JP2019075385A - Light source device and distance measuring sensor including the same - Google Patents

Abstract

To provide a light source device capable of acquiring a light source having higher luminance than before, and to provide a distance measuring sensor including the same.SOLUTION: A light source device 10 includes a light source part 11 for radiating laser light, a condensing lens 12, a light transmissive fluorescent body 13, a lens 14 for intake, and an optical fiber 15. The condensing lens 12 condenses the laser light radiated from the light source part 11. The light transmissive fluorescent body 13 has a condensing point of the laser light condensed by the condensing lens 12 provided inside, and emits fluorescent light in a portion where the laser light transmits. The lens 14 for intake at least condenses the fluorescent light emitted in the light transmissive fluorescent body 13. In the optical fiber 15, the fluorescent light condensed in the lens 14 for intake is radiated to a first end surface, and the fluorescent light is emitted from a second end surface which is on the opposite side from the first end surface. A plurality of fluorescent light intake systems including the lens 14 for intake and the optical fiber 15 are provided with respect to the single fluorescent body 13.SELECTED DRAWING: Figure 15

Description

  The present invention relates to a light source device and a distance measuring sensor provided with the same.

BACKGROUND In recent years, a light source device has been used in which a light source unit that emits blue laser light and a phosphor that emits fluorescence by being emitted by being irradiated with blue laser light.
For example, in Patent Document 1, in order to miniaturize the light source device and to increase the brightness, it is excited by laser beams emitted from a plurality of semiconductor lasers and collected by a condensing lens to emit fluorescent light of different wavelengths. A light source device is disclosed in which a plurality of phosphors are used so that the light emitting point of each semiconductor laser and each phosphor are in a conjugate relationship with each other via a condenser lens.

JP, 2013-120735, A Patent No. 5649202 gazette JP 2007-148418 A

However, the above-described conventional light source device has the following problems.
That is, in the light source device disclosed in the above-mentioned publication, since the phosphor is formed by being mixed with a binder such as resin, when the phosphor is irradiated with the laser light emitted from the semiconductor laser, Laser light is scattered inside. Therefore, the fluorescence emitted from the phosphor can not be efficiently extracted, and it is difficult to obtain a light source with sufficiently high brightness.

Moreover, the said patent document 2 is described about the light source device using the fluorescent substance of the single crystal which does not use binders, such as resin. However, just by irradiating the single crystal phosphor with laser light,
It is difficult to obtain a sufficiently bright light source.
An object of the present invention is to provide a light source device capable of obtaining a light source having higher luminance than that of the prior art and a distance measuring sensor including the same.

A light source device according to a first aspect of the present invention includes a light source unit that emits a laser beam, a condenser lens, and a translucent phosphor. The condenser lens condenses the laser light emitted from the light source unit. The translucent fluorescent substance is provided with a condensing point of the laser light condensed by the condensing lens inside, and emits fluorescence at a portion through which the laser light passes.
Here, the laser light emitted from the light source unit and collected by the condenser lens is irradiated so that the light collection point is positioned inside the translucent phosphor, and the laser light is excited in the translucent phosphor. It is used as a light source using the

Here, as the light source unit, for example, an LD (Laser Diode) that emits blue laser light
Etc. can be used. Further, the laser light emitted from the light source unit is not limited to parallel light, and may be light having a slight spread.
The condensing lens may have any function as long as it can condense the laser light on the translucent fluorescent substance, and the shape is not limited.

The translucent phosphor is, for example, a block-shaped phosphor such as a polyhedron or a sphere, and includes a single crystal phosphor, a translucent ceramic phosphor, and the like. And, the light transmitting property is a characteristic that the laser light is irradiated and there is almost no scattering of the laser light inside the phosphor (including the characteristic that there is no scattering), and a condensed spot is formed inside the phosphor. It means the scattering property of the degree. In addition, the light transmissivity means a characteristic (including a characteristic without scattering) in which there is almost no scattering of the fluorescence generated inside the phosphor.

Thus, a fluorescent light source unit for emitting the fluorescence excited by the laser light is formed along the propagation direction of the laser light in the inside irradiated with the laser light collected by the collecting lens in the translucent fluorescent substance At the same time, due to the characteristics of the translucent phosphor, laser light can be taken into the interior with little scattering.
As a result, since it is possible to efficiently take out the fluorescence emitted from the fluorescent light source part formed in the translucent fluorescent substance, it is possible to obtain a light source having higher luminance than conventional.

A light source device according to a second aspect of the present invention is the light source device according to the first aspect, wherein the translucent phosphor is
A condensing point of the laser light condensed by the condensing lens is provided inside, and the laser light is emitted from the beam diameter when it is incident on the surface of the translucent fluorescent substance and the surface of the translucent fluorescent substance The light passes through the focusing point with a beam diameter smaller than any of the beam diameters at the time, and emits fluorescence at the portion through which the laser light passes.

Here, in the translucent phosphor, the laser light is focused at a beam diameter smaller than the beam diameter of each of the laser light incident on the translucent phosphor and the laser light emitted from the translucent phosphor. And generate fluorescence in the transmitting part of the laser light.
As a result, by condensing the laser light inside the translucent phosphor to increase the energy density per volume, it is possible to obtain a light source having higher luminance than in the prior art.

A light source device according to a third aspect of the present invention is the light source device according to the first or second aspect of the present invention, wherein the condensing point is provided within a range of 500 μm or less from the surface of the translucent phosphor.
Here, the laser light is condensed in the range of 500 μm or less from the surface of the translucent phosphor.
As a result, in the translucent fluorescent substance, a fluorescent light source unit which is excited to emit fluorescence is formed at the portion where the laser light is collected. Then, since the laser light is emitted from the surface of the translucent fluorescent substance to a position of 500 μm inside without being substantially scattered, it is possible to take out the efficiently emitted fluorescence from a desired direction.

A light source device according to a fourth aspect of the present invention is the light source device according to the first or second aspect of the present invention, wherein the condensing point is provided within a range of 160 μm or less from the surface of the translucent phosphor.
Here, as a more preferable range, the laser light is condensed within a range of 160 μm or less from the surface of the translucent phosphor.
As a result, in the translucent fluorescent substance, a fluorescent light source unit which is excited to emit fluorescence is formed at the portion where the laser light is collected. Then, since the laser light is emitted from the surface of the translucent fluorescent substance to a position of 160 μm inside without being substantially scattered, it is possible to take out the efficiently emitted fluorescence from a desired direction.

A light source device according to a fifth aspect of the present invention is the light source device according to any one of the first to fourth aspects, wherein the translucent fluorescent substance is a single crystal fluorescent substance.
Here, a single crystal phosphor is used as the translucent phosphor.
As a result, the laser light collected by the light collecting lens propagates without being mostly scattered inside, as compared with the conventional phosphor containing a bind of resin etc., so that the fluorescent light can be emitted efficiently. it can. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.

A light source device according to a sixth aspect of the present invention is the light source device according to any one of the first to fourth aspects, wherein the translucent phosphor has the shape of a sphere, an ellipsoid or a polyhedron. .
Here, a sphere, an ellipsoid or a polyhedron phosphor is used as the translucent phosphor.
Thus, a fluorescent light source unit that emits fluorescence by being excited by the laser light can be formed along the laser propagation direction in the portion of the translucent fluorescent substance such as a sphere or the like, on which the laser light is collected. Then, since the laser light is emitted from the surface of the light transmitting phosphor to the inside with little scattering, the emitted fluorescence can be efficiently extracted from a desired direction.

A light source device according to a seventh aspect of the present invention is the light source device according to any one of the first through sixth aspects, further comprising an intake lens for condensing fluorescence emitted at least in the translucent phosphor. Have.
Here, there is provided a lens for taking out the fluorescence emitted in the portion (fluorescent light source part) in the inside of the translucent fluorescent substance irradiated with the laser light.

Thereby, the fluorescence emitted in the translucent phosphor is extracted to the outside from the direction of the lens for incorporation in the translucent phosphor.
Therefore, it is possible to obtain a light source having higher luminance than in the prior art.
A light source device according to an eighth aspect of the present invention is the light source device according to the seventh aspect, wherein the first end face is irradiated with the fluorescence collected by the lens for capture and the first end face is opposite to the first end face It further comprises a fiber that emits fluorescence from the two end faces.

Here, on the downstream side of the taking-in lens for taking out the fluorescence emitted inside the translucent phosphor, the fluorescence incident from the taking-on lens is emitted from the side (second end face) opposite to the incident side (first end face) Fibers are placed.
Thereby, fluorescence can be taken in from the 1st end face of a fiber, and high-intensity light can be emitted from the 2nd end face.

A light source device according to a ninth aspect of the present invention is the light source device according to the eighth aspect, wherein a plurality of fluorescence uptake systems including an uptake lens and a fiber are provided for a single translucent phosphor. .
Here, a plurality of fluorescence uptake systems (intake lenses and fibers) are disposed for a single translucent phosphor.
Thereby, the high-intensity fluorescence which light-emitted in the translucent fluorescent substance can be taken in into several fluorescence uptake | capture systems, and each can be used as a high-intensity light source.

A light source device according to a tenth aspect of the present invention is the light source device according to any one of the seventh or eighth aspects, wherein the capturing lens is a laser propagating from the light source portion and condensed by the condensing lens. The center axis of the lens is arranged to be coaxial with the center axis of the lens.
Here, the taking-in lens is disposed such that the central axis of the lens is aligned with the central axis of the laser propagation of the laser light inside the translucent phosphor.

As a result, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source portion) formed inside the translucent fluorescent substance, light is emitted in the translucent fluorescent substance The fluorescence can be extracted efficiently. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.
In addition, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting part (fluorescent light source part) formed inside the translucent fluorescent substance, it is arranged downstream of the light source part An optical system (condenser lens, capture lens) can be arranged on a straight line. Therefore, while being able to perform optical axis adjustment easily, an optical system can be miniaturized.

A light source device according to an eleventh aspect of the present invention is the light source device according to the eighth or ninth aspect of the present invention, wherein the lens for intake is arranged such that the lens central axis is oblique to the lens central axis of the condensing lens. There is.
Here, the central axis of the taking-in lens is arranged to be oblique (non-coaxial) with respect to the central axis of the condenser lens.

As a result, it is possible to prevent the laser light that has been transmitted without being absorbed by the light-transmitting phosphor among the laser light irradiated to the light-transmitting phosphor from entering the lens for capture.
Therefore, since the energy of the laser beam contained in the light radiate | emitted from a light source device can be reduced, the high-intensity light source which ensured the safety standard of laser products can be obtained.

A light source device according to a twelfth aspect of the present invention is the light source device according to the eighth aspect of the present invention, wherein the plurality of fluorescence uptake systems including the uptake lens and the fiber have the uptake lens centered on the translucent phosphor 1 It is arranged to be located on two spherical surfaces.
Here, for a single translucent fluorescent substance, a plurality of fluorescence uptake systems (incorporating lenses and fibers) are disposed on a common spherical surface centered on the translucent fluorescent substance.

Thereby, the high-intensity fluorescence which light-emitted in the translucent fluorescent substance can be taken in into several fluorescence uptake systems arrange | positioned equidistantly from the translucent fluorescent substance, and each can be used as a high-intensity light source. .
A light source device according to a thirteenth invention is the light source device according to any one of the first to twelfth inventions, wherein the laser condensing system including the light source part and the condensing lens is a single light transmitting fluorescence. Multiple are provided for the body.

Here, a plurality of laser focusing systems (light source unit and focusing lens) are disposed for a single translucent phosphor.
Thereby, the high-intensity fluorescence which irradiated and excited the laser beam with respect to translucent fluorescent substance from multiple places can be used as a light source.
A light source device according to a fourteenth aspect of the present invention is the light source device according to the thirteenth aspect, wherein in the plurality of laser condensing systems, the condensing lenses are positioned on one spherical surface centered on the translucent phosphor. It is arranged as.

Here, with respect to a single translucent fluorescent substance, a plurality of laser condensing systems (light source unit and condensing lens) are disposed on a common spherical surface centered on the translucent fluorescent substance.
Thus, it is possible to irradiate the translucent fluorescent substance with laser light from a plurality of laser focusing systems arranged at equal distances from the translucent fluorescent substance to take out high-brightness fluorescence and use it as a light source. .

A light source device according to a fifteenth invention is the light source device according to any one of the first to fourteenth inventions, wherein the translucent phosphor has a first surface that transmits laser light and reflects fluorescence. And a second surface for reflecting the laser light and transmitting the fluorescence.
Here, the translucent fluorescent substance is provided with a surface (first surface) for transmitting laser light and reflecting fluorescence, and a surface (second surface) for reflecting laser light and transmitting fluorescence.

Here, for the first surface and the second surface, for example, a laser transmitting / fluorescent reflecting film, a laser reflecting / fluorescent transmitting film or the like formed by vapor deposition or sputtering on a translucent fluorescent material may be used. it can.
Thus, by arranging the first surface at the portion where the laser light in the translucent fluorescent material is incident, the laser light emitted to the translucent fluorescent material is transmitted on the first surface, and The fluorescence excited by the laser light can be reflected to the emission side.

Then, by disposing the second surface in a portion from which the fluorescence excited by the laser light is emitted, the laser light emitted to the translucent phosphor is transmitted without being absorbed by the translucent phosphor. The reflected laser light can be reflected and returned to the inside of the translucent fluorescent material, and the fluorescence excited by the laser light can be transmitted and emitted.
A light source device according to a sixteenth aspect of the present invention is the light source device according to any one of the first through fifteenth aspects, wherein the light source device is disposed on the incident surface side of the translucent phosphor and is irradiated from the light source portion. It further comprises a concave mirror for transmitting the laser light and for reflecting the fluorescence emitted to the incident surface side of the fluorescence emitted from the translucent fluorescent material toward the translucent fluorescent material.

