacement detecting means 105 also includes an exciting means of the probe 101 and a vibration detecting means of the probe 101. Displacement detecting means 105
This signal is a signal indicating the vibration state of the probe 101, and changes depending on the distance between the probe 101 and the sample 102. This signal is introduced to the feedback controller 106. The feedback controller 106 amplifies and modulates this signal, applies a voltage to the Z electrode 110 of the scanner 104, and keeps the distance between the probe 101 and the sample 102 constant. On the other hand, the scanner controller 107 includes an X electrode 108 and a Y electrode 109.
Can be applied independently. By linking these two applied voltages, the scanner 104 can be deformed so as to trace an arbitrary area. At this time, the voltage applied to each of the X electrode 108 and the Y electrode 109 and the voltage applied to the Z electrode 110 from the feedback controller 106 are input to the oscilloscope 109 and mapped in a time series. Can be reproduced as an image.

This operating state will be described in more detail. The vibration state of the probe 101 changes due to the interatomic force acting between the probe 101 and the sample 102, and the interatomic force changes exponentially according to the distance between the probe 101 and the sample 102. Therefore, a change in the distance between the probe 101 and the sample 102 can be known by detecting a change in the vibration state of the probe 101.

Here, the probe 101 is brought close to the surface of the sample 102, and then the X electrode 108 of the scanner 104 is
And a voltage is periodically applied to the Y electrode 109 and the sample 102 is scanned with respect to the probe 101. First,
The probe 101 is vibrated by the excitation means in a no-load state, and its resonance characteristics are measured. When the probe 101 is made to approach the sample 102 while being vibrated near its natural frequency, the vibration state of the probe 101 changes due to an atomic force. The change is, for example, a change in amplitude or a change in phase. If these changes are set to a certain value, the distance between the probe 101 and the sample 102 is uniquely determined.

In this state, the sample 1 is
02 is scanned in the X and Y directions. The surface of the sample 102 has minute irregularities. By scanning the sample 102, the distance between the probe 101 and the sample 102 changes.
The vibration state of 01 changes. The amount of change is detected by the feedback controller 106, and the scanner 1 is moved so that the distance between the probe 101 and the sample 102 returns to the original state.
A voltage is applied to the Z electrode 110 of FIG. By repeating this, the probe 101 traces the surface of the sample 102 while keeping the distance to the sample 102 constant. At this time, the voltage applied to the Z electrode 110 and the X electrode 1
08, the voltage applied to the Y electrode 109 is input to the oscilloscope 109 and time-sequentially mapped.
02 can be reproduced as an image.

The apparatus configuration diagram shown in FIG. 1 shows the main parts related to the present invention. In actual implementation of the present invention, general scanning other than that shown in FIG. The components used in the scanning probe microscope are also included. Further, the operation state described above is also an example of a non-contact method of a general scanning probe microscope, and does not limit the present invention.

FIG. 2 shows in detail the structure of the displacement detecting means 105 in the structure of the first embodiment of the scanning probe microscope of the present invention. In FIG. 2, the displacement detection means 105 shown in FIG. 1 is shown upside down to clarify the configuration. In FIG. 2, the probe 101 is elastically sandwiched between a first elastic body 201 and a second elastic body 206, and this serves as a vibration fulcrum of the probe 101.

The second elastic body 206 is made of a piezoelectric material and also serves as a vibrator. As the second elastic body 206, a widely used PZT bimorph vibrator or a laminated piezoelectric element is used. Second elastic body 206 and probe 10
A V-groove 208 is formed on the surface in contact with 1, and the position of the probe 101 can be determined by the V-groove 208 and the first elastic body 201.

On the surface of the first elastic body 201, the piezoelectric body 20 is provided.
2 are formed. The piezoelectric body 202 is a light and flexible material and needs to have flexibility. Specifically, a thin film made of a piezoelectric polymer material or the like is desirable. Representative examples of the piezoelectric polymer material include PVDF (polyvinyl fluoride) and P (VDCN / VAc) (vinyl cyanide-vinyl acetate copolymer). First
As for the material of the elastic body 201, any kind of material such as metal, resin, and rubber can be used. However, it is necessary to examine it from various characteristics such as shape, mass and elasticity. Preferably, plastics having high compliance such as polyethylene and polyester can be used. As a matter of course, when using a conductor such as a metal, it is necessary to pay attention to insulation.

