CN1177212C - Shearforce detector - Google Patents
Shearforce detector Download PDFInfo
- Publication number
- CN1177212C CN1177212C CNB01141815XA CN01141815A CN1177212C CN 1177212 C CN1177212 C CN 1177212C CN B01141815X A CNB01141815X A CN B01141815XA CN 01141815 A CN01141815 A CN 01141815A CN 1177212 C CN1177212 C CN 1177212C
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- Prior art keywords
- probe
- piezoelectric ceramic
- double
- shearforce
- optical fiber
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- 239000000523 sample Substances 0.000 claims abstract description 87
- 239000000919 ceramic Substances 0.000 claims abstract description 32
- 239000013307 optical fiber Substances 0.000 claims abstract description 23
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000004621 scanning probe microscopy Methods 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000011664 signaling Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 241000278713 Theora Species 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 20
- 230000005284 excitation Effects 0.000 abstract description 4
- 238000010008 shearing Methods 0.000 abstract 4
- 230000035939 shock Effects 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 9
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000004651 near-field scanning optical microscopy Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001845 vibrational spectrum Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The present invention relates to a shearing force detector which comprises double layers of piezoelectric ceramic sheets, an optical fiber probe and a relevant detection circuit. The shearing force detector is double layers of piezoelectric ceramic sheets in a cantilever type, and has the length of 2 to 10 millimeters, the width of 0.5 to 5 millimeters and the thickness of 0.1 to 1 millimeter. One layer of double layers of the piezoelectric ceramic sheets is used as a shock excitation sheet, and the other layer is used as a detection sheet. The shock excitation sheet is used for exciting the double piezoelectric ceramic sheets to drive the optical fiber probe to vibrate on the resonance frequency thereof. Because the shearing force between the probe and a sample is applied to the optical fiber probe, the resonance amplitude and the phase of the double layers of the piezoelectric ceramic sheets are changed. Thus, the amplitude and the phase of piezoelectric voltage generated on the detection sheet are changed, and the change is used as a feedback signal to be sent into a feedback circuit of the scanning probe microscope so that the control of the interval of the probe and the sample can be realized. The interval control resolution of the shearing force detector can reach 0.5 nanometer.
Description
Technical field
The present invention relates to Scanning Probe Microscopy, specially refer to fields such as scanning near-field optical microscopy.
Background technology
The scanning near-field optical microscopy is Scanning Probe Microscopy to be combined with optical technology and a kind of brand-new micro-imaging technique that grows up.This technology utilizes optical probe to substitute optical lens, and the employing probe is in the imaging mode of sample surfaces near field point by point scanning, can be on nanoscale surface microcell pattern of sampling simultaneously and optics (comprising: absorption, scattering, polarization and fluorescence etc.) information, broken through the light wave diffraction effect limit, made optical image resolution reach nanometer scale.
The optical resolution of scanning near-field optical microscopy depends primarily on the size of optical probe tip and the distance between probe and the sample surfaces.For visible light and near-infrared light waves, typical probe tip size is generally 50～200 nanometers, and probe and sample surfaces spacing are controlled at usually less than 20 nanometers, promptly within the near field range.Therefore, the past near-field control technology of development probe and sample is very important problem in the scanning near-field optical microscopy.
Shearforce between detector probe and the sample is the common method that realizes scanning near-field optical microscopy middle probe and sample past near-field control.Shearforce is meant the probe experienced when probe and the horizontal force between the sample when the sample surfaces direction is vibrated, it can make resonance amplitude and the phase place generation significant change of probe when natural frequency vibration.Just can realize the detection of shearforce with the variation of suitable method detector probe resonance amplitude or phase place, amplitude or phase change are converted to voltage signal send into the backfeed loop of scanning probe microscopy and just can realize probe and sample past near-field control and near field optic micro-imaging.
In present prior art, a kind of method the most commonly used is that employing U-shaped quartz (controlled) oscillator is the detection that quartz tuning-fork is realized shearforce.In this detection system, the probe made from optical fiber sticks on the arm of quartz tuning-fork, and makes transverse vibration in company with tuning fork along the sample surfaces direction.When vibrating on the natural frequency of system at tuning fork of this quartz tuning-fork and optical fiber probe composition, the tuning fork amplitude will reach maximal value, and the amplitude of consequent piezoelectric voltage (or electric current) also will reach maximal value.If stick on the effect that optical fiber probe on the tuning fork is subjected to shearforce between probe and the sample, its amplitude and phase place will change, and the amplitude and the phase place of piezoelectric voltage (electric current) also will change thereupon.Utilize suitable circuit just can realize the detection of piezoelectric voltage amplitude and phase change, and then realize the detection of shearforce.Send into feedback circuit as feedback signal and just can realize probe and sample past near-field control as this variation being converted to voltage.Because quartz tuning-fork is small-sized, material is very crisp, is bonded on the prong optical fiber probe very difficult.In addition, because the higher raising that makes the testing circuit frequency range be very limited and then influence scanned imagery speed of quality factor of quartz tuning-fork.
