JP6689691B2 - Wiring board and manufacturing method thereof - Google Patents

Wiring board and manufacturing method thereof Download PDF

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Publication number
JP6689691B2
JP6689691B2 JP2016137740A JP2016137740A JP6689691B2 JP 6689691 B2 JP6689691 B2 JP 6689691B2 JP 2016137740 A JP2016137740 A JP 2016137740A JP 2016137740 A JP2016137740 A JP 2016137740A JP 6689691 B2 JP6689691 B2 JP 6689691B2
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Japan
Prior art keywords
layer
wiring
wiring board
insulating layer
pad
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JP2016137740A
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Japanese (ja)
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JP2018010931A (en
JP2018010931A5 (en
Inventor
豊明 酒井
豊明 酒井
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2016137740A priority Critical patent/JP6689691B2/en
Priority to US15/645,017 priority patent/US10170405B2/en
Publication of JP2018010931A publication Critical patent/JP2018010931A/en
Publication of JP2018010931A5 publication Critical patent/JP2018010931A5/ja
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Publication of JP6689691B2 publication Critical patent/JP6689691B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
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    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K3/4617—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination characterized by laminating only or mainly similar single-sided circuit boards
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Description

本発明は、配線基板及びその製造方法に関する。   The present invention relates to a wiring board and a method for manufacturing the same.

従来、薄型化するために、１層の絶縁層と１層の配線層を備えた配線基板が知られている。この配線層の一方の面は絶縁層の一方の側から露出し、他方の面は絶縁層の他方の側に設けられた開口部内に露出している。   Conventionally, a wiring board including one insulating layer and one wiring layer for reducing the thickness is known. One surface of this wiring layer is exposed from one side of the insulating layer, and the other surface is exposed in an opening provided on the other side of the insulating layer.

このような配線基板において、配線層は、例えば、開口部を備えたレジスト層を形成し、レジスト層の開口部内に電解めっき法等により一定のめっき厚の金属を析出させた後、レジスト層を剥離して形成される（例えば、特許文献１参照）。   In such a wiring board, for the wiring layer, for example, a resist layer having an opening is formed, and a metal having a certain plating thickness is deposited in the opening of the resist layer by electrolytic plating or the like, and then the resist layer is formed. It is formed by peeling (see, for example, Patent Document 1).

特開２０１１−１２４５５５号公報JP, 2011-124555, A

しかしながら、配線層において、所望の厚さにめっき厚を形成した場合、ファインパターン部でのレジスト層のアスペクト比はラフパターン部と比較すると相対的に大きくなる。めっき工程の後レジスト層を剥離するが、レジスト層の剥離は、ラフパターン部では容易であるが、アスペクト比が大きなファインパターン部では剥離不良が発生し易くなる。又、ファインパターン部での剥離不良は、めっき厚が厚くなればなるほど発生し易い。ここで、ファインパターン部とはライン／スペースが２０μｍ／２０μｍ以下の部分、ラフパターン部とはライン／スペースが２０μｍ／２０μｍより大きい部分であるとする。   However, when the plating thickness is formed to a desired thickness in the wiring layer, the aspect ratio of the resist layer in the fine pattern portion becomes relatively larger than that in the rough pattern portion. Although the resist layer is peeled off after the plating step, peeling of the resist layer is easy in the rough pattern portion, but peeling failure is likely to occur in the fine pattern portion having a large aspect ratio. Further, the peeling failure in the fine pattern portion is more likely to occur as the plating thickness increases. Here, the fine pattern portion is a portion where the line / space is 20 μm / 20 μm or less, and the rough pattern portion is a portion where the line / space is larger than 20 μm / 20 μm.

本発明は、上記の点に鑑みてなされたものであり、レジスト層の剥離不良が発生し難い構造の配線基板を提供することを課題とする。   The present invention has been made in view of the above points, and an object of the present invention is to provide a wiring board having a structure in which peeling failure of a resist layer is unlikely to occur.

本配線基板は、絶縁層と、前記絶縁層の一方の面側に埋め込まれた銅からなる配線層と、を有し、前記配線層は、第１の部分と、前記第１の部分よりも幅及び間隔が広い第２の部分と、を備え、前記第１の部分は、前記第２の部分よりも層厚が１．０μｍ以上薄く形成されており、前記第１の部分の一方の面及び前記第２の部分の一方の面は、前記絶縁層の一方の面から露出し、前記第２の部分の他方の面の一部は、前記絶縁層の他方の面側に開口する開口部内に露出していることを要件とする。 The wiring board has an insulating layer and a wiring layer made of copper embedded on one surface side of the insulating layer, and the wiring layer has a first portion and a portion more than the first portion. A second portion having a wide width and a wide interval , the first portion having a layer thickness of 1.0 μm or more thinner than the second portion, and one surface of the first portion. And one surface of the second portion is exposed from one surface of the insulating layer, and a part of the other surface of the second portion is in an opening that opens to the other surface side of the insulating layer. It is required to be exposed to.

開示の技術によれば、レジスト層の剥離不良が発生し難い構造の配線基板を提供できる。   According to the disclosed technology, it is possible to provide a wiring board having a structure in which peeling failure of the resist layer is unlikely to occur.

第１の実施の形態に係る配線基板を例示する図である。It is a figure which illustrates the wiring board which concerns on 1st Embodiment. 第１の実施の形態に係る配線基板の製造工程を例示する図（その１）である。FIG. 6 is a diagram (No. 1) illustrating the manufacturing process of the wiring board according to the first embodiment. 第１の実施の形態に係る配線基板の製造工程を例示する図（その２）である。FIG. 6 is a diagram (part 2) illustrating the manufacturing process of the wiring board according to the first embodiment. 第１の実施の形態に係る配線基板の製造工程を例示する図（その３）である。FIG. 6 is a diagram (No. 3) illustrating the manufacturing process of the wiring board according to the first embodiment. 第１の実施の形態に係る配線基板の製造工程を例示する図（その４）である。FIG. 6 is a view (No. 4) illustrating the manufacturing process of the wiring board according to the first embodiment. 第１の実施の形態の変形例１に係る配線基板を例示する断面図である。FIG. 9 is a cross-sectional view illustrating a wiring board according to a modified example 1 of the first embodiment. 第１の実施の形態の変形例１に係る配線基板の製造工程を例示する図である。It is a figure which illustrates the manufacturing process of the wiring board concerning the modification 1 of the first embodiment. 第１の実施の形態の変形例２に係る配線基板の製造工程を例示する図である。FIG. 10 is a diagram illustrating a step of manufacturing a wiring board according to Modification 2 of the first embodiment. 第１の実施の形態の変形例３に係る配線基板を例示する断面図である。FIG. 11 is a cross-sectional view illustrating a wiring board according to Modification 3 of the first embodiment. 第１の実施の形態の変形例３に係る配線基板の製造工程を例示する図である。FIG. 11 is a diagram illustrating a step of manufacturing a wiring board according to Modification 3 of the first embodiment. 応用例１に係る半導体パッケージを例示する断面図である。13 is a cross-sectional view illustrating a semiconductor package according to Application Example 1. FIG. 応用例１に係る半導体パッケージの製造工程を例示する図である。FIG. 10 is a diagram illustrating a manufacturing process of a semiconductor package according to an application example 1. 応用例２に係る半導体パッケージを例示する断面図である。16 is a cross-sectional view illustrating a semiconductor package according to Application Example 2. FIG. 実施例１の結果を示す図である。FIG. 5 is a diagram showing the results of Example 1. 実施例２の結果を示す図である。5 is a diagram showing the results of Example 2. FIG.

以下、図面を参照して発明を実施するための形態について説明する。なお、各図面において、同一構成部分には同一符号を付し、重複した説明を省略する場合がある。   Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In addition, in each drawing, the same components may be denoted by the same reference numerals, and redundant description may be omitted.

〈第１の実施の形態〉
［第１の実施の形態に係る配線基板の構造］
まず、第１の実施の形態に係る配線基板の構造について説明する。図１は、第１の実施の形態に係る配線基板を例示する図であり、図１（ａ）は部分平面図、図１（ｂ）は図１（ａ）のＡ−Ａ線に沿う断面図である。なお、図１（ａ）では、便宜上、配線層１０を梨地模様で示している。 <First Embodiment>
[Structure of Wiring Board According to First Embodiment]
First, the structure of the wiring board according to the first embodiment will be described. FIG. 1 is a diagram illustrating a wiring board according to a first embodiment, FIG. 1A is a partial plan view, and FIG. 1B is a cross section taken along line AA of FIG. 1A. It is a figure. Note that, in FIG. 1A, the wiring layer 10 is shown in a satin pattern for the sake of convenience.

図１を参照するに、配線基板１は、１層の配線層１０と、１層の絶縁層２０とを有するコアレスの配線基板である。   Referring to FIG. 1, wiring board 1 is a coreless wiring board having one wiring layer 10 and one insulating layer 20.