As described above, by combining the piezoelectric polymer material with the flexible elastic body, the vibration displacement of the probe 101 is converted into the bending deformation of the elastic body, and the bending deformation gives the piezoelectric body 202 a tensile deformation. , It is possible to generate electric charges. Although not shown in the present embodiment, since the piezoelectric polymer material itself has elasticity, the first
It is also possible to constitute the elastic body 201 of the piezoelectric polymer material itself. A first electrode 203 (a) is formed on one surface of the piezoelectric body 202, and a ground electrode 203 is formed on the opposite side.
(E) is formed. In FIG. 2, the ground electrode 203
(E) shows a state in which the terminal portion is folded back to the first electrode 203 (a) side, and the display of the entire ground electrode 203 (e) is omitted. A signal line is led out from the terminal portion and connected to the feedback controller 106 shown in FIG. For example, when the piezoelectric lateral effect is used, the piezoelectric body 202 generates a potential in the thickness direction with respect to expansion and contraction in the length direction. The first elastic body 201 has both ends fixed to the probe holder 204 via the pressurizing adjusting means 207. The probe holder 204 is made of a substantially rigid body. In the present embodiment, the pressurizing adjusting means 207 is composed of two bolts, and changes the force (pressurizing) applied to the probe 101 by adjusting the bolts in the longitudinal direction of the strip portion 201 (a). Can be. By adjusting this pressurization, the resonance characteristics of the probe 101 can be adjusted to an optimal state.

Although FIG. 2 shows the first elastic body 201 in a state in which the first elastic body 201 is bent and subjected to a tensile deformation in advance, the first elastic body 201 can be held down in a state in which the first elastic body 201 is hardly bent (no pressurization). When the pressurizing adjustment means 207 is not provided, the first elastic body 201 can be fixed to the probe holder 204 with an adhesive or the like. The second elastic body 206 is also fixed to the probe holder 204. The fixing may be performed by any of an adhesive and a fastening means as long as vibration is not suppressed. Probe 101
Means that any part other than the vibrating part is connected to the probe holder 2
05, and is fixed to the probe holder 204. The probe 101 may be fixed to the probe holder 204 using an adhesive without using the probe holder 205. However, in consideration of exchanging the probe 101, it is preferable to fix the probe 101 with a fastening means such as a bolt which is easily detachable. A drive circuit 112 that generates a voltage waveform for vibrating the second elastic body 206 is connected to the second elastic body 206 that is an excitation unit of the probe 101.

Next, the operation state will be described. Now probe 1
01 is excited by the second elastic body 206 above and below the plane of the paper. The vibration of the probe 101 is transmitted to the first elastic body 201. However, since the first elastic body 201 has both ends fixed, the probe 101 causes bending vibration with the contacting portion as a fulcrum. At the same time, since the first elastic body 201 has high compliance, the probe 1
Bending deformation is caused with the portion where 01 is in contact as an action point. Since the compliance of the second elastic body 206 is smaller (harder) than the compliance of the first elastic body 201, the probe 101 vibrates toward the first elastic body 201. Thus, by giving the vibration anisotropy to the probe 101, the vibration of the probe 101 is transmitted to the first elastic body 201 more efficiently.

Considering the moment when the probe 101 moves in the direction of the arrow in this vibration state, at this time, the first elastic body 201 bends and deforms in the direction of the arrow. Piezoelectric body 2 located on the surface of
Numerals 02 receive a tensile force in the longitudinal direction of the first elastic body 201 and extend. At this moment, the piezoelectric body 202 generates an electric charge, and the first electrode 203 (a) and the ground electrode 203
A potential difference occurs between (e). The polarity of the potential at this time is determined by the polarization direction of the piezoelectric body 202. Here, it is assumed that the potential has a (+) polarity. At the next moment, the probe 101
When moves in the direction opposite to the arrow, the piezoelectric body 202 contracts (returns to the original length) and generates a voltage of the opposite polarity (-). When the frequency of the second elastic body 206 also serving as a vibrating body is swept, the vibration amplitude of the probe 101 increases as the mechanical natural frequency of the probe 101 approaches, and the amplitude becomes maximum in the resonance state. Become. As the vibration amplitude of the probe 101 increases, the expansion and contraction of the piezoelectric body 202 also increases,
The generated voltage also increases. By monitoring the change in the voltage generated by the piezoelectric body 202, the resonance characteristics of the probe 101 can be known.

