JP6690214B2 - パターン描画装置 - Google Patents

パターン描画装置 Download PDF

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Publication number
JP6690214B2
JP6690214B2 JP2015240116A JP2015240116A JP6690214B2 JP 6690214 B2 JP6690214 B2 JP 6690214B2 JP 2015240116 A JP2015240116 A JP 2015240116A JP 2015240116 A JP2015240116 A JP 2015240116A JP 6690214 B2 JP6690214 B2 JP 6690214B2
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Prior art keywords
substrate
scanning
pattern
light
clock signal
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JP2015240116A
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Japanese (ja)
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JP2017107036A5 (enExample
JP2017107036A (ja
Inventor
義昭 鬼頭
義昭 鬼頭
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Nikon Corp
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Nikon Corp
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  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2015240116A 2015-12-09 2015-12-09 パターン描画装置 Active JP6690214B2 (ja)

Priority Applications (1)

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JP2015240116A JP6690214B2 (ja) 2015-12-09 2015-12-09 パターン描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015240116A JP6690214B2 (ja) 2015-12-09 2015-12-09 パターン描画装置

Publications (3)

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JP2017107036A JP2017107036A (ja) 2017-06-15
JP2017107036A5 JP2017107036A5 (enExample) 2018-12-06
JP6690214B2 true JP6690214B2 (ja) 2020-04-28

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JP2015240116A Active JP6690214B2 (ja) 2015-12-09 2015-12-09 パターン描画装置

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7169746B2 (ja) * 2018-02-06 2022-11-11 Ｊｓｗアクティナシステム株式会社 レーザ剥離装置、レーザ剥離方法、及び有機ｅｌディスプレイの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178072A (ja) * 1983-03-29 1984-10-09 Nippon Kogaku Kk <Nikon> パタ−ン描画装置
US6178031B1 (en) * 1999-12-20 2001-01-23 Xerox Corporation Raster output scanning system having scan line non-linearity compensation means
JP2004004510A (ja) * 2002-04-17 2004-01-08 Ricoh Co Ltd 光走査装置及び画像形成装置
JP4182515B2 (ja) * 2003-05-08 2008-11-19 株式会社オーク製作所 パターン描画装置
TWI684836B (zh) * 2014-04-01 2020-02-11 日商尼康股份有限公司 圖案描繪裝置
CN109212748B (zh) * 2014-04-28 2021-05-18 株式会社尼康 光束扫描装置及光束扫描方法

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JP2017107036A (ja) 2017-06-15

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