JP6696597B2 - Light source device and distance measuring sensor including the same - Google Patents

Description

  The present invention relates to a light source device and a distance measuring sensor including the light source device.

In recent years, a light source device has been used in which a light source unit that emits blue laser light and a phosphor that is excited by being irradiated with blue laser light to emit fluorescence emit light.
For example, in Patent Document 1, in order to reduce the size and increase the brightness of the light source device, fluorescent lights of different wavelengths are emitted by being excited by laser light emitted from a plurality of semiconductor lasers and condensed by a condenser lens. A light source device is disclosed in which a plurality of phosphors are used so that a light emitting point of each semiconductor laser and each phosphor are in a conjugate relationship with each other via a condenser lens.

JP, 2013-120735, A Japanese Patent No. 5649202 JP, 2007-148418, A

However, the above-mentioned conventional light source device has the following problems.
That is, in the light source device disclosed in the above publication, since the phosphor is formed by being mixed with a binder such as resin, when the phosphor is irradiated with the laser light emitted from the semiconductor laser, Laser light is scattered inside. Therefore, the fluorescence emitted from the phosphor cannot be efficiently extracted, and it is difficult to obtain a sufficiently high-luminance light source.

Further, Patent Document 2 describes a light source device using a single crystal phosphor that does not use a binder such as a resin. However, simply irradiating the single crystal phosphor with laser light
It is difficult to obtain a light source with sufficiently high brightness.
An object of the present invention is to provide a light source device capable of obtaining a light source having higher brightness than conventional ones and a distance measuring sensor including the light source device.

A light source device according to a first aspect of the present invention includes a light source unit that emits laser light, a condenser lens, and a translucent phosphor. The condenser lens condenses the laser light emitted from the light source unit. The translucent phosphor has a condensing point of the laser light condensed by the condensing lens inside, and emits fluorescence at a portion through which the laser light passes.
Here, the laser light emitted from the light source unit and condensed by the condenser lens is irradiated so that the condensing point is located inside the translucent phosphor, and the translucent phosphor is excited into the laser light. The emitted fluorescence is used as a light source.

Here, the light source unit is, for example, an LD (Laser Diode) that emits blue laser light.
Etc. can be used. Further, the laser light emitted from the light source unit is not limited to parallel light, and may be light having a slight spread.
The condensing lens may have any shape as long as it has a function of condensing the laser light on the translucent phosphor.

The translucent phosphor is, for example, a block-shaped phosphor such as a polyhedron or a sphere, and includes a single crystal phosphor, a translucent ceramic phosphor, and the like. The light-transmitting property is a characteristic that the laser light is irradiated and the laser light is hardly scattered inside the phosphor (including a property that there is no scattering), and a condensed spot is formed inside the phosphor. It means a degree of scattering characteristics. Further, the translucency means a characteristic that the fluorescence generated inside the phosphor is hardly scattered (including a characteristic that there is no scattering).

As a result, a fluorescent light source unit that emits fluorescence excited by the laser light is formed inside the laser light condensed by the condenser lens in the translucent phosphor along the propagation direction of the laser light. At the same time, due to the characteristics of the translucent phosphor, the laser light can be taken into the inside with almost no scattering.
As a result, the fluorescent light emitted from the fluorescent light source portion formed on the translucent phosphor can be efficiently taken out, so that a light source having a higher brightness than conventional can be obtained.

A light source device according to a second invention is the light source device according to the first invention, in which the translucent phosphor is
The condensing point of the laser light condensed by the condensing lens is provided inside, and the laser light is emitted from the surface of the translucent phosphor and the beam diameter when entering the surface of the translucent phosphor. When the beam diameter is smaller than any of the beam diameters, the light is transmitted through the converging point and fluorescence is emitted at the portion where the laser light is transmitted.

Here, in the translucent phosphor, the laser light has a beam diameter smaller than the beam diameter of each of the laser light entering the translucent phosphor and the laser light emitted from the translucent phosphor. To generate fluorescence in the laser light transmitting portion.
Thereby, by condensing the laser light inside the translucent phosphor and increasing the energy density per volume, it is possible to obtain a light source having higher brightness than in the past.

A light source device according to a third aspect of the invention is the light source device according to the first or second aspect of the invention, wherein the condensing point is provided within a range of 500 μm from the surface of the translucent phosphor.
Here, the laser light is focused within a range of 500 μm from the surface of the translucent phosphor.
As a result, in the translucent phosphor, a fluorescent light source unit that is excited to emit fluorescent light is formed in the portion where the laser light is condensed. Then, since the laser light is irradiated from the surface of the translucent phosphor to the position of 500 μm inside with almost no scattering, the emitted fluorescence can be efficiently extracted from the desired direction.

A light source device according to a fourth aspect of the present invention is the light source device according to the first or second aspect of the present invention, wherein the focal point is provided within a range of 160 μm from the surface of the translucent phosphor.
Here, as a more preferable range, the laser light is focused within a range of 160 μm from the surface of the translucent phosphor.
As a result, in the translucent phosphor, a fluorescent light source unit that is excited to emit fluorescent light is formed in the portion where the laser light is condensed. Then, since the laser light is irradiated from the surface of the translucent phosphor to the position of 160 μm inside without scattering, the emitted fluorescent light can be efficiently extracted from the desired direction.

A light source device according to a fifth aspect of the invention is the light source device according to any one of the first to fourth aspects of the invention, wherein the translucent phosphor is a single crystal phosphor.
Here, a single crystal phosphor is used as the translucent phosphor.
As a result, as compared with a conventional phosphor including a binder such as a resin, the laser light condensed by the condenser lens propagates with almost no scattering inside, so that fluorescence can be efficiently emitted. it can. Therefore, it is possible to obtain a light source having higher brightness than the conventional one.

A light source device according to a sixth invention is the light source device according to any one of the first to fourth inventions, wherein the translucent phosphor has a shape of a sphere, an ellipsoid or a polyhedron. ..
Here, a spherical, ellipsoidal or polyhedral phosphor is used as the translucent phosphor.
Thus, a fluorescent light source unit that is excited by the laser light and emits fluorescence can be formed along the laser propagation direction in the portion of the translucent phosphor such as a sphere where the laser light is condensed. Then, since the laser light is irradiated from the surface to the inside of the translucent phosphor with almost no scattering, the emitted fluorescence can be efficiently extracted from the desired direction.

A light source device according to a seventh aspect of the invention is the light source device according to any one of the first to sixth aspects of the invention, further comprising at least a capturing lens that collects fluorescence emitted from the translucent phosphor. I have it.
Here, there is provided a taking-in lens for taking out the fluorescence emitted from the portion (fluorescent light source portion) irradiated with the laser light inside the translucent phosphor.

Thereby, the fluorescence emitted from the translucent phosphor is taken out from the direction of the taking lens in the translucent phosphor.
Therefore, it is possible to obtain a light source having higher brightness than the conventional one.
A light source device according to an eighth invention is the light source device according to the seventh invention, in which the fluorescence collected by the taking lens is applied to the first end face and the first end face is opposite to the first end face. A fiber for emitting fluorescence from the two end faces is further provided.

Here, the fluorescence incident from the capturing lens is emitted downstream from the incident side (the first end face) to the downstream side of the capturing lens that extracts the fluorescence emitted inside the translucent phosphor (the second end face). The fiber to be placed.
As a result, fluorescence can be captured from the first end surface of the fiber and high-luminance light can be emitted from the second end surface.

A light source device according to a ninth aspect of the invention is the light source device according to the eighth aspect of the invention, wherein a plurality of fluorescence uptake systems including an uptake lens and a fiber are provided for a single translucent phosphor. ..
Here, a plurality of fluorescence taking-in systems (taking-in lens and fiber) are arranged for a single translucent phosphor.
Thereby, the high-intensity fluorescence emitted from the translucent phosphor can be incorporated into a plurality of fluorescence-incorporating systems, and each can be used as a high-intensity light source.

A light source device according to a tenth aspect of the present invention is the light source device according to any one of the seventh or eighth aspects of the present invention, wherein the capturing lens is laser light emitted from the light source unit and condensed by the condenser lens. The central axis of the lens is coaxial with the central axis of the lens.
Here, the taking-in lens is arranged so that the central axis of the lens is aligned with the central axis of the laser propagation of the laser light inside the translucent phosphor.

As a result, since the central axis of the capturing lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source portion) formed inside the translucent phosphor, light is emitted in the translucent phosphor. The fluorescence can be extracted efficiently. Therefore, it is possible to obtain a light source having higher brightness than the conventional one.
Further, since the central axis of the capturing lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source section) formed inside the translucent phosphor, the central axis of the taking lens is disposed on the downstream side of the light source section. The optical system (condensing lens, taking-in lens) can be arranged on a straight line. Therefore, the optical axis can be easily adjusted and the optical system can be downsized.

The light source device according to an eleventh invention is the light source device according to the eighth or ninth invention, wherein the capturing lens is arranged such that the lens center axis is oblique to the lens center axis of the condenser lens. There is.
Here, it is arranged so that the central axis of the taking-in lens is oblique (non-coaxial) with respect to the central axis of the condenser lens.

Accordingly, it is possible to prevent the laser light, which has been transmitted to the translucent phosphor without being absorbed, from being incident on the capturing lens, of the laser light applied to the translucent phosphor.
Therefore, the energy of the laser light included in the light emitted from the light source device can be reduced, and a high-brightness light source that meets the safety standards for laser products can be obtained.

A light source device according to a twelfth aspect of the invention is the light source device according to the eighth aspect of the invention, wherein in the plurality of fluorescence uptake systems including the uptake lens and the fiber, the uptake lens is centered on a translucent phosphor. It is arranged so as to be located on one spherical surface.
Here, for a single translucent phosphor, a plurality of fluorescence uptake systems (intake lenses and fibers) are arranged on a common spherical surface centered on the translucent phosphor.

Thereby, the high-intensity fluorescence emitted from the translucent phosphor can be incorporated into a plurality of fluorescence-incorporating systems arranged at equal distances from the translucent phosphor, and each can be used as a high-intensity light source. ..
A light source device according to a thirteenth invention is the light source device according to any one of the first to twelfth inventions, in which a laser condensing system including a light source part and a condensing lens is a single translucent fluorescence. A plurality is provided for the body.

Here, a plurality of laser condensing systems (light source unit and condensing lens) are arranged for a single translucent phosphor.
This makes it possible to use, as a light source, high-intensity fluorescent light that is excited by irradiating the translucent phosphor with laser light from a plurality of locations.
A light source device according to a fourteenth aspect of the invention is the light source device according to the thirteenth aspect of the invention, wherein the plurality of laser focusing systems have a focusing lens located on one spherical surface centered on the translucent phosphor. Are arranged as follows.

Here, with respect to a single translucent phosphor, a plurality of laser condensing systems (a light source unit and a condensing lens) are arranged on a common spherical surface centered on the translucent phosphor.
With this, it is possible to irradiate the translucent phosphor with laser light from a plurality of laser condensing systems arranged at equal distances from the translucent phosphor to extract high-intensity fluorescence and use it as a light source. .

A light source device according to a fifteenth invention is the light source device according to any one of the first to fourteenth inventions, wherein the translucent phosphor has a first surface that transmits laser light and reflects fluorescence. , A second surface that reflects the laser light and transmits the fluorescent light.
Here, the translucent phosphor is provided with a surface (first surface) that transmits laser light and reflects fluorescence, and a surface (second surface) that reflects laser light and transmits fluorescence.

Here, for the first surface and the second surface, for example, a laser transmission / fluorescence reflection film, a laser reflection / fluorescence transmission film, or the like formed on a translucent phosphor by vapor deposition, sputtering, or the like may be used. it can.
Thus, by disposing the first surface in a portion of the translucent phosphor on which the laser light is incident, the first surface allows the laser light applied to the translucent phosphor to pass therethrough, and The fluorescence excited by the laser light can be reflected to the emission side.

Then, by disposing the second surface in a portion where the fluorescence excited by the laser light is emitted, the laser light emitted to the transparent phosphor is transmitted without being absorbed by the transparent phosphor. The reflected laser light can be reflected and returned to the inside of the translucent phosphor, and the fluorescence excited by the laser light can be transmitted and emitted.
A light source device according to a sixteenth aspect of the invention is the light source device according to any one of the first to fifteenth aspects of the invention, wherein the light source device is disposed on the incident surface side of the translucent phosphor and is irradiated from the light source section. Further, a concave mirror that transmits the laser light and reflects the fluorescence emitted from the translucent phosphor on the incident surface side toward the translucent phosphor is further provided.

Here, a concave mirror that transmits laser light and reflects fluorescence is arranged on the incident surface side of the translucent phosphor, that is, between the condenser lens and the translucent phosphor.
Here, a dichroic mirror can be used as the concave mirror.
As a result, the laser light condensed by the condenser lens is transmitted to irradiate the translucent phosphor, and is emitted to the incident surface side of the translucent phosphor among the fluorescence emitted from the translucent phosphor. The fluorescent light can be reflected by the concave mirror in the direction of the emission position of the fluorescent light.

As a result, since the fluorescent light emitted from the translucent phosphor can be efficiently extracted by the concave mirror, it is possible to obtain a light source with higher brightness.
A light source device according to a seventeenth aspect of the invention is the light source device according to any one of the first to fifteenth aspects of the invention, wherein the light source device is arranged on the emission surface side of the translucent phosphor and is irradiated from the light source part. A concave mirror that reflects the laser light that has passed through the translucent phosphor and that transmits the fluorescence emitted to the emission surface side among the fluorescence emitted from the translucent phosphor is further provided.