Based on this resonance characteristic, the probe 1
The change in the distance between 01 and the sample 102 can be observed from the change in the voltage generated by the piezoelectric body 202, and the surface shape of the sample 102 can be reproduced through the operation described with reference to FIG. As described above, the displacement detecting means according to the present invention converts the vibration displacement of the probe 101 into the first elastic body 201.
It converts the tensile deformation of the piezoelectric body 202 formed above to obtain a voltage output. The difference from the prior art will be described more specifically. As is well known, the piezoelectric polymer material used in the present invention has a large mechanical compliance and a low mechanical Q value and does not show a clear resonance characteristic because of its large compliance. Therefore, it has uniform sensitivity over a wide frequency range. According to the present invention, since the probe 101 is elastically pressed by the flexible first elastic body 201, the function of the piezoelectric polymer material can be effectively applied to the configuration of the displacement detecting means of the scanning probe microscope. Was found. The effect is that the displacement detecting means in the present invention works as a broadband non-resonant sensor. On the other hand, quartz oscillators and piezoelectric elements in the prior art
It is a narrow-band resonant sensor that resonates itself.

A non-resonant sensor has a smaller vibration amplitude than a resonant sensor such as a quartz oscillator. However, the voltage output constants (g ₃₁ : mechanical-to-electricity conversion capability) of the quartz oscillator and PZT are 50 × 10 ⁻³ Vm / N and 10
× 10 ⁻³ Vm / N, whereas that of PVDF, which is one of the piezoelectric polymer materials, is 170 ×, which is 3 to 10 times or more.
10 ⁻³ Vm / N. Therefore, the vibration displacement detection sensitivity is comparable to that of a quartz oscillator or the like. Therefore, regardless of the natural frequency of the probe 101, a displacement detection unit having high detection sensitivity can be configured.

As described above, the displacement detecting means in the present invention can solve the problems of the prior art by forming a non-resonant type sensor having a wide band by using a piezoelectric material having high compliance. [Second Embodiment] FIG. 3 shows in detail the configuration of a displacement detecting means 105 in the configuration of a second embodiment of the scanning probe microscope of the present invention. In FIG. 3, the probe 101 is elastically sandwiched between the first elastic body 201 and the second elastic body 206, and this serves as a vibration fulcrum of the probe 101. The second elastic body 206 is made of a piezoelectric material and also serves as a vibrator. As the second elastic body 206, a widely used PZT bimorph vibrator or a laminated piezoelectric element is used.

A V-groove 208 is formed on the surface where the second elastic body 206 and the probe 101 are in contact, and the V-groove 208 and the first elastic body 201 form the probe 101.
Position can be determined. A piezoelectric body 202 is formed on the surface of the first elastic body 201. The materials of the first elastic body 201 and the piezoelectric body 202 are not different from those of the first embodiment.

Unlike the first embodiment, the pressurizing adjusting means 207 is formed of a rectangular elastic body, and both ends thereof are fixed to the probe holder 204. First elastic body 201
Is held between the pressurizing adjusting means 207 and the probe holder 204 and is elastically held. With such a configuration, the first elastic body 201 and the preload adjusting means 207
Can be separated, and the mounting position of the first elastic body 201 can be adjusted back and forth to obtain an optimum detection sensitivity. Other configurations, operations, and effects are the same as those in the first embodiment.

[Embodiment 3] FIG. 4 shows in detail the configuration of a displacement detecting means 105 in the configuration of Embodiment 3 of the scanning probe microscope of the present invention. In FIG. 4, the probe 101 is arranged on the second elastic body 206, and the first elastic body 201 is arranged on the probe 101. The first elastic body 201 has a T-shape, and has a structure in which an I-beam 201 (b) extends from the strip 201 (a) in parallel to the axis of the probe 101. Probe 10
1 is elastically supported by a first elastic body 201 and a second elastic body 206, and this serves as a vibration fulcrum of the probe 101.

The second elastic body 206 is made of a piezoelectric material and also serves as a vibrator. As the second elastic body 206, a widely used PZT bimorph vibrator or a laminated piezoelectric element is used. Second elastic body 206 and probe 10
A V-groove 208 is formed on the surface in contact with 1, and the position of the probe 101 can be determined by the V-groove 208 and the first elastic body 201.