Here, a concave mirror that transmits laser light and reflects fluorescence is disposed between the light-incident surface side of the translucent phosphor, that is, between the condensing lens and the translucent phosphor.
Here, a dichroic mirror can be used as the concave mirror.
As a result, the laser light collected by the condenser lens is transmitted and irradiated to the translucent fluorescent substance, and the fluorescence emitted from the translucent fluorescent substance is emitted to the incident surface side of the translucent fluorescent substance The fluorescent light can be reflected by the concave mirror in the direction of the light emission position of the fluorescent light.

As a result, since the fluorescence emitted from the translucent fluorescent material can be efficiently extracted by the concave mirror, a light source with higher brightness can be obtained.
A light source device according to a seventeenth aspect of the present invention is the light source device according to any one of the first through fifteenth aspects, wherein the light source device is disposed on the light emitting surface side of the translucent fluorescent material. It further comprises a concave mirror that reflects the laser light that has passed through the translucent fluorescent material, and transmits the fluorescence emitted to the emission surface side of the fluorescent material emitted from the translucent fluorescent material.

Here, a concave mirror that reflects the laser light and transmits the fluorescence is disposed on the emission surface side of the translucent fluorescent material.
Here, as the concave mirror, it is possible to use a dichroic mirror or a perforated mirror having an opening through which laser light passes.
Thus, the fluorescent light emitted from the translucent fluorescent material is transmitted, and the laser light collected by the condensing lens and transmitted through the translucent fluorescent material is reflected by the concave mirror in the direction of the light emission position of the fluorescent light. it can.

As a result, by reflecting the laser light transmitted through the translucent fluorescent material back to the translucent fluorescent material by the concave mirror, it is possible to efficiently take out fluorescence, so that a light source with higher brightness can be obtained. be able to.
A light source device according to an eighteenth invention is a light source device according to the sixteenth or seventeenth invention,
The concave mirror is a dichroic mirror or a perforated mirror having an opening.

Here, as the concave mirror, a dichroic mirror or a perforated mirror having an opening is used.
Thus, the concave mirror provided on the incident surface side of the laser light in the translucent fluorescent material transmits the laser light and transmits the fluorescence emitted from the translucent fluorescent material to the incident surface side as the translucent fluorescent light. It can reflect in the direction of the light emission position in the body.

Alternatively, the concave mirror provided on the light emitting surface side of the translucent fluorescent material transmits the fluorescence emitted from the translucent fluorescent material and transmits the laser light transmitted through the translucent fluorescent material to the translucent fluorescent material. It can reflect in the direction of the light emission position.
As a result, it is possible to obtain a light source with higher brightness.
A light source device according to a nineteenth aspect of the present invention is the light source device according to the first aspect of the present invention, wherein the translucent phosphor has a spherical shape.

Here, a spherical phosphor is used as the translucent phosphor.
Thus, it is possible to form a fluorescent light source portion which is excited by the laser light and emits fluorescence along the laser propagation direction in the portion of the spherical translucent fluorescent substance where the laser light is collected. Then, since the laser light is emitted from the surface of the light transmitting phosphor to the inside with little scattering, the emitted fluorescence can be efficiently extracted from a desired direction.

A light source device according to a twentieth aspect of the present invention is the light source device according to the nineteenth aspect, wherein the translucent fluorescent substance is a first opening for taking in a laser beam emitted from the light source portion and collected by the condensing lens. And a second opening for taking out the fluorescence emitted from the translucent phosphor by the laser light.
Here, the spherical translucent phosphor is provided with first and second openings, and the laser light collected by the condenser lens is taken in from the first opening, and fluorescence excited in the translucent phosphor is provided. Is removed from the second opening.

Thus, light of high brightness can be extracted using the translucent fluorescent substance having the first opening for taking in laser light and the second opening for taking out fluorescence.
A light source device according to a twenty-first aspect of the present invention is the light source device according to the nineteenth or twentieth aspect of the present invention,
The laser focusing system including the light source unit and the focusing lens is arranged to focus the laser light on the central portion of the spherical translucent phosphor.

Here, the laser light is focused on the central portion of the spherical translucent phosphor.
Thus, a fluorescent light source unit that emits fluorescence can be formed at the central portion of the spherical translucent fluorescent material, and fluorescence can be emitted from the fluorescent light source unit in all directions.
A light source device according to a twenty-second aspect of the present invention is the light source device according to any one of the nineteenth through the twenty-first aspects, wherein the laser focusing system including the light source unit and the focusing lens is a translucent phosphor. A plurality of points are arranged on one spherical surface at the center.

Here, for a single spherical translucent phosphor, a plurality of laser focusing systems (light source part and condensing lens) are disposed on a common spherical surface centered on the translucent phosphor. There is.
Thus, the spherical translucent fluorescent substance is irradiated with laser light from a plurality of laser focusing systems arranged at equal distances from the translucent fluorescent substance to take out high-intensity fluorescence and use it as a light source. Can.

A light source device according to a twenty-third aspect of the present invention is the light source device according to any one of the nineteenth through twenty-second aspects, which is a taking-in lens for condensing the fluorescence emitted in the translucent phosphor; The first lens is further provided with a fiber for irradiating the first end face with the fluorescence collected by the fork lens and emitting the fluorescence from the second end face opposite to the first end face.
Here, on the downstream side of the translucent phosphor, a lens for taking out the fluorescence emitted in the portion (fluorescent light source part) irradiated with the laser light in the inside of the translucent phosphor and a lens for taking in were made. A fiber for emitting fluorescence from the opposite side (second end face) to the incident side (first end face) is disposed.

Thereby, the fluorescence emitted in the translucent phosphor is extracted to the outside from the direction of the lens for incorporation in the translucent phosphor. Then, it is possible to take in the fluorescence collected by the taking-in lens from the first end face of the fiber and to emit high-intensity light from the second end face.
A light source device according to a twenty-fourth aspect of the present invention is the light source device according to the twenty-third aspect, wherein a plurality of fluorescence taking-in systems including taking-in lenses and fibers are arranged on one spherical surface centered on the translucent phosphor. It is done.

Here, with respect to a single spherical translucent fluorescent substance, a plurality of fluorescent uptake systems (incorporating lenses and fibers) are disposed on a common spherical surface centered on the translucent fluorescent substance.
Thus, the high-intensity fluorescent light emitted in the spherical translucent fluorescent material is taken into a plurality of fluorescence taking-in systems arranged equidistant from the translucent fluorescent material, and each of them is used as a high-intensity light source. Can.

A light source device according to a twenty-fifth aspect of the present invention is the light source device according to the twenty-third or twenty-fourth aspect of the present invention,
The capturing lens is arranged such that the central axis of the lens is coaxial with the optical axis of the laser light emitted from the light source and collected by the collecting lens.
Here, the capturing lens included in the fluorescence capturing system is disposed so that the central axis of the lens is aligned with the central axis of the laser propagation of the laser light inside the translucent phosphor.

As a result, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source portion) formed inside the spherical translucent fluorescent substance, the translucent fluorescent substance The emitted fluorescence can be efficiently extracted. Therefore, it is possible to obtain a light source having higher luminance than in the prior art.
In addition, since the central axis of the taking-in lens is aligned with the central axis of the fluorescent light emitting portion (fluorescent light source portion) formed inside the spherical translucent fluorescent material, it is disposed downstream of the light source portion The optical system (condensing lens, taking lens, etc.) can be arranged on a straight line. Therefore, while being able to perform optical axis adjustment easily, an optical system can be miniaturized.

A light source device according to a twenty-sixth aspect of the present invention is the light source device according to the twenty-third or twenty-fourth aspect, wherein
The taking lens is disposed such that the lens central axis is oblique to the lens central axis of the condensing lens.
Here, the central axis of the taking-in lens is arranged to be oblique (non-coaxial) with respect to the central axis of the condenser lens.

As a result, it is possible to prevent the laser light that has been transmitted without being absorbed by the light-transmitting phosphor among the laser light irradiated to the light-transmitting phosphor from entering the lens for capture.
Therefore, only the fluorescence excited by the laser light in the translucent fluorescent substance is taken into the taking-in lens, so that it is possible to obtain a light source having higher luminance than conventional.

A light source device according to a twenty-seventh aspect of the present invention comprises a light source unit for emitting a laser beam, a condenser lens, a translucent phosphor, a reflective film, a first opening, and a second opening. There is. The condenser lens condenses the laser light emitted from the light source unit. The translucent fluorescent substance emits fluorescence at a portion through which laser light passes. The reflective film is provided on at least a part of the surface of the translucent phosphor, and reflects laser light or fluorescence. The first opening is formed in a part of the incident side of the laser beam in the reflective film, and causes the laser beam to enter. The second opening is formed in a part of the emission side of the fluorescence in the reflective film, and emits the fluorescence.

Here, the translucent fluorescent substance is irradiated with the laser light emitted from the light source unit and collected by the condensing lens, and the fluorescent substance excited by the laser light in the translucent fluorescent substance is used as a light source. A reflective film is provided on at least a part of the surface of the translucent phosphor. Then, the first and second openings are provided in the translucent phosphor, and the laser light collected by the condenser lens is taken in from the first opening, and the fluorescence excited in the translucent phosphor is Take out from the opening.

Thus, the laser light is taken into the interior of the translucent phosphor through the first opening, and
The laser light taken into the translucent fluorescent substance or the fluorescence emitted from the passing part of the laser light in the translucent fluorescent substance can be reflected in a desired direction, and the fluorescence can be taken out through the second opening.
As a result, since it is possible to efficiently take out the fluorescence emitted from the fluorescent light source part formed in the translucent fluorescent substance, it is possible to obtain a light source having higher luminance than conventional.

A distance measuring sensor according to a twenty-eighth aspect of the present invention comprises the light source device according to any one of the first to twenty-seventh aspects, a light receiving portion for receiving reflected light of light emitted from the light source device, and a light receiving portion. And a measuring unit that measures the distance to the object based on the amount of light.
Here, the distance measuring sensor is configured using the light source device described above.
As a result, since it is possible to use a light source whose luminance is higher than that of the conventional light source, it is possible to obtain effects such as being able to extend the measuring distance and improving the response speed.

A distance measuring sensor according to a twenty-ninth aspect of the present invention is the distance measuring sensor according to the twenty-eighth aspect of the present invention, further comprising a chromatic aberration focusing lens through which light including a plurality of wavelengths output from the light source device passes. The light receiving unit receives the reflected light of the light including the plurality of wavelengths irradiated to the object via the chromatic aberration focusing lens. The measuring unit measures the distance to the object based on the wavelength of the reflected light at which the amount of light received by the light receiving unit is maximum.

Here, a confocal equation that measures the distance to an object by separating light including a plurality of wavelengths for each wavelength (each color) using a chromatic aberration focusing lens and detecting the peak of the light of each wavelength The distance measuring sensor of
Thus, as described above, since the distance measuring sensor is configured using the light source device that emits light whose brightness is higher than that of the conventional light source, a high-performance confocal distance measuring sensor can be obtained. .

  According to the light source device of the present invention, it is possible to obtain a light source having higher luminance than in the prior art.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic diagram which shows the structure of the confocal measurement apparatus carrying the light source device which concerns on one Embodiment of this invention. FIG. 2 is a schematic view showing a configuration of a light source device mounted on the confocal measurement device of FIG. 1. The schematic diagram which expanded the principal part of the light source device of FIG. FIG. 5 is a schematic view showing the shape of a fluorescent light source part formed inside the translucent fluorescent substance of FIG. 3; The schematic diagram which shows the structure of the light source device which concerns on Embodiment 2 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. FIG. 6 is a graph showing the wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. 5. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 3 of this invention. The schematic diagram which expanded the principal part of the light source device of FIG. FIG. 9 is a graph showing the wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of FIG. 8. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 4 of this invention. (A) is a schematic diagram which shows refraction of the light in the translucent fluorescent substance contained in the light source device of FIG. (B) is a schematic diagram which shows refraction of the light in the translucent fluorescent substance contained in the light source device of FIG. 2 as a comparative example. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 5 of this invention. The schematic diagram which showed the position of the condensing point formed in the inside of the translucent fluorescent substance contained in the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 6 of this invention. The schematic diagram which showed the position of the condensing point formed inside the translucent fluorescent substance contained in the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 7 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 8 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 9 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 10 of this invention. The enlarged view which shows the structure of the translucent fluorescent substance contained in the light source device of FIG. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 11 of this invention. FIG. 23 is a schematic view showing a configuration of a translucent phosphor included in the light source device of FIG. 22. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 12 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 13 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 14 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 15 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 16 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 17 of this invention. The schematic diagram which shows the structure of the light source device which concerns on Embodiment 18 of this invention. The graph which showed the relationship between the distance from the fluorescent substance surface of the condensing point formed inside the translucent fluorescent substance of FIG. 3, and the radiance in fluorescent substance for every absorption coefficient of translucent fluorescent substance. The figure for demonstrating the numerical formula which becomes the basis of the graph of FIG.

(Embodiment 1)
The light source device 10 according to an embodiment of the present invention and the confocal measurement device (distance measurement sensor) 50 including the light source device 10 will be described below with reference to FIGS. 1 to 4 and FIGS. 31 and 32. .
(Confocal measuring device 50)
As shown in FIG. 1, the confocal measurement device 50 equipped with the light source device 10 according to the present embodiment is as follows:
It is a measuring device which measures the displacement of measurement object T using a confocal optical system. The measurement target T measured by the confocal measurement device 50 includes, for example, a cell gap of a liquid crystal display panel.