Here, a concave mirror that reflects the laser light and transmits the fluorescence is arranged on the emission surface side of the translucent phosphor.
Here, as the concave mirror, a dichroic mirror, a perforated mirror having an opening for passing laser light, or the like can be used.
As a result, the fluorescence emitted from the translucent phosphor can be transmitted, and the laser light that has been condensed by the condenser lens and transmitted through the translucent phosphor can be reflected by the concave mirror in the direction of the fluorescence emission position. it can.

As a result, the concave mirror reflects the laser light that has passed through the translucent phosphor again toward the translucent phosphor, so that fluorescence can be efficiently extracted, and a light source with higher brightness is obtained. be able to.
A light source device according to an eighteenth invention is the light source device according to the sixteenth or seventeenth invention,
The concave mirror is a dichroic mirror or a perforated mirror having an opening.

Here, a dichroic mirror or a perforated mirror having an opening is used as the concave mirror.
Thus, in the concave mirror provided on the incident surface side of the laser light in the translucent phosphor, the laser light is transmitted, and the fluorescence emitted from the translucent phosphor and emitted to the incident surface side is transmitted. It can be reflected in the direction of the light emitting position on the body.

Alternatively, in the concave mirror provided on the exit surface side of the translucent phosphor, the fluorescence emitted from the translucent phosphor is transmitted, and the laser light transmitted through the translucent phosphor is transmitted by the translucent phosphor. It can be reflected in the direction of the light emitting position.
As a result, a light source with higher brightness can be obtained.
A light source device according to a nineteenth invention is the light source device according to the first invention, wherein the translucent phosphor has a spherical shape.

Here, a spherical phosphor is used as the translucent phosphor.
As a result, a fluorescent light source section that is excited by the laser light and emits fluorescence can be formed along the laser propagation direction at the portion where the laser light is condensed in the spherical translucent phosphor. Then, since the laser light is irradiated from the surface to the inside of the translucent phosphor with almost no scattering, the emitted fluorescence can be efficiently extracted from the desired direction.

A light source device according to a twentieth invention is the light source device according to the nineteenth invention, wherein the translucent phosphor takes in the laser light emitted from the light source unit and condensed by the condenser lens. And a second opening for taking out the fluorescence emitted from the translucent phosphor by the laser light.
Here, the spherical translucent phosphor is provided with the first and second openings, the laser light focused by the condenser lens is taken in from the first opening, and the fluorescent light excited by the translucent phosphor is used. Is taken out from the second opening.

Thereby, high-luminance light can be extracted using the translucent phosphor having the first opening for taking in the laser light and the second opening for taking out the fluorescence.
A light source device according to a twenty-first invention is the light source device according to the nineteenth or twentieth invention,
A laser condensing system including a light source section and a condensing lens is arranged so as to condense the laser light on the central portion of the spherical translucent phosphor.

Here, the laser light is focused on the central portion of the spherical translucent phosphor.
This makes it possible to form a fluorescent light source unit that emits fluorescent light in the central portion of the spherical translucent phosphor and emit the fluorescent light from the fluorescent light source unit in all directions.
A light source device according to a twenty-second aspect of the present invention is the light source device according to any one of the nineteenth to twenty-first aspects of the invention, wherein the laser light condensing system including the light source unit and the condensing lens includes a translucent phosphor. A plurality of them are arranged on one spherical surface as the center.

Here, for a single spherical translucent phosphor, a plurality of laser condensing systems (a light source section and a condensing lens) are arranged on a common spherical surface centered on the translucent phosphor. There is.
As a result, a spherical translucent phosphor is irradiated with laser light from a plurality of laser condensing systems arranged at equal distances from the translucent phosphor, and high-intensity fluorescence is extracted and used as a light source. You can

A light source device according to a twenty-third aspect of the present invention is the light source device according to any one of the nineteenth to twenty-second aspects of the present invention, wherein the light source device collects fluorescence emitted from the translucent phosphor, And a fiber that emits fluorescence from the second end face opposite to the first end face while irradiating the first end face with the fluorescence collected by the use lens.
Here, on the downstream side of the translucent phosphor, an intake lens that takes out fluorescence emitted from a portion of the translucent phosphor irradiated with the laser light (fluorescent light source unit) and an incident lens is incident. A fiber for emitting fluorescence from the side (second end surface) opposite to the side of incidence (first end surface) is arranged.

Thereby, the fluorescence emitted from the translucent phosphor is taken out from the direction of the taking lens in the translucent phosphor. Then, the fluorescence collected by the capturing lens can be captured from the first end surface of the fiber, and high-luminance light can be emitted from the second end surface.
A light source device according to a twenty-fourth aspect of the present invention is the light source device according to the twenty-third aspect, wherein a plurality of fluorescence uptake systems including an uptake lens and fibers are arranged on one spherical surface centered on the translucent phosphor. Has been done.

Here, for a single spherical translucent phosphor, a plurality of fluorescence uptake systems (intake lenses and fibers) are arranged on a common spherical surface centered on the translucent phosphor.
With this, the high-intensity fluorescent light emitted from the spherical translucent phosphor is taken into a plurality of fluorescence capturing systems arranged at equal distances from the translucent phosphor, and each is used as a high-intensity light source. You can

A light source device according to a twenty-fifth invention is a light source device according to the twenty-third or twenty-fourth invention,
The taking-in lens is arranged such that the central axis of the lens is coaxial with the optical axis of the laser light emitted from the light source unit and condensed by the condenser lens.
Here, the taking-in lens included in the fluorescence taking-in system is arranged so that the central axis of the lens is aligned with the central axis of the laser propagation of the laser light inside the translucent phosphor.

As a result, since the central axis of the capturing lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source section) formed inside the spherical translucent phosphor, the translucent phosphor has The emitted fluorescence can be efficiently extracted. Therefore, it is possible to obtain a light source having higher brightness than the conventional one.
In addition, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source section) formed inside the spherical translucent phosphor, it is arranged on the downstream side of the light source section. The optical system (condensing lens, taking-in lens, etc.) to be used can be arranged on a straight line. Therefore, the optical axis can be easily adjusted and the optical system can be downsized.

A light source device according to a twenty-sixth invention is a light source device according to the twenty-third or twenty-fourth invention,
The taking-in lens is arranged such that the central axis of the lens is oblique to the central axis of the condenser lens.
Here, it is arranged so that the central axis of the taking-in lens is oblique (non-coaxial) with respect to the central axis of the condenser lens.

Accordingly, it is possible to prevent the laser light, which has been transmitted to the translucent phosphor without being absorbed, from being incident on the capturing lens, of the laser light applied to the translucent phosphor.
Therefore, since only the fluorescence excited by the laser light in the translucent phosphor is taken into the taking-in lens, it is possible to obtain a light source with higher brightness than in the past.

A light source device according to a twenty-seventh invention is provided with a light source unit for irradiating laser light, a condenser lens, a translucent phosphor, a reflecting film, a first opening portion, and a second opening portion. There is. The condenser lens condenses the laser light emitted from the light source unit. The translucent phosphor emits fluorescence in a portion where laser light is transmitted. The reflective film is provided on at least a part of the surface of the translucent phosphor and reflects the laser light or the fluorescence. The first opening is formed in a part of the reflection film on the laser light incident side, and allows the laser light to enter. The second opening is formed in a part of the reflection film on the emission side of the fluorescence, and emits the fluorescence.

Here, the laser light emitted from the light source unit and condensed by the condenser lens is irradiated to the translucent phosphor, and the fluorescent light excited by the laser light in the translucent phosphor is used as a light source. A reflective film is provided on at least a part of the surface of the translucent phosphor. Then, the translucent phosphor is provided with the first and second openings, the laser light condensed by the condenser lens is taken in from the first opening, and the fluorescence excited by the translucent phosphor is converted into the second fluorescence. Take out from the opening.

As a result, the laser light is taken into the translucent phosphor through the first opening, and
It is possible to reflect the laser light taken into the translucent phosphor or the fluorescence emitted from the laser light passing portion of the translucent phosphor in a desired direction and take out the fluorescence through the second opening.
As a result, the fluorescent light emitted from the fluorescent light source portion formed on the translucent phosphor can be efficiently taken out, so that a light source with higher brightness than in the past can be obtained.

A distance measuring sensor according to a twenty-eighth invention is a light source device according to any one of the first to twenty-seventh inventions, a light receiving unit that receives reflected light of light emitted from the light source device, and a light receiving unit that receives light. And a measuring unit that measures the distance to the target object based on the amount of light.
Here, a distance measuring sensor is configured using the above-described light source device.
This makes it possible to use a light source having a higher brightness than conventional ones, and thus it is possible to obtain an effect that the measurement distance can be extended and the response speed can be improved.

A distance measuring sensor according to a twenty-ninth invention is the distance measuring sensor according to the twenty-eighth invention, further including a chromatic aberration focusing lens through which light including a plurality of wavelengths output from the light source device passes. The light receiving unit receives the reflected light of the light including the plurality of wavelengths, which is applied to the object through the chromatic aberration focusing lens. The measuring unit measures the distance to the object based on the wavelength of the reflected light that maximizes the amount of light received by the light receiving unit.

Here, a confocal system that measures the distance to an object by separating light containing a plurality of wavelengths for each wavelength (each color) using a chromatic aberration focusing lens and detecting the peak of the light of each wavelength Of the distance measuring sensor.
As a result, as described above, since the distance measuring sensor is configured using the light source device that emits light having higher brightness than the conventional one, a high-performance confocal distance measuring sensor can be obtained. ..

  According to the light source device of the present invention, it is possible to obtain a light source having higher brightness than the conventional one.

The schematic diagram which shows the structure of the confocal measurement device which mounts the light source device which concerns on one Embodiment of this invention. FIG. 2 is a schematic diagram showing a configuration of a light source device mounted on the confocal measurement device of FIG. 1. The schematic diagram which expanded the principal part of the light source device of FIG. The schematic diagram which shows the shape of the fluorescent light source part formed inside the translucent fluorescent substance of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 2 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. 6 is a graph showing wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 3 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. 9 is a graph showing wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. 8. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 4 of this invention. FIG. 12A is a schematic diagram showing refraction of light in the translucent phosphor included in the light source device of FIG. 11. (B) is a schematic diagram which shows the refraction | bending of the light in the translucent fluorescent substance contained in the light source device of FIG. 2 as a comparative example. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 5 of this invention. FIG. 14 is a schematic diagram showing the position of a condensing point formed inside the translucent phosphor included in the light source device of FIG. 13. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 6 of this invention. FIG. 16 is a schematic diagram showing the position of a condensing point formed inside the translucent phosphor included in the light source device of FIG. 15. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 7 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 8 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 9 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 10 of this invention. FIG. 21 is an enlarged view showing the configuration of a translucent phosphor included in the light source device of FIG. 20. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 11 of this invention. FIG. 23 is a schematic diagram showing a configuration of a translucent phosphor included in the light source device of FIG. 22. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 12 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 13 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 14 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 15 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 16 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 17 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 18 of this invention. The graph which showed the relationship between the distance from the fluorescent substance surface of the condensing point formed inside the transparent fluorescent substance of FIG. 3, and the radiance inside a fluorescent substance for every absorption coefficient of a transparent fluorescent substance. The figure for demonstrating the mathematical formula used as the basis of the graph of FIG.

(Embodiment 1)
A light source device 10 and a confocal measuring device (distance measuring sensor) 50 including the light source device 10 according to an embodiment of the present invention will be described below with reference to FIGS. 1 to 4, 31 and 32. ..
(Confocal measuring device 50)
The confocal measurement device 50 equipped with the light source device 10 according to the present embodiment, as shown in FIG.
It is a measuring device that measures the displacement of a measurement target T using a confocal optical system. The measurement target T measured by the confocal measurement device 50 is, for example, a cell gap of a liquid crystal display panel.

As shown in FIG. 1, the confocal measuring device 50 outputs a signal output from a head unit 51 having a confocal optical system, a controller unit 53 optically connected via an optical fiber 52, and a controller unit 53. A monitor 54 for displaying is provided.
The head unit 51 includes a diffractive lens (chromatic aberration focusing lens) 51a, an objective lens 51b arranged on the measurement target T side of the diffractive lens 51a, an optical fiber 52, and a diffractive lens 51a in a cylindrical housing. And a condenser lens 51c provided therebetween.

The diffractive lens 51a causes chromatic aberration in light emitted from a light source (for example, a white light source) that emits light of a plurality of wavelengths described later along the optical axis direction. In the diffractive lens 51a, a fine undulating shape such as a kinoform shape or a binary shape (step shape, step shape) is periodically formed on the surface of the lens. The shape of the diffractive lens 51a is not limited to the above configuration.

The objective lens 51b uses the light that has caused chromatic aberration in the diffraction lens 51a as the measurement target T.
Focus on.
The condenser lens 51c is provided between the optical fiber 52 and the diffractive lens 51a in order to match the numerical aperture of the optical fiber 52 with the numerical aperture of the diffractive lens 51a.
This is because the light emitted from the light source is guided to the head portion 51 via the optical fiber 52, and the light emitted from the optical fiber 52 can be effectively used by the diffractive lens 51a. This is because it is necessary to match the numerical aperture (NA) with the numerical aperture of the diffractive lens 51a.

The optical fiber 52 is an optical path from the head unit 51 to the controller unit 53, and
It also functions as a pinhole. That is, of the light collected by the objective lens 51 b, the light focused on the measurement target T is focused on the opening of the optical fiber 52. Therefore, the optical fiber 5
2 functions as a pinhole that blocks light having a wavelength that is not focused on the measurement target T and allows light that is focused on the measurement target T to pass through.