In the prior art, also have a kind of piezoelectric ceramic tube that adopts to realize the method that shearforce detects.In this method, optical fiber probe is adhesively fixed in the piezoelectric ceramic tube, and vibrates under the vibrational excitation of piezoelectric ceramic tube.When shearforce acts on optical fiber probe, can cause the variation of piezoelectric ceramic tube internal driving, detect impedance variation with bridge circuit and just can realize probe and sample past near-field control.Because the variation of impedance is very little, generally has only 10
-4, very high to the thermal stability requirement of electric bridge, therefore increased the difficulty of making and use this detection system.
Adopting a pair of piezoelectric ceramics block to carry out the shearforce detection is the another prior art that grows up after quartz tuning-fork formula and piezoelectric ceramics tubular type detection technique.In this technology, a pair of piezoelectric ceramics block is adhesively fixed on the derby both sides of a stationary probe respectively, one of them piezoelectric ceramics block is used for the launching fiber probe and vibrates on its natural frequency, another piezoelectric ceramics block is used for the vibrational state of detection fiber probe, and then realizes probe and sample past near-field control.This technology need be found out the very faint resonance peak that is produced by probe under big vibrational spectra background when practical application, therefore bring big difficulty to practical application.
Summary of the invention
The object of the present invention is to provide a kind of simple in structure, be easy to make, the Shearforce detector of easy to use, function admirable.
The present invention realizes above-mentioned purpose according to following principle:
Adopting the rectangular double-layer piezoelectric ceramic piece is Shearforce detector, the piezoceramics layer on one end upper strata is removed one section, electrode in the middle of exposing is used for ground connection, stick with glue or the machinery method of stepping up is fixed in this end on one fixed station, the remainder of double-deck piezoelectric ceramic piece is the cantilever-shaped other end edge that stretches out in fixed station, forms free end;
The forward bonding optical fiber probe in this free-ended surface, this probe can be made with chemical corrosion or the method that adds hot-stretch by single mode or multimode optical fiber, its probe stretches out in the free-ended ora terminalis of double-deck piezoelectric ceramic piece slightly, an other end of optical fiber probe and photodetector coupling;
Wherein one deck is as the exciting sheet for two pilot electroceramics sheets, and one deck constitutes an exciting and detects incorporate piezoelectric cantilever formula Shearforce detector as detection lug in addition.Exciting sheet and voltage signal generator join, and are used to drive double-deck piezoelectric ceramic piece self and drive optical fiber probe simultaneously make transverse vibration on its resonant frequency, and detection lug is used to detect the vibration of piezoelectric patches itself.The piezoelectric voltage that produces on the detection lug is sent into lock-in amplifier through prime amplifier and is handled, and the feedback circuit of its output signal feed-in scanning probe microscopy drives the XYZ three-dimensional scanner and realizes probe and sample past near-field control.When sample scanned, shearforce that is measured by optical fiber probe and optical signalling were sent into the data acquisition imaging system respectively and can be obtained sample surfaces pattern and optical property image simultaneously.
That Shearforce detector of the present invention and probe and sample past near-field control technology have is simple in structure, be easy to make, easy to use, function admirable and characteristics such as with low cost, and table 1 is the comparison of the present invention and prior art.
Table 1
| Manufacturing process | Operating position | Main performance | |
| The quartz tuning-fork formula | Stickup probe difficulty | Determine that resonant frequency is easy to | Highly sensitive, but sweep velocity is slow |
| The piezoelectric ceramics tubular type | Testing circuit is had relatively high expectations | Determine difficulty of resonant frequency | Sensitivity is higher |
| The piezoelectric ceramics block formula | Manufacturing process is complicated | The same | The same |
| This invention | Making is easier to | Be easy to determine resonant frequency | Sensitivity is higher, and sweep velocity is higher |
Description of drawings
The present invention is further described below in conjunction with accompanying drawing.
Fig. 1 is structure of the present invention and workflow synoptic diagram.
Embodiment
Embodiment:
With thickness is that 0.6 millimeter double-deck piezoelectric ceramic piece 2 cuts into the rectangular configuration that length and width is respectively 16 millimeters and 1.5 millimeters, the piezoceramic material that removes one end one deck and be 2 millimeters long is up to exposing target, this electrode grounding, the part that this end place is 10 millimeters sticks with glue on the body 3 that connects and be fixed on scanning probe microscopy, and stretching 2 millimeters, it is cantilever-shaped that all the other length are that 6 millimeters part forms.The optical fiber probe 1 for preparing forward is bonded in the upper surface of bimorph 2, and probe 1 extension elongation is less than 1 millimeter, and the other end of probe links to each other with photomultiplier.Because of the preparation and the photoelectricity of optical fiber probe is coupled as a known technology, in the present embodiment this is not described in detail.Lower floor's piezoelectric patches of double-deck piezoelectric ceramic piece 2 is the exciting sheet, links to each other with signal generator 4, and the signal generator that present embodiment adopts is the sinusoidal signal generator of 1-100 millivolt, drives bimorph 2 by signal generator 4 and vibrates on its resonant frequency; The upper strata piezoelectric patches of double-deck piezoelectric ceramic piece 2 is a detection lug, links to each other with prime amplifier 5, and it is gain 1-1000 that present embodiment adopts prime amplifier, the voltage amplifier that bandwidth is 10 kilo hertzs.The piezoelectric voltage that produces on the detection lug is sent into lock-in amplifier 6 through prime amplifier 5 and is handled, and the feedback circuit 7 of its output signal feed-in scanning probe microscopy drives XYZ three-dimensional scanner 9 and realizes probe and sample 10 past near-field control.When sample 10 scanning, shearforce that is measured by optical fiber probe 1 and optical signalling are sent into data acquisition imaging system 8 respectively and can be obtained sample surfaces pattern and optical property image simultaneously.