The I beam 201 of the first elastic body 201
The piezoelectric body 202 is formed on the surface of FIG. First
The materials of the elastic body 201 and the piezoelectric body 202 are the same as those in the first embodiment. A first electrode 203 (a) is formed on one surface of the piezoelectric body 202, and a ground electrode 203 (e) is formed on the opposite side. FIG. 2 shows a state in which the terminal portion of the ground electrode 203 (e) is folded back to the first electrode 203 (a) side.
(E) Display of the whole is omitted. First electrode 203
(A), the strip portion 201 is connected to the ground electrode 203 (e).
It is also possible to form it by enlarging it in the range of (a). A signal line is led out from the terminal portion and connected to the feedback controller 106 shown in FIG. For example, when the piezoelectric lateral effect is used, the piezoelectric body 202 generates a potential in the thickness direction with respect to expansion and contraction in the length direction. The first elastic body 201 has both ends fixed to the probe holder 204 via the pressurizing adjusting means 207. The probe holder 204 is made of a substantially rigid body. In the present embodiment, the pressurizing adjusting means 207 is composed of two bolts, and changes the force (pressurizing) applied to the probe 101 by adjusting the bolts in the longitudinal direction of the strip portion 201 (a). Can be. By adjusting this pressurization, the probe 101
Can be adjusted to an optimum state.
Although FIG. 2 shows the first elastic body 201 in a state where the first elastic body 201 is bent and subjected to a tensile deformation in advance, the first elastic body 201 can be pressed in a state where the first elastic body 201 is hardly bent (no pressurization). The second elastic body 206 is also fixed to the probe holder 204. The fixing may be performed by any of an adhesive and a fastening means as long as vibration is not suppressed. The probe 101 has an arbitrary part other than the vibrating part fixed to the probe holder 204 via the probe holder 205. The probe 101 may be fixed to the probe holder 204 using an adhesive without using the probe holder 205. However, in consideration of exchanging the probe 101, it is preferable to fix the probe 101 with a fastening means such as a bolt which is easily detachable. The second elastic body 2 which is an excitation unit of the probe 101
A drive circuit 112 that generates a voltage waveform for causing the second elastic body 206 to vibrate is connected to 06.

Next, the operation state will be described. Now probe 1
01 is excited by the second elastic body 206 above and below the plane of the paper. The probe 101 has a strip 201 (a)
The I-beam 201 (b) is elastically supported by the I-beam 201 (b), but as a natural consequence of the structure, the compliance of the I-beam 201 (b) supported at one end is larger than that of the strip 201 (a) fixed at both ends. Vibrate around the strip 201 (a) as a fulcrum. At this time, the I-beam 201 (b) also vibrates with the strip 201 (a) as a fulcrum in accordance with the vibration of the probe 101. On the other hand, the second
Compliance of the elastic body 206 of the first elastic body 2
The probe 101 vibrates toward the first elastic body 201 because it is smaller (harder) than the compliance of No. 01. Thus, by giving the vibration anisotropy to the probe 101, the vibration of the probe 101 is transmitted to the I-beam 201 (b) more efficiently.

Considering the moment when the probe 101 moves in the direction of the arrow in this vibration state, at this time, the probe 101 bends around the strip 201 (a) as a fulcrum, thereby causing the I-beam 201 (b). ) Also bends in the direction of the arrow. Thereby, the I beam 201
The piezoelectric body 202 located on the surface of (b) receives a compressive force in a direction perpendicular to the vibration direction, that is, in the longitudinal direction of the I-beam 201 (b), and contracts. At this moment, the piezoelectric body 202 generates electric charges, and the first electrode 203 (a) and the ground electrode 2
A potential difference occurs during the period 03 (e). The polarity of the potential at this time is (-) polarity if the polarization direction of the piezoelectric body 202 is the same as in the first embodiment. The next moment, probe 10
When 1 moves in the direction opposite to the arrow, the piezoelectric body 202 expands (returns to its original length) and generates a voltage of the opposite polarity (+). When the frequency of the first elastic body 201 also serving as a vibrating body is swept, the vibration amplitude of the probe 101 increases as the mechanical natural frequency of the probe 101 approaches, and the amplitude becomes maximum in the resonance state. Become. As the vibration amplitude of the probe 101 increases, the expansion and contraction of the piezoelectric body 202 also increases,
The generated voltage also increases. By monitoring the change in the voltage generated by the piezoelectric body 202, the resonance characteristics of the probe 101 can be known.