The confocal measurement device 50 may have a configuration in which the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53, but by using the optical fiber 52 in the optical path, the confocal measuring device 50 is used to move the head unit 51 to the controller unit 53. It is possible to move flexibly with respect to. Further, the confocal measuring device 50 needs to have a pinhole in the case where the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53. However, in the case where the optical fiber 52 is used, the confocal measuring device 50 has a confocal point. The measuring device 50 does not need to have a pinhole.

The controller unit 53 includes a light source device 10 as a light source, a branch optical fiber 56, and a spectroscope 57.
An image pickup element (light receiving section) 58 and a control circuit section (measurement section) 59 are mounted inside. The detailed configuration of the light source device 10 will be described later.
The branch optical fiber 56 has one optical fiber 55a on the connection side with the optical fiber 52 forming the optical path from the head section 51 to the controller section 53, and two optical fibers 1 on the opposite side.
It has 5,55. The optical fiber 15 constitutes a part of the light source device 10 described later. The optical fiber 55b is connected to the spectroscope 57, and the light collected by the spectroscope 57 is taken in from the end face.

Therefore, the branched optical fiber 56 guides the light emitted from the light source device 10 to the optical fiber 52 and irradiates the measurement target T from the head portion 51. Further, the branched optical fiber 56 guides the light reflected on the surface of the measuring object T to the spectroscope 57 via the optical fiber 52 and the head portion 51.
The spectroscope 57 collects the light emitted from the diffraction mirror 57b, the concave mirror 57a that reflects the reflected light returning through the head unit 51, the diffraction grating 57b on which the light reflected by the concave mirror 57a enters. And a condensing lens 57c. The spectroscope 57 includes the head unit 5
As long as the reflected light returning via 1 can be separated for each wavelength, it may have any configuration such as a Zerniter type and a Littrow type.

The image sensor 58 is a line CMOS (Comp. Comp.) That measures the intensity of the light emitted from the spectroscope 57.
lementary Metal Oxide Semiconductor) and CCD (Charge Coupled Device). Here, in the confocal measurement device 50, the head unit 51 is configured by the spectroscope 57 and the image pickup device 58.
And a measuring unit for measuring the intensity of the reflected light returned via each wavelength.
The measuring unit may be configured by a single unit of the image pickup device 58 such as a CCD as long as it can measure the intensity of the light returning from the head unit 51 for each wavelength. In addition, the image sensor 58 is
It may be a two-dimensional CMOS or a two-dimensional CCD.

The control circuit unit 59 controls the operations of the light source device 10, the image pickup device 58, and the like. Although not shown, the control circuit unit 59 has an input interface for inputting signals for adjusting the operations of the light source device 10, the image pickup device 58, and the like, an output interface for outputting signals of the image pickup device 58, and the like. ing.
The monitor 54 displays the signal output by the image sensor 58. For example, the monitor 54 draws the spectral waveform of the light returning from the head unit 51 and displays the displacement of the measurement target.

In the confocal measurement device 50 of this embodiment, a light source with high brightness can be obtained by mounting the following light source device 10.
As a result, it is possible to obtain an effect that the measuring distance can be extended, the responsiveness can be improved, and the like as the measuring device.
The configuration of the light source device 10 will be described in detail below.

(Light source device 10)
The light source device 10 of the present embodiment is mounted as a light source of the confocal measurement device 50 described above, and as shown in FIG. 2, the light source unit 11, the condenser lens 12, the translucent phosphor 13, The lens 14 for taking in and the optical fiber 15 are provided.
The light source unit 11 is, for example, a semiconductor laser that emits a laser beam having a peak wavelength of about 450 nm, and serves as excitation light for causing the translucent phosphor 13 to emit fluorescence, in the direction of the condenser lens 12. Irradiate.

The condensing lens 12 is a lens having both an incident surface and an emitting surface that are convex, and condenses the laser light emitted from the light source unit inside the translucent phosphor 13. Specifically, the condenser lens 12 condenses the laser light at a distance within 500 μm from the incident surface 13a of the translucent phosphor 13.
The position of the focal point X of the laser light focused by the focusing lens 12 (depth from the incident side surface) will be described later in detail.

The translucent phosphor 13 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a plate-like shape as shown in FIG. Further, the translucent phosphor 13 has an entrance surface 13a and an exit surface 13b, which are respectively arranged along the surface perpendicular to the laser propagation direction. Then, the translucent phosphor 13 is directed in all directions, as shown in FIG. 2, in the portion irradiated with the laser light emitted from the light source unit 11 and condensed by the condenser lens 12. 480
It emits fluorescence with a wavelength in the range of ~ 750 nm.

Then, as shown in FIG. 3, the translucent phosphor 13 is provided with a substantially cylindrical fluorescent light source portion 20 that is long in the laser light irradiation direction along the laser light propagation direction.
The fluorescent light source unit 20 is formed in a portion where the laser light passes through the inside of the translucent phosphor 13, and has a substantially cylindrical shape that is long in the laser propagation direction, as shown in FIGS. 3 and 4. .
Since the fluorescent light source unit 20 emits fluorescent light in all directions in each unit,
It can be regarded as a light source formed inside the translucent phosphor 13. Specifically, as shown in FIG. 4, the fluorescent light source section 20 has a small-diameter portion in which the radius of the circle of the cross section becomes small in the central portion in the longitudinal direction along the propagation direction of the laser light. It has a substantially cylindrical shape in which the radius of the circle of the cross section increases toward.

That is, the fluorescent light source unit 20 is formed so that the condensing point X of the laser light is located on the cross section 20b of the small diameter portion. Then, the fluorescent light source section 20 is adapted to the diffusion of the laser light and the incident side cross section 20.
The cross-sectional areas of a and the emission-side cross section 20c are formed to be larger than that of the small diameter section cross section 20b.
For example, the fluorescence light source unit 20 includes an end surface on the laser light incident side (incident side cross section 20a), a small diameter portion (a small diameter section cross section 20b) in a substantially cylindrical central portion, and an end surface on the laser light emission side (emission side). Cross section 20c)
At, each emits fluorescence in all directions.

Therefore, of the fluorescence emitted from the fluorescence light source unit 20, the amount of fluorescence condensed by the capturing lens 14 on the end surface (first surface) of the optical fiber 15 extends in the direction of the lens center axis A2 of the capturing lens 14. Of the fluorescence emitted by the fluorescence light source unit 20 existing within the depth of field of the optical fiber 15, the amount of light is captured by the capturing lens 14.
Note that the depth of field means a range on the object side (object surface side) that can be considered to be practically in focus before and after a position where a lens is used for focusing. The depth of focus is the depth of field replaced with the film side (image plane side). In other words, everything in the depth of field can be captured as if it were in focus.

Further, of the depth of field, the rear side of the focused position is called the rear depth of field, and the front side of the focused position is called the front depth of field.
Like the condensing lens 12, the taking-in lens 14 has a convex incident surface and an outgoing surface, and is arranged on the downstream side in the direction in which the laser light propagates in the translucent phosphor 13. .. The taking-in lens 14 is provided inside the translucent phosphor 13 (fluorescent light source unit 2).
The fluorescence emitted in 0) is collected on the end face of the optical fiber 15.

Further, as shown in FIG. 3, the taking-in lens 14 has a lens central axis A2 as the translucent phosphor 1.
It is arranged so as to be coaxial (on a straight line) with the central axis A1 through which the laser light propagates inside the laser beam 3. In this way, by disposing the center axis A1 of the laser propagation and the lens center axis A2 of the capturing lens 14 to be coaxial, the fluorescence emitted from the fluorescence light source unit 20 is efficiently emitted from the first surface 15a. It can be injected into the fiber 15.

The optical fiber 15 is one optical fiber that constitutes the branch optical fiber 56 of the confocal measurement device 50 described above, and forms an optical path of the light emitted from the head portion 51 of the confocal measurement device 50 inside. ..
Further, as shown in FIG. 3, the optical fiber 15 has an end face (first face 15a) on which the fluorescence collected by the taking lens 14 is incident and an end face on the opposite side (second face 15b). )
And have.

Thereby, the optical fiber 15 can emit the light incident from the first surface 15a from the second surface 15b.
In the light source device 10 of the present embodiment, with the above-described configuration, as shown in FIG. 2, the excitation laser light emitted from the light source unit 11 is condensed inside the translucent phosphor 13 by the condenser lens 12. Focus on. Then, as shown in FIG. 3, the fluorescence generated at the laser light condensing portion inside the translucent phosphor 13 is condensed on the first surface 15 a of the optical fiber 15 by the taking lens 14.

Here, in the light source device 10 of the present embodiment, as described above, the laser light condensed by the condenser lens 12 is applied to the inside of the single crystal phosphor (translucent phosphor 13). ..
At this time, when the laser light is incident on the single-crystal phosphor (translucent phosphor 13), the light hardly diffuses inside the phosphor and penetrates the inside of the phosphor while exciting the fluorescence.
That is, in the light source device 10 of the present embodiment, a single crystal phosphor (translucent phosphor) that hardly scatters the laser light entering the inside is used. Therefore, as compared with a conventional fluorescent substance hardened using a binder such as a resin, the fluorescent light emitted by the laser light entering the inside can be efficiently extracted, and thus a light source with higher brightness than the conventional one can be obtained. Obtainable.

<Regarding the position (depth) of the focal point X>
In the present embodiment, the condensing point X of the laser light formed inside the translucent phosphor 13 by the condensing lens 12 is within 500 μm from the incident side surface of the translucent phosphor 13, and more preferably, It is formed within 160 μm.
Here, the condensing point X having the maximum light amount is the laser NA determined by the light source unit 11 and the condensing lens 12, the distance from the surface of the translucent phosphor 13 on which the laser is incident, and the translucent light. Phosphor 1
And the absorption coefficient of 3.

FIG. 31 shows the relationship between the distance (depth) from the phosphor surface to the condensing point X formed inside the translucent phosphor 13 and the radiance inside the phosphor. The graph shown for each coefficient is shown.
In the graph shown in FIG. 31, the focus position radius (beam waist beam radius) is 20 μm.
3 shows the relationship between the distance from the phosphor surface to the condensing point X and the radiance inside the phosphor when m and the laser NA (Numerical Aperture) are 0.06.

Specifically, the graph shown in FIG. 31 shows that the absorption coefficient of the translucent phosphor 13 is 20, 40, 80,
For each 160, changes in radiance in the fluorescent substance with respect to the depth of the condensing point X (distance from the fluorescent substance surface) are shown.
Further, in the graph shown in FIG. 31, when the distance from the phosphor surface to the condensing point X is 0 μm, that is, when the condensing point X is on the surface, the radiance in the phosphor is 1.00 (W / sr / m). Relative radiance when ³ ) is plotted for each absorption coefficient. And 1.00 (W /
The depth of the condensing point X having a radiance larger than sr / m ³ ) is defined as a numerical range.

For example, when the absorption coefficient of the translucent phosphor 13 is 20, as shown in the graph of FIG. 31, when the distance (depth) of the condensing point X from the phosphor surface is 0 to 500 μm, 1. 00 (W / s
The radiance is larger than r / m ³ ). On the other hand, the distance (depth) from the phosphor surface to the focal point X
Exceeds 500 μm, the brightness becomes smaller than 1.00 (W / sr / m ³ ). Therefore, when the absorption coefficient of the translucent phosphor 13 is 20, a high-luminance light source can be obtained within 500 μm.

Next, when the absorption coefficient of the translucent phosphor 13 is 40, as shown in the graph of FIG.
When the distance (depth) of the condensing point X from the phosphor surface is 0 to 300 μm, the range is 1.00 (W / sr
The radiance is larger than / m ³ ). On the other hand, when the distance (depth) from the phosphor surface to the condensing point X exceeds 300 μm, the brightness becomes smaller than 1.00 (W / sr / m ³ ).
Therefore, when the absorption coefficient of the translucent phosphor 13 is 40, it is possible to obtain a high-luminance light source within 300 μm.

Next, when the absorption coefficient of the translucent phosphor 13 is 80, as shown in the graph of FIG.
When the distance (depth) of the condensing point X from the phosphor surface is 0 to 160 μm, the range is 1.00 (W / sr
The radiance is larger than / m ³ ). On the other hand, when the distance (depth) from the phosphor surface to the condensing point X exceeds 160 μm, the brightness becomes smaller than 1.00 (W / sr / m ³ ).
Therefore, when the absorption coefficient of the translucent phosphor 13 is 80, a high-brightness light source can be obtained within 160 μm.

Next, when the absorption coefficient of the translucent phosphor 13 is 160, as shown in the graph of FIG. 31, when the distance (depth) of the condensing point X from the phosphor surface is 0 to 80 μm, 1 is set. 0.00 (W / sr
The radiance is larger than / m ³ ). On the other hand, when the distance (depth) from the phosphor surface to the condensing point X exceeds 80 μm, the brightness becomes smaller than 1.00 (W / sr / m ³ ). Therefore, when the absorption coefficient of the translucent phosphor 13 is 160, a high-luminance light source can be obtained within 80 μm.

As described above, in order to obtain a light source with high brightness, the distance from the phosphor surface to the condensing point X (
The depth) is preferably 500 μm or less.
Further, as a more preferable range, when the absorption coefficient is 80, in order to obtain a light source with high brightness, the distance (depth) from the phosphor surface to be high brightness to the condensing point X is 160 μm or less. Is preferred.

  The graph shown in FIG. 31 is derived by the following equation (1).