なお、本実施の形態では、便宜上、配線基板１において、絶縁層２０の配線層１０が露出する側を上側又は一方の側、絶縁層２０の開口部２０ｘが開口する側を下側又は他方の側とする。又、各部位の絶縁層２０の配線層１０が露出する側の面を一方の面又は上面、絶縁層２０の開口部２０ｘが開口する側の面を他方の面又は下面とする。但し、配線基板１は天地逆の状態で用いることができ、又は任意の角度で配置することができる。又、平面視とは対象物を絶縁層２０の一方の面の法線方向から視ることを指し、平面形状とは対象物を絶縁層２０の一方の面の法線方向から視た形状を指すものとする。   In the present embodiment, for convenience, in the wiring substrate 1, the side of the insulating layer 20 where the wiring layer 10 is exposed is the upper side or one side, and the side where the opening 20x of the insulating layer 20 is open is the lower side or the other side. To the side. Further, the surface of the insulating layer 20 on each side where the wiring layer 10 is exposed is one surface or the upper surface, and the surface of the insulating layer 20 on the side where the opening 20x is opened is the other surface or the lower surface. However, the wiring board 1 can be used upside down, or can be arranged at an arbitrary angle. Further, the plan view means that the object is viewed from the normal direction of one surface of the insulating layer 20, and the planar shape is the shape of the object viewed from the normal direction of one surface of the insulating layer 20. Shall be pointed out.

配線基板１において、配線層１０は絶縁層２０の一方の面側（上面側）に埋め込まれている。配線層１０の上面は絶縁層２０の上面から露出し、配線層１０の下面及び側面は絶縁層２０に被覆されている。配線層１０の上面は、例えば、絶縁層２０の上面と面一とすることができる。配線層１０は単一の金属層からなり、配線層１０の材料としては、例えば、銅（Ｃｕ）等を用いることができる。   In the wiring board 1, the wiring layer 10 is embedded on one surface side (upper surface side) of the insulating layer 20. The upper surface of the wiring layer 10 is exposed from the upper surface of the insulating layer 20, and the lower surface and the side surface of the wiring layer 10 are covered with the insulating layer 20. The upper surface of the wiring layer 10 can be flush with the upper surface of the insulating layer 20, for example. The wiring layer 10 is made of a single metal layer, and as the material of the wiring layer 10, for example, copper (Cu) or the like can be used.

配線層１０は、パッド１１と、パッド１２と、配線パターン１３とを有している。パッド１１は、配線パターン１３を介して、パッド１２と接続することができる。配線基板１において、絶縁層２０の上面側が半導体チップが搭載されるチップ搭載面となり、絶縁層２０の上面側に露出するパッド１１は半導体チップ接続用のパッドである。   The wiring layer 10 has a pad 11, a pad 12, and a wiring pattern 13. The pad 11 can be connected to the pad 12 via the wiring pattern 13. In the wiring board 1, the upper surface side of the insulating layer 20 is a chip mounting surface on which a semiconductor chip is mounted, and the pad 11 exposed on the upper surface side of the insulating layer 20 is a semiconductor chip connecting pad.

本実施の形態では、配線層１０は、幅が狭い部分（第１の部分）と幅が広い部分（第２の部分）とを備えており、幅が狭い部分は幅が広い部分よりも層厚が薄く形成されている。幅が狭いか広いかの判断基準は、配線基板の仕様に応じて適宜決定できるが、ここでは一例として、幅が１５μｍ以下である部分を幅が狭い部分、幅が１５μｍより大きい部分を幅が広い部分とする。ここでいう幅とは、対象部分の平面形状が円形であれば直径、楕円形であれば短径、細長状であれば短手方向の長さを指す。   In the present embodiment, the wiring layer 10 has a narrow width portion (first portion) and a wide width portion (second portion), and the narrow width portion is a layer higher than the wide portion. The thickness is thin. The criterion for determining whether the width is narrow or wide can be appropriately determined according to the specifications of the wiring board, but here, as an example, a portion having a width of 15 μm or less is a narrow portion, and a portion having a width of 15 μm or more is a width. Wide area. The width as used herein means a diameter when the plane shape of the target portion is circular, a short diameter when the shape is elliptical, and a length in the width direction when the shape is elongated.

パッド１１及び１２は幅が広い部分であり、配線パターン１３は幅が狭い部分である。パッド１１の幅Ｗ１１は、例えば、２５μｍ程度とすることができる。パッド１１の間隔は、例えば、パッド１１の幅Ｗ１１と同程度とすることができる。パッド１２の幅Ｗ１２は、例えば、８０μｍ程度とすることができる。パッド１２の間隔は、例えば、パッド１２の幅Ｗ１２と同程度とすることができる。又、パッド１１及び１２の夫々の層厚は、例えば、１５μｍ程度とすることができる。 The pads 11 and 12 have a wide width, and the wiring pattern 13 has a narrow width. The width W 11 of the pad 11 can be set to about 25 μm, for example. The spacing between the pads 11 can be set to be approximately the same as the width W 11 of the pads 11, for example. The width W 12 of the pad 12 can be set to about 80 μm, for example. The distance between the pads 12 can be set to be approximately the same as the width W 12 of the pads 12, for example. The layer thickness of each of the pads 11 and 12 may be, for example, about 15 μm.

配線パターン１３の幅Ｗ１３は、例えば、１０μｍ程度とすることができる。配線パターン１３の間隔は、例えば、配線パターン１３の幅Ｗ１３と同程度とすることができる。又、配線パターン１３の層厚は、例えば、１２μｍ程度とすることができる。 The width W 13 of the wiring pattern 13 can be set to about 10 μm, for example. The distance between the wiring patterns 13 can be set to be approximately the same as the width W 13 of the wiring patterns 13, for example. The layer thickness of the wiring pattern 13 can be set to, for example, about 12 μm.

配線パターン１３の中で、図１（ａ）及び図１（ｂ）の中央部分Ｎに配された配線パターン１３は、配線パターン１３同士が狭ピッチで隣接し、特にライン／スペースの狭い部分として形成される。本実施の形態において、特にライン／スペースの狭い部分とは、ライン／スペース＝８μｍ／８μｍ以下の部分である。特にライン／スペースの狭い部分として、ライン／スペース＝１μｍ／１μｍ〜３μｍ／３μｍ程度の配線パターンを形成することも可能である。ここで、ライン／スペースにおけるラインとは配線幅を表し、スペースとは隣り合う配線同士の間隔（配線間隔）を表す。例えば、ライン／スペース＝８μｍ／８μｍと記載されていた場合、配線幅が８μｍで隣り合う配線同士の間隔が８μｍであることを表す。   Of the wiring patterns 13, the wiring patterns 13 arranged in the central portion N of FIG. 1A and FIG. 1B are adjacent to each other at a narrow pitch, particularly as a narrow line / space portion. It is formed. In the present embodiment, a particularly narrow line / space portion is a portion where line / space = 8 μm / 8 μm or less. In particular, it is also possible to form a wiring pattern having a line / space of approximately 1 μm / 1 μm to 3 μm / 3 μm as a portion having a narrow line / space. Here, the line in the line / space represents the wiring width, and the space represents the interval (wiring interval) between adjacent wires. For example, when line / space = 8 μm / 8 μm is described, it means that the wiring width is 8 μm and the interval between adjacent wirings is 8 μm.

なお、パッド１１の上面、パッド１２の上面、及び配線パターン１３の上面は、同一平面上にある。すなわち、パッド１１及び１２と配線パターン１３とは層厚が異なるが、絶縁層２０から露出している面側は面一であり、絶縁層２０の内部側に段差を有している。   The upper surface of the pad 11, the upper surface of the pad 12, and the upper surface of the wiring pattern 13 are on the same plane. That is, although the pads 11 and 12 and the wiring pattern 13 have different layer thicknesses, the surface side exposed from the insulating layer 20 is flush, and a step is formed inside the insulating layer 20.

絶縁層２０は、配線層１０が形成される層である。絶縁層２０の材料としては、例えば、エポキシ系樹脂、イミド系樹脂、フェノール系樹脂、シアネート系樹脂等を主成分とする熱硬化性の非感光性樹脂を用いることができる。絶縁層２０の材料として、例えば、エポキシ系樹脂、フェノール系樹脂、合成ゴム等を主成分とする熱硬化性の感光性樹脂を用いてもよい。   The insulating layer 20 is a layer on which the wiring layer 10 is formed. As a material for the insulating layer 20, for example, a thermosetting non-photosensitive resin containing an epoxy resin, an imide resin, a phenol resin, a cyanate resin, or the like as a main component can be used. As the material of the insulating layer 20, for example, a thermosetting photosensitive resin containing epoxy resin, phenol resin, synthetic rubber or the like as a main component may be used.

又、絶縁層２０は、ガラス繊維やアラミド繊維等の織布や不織布からなる補強部材を有しても構わない。又、絶縁層２０は、シリカやアルミナ等のフィラーを含有しても構わない。絶縁層２０の厚さは、例えば１０〜５０μｍ程度とすることができる。なお、絶縁層２０の厚さとは、パッド１２の下面から絶縁層２０の下面までの距離である。   The insulating layer 20 may have a reinforcing member made of woven or non-woven fabric such as glass fiber or aramid fiber. Further, the insulating layer 20 may contain a filler such as silica or alumina. The thickness of the insulating layer 20 may be, for example, about 10 to 50 μm. The thickness of the insulating layer 20 is the distance from the lower surface of the pad 12 to the lower surface of the insulating layer 20.