Based on this resonance characteristic, the probe 1
The change in the distance between 01 and the sample 102 can be observed from the change in the voltage generated by the piezoelectric body 202, and the surface shape of the sample 102 can be reproduced through the operation described with reference to FIG. [Fourth Embodiment] FIG. 5 shows in detail the configuration of a displacement detecting means 105 in the configuration of a fourth embodiment of the scanning probe microscope of the present invention. The entire configuration except for the displacement detection means 105 is the same as that of FIG. In FIG. 5, a probe 101 is elastically sandwiched between a first elastic body 201 and a second elastic body 206.
1 is a vibration fulcrum. A piezoelectric body 202 made of a piezoelectric polymer thin film is formed on the outer peripheral side surface of the probe 101.
This piezoelectric polymer thin film may be formed on the probe 101 by a chemical or physical film forming method such as vapor deposition or sputtering, or a method of bonding and attaching a previously formed piezoelectric polymer thin film.

Unlike the first embodiment, in the case of the present embodiment, the first elastic body 201 has only a role of elastically pressing down the probe 101, but the first embodiment uses a material having high compliance. There is no difference from 1. A first electrode 203 (a) and a second electrode 203 (b) are formed on the outer peripheral side surface of the piezoelectric body 202. A ground electrode 203 (e) is formed on the inner peripheral side surface of the piezoelectric body 202. This ground electrode 203
(E) shows the probe 101 before forming the piezoelectric body 202.
Must be formed on top. First electrode 203 (a)
And the second electrode 203 (b) is formed so as to divide the cross section of the probe 101 into two in the vibration direction indicated by the arrow. More specifically, electrodes are formed on the upper half and the lower half with respect to the top and bottom of the paper. By doing so, for example, when the probe 101 moves in the direction of the arrow, the piezoelectric body 202 on the side where the first electrode 203 (a) is formed undergoes compression deformation and the second electrode 203 (b) is formed. As a result, tensile deformation occurs in the piezoelectric polymer thin film 202 on the side of the first electrode 203 (a) and the ground electrode 203.
During (e), the (-) potential is applied to the second electrode 203 (b).
And a ground electrode 203 (e) generates a (+) potential. Therefore, the displacement of the probe 101 is smaller than that in the first embodiment.
Even if it is the same as above, since a higher potential difference can be detected, the detection sensitivity is further improved and the S / N is improved. In the case of the second embodiment, the probe 101 is made of an optical fiber and has elasticity.
Therefore, the probe 101 itself has a role and an effect equivalent to those of the first elastic body 201 in the first embodiment. Naturally, even if the material of the probe 101 is another material, for example, Si (silicon) or SiNx (silicon nitride), the effect does not change.

Operations other than the voltage generation principle in the fourth embodiment are the same as those in the first embodiment. [Fifth Embodiment] FIG. 6 shows in detail the configuration of the displacement detecting means 105 of the configuration of the fifth embodiment of the scanning probe microscope of the present invention. The entire configuration except for the displacement detection means 105 is the same as that of FIG. In FIG. 6, the probe 101 is disposed on the second elastic body 206 and is elastically pressed by the first elastic body 201. A piezoelectric body 202 made of a piezoelectric polymer thin film is formed on the outer peripheral side surface of the probe 101. This piezoelectric polymer thin film is formed on the probe 101 by a chemical or physical film forming method such as vapor deposition and sputtering, or a method of bonding and attaching a preformed piezoelectric polymer thin film, as in the second embodiment. Very good.

A first electrode 203 (a), a second electrode 203 (b), a third electrode 203 (c), and a fourth electrode 203 (d) are formed on the outer peripheral side surface of the piezoelectric body 202. Have been. A ground electrode 203 (e) is formed on the inner peripheral side surface of the piezoelectric body 202. This ground electrode 203
(E) shows the probe 101 before forming the piezoelectric body 202.
Must be formed on top. First electrode 203 (a)
And the second electrode 203 (b) is formed so as to divide the cross section of the probe 101 into two perpendicularly to the vibration direction indicated by the solid arrow. More specifically, electrodes are formed on the upper half and the lower half with respect to the top and bottom of the paper. By doing so, for example, when the probe 101 moves in the direction of the solid arrow, the piezoelectric body 202 on the side where the first electrode 203 (a) is formed undergoes compression deformation and the second electrode 203 (b) forms. As a result, the piezoelectric member 202 on the side to be deformed is subjected to tensile deformation, and the first electrode 203 (a) and the ground electrode 2
03 (e), the (−) potential is applied to the second electrode 203
A (+) potential is generated between (b) and the ground electrode 203 (e).