As shown in FIG. 1, the confocal measurement device 50 outputs signals from the head unit 51 having a confocal optical system, the controller unit 53 optically connected via the optical fiber 52, and the controller unit 53. A monitor 54 for displaying is provided.
The head unit 51 includes a diffractive lens (chromatic aberration focusing lens) 51a, an objective lens 51b disposed on the measurement target T side with respect to the diffractive lens 51a, and an optical fiber 52 and a diffractive lens 51a in a cylindrical casing. And a condenser lens 51c provided therebetween.

The diffractive lens 51a causes chromatic aberration along the optical axis direction to light emitted from a light source (for example, a white light source) that emits light of a plurality of wavelengths described later. In the diffractive lens 51a, fine undulating shapes such as, for example, a kinoform shape or a binary shape (step shape, step shape) are periodically formed on the surface of the lens. The shape of the diffractive lens 51a is not limited to the above configuration.

The objective lens 51 b measures the light that has caused the chromatic aberration in the diffractive lens 51 a to be measured T.
Focus on
The condenser lens 51 c is provided between the optical fiber 52 and the diffractive lens 51 a in order to make the numerical aperture of the optical fiber 52 coincide with the numerical aperture of the diffractive lens 51 a.
This is because the light emitted from the light source is guided to the head unit 51 via the optical fiber 52, and the aperture of the optical fiber 52 is used to effectively use the light emitted from the optical fiber 52 by the diffractive lens 51a. This is because it is necessary to match the numerical aperture (NA: numerical aperture) with the numerical aperture of the diffractive lens 51a.

The optical fiber 52 is an optical path from the head unit 51 to the controller unit 53, and
It also functions as a pinhole. That is, of the light condensed by the objective lens 51 b, the light focused on the measurement object T is focused on the opening of the optical fiber 52. Therefore, the optical fiber 5
Reference numeral 2 functions as a pinhole that blocks light of a wavelength that is not focused by the measurement object T and allows light that is focused by the measurement object T to pass.

The confocal measurement device 50 may have a configuration in which the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53. However, by using the optical fiber 52 in the optical path, the head unit 51 can be used as the controller unit 53. It is possible to move flexibly with respect to Furthermore, the confocal measurement device 50 needs to have a pinhole in the case where the optical fiber 52 is not used in the optical path from the head unit 51 to the controller unit 53, but in the case where the optical fiber 52 is used, the confocal measurement device 50 is used. The measuring device 50 does not have to be provided with a pinhole.

The controller unit 53 includes a light source device 10 as a light source, a branch optical fiber 56, and a spectroscope 57.
An imaging element (light receiving unit) 58 and a control circuit unit (measuring unit) 59 are mounted inside. The detailed configuration of the light source device 10 will be described in detail later.
The branch optical fiber 56 has one optical fiber 55 a on the connection side with the optical fiber 52 that forms an optical path from the head unit 51 to the controller unit 53, and two optical fibers 1 on the opposite side.
There are 5,55. The optical fiber 15 constitutes a part of a light source device 10 described later. The optical fiber 55b is connected to the spectroscope 57, and the light collected by the spectroscope 57 is taken in from the end face.

For this reason, the branch optical fiber 56 guides the light emitted from the light source device 10 to the optical fiber 52 and irradiates the measurement target T from the head unit 51. Furthermore, the branch optical fiber 56 guides the light reflected on the surface of the measurement object T to the spectroscope 57 via the optical fiber 52 and the head unit 51.
The spectroscope 57 condenses the light emitted from the diffraction grating 57b, the concave mirror 57a for reflecting the reflected light returned through the head unit 51, the diffraction grating 57b for the light reflected by the concave mirror 57a to be incident, and And a condenser lens 57c. The spectroscope 57 has a head 5
As long as the reflected light returning through 1 can be divided according to wavelength, it may be of any configuration such as Zernita type or Littrow type.

The imaging device 58 is a line CMOS (Comp Comp) that measures the intensity of the light emitted from the spectroscope 57.
It is a complementary metal oxide semiconductor) or a charge coupled device (CCD). Here, in the confocal measurement device 50, the head unit 51 is configured by the spectroscope 57 and the imaging device 58.
The measurement unit is configured to measure the intensity of the reflected light returned through each of the wavelengths.
The measuring unit may be configured of a single imaging device 58 such as a CCD as long as the intensity of light returning from the head unit 51 can be measured for each wavelength. Also, the image sensor 58
It may be a two dimensional CMOS or a two dimensional CCD.

The control circuit unit 59 controls the operation of the light source device 10, the imaging device 58, and the like. Further, although not shown, the control circuit unit 59 has an input interface for inputting a signal for adjusting the operation of the light source device 10, the imaging device 58, etc., an output interface for outputting a signal of the imaging device 58, etc. ing.
The monitor 54 displays the signal output from the imaging device 58. For example, the monitor 54 draws a spectral waveform of light returning from the head unit 51, and displays the displacement of the measurement object.

In the confocal measurement device 50 of the present embodiment, by mounting the following light source device 10, a high-intensity light source can be obtained.
Thereby, as a measuring device, effects such as being able to extend the measuring distance and being able to improve the response can be obtained.
The configuration of the light source device 10 will be described in detail below.

(Light source device 10)
The light source device 10 of the present embodiment is mounted as a light source of the above-described confocal measurement device 50, and as shown in FIG. 2, a light source unit 11, a condenser lens 12, and a translucent phosphor 13; It has a lens for taking in 14 and an optical fiber 15.
The light source unit 11 is, for example, a semiconductor laser that emits a laser beam having a peak wavelength of about 450 nm, and is a laser beam in the direction of the focusing lens 12 as excitation light for emitting fluorescence in the translucent phosphor 13 Irradiate.

The condensing lens 12 is a lens in which both the incident surface and the emission surface are convex, and condenses the laser light emitted from the light source unit inside the translucent phosphor 13. In detail, the condensing lens 12 condenses the laser light at a distance of 500 μm or less from the incident surface 13 a of the translucent fluorescent substance 13.
The position (depth from the surface on the incident side) of the condensing point X of the laser beam condensed by the condensing lens 12 will be described in detail later.

The translucent phosphor 13 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a plate-like shape as shown in FIG. Moreover, the translucent fluorescent substance 13 has the entrance plane 13a and the output plane 13b which were arrange | positioned along the surface perpendicular | vertical to the laser propagation direction, respectively. As shown in FIG. 2, the translucent fluorescent substance 13 is directed in all directions at a portion irradiated with the laser light which is emitted from the light source unit 11 and collected by the condensing lens 12. 480
It emits fluorescence with a wavelength in the range of ̃750 nm.

Then, as shown in FIG. 3, in the translucent phosphor 13, a substantially cylindrical fluorescent light source unit 20 which is long along the propagation direction of the laser light is formed at the portion irradiated with the laser light.
The fluorescent light source unit 20 is formed at a portion where the laser light has passed through the inside of the translucent fluorescent substance 13, and as shown in FIGS. 3 and 4, has a substantially cylindrical shape elongated in the laser propagation direction .
And since the fluorescence light source unit 20 emits fluorescence in all directions in each part,
It can be regarded as a light source formed inside the translucent phosphor 13. Specifically, as shown in FIG. 4, the fluorescent light source unit 20 has a small-diameter portion in which the radius of the circle of the cross section decreases in the central portion in the longitudinal direction along the propagation direction of the laser light The cross section has a substantially cylindrical shape in which the radius of the circle of the cross section increases.

That is, the fluorescent light source unit 20 is formed such that the condensing point X of the laser light is located on the small diameter cross section 20b. Then, the fluorescence light source unit 20 is configured to reflect the laser beam and to
The cross-sectional areas of a and the emission side cross section 20c are formed to be larger than the small diameter cross section 20b.
For example, the fluorescence light source unit 20 includes an end face on the incident side of the laser beam (incident side cross section 20a), a small diameter portion of the substantially cylindrical central portion (small diameter cross section 20b), an end face on the emission side of the laser light (emission side Cross section 20c)
Emits fluorescence in all directions.

Therefore, of the fluorescence emitted in the fluorescence light source unit 20, the amount of fluorescence collected on the end face (first surface) of the optical fiber 15 by the capturing lens 14 extends in the direction of the lens central axis A2 of the capturing lens 14. Of the fluorescence emitted by the fluorescence light source unit 20 present in the depth of field of the optical fiber 15, the amount of light captured by the capturing lens 14 is obtained.
The depth of field means a range which can be regarded as practically in focus before and after the position where the lens is used for focusing on the object side (object side). Further, the depth of focus is obtained by replacing the depth of field on the film side (image plane side). In other words, everything within the depth of field can be taken as if it were in focus.

In the depth of field, the rear side of the in-focus position is called the rear depth of field, and the front side of the in-focus position is called the front depth of field.
Like the condenser lens 12, the taking-in lens 14 is a lens in which both the incident surface and the exit surface are convex, and is disposed on the downstream side of the translucent phosphor 13 in the direction in which the laser light propagates. . And, the lens for taking in 14 is the inside of the translucent phosphor 13 (fluorescent light source unit 2
The fluorescence emitted at 0) is collected on the end face of the optical fiber 15.

Further, as shown in FIG. 3, the lens for taking in 14 has a lens central axis A2 that is a translucent phosphor 1.
It is arrange | positioned so that it may become coaxial (in-line alignment) with central-axis A1 to which the laser beam in 3 inside propagates. As described above, by arranging the central axis A1 of the laser propagation and the central axis A2 of the capturing lens 14 to be coaxial with each other, the fluorescence emitted from the fluorescence light source unit 20 can be efficiently transmitted from the first surface 15a. It can be introduced into the fiber 15.

The optical fiber 15 is a single optical fiber that constitutes the branch optical fiber 56 of the above-described confocal measurement device 50, and internally forms an optical path of light emitted from the head unit 51 of the confocal measurement device 50. .
Further, as shown in FIG. 3, the optical fiber 15 has an end face (first surface 15a) on which the fluorescence collected by the capturing lens 14 is incident and an end face (second surface 15b) on the output side on the opposite side thereof. )
And.

Thus, the optical fiber 15 can emit the light incident from the first surface 15a from the second surface 15b.
In the light source device 10 according to the present embodiment, as shown in FIG. 2, with the above configuration, the excitation laser light emitted from the light source unit 11 is transmitted to the inside of the translucent phosphor 13 by the condenser lens 12. Focus on Then, as shown in FIG. 3, the fluorescence generated at the condensing portion of the laser light in the inside of the translucent fluorescent substance 13 is condensed on the first surface 15 a of the optical fiber 15 by the taking-in lens 14.

Here, in the light source device 10 according to the present embodiment, as described above, the laser light collected by the light collecting lens 12 is applied to the inside of the single crystal phosphor (light transmitting phosphor 13). .
At this time, when the laser light is incident on the single-crystal phosphor (light-transmitting phosphor 13), the light is not diffused in the phosphor and is transmitted through the inside of the phosphor while exciting the fluorescence.
That is, in the light source device 10 of the present embodiment, a single-crystal phosphor (translucent phosphor) that hardly scatters the laser light incident on the inside is used. For this reason, compared with the conventional fluorescent substance hardened using binders, such as a resin, since the fluorescence light-emitted by the laser beam which injected into the inside can be taken out efficiently, a light source with high brightness compared with the past is made. You can get it.

<About the position (depth) of the focusing point X>
In the present embodiment, the condensing point X of the laser beam formed inside the translucent phosphor 13 by the condenser lens 12 is within 500 μm, more preferably, from the surface on the incident side of the translucent phosphor 13. It is formed within 160 μm.
Here, the condensing point X at which the maximum light quantity is obtained is the laser NA determined by the light source unit 11 and the condensing lens 12, the distance from the surface of the translucent fluorescent material 13 to which the laser is incident, and the light transmission. Phosphor 1
It depends on the absorption coefficient of 3.

FIG. 31 shows the relationship between the distance (depth) from the phosphor surface to the focal point X formed inside the translucent fluorescent substance 13 and the radiance in the fluorescent substance, the absorption of the translucent fluorescent substance 13 The graph shown for each coefficient is shown.
In the graph shown in FIG. 31, the focal position radius (beam waist beam radius) is 20 μm.
11 shows the relationship between the distance from the phosphor surface of the light condensing point X and the radiance inside the phosphor when m and the laser NA (Numerical Aperture) are set to 0.06.

Specifically, the graph shown in FIG. 31 has an absorption coefficient of 20, 40, 80,
The change in the in-phosphorus radiance with respect to the depth of the light collection point X (the distance from the phosphor surface) is shown for each 160.
Further, in the graph shown in FIG. 31, when the distance from the phosphor surface to the focusing point X is 0 μm, that is, there is the focusing point X on the surface, the radiance in the phosphor is 1.00 (W / sr / m The relative radiance for ³ ) is plotted for each absorption coefficient. And 1.00 (W /
The depth of the focal point X at which the radiance is larger than sr / m ³ ) is defined as the numerical range.

For example, when the absorption coefficient of the translucent phosphor 13 is 20, as shown in the graph of FIG. 31, the distance (depth) of the condensing point X from the phosphor surface is in the range of 0 to 500 μm. 00 (W / s
The radiance is larger than r / m ³ ). On the other hand, the distance (depth) of the focal point X from the phosphor surface
When it exceeds 500 μm, the luminance is smaller than 1.00 (W / sr / m ³ ). Therefore, when the absorption coefficient of the translucent fluorescent substance 13 is 20, if it is 500 micrometers or less, a high-intensity light source can be obtained.