絶縁層２０は、他方の面側（下面側）に開口する開口部２０ｘを有し、開口部２０ｘ内には配線層１０のパッド１２の下面の一部が露出している。配線基板１において、絶縁層２０の下面側が外部接続端子が形成される外部接続端子面となり、開口部２０ｘ内に露出するパッド１２は外部接続用のパッドである。必要に応じ、開口部２０ｘ内に露出するパッド１２の下面に、はんだボール等の外部接続端子を設けてもよい。なお、開口部２０ｘは、例えば、パッド１２側の径より開口側の径が大きい円錐台形状に形成される。   The insulating layer 20 has an opening 20x that opens to the other surface side (lower surface side), and a part of the lower surface of the pad 12 of the wiring layer 10 is exposed in the opening 20x. In the wiring board 1, the lower surface side of the insulating layer 20 serves as an external connection terminal surface on which external connection terminals are formed, and the pad 12 exposed in the opening 20x is a pad for external connection. If necessary, an external connection terminal such as a solder ball may be provided on the lower surface of the pad 12 exposed in the opening 20x. The opening 20x is formed, for example, in a truncated cone shape having a larger diameter on the opening side than on the pad 12 side.

又、必要に応じ、配線層１０の上面、開口部２０ｘ内に露出する配線層１０のパッド１２の下面に金属層を形成してもよい。金属層の例としては、Ａｕ層や、Ｎｉ／Ａｕ層（Ｎｉ層とＡｕ層をこの順番で積層した金属層）、Ｎｉ／Ｐｄ／Ａｕ層（Ｎｉ層とＰｄ層とＡｕ層をこの順番で積層した金属層）等を挙げることができる。又、金属層の形成に代えて、ＯＳＰ（Organic Solderability Preservative）処理等の酸化防止処理を施してもよい。なお、ＯＳＰ処理により形成される表面処理層は、アゾール化合物やイミダゾール化合物等からなる有機被膜である。   If necessary, a metal layer may be formed on the upper surface of the wiring layer 10 and the lower surface of the pad 12 of the wiring layer 10 exposed in the opening 20x. Examples of the metal layer include an Au layer, a Ni / Au layer (a metal layer in which a Ni layer and an Au layer are stacked in this order), and a Ni / Pd / Au layer (a Ni layer, a Pd layer, and an Au layer in this order). Examples thereof include a laminated metal layer). Further, instead of forming the metal layer, an antioxidant treatment such as an OSP (Organic Solderability Preservative) treatment may be performed. The surface treatment layer formed by the OSP treatment is an organic coating made of an azole compound, an imidazole compound, or the like.

［第１の実施の形態に係る配線基板の製造方法］
次に、第１の実施の形態に係る配線基板の製造方法について説明する。図２〜図５は、第１の実施の形態に係る配線基板の製造工程を例示する図である。本実施の形態では、支持体上に複数の配線基板となる部分を作製し支持体を除去後個片化して各配線基板とする工程の例を示すが、支持体上に１個ずつ配線基板を作製し支持体を除去する工程としてもよい。 [Method for Manufacturing Wiring Board According to First Embodiment]
Next, a method of manufacturing the wiring board according to the first embodiment will be described. 2 to 5 are views exemplifying the manufacturing steps of the wiring board according to the first embodiment. In this embodiment mode, an example of a step in which a plurality of wiring board portions are formed over a supporting body, the supporting body is removed, and then the individual wiring board is divided into individual wiring boards, one wiring board is formed on each supporting body. May be prepared and the support may be removed.

まず、図２（ａ）に示す工程では、上面が平坦面である支持体３００を準備する。支持体３００としては、例えば、プリプレグ３１０上にキャリア付き金属箔３２０が積層されたものを用いることができる。支持体３００の厚さは、例えば１８〜１００μｍ程度とすることができる。   First, in the step shown in FIG. 2A, the support 300 having a flat upper surface is prepared. As the support 300, for example, a metal foil 320 with a carrier laminated on a prepreg 310 can be used. The support 300 can have a thickness of, for example, about 18 to 100 μm.

プリプレグ３１０は、例えば、ガラス繊維やアラミド繊維等の織布や不織布（図示せず）にエポキシ系樹脂等の絶縁樹脂を含侵させたものである。キャリア付き金属箔３２０は、銅からなる厚さ１０〜５０μｍ程度の厚箔（キャリア箔）３２２上に、剥離層（図示せず）を介して、銅からなる厚さ１．５〜５μｍ程度の薄箔３２１が剥離可能な状態で貼着されたものである。厚箔３２２は、薄箔３２１の取り扱いを容易にするための支持材として設けられている。厚箔３２２の下面は、プリプレグ３１０の上面に接着されている。   The prepreg 310 is, for example, a woven or non-woven fabric (not shown) such as glass fiber or aramid fiber impregnated with an insulating resin such as an epoxy resin. The metal foil 320 with a carrier has a thickness of about 1.5 to 5 μm made of copper on a thick foil (carrier foil) 322 made of copper with a thickness of about 10 to 50 μm via a release layer (not shown). The thin foil 321 is attached in a peelable state. The thick foil 322 is provided as a support material for facilitating the handling of the thin foil 321. The lower surface of the thick foil 322 is bonded to the upper surface of the prepreg 310.

次に、図２（ｂ）に示す工程では、支持体３００を構成する薄箔３２１の上面に、例えば、キャリア付き金属箔３２０をめっき給電層に利用する電解めっき法等により、バリア層３３０を形成する。バリア層３３０は、後工程で薄箔３２１をエッチングで除去する際のエッチングストップ層となるものである。バリア層３３０の材料としては、銅からなる薄箔３２１のエッチング液で除去されない金属、例えば、ニッケル（Ｎｉ）等を用いることができる。バリア層３３０の厚さは、例えば、数μｍ程度とすることができる。   Next, in the step shown in FIG. 2B, the barrier layer 330 is formed on the upper surface of the thin foil 321 forming the support 300 by, for example, an electrolytic plating method using the metal foil 320 with a carrier as a plating power feeding layer. Form. The barrier layer 330 serves as an etching stop layer when the thin foil 321 is removed by etching in a later step. As a material of the barrier layer 330, a metal that is not removed by an etching solution for the thin foil 321 made of copper, such as nickel (Ni), can be used. The thickness of the barrier layer 330 can be, for example, about several μm.

次に、図２（ｃ）に示す工程では、バリア層３３０の上面に、配線層１０を形成する部分に開口部３４０ｘを備えたレジスト層３４０を形成する。具体的には、例えば、バリア層３３０の上面に、レジスト層３４０として感光性樹脂からなるドライフィルムレジストをラミネートする。そして、ドライフィルムレジストを露光及び現像によりパターニングし、配線層１０を形成する部分にバリア層３３０の上面を露出する開口部３４０ｘを形成する。   Next, in a step shown in FIG. 2C, a resist layer 340 having an opening 340x at a portion where the wiring layer 10 is to be formed is formed on the upper surface of the barrier layer 330. Specifically, for example, a dry film resist made of a photosensitive resin is laminated as the resist layer 340 on the upper surface of the barrier layer 330. Then, the dry film resist is patterned by exposure and development to form an opening 340x exposing the upper surface of the barrier layer 330 in a portion where the wiring layer 10 is formed.

次に、図２（ｄ）に示す工程では、キャリア付き金属箔３２０及びバリア層３３０をめっき給電層に利用する電解めっき法により、レジスト層３４０の開口部３４０ｘ内に露出するバリア層３３０の上面に配線層１０を形成する。配線層１０は、一方の面がバリア層３３０の上面に接し、他方の面が開口部３４０ｘ内に露出する。   Next, in the step shown in FIG. 2D, the upper surface of the barrier layer 330 exposed in the opening 340x of the resist layer 340 is formed by an electrolytic plating method using the metal foil with carrier 320 and the barrier layer 330 as a plating power feeding layer. Then, the wiring layer 10 is formed. The wiring layer 10 has one surface in contact with the upper surface of the barrier layer 330 and the other surface exposed in the opening 340x.

例えば、硫酸銅と硫酸を所定の濃度比で建浴した電解銅めっき液を用い、支持体３００上に銅めっきを析出する。これにより、幅が広い部分であるパッド１１及び１２の層厚を厚く、幅が狭い部分である配線パターン１３の層厚を薄く形成できる。この際、硫酸銅と硫酸の濃度比（硫酸銅／硫酸）を１以上とすることが好ましいが、硫酸銅と硫酸の濃度比（硫酸銅／硫酸）を５程度とすると、幅が狭い配線パターン１３の部分の層厚を特に薄くできる点で好適である（後述の図１４参照）。なお、パッド１１、パッド１２、及び配線パターン１３の夫々の幅や層厚の数値例は、図１を参照して説明した通りである。   For example, copper plating is deposited on the support 300 using an electrolytic copper plating solution prepared by bathing copper sulfate and sulfuric acid in a predetermined concentration ratio. As a result, the layer thickness of the pads 11 and 12 that is the wide portion can be increased, and the layer thickness of the wiring pattern 13 that is the narrow portion can be reduced. At this time, it is preferable that the concentration ratio of copper sulfate to sulfuric acid (copper sulfate / sulfuric acid) is 1 or more, but if the concentration ratio of copper sulfate to sulfuric acid (copper sulfate / sulfuric acid) is about 5, the width of the wiring pattern is narrow. This is preferable in that the layer thickness of the portion 13 can be made particularly thin (see FIG. 14 described later). Numerical examples of the width and layer thickness of each of the pad 11, the pad 12, and the wiring pattern 13 are as described with reference to FIG.