すなわち、数１の式は、図３２に示すように、単位面積あたりの放射輝度Ｌ_（ｘ）を、
変換効率Ａ、透光性蛍光体１３の吸収係数α、ＬＤパワーＩ_ＬＤ、断面積Ｓ（ｘ’−ｘ）
、透光性蛍光体１３の厚みｔ、表面から透光性蛍光体１３内の集光点Ｘまでの距離ｘ、表
面から計測位置までの距離ｘ’、集光位置におけるレーザ半径ｒ_ＢＷを用いて表した関係
式である。

That is, the expression of the mathematical expression 1 gives the radiance L _(x) per unit area as shown in FIG.
Conversion efficiency A, absorption coefficient α of translucent phosphor 13, LD power I _LD , cross-sectional area S (x′−x)
, The thickness t of the translucent phosphor 13, the distance x from the surface to the condensing point X in the translucent phosphor 13, the distance x ′ from the surface to the measurement position, and the laser radius r _BW at the condensing position are used. Is the relational expression

In the above formula 1, the cross-sectional area S (x'-x) is expressed by the following relational formula.

ここで、断面積は、集光位置からレーザＮＡ（０．０６）で広がっていくものとして近
似した。また、集光位置においては、有限な面積Ｓ_ＢＷを持ち、その半径はｒ_ＢＷとする
。光学系において回折限界以上小さく絞ることができないため、有効な面積を変数とした
。

Here, the cross-sectional area was approximated as being expanded from the focus position by the laser NA (0.06). In addition, the light collecting position has a finite area S _BW and its radius is r _BW . Since the optical system cannot be narrowed down beyond the diffraction limit, the effective area was used as a variable.

The absorption coefficient α of the translucent phosphor 13 is expressed by using the following relational expression (3).
That is, when the intensity of light before entering the translucent phosphor 13 is I ₀ , the intensity I of light after entering is expressed by the following equation using the absorption coefficient α from the Lambert-Beer law. To be done.

ここで、ｘは、媒質の距離である。
高輝度化された光源が得られるＩの範囲は、０．２≦Ｉ≦１である。

Here, x is the distance of the medium.
The range of I in which a light source with high brightness is obtained is 0.2 ≦ I ≦ 1.

(Embodiment 2)
The light source device according to the second embodiment of the present invention will be described below with reference to FIGS. 5 to 7.
As shown in FIG. 5, the light source device 110 according to the present embodiment is different from the first embodiment in that a concave mirror 116 is provided between the translucent phosphor 113 and the taking lens 14.
Since the other configurations of the light source device 110 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.

As shown in FIG. 5, the light source device 110 of the present embodiment includes a light source unit 11, a condenser lens 12, a translucent phosphor 113, a concave mirror 116, a taking lens 14, and an optical fiber 15. I have it.
The translucent phosphor 113 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a plate-like shape.

The concave mirror 116 is arranged between the translucent phosphor 113 and the taking lens 14,
The incident surface on the side of the translucent phosphor 113 has a concave reflecting surface. Then, the concave mirror 116
While transmitting the fluorescence excited by the translucent phosphor 113, the translucent phosphor 113
It has the property of reflecting the laser light that has passed through.
As a result, of the fluorescence emitted from the fluorescence light source unit 120 formed inside the translucent phosphor 113 in all directions, the fluorescence emitted to the capturing lens 14 side is not blocked by the concave mirror 116. , Can be captured by the capturing lens 14.

Further, as shown in FIG. 6, the laser light transmitted without being absorbed by the translucent phosphor 113 can be reflected by the concave mirror 116 and returned to the translucent phosphor 113 side.
As a result, since the translucent phosphor 113 can excite fluorescence by taking in more excitation light than the laser light emitted in the first embodiment, a light source with higher brightness than before can be obtained. Obtainable.

Further, by making the translucent phosphor 113 thinner than the translucent phosphor 13 of the first embodiment, the translucent phosphor 13 is transmitted through the translucent phosphor 13 and then reflected by the concave mirror 116 to be retransmitted. Thirteen
It is possible to increase the amount of laser light that is irradiated onto the light source, and to obtain a light source with higher brightness.
Further, as shown in FIG. 6, the concave mirror 116 is arranged such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescent light source unit 120.

As a result, the reflected laser light can be condensed again at the position of the portion where the fluorescence is emitted (fluorescent light source section 120).
As a result, the translucent phosphor 113 can take in more excitation light than the laser light emitted in the first embodiment and excite fluorescence, so that a light source with higher brightness than before can be obtained. Obtainable.

Further, it is more preferable that the concave mirror 116 has a spherical or aspherical shape centered on the condensing point X of the laser light condensed in the translucent phosphor 113 by the condensing lens 12.
As a result, the reflected laser light can be focused again on the portion where the fluorescence is emitted (fluorescent light source section 120).

As a result, the capturing lens 14 can capture more fluorescent light than the fluorescent light captured in the first embodiment and condense it on the first surface 15a of the optical fiber 15, so that the brightness can be more effectively increased. It is possible to obtain a light source.
As the concave mirror 116, a dichroic mirror, a lens having a concave surface of a meniscus lens on which a reflective film for reflecting laser light is vapor-deposited, or a hole having an opening in a portion through which fluorescence passes and reflecting the laser light on a concave surface is formed. An open mirror or the like can be used.

For example, when a dichroic mirror is used as the concave mirror 116, light having a wavelength of about 480 nm or less (laser light) is reflected and light having a wavelength of more than about 480 nm (fluorescence) is transmitted, as shown in FIG. This allows the laser light to be reflected while transmitting the fluorescence.

(Embodiment 3)
The light source device according to the third embodiment of the present invention will be described below with reference to FIGS. 8 to 10.
As shown in FIG. 8, the light source device 210 according to the present embodiment is different from the first embodiment in that a concave mirror 216 is provided between the condenser lens 12 and the translucent phosphor 13.
Since the other configurations of the light source device 210 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here and detailed description thereof is omitted.
As shown in FIG. 8, the light source device 210 of the present embodiment includes a light source unit 11, a condenser lens 12, a concave mirror 216, a translucent phosphor 13, an intake lens 14, and an optical fiber 15. I have it.

The concave mirror 216 is arranged between the condenser lens 12 and the translucent fluorescent body 13, and has a concave reflecting surface on the surface on the translucent fluorescent body 13 side. Then, the concave mirror 216 is connected to the condenser lens 1
It has a property of transmitting the laser beam condensed by the light beam 2 and reflecting the fluorescence emitted inside the translucent phosphor 13.
Thereby, the laser light emitted from the light source unit 11 and condensed by the condenser lens 12 is
It is possible to irradiate the translucent phosphor 13 without being blocked by the concave mirror 216. Further, as shown in FIG. 9, among the fluorescence emitted in all directions from the fluorescence light source unit 220 formed inside the translucent phosphor 13, the fluorescence emitted to the condenser lens 12 side is a concave mirror. It can be reflected by 216 and returned to the translucent phosphor 13 side.

As a result, the taking-in lens 14 can take in more fluorescence than the fluorescence taken in in the first embodiment and condense it on the first surface 15a of the optical fiber 15, resulting in higher brightness than before. It is possible to obtain a light source.
Furthermore, the concave mirror 216 is arranged such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescent light source unit 220.

As a result, the reflected fluorescence can be condensed at the position of the portion where the fluorescence is emitted (fluorescence light source unit 220).
As a result, the taking-in lens 14 can take in more fluorescence than the fluorescence taken in in the first embodiment and condense it on the first surface 15a of the optical fiber 15, thus further effectively increasing the brightness. It is possible to obtain a light source.

Moreover, it is more preferable that the concave mirror 216 has a spherical or aspherical shape centered on the condensing point X of the laser light condensed in the translucent phosphor 13 by the condensing lens 12.
As a result, the reflected fluorescence can be focused on the portion where the fluorescence is emitted (fluorescence light source 220).

As a result, the taking-in lens 14 can take in more fluorescence than the fluorescence taken in in the first embodiment and condense it on the first surface 15a of the optical fiber 15, thus further effectively increasing the brightness. It is possible to obtain a light source.
The concave mirror 216 is a dichroic mirror, or a lens having a concave surface of a meniscus lens on which a reflection film for reflecting fluorescence is vapor-deposited, and a hole having an opening in a portion through which laser light passes and reflecting fluorescence on a concave surface. A mirror or the like can be used.

For example, when a dichroic mirror is used as the concave mirror 216, as shown in FIG. 10, light having a wavelength of about 480 nm or less (laser light) is transmitted and light having a wavelength of more than about 480 nm (fluorescence) is reflected. Thus, the fluorescence can be reflected while transmitting the laser light.

(Embodiment 4)
The light source device according to Embodiment 4 of the present invention will be described below with reference to FIGS. 11 to 12B.
As shown in FIG. 11, the light source device 310 according to the present embodiment is different from the first embodiment in that a spherical translucent phosphor 313 is provided instead of the plate-shaped translucent phosphor 13. Different.
Since the other configurations of the light source device 310 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.

As shown in FIG. 11, the light source device 310 of this embodiment includes a light source unit 11 and a condenser lens 12.
And a translucent phosphor 313, a taking lens 14, and an optical fiber 15.
The translucent phosphor 313 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. The translucent phosphor 313 is provided with the condensing point X of the laser light condensed by the condensing lens 12 at the center thereof, and emits fluorescence in all directions with the condensing point X as the center. ..

Further, in the spherical translucent phosphor 313, as shown in FIG. 12A, the fluorescence emitted internally is almost refracted at the interface between the translucent phosphor 313 and the air (emission part 313a). Instead, it is taken into the taking lens 14.
On the other hand, in the plate-shaped light-transmitting phosphor 13 described in the first embodiment and the like, as shown in FIG. 12B, the fluorescent light emitted inside is the interface between the light-transmitting phosphor 13 and the air ( The light is refracted at the emitting portion 13ba) and is taken into the taking-in lens 14 while spreading in a wide angle.

Therefore, by using the spherical translucent phosphor 313 instead of the plate-shaped translucent phosphor 13,
The fluorescent light emitted inside the translucent phosphor 313 can be guided to the taking-in lens 14 with almost no refraction.
As a result, the coupling efficiency of fluorescence in the taking lens 14 is improved, so that the optical fiber 1
It is possible to collect light of higher brightness on the first surface 15a of No. 5.

Further, in the present embodiment, the laser light is irradiated and condensed so that the condensing point X is formed at the center of the translucent phosphor 313 of the sphere.
As a result, the fluorescence emitted in all directions around the condensing point X which is the center of the sphere,
Wherever it is taken out, it is emitted into the air at the same distance from the condensing point X.
As a result, the fluorescence extracted from the translucent phosphor 313 of the sphere can be extracted with substantially the same brightness from any direction.

(Embodiment 5)
The light source device 410 according to the fifth embodiment of the present invention will be described below with reference to FIGS. 13 and 14.
As shown in FIG. 13, the light source device 410 according to the present embodiment irradiates the translucent phosphor 413 having a rectangular parallelepiped (polyhedral) shape with laser light from two directions orthogonal to each other. The second embodiment is different from the first embodiment in that two laser focusing systems 411a and 411b including the focusing lens 11 and the focusing lens 12 are provided.

Since the other configurations of the light source device 410 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.
As shown in FIG. 13, the light source device 410 of the present embodiment includes the light source unit 11 and the condenser lens 1.
2, a laser condensing system 411a, a laser condensing system 411b including the light source unit 11 and the condensing lens 12, a translucent phosphor 413, a taking lens 14, and an optical fiber 15.

The laser condensing system 411a is arranged so that the lens center axis of the condensing lens 12 is coaxial with the lens center axis of the capturing lens 14 that takes in the fluorescence.
That is, the laser light emitted from the laser condensing system 411 a is condensed on the translucent phosphor 413 via the condensing lens 12 and causes fluorescence to be emitted at a portion centered on the condensing point X.
Then, the fluorescence emitted from the translucent phosphor 413 is condensed by the capturing lens 14 arranged in line with the laser condensing system 411a, and is irradiated onto the first surface 15a of the optical fiber 15.

The laser condensing system 411b is arranged along the direction in which the lens center axis of the condensing lens 12 is substantially orthogonal to (intersects) the lens center axis of the capturing lens 14 that captures fluorescence.
That is, the laser light emitted from the laser condensing system 411b is condensed on the translucent phosphor 413 via the condensing lens 12 and causes fluorescence to be emitted at a portion centered on the condensing point X.
At this time, the laser beam focused by the focusing lens 12 of the laser focusing system 411b is irradiated so as to have the same focusing point X as the laser beam focused by the focusing lens 12 of the laser focusing system 411a. To be done.

Then, the fluorescence emitted from the translucent phosphor 413 is irradiated in all directions, so that the fluorescence is condensed by the capturing lens 14 arranged along the direction orthogonal to the laser condensing system 411b, and the optical fiber The first surface 15a of 15 is irradiated.
Further, as shown in FIG. 13, the laser focusing systems 411a and 411b are used for the translucent phosphor 413.
Are arranged on the circumference centered on the condensing point X formed inside.

As a result, the translucent phosphor 413 has a plurality of laser condensing systems 411 arranged at the same distance.
Laser light is emitted from a and 411b.
The translucent phosphor 413 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (hexahedral) shape as shown in FIGS.
3a, an exit surface 413b, and an entrance surface 413c.

The entrance surface 413a is a surface facing the exit surface 413b on which the taking lens 14 is arranged, and the laser light emitted from the laser condensing system 411a is incident on the entrance surface 413a.
The emission surface 413b is a surface on the side where the taking lens 14 is arranged, and is the laser condensing system 4
Among the fluorescence emitted in all directions by being excited by the laser light emitted from 11a and 411b, the fluorescence emitted to the capturing lens 14 side is emitted.