Next, when the absorption coefficient of the translucent fluorescent substance 13 is 40, as shown in the graph of FIG.
The distance (depth) of the focal point X from the phosphor surface is in the range of 0 to 300 μm, 1.00 (W / sr
The radiance is larger than 1 / m ³ ). On the other hand, when the distance (depth) of the condensing point X from the phosphor surface exceeds 300 μm, the luminance becomes smaller than 1.00 (W / sr / m ³ ).
Therefore, when the absorption coefficient of the translucent fluorescent substance 13 is 40, if it is 300 micrometers or less, a high-intensity light source can be obtained.

Next, when the absorption coefficient of the translucent fluorescent substance 13 is 80, as shown in the graph of FIG.
The distance (depth) of the focal point X from the phosphor surface is in the range of 0 to 160 μm, 1.00 (W / sr
The radiance is larger than 1 / m ³ ). On the other hand, when the distance (depth) of the condensing point X from the phosphor surface exceeds 160 μm, the luminance becomes smaller than 1.00 (W / sr / m ³ ).
Therefore, when the absorption coefficient of the translucent fluorescent substance 13 is 80, if it is 160 micrometers or less, a high-intensity light source can be obtained.

Next, when the absorption coefficient of the translucent phosphor 13 is 160, as shown in the graph of FIG. 31, the distance (depth) of the condensing point X from the phosphor surface is in the range of 0 to 80 μm. .00 (W / sr
The radiance is larger than 1 / m ³ ). On the other hand, when the distance (depth) of the condensing point X from the phosphor surface exceeds 80 μm, the luminance becomes smaller than 1.00 (W / sr / m ³ ). Therefore, when the absorption coefficient of the translucent fluorescent substance 13 is 160, if it is 80 micrometers or less, a high-intensity light source can be obtained.

As described above, in order to obtain a light source with high brightness, the distance from the phosphor surface to the focusing point X (
The depth) is preferably 500 μm or less.
As a more preferable range, when the absorption coefficient is 80, in order to obtain a light source with high brightness, the distance (depth) of the light condensing point X from the phosphor surface to be high brightness is 160 μm or less Is preferred.

  The graph shown in FIG. 31 is derived by the following equation (1).

すなわち、数１の式は、図３２に示すように、単位面積あたりの放射輝度Ｌ_（ｘ）を、
変換効率Ａ、透光性蛍光体１３の吸収係数α、ＬＤパワーＩ_ＬＤ、断面積Ｓ（ｘ’−ｘ）
、透光性蛍光体１３の厚みｔ、表面から透光性蛍光体１３内の集光点Ｘまでの距離ｘ、表
面から計測位置までの距離ｘ’、集光位置におけるレーザ半径ｒ_ＢＷを用いて表した関係
式である。

That is, as shown in FIG. 32, the equation of Equation 1 gives the radiance L _(x) per unit area,
Conversion efficiency A, absorption coefficient α of the translucent phosphor 13, LD power I _LD , cross-sectional area S (x'-x)
Using the thickness t of the translucent fluorescent substance 13, the distance x from the surface to the condensing point X in the translucent fluorescent substance 13, the distance x ′ from the surface to the measurement position, and the laser radius r _BW at the condensing position It is a relational expression represented.

In the above equation (1), the cross-sectional area S (x'-x) is expressed by the following equation (2).

ここで、断面積は、集光位置からレーザＮＡ（０．０６）で広がっていくものとして近
似した。また、集光位置においては、有限な面積Ｓ_ＢＷを持ち、その半径はｒ_ＢＷとする
。光学系において回折限界以上小さく絞ることができないため、有効な面積を変数とした
。

Here, the cross-sectional area was approximated as expanding from the light collecting position by the laser NA (0.06). In addition, at the light collecting position, it has a finite area S _BW and its radius is r _BW . The optical system can not be narrowed to a size smaller than the diffraction limit, so the effective area is taken as a variable.

The absorption coefficient α of the translucent phosphor 13 is expressed using the following relational expression 3.
That is, assuming that the intensity of light before entering the translucent fluorescent substance 13 is I ₀ , the intensity I of the light after entry is represented by the following equation using the absorption coefficient α from the Lambert-Beer law. Be done.

ここで、ｘは、媒質の距離である。
高輝度化された光源が得られるＩの範囲は、０．２≦Ｉ≦１である。

Here, x is the distance of the medium.
The range of I where a brightened light source is obtained is 0.2 ≦ I ≦ 1.

Second Embodiment
It will be as follows if the light source device which concerns on Embodiment 2 of this invention is demonstrated using FIGS. 5-7.
The light source device 110 according to the present embodiment is different from that of the first embodiment in that a concave mirror 116 is provided between the translucent fluorescent material 113 and the capturing lens 14 as shown in FIG.
The other components of the light source device 110 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components is omitted.

As shown in FIG. 5, the light source device 110 of the present embodiment includes the light source unit 11, the condensing lens 12, the translucent fluorescent substance 113, the concave mirror 116, the capturing lens 14, and the optical fiber 15. Have.
The translucent phosphor 113 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a plate-like shape.

The concave mirror 116 is disposed between the translucent phosphor 113 and the capturing lens 14,
A concave reflective surface is provided on the incident surface on the side of the translucent fluorescent substance 113. And concave mirror 116 is
While transmitting the fluorescence excited in the translucent fluorescent substance 113, the translucent fluorescent substance 113
Has a characteristic of reflecting the laser light that has been transmitted.
As a result, among the fluorescence emitted in all directions from the fluorescence light source unit 120 formed inside the translucent phosphor 113, the fluorescence emitted to the capturing lens 14 side is not blocked by the concave mirror 116. , Can be taken in the taking lens 14.

Furthermore, as shown in FIG. 6, the laser beam transmitted without being absorbed by the translucent fluorescent substance 113 can be reflected by the concave mirror 116 and returned to the translucent fluorescent substance 113 side.
As a result, in the translucent phosphor 113, since it is possible to take in more excitation light than the laser light irradiated in the first embodiment and excite the fluorescence, a light source with higher luminance than in the conventional case can be obtained. You can get it.

Moreover, by making the translucent fluorescent substance 113 thinner than the translucent fluorescent substance 13 of the said Embodiment 1, after transmitting the translucent fluorescent substance 13, after being reflected by the concave mirror 116, it is again translucent fluorescent substance 13
It is possible to increase the amount of laser light emitted to the light source and to obtain a light source with higher brightness.
Furthermore, as shown in FIG. 6, the concave mirror 116 is disposed such that the center of the concave curved surface is on the central axis A1 of the fluorescent light source unit 120.

Thereby, the reflected laser beam can be condensed again on the position of the portion (fluorescent light source unit 120) where the fluorescence is emitted.
As a result, in the translucent phosphor 113, since it is possible to take in more excitation light than the laser light irradiated in the first embodiment and excite the fluorescence, a light source with higher luminance than in the conventional case can be obtained. You can get it.

More preferably, the concave mirror 116 has a spherical or aspheric shape centered on the focusing point X of the laser light focused in the translucent fluorescent substance 113 by the focusing lens 12.
Thereby, the reflected laser beam can be condensed again on the portion (fluorescent light source unit 120) where the fluorescence is emitted.

As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.
The concave mirror 116 may be a dichroic mirror, or a lens obtained by depositing a reflecting film for reflecting the laser light on the concave surface of the meniscus lens, or a hole for reflecting the laser light on the concave surface with an opening in the part that transmits the fluorescence. An open mirror or the like can be used.

For example, when a dichroic mirror is used as the concave mirror 116, as shown in FIG. 7, light (laser light) having a wavelength of about 480 nm or less is reflected, and light (fluorescent light) having a wavelength greater than about 480 nm is transmitted. Thus, the laser light can be reflected while transmitting the fluorescence.

(Embodiment 3)
It will be as follows if the light source device which concerns on Embodiment 3 of this invention is demonstrated using FIGS. 8-10.
The light source device 210 according to the present embodiment is different from that of the first embodiment in that a concave mirror 216 is provided between the condenser lens 12 and the translucent fluorescent substance 13 as shown in FIG.
The other components of the light source device 210 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 8, the light source device 210 according to the present embodiment includes the light source unit 11, the condenser lens 12, the concave mirror 216, the translucent fluorescent body 13, the capturing lens 14, and the optical fiber 15. Have.

The concave mirror 216 is disposed between the condenser lens 12 and the translucent phosphor 13, and has a concave reflective surface on the surface on the translucent phosphor 13 side. The concave mirror 216 is a condenser lens 1.
While transmitting the laser beam condensed by 2 and having the characteristic of reflecting the fluorescence light-emitted in the inside of the translucent fluorescent substance 13. FIG.
Thus, the laser light emitted from the light source unit 11 and collected by the collecting lens 12 is
The light can be emitted to the translucent phosphor 13 without blocking by the concave mirror 216. Furthermore, as shown in FIG. 9, of the fluorescence emitted toward the omnidirectional direction from the fluorescence light source unit 220 formed inside the translucent phosphor 13, the fluorescence emitted to the condensing lens 12 side is a concave mirror It can be reflected back to the translucent fluorescent substance 13 side by 216.

As a result, the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment, and condense it on the first surface 15 a of the optical fiber 15. Therefore, the luminance can be further enhanced compared to the conventional case. Light source can be obtained.
Furthermore, the concave mirror 216 is disposed such that the center of the concave curved surface is located with respect to the central axis A1 of the fluorescent light source unit 220.

Thereby, the reflected fluorescence can be condensed to the position of the part (fluorescence light source part 220) which fluorescence emitted.
As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.

Further, the concave mirror 216 more preferably has a spherical or aspheric shape centered on the focusing point X of the laser light focused in the translucent fluorescent substance 13 by the focusing lens 12.
Thereby, the reflected fluorescence can be condensed to the part (fluorescence light source part 220) which fluorescence emitted.

As a result, since the capturing lens 14 can capture more fluorescence than the fluorescence captured in the first embodiment and condense on the first surface 15 a of the optical fiber 15, the luminance can be further enhanced effectively. Light source can be obtained.
The concave mirror 216 may be a dichroic mirror, or a lens obtained by depositing a reflection film that reflects fluorescence on the concave surface of a meniscus lens, or a hole on the concave surface that has an opening in the portion through which laser light passes. A mirror or the like can be used.

For example, when a dichroic mirror is used as the concave mirror 216, as shown in FIG. 10, light (laser light) having a wavelength of about 480 nm or less is transmitted, and light (fluorescent light) having a wavelength greater than about 480 nm is reflected. Thus, fluorescence can be reflected while transmitting laser light.

(Embodiment 4)
It will be as follows if the light source device which concerns on Embodiment 4 of this invention is demonstrated using FIGS. 11-12 (b).
The light source device 310 according to the present embodiment is different from the light source device 310 according to the first embodiment in that a light transmitting phosphor 313 of a sphere is provided instead of the plate-like light transmitting phosphor 13 as shown in FIG. It is different.
The other components of the light source device 310 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 11, the light source device 310 of the present embodiment includes a light source unit 11 and a condenser lens 12.
, A translucent phosphor 313, a lens for taking in 14 and an optical fiber 15.
The translucent phosphor 313 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. The translucent fluorescent substance 313 emits fluorescence toward all directions centered on the condensing point X by providing the condensing point X of the laser light condensed by the condensing lens 12 at the center thereof. .

Further, in the light transmitting phosphor 313 of the sphere, as shown in FIG. 12A, the fluorescence emitted inside is mostly refracted at the interface between the light transmitting phosphor 313 and the air (the light emitting portion 313a) It is taken into the taking lens 14.
On the other hand, in the plate-like translucent fluorescent substance 13 described in the first embodiment etc., as shown in FIG. 12 (b), the fluorescence emitted inside is an interface between the translucent fluorescent substance 13 and the air ( The light is refracted at the light emitting portion 13 ba) and is taken into the taking lens 14 while widening at a wide angle.

Therefore, by using a spherical translucent phosphor 313 instead of the plate-like translucent phosphor 13,
The fluorescence emitted inside the translucent phosphor 313 can be guided to the capturing lens 14 without being substantially refracted.
As a result, the coupling efficiency of the fluorescence in the taking lens 14 is improved.
Light with higher brightness can be condensed on the first surface 15 a of five.

Further, in the present embodiment, the laser light is irradiated and focused so that the focusing point X is formed at the center of the translucent phosphor 313 of the sphere.
As a result, the fluorescence emitted toward all directions around the focal point X, which is the center of the sphere, is
It is emitted into the air at the same distance from the focusing point X regardless of where it is taken out.
As a result, it is possible to take out the fluorescence extracted from the light transmitting phosphor 313 of the sphere from any direction with substantially the same luminance.

Embodiment 5
It will be as follows if the light source device 410 which concerns on Embodiment 5 of this invention is demonstrated using FIG. 13 and FIG.
As shown in FIG. 13, the light source device 410 according to the present embodiment is a light source unit for irradiating the translucent fluorescent substance 413 having a rectangular parallelepiped (polyhedron) shape with laser light in two directions orthogonal to each other. The second embodiment differs from the first embodiment in that two laser focusing systems 411a and 411b including the focusing lens 11 and the focusing lens 12 are provided.

The other components of the light source device 410 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 13, the light source device 410 of the present embodiment includes the light source unit 11 and the condensing lens 1.
A laser condensing system 411 a including the light source unit 2, a laser condensing system 411 b including the light source unit 11 and the condensing lens 12, a translucent fluorescent substance 413, a capturing lens 14, and an optical fiber 15.