次に、図３（ａ）に示す工程では、図２（ｄ）に示すレジスト層３４０を剥離する。レジスト層３４０は、例えば、水酸化ナトリウム等を含有する剥離液を用いて剥離できる。この際、幅の狭い配線パターン１３の厚さが厚いと、狭ピッチ、高アスペクト比の配線パターンに挟まれ、狭ピッチ、高アスペクト比のレジストパターンが存在することになる。よって、前述のように、レジストパターンの剥離不良が発生し易くなる。   Next, in the step shown in FIG. 3A, the resist layer 340 shown in FIG. 2D is peeled off. The resist layer 340 can be stripped using, for example, a stripping solution containing sodium hydroxide or the like. At this time, if the wiring pattern 13 having a narrow width is thick, it is sandwiched between the wiring patterns having a narrow pitch and a high aspect ratio, and there is a resist pattern having a narrow pitch and a high aspect ratio. Therefore, as described above, peeling failure of the resist pattern is likely to occur.

しかし、本実施の形態では、図２（ｄ）に示す工程において、めっき条件を調整することにより、配線パターン１３の厚さを薄くしている。そのため、狭ピッチの配線パターン１３に挟まれた狭ピッチ、高アスペクト比のレジストパターンにおいて、レジストパターン側面の、隣接する配線パターン１３に挟み込まれる部分の面積を減少できる。   However, in the present embodiment, in the step shown in FIG. 2D, the thickness of the wiring pattern 13 is reduced by adjusting the plating conditions. Therefore, in a narrow-pitch, high-aspect-ratio resist pattern sandwiched between narrow-pitch wiring patterns 13, the area of the part sandwiched between adjacent wiring patterns 13 on the side surface of the resist pattern can be reduced.

その結果、レジストパターン側面と配線パターン１３との接触面積が減少しているため、容易にレジストパターンを剥離できる。よって、剥離不良の発生を抑制できる。この効果は、ライン／スペース＝８μｍ／８μｍ以下の、特にライン／スペースの狭い配線パターン１３として形成される部分（例えば、図１（ａ）及び図１（ｂ）の中央部分Ｎ）で顕著である。   As a result, since the contact area between the side surface of the resist pattern and the wiring pattern 13 is reduced, the resist pattern can be easily peeled off. Therefore, the occurrence of peeling failure can be suppressed. This effect is remarkable in the line / space = 8 μm / 8 μm or less, particularly in the portion formed as the wiring pattern 13 having a narrow line / space (for example, the central portion N in FIGS. 1A and 1B). is there.

なお、図３（ａ）に示す工程で、配線層１０の他方の面及び側面に粗化処理を施してもよい。粗化処理は、例えば、蟻酸系水溶液、過酸化水素／硫酸系水溶液、過硫酸ナトリウム水溶液、過硫酸アンモニウム水溶液等への浸漬や、これら水溶液のスプレー処理により行うことができる。粗化処理により、配線層１０の他方の面及び側面の表面粗さが、Ｒａ＝１００ｎｍ〜５００ｎｍ程度の範囲、例えばＲａ＝３００ｎｍに粗化される。粗化処理により、配線層１０と、後工程で形成される絶縁層２０との密着性が向上する。又、配線層１０の一方の面の粗度より、配線層１０の他方の面及び側面の粗度が大きくなる。   In the step shown in FIG. 3A, the other surface and side surface of the wiring layer 10 may be roughened. The roughening treatment can be carried out, for example, by immersion in a formic acid-based aqueous solution, hydrogen peroxide / sulfuric acid-based aqueous solution, sodium persulfate aqueous solution, ammonium persulfate aqueous solution, or the like, or spray treatment of these aqueous solutions. By the roughening treatment, the surface roughness of the other surface and the side surface of the wiring layer 10 is roughened to a range of about Ra = 100 nm to 500 nm, for example, Ra = 300 nm. The roughening treatment improves the adhesiveness between the wiring layer 10 and the insulating layer 20 formed in a later step. Further, the roughness of the other surface and side surface of the wiring layer 10 is higher than the roughness of one surface of the wiring layer 10.

次に、図３（ｂ）に示す工程では、バリア層３３０の上面に配線層１０の他方の面及び側面を被覆する絶縁層２０を形成する。具体的には、バリア層３３０の上面に配線層１０を被覆するように、例えば熱硬化性を有するフィルム状のエポキシ系絶縁樹脂等をラミネートする。或いは、バリア層３３０の上面に配線層１０を被覆するように、例えば熱硬化性を有する液状又はペースト状のエポキシ系絶縁樹脂等をスクリーン印刷、スピンコート法等により塗布する。そして、ラミネート又は塗布した絶縁樹脂を押圧しつつ、硬化温度以上に加熱して硬化させ、絶縁層２０を作製する。必要に応じて、加圧しながら加熱してもよい。   Next, in a step shown in FIG. 3B, the insulating layer 20 that covers the other surface and the side surface of the wiring layer 10 is formed on the upper surface of the barrier layer 330. Specifically, for example, a film-shaped epoxy insulating resin having thermosetting property is laminated so as to cover the wiring layer 10 on the upper surface of the barrier layer 330. Alternatively, a liquid or paste epoxy insulating resin having thermosetting property is applied by screen printing, spin coating or the like so as to cover the wiring layer 10 on the upper surface of the barrier layer 330. Then, while pressing the laminated or applied insulating resin, the insulating resin is heated to a temperature not lower than the curing temperature and cured to form the insulating layer 20. If necessary, you may heat while pressurizing.

次に、図３（ｃ）に示す工程では、絶縁層２０に、絶縁層２０を貫通しパッド１２の他方の面を露出させる開口部２０ｘを形成する。開口部２０ｘは、例えば、ＣＯ２レーザ等を用いたレーザ加工法により形成できる。絶縁層２０を感光性樹脂により形成した場合には、感光性樹脂を露光及び現像することで絶縁層２０に開口部２０ｘを形成してもよい（フォトリソグラフィ法）。 Next, in the step shown in FIG. 3C, an opening 20x that penetrates the insulating layer 20 and exposes the other surface of the pad 12 is formed in the insulating layer 20. The opening 20x can be formed by, for example, a laser processing method using a CO 2 laser or the like. When the insulating layer 20 is formed of a photosensitive resin, the opening 20x may be formed in the insulating layer 20 by exposing and developing the photosensitive resin (photolithography method).

開口部２０ｘをレーザ加工法により形成した場合には、デスミア処理を行い、開口部２０ｘ内に露出するパッド１２の他方の面に付着した絶縁層２０の樹脂残渣を除去することが好ましい。なお、レーザ光が照射される部分であるパッド１２は厚く形成されているため、レーザ光がパッド１２を貫通するおそれを低減できる。   When the opening 20x is formed by the laser processing method, it is preferable to perform desmear processing to remove the resin residue of the insulating layer 20 attached to the other surface of the pad 12 exposed in the opening 20x. Since the pad 12 that is a portion irradiated with the laser light is formed thick, it is possible to reduce the possibility that the laser light penetrates the pad 12.

なお、樹脂残渣除去のため、デスミア処理に加え、ソフトエッチング処理により図３（ｃ）の構造体の開口部２０ｘに露出するパッド１２の他方の面を除去し、凹部を形成してもよい。この処理を施して凹部が設けられても、パッド１２は厚く形成されているため、パッド１２が貫通するおそれがない。   In order to remove the resin residue, in addition to the desmear process, the other surface of the pad 12 exposed in the opening 20x of the structure of FIG. 3C may be removed by the soft etching process to form the recess. Even if the recess is formed by this treatment, since the pad 12 is formed thick, the pad 12 is unlikely to penetrate.

次に、図３（ｄ）に示す工程では、図３（ｃ）に示す構造体から支持体３００の一部を除去する。具体的には、支持体３００に機械的な力を加え、キャリア付き金属箔３２０の薄箔３２１と厚箔３２２との界面を剥離する。前述のように、キャリア付き金属箔３２０は、薄箔３２１上に剥離層（図示せず）を介して厚箔３２２が貼着された構造を有するため、厚箔３２２は、剥離層（図示せず）とともに薄箔３２１から容易に剥離する。   Next, in the step shown in FIG. 3D, a part of the support 300 is removed from the structure shown in FIG. Specifically, a mechanical force is applied to the support 300 to peel off the interface between the thin foil 321 and the thick foil 322 of the metal foil 320 with a carrier. As described above, the metal foil 320 with a carrier has a structure in which the thick foil 322 is adhered to the thin foil 321 via the peeling layer (not shown). Therefore, the thick foil 322 has the peeling layer (not shown). No.) and easily peeled from the thin foil 321.

これにより、薄箔３２１のみがバリア層３３０側に残り、支持体３００を構成する他の部材（プリプレグ３１０及び厚箔３２２）が除去される。但し、剥離層とともに薄箔３２１から厚箔３２２が剥離する場合の他に、剥離層内で凝集破壊が起こり、薄箔３２１から厚箔３２２が剥離する場合もある。又、剥離層から厚箔３２２が剥離することで、薄箔３２１から厚箔３２２を剥離する場合もある。   As a result, only the thin foil 321 remains on the barrier layer 330 side, and the other members (the prepreg 310 and the thick foil 322) that form the support 300 are removed. However, in addition to the case where the thin foil 321 and the thick foil 322 are peeled together with the peeling layer, cohesive failure occurs in the peeling layer and the thin foil 321 and the thick foil 322 are peeled off in some cases. Further, the thick foil 322 may be peeled from the peeling layer, so that the thick foil 322 may be peeled from the thin foil 321.

