CN1834616A - Quality factor controllable shearforce detection controller - Google Patents
Quality factor controllable shearforce detection controller Download PDFInfo
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- CN1834616A CN1834616A CNA2005100558894A CN200510055889A CN1834616A CN 1834616 A CN1834616 A CN 1834616A CN A2005100558894 A CNA2005100558894 A CN A2005100558894A CN 200510055889 A CN200510055889 A CN 200510055889A CN 1834616 A CN1834616 A CN 1834616A
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- piezoelectric bimorph
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
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Abstract
This invention relates to controlled quality factor applied shear detecting control device. One end of asymmetric piezo double wafer is fixed on piezo ceramics to form cantilever beam structure, probe is pasted to surface of the wafer along length direction of the wafer. The ceramics is used to drive the wafer on its resonance frequency and drive probe vibrate, the wafer generates piezo voltage by piezoelectric effect the piezo signal is sent t Q-value control circuit after amplified, and it is used to drive the wafer block along with original driven signal to realize control of Q-value between 100-1000. The wafer resonance amplitude and phase changed when the optical fiber probe is effect by shearing force between the probe and sample, so the piezo voltage changed, and the changing is used as feedback signal to sent to feedback control circuit of scanning probe microscope to realize space control between the probe and the sample.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy, specially refer to fields such as scanning near-field optical microscopy.Specifically, relate to the controlled shearforce detection control apparatus of a kind of quality factor (Q-value).
Background technology
The scanning near-field optical microscopy is Scanning Probe Microscopy to be combined with optical technology and a kind of brand-new micro-imaging technique that grows up.This technology utilizes optical probe to substitute optical lens, and the employing probe is at the imaging mode of sample surfaces near field point by point scanning, can be on nanoscale sampling surface topography and optics (comprising: absorption, scattering, polarization and fluorescence etc.) information simultaneously, broken through the restriction of light wave diffraction effect, made optical imagery resolution reach nanometer scale.
In the scanning near-field optical microscopy, the distance between probe and the sample surfaces is one of principal element of decision optical resolution.For visible light and near-infrared light waves, should be controlled at usually less than 20 nanometers, promptly within the near field range.Therefore, the past near-field control technology of development probe and sample is extremely important.
Shearforce between detector probe and the sample is one of method that realizes scanning near-field optical microscopy middle probe and sample past near-field control.Shearforce is meant the probe experienced when probe and the horizontal force between the sample when the sample surfaces direction is vibrated, it can make resonance amplitude and the phase place generation significant change of probe when natural frequency vibration.Just can realize the detection of shearforce with the variation of suitable method detector probe resonance amplitude or phase place.Amplitude or phase change are converted to voltage signal to be sent into the feedback control circuit of scanning probe microscopy and just can realize probe and sample past near-field control and near field optic micro-imaging.
In present prior art, a kind of method comparatively commonly used is that employing U-shaped quartz (controlled) oscillator is the detection that quartz tuning-fork is realized shearforce.In this detection system, the probe made from optical fiber sticks on the arm of quartz tuning-fork, and makes transverse vibration in company with tuning fork along the sample surfaces direction.When vibrating on the natural frequency of system at tuning fork of this quartz tuning-fork and optical fiber probe composition, the tuning fork amplitude will reach maximal value, and the amplitude of consequent piezoelectric voltage (or electric current) also will reach maximal value.If stick on the effect that optical fiber probe on the tuning fork is subjected to shearforce between probe and the sample, its amplitude and phase place will change, and the amplitude and the phase place of piezoelectric voltage (electric current) also will change thereupon.Utilize suitable circuit just can realize the detection of piezoelectric voltage amplitude and phase change, and then realize the detection of shearforce.If being converted to the feedback control circuit that voltage sends into scanning probe microscopy as feedback signal, this variation just can realize probe and sample past near-field control.Because quartz tuning-fork is small-sized, material is very crisp, is bonded on the prong optical fiber probe very difficult.
In the prior art, also have a kind of piezoelectric ceramic tube that adopts to realize the method that shearforce detects.In this method, optical fiber probe is adhesively fixed in the piezoelectric ceramic tube, and vibrates under the vibrational excitation of piezoelectric ceramic tube.When shearforce acts on optical fiber probe, will cause the variation of piezoelectric ceramic tube internal driving.Detect impedance variation with bridge circuit and just can realize probe and sample past near-field control.Because the variation of impedance is very little, generally has only 10
-4, the thermal stability of electric bridge requires very high, has therefore increased the difficulty of making and use this detection system.