The laser focusing system 411 a is arranged such that the lens central axis of the focusing lens 12 is coaxial with the lens central axis of the taking-in lens 14 for taking in fluorescence.
That is, the laser beam emitted from the laser focusing system 411 a is focused on the translucent fluorescent substance 413 through the focusing lens 12, and causes the fluorescent light to be emitted in a portion centered on the focusing point X.
Then, the fluorescence emitted from the translucent fluorescent substance 413 is collected by the taking-in lens 14 disposed on a straight line with the laser light collecting system 411 a, and is irradiated to the first surface 15 a of the optical fiber 15.

The laser focusing system 411b is disposed along the direction in which the lens central axis of the focusing lens 12 is substantially orthogonal (crossed) to the lens central axis of the taking-in lens 14 for taking in fluorescence.
That is, the laser light emitted from the laser condensing system 411 b is condensed on the translucent fluorescent substance 413 via the condensing lens 12, and emits fluorescence at a portion centered on the condensing point X.
At this time, the laser light collected by the light collecting lens 12 of the laser light collecting system 411b is irradiated so as to be at the same light collecting point X as the laser light collected by the light collecting lens 12 of the laser light collecting system 411a. Be done.

Then, the fluorescent light emitted from the translucent fluorescent substance 413 is irradiated in all directions, and thus is collected by the taking-in lens 14 disposed along the direction orthogonal to the laser condensing system 411 b and an optical fiber The light is irradiated to the fifteenth first surface 15a.
In addition, as shown in FIG. 13, the laser focusing systems 411 a and 411 b are light transmitting phosphors 413.
Are disposed on the circumference centered on the light collecting point X formed inside.

Thereby, the translucent fluorescent substance 413 is a plurality of laser focusing systems 411 arranged at the same distance.
Laser light is emitted from a and 411b.
The translucent phosphor 413 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (hexahedron) shape as shown in FIG. 13 and FIG.
3a, an exit surface 413b, and an entrance surface 413c.

The incident surface 413a is a surface facing the output surface 413b on which the taking lens 14 is disposed, and the laser light emitted from the laser condensing system 411a is incident.
The emitting surface 413 b is a surface on the side where the capturing lens 14 is disposed, and is a laser condensing system 4.
Among the fluorescences that are excited by the laser light emitted from 11a and 411b and emitted in all directions, the emitted fluorescence is emitted to the side of the capturing lens 14.

The entrance surface 413c is a surface perpendicular to the entrance surface 413a and the exit surface 413b, and
The laser beam emitted from the laser focusing system 411b is incident.
In the light source device 410 according to the present embodiment, as shown in FIG.
, 411 b are condensed at a common condensing point X formed inside the translucent fluorescent substance 413.

As a result, since the light quantity of the laser light at the condensing point X is approximately doubled as compared with the configuration having only one laser condensing system, the excited fluorescence is also approximately doubled, and the luminance is further increased. It is possible to obtain an integrated light source.
Further, in the present embodiment, as shown in FIG.
The condensing point X of the laser beam irradiated by the two laser condensing systems 411a and 411b is formed such that the distance d1 from the incident surface 413a and the distance d2 from the incident surface 413c are substantially the same.

As described above, the condensing points X of the laser beams irradiated by the two laser condensing systems 411a and 411b are arranged such that the distances d1 and d2 from the respective incident surfaces 413a and 413c are substantially the same. Thus, the brightness of the fluorescence at the focusing point X can be further improved.
In the present embodiment, the configuration in which two laser focusing systems are provided has been described, but the present invention is not limited to this, and the laser focusing system is provided around a rectangular parallelepiped translucent phosphor. Three or more may be provided.

Embodiment 6
It will be as follows if the light source device 510 which concerns on Embodiment 6 of this invention is demonstrated using FIG. 15 and FIG.
The light source device 510 according to the present embodiment is, as shown in FIG. 15, a fluorescence taking-in system 514a so as to take in fluorescence from two directions orthogonal to the translucent fluorescent body 513 having a rectangular parallelepiped (polyhedron) shape. , 514 b are different from the first embodiment in that two 514 b are provided.

The other components of the light source device 510 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
A light source device 510 according to the present embodiment includes a light source unit 11 and a condenser lens 12 as shown in FIG.
And a fluorescence capturing system 514 a including a capturing lens 14 and an optical fiber 15, and a fluorescence capturing system 514 b including a capturing lens 14 and an optical fiber 15.

The fluorescence capturing system 514 a is disposed such that the lens central axis of the capturing lens 14 is coaxial with the lens central axis of the condensing lens 12 that condenses the laser light.
That is, in the fluorescence capturing system 514 a, the light is irradiated from the single light source unit 11 and the condensing lens 12 is
The fluorescent light generated by exciting the translucent phosphor 513 by the laser light collected by the
The light is collected by the taking-in lens 14 disposed in line with the collecting lens 12, and is irradiated onto the first surface 15 a of the optical fiber 15.

In the fluorescence capturing system 514 b, the lens central axis of the capturing lens 14 is relative to the lens central axis of the condensing lens 12 and the lens central axis of the capturing lens 14 of the fluorescence capturing system 514 a,
It is arranged along a substantially orthogonal (crossing) direction.
That is, the laser light emitted from the light source unit 11 is condensed on the translucent fluorescent body 513 through the condenser lens 12 and causes fluorescence to be emitted at a portion centered on the condensing point X.

At this time, the fluorescence generated inside the translucent phosphor 513 is emitted in all directions. Among the above, in the direction in which the fluorescence capturing systems 514a and 514b are disposed, fluorescence is emitted from emission surfaces 513b and 513c disposed at substantially the same distance from the condensing point X of the laser light.
The fluorescence emitted from the emission surfaces 513 b and 513 c is transmitted to the fluorescence uptake system 514 a, 5
In each of 14 b, the light is collected by the capturing lens 14 and irradiated to the first surface 15 a of the optical fiber 15.

Also, as shown in FIG. 15, the fluorescence uptake system 514a, 514b is a translucent fluorescent body 513.
Are disposed on the circumference centered on the light collecting point X formed inside.
Thereby, the translucent fluorescent substance 513 is provided with a plurality of fluorescence uptake systems 514 arranged at the same distance.
a, 514 b is irradiated with fluorescence.
The translucent phosphor 513 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (hexahedron) shape as shown in FIG. 15 and FIG.
3a, an exit surface 513b, and an exit surface 513c.

The incident surface 513a is a surface facing the output surface 513b on which the taking-in lens 14 is disposed, and the laser light emitted from the light source unit 11 through the condenser lens 12 is incident.
The emitting surface 513b is a surface on the side where the capturing lens 14 of the fluorescence capturing system 514a is disposed, and among the fluorescence excited by the laser light emitted from the light source unit 11 and emitted in all directions, fluorescence The emitted fluorescence is emitted to the side of the uptake system 514a.

The exit surface 513c is a surface perpendicular to the entrance surface 513a and the exit surface 513b, and
Among the fluorescence excited by the laser light emitted from the light source unit 11 and emitted in all directions, the emitted fluorescence is emitted to the side of the fluorescence capturing system 514b.
In the light source device 510 of the present embodiment, as shown in FIG. 15, the fluorescence taking-in system 514a emits fluorescence generated around the condensing point X of the laser light emitted from the light source unit 11 and condensed by the condensing lens 12. , 514b are disposed from the two directions as a light source.

Thereby, since fluorescence can be taken out from the single light source part 11 by two fluorescence uptake systems 514a and 514b, multiple fiber light sources can be provided.
Further, in the present embodiment, as shown in FIG. 16, the condensing point X of the laser beam irradiated by the single light source unit 11 in the translucent phosphor 513 is a distance d from the emission surface 513 b.
It is formed so that 3 and the distance d2 from the output surface 513c become substantially the same.

As described above, since the fluorescence extracted by the two fluorescence capturing systems 514a and 514b is disposed so as to be emitted from the emission surfaces 513b and 513c located at substantially the same distance from the condensing point X, substantially the same brightness is obtained. Two fiber sources can be obtained.
In the present embodiment, the configuration in which two fluorescence uptake systems are provided has been described, but the present invention is not limited to this, and three fluorescence uptake systems are provided around a rectangular parallelepiped translucent phosphor. The configuration provided above may be employed.

Seventh Embodiment
It will be as follows if the light source device 610 which concerns on Embodiment 7 of this invention is demonstrated using FIG.
The light source device 610 according to the present embodiment is different from the fifth embodiment in that a light transmitting phosphor 613 of a sphere is provided instead of the light transmitting phosphor of a rectangular parallelepiped as shown in FIG. There is.

The other components of the light source device 610 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 17, the light source device 610 of the present embodiment includes the light source unit 11 and the condensing lens 1.
A laser focusing system 611 a including the light source unit 2, a laser focusing system 611 b including the light source unit 11 and the focusing lens 12, a translucent fluorescent body 613, a capturing lens 14, and an optical fiber 15.

The laser focusing system 611 a is disposed such that the central axis of the focusing lens 12 is coaxial with the central axis of the taking-in lens 14 for taking in fluorescence.
That is, the laser beam emitted from the laser focusing system 611 a is focused on the center of the translucent phosphor 613 of the sphere through the focusing lens 12, and emits fluorescence at a portion centered on the focusing point X Let The fluorescence emitted from the translucent fluorescent substance 613 is transmitted to the laser condensing system 611a.
The light is collected by the taking-in lens 14 disposed on a straight line and irradiated to the first surface 15 a of the optical fiber 15.

The laser focusing system 611 b is disposed along a direction in which the lens central axis of the focusing lens 12 is substantially orthogonal to (crosses) the lens central axis of the taking-in lens 14 that takes in fluorescence.
That is, the laser beam emitted from the laser focusing system 611 b is focused on the center of the translucent fluorescent body 613 of the sphere through the focusing lens 12, and the fluorescent light is emitted in the portion around the focusing point X Let

At this time, the laser light condensed by the condensing lens 12 of the laser condensing system 611 b is the same as the laser light condensed by the condensing lens 12 of the laser condensing system 611 a. It irradiates so that it may become a central position (focusing point X) of.
Then, since the fluorescence emitted from the translucent fluorescent substance 613 is irradiated in all directions, it is condensed by the taking-in lens 14 disposed along the direction orthogonal to the laser condensing system 611b, and the optical fiber The light is irradiated to the fifteenth first surface 15a.

In addition, as shown in FIG. 17, the laser focusing systems 611 a and 611 b are light transmitting phosphors 613.
Are disposed on a spherical surface centered on the light condensing point X formed inside.
Thereby, the translucent fluorescent substance 613 is provided with a plurality of laser focusing systems 611 arranged at the same distance.
The laser beam is emitted from a, 611 b.
The translucent phosphor 613 is, for example, a single-crystal phosphor of YAG doped with Ce ions, and has a spherical shape, and a focusing point X of laser light is formed at the center of the sphere. .

In the light source device 610 of the present embodiment, as shown in FIG.
, And 611 b are condensed at a common condensing point X formed at the center of the translucent phosphor 613 of the sphere.
As a result, since the light quantity of the laser light at the condensing point X is approximately doubled as compared with the configuration having only one laser condensing system, the excited fluorescence is also approximately doubled, and the luminance is further increased. It is possible to obtain an integrated light source.

Further, in the present embodiment, since the spherical translucent phosphor 613 is used, the translucent phosphor 61 is used.
In the inside of 3, the focusing points X of the laser beams irradiated by the two laser focusing systems 611a and 611b are substantially the same distance from any incident plane.
Thus, the focusing points X of the laser beams irradiated by the two laser focusing systems 611a and 611b are arranged such that the distances from the respective incident planes are substantially the same.
The brightness of the fluorescence at the focusing point X can be further improved.

In the present embodiment, the configuration in which two laser focusing systems are provided has been described, but the present invention is not limited to this, and the laser focusing system is provided around the translucent phosphor of a sphere. Three or more may be provided.
Furthermore, in the present embodiment, the laser light is irradiated and focused so that the focusing point X is formed at the center of the translucent phosphor 613 of the sphere.

As a result, the fluorescence emitted toward all directions around the focal point X, which is the center of the sphere, is
It is emitted into the air at the same distance from the focusing point X regardless of where it is taken out.
As a result, it is possible to take out the fluorescence taken out from the light transmitting phosphor 613 of the sphere from any direction with substantially the same luminance.

(Embodiment 8)
The light source device 710 according to Embodiment 8 of the present invention is described below with reference to FIG.
The light source device 710 according to the present embodiment differs from the sixth embodiment in that a light transmitting phosphor 713 of a sphere is provided instead of the light transmitting phosphor of a rectangular parallelepiped as shown in FIG. There is.
The other components of the light source device 710 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

A light source device 710 according to the present embodiment includes a light source unit 11 and a condenser lens 12 as shown in FIG.
And a fluorescence uptake system 714 a including the uptake lens 14 and the optical fiber 15, and a fluorescence uptake system 714 b including the uptake lens 14 and the optical fiber 15.
The translucent phosphor 713 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape.

The fluorescence uptake systems 714a and 714b are disposed on a spherical surface centered on the translucent phosphor 713 of a sphere, as shown in FIG.
Thereby, the translucent fluorescent substance 713 is provided with a plurality of fluorescence uptake systems 714 disposed at the same distance.
A, 714 b is irradiated with fluorescence.
The fluorescence capture system 714a is arranged such that the lens central axis of the capture lens 14 is coaxial with the lens central axis of the condenser lens 12 for condensing the laser light.

That is, in the fluorescence capturing system 714a, the light is irradiated from the single light source unit 11 and the condensing lens 12 is
The fluorescence generated by exciting the translucent phosphor 713 by the laser light collected by the
The light is collected by the taking-in lens 14 disposed in line with the collecting lens 12, and is irradiated onto the first surface 15 a of the optical fiber 15.
In the fluorescence capturing system 714 b, the lens central axis of the capturing lens 14 is relative to the lens central axis of the focusing lens 12 and the lens central axis of the capturing lens 14 of the fluorescence capturing system 714 a,
It is arranged along a substantially orthogonal (crossing) direction.