次に、図４（ａ）に示す工程では、エッチングにより銅からなる薄箔３２１（図３（ｄ）参照）を除去する。銅からなる薄箔３２１は、例えば、過酸化水素／硫酸系水溶液や、過硫酸ナトリウム水溶液、過硫酸アンモニウム水溶液等を用いたウェットエッチングにより除去できる。なお、バリア層３３０がニッケル（Ｎｉ）からなる場合には、銅の上記エッチング液では除去されず、エッチングストップ層として機能するため、配線層１０はエッチングされない。   Next, in the step shown in FIG. 4A, the thin foil 321 made of copper (see FIG. 3D) is removed by etching. The thin foil 321 made of copper can be removed by, for example, wet etching using a hydrogen peroxide / sulfuric acid-based aqueous solution, a sodium persulfate aqueous solution, an ammonium persulfate aqueous solution, or the like. When the barrier layer 330 is made of nickel (Ni), the wiring layer 10 is not etched because it is not removed by the copper etching solution and functions as an etching stop layer.

次に、図４（ｂ）に示す工程では、バリア層３３０（図４（ａ）参照）を除去する。バリア層３３０がニッケル（Ｎｉ）からなる場合には、銅を除去せずにニッケル（Ｎｉ）を除去するエッチング液を選択することで、配線層１０はエッチングせずにバリア層３３０のみをエッチングすることができる。これにより、絶縁層２０の一方の面に配線層１０の一方の面が露出する。配線層１０の一方の面は、例えば、絶縁層２０の一方の面と面一とすることができる。   Next, in the step shown in FIG. 4B, the barrier layer 330 (see FIG. 4A) is removed. When the barrier layer 330 is made of nickel (Ni), the wiring layer 10 is not etched but only the barrier layer 330 is etched by selecting an etching solution that removes nickel (Ni) without removing copper. be able to. As a result, one surface of the wiring layer 10 is exposed on one surface of the insulating layer 20. One surface of the wiring layer 10 can be flush with one surface of the insulating layer 20, for example.

なお、必要に応じ、配線層１０の一方の面、開口部２０ｘから露出する配線層１０のパッド１２の他方の面に、例えば無電解めっき法等により金属層を形成してもよい。金属層の例としては、前述の通りである。又、金属層の形成に代えて、ＯＳＰ処理等の酸化防止処理を施してもよい。   If necessary, a metal layer may be formed on one surface of the wiring layer 10 and the other surface of the pad 12 of the wiring layer 10 exposed from the opening 20x by, for example, electroless plating. Examples of the metal layer are as described above. Further, instead of forming the metal layer, an antioxidant treatment such as OSP treatment may be performed.

図４（ｂ）に示す工程の後、図４（ｂ）に示す構造体をスライサー等により切断位置Ｃで切断して個片化することにより、複数の配線基板１（図１参照）が完成する。必要に応じ、パッド１１上や、開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。   After the step shown in FIG. 4B, the plurality of wiring boards 1 (see FIG. 1) are completed by cutting the structure shown in FIG. 4B at a cutting position C with a slicer or the like to divide it into individual pieces. To do. If necessary, an external connection terminal such as a solder ball may be provided on the pad 11 or the pad 12 exposed in the opening 20x.

又、必要に応じ、図４（ｃ）に示すように、配線基板１のチップ搭載面側に開口部４０ｘを備えたソルダーレジスト層４０を形成してもよい。ソルダーレジスト層４０は、図４（ｂ）に示す構造体をスライサー等により切断位置Ｃで切断する前に形成してもよいし、後に形成してもよい。   If necessary, as shown in FIG. 4C, a solder resist layer 40 having an opening 40x may be formed on the chip mounting surface side of the wiring board 1. The solder resist layer 40 may be formed before or after cutting the structure shown in FIG. 4B at the cutting position C with a slicer or the like.

ソルダーレジスト層４０は、例えば、液状又はペースト状の絶縁樹脂を、スクリーン印刷法、ロールコート法、又は、スピンコート法等により、配線層１０を被覆するように絶縁層２０上に塗布することで形成できる。或いは、フィルム状の絶縁樹脂を、配線層１０を被覆するように絶縁層２０上にラミネートしてもよい。絶縁樹脂としては、例えば、感光性のエポキシ系絶縁樹脂やアクリル系絶縁樹脂等を用いることができる。   The solder resist layer 40 is formed, for example, by applying a liquid or paste insulating resin on the insulating layer 20 by screen printing, roll coating, spin coating, or the like so as to cover the wiring layer 10. Can be formed. Alternatively, a film-shaped insulating resin may be laminated on the insulating layer 20 so as to cover the wiring layer 10. As the insulating resin, for example, a photosensitive epoxy insulating resin, an acrylic insulating resin, or the like can be used.

そして、塗布又はラミネートした絶縁樹脂を露光及び現像することでソルダーレジスト層４０に配線層１０のパッド１１及び配線パターン１３の一部を露出する開口部４０ｘを形成することができる（フォトリソグラフィ法）。エポキシ系樹脂やポリイミド系樹脂を主成分とする非感光性の絶縁樹脂（熱硬化性樹脂）をソルダーレジスト層４０の材料として用いた場合には、開口部４０ｘをレーザ加工法やブラスト処理等により形成してもよい。   Then, by exposing and developing the applied or laminated insulating resin, the openings 40x exposing the pads 11 of the wiring layer 10 and a part of the wiring pattern 13 can be formed in the solder resist layer 40 (photolithography method). . When a non-photosensitive insulating resin (thermosetting resin) containing an epoxy resin or a polyimide resin as a main component is used as the material of the solder resist layer 40, the opening 40x is formed by laser processing or blasting. You may form.

なお、図３（ａ）に示す工程において配線層１０の他方の面及び側面に粗化処理を施し、図３（ｃ）に示す工程において開口部２０ｘに露出するパッド１２の他方の面にソフトエッチング処理を施した場合には、パッド１２の近傍は、図４（ｄ）のようになる。すなわち、パッド１２を含む配線層１０の他方の面及び側面は粗化面となり、開口部２０ｘに露出するパッド１２の他方の面には凹部１２ｘが形成される。又、凹部１２ｘの外縁部に、開口部２０ｘの内壁よりも絶縁層２０側に食い込んだアンダーカット１２ｙが形成される。   In the step shown in FIG. 3A, the other surface and side surface of the wiring layer 10 is roughened, and in the step shown in FIG. 3C, the other surface of the pad 12 exposed in the opening 20x is softened. When the etching process is performed, the vicinity of the pad 12 is as shown in FIG. That is, the other surface and side surface of the wiring layer 10 including the pad 12 are roughened surfaces, and the recess 12x is formed on the other surface of the pad 12 exposed in the opening 20x. Further, an undercut 12y is formed on the outer edge of the recess 12x so as to dig into the insulating layer 20 side from the inner wall of the opening 20x.

又、図２（ｂ）に示す工程において、図５に示すように、支持体３００を構成する薄箔３２１の上面と、キャリア付き金属箔３２０の側面（薄箔３２１の側面及び厚箔３２２の側面）とを連続的に被覆するように、バリア層３３０を形成してもよい。この構造は、配線基板１の製造工程中での不意のキャリア付き金属箔３２０の剥離を防止できる点で好適である。図５以降の工程は、図２（ｃ）〜図４（ｂ）と同様である。   Further, in the step shown in FIG. 2B, as shown in FIG. 5, the upper surface of the thin foil 321 constituting the support 300 and the side surface of the metal foil 320 with a carrier (the side surface of the thin foil 321 and the thick foil 322). The barrier layer 330 may be formed so as to continuously cover the side surface). This structure is suitable in that it is possible to prevent the metal foil 320 with a carrier from being unintentionally peeled off during the manufacturing process of the wiring board 1. The steps after FIG. 5 are the same as those in FIGS. 2C to 4B.

このように、本実施の形態では、配線層１０を、例えば、硫酸銅と硫酸を所定の濃度比で建浴した電解銅めっき液を用い、支持体３００上に銅めっきを析出して形成する。これにより、配線層１０のうち、幅が狭い配線パターン１３の部分を薄く形成し、幅が広いパッド１１及び１２の部分を厚く形成することができる。   As described above, in the present embodiment, the wiring layer 10 is formed by depositing copper plating on the support 300 using, for example, an electrolytic copper plating solution prepared by bathing copper sulfate and sulfuric acid at a predetermined concentration ratio. . Thereby, in the wiring layer 10, the portion of the wiring pattern 13 having a narrow width can be formed thin, and the portions of the pads 11 and 12 having a wide width can be formed thick.

そのため、狭ピッチの配線パターン１３に挟まれた狭ピッチ、高アスペクト比のレジストパターンにおいて、レジストパターン側面の、隣接する配線パターン１３に挟み込まれる部分の面積を減少できる。その結果、レジストパターン側面と配線パターン１３との接触面積が減少しているため、容易にレジストパターンを剥離できる。よって、剥離不良の発生を抑制できる。   Therefore, in a narrow-pitch, high-aspect-ratio resist pattern sandwiched between narrow-pitch wiring patterns 13, the area of the part sandwiched between adjacent wiring patterns 13 on the side surface of the resist pattern can be reduced. As a result, since the contact area between the side surface of the resist pattern and the wiring pattern 13 is reduced, the resist pattern can be easily peeled off. Therefore, the occurrence of peeling failure can be suppressed.