When the resonance of exciting sheet excitation bimorph, the amplitude of bimorph will reach maximal value, because piezoelectric effect will produce the piezoelectric voltage of peak swing on the detection lug simultaneously.If optical fiber probe is subjected to the effect of shearforce near sample, the amplitude of bimorph will reduce, and the piezoelectric voltage amplitude of generation also will reduce thereupon.By detecting the piezoelectric voltage oscillation amplitude change, just can realize detection and the probe and the sample past near-field control of shearforce.In addition, the variation of detection piezoelectric voltage phase place or amplitude and phase place variation together also can realize probe and sample past near-field control.When driving voltage was several millivolts, the output signal of prime amplifier was generally 100 millivolts, used this technology probe and sample past near-field control resolution can reach 0.5 nanometer.Need to prove, the foregoing description just is used for illustrating technical characterictic of the present invention, not to be used for limiting patent claim of the present invention, physical dimension such as double-deck piezoelectric ceramic piece in the present embodiment also can be made other size, but its principle and structure still belong to patented claim category of the present invention.
Claims (5)
1, a kind of Shearforce detector comprises double-deck piezoelectric ceramic piece, optical fiber probe and testing circuit, it is characterized in that:
The piezoceramics layer on double-deck piezoelectric ceramic piece one end upper strata is removed one section, the target ground connection of exposing, double-deck piezoelectric ceramic piece lower surface, be fixed on the fixed station with that terminal corresponding that end that has removed the upper strata piezoceramics layer, the remainder of double-deck piezoelectric ceramic piece is the other end edge that cantilever end stretches out in fixed station;
Optical fiber probe forward is bonded on the upper surface of double-layer ceramic sheet cantilever end, and the probe of this probe stretches out in the ora terminalis of this cantilever end slightly, an other end of optical fiber probe and photodetector coupling;
Lower floor and voltage signal generator in the double-deck piezoelectric ceramic piece join, its upper strata links to each other with prime amplifier, and signal is sent into lock-in amplifier handle, the feedback circuit of its output signal feed-in scanning probe microscopy, drive three-dimensional scanner, sent into the data acquisition imaging system respectively by shearforce and optical signalling that optical fiber probe measures.
2, Shearforce detector according to claim 1 is characterized in that, is bonding or mechanical grip between double-deck piezoelectric ceramic piece and the fixed station.
3, Shearforce detector according to claim 1 is characterized in that, is bonding between optical fiber probe and the double-deck piezoelectric ceramic piece.
4, Shearforce detector according to claim 1 is characterized in that, signal amplifier is the sinusoidal signal generator of 1-100 millivolt.
5, Shearforce detector according to claim 1 is characterized in that, prime amplifier is gain 1-1000, the voltage amplifier that bandwidth is 10 kilo hertzs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB01141815XA CN1177212C (en) | 2001-09-19 | 2001-09-19 | Shearforce detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB01141815XA CN1177212C (en) | 2001-09-19 | 2001-09-19 | Shearforce detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1405547A CN1405547A (en) | 2003-03-26 |
| CN1177212C true CN1177212C (en) | 2004-11-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB01141815XA Expired - Fee Related CN1177212C (en) | 2001-09-19 | 2001-09-19 | Shearforce detector |
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| Country | Link |
|---|---|
| CN (1) | CN1177212C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100387967C (en) * | 2003-09-15 | 2008-05-14 | 北京中科奥纳科技有限公司 | Scanning probe microscope |
| CN101576466B (en) * | 2009-05-31 | 2011-01-12 | 北京航空航天大学 | Combined three-dimensional high-speed scanning device |
| CN103499711B (en) * | 2013-09-23 | 2017-03-29 | 无锡市汇博普纳电子有限公司 | The high-frequency integrated circuit of Ultra fine pitch exchanges automatic test probe |
| CN108709676A (en) * | 2018-04-27 | 2018-10-26 | 武汉科技大学 | A kind of lower margin fixing device with detection pretightning force function |
| WO2020194734A1 (en) * | 2019-03-28 | 2020-10-01 | 国立大学法人東北大学 | Resonance shear measurement device |
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2001
- 2001-09-19 CN CNB01141815XA patent/CN1177212C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN1405547A (en) | 2003-03-26 |
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Granted publication date: 20041124 Termination date: 20100919 |