The entrance surface 413c is a surface perpendicular to the entrance surface 413a and the exit surface 413b,
The laser light emitted from the laser focusing system 411b enters.
In the light source device 410 of this embodiment, as shown in FIG. 13, two laser focusing systems 411a are used.
, 411b is focused on a common focusing point X formed inside the translucent phosphor 413.

As a result, the amount of laser light at the focusing point X is approximately doubled as compared with the configuration having only one laser focusing system, and thus the excited fluorescence is also approximately doubled, resulting in higher brightness. It is possible to obtain a converted light source.
Further, in the present embodiment, as shown in FIG. 14, inside the translucent phosphor 413, 2
The converging point X of the laser light emitted by the two laser condensing systems 411a and 411b is formed such that the distance d1 from the incident surface 413a and the distance d2 from the incident surface 413c are substantially the same.

In this way, the condensing points X of the laser beams emitted by the two laser condensing systems 411a and 411b are arranged such that the distances d1 and d2 from the incident surfaces 413a and 413c are substantially the same. Thereby, the brightness of the fluorescence at the condensing point X can be further improved.
In addition, in the present embodiment, the configuration in which two laser focusing systems are provided has been described, but the present invention is not limited to this, and the laser focusing system is provided around the translucent phosphor of the rectangular parallelepiped. The structure provided with three or more may be sufficient.

(Embodiment 6)
The light source device 510 according to the sixth embodiment of the present invention will be described below with reference to FIGS. 15 and 16.
As shown in FIG. 15, the light source device 510 according to the present embodiment has a fluorescence capturing system 514a so as to capture fluorescence from two directions orthogonal to each other with respect to a translucent phosphor 513 having a rectangular parallelepiped (polyhedral) shape. , 514b are provided, which is the difference from the first embodiment.

Since the other configurations of the light source device 510 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.
As shown in FIG. 15, the light source device 510 of this embodiment includes a light source unit 11 and a condenser lens 12.
And a translucent phosphor 513, a fluorescence capturing system 514a including the capturing lens 14 and the optical fiber 15, and a fluorescent capturing system 514b including the capturing lens 14 and the optical fiber 15.

The fluorescence capturing system 514a is arranged such that the lens center axis of the capturing lens 14 is coaxial with the lens center axis of the condenser lens 12 that condenses the laser light.
That is, in the fluorescence capturing system 514 a, the condenser lens 12 that is irradiated with light from the single light source unit 11 is used.
Fluorescence generated by exciting the translucent phosphor 513 with the laser light condensed by
The light is collected by the capturing lens 14 arranged in a straight line with the condenser lens 12 and is irradiated onto the first surface 15 a of the optical fiber 15.

In the fluorescence uptake system 514b, the lens center axis of the uptake lens 14 is relative to the lens center axis of the condenser lens 12 and the uptake lens 14 of the fluorescence uptake system 514a.
It is arranged along a direction that is substantially orthogonal (intersecting).
That is, the laser light emitted from the light source unit 11 is condensed on the translucent phosphor 513 via the condensing lens 12, and fluorescence is emitted at the portion centered on the condensing point X.

At this time, the fluorescence generated inside the translucent phosphor 513 is emitted in all directions. Among these, in the direction in which the fluorescence capturing systems 514a and 514b are arranged, fluorescence is emitted from the emission surfaces 513b and 513c arranged at substantially the same distance from the condensing point X of the laser light.
Then, the fluorescence emitted from the emission surfaces 513b and 513c is converted into fluorescence incorporation systems 514a and 514a.
In each of 14 b, the light is collected by the taking-in lens 14 and irradiated on the first surface 15 a of the optical fiber 15.

In addition, as shown in FIG. 15, the fluorescence-incorporating systems 514a and 514b are used for the translucent phosphor 513.
Are arranged on a circle centered on the condensing point X formed inside.
As a result, the translucent phosphor 513 has a plurality of fluorescence uptake systems 514 arranged at the same distance.
The a and 514b are irradiated with fluorescence.
The translucent phosphor 513 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (hexahedral) shape as shown in FIGS.
3a, the emission surface 513b, and the emission surface 513c.

The entrance surface 513a is a surface facing the exit surface 513b on which the capturing lens 14 is arranged, and the laser light emitted from the light source unit 11 via the condenser lens 12 enters.
The emission surface 513b is a surface on the side where the capturing lens 14 of the fluorescence capturing system 514a is arranged, and of the fluorescence that is excited by the laser light emitted from the light source unit 11 and emits light in all directions, The emitted fluorescence is emitted to the side of the capturing system 514a.

The exit surface 513c is a surface perpendicular to the entrance surface 513a and the exit surface 513b,
Of the fluorescent light that is excited by the laser light emitted from the light source unit 11 and emits light in all directions, the fluorescent light that is emitted toward the fluorescent light capturing system 514b is emitted.
In the light source device 510 of the present embodiment, as shown in FIG. 15, fluorescence generated around the condensing point X of the laser light emitted from the light source unit 11 and condensed by the condensing lens 12 is converted into the fluorescence capturing system 514a. , 514b are taken out from two directions to form a light source.

Accordingly, since the fluorescence can be taken out from the single light source unit 11 by the two fluorescence taking systems 514a and 514b, it is possible to provide a plurality of fiber light sources.
Further, in the present embodiment, as shown in FIG. 16, the condensing point X of the laser light emitted by the single light source unit 11 inside the translucent phosphor 513 is a distance d from the emission surface 513b.
3 and the distance d2 from the emission surface 513c are substantially the same.

In this way, the fluorescence extracted by the two fluorescence capturing systems 514a and 514b are arranged so as to be emitted from the emission surfaces 513b and 513c, respectively, which are approximately the same distance from the condensing point X, so that they have substantially the same brightness. Two fiber light sources can be obtained.
In addition, in the present embodiment, the configuration in which the two fluorescence uptake systems are provided has been described, but the present invention is not limited to this, and three fluorescence uptake systems are provided around the translucent phosphor having a rectangular parallelepiped shape. The structure provided above may be sufficient.

(Embodiment 7)
The light source device 610 according to the seventh embodiment of the present invention will be described below with reference to FIG.
As shown in FIG. 17, the light source device 610 according to the present embodiment differs from the fifth embodiment in that a spherical translucent phosphor 613 is provided in place of the rectangular parallelepiped translucent phosphor. There is.

Since the other configurations of the light source device 610 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.
As shown in FIG. 17, the light source device 610 of the present embodiment includes a light source unit 11 and a condenser lens 1.
2, a laser condensing system 611a, a laser condensing system 611b including the light source unit 11 and the condensing lens 12, a translucent phosphor 613, a taking lens 14, and an optical fiber 15.

The laser condensing system 611a is arranged so that the lens center axis of the condensing lens 12 is coaxial with the lens center axis of the capturing lens 14 that takes in the fluorescence.
That is, the laser light emitted from the laser focusing system 611 a is focused on the center of the translucent fluorescent body 613 of the sphere via the focusing lens 12, and emits fluorescence at a portion centered on the focusing point X. Let Then, the fluorescence emitted from the translucent phosphor 613 is laser condensing system 611a.
The light is collected by the taking-in lens 14 arranged on a straight line and is irradiated onto the first surface 15 a of the optical fiber 15.

The laser condensing system 611b is arranged along the direction in which the lens center axis of the condensing lens 12 is substantially orthogonal to (intersects) the lens center axis of the capturing lens 14 that captures fluorescence.
That is, the laser light emitted from the laser condensing system 611b is condensed at the center of the translucent phosphor 613 of the sphere via the condensing lens 12, and emits fluorescence at the portion centered on the condensing point X. Let

At this time, the laser light condensed by the condensing lens 12 of the laser condensing system 611b is the same as the laser light condensed by the condensing lens 12 of the laser condensing system 611a. Irradiation is performed so as to reach the center position (condensing point X) of.
Then, the fluorescence emitted from the translucent phosphor 613 is irradiated in all directions, so that it is condensed by the capturing lens 14 arranged along the direction orthogonal to the laser condensing system 611b, and the optical fiber The first surface 15a of 15 is irradiated.

In addition, the laser focusing systems 611a and 611b, as shown in FIG.
Is arranged on a spherical surface centered on the condensing point X formed inside.
As a result, the translucent phosphor 613 has a plurality of laser condensing systems 611 arranged at the same distance.
Laser light is emitted from a and 611b.
The translucent phosphor 613 is, for example, a YAG single crystal phosphor doped with Ce ions, has a sphere shape, and the condensing point X of the laser light is formed at the center of the sphere. ..

In the light source device 610 of this embodiment, as shown in FIG. 17, two laser focusing systems 611a are used.
, 611b are focused on a common focusing point X formed at the center of the translucent phosphor 613 of the sphere.
As a result, the amount of laser light at the focusing point X is approximately doubled as compared with the configuration having only one laser focusing system, and thus the excited fluorescence is also approximately doubled, resulting in higher brightness. It is possible to obtain a converted light source.

Further, in this embodiment, since the spherical translucent phosphor 613 is used, the translucent phosphor 61 is used.
In the inside of 3, the condensing point X of the laser light emitted by the two laser condensing systems 611a and 611b is substantially the same distance from any incident surface.
In this way, the condensing points X of the laser beams emitted by the two laser condensing systems 611a and 611b are arranged such that the distances from the respective incident surfaces are substantially the same,
The brightness of the fluorescence at the condensing point X can be further improved.

In addition, in the present embodiment, the configuration in which two laser focusing systems are provided has been described, but the present invention is not limited to this, and the laser focusing system is provided around the translucent phosphor of the sphere. The structure provided with three or more may be sufficient.
Further, in the present embodiment, the laser light is irradiated and condensed so that the condensing point X is formed at the center of the translucent phosphor 613 of the sphere.

As a result, the fluorescence emitted in all directions around the condensing point X which is the center of the sphere,
Wherever it is taken out, it is emitted into the air at the same distance from the condensing point X.
As a result, the fluorescent light taken out from the translucent phosphor 613 of the sphere can be taken out with substantially the same brightness from any direction.

(Embodiment 8)
The light source device 710 according to Embodiment 8 of the present invention will be described below with reference to FIG.
As shown in FIG. 18, the light source device 710 according to the present embodiment is different from the sixth embodiment in that a spherical translucent phosphor 713 is provided instead of the rectangular parallelepiped translucent phosphor. There is.
Since the other configurations of the light source device 710 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.

As shown in FIG. 18, the light source device 710 of this embodiment includes a light source unit 11 and a condenser lens 12.
And a translucent phosphor 713, a fluorescence capturing system 714a including the capturing lens 14 and the optical fiber 15, and a fluorescent capturing system 714b including the capturing lens 14 and the optical fiber 15.
The translucent phosphor 713 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape.

As shown in FIG. 18, the fluorescence capturing systems 714a and 714b are arranged on a spherical surface centered on the translucent phosphor 713 of the sphere.
As a result, the translucent phosphor 713 has a plurality of fluorescence uptake systems 714 arranged at the same distance.
The a and 714b are irradiated with fluorescence.
The fluorescence capturing system 714a is arranged so that the lens center axis of the capturing lens 14 is coaxial with the lens center axis of the condenser lens 12 that condenses the laser light.

That is, in the fluorescence capturing system 714 a, the condenser lens 12 which is irradiated by the single light source unit 11 is irradiated.
The fluorescent light generated by exciting the translucent phosphor 713 with the laser light condensed by
The light is collected by the capturing lens 14 arranged in a straight line with the condenser lens 12 and is irradiated onto the first surface 15 a of the optical fiber 15.
In the fluorescence capturing system 714b, the lens center axis of the capturing lens 14 is the lens center axis of the condenser lens 12 and the lens center axis of the capturing lens 14 of the fluorescence capturing system 714a.
It is arranged along a direction that is substantially orthogonal (intersecting).

That is, the laser light emitted from the light source unit 11 is condensed on the translucent phosphor 713 of the sphere via the condensing lens 12, and emits fluorescence at the center of the sphere (condensing point X).
At this time, the fluorescence generated inside the translucent phosphor 713 of the sphere is emitted in all directions. Among them, in the direction in which the fluorescence capturing systems 714a and 714b are arranged, the fluorescence is emitted from the emission surfaces of the spheres arranged at substantially the same distance from the condensing point X of the laser light.

Then, the fluorescence emitted from the translucent phosphor 713 is fluorescence incorporation systems 714a and 714b.
Of the first surface 1 of the optical fiber 15 collected by the taking lens 14 in each of the
5a is irradiated.
In the light source device 710 of the present embodiment, as shown in FIG. 18, the fluorescence generated at the condensing point X of the laser light emitted from the light source unit 11 and condensed by the condenser lens 12 is converted into fluorescence capturing systems 714a and 714b. Are taken out from the two directions in which are arranged to make a fiber light source.

Accordingly, since the fluorescence can be extracted from the single light source unit 11 by the two fluorescence capturing systems 714a and 714b, it is possible to provide a plurality of fiber light sources for irradiating the light of the same brightness.
Further, in the present embodiment, the condensing point X of the laser light emitted by the single light source unit 11 is formed at the center of the sphere inside the translucent phosphor 713 of the sphere.

As a result, since the fluorescences extracted by the two fluorescence capturing systems 714a and 714b are arranged so as to be emitted from the emission surfaces at substantially the same distance from the condensing point X, respectively, the fiber light source having substantially the same brightness is obtained. You can get two.
In addition, in the present embodiment, the configuration in which two fluorescence uptake systems are provided has been described, but the present invention is not limited to this, and three fluorescence uptake systems are provided around the translucent phosphor of the sphere. The structure provided above may be sufficient.