特に、硫酸銅と硫酸の濃度比（硫酸銅／硫酸）を５程度とすると、幅が狭い配線パターン１３の部分の層厚を特に薄くできる点で好適である。この場合、レジスト層３４０の剥離不良をいっそう低減できる。   In particular, it is preferable to set the concentration ratio of copper sulfate to sulfuric acid to about 5 (copper sulfate / sulfuric acid) because the layer thickness of the wiring pattern 13 having a narrow width can be made particularly thin. In this case, the peeling failure of the resist layer 340 can be further reduced.

又、パッド１１及び１２にはんだが形成される場合があるが、この場合、パッドとはんだとの界面に合金層が形成され、実質的にパッドの厚さが薄くなってパッドが脆くなる問題がある。配線基板１では、パッド１１及び１２を配線パターン１３に比べて厚く形成しているため、合金層が形成されたとしても、合金層が形成されていない部分が多く残るため、合金層による影響を低減できる。   Further, solder may be formed on the pads 11 and 12, but in this case, an alloy layer is formed at the interface between the pad and the solder, which causes a problem that the thickness of the pad is substantially reduced and the pad becomes brittle. is there. In the wiring board 1, since the pads 11 and 12 are formed to be thicker than the wiring pattern 13, even if the alloy layer is formed, many portions where the alloy layer is not formed remain, so that the influence of the alloy layer is exerted. It can be reduced.

又、パッド１１及び１２を配線パターン１３に比べて厚く形成しているため、例えば、パッド１１又は１２に対して無電解めっきの前処理で酸洗浄等を行った場合でも、パッドが過剰に薄くなることを防止できる。   Further, since the pads 11 and 12 are formed thicker than the wiring pattern 13, even if the pads 11 or 12 are subjected to acid cleaning or the like in the pretreatment of electroless plating, the pads are excessively thin. Can be prevented.

〈第１の実施の形態の変形例１〉
第１の実施の形態の変形例１では、配線層１０の一方の面と絶縁層２０の一方の面との位置関係が第１の実施の形態とは異なる例を示す。なお、第１の実施の形態の変形例１において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。 <Modification 1 of the first embodiment>
Modification 1 of the first embodiment shows an example in which the positional relationship between one surface of the wiring layer 10 and one surface of the insulating layer 20 is different from that of the first embodiment. In the first modification of the first embodiment, description of the same components as those of the above-described embodiment may be omitted.

図６は、第１の実施の形態の変形例１に係る配線基板を例示する断面図であり、図１（ｂ）に対応する断面を示している。   FIG. 6 is a cross-sectional view illustrating a wiring board according to Modification 1 of the first embodiment, and shows a cross section corresponding to FIG.

図６を参照するに、配線基板２は、絶縁層２０に凹部２０ｙが形成され、配線層１０の一方の面が凹部２０ｙ内において絶縁層２０の一方の面よりも窪んだ位置に露出している点が、配線基板１（図１参照）と相違する。配線基板２は、例えば、以下に示す工程により製造できる。   Referring to FIG. 6, in wiring board 2, recess 20y is formed in insulating layer 20, and one surface of wiring layer 10 is exposed in a position recessed in recess 20y from one surface of insulating layer 20. 1 is different from the wiring board 1 (see FIG. 1). The wiring board 2 can be manufactured, for example, by the following steps.

図７は、第１の実施の形態の変形例１に係る配線基板の製造工程を例示する図である。第１の実施の形態の変形例１では、支持体３００上にバリア層３３０を形成しない。   FIG. 7 is a diagram illustrating a manufacturing process of the wiring board according to the first modification of the first embodiment. In the modified example 1 of the first embodiment, the barrier layer 330 is not formed on the support 300.

まず、図７（ａ）に示す工程では、図２（ａ）に示す工程の後、図２（ｃ）〜図３（ｃ）と同様の工程を実行し、支持体３００上に、直接、配線層１０及び絶縁層２０を積層する。次に、図７（ｂ）に示す工程では、図３（ｄ）に示す工程と同様にして、図７（ａ）に示す構造体から支持体３００を構成するプリプレグ３１０及び厚箔３２２を剥離する。これにより、薄箔３２１のみが絶縁層２０側に残り、支持体３００を構成する他の部材（プリプレグ３１０及び厚箔３２２）が除去される。   First, in the step shown in FIG. 7A, after the step shown in FIG. 2A, the same steps as those in FIGS. 2C to 3C are performed to directly and directly on the support 300. The wiring layer 10 and the insulating layer 20 are laminated. Next, in the step shown in FIG. 7B, the prepreg 310 and the thick foil 322 which form the support 300 are peeled from the structure shown in FIG. 7A in the same manner as the step shown in FIG. To do. As a result, only the thin foil 321 remains on the insulating layer 20 side, and the other members (the prepreg 310 and the thick foil 322) forming the support 300 are removed.

次に、図７（ｃ）に示す工程では、図４（ａ）に示す工程と同様にして、エッチングにより銅からなる薄箔３２１（図７（ｂ）参照）を除去する。本実施の形態では、エッチングストップ層となるバリア層３３０が存在しないため、銅からなる配線層１０の一方の面側もエッチングされ、絶縁層２０の一方の面に凹部２０ｙが形成される。そして、配線層１０の一方の面が凹部２０ｙ内において絶縁層２０の一方の面よりも窪んだ位置に露出する。   Next, in the step shown in FIG. 7C, similar to the step shown in FIG. 4A, the thin foil 321 made of copper (see FIG. 7B) is removed by etching. In the present embodiment, since barrier layer 330 serving as an etching stop layer does not exist, one surface side of wiring layer 10 made of copper is also etched to form recess 20y on one surface of insulating layer 20. Then, one surface of the wiring layer 10 is exposed in the recess 20y at a position recessed from the one surface of the insulating layer 20.

図７（ｃ）に示す工程の後、図７（ｃ）に示す構造体をスライサー等により切断位置Ｃで切断して個片化することにより、複数の配線基板２が完成する。   After the step shown in FIG. 7C, the structure shown in FIG. 7C is cut into individual pieces by cutting at a cutting position C with a slicer or the like, whereby a plurality of wiring boards 2 are completed.

必要に応じ、配線層１０の一方の面、開口部２０ｘから露出する配線層１０のパッド１２の他方の面に、金属層等を形成してもよい。又、必要に応じ、パッド１１上や、開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。又、必要に応じ、配線基板２のチップ搭載面側に開口部４０ｘを備えたソルダーレジスト層４０を形成してもよい。   If necessary, a metal layer or the like may be formed on one surface of the wiring layer 10 and the other surface of the pad 12 of the wiring layer 10 exposed from the opening 20x. Further, if necessary, an external connection terminal such as a solder ball may be provided on the pad 11 or the pad 12 exposed in the opening 20x. If necessary, the solder resist layer 40 having the opening 40x may be formed on the chip mounting surface side of the wiring board 2.

〈第１の実施の形態の変形例２〉
第１の実施の形態の変形例２では、配線基板１の製造方法の他の例を示す。なお、第１の実施の形態の変形例２において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。 <Modification 2 of the first embodiment>
The second modification of the first embodiment shows another example of the method for manufacturing the wiring board 1. In the modified example 2 of the first embodiment, description of the same components as those of the already-described embodiment may be omitted.

図８は、第１の実施の形態の変形例２に係る配線基板の製造工程を例示する図である。第１の実施の形態の変形例２では、プリプレグ３１０上にキャリア付き金属箔３２０Ａが積層された支持体３００Ａを用いる。キャリア付き金属箔３２０Ａは、銅からなる厚さ１０〜５０μｍ程度の厚箔（キャリア箔）３２２上に、剥離層（図示せず）を介して、ニッケルからなる厚さ１．５〜５μｍ程度の薄箔３２１Ａが剥離可能な状態で貼着されたものである。なお、薄箔３２１Ａがエッチングストップ層となるため、支持体３００Ａにバリア層３３０を形成しない。   FIG. 8 is a diagram illustrating a manufacturing process of the wiring board according to the second modification of the first embodiment. In the second modification of the first embodiment, the support 300A in which the metal foil with carrier 320A is laminated on the prepreg 310 is used. The metal foil 320A with a carrier has a thickness of about 1.5 to 5 μm made of nickel on a thick foil (carrier foil) 322 made of copper and having a thickness of about 10 to 50 μm via a release layer (not shown). The thin foil 321A is attached in a peelable state. Since the thin foil 321A serves as an etching stop layer, the barrier layer 330 is not formed on the support 300A.

まず、図８（ａ）に示す工程では、図２（ａ）に示す工程と同様にして支持体３００Ａを作製後、図２（ｃ）〜図３（ｃ）と同様の工程を実行し、支持体３００Ａ上に、直接、配線層１０及び絶縁層２０を積層する。次に、図８（ｂ）に示す工程では、図３（ｄ）に示す工程と同様にして、図８（ａ）に示す構造体から支持体３００Ａを構成するプリプレグ３１０及び厚箔３２２を剥離する。これにより、薄箔３２１Ａのみが絶縁層２０側に残り、支持体３００Ａを構成する他の部材（プリプレグ３１０及び厚箔３２２）が除去される。   First, in the step shown in FIG. 8A, after the support 300A is manufactured in the same manner as the step shown in FIG. 2A, the same steps as those in FIGS. 2C to 3C are performed. The wiring layer 10 and the insulating layer 20 are directly laminated on the support 300A. Next, in the step shown in FIG. 8B, the prepreg 310 and the thick foil 322 forming the support 300A are peeled off from the structure shown in FIG. 8A in the same manner as the step shown in FIG. 3D. To do. As a result, only the thin foil 321A remains on the insulating layer 20 side, and the other members (the prepreg 310 and the thick foil 322) forming the support 300A are removed.