Adopting a pair of piezoelectric ceramics block to carry out the shearforce detection is the another prior art that grows up after quartz tuning-fork formula and piezoelectric ceramics tubular type detection technique.In this technology, a pair of piezoelectric ceramics block is bonded in the derby both sides of a stationary probe respectively, and one of them piezoelectric ceramics block is used for the launching fiber probe and vibrates on its natural frequency, and another piezoelectric ceramics block is used for the vibrational state of detection fiber probe.This technology need be found out the very faint resonance peak that is produced by probe under big vibrational spectra background when practical application, therefore bring big difficulty to practical application.
Employing has the piezoelectric bimorph of symmetrical structure (promptly being bonded at sandwich structure consisting on the layer of metal thin slice by a pair of piezoelectric ceramic piece) and realizes that it is the another prior art that grew up in recent years that shearforce detects.In this technology, the piezoelectric bimorph with symmetrical structure is cut into has a fixed length and wide rectangle, and an end is fixed, and an end freedom forms semi-girder.Optical fiber probe is sticked on its free end along the piezoelectric bimorph length direction, the probe extension elongation is generally less than 1 millimeter, piezoelectric bimorph wherein one deck is made transverse vibration as the exciting sheet in order to encourage piezoelectric patches self and to drive optical fiber probe simultaneously, one deck is used to detect the vibration of piezoelectric patches itself as detection lug in addition, thereby realizes probe and sample past near-field control.Because the quality factor (Q-value) of this piezoelectric bimorph are not high, so can not reach very high detection sensitivity.
Summary of the invention
The object of the present invention is to provide the controlled shearforce pick-up unit of a kind of quality factor (Q-value).Characteristics such as the present invention has simple in structure, and control is reliable, and is highly sensitive, is easy to make, and is easy to use and with low cost.
For achieving the above object, shearforce detection control apparatus provided by the invention comprises:
One end of one asymmetric piezoelectric bimorph is fixed on the piezoelectric ceramics block, and the other end forms semi-girder, and this asymmetric piezoelectric bimorph is fixed on an end sheet metal ground connection on the ceramic block;
One bonding fiber is on the semi-girder of this piezoelectric bimorph ceramic unilateral, and asymmetric piezoelectric bimorph is stretched out as probe in optical fiber one termination, and the optical fiber other end and photodetector such as photomultiplier are coupled;
Signal generator joins through totalizer and piezoelectric ceramics block, drives asymmetric piezoelectric bimorph and vibrates on its resonant frequency;
The piezoelectric voltage signal that produces on the asymmetric piezoelectric bimorph is divided into two the tunnel, wherein one road signal is sent into the Q-duty control circuit through prime amplifier, other one road signal is sent into the feedback control circuit of scanning probe microscopy by lock-in amplifier, this feedback control circuit is exported two road signals, wherein one the road drive three-dimensional scanner, realize probe and sample past near-field control, another road inputs to the data acquisition imaging system and carries out data processing.
2～12 millimeters of described length of cantilevers, wide 0.5～5 millimeter, thick 0.1～1 millimeter.
Described probe is metal, nonmetal or semiconductor probe.
Described probe and asymmetric piezoelectric bimorph are that to stick with glue agent bonding.
Described asymmetric piezoelectric bimorph one end sticks with glue agent mode bonding or mechanical grip and is fixed on the piezoelectric ceramics block.
Described signal generator is 1～1000 millivolt a sinusoidal signal generator, and prime amplifier is gain 1～1000, the voltage amplifier that bandwidth is 100 kilo hertzs.
Described Q-value control is to drive the piezoelectric ceramics block realization by the piezoelectric voltage signal that piezoelectric bimorph is produced simultaneously through Q-duty control circuit and original drive signal addition.
Described Q-duty control circuit comprises gain and phase regulating circuit.
Described Q-duty control circuit gain-adjusted scope is 0～100 times, and phase adjusted is 0～360 °.