On the other hand, the third electrode 203 (c) and the fourth electrode 203 (d) are formed so as to divide the cross section of the probe 101 into two parallel to the vibration direction indicated by the solid arrow. . More specifically, electrodes are formed on the left half and the right half with respect to the left and right sides of the paper. By doing so, for example, when the probe 101 moves in the direction of the wavy arrow, the piezoelectric body 2 on the side where the third electrode 203 (c) is formed
02 undergoes compressive deformation, and the piezoelectric body 202 on the side where the fourth electrode 203 (d) is formed undergoes tensile deformation, so that the third electrode 203 (c) and the ground electrode 203 are formed.
During (e), the (−) potential is applied to the fourth electrode 203 (d).
And a ground electrode 203 (e) generates a (+) potential.

The effect of the arrangement of the four electrodes is remarkable in the measurement of frictional force. Typically,
When the frictional force is measured by the scanning probe microscope, the amount of twist of the probe 101 is detected by moving the sample 102 (not shown) in the direction of the dashed arrow. At this time, the probe 101 is twisted due to friction and, at the same time, undergoes a slight bending deformation in the direction of the wavy arrow. The amount of bending deformation differs depending on the length, diameter, and material of the needle portion of the probe 101. As described above, the bending deformation causes the piezoelectric body 202 on the side where the third electrode 203 (c) is formed to undergo compression deformation, and the fourth electrode 203
Tensile deformation occurs in the piezoelectric body 202 on the side where (d) is formed, and the (−) potential is applied between the third electrode 203 (c) and the ground electrode 203 (e), and the fourth electrode A (+) potential is generated between 203 (d) and the ground electrode 203 (e). By detecting this potential difference, a change in the frictional force can be detected, and mapping can be performed in the same manner as a shape image.

[Embodiment 6] FIG. 7 shows a displacement detecting means 1 of the configuration of Embodiment 6 of the scanning probe microscope of the present invention.
FIG. 5 shows a detailed configuration of the apparatus of FIG. Displacement detecting means 1
The entire configuration except 05 is the same as FIG.
In FIG. 7, the probe 101 is disposed on the second elastic body 206 and is elastically pressed by the first elastic body 201. Although the second elastic body 206 does not have a function as a vibrating body for exciting the probe 101, the first embodiment
Use a material with the same compliance as. A piezoelectric body 202 made of a piezoelectric polymer thin film is formed on the outer peripheral side surface of the probe 101. This piezoelectric polymer thin film
Chemical such as vapor deposition and sputtering on the probe 101,
It may be formed by a physical film forming method, or a method of bonding and pasting a piezoelectric polymer thin film formed in advance.

A first electrode 203 (a) and a second electrode 203 (b) are formed on the outer peripheral side surface of the piezoelectric body 202. A ground electrode 203 (e) is formed on the inner peripheral side surface of the piezoelectric body 202. This ground electrode 203
(E) shows the probe 101 before forming the piezoelectric body 202.
Must be formed on top. First electrode 203 (a)
And the second electrode 203 (b) is formed so as to divide the cross section of the probe 101 into two in the vibration direction indicated by the arrow. More specifically, electrodes are formed on the upper half and the lower half with respect to the top and bottom of the paper. First electrode 203
(A) and the ground electrode (e) are connected to the feedback controller 106, and the second electrode 203 (b) and the ground electrode (e) are connected to the drive circuit 112 that generates a voltage waveform for vibrating. . With such a configuration, a voltage signal can be applied between the second electrode 203 (b) and the ground electrode (e) to cause the piezoelectric body to expand and contract and vibrate. For example, the probe 101 can be bent in the direction of the arrow by giving a characteristic that the piezoelectric body 202 expands when a (+) potential is applied. At this time, the piezoelectric body 2 on the side where the first electrode 203 (a) is formed
02 undergoes compressive deformation, and a (-) potential is generated between the first electrode 203 (a) and the ground electrode (e). With such a configuration, excitation and vibration change detection can be performed by the probe 101 alone, and a simpler displacement detection unit can be realized. Also, in the case of the sixth embodiment, similarly to the fourth embodiment, the probe 1
Reference numeral 01 is made of an optical fiber and has elasticity. Therefore, the probe 101 itself has a role and an effect equivalent to those of the first elastic body 201 in the first embodiment. Naturally, the probe 101
Is made of another material such as Si (silicon) or SiN.
Even if it is x (silicon nitride), its effect does not change.