That is, the laser light emitted from the light source unit 11 is condensed on the light transmitting phosphor 713 of the sphere through the condensing lens 12 and emits fluorescence at the center of the sphere (the condensing point X).
At this time, the fluorescence generated inside the translucent phosphor 713 of the sphere is emitted in all directions. Among these, in the direction in which the fluorescence capturing systems 714a and 714b are disposed, fluorescence is emitted from the emission surface of the sphere disposed at substantially the same distance from the condensing point X of the laser light.

And fluorescence emitted from translucent fluorescent substance 713 is fluorescence uptake system 714a, 714b.
Of the first surface 1 of the optical fiber
It is irradiated to 5a.
In the light source device 710 of the present embodiment, as shown in FIG. 18, the fluorescence taking-in system 714a, 714b generates the fluorescence generated at the condensing point X of the laser light emitted from the light source unit 11 and condensed by the condensing lens 12. Is taken out from the two directions where it is arranged, and it is considered as a fiber light source.

Thus, the fluorescence can be extracted from the single light source unit 11 by the two fluorescence capturing systems 714a and 714b, and therefore, a plurality of fiber light sources can be provided to emit light of the same luminance.
Further, in the present embodiment, the condensing point X of the laser light emitted by the single light source unit 11 is formed at the center of the sphere inside the translucent phosphor 713 of the sphere.

As a result, the fluorescent lights taken out by the two fluorescent light intake systems 714a and 714b are disposed so as to be respectively emitted from the light emitting surface which is at substantially the same distance from the condensing point X, and thus a fiber light source of approximately the same brightness You can get two.
In the present embodiment, the configuration in which two fluorescence uptake systems are provided has been described. However, the present invention is not limited to this, and three fluorescence uptake systems are provided around the translucent phosphor of a sphere. The configuration provided above may be employed.

(Embodiment 9)
The light source device 810 according to Embodiment 9 of the present invention is described below with reference to FIG.
The light source device 810 according to the present embodiment is, as shown in FIG.
This embodiment is different from the seventh and seventh embodiments in that two 11b and two fluorescence uptake systems 814a and 814b are provided.

The other components of the light source device 810 are the same as those of the light source device 10 according to the first embodiment, so the same reference numerals are given here and detailed description of the components will be omitted.
A light source device 810 according to the present embodiment is, as shown in FIG.
2, a laser focusing system 811 a including the light source unit 11 and the focusing lens 12, a light transmitting phosphor 813 of a sphere, and a fluorescence capturing system including the capturing lens 14 and the optical fiber 15. 814 a and fluorescence capture system 814 b including capture lens 14 and optical fiber 15.

The laser focusing systems 811a and 811b are disposed on a spherical surface centered on the translucent fluorescent body 813 of a sphere, as shown in FIG.
Thus, the translucent phosphor 813 is provided with a plurality of laser focusing systems 811 arranged at the same distance.
The laser beam is emitted from a and 811 b.
The laser focusing system 811 a is arranged such that the lens central axis of the focusing lens 12 is coaxial with the lens central axis of the capturing lens 14 of the fluorescence capturing system 814 a.

That is, the laser beam emitted from the laser focusing system 811 a is focused on the center of the translucent phosphor 813 of the sphere through the focusing lens 12 and emits fluorescence at a portion centered on the focusing point X Let The fluorescence emitted from the translucent fluorescent substance 813 is transmitted to the fluorescence uptake system 814a.
, And 814 b, and is focused on the first surface 15 a of the optical fiber 15.

In the laser focusing system 811 b, the lens central axis of the focusing lens 12 is a fluorescence capturing system 814 a,
It is disposed along the direction intersecting the lens central axis of the taking lens 14 of 814 b.
That is, the laser beam emitted from the laser focusing system 811 b is focused on the center of the translucent phosphor 813 of the sphere through the focusing lens 12, and emits fluorescence at a portion centered on the focusing point X Let

At this time, the laser light condensed by the condensing lens 12 of the laser condensing system 811 b is the same as the laser light condensed by the condensing lens 12 of the laser condensing system 811 a. It irradiates so that it may become a central position (focusing point X) of.
The translucent phosphor 813 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape.

Then, since the fluorescence emitted from the translucent fluorescent substance 813 is irradiated in all directions, two fluorescence taking-in systems 814 arranged along the direction intersecting with the laser focusing system 811 b.
a and 814 b are collected by the respective acquisition lenses 14, and the first of the optical fibers 15 is
The surface 15a is irradiated.
The fluorescence uptake systems 814a and 814b are disposed on a spherical surface centered on the translucent phosphor 813 of a sphere, as shown in FIG.

Thereby, the translucent fluorescent substance 813 is provided with a plurality of fluorescence uptake systems 814 arranged at the same distance.
a, 814 b is irradiated with fluorescence.
In the fluorescence capturing system 814 a, the lens central axis of the capturing lens 14 is a laser focusing system 811.
It is disposed to be coaxial with the central axis of the condenser lens 12 of a.
That is, in the fluorescence capturing system 814 a, the light is emitted from the two light source units 11 and the condensing lens 12 is
The fluorescent light generated by exciting the translucent phosphor 813 by the laser light collected by the
The light is collected by the pickup lens 14 and irradiated to the first surface 15 a of the optical fiber 15.

In the fluorescence capturing system 814 b, the central axis of the capturing lens 14 is a laser focusing system 811.
It is disposed along a direction intersecting with the lens central axis of each of the condenser lenses 12a and 811b and the lens central axis of the capturing lens 14 of the fluorescence capturing system 814a.
That is, the laser light emitted from the two light source units 11 is condensed on the spherical translucent fluorescent body 813 through the condensing lens 12 and emits fluorescence at the center of the sphere (the condensing point X).

At this time, the fluorescence generated inside the light transmitting phosphor 813 of the sphere is emitted in all directions. Among these, in the direction in which the fluorescence capturing systems 814a and 814b are disposed, fluorescence is emitted from the emission surface of a sphere disposed at substantially the same distance from the condensing point X of the laser light.
Then, the fluorescence emitted from the translucent fluorescent substance 813 is reflected by the fluorescence uptake system 814a, 814b.
Of the first surface 1 of the optical fiber
It is irradiated to 5a.

In the light source device 810 according to the present embodiment, as shown in FIG.
, 811 b and a plurality of fluorescence uptake systems 814 a, 814 b are disposed around the spherical translucent phosphor 813.
Thereby, the laser light emitted from the plurality of light source units 11 is focused on the center of the translucent phosphor 813 of a sphere, which is about twice as large as the configuration including the single light source unit 11. Luminescent fluorescence can be extracted.

Further, by arranging the fluorescence uptake systems 814a and 814b including the plurality of optical fibers 15 around the translucent fluorescent body 813 of the sphere, the fluorescence generated at the center of the sphere can be obtained with substantially the same luminance from any direction. Multiple items can be taken out.

(Embodiment 10)
The light source device 910 according to the tenth embodiment of the present invention is described below with reference to FIGS. 20 and 21.
The light source device 910 according to the present embodiment is, as shown in FIG.
This embodiment is different from the first embodiment in that a translucent fluorescent material 913 including a fluorescent reflection film (first surface) 913 a and a laser reflection / fluorescent transmission film (second surface) 913 b is provided.
The other components of the light source device 910 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 20, the light source device 910 of the present embodiment includes a light source unit 11 and a condenser lens 12.
, A translucent phosphor 913, a lens for taking in 14, and an optical fiber 15.
The translucent phosphor 913 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. And as shown in FIG. 21, the translucent fluorescent substance 913 has the laser transmission / fluorescent reflection film 913a and the laser reflection / fluorescent transmission film 913b inside. Further, in the spherical translucent phosphor 913, the laser light emitted from the light source unit 11 is condensed on the center of the sphere by the condensing lens 12 (condensing point X).

The laser transmitting / fluorescent reflecting film 913 a transmits the laser light emitted from the light source unit 11 and collected by the condensing lens 12, and reflects the fluorescence generated in the translucent phosphor 913. The laser transmitting / fluorescent reflecting film 913a is provided on the incident surface side of the laser light, as shown in FIG.
The laser reflection / fluorescent transmission film 913 b reflects the laser light emitted from the light source unit 11 and collected by the condenser lens 12, and transmits the fluorescence generated in the translucent phosphor 913. The laser reflection / fluorescent transmission film 913 b is provided on the emission surface side of fluorescence as shown in FIG.

Here, the laser transmission / fluorescent reflection film 913 a and the laser reflection / fluorescent transmission film 913 b are
The transparent fluorescent substance 913 can be formed into a film by methods such as evaporation and sputtering.
Thereby, since the translucent fluorescent substance 913 has the laser transmitting / fluorescent reflecting film 913 a, the translucent fluorescent substance 913 is irradiated to the laser light which is emitted from the light source unit 11 and collected by the condensing lens 12. Can be incident on the inside of the And about fluorescence emitted by the laser light condensed by the center (focusing point X) of the translucent fluorescent substance 913 of a sphere and emitted in all directions, the fluorescence is emitted on the incident side of the laser light It can be reflected to the side.

On the other hand, since the translucent fluorescent substance 913 has the laser reflection / fluorescent transmission film 913 b, the translucent fluorescent substance 9 is included in the laser light emitted from the light source unit 11 and collected by the condensing lens 12.
The laser light transmitted without being absorbed at 13 can be reflected again toward the center (focusing point X) of the translucent phosphor 913. And, the translucent phosphor 913 of the sphere
The fluorescence excited by the laser light condensed at the center of the light (focus point X) and emitted in all directions can be transmitted from the emission side where the capturing lens 14 is disposed to the outside.

In FIG. 21, the laser transmitting / fluorescent reflecting film 913 a and the laser reflecting / fluorescent transmitting film 913
It has been described by giving an example in which b is provided in substantially the same area. However, the present invention is not limited to this, and may be provided in different areas.
In addition, as shown in FIG. 21, the laser transmitting / fluorescent reflecting film 913a and the laser reflecting / fluorescent transmitting film 913b do not have to be disposed so as to surround the outer periphery of the translucent fluorescent substance 913.
The respective films may be provided at least on the incident part of the laser beam and the outgoing part of the fluorescence.

(Embodiment 11)
The light source device 1010 according to Embodiment 11 of the present invention is described below with reference to FIGS. 22 to 23.
As shown in FIG. 22, the light source device 1010 according to the present embodiment includes a plurality of laser focusing systems 1011 a and 1 in a direction intersecting the lens central axis of the taking-in lens 14 for taking out fluorescence.
The present embodiment is different from the above-described Embodiment 9 and the like in that 011b and 1011c are disposed, and a single-layer mirror-coated spherical translucent phosphor 1013 is used.

The other components of the light source device 1010 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 22, the light source device 1010 of the present embodiment includes a laser focusing system 1011 a including the light source unit 11 and the focusing lens 12, and a laser focusing system 1011 b including the light source unit 11 and the focusing lens 12. A laser focusing system 1011 c including the light source unit 11 and the focusing lens 12;
A translucent fluorescent substance 1013, a taking lens 14 and an optical fiber 15 are provided.

The laser focusing systems 1011a, 1011b, and 1011c are disposed on a spherical surface centered on the translucent phosphor 1013 of a sphere, as shown in FIG.
Thereby, the translucent fluorescent substance 1013 is provided with a plurality of laser focusing systems 10 arranged at the same distance.
Laser light is emitted from 11a, 1011b, and 1011c.
The laser focusing systems 1011a, 1011b, and 1011c are disposed along the direction intersecting the central axis of the taking-in lens 14 for taking out the fluorescence. Then, the laser focusing systems 1011a, 1011b, and 1011c focus the laser light emitted from the respective light source units 11 by the focusing lens 12, and the center of the light transmitting phosphor 1013 of the sphere (focusing point X) The laser beam is focused on the

The translucent phosphor 1013 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. And, as shown in FIG. 23, the translucent fluorescent substance 1013 has a laser transmitting / fluorescent reflecting mirror 1013 a and a laser reflecting / fluorescent transmitting mirror 1013 b.
The laser transmitting / fluorescent reflecting mirror 1013a is a laser focusing system 1011a, 1011b, 1
The laser light emitted from each light source unit 11 included in 011 c and collected by each condensing lens 12 is transmitted, and the laser light is emitted at the center (condensing point X) of the translucent phosphor 1013 of the sphere. It has the property of reflecting fluorescence.

The laser reflection / fluorescence transmission mirror 1013 b is a laser focusing system 1011 a, 1011 b, 1
Among the laser beams emitted from the respective light source units 11 included in 011 c and collected by the respective condensing lenses 12, the laser beams transmitted without being absorbed in the translucent phosphor 1013 are reflected and collected again It has the property of leading to the light spot X.
As described above, in the light source device 1010 of the present embodiment, the light transmitting phosphor 1013 of the sphere is provided with a wavelength selective mirror (laser transmission / fluorescent reflection mirror 1013a, laser reflection / fluorescent transmission mirror 1013b) .

As a result, by reflecting the laser light that has entered into the translucent fluorescent substance 1013 and transmitted without being absorbed toward the condensing point X, excitation of fluorescence at the condensing point X is further promoted, and It can be a high brightness light source.
In addition, a laser transmitting / fluorescent reflecting mirror 1013 a and a laser reflecting / fluorescent transmitting mirror 101 are provided at the laser light intake port and the fluorescence output port of the translucent phosphor 1013 respectively.
3b is arranged.