By said apparatus, when piezoelectric ceramics block drives this piezoelectric bimorph resonance, the amplitude of twin lamella will reach maximal value.Because piezoelectric effect, the piezoelectric voltage that produces on the twin lamella also reaches maximal value.When optical fiber probe is subjected to time spent of doing of shearforce near sample, the amplitude of twin lamella will reduce, and the piezoelectric voltage of generation also decreases.By detecting the variation of piezoelectric voltage, just can realize detection and the probe and the sample past near-field control of shearforce.Under similarity condition, because the thickness of asymmetric piezoelectric bimorph is than the thinner thickness of symmetrical piezoelectric bimorph, elastic constant is less, thereby sensitivity increases.
Quality factor (Q-value) are the key factors of decision detection sensitivity.The Q-value is big more, and sensitivity is high more.The Q-value is relevant with material, physical dimension and the working environment (gas, vacuum or solution) of piezoelectric bimorph.The present invention increases a Q-value control (comprising: gain and phase adjusted) circuit in the above-mentioned system that is made up of piezoelectric ceramics block and piezoelectric bimorph, realized the increase of Q-value, significantly improves detection sensitivity.
Description of drawings
Fig. 1 is the controlled shearforce pick-up unit synoptic diagram of this Q-value.
Embodiment
See also Fig. 1.Thickness is that 0.4 millimeter asymmetric piezoelectric bimorph 2 is made long 14 millimeters, wide 1.5 millimeters rectangular sheet after cutting mill.One end of piezoelectric bimorph 2 (sheet metal one side) is sticked with glue on the piezoelectric ceramics block on the scanning probe microscopy body 43, and the one section sheet metal 2a that reserves 2 millimeters long is used for ground connection, the other end forms semi-girder 2b.Probe 1 is an optical fiber probe; this optical fiber can be made with chemical corrosion or the method that adds hot-stretch by single mode or multimode optical fiber; and be adhered to the semi-girder 2b of this asymmetric piezoelectric bimorph 2; be (on the potsherd surface) on the piezoelectric patches of piezoelectric bimorph 2; 1 millimeter of asymmetric piezoelectric bimorph agreement that contracts a film or TV play to an actor or actress is stretched out as probe 1 in one termination of optical fiber, the other end of optical fiber and photodetector such as the photomultiplier (not shown) that is coupled.Signal generator 5 joins through totalizer 8 and piezoelectric ceramics block 3, is used to drive piezoelectric bimorph 2 and vibrates on its resonant frequency.The piezoelectric voltage signal that produces on the twin lamella 2 is that 100 times prime amplifier 6 is divided into two road signals through gain, wherein one the tunnel send into Q-duty control circuit 7 and (comprise phase place, gain-adjusted, wherein phase regulating circuit can adopt the RC phase-shift circuit to realize, gain-adjusted can adopt the common voltage amplifier), in 0～100 times of scope, regulate the Q-value, and input on the piezoelectric ceramics block 3 by the drive signal addition of totalizer 3 with signal generator 5; Another road signal is by lock-in amplifier 9, send into the feedback control circuit 10 of scanning probe microscopy, these feedback control circuit 10 outputs two road signals, wherein one the road drive three-dimensional scanner 12, realize probe and sample past near-field control, another road inputs to data acquisition imaging system 13, carries out data processing.
When driving voltage was several millivolts, the output signal of prime amplifier was generally 100 millivolts.Regulate the gain and the phase place of Q-duty control circuit, the Q-value will change in 100-1000.After the reference value of selected Q-value (is 500 as setting the Q-value) and scanning probe microscopy feedback control circuit, just can realize highly sensitive probe and sample past near-field control.
Need to prove that the foregoing description just is used for illustrating technical characterictic of the present invention, does not limit patent claim of the present invention, any to modifications and variations that the present invention did all within application range of the present invention.
Table 1 is the comparison of the present invention and prior art.