(Embodiment 9)
The light source device 810 according to the ninth embodiment of the present invention will be described below with reference to FIG.
As shown in FIG. 19, the light source device 810 according to the present embodiment has laser condensing systems 811a and 811a, 8c.
11b and two fluorescence capturing systems 814a and 814b are provided, respectively, which is a difference from the seventh and eighth embodiments.

Since the other configurations of the light source device 810 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.
As shown in FIG. 19, the light source device 810 of the present embodiment has a light source unit 11 and a condenser lens 1.
2 includes a laser condensing system 811a, a laser condensing system 811b including a light source unit 11 and a condensing lens 12, a spherical translucent phosphor 813, a fluorescence capturing system including a capturing lens 14 and an optical fiber 15. 814a and a fluorescence uptake system 814b including an uptake lens 14 and an optical fiber 15.

As shown in FIG. 19, the laser focusing systems 811a and 811b are arranged on a spherical surface centered on the translucent phosphor 813 of the sphere.
As a result, the translucent phosphor 813 has a plurality of laser condensing systems 811 arranged at the same distance.
Laser light is emitted from a and 811b.
The laser focusing system 811a is arranged so that the lens center axis of the focusing lens 12 is coaxial with the lens center axis of the capturing lens 14 of the fluorescence capturing system 814a.

That is, the laser light emitted from the laser condensing system 811a is condensed at the center of the translucent phosphor 813 of the sphere via the condensing lens 12, and emits fluorescence at the portion centered on the condensing point X. Let Then, the fluorescence emitted from the translucent phosphor 813 is converted into the fluorescence capturing system 814a.
, 814b of the optical fibers 15 and 814b, respectively, and focused on the first surface 15a of the optical fiber 15.

In the laser condensing system 811b, the central axis of the condensing lens 12 has a fluorescence capturing system 814a,
It is arranged along a direction intersecting with the lens center axis of the taking lens 14 of 814b.
That is, the laser light emitted from the laser condensing system 811b is condensed at the center of the translucent phosphor 813 of the sphere via the condensing lens 12 and emits fluorescence at the portion centered on the condensing point X. Let

At this time, the laser light condensed by the condenser lens 12 of the laser condenser system 811b is the same as the laser light condensed by the condenser lens 12 of the laser condenser system 811a. Irradiation is performed so as to reach the center position (condensing point X) of.
The translucent phosphor 813 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape.

Since the fluorescence emitted from the translucent phosphor 813 is irradiated in all directions, two fluorescence capturing systems 814 arranged along the direction intersecting with the laser focusing system 811b.
a and 814b, the light is collected by the respective taking-in lenses 14, and the first optical fiber 15
The surface 15a is irradiated.
As shown in FIG. 19, the fluorescence capturing systems 814a and 814b are arranged on a spherical surface centered on the translucent phosphor 813 of the sphere.

As a result, the translucent phosphor 813 has a plurality of fluorescence capturing systems 814 arranged at the same distance.
The a and 814b are irradiated with fluorescence.
In the fluorescence capturing system 814a, the central axis of the capturing lens 14 is a laser focusing system 811.
It is arranged so as to be coaxial with the lens center axis of the condenser lens 12 of a.
That is, in the fluorescence capturing system 814 a, the light is emitted from the two light source units 11 and the condensing lens 12 is irradiated.
Fluorescence generated by exciting the translucent phosphor 813 with the laser light condensed by
The light is collected by the taking-in lens 14 and irradiated on the first surface 15 a of the optical fiber 15.

In the fluorescence capturing system 814b, the central axis of the capturing lens 14 is a laser focusing system 811.
a and 811b are arranged along a direction intersecting the central axis of the condenser lens 12 and the central axis of the capturing lens 14 of the fluorescence capturing system 814a.
That is, the laser light emitted from the two light source units 11 is condensed on the translucent phosphor 813 of the sphere through the condensing lens 12, and the fluorescence is emitted at the center of the sphere (condensing point X).

At this time, the fluorescence generated inside the translucent phosphor 813 of the sphere is emitted in all directions. Among them, in the direction in which the fluorescence capturing systems 814a and 814b are arranged, fluorescence is emitted from the emission surfaces of the spheres arranged at substantially the same distance from the condensing point X of the laser light.
Then, the fluorescence emitted from the translucent phosphor 813 is the fluorescence capturing system 814a, 814b.
Of the first surface 1 of the optical fiber 15 collected by the taking lens 14 in each of the
5a is irradiated.

In the light source device 810 of this embodiment, as shown in FIG.
, 811b and a plurality of fluorescence uptake systems 814a, 814b are arranged around the translucent phosphor 813 of the sphere.
As a result, the laser light emitted from the plurality of light source units 11 is condensed at the center of the translucent phosphor 813 of the sphere, which is about twice as large as the configuration including the single light source unit 11. Bright fluorescence can be extracted.

Further, by disposing the fluorescence capturing systems 814a and 814b including the plurality of optical fibers 15 around the translucent phosphor 813 of the sphere, the fluorescence generated at the center of the sphere can be emitted with substantially the same brightness from any direction. You can take out more than one.

(Embodiment 10)
The light source device 910 according to Embodiment 10 of the present invention will be described below with reference to FIGS. 20 and 21.
As shown in FIG. 20, the light source device 910 according to the present embodiment is configured such that laser transmission /
This is different from the first embodiment in that a translucent phosphor 913 including a fluorescence reflection film (first surface) 913a and a laser reflection / fluorescence transmission film (second surface) 913b is provided.
Since the other configurations of the light source device 910 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here and detailed description thereof is omitted.

As shown in FIG. 20, the light source device 910 of this embodiment includes a light source unit 11 and a condenser lens 12.
, A translucent phosphor 913, a taking-in lens 14, and an optical fiber 15.
The translucent phosphor 913 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. As shown in FIG. 21, the translucent phosphor 913 has a laser transmission / fluorescence reflection film 913a and a laser reflection / fluorescence transmission film 913b therein. In the translucent phosphor 913 of the sphere, the laser light emitted from the light source unit 11 is condensed at the center of the sphere by the condenser lens 12 (condensing point X).

The laser transmission / fluorescence reflection film 913a transmits the laser light emitted from the light source unit 11 and condensed by the condenser lens 12, and reflects the fluorescence generated in the translucent phosphor 913. The laser transmission / fluorescence reflection film 913a is provided on the laser light incident surface side, as shown in FIG.
The laser reflection / fluorescence transmission film 913b reflects the laser light emitted from the light source unit 11 and condensed by the condenser lens 12, and transmits the fluorescence generated in the translucent phosphor 913. The laser reflection / fluorescence transmission film 913b is provided on the fluorescence emission surface side, as shown in FIG.

Here, the laser transmission / fluorescence reflection film 913a and the laser reflection / fluorescence transmission film 913b are
A film can be formed on the translucent phosphor 913 by a method such as vapor deposition or sputtering.
As a result, since the translucent phosphor 913 has the laser transmission / fluorescence reflection film 913a, the translucent phosphor 913 is applied to the laser light emitted from the light source unit 11 and condensed by the condenser lens 12. Can be made to enter inside. Then, with respect to the fluorescence that is excited by the laser light condensed at the center (condensing point X) of the translucent phosphor 913 of the sphere and is emitted in all directions, the fluorescence is emitted on the incident side of the laser light. Can be reflected to the side.

On the other hand, since the translucent phosphor 913 has the laser reflection / fluorescence transmissive film 913b, the translucent phosphor 9 is included in the laser light emitted from the light source unit 11 and condensed by the condenser lens 12.
The laser beam that is transmitted without being absorbed in 13 can be reflected again toward the center (condensing point X) of the translucent phosphor 913. Then, the spherical translucent phosphor 913
The fluorescence emitted in all directions by being excited by the laser beam focused on the center (focus point X) of the can be transmitted to the outside from the emission side where the capturing lens 14 is arranged.

In FIG. 21, the laser transmission / fluorescence reflection film 913 a and the laser reflection / fluorescence transmission film 913 are shown.
In the above description, b and b are provided in substantially the same area. However, the present invention is not limited to this, and the areas may be different from each other.
Further, as shown in FIG. 21, it is not necessary that the laser transmission / fluorescence reflection film 913a and the laser reflection / fluorescence transmission film 913b be arranged so as to surround the outer periphery of the translucent phosphor 913.
At least the respective films may be provided on the laser light incident portion and the fluorescence emission portion.

(Embodiment 11)
The light source device 1010 according to Embodiment 11 of the present invention will be described below with reference to FIGS. 22 to 23.
As shown in FIG. 22, the light source device 1010 according to the present embodiment has a plurality of laser condensing systems 1011a, 101a, 1c in a direction intersecting with the central axis of the lens 14 for taking out fluorescence.
011b and 1011c are arranged, and the point is different from that of the above-described ninth embodiment in that a spherical translucent phosphor 1013 whose surface is a single layer is used.

Since the other configurations of the light source device 1010 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.
As shown in FIG. 22, the light source device 1010 of the present embodiment includes a laser condensing system 1011a including the light source unit 11 and the condensing lens 12, and a laser condensing system 1011b including the light source unit 11 and the condensing lens 12. A laser focusing system 1011c including a light source unit 11 and a focusing lens 12,
It is provided with a translucent phosphor 1013, a taking lens 14, and an optical fiber 15.

As shown in FIG. 22, the laser focusing systems 1011a, 1011b, 1011c are arranged on a spherical surface centered on the translucent phosphor 1013 of the sphere.
As a result, the translucent phosphor 1013 has a plurality of laser condensing systems 10 arranged at the same distance.
Laser light is emitted from 11a, 1011b, and 1011c.
Further, each of the laser focusing systems 1011a, 1011b, 1011c is arranged along a direction intersecting with the central axis of the capturing lens 14 for extracting fluorescence. Then, the laser condensing systems 1011a, 1011b, 1011c condense the laser light emitted from the respective light source units 11 with the condensing lens 12, and the center of the translucent phosphor 1013 (condensing point X). Focus the laser light on.

The translucent phosphor 1013 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. As shown in FIG. 23, the translucent phosphor 1013 has a laser transmission / fluorescence reflection mirror 1013a and a laser reflection / fluorescence transmission mirror 1013b.
The laser transmission / fluorescence reflection mirror 1013a includes laser focusing systems 1011a, 1011b, 1
The laser light emitted from each light source 11 included in 011c and condensed by each condenser lens 12 is transmitted, and the laser light is emitted at the center (condensing point X) of the translucent phosphor 1013 of the sphere. It has the property of reflecting fluorescence.

The laser reflection / fluorescence transmission mirror 1013b includes laser focusing systems 1011a, 1011b, 1
Of the laser light emitted from each light source unit 11 included in 011c and condensed by each condenser lens 12, the laser light transmitted without being absorbed in the translucent phosphor 1013 is reflected and collected again. It has the property of leading to the light spot X.
In the light source device 1010 of the present embodiment, as described above, the spherical translucent phosphor 1013 is provided with the wavelength-selective mirror (laser transmission / fluorescence reflection mirror 1013a, laser reflection / fluorescence transmission mirror 1013b). ..

As a result, the laser light that has entered the translucent phosphor 1013 and has been transmitted without being absorbed is reflected toward the converging point X, further promoting the excitation of fluorescence at the converging point X, and The light source can have high brightness.
Further, a laser transmission / fluorescence reflection mirror 1013a and a laser reflection / fluorescence transmission mirror 101 are provided at the laser light intake port and the fluorescence extraction port of the translucent phosphor 1013, respectively.
3b is arranged.

Accordingly, it is possible to prevent the laser light from being taken in and the fluorescence from being taken out without being provided with openings such as an intake window and an extraction window.
Further, in the present embodiment, as shown in FIG. 22, the laser condensing systems 1011a, 1011a, 1011a, 1011a, 1011a,
1011b and 1011c are arranged.

As a result, the laser light emitted from the plurality of laser condensing systems 1011a, 1011b, 1011c is condensed at the center (condensing point X) of the translucent phosphor 1013 of the sphere, and the reflected light thereof is also the condensing point. By reflecting the light on X, it is possible to obtain a light source with higher brightness.
Note that, in FIG. 23, the example in which the laser transmission / fluorescence reflection mirror 1013a and the laser reflection / fluorescence transmission mirror 1013b are provided in substantially the same area has been described. However, the present invention is not limited to this, and the areas may be different from each other.

Further, as shown in FIG. 23, the laser transmission / fluorescence reflection mirror 1013a and the laser reflection / fluorescence transmission mirror 1013b do not need to be arranged so as to surround the outer circumference of the light-transmitting phosphor 1013, and at least the laser is used. It suffices if the respective films are provided on the light incident portion and the fluorescence emitting portion.

(Embodiment 12)
The light source device 1110 according to Embodiment 12 of the present invention will be described below with reference to FIG.
As shown in FIG. 24, the light source device 1110 according to the present embodiment has a spherical translucent phosphor 111.
The laser beam focused through the capture window (first opening) 1113a formed in No. 3 is incident, and the capture is arranged along a direction substantially orthogonal (intersecting) to the central axis of the condenser lens 12. This embodiment is different from the tenth embodiment and the like in that fluorescence is taken out from the taking-out window (second opening portion) 1113b opposite to which the working lens 14 is arranged.

Since the other configurations of the light source device 1110 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.
As shown in FIG. 24, the light source device 1110 of this embodiment includes a light source unit 11 and a condenser lens 1.
2, the translucent phosphor 1113, the taking-in lens 14, and the optical fiber 15.