The operation in this embodiment is not different from that in the first embodiment. [Seventh Embodiment] FIG. 8 shows in detail the configuration of a displacement detecting means 105 of the configuration of the seventh embodiment of the scanning probe microscope of the present invention. The entire configuration except for the displacement detection means 105 is the same as that of FIG. The displacement detection means 105 itself has a configuration rotated 90 ° from the first to fourth embodiments. Also, unlike the first to fourth embodiments, the probe 101 has a straight shape with a sharpened tip, and the tip is located perpendicular to the sample 102. Angle of arrangement of displacement detecting means 105, probe 10
The configuration other than the shape 1 is the same as that of the first embodiment.

Next, the operation will be described. The operation of the seventh embodiment is based on the shear force feedback scanning probe microscope described in the related art of FIG. The probe 101 is excited by the second elastic body 206 in parallel with the surface of the sample 102. That is,
The probe 101 vibrates left and right on the paper. In FIG.
Other than the shape of the probe 101, there is no difference from the first embodiment.

The operation state will be described. Now, probe 101
Is excited by the second elastic body 206 to the left and right of the drawing. The vibration of the probe 101 is
Although the first elastic body 201 is fixed at both ends, the probe 101 causes bending vibration with the contacting portion as a fulcrum. At the same time, the first elastic body 2
01 has a high compliance, so the probe 101
Bending deformation occurs at the point of contact with the point of action.
Since the compliance of the second elastic body 206 is smaller (harder) than the compliance of the first elastic body 201,
The probe 101 vibrates toward the first elastic body 201 side. Thus, by giving the vibration anisotropy to the probe 101, the vibration of the probe 101 is transmitted to the first elastic body 201 more efficiently.

Considering the moment when the probe 101 moves in the direction of the arrow in this vibration state, at this time, the first elastic body 201 bends and deforms in the direction of the arrow. Piezoelectric body 2 located on the surface of
Numerals 02 receive a tensile force in the longitudinal direction of the first elastic body 201 and extend. At this moment, the piezoelectric body 202 generates an electric charge, and the first electrode 203 (a) and the ground electrode 203
A potential difference occurs between (e). The polarity of the potential at this time is determined by the polarization direction of the piezoelectric body 202. Here, it is assumed that the potential has a (+) polarity. At the next moment, the probe 101
When moves in the direction opposite to the arrow, the piezoelectric body 202 contracts (returns to the original length) and generates a voltage of the opposite polarity (-). When the frequency of the second elastic body 206 also serving as a vibrating body is swept, the vibration amplitude of the probe 101 increases as the mechanical natural frequency of the probe 101 approaches, and the amplitude becomes maximum in the resonance state. Become. As the vibration amplitude of the probe 101 increases, the expansion and contraction of the piezoelectric body 202 also increases,
The generated voltage also increases. By monitoring the change in the voltage generated by the piezoelectric body 202, the resonance characteristics of the probe 101 can be known.

Based on this resonance characteristic, the probe 1
The change in the distance between 01 and the sample 102 can be observed from the change in the voltage generated by the piezoelectric body 202, and the surface shape of the sample 102 can be reproduced through the operation described with reference to FIG.

[0062]

As described above, according to the present invention,
This eliminates the need for a difficult step of integrally fixing the probe and the piezoelectric body, and at the same time has an excellent effect of realizing a displacement detection unit with higher simplicity, higher sensitivity, wider bandwidth, and higher response speed. More specifically, a probe having a sharpened tip, a vibrating body for vibrating the probe, a displacement detecting means for detecting a change in the vibration characteristic of the vibration of the probe, and a three-dimensionally moving the sample relative to the probe. A scanner for scanning;
In a scanning probe microscope having a feedback circuit that amplifies or modulates a displacement signal of a displacement detection unit and feeds back the signal to a scanner, a probe made of an elastic body and two elastic bodies holding the probe, that is, a first elastic body, A second elastic body, the first elastic body;
A scanning probe microscope has been devised, wherein the probe is flexibly sandwiched by a second elastic body, and further, the first elastic body or the probe has a piezoelectric body to constitute a displacement detecting means. .

With such a configuration, 1) the work of bonding the probe to the piezoelectric element such as the crystal unit becomes unnecessary, and the mechanical characteristics of the crystal unit and the probe tend to vary depending on the bonding state. Lost. 2) Since a piezoelectric polymer material having a small Q value and having no specific natural frequency can be used, the displacement detecting means can be configured as a broadband non-resonant displacement sensor. This allows
It is not necessary to adjust the natural frequency of the probe, and it is possible to detect a change in the vibration state as it is, and it is possible to use various kinds of probes having different natural frequencies.