Table 1
| Manufacturing process | Operating position | Main performance | |
| The quartz tuning-fork formula | Stickup probe difficulty | Determine that resonant frequency is easy to | Highly sensitive, but sweep velocity is slow |
| The piezoelectric ceramics tubular type | Testing circuit is had relatively high expectations | Determine difficulty of resonant frequency | Sensitivity is higher |
| The piezoelectric ceramics block formula | Manufacturing process is complicated | The same | The same |
| The piezoelectric bimorph of symmetrical structure | Making is easier to | Be easy to determine resonant frequency | Sensitivity is higher, and sweep velocity is higher |
| The present invention | The same | The same | Highly sensitive, sweep velocity is higher |
Claims (9)
1. shearforce detection control apparatus that quality factor are controlled comprises:
One end of one asymmetric piezoelectric bimorph is fixed on the piezoelectric ceramics block, and the other end forms cantilever
Beam is fixed on an end sheet metal ground connection on the ceramic block with this asymmetric piezoelectric bimorph;
One bonding fiber is on the semi-girder of asymmetric piezoelectric bimorph ceramic unilateral, and optical fiber one end stretches out asymmetric piezoelectric bimorph as probe, and the optical fiber other end and photodetector such as photomultiplier are coupled;
Signal generator joins through totalizer and piezoelectric ceramics block, drives asymmetric piezoelectric bimorph and vibrates on its resonant frequency;
The piezoelectric voltage signal that produces on the asymmetric piezoelectric bimorph by said apparatus is divided into two the tunnel through prime amplifier, and wherein one road signal is sent into the Q-duty control circuit and inputed to totalizer again; Another road signal is sent into the feedback control circuit of scanning probe microscopy by lock-in amplifier, this feedback control circuit is exported two road signals, wherein one the road drive three-dimensional scanner, realize probe and sample past near-field control, another road inputs to the data acquisition imaging system and carries out data processing.
2. shearforce detection control apparatus according to claim 1 is characterized in that, 2～12 millimeters of described length of cantilevers are wide 0.5～5 millimeter, thick 0.1～1 millimeter.
3. shearforce detection control apparatus according to claim 1 is characterized in that, described probe is metal, nonmetal or semiconductor probe.
4. shearforce detection control apparatus according to claim 1 is characterized in that, described probe and asymmetric piezoelectric bimorph are that to stick with glue agent bonding.
5. shearforce detection control apparatus according to claim 1 is characterized in that, described asymmetric piezoelectric bimorph one end sticks with glue agent mode bonding or mechanical grip and is fixed on the piezoelectric ceramics block.
6. shearforce detection control apparatus according to claim 1 is characterized in that, described signal generator is 1～1000 millivolt a sinusoidal signal generator, and prime amplifier is gain 1～1000, the voltage amplifier that bandwidth is 100 kilo hertzs.
7. shearforce detection control apparatus according to claim 1, it is characterized in that described Q-value control is to drive the piezoelectric ceramics block realization by the piezoelectric voltage signal that asymmetric piezoelectric bimorph is produced simultaneously through Q-duty control circuit and original drive signal addition.
8. shearforce detection control apparatus according to claim 1 is characterized in that, described Q-duty control circuit comprises gain and phase regulating circuit.
9. shearforce detection control apparatus according to claim 1 is characterized in that, described Q-duty control circuit gain-adjusted scope is 0～100 times, and phase adjusted is 0～360 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2005100558894A CN1834616A (en) | 2005-03-17 | 2005-03-17 | Quality factor controllable shearforce detection controller |
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| CNA2005100558894A CN1834616A (en) | 2005-03-17 | 2005-03-17 | Quality factor controllable shearforce detection controller |
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| CN1834616A true CN1834616A (en) | 2006-09-20 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2499234C1 (en) * | 2012-05-11 | 2013-11-20 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "ЮЖНЫЙ ФЕДЕРАЛЬНЫЙ УНИВЕРСИТЕТ" | Method of controlling quality factor of piezoelectric resonators and apparatus for realising said method |
| CN111896776A (en) * | 2020-06-30 | 2020-11-06 | 中山大学 | Atomic force microscope probe and manufacturing method thereof |
| CN113624999A (en) * | 2021-08-06 | 2021-11-09 | 国家纳米科学中心 | Low-quality factor micro-cantilever probe, preparation method thereof and microscope |
-
2005
- 2005-03-17 CN CNA2005100558894A patent/CN1834616A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2499234C1 (en) * | 2012-05-11 | 2013-11-20 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "ЮЖНЫЙ ФЕДЕРАЛЬНЫЙ УНИВЕРСИТЕТ" | Method of controlling quality factor of piezoelectric resonators and apparatus for realising said method |
| CN111896776A (en) * | 2020-06-30 | 2020-11-06 | 中山大学 | Atomic force microscope probe and manufacturing method thereof |
| CN111896776B (en) * | 2020-06-30 | 2021-10-22 | 中山大学 | Atomic force microscope probe and manufacturing method thereof |
| CN113624999A (en) * | 2021-08-06 | 2021-11-09 | 国家纳米科学中心 | Low-quality factor micro-cantilever probe, preparation method thereof and microscope |
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