次に、図８（ｃ）に示す工程では、エッチングによりニッケルからなる薄箔３２１Ａ（図８（ｂ）参照）を除去する。銅を除去せずにニッケル（Ｎｉ）を除去するエッチング液を選択することで、配線層１０はエッチングせずに薄箔３２１Ａのみをエッチングすることができる。これにより、絶縁層２０の一方の面に配線層１０の一方の面が露出する。配線層１０の一方の面は、例えば、絶縁層２０の一方の面と面一とすることができる。   Next, in the step shown in FIG. 8C, the thin foil 321A made of nickel (see FIG. 8B) is removed by etching. By selecting an etching solution that removes nickel (Ni) without removing copper, it is possible to etch only the thin foil 321A without etching the wiring layer 10. As a result, one surface of the wiring layer 10 is exposed on one surface of the insulating layer 20. One surface of the wiring layer 10 can be flush with one surface of the insulating layer 20, for example.

図８（ｃ）に示す工程の後、図８（ｃ）に示す構造体をスライサー等により切断位置Ｃで切断して個片化することにより、複数の配線基板１（図１参照）が完成する。   After the step shown in FIG. 8C, the plurality of wiring boards 1 (see FIG. 1) are completed by cutting the structure shown in FIG. To do.

必要に応じ、配線層１０の一方の面、開口部２０ｘから露出する配線層１０のパッド１２の他方の面に、金属層等を形成してもよい。又、必要に応じ、パッド１１上や、開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。又、必要に応じ、配線基板１のチップ搭載面側に開口部４０ｘを備えたソルダーレジスト層４０を形成してもよい。   If necessary, a metal layer or the like may be formed on one surface of the wiring layer 10 and the other surface of the pad 12 of the wiring layer 10 exposed from the opening 20x. Further, if necessary, an external connection terminal such as a solder ball may be provided on the pad 11 or the pad 12 exposed in the opening 20x. If necessary, the solder resist layer 40 having the openings 40x may be formed on the chip mounting surface side of the wiring board 1.

〈第１の実施の形態の変形例３〉
第１の実施の形態の変形例３では、絶縁層２０の他方の面に支持体（キャリア）を設けた例を示す。なお、第１の実施の形態の変形例３において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。 <Modification 3 of the first embodiment>
Modification 3 of the first embodiment shows an example in which a support (carrier) is provided on the other surface of the insulating layer 20. It should be noted that in the modified example 3 of the first embodiment, description of the same components as those of the already-described embodiment may be omitted.

図９は、第１の実施の形態の変形例３に係る配線基板を例示する断面図であり、図１（ｂ）に対応する断面を示している。   FIG. 9 is a cross-sectional view illustrating a wiring board according to Modification 3 of the first embodiment, and shows a cross section corresponding to FIG.

図９を参照するに、配線基板３は、絶縁層２０の他方の面に粘着層５０を介して支持体６０が設けられている点が、配線基板１（図１参照）と相違する。配線基板３は、例えば、以下に示す工程により製造できる。   Referring to FIG. 9, wiring substrate 3 is different from wiring substrate 1 (see FIG. 1) in that support body 60 is provided on the other surface of insulating layer 20 via adhesive layer 50. The wiring board 3 can be manufactured, for example, by the following steps.

図１０は、第１の実施の形態の変形例３に係る配線基板の製造工程を例示する図である。   FIG. 10 is a diagram illustrating a manufacturing process of the wiring board according to the modified example 3 of the first embodiment.

まず、図１０（ａ）に示す工程では、図２（ａ）〜図３（ｃ）と同様の工程を実行し、図３（ｃ）の構造体の絶縁層２０の他方の面に粘着層５０を介して支持体６０を設ける。粘着層５０としては、例えば、アクリル系、シリコーン系、エポキシ系等の樹脂を用いることができる。支持体６０としては、例えば、金属箔（例えば、銅箔）、樹脂フィルム（例えば、ポリイミドフィルム）、樹脂基板（例えば、ガラスエポキシ基板）等を用いることができる。   First, in the step illustrated in FIG. 10A, the same steps as those in FIGS. 2A to 3C are performed, and the adhesive layer is formed on the other surface of the insulating layer 20 of the structure illustrated in FIG. A support 60 is provided via 50. As the adhesive layer 50, for example, an acrylic resin, a silicone resin, an epoxy resin, or the like can be used. As the support 60, for example, a metal foil (for example, copper foil), a resin film (for example, a polyimide film), a resin substrate (for example, a glass epoxy substrate), or the like can be used.

なお、後述のように、粘着層５０及び支持体６０を備えた配線基板３に半導体チップを実装する場合があるため、粘着層５０及び支持体６０は、リフロー等の実装工程における加熱に耐える耐熱性を有している必要がある。   As will be described later, since the semiconductor chip may be mounted on the wiring board 3 provided with the adhesive layer 50 and the support 60, the adhesive layer 50 and the support 60 are heat-resistant to withstand heating in a mounting process such as reflow. Need to have sex.

次に、図１０（ｂ）に示す工程では、図３（ｄ）に示す工程と同様にして、図１０（ａ）に示す構造体から支持体３００を構成するプリプレグ３１０及び厚箔３２２を剥離する。これにより、薄箔３２１のみがバリア層３３０側に残り、支持体３００を構成する他の部材（プリプレグ３１０及び厚箔３２２）が除去される。   Next, in the step shown in FIG. 10B, similar to the step shown in FIG. 3D, the prepreg 310 and the thick foil 322 forming the support 300 are peeled from the structure shown in FIG. 10A. To do. As a result, only the thin foil 321 remains on the barrier layer 330 side, and the other members (the prepreg 310 and the thick foil 322) that form the support 300 are removed.

次に、図１０（ｃ）に示す工程では、図４（ａ）に示す工程と同様にして、エッチングにより銅からなる薄箔３２１（図１０（ｂ）参照）を除去する。次に、図１０（ｄ）に示す工程では、図４（ｂ）に示す工程と同様にして、バリア層３３０（図１０（ｃ）参照）を除去する。これにより、絶縁層２０の一方の面に配線層１０の一方の面が露出する。配線層１０の一方の面は、例えば、絶縁層２０の一方の面と面一とすることができる。   Next, in the step shown in FIG. 10C, similar to the step shown in FIG. 4A, the thin foil 321 made of copper (see FIG. 10B) is removed by etching. Next, in the step shown in FIG. 10D, the barrier layer 330 (see FIG. 10C) is removed similarly to the step shown in FIG. 4B. As a result, one surface of the wiring layer 10 is exposed on one surface of the insulating layer 20. One surface of the wiring layer 10 can be flush with one surface of the insulating layer 20, for example.

図１０（ｄ）に示す工程の後、図１０（ｄ）に示す構造体をスライサー等により切断位置Ｃで切断して個片化することにより、複数の配線基板３が完成する。   After the step illustrated in FIG. 10D, the plurality of wiring boards 3 are completed by cutting the structure illustrated in FIG.

必要に応じ、図１０（ａ）に示す工程よりも前に、配線層１０の一方の面、開口部２０ｘから露出する配線層１０のパッド１２の他方の面に、金属層等を形成してもよい。又、必要に応じ、図１０（ｄ）に示す工程よりも後に、配線基板３のチップ搭載面側に開口部４０ｘを備えたソルダーレジスト層４０を形成してもよい。又、図２（ａ）に示す工程で用いる支持体に代えて、図５に示す支持体を用いてもよい。   If necessary, a metal layer or the like is formed on one surface of the wiring layer 10 and the other surface of the pad 12 of the wiring layer 10 exposed from the opening 20x before the step shown in FIG. Good. If necessary, the solder resist layer 40 having the openings 40x may be formed on the chip mounting surface side of the wiring board 3 after the step shown in FIG. Further, the support shown in FIG. 5 may be used instead of the support used in the step shown in FIG.

又、必要に応じ、図３（ｃ）の構造体に支持体６０を設けて図１０（ａ）の構造体とする前に、図３（ｃ）の構造体の開口部２０ｘに露出するパッド１２の他方の面に、無電解めっき法等により金属層を形成したり、ＯＳＰ処理等の酸化防止処理を施してもよい。又、必要に応じ、図１０（ｄ）の構造体において、配線層１０の一方の面に、無電解めっき法等により金属層を形成したり、ＯＳＰ処理等の酸化防止処理を施してもよい。   If necessary, before the support 60 is provided on the structure of FIG. 3C to form the structure of FIG. 10A, the pad exposed in the opening 20x of the structure of FIG. 3C. A metal layer may be formed on the other surface of 12 by an electroless plating method or an antioxidant treatment such as an OSP treatment may be performed. If necessary, in the structure of FIG. 10D, a metal layer may be formed on one surface of the wiring layer 10 by an electroless plating method or an antioxidant treatment such as an OSP treatment may be performed. .