The light source unit 11 and the condenser lens 12 are arranged at positions that are not coaxial with the taking-in lens 14 for taking out fluorescence, and along the direction intersecting the central axis of the taking-in lens 14.
The translucent phosphor 1113 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. The translucent phosphor 1113 has a take-in window 1113a formed at a position facing the condenser lens 12, a take-out window 1113b formed at a position facing the take-in lens 14, and a reflective film 1113c. is doing.

The taking-in window 1113a is an opening formed at the laser light taking-in position in the spherical translucent phosphor 1113, and guides the laser light condensed by the condenser lens 12 to the condensing point X.
The take-out window 1113b is an opening formed to take out the fluorescence toward the taking-in lens 14 and the optical fiber 15, and takes out the fluorescence emitted at the condensing point X.

The reflection film 1113c reflects the laser light, which is transmitted through the transmissive phosphor 1113 without being absorbed, out of the laser light that has entered through the capturing window 1113a, toward the converging point X. Further, the reflection film 1113c reflects, to the extraction window 1113b, fluorescence emitted in a different direction from the extraction window 1113b among the fluorescence emitted at all the focal points X and emitted in all directions.

Thus, the laser condensing system (the light source unit 11 and the condensing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with each other. It is possible to obtain a light source with higher brightness by using each of the reflected lights of.
In addition, in the present embodiment, the configuration in which one laser condensing system (the light source unit 11 and the condensing lens 12) and one fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are provided is described. However, the present invention is not limited to this.

For example, a laser condensing system (a light source unit 11 and a condensing lens 12 is provided around a translucent phosphor of a sphere.
) And the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) may be provided in plurality.

(Embodiment 13)
The light source device 1210 according to the thirteenth embodiment of the present invention will be described below with reference to FIG.
As shown in FIG. 25, the light source device 1210 according to the present embodiment has a spherical translucent phosphor 121.
The third embodiment is different from the twelfth embodiment in that three laser focusing systems (the light source unit 11 and the focusing lens 12) are provided around the number 3.
Since the other configurations of the light source device 1210 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.

As shown in FIG. 25, the light source device 1210 of the present embodiment includes a laser condensing system 1211a including the light source unit 11 and the condensing lens 12, a laser condensing system 1211b including the light source unit 11 and the condensing lens 12, A laser focusing system 1211c including a light source unit 11 and a focusing lens 12,
It is provided with a translucent phosphor 1213, a taking lens 14, and an optical fiber 15.
As shown in FIG. 25, the laser focusing systems 1211a to 1211c are spherical translucent phosphors 12.
It is arranged on a spherical surface centered at 13.

As a result, the translucent phosphor 1213 is used for the plurality of laser condensing systems 12 arranged at the same distance.
Laser light is emitted from 11a, 1211b, and 1211c.
Further, the laser focusing systems 1211a, 1211b, 1211c are respectively the translucent phosphor 1
Laser light is focused on the center (focus point X) of the translucent phosphor 1213 through the capture windows (first openings) 1213a, 1213b, 1213c formed in 213.

The translucent phosphor 1213 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. Then, the translucent phosphor 1213 is the laser condensing system 1211a.
Up to 1211c, the intake windows 1213a to 1213 formed at positions facing the respective condenser lenses 12
13c and a take-out window (second opening) 12 formed at a position facing the take-in lens 14
It has 13d and the reflective film 1213e.

The taking-in windows 1213a to 1213c are openings formed in the spherical light-transmitting phosphor 1213 at the taking-in position of the laser light, and guide the laser light condensed by the condenser lens 12 to the condensing point X.
The take-out window 1213d is an opening formed to take out the fluorescence toward the taking-in lens 14 and the optical fiber 15, and takes out the fluorescence emitted at the condensing point X.

The reflection film 1213e transmits the laser light that has been transmitted through the transmissive phosphor 1213 without being absorbed, among the laser light that has entered through the intake windows 1213a to 1213c.
It reflects toward the focal point X. Further, the reflection film 1213e reflects the fluorescence emitted in the direction opposite to the extraction window 1213d among the fluorescence emitted in all directions by emitting light at the condensing point X toward the extraction window 1213d.

Thus, the laser condensing system (the light source unit 11 and the condensing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with each other. It is possible to obtain a light source with higher brightness by using each of the reflected lights of.

(Embodiment 14)
The light source device 1310 according to the fourteenth embodiment of the present invention will be described below with reference to FIG.
As shown in FIG. 26, the light source device 1310 according to the present embodiment has a spherical translucent phosphor 121.
The third embodiment is different from the twelfth and thirteenth embodiments in that six laser condensing systems (the light source unit 11 and the condensing lens 12) are provided around the No. 3.
Since the other configurations of the light source device 1310 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here and the detailed description of the configuration is omitted.

As shown in FIG. 26, the light source device 1310 of the present embodiment includes a laser condensing system 1311a including the light source unit 11 and the condensing lens 12, a laser condensing system 1311b including the light source unit 11 and the condensing lens 12. A laser focusing system 1311c including a light source unit 11 and a focusing lens 12,
A laser focusing system 1311d including the light source unit 11 and the focusing lens 12, a laser focusing system 1311e including the light source unit 11 and the focusing lens 12, and a laser focusing system 1311f including the light source unit 11 and the focusing lens 12. , A translucent phosphor 1313, a taking lens 14, and an optical fiber 15.

As shown in FIG. 26, the laser converging systems 1311a to 1311f are spherical translucent phosphors 13.
It is arranged on a spherical surface centered at 13.
As a result, the translucent phosphor 1313 has a plurality of laser condensing systems 13 arranged at the same distance.
Laser light is emitted from 11a to 1311f.
In addition, the laser focusing systems 1311a to 1311f respectively include intake windows (first openings) 1313a, 1313b, 1313c, 1313d, 13 formed in the translucent phosphor 1313.
Laser light is focused on the center (focus point X) of the translucent phosphor 1313 via 13e and 1313f.

The translucent phosphor 1313 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. Then, the translucent phosphor 1313 is the laser condensing system 1311a.
Up to 1311f, the intake windows 1313a to 1313 formed at positions facing the respective condenser lenses 12
13f and an extraction window (first opening) 13 formed at a position facing the intake lens 14
It has 13g and the reflective film 1313h.

The taking-in windows 1313a to 1313f are openings formed at the laser light taking-in positions in the spherical translucent phosphor 1313, and guide the laser light condensed by the condenser lens 12 to the condensing point X.
The take-out window 1313g is an opening formed to take out the fluorescence toward the taking-in lens 14 and the optical fiber 15, and takes out the fluorescence emitted at the condensing point X.

The reflection film 1313h takes out the emission window 1313 among the fluorescence emitted in all directions by emitting light at the condensing point X by the laser light incident through the introduction windows 1313a to 1313f.
The fluorescence emitted in the direction opposite to g is reflected toward the extraction window 1313g.
Thus, the laser condensing system (the light source unit 11 and the condensing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with each other, so that the reflected light of the fluorescence is utilized. As a result, a light source with higher brightness can be obtained.

(Embodiment 15)
The light source device 1410 according to Embodiment 15 of the present invention will be described below with reference to FIG. 27.
As shown in FIG. 27, the light source device 1410 according to the present embodiment has a spherical translucent phosphor 141.
The third embodiment is different from the above-described twelfth embodiment in that a plurality of fluorescence uptake systems 1414a and 1414b are arranged at positions that are not coaxial with respect to a single laser light collection system (the light source unit 11 and the light collection lens 12) with 3 as the center. Are different.

Since the other configurations of the light source device 1410 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.
As shown in FIG. 27, the light source device 1410 of this embodiment includes a light source unit 11 and a condenser lens 1.
2, a translucent phosphor 1413, a fluorescence capturing system 1414a including the capturing lens 14 and the optical fiber 15, and a fluorescent capturing system 14 including the capturing lens 14 and the optical fiber 15.
14b and.

The laser condensing system (the light source unit 11 and the condensing lens 12) transmits the laser light to the center of the translucent phosphor 1413 (the first opening) 1413a formed in the translucent phosphor 1413. The light is condensed to the light collecting point X).
The fluorescence capturing systems 1414a and 1414b are arranged at positions not coaxial with the laser focusing system on the spherical surface centered on the translucent phosphor 1413 of the sphere. Then, the fluorescent light capturing systems 1414a and 1414b are arranged at the center (condensing point X) of the transparent fluorescent substance 1413 via the extraction windows (second opening portions) 1413b and 1413c formed in the transparent fluorescent substance 1413.
The fluorescent light emitted in the optical fiber 15 is taken out by the taking-in lens 14 and
The light is focused on the surface 15a.

The translucent phosphor 1413 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. The translucent phosphor 1013 has an intake window 1413a,
It has extraction windows 1413b and 1413c and a reflection film 1413d.
The taking-in window 1413a is an opening formed at the laser-light taking-in position in the spherical translucent phosphor 1413, and guides the laser light condensed by the condenser lens 12 to the condensing point X.

The take-out windows 1413b and 1413c are provided with the fluorescence taking-in lens 14 and the optical fiber 15.
The fluorescent light emitted at the condensing point X, which is an opening formed for taking out the light toward the side, is taken out.
The reflection film 1413d takes out the take-out windows 1413b and 1413 among the fluorescence emitted in all directions by emitting light at the condensing point X by the laser light incident through the take-in window 1413a.
The fluorescence emitted in a direction different from that of c is reflected toward the extraction windows 1413b and 1413c.

Accordingly, the laser condensing system (the light source unit 11 and the condensing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with each other. It is possible to obtain a light source with higher brightness by utilizing the reflected light of each of the above.

(Embodiment 16)
The light source device 1510 according to Embodiment 16 of the present invention will be described below with reference to FIG. 28.
As shown in FIG. 28, the light source device 1510 according to the present embodiment includes a concave mirror 1516a that reflects laser light and a concave mirror 1516b that reflects fluorescence, outside the translucent phosphor 1513 having a cubic (polyhedral) shape. The difference from the twelfth embodiment lies in that
Since the other configurations of the light source device 1510 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.

As shown in FIG. 28, the light source device 1510 of this embodiment includes a light source unit 11 and a condenser lens 1.
2, a translucent phosphor 1513, a taking lens 14, an optical fiber 15, and a concave mirror [1.
516a and 1516b.
The translucent phosphor 1513 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a cubic shape. Then, in the translucent phosphor 1513, the laser light is incident from the incident surface 1513a, and the fluorescence is extracted from the emitting surface 1513b intersecting the incident surface 1513a.

The concave mirror 1516a is arranged to face the surface of the translucent phosphor 1513 that faces the entrance surface 1513a. The concave mirror 1516a is provided on the incident surface 1513a of the translucent phosphor 1513.
The laser light transmitted from the surface opposite to is reflected toward the focal point X.
The concave mirror 1516b is arranged to face the surface of the translucent phosphor 1513 that faces the emission surface 1513b. Then, in the concave mirror 1516b, of the fluorescence emitted at all the azimuths at the condensing point X of the translucent phosphor 1513, the fluorescence transmitted from the surface facing the emitting surface 1513b is condensed to the condensing point X. Reflect toward.

In the light source device 1510 of the present embodiment, as described above, the cubic translucent phosphor 151 is used.
A concave mirror 1516a for reflecting laser light and a concave mirror 151 for reflecting fluorescence are provided on the outer side of 3
6b and 6b respectively.
Accordingly, it is possible to obtain the same effect as each of the above-described embodiments that a light source with higher brightness can be obtained without providing a member having a function of reflecting laser light or fluorescence inside the translucent phosphor. it can.

In the configuration of the present embodiment, when a plurality of laser condensing systems are provided, it is perpendicular to the plane including the lens central axis of the condensing lens 12 and the lens central axis of the taking lens 14 shown in FIG. A laser condensing system that irradiates the laser light from the direction (direction perpendicular to the paper surface) may be provided.

(Embodiment 17)
The light source device 1610 according to the seventeenth embodiment of the present invention will be described below with reference to FIG.
As shown in FIG. 29, the light source device 1610 according to the present embodiment has two laser condensing systems 1611a, which are provided outside the translucent phosphor 1613 having a cubic (polyhedral) shape, at positions facing each other. 1611b is arranged, and a fluorescence taking-in system (taking-in lens 14)
Embodiment 1 in that a concave mirror 1616 that reflects fluorescence is provided at a position facing the first embodiment.
Different from 6.

Since the other configurations of the light source device 1610 are the same as those of the light source device 10 of the first embodiment, the same reference numerals are given here, and the detailed description of the configuration is omitted.
As shown in FIG. 29, the light source device 1610 of the present embodiment includes a laser condensing system 1611a including the light source unit 11 and the condensing lens 12, a laser condensing system 1611b including the light source unit 11 and the condensing lens 12. It is provided with a translucent phosphor 1613, a taking lens 14, an optical fiber 15, and a concave mirror 1616.

As shown in FIG. 29, the laser condensing systems 1611a and 1611b are arranged on the circumference centered on the condensing point X formed inside the cubic translucent phosphor 1613.
As a result, the translucent phosphor 1613 has a plurality of laser condensing systems 16 arranged at the same distance.
Laser light is emitted from 11a and 1611b.
The translucent phosphor 1613 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a cubic shape. Then, the translucent phosphor 1613 receives the laser light from the incident surfaces 1613a and 1613b facing each other, and at the same time, the incident surfaces 1613a and 1613.
Fluorescence is extracted from the emission surface 1613c that intersects 13b.