This makes it possible to prevent interception of the laser light capture and the fluorescence removal without providing the openings such as the capture window and the removal window.
Furthermore, in the present embodiment, as shown in FIG. 22, the respective laser focusing systems 1011a,
1011 b and 1011 c are arranged.

Thereby, the laser beams emitted from the plurality of laser beam focusing systems 1011a, 1011b, and 1011c are focused on the center (focusing point X) of the translucent phosphor 1013 of the sphere, and the reflected light is also focused on By reflecting on X, it is possible to obtain a light source with higher brightness.
In FIG. 23, the laser transmission / fluorescent reflection mirror 1013a and the laser reflection / fluorescent transmission mirror 1013b have been described by giving an example in which the areas are substantially the same. However, the present invention is not limited to this, and may be provided in different areas.

Further, as shown in FIG. 23, the laser transmitting / fluorescent reflecting mirror 1013 a and the laser reflecting / fluorescent transmitting mirror 1013 b do not have to be disposed so as to surround the outer periphery of the translucent phosphor 1013, and at least The respective films may be provided on the light incident portion and the fluorescence emitting portion.

(Embodiment 12)
The light source device 1110 according to the twelfth embodiment of the present invention is described below with reference to FIG.
In the light source device 1110 according to the present embodiment, as shown in FIG.
While the laser beam condensed from the taking-in window (first opening) 1113a formed in 3 is made incident, taking-in arranged along a direction substantially orthogonal (intersecting) to the lens central axis of the condensing lens 12 The tenth embodiment is different from the tenth embodiment and the like in that fluorescence is extracted from an extraction window (second opening) 1113 b in which the lens 14 is disposed opposite to the first embodiment.

The other components of the light source device 1110 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
The light source device 1110 according to the present embodiment includes, as shown in FIG.
2, a translucent fluorescent substance 1113, a taking lens 14, and an optical fiber 15.

The light source unit 11 and the focusing lens 12 are disposed at positions not coaxial with the capturing lens 14 for taking out fluorescence, and along a direction intersecting the central axis of the taking lens 14.
The translucent phosphor 1113 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. The translucent fluorescent body 1113 has an intake window 1113 a formed at a position facing the condenser lens 12, an extraction window 1113 b formed at a position facing the intake lens 14, and a reflective film 1113 c. doing.

The taking-in window 1113 a is an opening formed at the taking-in position of the laser light in the translucent fluorescent substance 1113 of the sphere, and guides the laser light collected by the condensing lens 12 to the condensing point X.
The extraction window 1113 b is an opening formed to extract fluorescence toward the capturing lens 14 and the optical fiber 15, and extracts the fluorescence emitted at the condensing point X.

The reflecting film 1113 c reflects, toward the condensing point X, the laser beam transmitted without being absorbed in the light-transmissive phosphor 1113 among the laser beams incident through the taking-in window 1113 a. Further, the reflection film 1113c reflects the fluorescence emitted in the direction different from the extraction window 1113b to the direction of the extraction window 1113b among the fluorescence emitted in all directions at the condensing point X and emitted in all directions.

As a result, the laser focusing system (the light source unit 11 and the focusing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with one another. Each of the reflected lights of the above can be used to obtain an even brighter light source.
In the present embodiment, the configuration in which the laser focusing system (the light source unit 11 and the focusing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are provided one by one has been described. However, the present invention is not limited to this.

For example, a laser focusing system (the light source unit 11 and the focusing lens 12 is provided around the translucent phosphor of a sphere)
) And a fluorescence uptake system (intake lens 14 and optical fiber 15) may be provided.

(Embodiment 13)
The light source device 1210 according to the thirteenth embodiment of the present invention is described below with reference to FIG.
A light source device 1210 according to the present embodiment is, as shown in FIG.
The third embodiment is different from the twelfth embodiment in that three laser focusing systems (the light source unit 11 and the focusing lens 12) are provided around 3.
The other components of the light source device 1210 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 25, the light source device 1210 of the present embodiment includes a laser focusing system 1211 a including the light source unit 11 and the focusing lens 12, and a laser focusing system 1211 b including the light source unit 11 and the focusing lens 12. A laser focusing system 1211 c including the light source unit 11 and the focusing lens 12;
A translucent fluorescent body 1213, a taking lens 14 and an optical fiber 15 are provided.
The laser focusing systems 1211 a to 1211 c are, as shown in FIG.
It is arranged on the spherical surface centering on 13.

Thereby, the translucent fluorescent substance 1213 is provided with a plurality of laser focusing systems 12 arranged at the same distance.
Laser light is emitted from 11a, 1211b and 1211c.
Also, the laser focusing systems 1211 a, 1211 b and 1211 c are each a translucent phosphor 1.
The laser light is condensed to the center (focusing point X) of the translucent phosphor 1213 through the intake windows (first openings) 1213 a, 1213 b and 1213 c formed in 213.

The translucent phosphor 1213 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. And the translucent fluorescent substance 1213 is a laser condensing system 1211a.
Window 1213a-12 formed at a position facing each condenser lens 12-1212c.
13c and an extraction window (second opening) 12 formed at a position facing the taking lens 14
13 d and a reflective film 1213 e.

The intake windows 1213 a to 1213 c are openings formed at the laser light intake position in the translucent fluorescent body 1213 of a sphere, and guide the laser light focused by the focusing lens 12 to the focusing point X.
The extraction window 1213 d is an opening formed for extracting fluorescence toward the capturing lens 14 and the optical fiber 15, and extracts the fluorescence emitted at the condensing point X.

The reflective film 1213 e is a laser beam that has been transmitted without being absorbed in the translucent phosphor 1213 among the laser beams that have been incident through the intake windows 1213 a to 1213 c,
It is reflected toward the focusing point X. Further, the reflection film 1213e reflects the fluorescence emitted in the direction opposite to the extraction window 1213d out of the fluorescence emitted in all directions by emitting light at the condensing point X toward the extraction window 1213d.

As a result, the laser focusing system (the light source unit 11 and the focusing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with one another. Each of the reflected lights of the above can be used to obtain an even brighter light source.

(Embodiment 14)
The light source device 1310 according to the fourteenth embodiment of the present invention is described below with reference to FIG.
In the light source device 1310 according to the present embodiment, as shown in FIG.
The third embodiment is different from the twelfth and thirteenth embodiments in that six laser focusing systems (the light source unit 11 and the focusing lens 12) are provided around three.
The other components of the light source device 1310 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 26, the light source device 1310 of this embodiment includes a laser focusing system 1311 a including the light source unit 11 and the focusing lens 12, and a laser focusing system 1311 b including the light source unit 11 and the focusing lens 12. A laser focusing system 1311 c including the light source unit 11 and the focusing lens 12;
A laser focusing system 1311 d including the light source unit 11 and the focusing lens 12, a laser focusing system 1311 e including the light source unit 11 and the focusing lens 12, and a laser focusing system 1311 f including the light source unit 11 and the focusing lens 12 A translucent fluorescent body 1313, a taking lens 14 and an optical fiber 15 are provided.

The laser focusing systems 1311a to 1311f are, as shown in FIG.
It is arranged on the spherical surface centering on 13.
Thereby, the translucent fluorescent substance 1313 is provided with a plurality of laser focusing systems 13 arranged at the same distance.
Laser light is emitted from 11a to 1311f.
Also, the laser focusing systems 1311 a to 1311 f have intake windows (first openings) 1313 a, 1313 b, 1313 c, 1313 d, 13 formed in the translucent fluorescent substance 1313 respectively.
Laser light is condensed to the center (focusing point X) of the translucent fluorescent substance 1313 via 13e and 1313f.

The translucent phosphor 1313 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. And the translucent fluorescent substance 1313 is a laser condensing system 1311a.
Intake windows 1313a to 1313 formed at positions facing the respective condensing lenses 12 to 1313f
13f and an extraction window (first opening) 13 formed at a position facing the taking lens 14
It has 13 g and a reflective film 1313 h.

The taking-in windows 1313 a to 1313 f are openings formed at the taking-in position of the laser light in the translucent fluorescent body 1313 of a sphere, and guide the laser light collected by the condensing lens 12 to the condensing point X.
The extraction window 1313 g is an opening formed for extracting fluorescence toward the capturing lens 14 and the optical fiber 15, and extracts the fluorescence emitted at the condensing point X.

The reflecting film 1313 h emits light at the condensing point X by the laser light incident through the taking-in windows 1313 a to 1313 f, and out of the fluorescence emitted in all directions, the taking-out window 1313
The fluorescence emitted in the direction opposite to g is reflected toward the extraction window 1313 g.
As a result, by arranging the laser focusing system (the light source unit 11 and the focusing lens 12) and the fluorescence taking-in system (the taking-in lens 14 and the optical fiber 15) not to be coaxial, reflected light of fluorescence is used. It is possible to obtain a light source with even higher brightness.

(Fifteenth Embodiment)
The light source device 1410 according to the fifteenth embodiment of the present invention is described below with reference to FIG.
In the light source device 1410 according to the present embodiment, as shown in FIG.
Embodiment 12 is different from Embodiment 12 in that a plurality of fluorescence capture systems 1414 a and 1414 b are disposed at positions not coaxial with a single laser focusing system (light source unit 11 and focusing lens 12) with 3 as a center. Are different.

The other components of the light source device 1410 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 27, the light source device 1410 of the present embodiment includes the light source unit 11 and the condensing lens 1.
2, a fluorescence uptake system 1414 a including a translucent phosphor 1413, an uptake lens 14 and an optical fiber 15, and a fluorescence uptake system 14 including an uptake lens 14 and an optical fiber 15
And 14b.

The laser condensing system (the light source unit 11 and the condensing lens 12) has a center of the translucent fluorescent substance 1413 via the take-in window (first opening) 1413a formed in the translucent fluorescent substance 1413. Focus on a focusing point X).
The fluorescence uptake systems 1414 a and 1414 b are respectively disposed at positions not coaxial with the laser focusing system on the spherical surface centered on the translucent fluorescent body 1413 of the sphere. The fluorescence uptake systems 1414 a and 1414 b are disposed at the center (focusing point X) of the translucent fluorescent substance 1413 through the extraction windows (second openings) 1413 b and 1413 c formed in the translucent fluorescent substance 1413.
To take out the fluorescent light emitted at the
The light is condensed on the surface 15a.

The translucent phosphor 1413 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a spherical shape. And, the translucent fluorescent substance 1013 has an intake window 1413a,
It has extraction windows 1413 b and 1413 c and a reflective film 1413 d.
The taking-in window 1413 a is an opening formed at the taking-in position of the laser light in the translucent fluorescent substance 1413 of a sphere, and guides the laser light collected by the condensing lens 12 to the condensing point X.

The extraction windows 1413 b and 1413 c have a lens 14 for capturing fluorescence and an optical fiber 15.
Is an opening formed for taking out in the direction of and the fluorescence emitted at the condensing point X is taken out.
The reflection film 1413d emits light at the condensing point X by the laser light incident through the taking-in window 1413a, and out of the fluorescence emitted in all directions, the taking-out windows 1413b and 1413
The fluorescence emitted in the direction different from c is reflected toward the extraction windows 1413 b and 1413 c.

As a result, the laser focusing system (the light source unit 11 and the focusing lens 12) and the fluorescence capturing system (the capturing lens 14 and the optical fiber 15) are arranged so as not to be coaxial with one another. Each of the reflected lights of the above can be used to obtain a light source with higher brightness.

(Sixteenth Embodiment)
The light source device 1510 according to Embodiment 16 of the present invention is described below with reference to FIG.
As shown in FIG. 28, the light source device 1510 according to this embodiment includes a concave mirror 1516a that reflects laser light to the outside of a translucent phosphor 1513 having a cube (polyhedron) shape, and a concave mirror 1516b that reflects fluorescence. Is different from the twelfth embodiment in that the second embodiment is provided.
The other components of the light source device 1510 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 28, the light source device 1510 of the present embodiment includes the light source unit 11 and the condensing lens 1.
2, translucent fluorescent substance 1513, taking-in lens 14, optical fiber 15, concave mirror [1
516a and 1516b.
The translucent phosphor 1513 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a cubic shape. The translucent fluorescent substance 1513 receives the laser light from the incident surface 1513 a and emits fluorescence from the output surface 1513 b intersecting the incident surface 1513 a.

The concave mirror 1516 a is disposed to face the surface facing the incident surface 1513 a of the translucent fluorescent substance 1513. The concave mirror 1516 a is an incident surface 1513 a of the translucent phosphor 1513.
The laser beam transmitted from the surface facing the light source is reflected toward the condensing point X.
The concave mirror 1516 b is disposed so as to face the surface of the translucent fluorescent substance 1513 facing the emission surface 1513 b. Then, the concave mirror 1516 b emits fluorescence at all points in the light condensing point X of the translucent fluorescent substance 1513 and emits fluorescence transmitted from the surface facing the light emitting surface 1513 b among the fluorescence emitted in all directions. Reflect towards.

In the light source device 1510 according to the present embodiment, as described above, the cube-shaped translucent fluorescent substance 151
The concave mirror 1516 a that reflects the laser beam and the concave mirror 151 that reflects the fluorescence to the outside of
6b are provided respectively.
As a result, it is possible to obtain the same effect as that of each of the above embodiments that a light source with higher brightness can be obtained without providing a member having the function of reflecting laser light or fluorescence inside the translucent fluorescent substance. it can.

In the configuration of the present embodiment, in the case of providing a plurality of laser focusing systems, it is perpendicular to a plane including the lens center axis of the focusing lens 12 and the lens center axis of the taking lens 14 shown in FIG. A laser focusing system may be provided which emits laser light from the direction (direction perpendicular to the paper surface).