3) Since a piezoelectric polymer material having a small Q value can be used, a decrease in response speed caused by a high Q value can be prevented, and a fast sample can be scanned. 4) Since the probe is flexibly and elastically held by the displacement detecting means, the vibration of the probe can be attenuated by adjusting the holding force, and the Q value of the probe can be properly adjusted.

5) Since the displacement detecting means is soft, it does not affect the spring constant of the probe and does not damage the soft sample. Further, various probes having different spring constants can be used. It has an excellent effect.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram illustrating a configuration of a scanning probe microscope according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating a configuration of a scanning probe microscope according to a first embodiment of the present invention.

FIG. 3 is an explanatory diagram showing a configuration of a scanning probe microscope according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a configuration of a scanning probe microscope according to a third embodiment of the present invention.

FIG. 5 is an explanatory diagram showing a configuration of a scanning probe microscope according to a fourth embodiment of the present invention.

FIG. 6 is an explanatory diagram showing a configuration of a scanning probe microscope according to a fifth embodiment of the present invention.

FIG. 7 is an explanatory diagram showing a configuration of a scanning probe microscope according to a sixth embodiment of the present invention.

FIG. 8 is an explanatory diagram showing a configuration of a scanning probe microscope according to a seventh embodiment of the present invention.

FIG. 9 is an explanatory diagram showing an example of a configuration of a conventional scanning probe microscope.

FIG. 10 is an explanatory diagram showing an example of the configuration of a conventional scanning probe microscope.

FIG. 11 is an explanatory diagram showing an example of a configuration of a conventional scanning probe microscope.

[Explanation of symbols]

 101 Probe 102 Sample 103 Sample stage 104 Scanner 105 Displacement detecting means 106 Feedback controller 107 Scanner controller 108 X electrode 109 Y electrode 110 Z electrode 111 Oscilloscope 112 Drive circuit 201 First elastic body 201 (a) Strip 201 (b) I Beam 202 Piezoelectric body 203 (a) First electrode 203 (b) Second electrode 203 (c) Third electrode 203 (d) Fourth electrode 203 (e) Ground electrode 204 Probe holder 205 Probe holder 206 Second elastic body 207 Pressurizing adjusting means 208 V groove 901 Probe 902 Sample 903 Sample table 904 Scanner 905 Displacement detecting means 906 Feedback controller 907 Scanner controller 908 X electrode 909 Y electrode 910 Z electrode 911 Oscilloscope 912 Drive circuit 1001 Tuning fork type crystal oscillator 1002 Vibration body 1003 Probe holder 1004 Probe holder 1101 Vibration detection piezoelectric body 1102 Excitation piezoelectric body 1103 Probe holder 1104 Probe holder

Claims (9)

[Claims] A probe having a sharpened tip; a vibrating body for vibrating the probe; a displacement detecting means for detecting a change in vibration characteristic of the vibration of the probe; A scanning probe microscope (SPM) having a scanner that performs scanning in a dynamic manner, a feedback circuit that amplifies or modulates a displacement signal of the displacement detecting means and feeds back the signal to the scanner, a probe made of an elastic body, and a device that holds the probe.
Two elastic bodies, that is, a first elastic body and a second elastic body, the probe being flexibly sandwiched between the first elastic body and the second elastic body, and further comprising the first elastic body. A scanning probe microscope, wherein said displacement detecting means is constituted by said elastic body or said probe having a piezoelectric body. 2. The scanning probe microscope according to claim 1, wherein said first elastic body is disposed on the opposite side of said probe from said second elastic body. 3. The apparatus according to claim 2, wherein the first elastic body has flexibility, and compliance of the second elastic body is smaller than compliance of the first elastic body. The scanning probe microscope according to claim 1 or 2. 4. The scanning probe microscope according to claim 1, wherein said piezoelectric body is made of a piezoelectric polymer material. 5. The scanning probe microscope according to claim 1, wherein the piezoelectric body also serves as the first elastic body. 6. The scanning probe microscope according to claim 1, wherein the second elastic body or the probe also functions as a vibrating body for vibrating the probe. 7. The probe according to claim 1, wherein the whole or a part of the first elastic body and the whole or a part of the second elastic body form a vibration fulcrum of the probe. The scanning probe microscope according to any one of the above. 8. The scanning probe microscope according to claim 1, further comprising a pressurizing adjusting means for adjusting a force for pressing the first elastic body against the probe. 9. A V-groove is formed in the second elastic body,
The scanning probe microscope according to any one of claims 1 to 8, wherein the probe is positioned by the V groove and the first elastic body.