The concave mirror 1616 is arranged to face the surface of the translucent phosphor 1613 that faces the emission surface 1613c. Then, in the concave mirror 1616, among the fluorescence emitted at all the azimuths at the condensing point X of the translucent phosphor 1613, the fluorescence transmitted from the surface facing the emitting surface 1613c is transferred to the condensing point X. Reflect toward.
In the light source device 1610 of this embodiment, as described above, the cubic translucent phosphor 161 is used.
Two laser condensing systems 1611a and 1611 provided on the outside of the No. 3 at positions facing each other.
In addition to arranging b, a concave mirror 1616 that reflects fluorescence is provided.

As a result, it is possible to obtain the same effect as each of the above-described embodiments that a light source with higher brightness can be obtained without providing a member having a function of reflecting fluorescence inside the translucent phosphor.

(Embodiment 18)
The light source device 1710 according to Embodiment 18 of the present invention will be described below with reference to FIG.
As shown in FIG. 30, the light source device 1710 according to the present embodiment irradiates the incident surface 1713a of the translucent phosphor 1713 having a rectangular parallelepiped shape (plate shape) with laser light from a plurality of directions and is common. It is different from the first embodiment in that the light is condensed at the light condensing point X.
Since the other configurations of the light source device 1710 are similar to those of the light source device 10 of the first embodiment, the same reference numerals are given here, and detailed description of the configuration is omitted.

As shown in FIG. 30, the light source device 1710 according to the present embodiment includes a laser condensing system 1711a including the light source unit 11 and the condensing lens 12, a laser condensing system 1711b including the light source unit 11 and the condensing lens 12. It is provided with a translucent phosphor 1713, a taking-in lens 14, and an optical fiber 15.
As shown in FIG. 30, the laser condensing system 1711a and the laser condensing system 1711b are arranged on the circumference around the condensing point X formed inside the translucent phosphor 1713 having a rectangular parallelepiped shape. There is.

As a result, the translucent phosphor 1713 has a plurality of laser condensing systems 17 arranged at the same distance.
Laser light is emitted from 11a and 1711b.
Further, both of the laser focusing systems 1711a and 1711b irradiate the incident surface 1713a of the translucent phosphor 1713 with laser light. The laser condensing system 1711a and the laser condensing system 1711b are arranged such that the lens central axis of the condensing lens 12 is oblique to the lens central axis of the capturing lens 14 on the fluorescence capturing side. ing.

The translucent phosphor 1713 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (plate-like) shape. Then, in the translucent phosphor 1713, the laser light that has entered the incident surface 1713a from the two laser condensing systems 1711a and 1711b is condensed at the common condensing point X. Then, the fluorescence excited by the laser light emitted from the two laser focusing systems 1711a and 1711b is taken out from the emitting surface 1713b, and is collected by the taking lens 14 on the first surface 15a of the optical fiber 15.

In the light source device 1710 of the present embodiment, as described above, the rectangular parallelepiped (plate-shaped) translucent phosphor 1 is used.
When a single incident surface 1713a of 713 is irradiated with laser light from a plurality of positions, the light is condensed at a common condensing point X inside the translucent phosphor 1713.
As a result, at the condensing point X of the translucent phosphor 1713, the amount of the condensed laser light is approximately doubled as compared with the configuration having only one laser condensing system, and is excited. The fluorescence also doubles, and a light source with higher brightness can be obtained.

[Other Embodiments]
Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.
(A)
In the above embodiment, an example using a plate-shaped or spherical translucent phosphor has been described. However, the present invention is not limited to this.
For example, a translucent phosphor having another shape such as an ellipsoid or a polygon may be used.

(B)
In the above-described embodiments, the content of each embodiment is described by combining the translucent phosphor of sphere, plate, or polyhedron, and the single / plural laser condensing system and the single / plural fluorescence uptake system. However, the present invention is not limited to this.
For example, the configuration is not limited to the combination described in the above embodiment, and may be realized by a combination other than the above embodiment.

(C)
In the above embodiment, an example in which the present invention is applied to the light source device 10 of the confocal measuring device (distance measuring sensor) 50 has been described. However, the present invention is not limited to this.

For example, the distance measuring sensor equipped with the light source device of the present invention is not limited to a distance measuring sensor such as a confocal measuring device, and other distance measuring sensors may be used.
The present invention can be applied to a light source device for a headlight or an endoscope as a light source device.

INDUSTRIAL APPLICABILITY The light source device of the present invention has an effect of obtaining a light source having higher brightness than conventional light sources, and thus can be widely applied as various light source devices.

Reference Signs List 10 light source device 11 light source unit 12 condensing lens 13 translucent phosphor 13a incident surface 13b emission surface 13ba emission unit 14 intake lens 15 optical fiber 15a first surface 15b second surface 20 fluorescence light source unit 20a incident side cross section 20b diameter Small section 20c Emitting side section 50 Confocal measuring device (distance measuring sensor)
51 head part 51a diffractive lens (chromatic aberration focus lens)
51b Objective lens 51c Condenser lens 52 Optical fiber 53 Controller 54 Monitor 55a, 55b Optical fiber 56 Branch optical fiber 57 Spectroscope 57a Concave mirror 57b Diffraction grating 57c Condenser lens 58 Image sensor (light receiving unit)
59 Control circuit unit (measurement unit)
110 light source device 113 translucent phosphor 113a incident surface 113b emission surface 116 concave mirror 120 fluorescent light source part 210 light source device 216 concave mirror 220 fluorescent light source part 310 light source device 313 translucent phosphor 313a emitting part 410 light source devices 411a, 411b laser collection Light system 413 Translucent phosphor 413a Incident surface 413b Exit surface 413c Incident surface 510 Light source device 513 Translucent phosphor 513a Incident surface 513b, 513c Exit surface 514a, 514b Fluorescence capturing system 610 Light source device 611a, 611b Laser condensing system 613 translucent phosphor 710 light source device 713 translucent phosphors 714a, 714b fluorescence capturing system 810 light source devices 811a, 811b laser condensing system 813 translucent phosphors 814a, 814b fluorescence capturing system 910 light source device 913 translucent Phosphor 913a Laser transmission / fluorescence reflection film (first surface)
913b Laser reflection / fluorescence transmission film (2nd surface)
1010 Light source devices 1011a, 1011b, 1011c Laser condensing system 1013 Translucent phosphor 1013a Laser transmission / fluorescence reflection mirror 1013b Laser reflection / fluorescence transmission mirror 1110 Light source device 1113 Translucent phosphor 1113a Intake window (first opening)
1113b Extraction window (second opening)
1113c Reflective film 1210 Light source devices 1211a to 1211c Laser focusing system 1213 Translucent phosphors 1213a to 1213c Intake window (first opening)
1213d Extraction window (second opening)
Reference numeral 1213e Reflective film 1310 Light source devices 1311a to 1311f Laser focusing system 1313 Translucent phosphors 1313a to 1313f Intake window (first opening)
1313g Extraction window (second opening)
1313h Reflective film 1410 Light source device 1413 Translucent phosphor 1413a Intake window (first opening)
1413b, 1413c Extraction window (second opening)
1413d Reflective films 1414a and 1414b Fluorescent light-incorporating system 1510 Light source device 1513 Translucent phosphor 1513a Incident surface 1513b Emitting surface 1516a and 1516b Concave mirror 1610 Light source device 1611a, 1611b Laser condensing system 1613 Translucent phosphor 1613a, 1613b Incident surface 1613c Emitting surface 1616 Concave mirror 1710 Light source devices 1711a and 1711b Laser condensing system 1713 Translucent phosphor 1713a Incident surface 1713b Emitting surface A1 Center axis A2 Lens center axis d1, d2, d3 Distance T Measurement object X Converging point

Claims (17)

A light source unit for irradiating laser light,
A condenser lens that condenses the laser light emitted from the light source unit,
A light-transmissive phosphor that is provided internally with a condensing point of the laser light condensed by the condensing lens and emits fluorescence in a portion through which the laser light is transmitted,
At least a lens for capturing the fluorescence emitted from the translucent phosphor,
A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface,
Equipped with
A fluorescence uptake system including the uptake lens and the fiber is provided in plural with respect to a single translucent phosphor ,
The distance between the emission surface of the fluorescence emitted toward the capturing lens of the plurality of fluorescence capturing systems in the phosphor and the condensing point is substantially equal ,
Light source device. The taking-in lens is arranged such that the central axis of the lens is oblique with respect to the central axis of the condenser lens.
The light source device according to claim 1. A light source unit for irradiating laser light,
A condenser lens that condenses the laser light emitted from the light source unit,
A light-transmissive phosphor that is provided internally with a condensing point of the laser light condensed by the condensing lens and emits fluorescence in a portion through which the laser light is transmitted,
At least a lens for capturing the fluorescence emitted from the translucent phosphor,
A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface,
Equipped with
A plurality of fluorescence uptake systems including the uptake lens and the fiber are arranged so that the uptake lens is located on one spherical surface centered on the translucent phosphor ,
The distance between the emission surface of the fluorescence emitted toward the capturing lens of the plurality of fluorescence capturing systems in the phosphor and the condensing point is substantially equal ,
Light source device. A plurality of laser condensing systems including the light source unit and the condensing lens are provided for a single translucent phosphor.
The light source device according to claim 3. The plurality of laser condensing systems are arranged such that the condensing lens is located on one spherical surface centered on the translucent phosphor.
The light source device according to claim 4. The translucent phosphor has a first surface that transmits the laser light and reflects the fluorescence, and a second surface that reflects the laser light and transmits the fluorescence.
The light source device according to claim 3. It is disposed on the incident surface side of the translucent phosphor, transmits the laser light emitted from the light source unit, and the incident surface side of the fluorescence emitted in the translucent phosphor. Further comprising a concave mirror that reflects the emitted fluorescence toward the translucent phosphor,
The light source device according to any one of claims 3 to 6. It is arranged on the emission surface side of the translucent phosphor, reflects the laser light emitted from the light source unit and passed through the translucent phosphor, and is emitted from the translucent phosphor. Of the fluorescence, further comprises a concave mirror for transmitting the fluorescence emitted to the emission surface side,
The light source device according to any one of claims 3 to 6. The concave mirror is a dichroic mirror, or a perforated mirror having an opening,
The light source device according to claim 7. A light source unit for irradiating laser light,
A condenser lens that condenses the laser light emitted from the light source unit,
A condensing point of the laser light condensed by the condensing lens is provided inside, emits fluorescence in a portion where the laser light is transmitted, and a translucent phosphor having a spherical shape,
An acquisition lens that collects the fluorescence emitted from the translucent phosphor;
A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface,
Further equipped with,
A plurality of fluorescence uptake systems including the uptake lens and the fiber are arranged on one spherical surface centered on the translucent phosphor ,
The distance between the emission surface of the fluorescence emitted toward the capturing lens of the plurality of fluorescence capturing systems in the phosphor and the condensing point is substantially equal ,
Light source device. The taking-in lens is arranged such that the central axis of the lens is coaxial with the optical axis of the laser light emitted from the light source unit and condensed by the condenser lens.
The light source device according to claim 10. The taking-in lens is arranged such that the central axis of the lens is oblique with respect to the central axis of the condenser lens.
The light source device according to claim 10. The light source device according to claim 1,
A light receiving unit for receiving the reflected light of the light emitted from the light source device,
A measuring unit that measures a distance to an object based on the amount of light received in the light receiving unit,
Distance measuring sensor equipped with. The light source device further has a chromatic aberration focus lens through which light including a plurality of wavelengths output passes,
The light receiving unit receives the reflected light of the light including the plurality of wavelengths irradiated to the object through the chromatic aberration focusing lens,
The measuring unit measures the distance to the target object based on the wavelength of the reflected light that maximizes the amount of light received by the light receiving unit,
The distance measuring sensor according to claim 13.   A light source unit for irradiating laser light,
  A condenser lens that condenses the laser light emitted from the light source unit,
  A spherical light-transmitting phosphor that is provided inside a condensing point of the laser light condensed by the condensing lens and emits fluorescence in a portion where the laser light is transmitted,
  At least a lens for capturing the fluorescence emitted from the translucent phosphor,
  A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface.
Equipped with
  A fluorescence uptake system including the uptake lens and the fiber is provided in plural with respect to a single translucent phosphor,
  The condensing point is formed at the center of the spherical translucent phosphor.
Light source device.   A light source unit for irradiating laser light,
  A condenser lens that condenses the laser light emitted from the light source unit,
  A spherical light-transmitting phosphor that has a condensing point of the laser light condensed by the condensing lens provided therein, and emits fluorescence in a portion where the laser light is transmitted,
  At least a lens for capturing the fluorescence emitted from the translucent phosphor,
  A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface.
Equipped with
  A plurality of fluorescence uptake systems including the uptake lens and the fiber are arranged so that the uptake lens is located on one spherical surface centered on the translucent phosphor,
  The condensing point is formed at the center of the spherical translucent phosphor.
Light source device.   A light source unit for irradiating laser light,
  A condenser lens that condenses the laser light emitted from the light source unit,
  A condensing point of the laser light condensed by the condensing lens is provided inside, emitting fluorescence in a portion where the laser light is transmitted, and a translucent phosphor having a spherical shape,
  An acquisition lens that collects the fluorescence emitted from the translucent phosphor;
  A fiber that emits the fluorescence from a second end surface opposite to the first end surface while the fluorescence collected by the capturing lens is applied to the first end surface.
Further equipped with,
  A plurality of fluorescence uptake systems including the uptake lens and the fiber are arranged on one spherical surface centered on the translucent phosphor,
  The condensing point is formed at the center of the spherical translucent phosphor.
Light source device.

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