(Seventeenth Embodiment)
The light source device 1610 according to the seventeenth embodiment of the present invention is described below with reference to FIG.
As shown in FIG. 29, the light source device 1610 according to the present embodiment includes two laser focusing systems 1611 a, which are provided at mutually opposing positions outside the translucent phosphor 1613 having a cubic (polyhedral) shape. 1611b and a fluorescence uptake system (capture lens 14)
In the first embodiment, a concave mirror 1616 for reflecting fluorescence is provided at a position facing the
It is different from 6.

The other components of the light source device 1610 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.
As shown in FIG. 29, the light source device 1610 of the present embodiment includes a laser focusing system 1611 a including the light source unit 11 and the focusing lens 12, and a laser focusing system 1611 b including the light source unit 11 and the focusing lens 12. A translucent fluorescent body 1613, a taking lens 14, an optical fiber 15, and a concave mirror 1616 are provided.

The laser focusing systems 1611 a and 1611 b are disposed on a circumference centered on the focusing point X formed inside the cubic translucent fluorescent body 1613 as shown in FIG.
Thereby, the translucent fluorescent substance 1613 is provided with a plurality of laser focusing systems 16 arranged at the same distance.
Laser light is emitted from 11a and 1611b.
The translucent phosphor 1613 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a cubic shape. The translucent fluorescent material 1613 receives the laser light from the incident surfaces 1613 a and 1613 b facing each other, and the incident surfaces 1613 a and 1613.
The fluorescence is extracted from the emitting surface 1613 c intersecting with 13 b.

The concave mirror 1616 is disposed to face the surface facing the light emitting surface 1613 c of the translucent fluorescent substance 1613. Then, the concave mirror 1616 emits the fluorescence emitted from the surface facing the light emitting surface 1613 c among the fluorescence emitted in all directions by emitting light at the condensing point X of the translucent fluorescent substance 1613 to the condensing point X. Reflect towards.
In the light source device 1610 of the present embodiment, as described above, the cube-shaped translucent phosphor 161
Two laser focusing systems 1611 a and 1611 provided at mutually opposing positions on the outside of
While arranging b, the concave mirror 1616 which reflects fluorescence is provided.

As a result, it is possible to obtain the same effect as that of each of the above-described embodiments that a light source with higher brightness can be obtained without providing a member having a function of reflecting fluorescence inside the translucent fluorescent substance.

(Embodiment 18)
The light source device 1710 according to the eighteenth embodiment of the present invention is described below with reference to FIG.
As shown in FIG. 30, the light source device 1710 according to the present embodiment emits laser light from a plurality of directions to the incident surface 1713a of the translucent phosphor 1713 having a rectangular parallelepiped shape (plate shape) to be common. The second embodiment differs from the first embodiment in that the light is collected at the light collection point X.
The other components of the light source device 1710 are the same as those of the light source device 10 according to the first embodiment, and thus the same reference numerals are given here and detailed description of the components will be omitted.

As shown in FIG. 30, the light source device 1710 of this embodiment includes a laser focusing system 1711 a including the light source unit 11 and the focusing lens 12, and a laser focusing system 1711 b including the light source unit 11 and the focusing lens 12. A translucent fluorescent body 1713, a taking lens 14 and an optical fiber 15 are provided.
The laser focusing system 1711 a and the laser focusing system 1711 b are disposed on a circumference centered on the focusing point X formed inside the rectangular parallelepiped light transmitting phosphor 1713 as shown in FIG. There is.

Thereby, the translucent fluorescent substance 1713 is provided with a plurality of laser focusing systems 17 arranged at the same distance.
Laser light is emitted from 11a and 1711b.
Further, both of the laser focusing systems 1711 a and 1711 b irradiate the laser light to the incident surface 1713 a of the translucent fluorescent substance 1713. The laser focusing system 1711 a and the laser focusing system 1711 b are arranged such that the lens central axis of the focusing lens 12 is oblique to the lens central axis of the taking-in lens 14 on the side from which fluorescence is taken. ing.

The translucent phosphor 1713 is, for example, a YAG single crystal phosphor doped with Ce ions, and has a rectangular parallelepiped (plate-like) shape. Then, in the translucent fluorescent substance 1713, the laser light which has been incident on the incident surface 1713a from the two laser condensing systems 1711a and 1711b is condensed at a common condensing point X. Then, the fluorescence excited by the laser beams emitted from the two laser focusing systems 1711 a and 1711 b is extracted from the emission surface 1713 b and is focused on the first surface 15 a of the optical fiber 15 by the capturing lens 14.

In the light source device 1710 according to the present embodiment, as described above, the rectangular parallelepiped (plate-like) translucent phosphor 1
When the single incident surface 1713a of 713 is irradiated with laser light from a plurality of locations, the light is condensed at a common condensing point X inside the translucent phosphor 1713.
As a result, since the light amount of the laser light to be collected is approximately doubled at the light collection point X of the translucent phosphor 1713 as compared with the configuration having only one laser light collection system, excitation is performed. The fluorescence is also approximately doubled, and a light source with higher brightness can be obtained.

[Other embodiments]
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary of invention.
(A)
In the above embodiment, an example using a plate-like or spherical translucent fluorescent material has been described. However, the present invention is not limited to this.
For example, a translucent phosphor having another shape such as an ellipsoid or a polygon may be used.

(B)
In the above embodiments, the contents of the respective embodiments have been described by combining a spherical phosphor, a plate, a polyhedral translucent phosphor, a single or a plurality of laser light collecting systems, and a single or a plurality of fluorescence capturing systems. However, the present invention is not limited to this.
For example, the configuration is not limited to the combination described in the above embodiment, and may be a configuration realized by a combination other than the above embodiment.

(C)
In the above embodiment, an example in which the present invention is applied to the light source device 10 of the confocal measurement device (distance measurement sensor) 50 has been described. However, the present invention is not limited to this.

For example, as a distance measurement sensor on which the light source device of the present invention is mounted, not only a distance measurement sensor such as a confocal measurement device but also another distance measurement sensor may be used.
In addition, as the light source device, the present invention can also be applied as a light source device for a headlight or an endoscope.

The light source device of the present invention is widely applicable as various light source devices because it has the effect of being able to obtain a light source having higher luminance than in the prior art.

DESCRIPTION OF SYMBOLS 10 light source device 11 light source part 12 condensing lens 13 translucent fluorescent substance 13a incident surface 13b exit surface 13ba output part 14 lens for taking-in 15 optical fiber 15a 1st surface 15b 2nd surface 20 fluorescence light source part 20a incident side cross section 20b diameter Small cross section 20c Output side cross section 50 Confocal measurement device (ranging sensor)
51 Head 51a Diffractive lens (chromatic aberration lens)
51b Objective lens 51c Condensing lens 52 Optical fiber 53 Controller 54 Monitor 55a, 55b Optical fiber 56 Branching optical fiber 57 Spectrometer 57a Concave mirror 57b Diffraction grating 57c Condensing lens 58 Imaging device (light receiving part)
59 Control circuit unit (measurement unit)
DESCRIPTION OF SYMBOLS 110 light source device 113 translucent fluorescent substance 113a incident surface 113b output surface 116 concave mirror 120 fluorescent light source part 210 light source device 216 concave mirror 220 fluorescent light source part 310 light source device 313 translucent fluorescent substance 313a emitting part 410 light source device 411a, 411b laser collection Light system 413 Translucent phosphor 413a Incident surface 413b Output surface 413c Incident surface 510 Light source device 513 Translucent phosphor 513a Incident surface 513b, 513c Output surface 514a, 514b Fluorescence capture system 610 Light source device 611a, 611b Laser condensing system 613 translucent fluorescent substance 710 light source apparatus 713 translucent fluorescent substance 714a, 714b fluorescence taking-in system 810 light source apparatus 811a, 811b laser condensing system 813 translucent fluorescent substance 814a, 814b fluorescence taking-in system 910 light source apparatus 913 translucent Phosphor 913a Laser Over / fluorescence reflection film (first surface)
913b Laser reflection / fluorescent transmission film (second surface)
1010 light source device 1011a, 1011b, 1011c laser condensing system 1013 translucent fluorescent substance 1013a laser transmitting / fluorescent reflecting mirror 1013b laser reflecting / fluorescent transmitting mirror 1110 light source apparatus 1113 translucent fluorescent substance 1113a taking-in window (first opening)
1113b Extraction window (second opening)
1113 c Reflective film 1210 Light source devices 1211 a to 1211 c Laser focusing system 1213 Translucent phosphors 1213 a to 1213 c Intake window (first opening)
1213d Extraction window (second opening)
1213 e Reflecting film 1310 Light source devices 1311 a to 1311 f Laser focusing system 1313 Translucent fluorescent substances 1313 a to 1313 f Taking in window (first opening)
1313g Extraction window (second opening)
1313 h Reflective film 1410 Light source device 1413 Translucent phosphor 1413 a Take-in window (first opening)
1413b, 1413c Extraction window (second opening)
1413d Reflective films 1414a and 1414b Fluorescence uptake system 1510 Light source device 1513 Translucent phosphor 1513a Incident surface 1513b Output surface 1516a and 1516b Concave mirror 1610 Light source device 1611a and 1611b Laser condensing system 1613 Translucent phosphor 1613a, 1613b Incident surface 1613c Emitting surface 1616 Concave mirror 1710 Light source device 1711a, 1711b Laser condensing system 1713 Translucent phosphor 1713a Incident surface 1713b Emitting surface A1 Central axis A2 Lens central axis d1, d2, d3 Distance T Measurement object X Focusing point

Claims (14)

A light source unit that emits a laser beam;
A condensing lens that condenses the laser light emitted from the light source unit;
A translucent fluorescent substance which internally has a condensing point of the laser light condensed by the condensing lens and emits fluorescence at a portion through which the laser light is transmitted;
An intake lens for condensing the fluorescence emitted at least in the translucent phosphor;
A fiber which irradiates the first end face with the fluorescence collected by the taking-in lens and emits the fluorescence from a second end face opposite to the first end face;
Equipped with
A plurality of fluorescence capturing systems including the capturing lens and the fiber are provided for a single light transmitting phosphor.
Light source device. The taking lens is disposed such that the lens central axis is oblique to the lens central axis of the condensing lens.
The light source device according to claim 1. A light source unit that emits a laser beam;
A condensing lens that condenses the laser light emitted from the light source unit;
A translucent fluorescent substance which internally has a condensing point of the laser light condensed by the condensing lens and emits fluorescence at a portion through which the laser light is transmitted;
An intake lens for condensing the fluorescence emitted at least in the translucent phosphor;
A fiber which irradiates the first end face with the fluorescence collected by the taking-in lens and emits the fluorescence from a second end face opposite to the first end face;
Equipped with
The plurality of fluorescence capture systems including the capture lens and the fiber are arranged such that the capture lens is positioned on one spherical surface centered on the translucent phosphor.
Light source device. A plurality of laser focusing systems including the light source unit and the focusing lens are provided for a single translucent phosphor.
The light source device according to claim 3. The plurality of laser focusing systems are arranged such that the focusing lens is located on one spherical surface centered on the translucent phosphor.
The light source device according to claim 4. The translucent phosphor has a first surface that transmits the laser light and reflects the fluorescence, and a second surface that reflects the laser light and transmits the fluorescence.
The light source device according to any one of claims 3 to 5. It is disposed on the incident surface side of the translucent fluorescent material, and transmits the laser light emitted from the light source unit, and on the incident surface side of the fluorescence emitted from the translucent fluorescent material. It further comprises a concave mirror for reflecting the emitted fluorescence towards the translucent phosphor.
The light source device according to any one of claims 3 to 6. It is disposed on the emission surface side of the translucent phosphor, and reflects the laser light that has been emitted from the light source unit and has passed through the translucent phosphor, and is emitted from the translucent phosphor It further comprises a concave mirror which transmits the fluorescence emitted to the emission surface side among the fluorescence.
The light source device according to any one of claims 3 to 6. The concave mirror is a dichroic mirror or a perforated mirror having an opening.
The light source device according to claim 7. A light source unit that emits a laser beam;
A condensing lens that condenses the laser light emitted from the light source unit;
A translucent fluorescent material having a condensing point of the laser light condensed by the condensing lens provided therein, emitting fluorescence at a portion through which the laser light is transmitted, and having a spherical shape;
An intake lens for condensing the fluorescence emitted from the translucent phosphor;
A fiber which irradiates the first end face with the fluorescence collected by the taking-in lens and emits the fluorescence from a second end face opposite to the first end face;
And further
A plurality of fluorescence capturing systems including the capturing lens and the fiber are disposed on one spherical surface centered on the translucent phosphor.
Light source device. The capturing lens is disposed such that a central axis of the lens is coaxial with an optical axis of the laser beam emitted from the light source unit and collected by the collecting lens.
The light source device according to claim 10. The taking lens is disposed such that the lens central axis is oblique to the lens central axis of the condensing lens.
The light source device according to claim 10. A light source device according to any one of claims 1 to 12;
A light receiving unit that receives reflected light of light emitted from the light source device;
A measuring unit that measures the distance to the object based on the amount of light received by the light receiving unit;
Ranging sensor equipped with. It further has a chromatic aberration focusing lens through which light including a plurality of wavelengths output from the light source device passes,
The light receiving unit receives the reflected light of the light including the plurality of wavelengths irradiated to the object via the chromatic aberration focusing lens.
The measuring unit measures the distance to the object based on the wavelength of the reflected light at which the amount of light received by the light receiving unit is maximum.
The distance measuring sensor according to claim 13.

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