又、図１０（ｃ）に示す構造体、すなわち、バリア層３３０が設けられた状態の支持体６０付き配線基板を製品出荷形態としてもよい。又、図１０（ｃ）に示す構造体又は図１０（ｄ）に示す構造体は、個片化前の状態を製品出荷形態としてもよいし、個片化後の状態を製品出荷形態としてもよい。   Further, the structure shown in FIG. 10C, that is, the wiring board with the support 60 in which the barrier layer 330 is provided may be used as a product shipping form. Further, the structure shown in FIG. 10C or the structure shown in FIG. 10D may be in a product shipping form before being singulated or in a product shipping form after being singulated. Good.

配線基板３は、絶縁層２０の他方の面に支持体６０が設けられているため、配線基板３全体の剛性を高めることができる。そのため、例えば、後述の図１２に示すように、配線基板３の出荷後に半導体チップを実装する際の取り扱いが容易となる。   Since the wiring board 3 is provided with the support 60 on the other surface of the insulating layer 20, the rigidity of the wiring board 3 as a whole can be increased. Therefore, for example, as shown in FIG. 12, which will be described later, when the semiconductor chip is mounted after the wiring board 3 is shipped, the handling becomes easy.

なお、図６に示す配線基板２に支持体６０を設けてもよい。又、配線基板２の製造途中の構造体を用い、図１０の工程を行ってもよい。   The support 60 may be provided on the wiring board 2 shown in FIG. Alternatively, the process shown in FIG. 10 may be performed using a structure in the process of manufacturing the wiring board 2.

〈配線基板の応用例１〉
配線基板の応用例１では、第１の実施の形態に係る配線基板に半導体チップが搭載（フリップチップ実装）された半導体パッケージの例を示す。なお、配線基板の応用例１において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。 <Application example 1 of wiring board>
Application Example 1 of the wiring board shows an example of a semiconductor package in which a semiconductor chip is mounted (flip-chip mounted) on the wiring board according to the first embodiment. In the application example 1 of the wiring board, the description of the same components as those in the above-described embodiments may be omitted.

図１１は、応用例１に係る半導体パッケージを例示する断面図である。図１１を参照するに、半導体パッケージ４は、図１に示す配線基板１と、半導体チップ１００と、バンプ１１０と、アンダーフィル樹脂１２０と、封止樹脂１３０とを有する。   FIG. 11 is a cross-sectional view illustrating a semiconductor package according to Application Example 1. Referring to FIG. 11, the semiconductor package 4 includes the wiring board 1 shown in FIG. 1, the semiconductor chip 100, the bumps 110, the underfill resin 120, and the sealing resin 130.

半導体チップ１００は、例えば、シリコン等からなる薄板化された半導体基板（図示せず）上に半導体集積回路（図示せず）等が形成されたものである。半導体基板（図示せず）には、半導体集積回路（図示せず）と電気的に接続された電極パッド（図示せず）が形成されている。   The semiconductor chip 100 is, for example, a semiconductor integrated circuit (not shown) formed on a thinned semiconductor substrate (not shown) made of silicon or the like. An electrode pad (not shown) electrically connected to a semiconductor integrated circuit (not shown) is formed on a semiconductor substrate (not shown).

バンプ１１０は、半導体チップ１００の電極パッド（図示せず）と、配線基板１のパッド１１とを電気的に接続している。バンプ１１０は、例えば、はんだバンプである。はんだバンプの材料としては、例えばＰｂを含む合金、ＳｎとＣｕの合金、ＳｎとＡｇの合金、ＳｎとＡｇとＣｕの合金等を用いることができる。   The bumps 110 electrically connect the electrode pads (not shown) of the semiconductor chip 100 and the pads 11 of the wiring board 1. The bump 110 is, for example, a solder bump. As a material of the solder bump, for example, an alloy containing Pb, an alloy of Sn and Cu, an alloy of Sn and Ag, an alloy of Sn, Ag and Cu, or the like can be used.

アンダーフィル樹脂１２０は、半導体チップ１００と配線基板１（絶縁層２０）との間に充填されている。アンダーフィル樹脂１２０としては、例えば、フィラーを含有していない熱硬化性のエポキシ系樹脂等の絶縁樹脂を用いることができる。   The underfill resin 120 is filled between the semiconductor chip 100 and the wiring board 1 (insulating layer 20). As the underfill resin 120, for example, an insulating resin such as a thermosetting epoxy resin containing no filler can be used.

封止樹脂１３０は、半導体チップ１００とアンダーフィル樹脂１２０を被覆するように配線基板１上に形成されている。但し、封止樹脂１３０の上面に半導体チップ１００の上面（背面）を露出させてもよい。封止樹脂１３０としては、例えば、フィラーを含有した熱硬化性のエポキシ系樹脂等の絶縁樹脂（所謂モールド樹脂）を用いることができる。   The sealing resin 130 is formed on the wiring board 1 so as to cover the semiconductor chip 100 and the underfill resin 120. However, the upper surface (back surface) of the semiconductor chip 100 may be exposed on the upper surface of the sealing resin 130. As the sealing resin 130, for example, an insulating resin (so-called mold resin) such as a thermosetting epoxy resin containing a filler can be used.

但し、アンダーフィル樹脂１２０は、必要に応じて設ければよい。又、封止樹脂１３０は設けずに、アンダーフィル樹脂１２０のみを設けてもよい。   However, the underfill resin 120 may be provided as needed. Alternatively, only the underfill resin 120 may be provided without providing the sealing resin 130.

半導体パッケージ４を作製するには、例えば、配線基板１のチップ搭載面に、ペースト状のバンプ１１０を介して半導体チップ１００をフェースダウンで搭載する。そして、リフロー等により、バンプ１１０を溶融後凝固させ、半導体チップ１００の電極パッド（図示せず）と、配線基板１のパッド１１とを電気的に接続する。   To manufacture the semiconductor package 4, the semiconductor chip 100 is mounted face down on the chip mounting surface of the wiring board 1 via the paste-like bumps 110. Then, the bump 110 is melted and then solidified by reflow or the like, and the electrode pad (not shown) of the semiconductor chip 100 and the pad 11 of the wiring substrate 1 are electrically connected.

その後、半導体チップ１００と配線基板１（絶縁層２０）との間に必要に応じてアンダーフィル樹脂１２０を充填後、半導体チップ１００とアンダーフィル樹脂１２０を被覆するように配線基板１上に封止樹脂１３０を形成する。封止樹脂１３０は、例えば、封止金型を用いたトランスファーモールド法等により形成することができる。必要に応じ、開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。   Thereafter, an underfill resin 120 is filled between the semiconductor chip 100 and the wiring board 1 (insulating layer 20) as necessary, and then sealed on the wiring board 1 so as to cover the semiconductor chip 100 and the underfill resin 120. The resin 130 is formed. The sealing resin 130 can be formed by, for example, a transfer molding method using a sealing die. If necessary, an external connection terminal such as a solder ball may be provided on the pad 12 exposed in the opening 20x.

なお、半導体パッケージ４において、配線基板１に代えて配線基板２又は３を用いてもよい。配線基板３を用いる場合には、図１２（ａ）に示すように、図１０（ｄ）の工程を経た配線基板３を個片化せずに、配線基板３となる各領域のチップ搭載面に、ペースト状のバンプ１１０を介して半導体チップ１００をフェースダウンで搭載する。そして、リフロー等により、バンプ１１０を溶融後凝固させ、半導体チップ１００の電極パッド（図示せず）と、配線基板３となる各領域のパッド１１とを電気的に接続する。そして、半導体チップ１００と絶縁層２０との間に必要に応じてアンダーフィル樹脂１２０を充填する。なお、図１０と図１２とは、配線基板の上下が反転した状態で描かれている。   In the semiconductor package 4, the wiring board 2 or 3 may be used instead of the wiring board 1. When the wiring board 3 is used, as shown in FIG. 12A, the chip mounting surface of each region to be the wiring board 3 is not divided into individual pieces of the wiring board 3 that have undergone the process of FIG. 10D. Then, the semiconductor chip 100 is mounted face down via the paste-like bumps 110. Then, the bumps 110 are melted and solidified by reflow or the like, and the electrode pads (not shown) of the semiconductor chip 100 are electrically connected to the pads 11 in the respective regions to be the wiring board 3. Then, an underfill resin 120 is filled between the semiconductor chip 100 and the insulating layer 20 as needed. Note that FIGS. 10 and 12 are drawn with the wiring board turned upside down.

次に、図１２（ｂ）に示すように、図１２（ａ）に示す支持体６０に機械的な力を加え、粘着層５０及び支持体６０を絶縁層２０の下面から剥離する。   Next, as shown in FIG. 12B, a mechanical force is applied to the support 60 shown in FIG. 12A to separate the adhesive layer 50 and the support 60 from the lower surface of the insulating layer 20.

次に、図１２（ｃ）に示すように、半導体チップ１００とアンダーフィル樹脂１２０を被覆するように配線基板３となる各領域上にトランスファーモールド法等により封止樹脂１３０を形成する。   Next, as shown in FIG. 12C, a sealing resin 130 is formed by transfer molding or the like on each region to be the wiring board 3 so as to cover the semiconductor chip 100 and the underfill resin 120.

図１２（ｃ）に示す工程の後、図１２（ｃ）に示す構造体をスライサー等により切断位置Ｃで切断して個片化することにより、複数の半導体パッケージ４（図１１参照）が完成する。必要に応じ、開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。   After the step shown in FIG. 12C, the structure shown in FIG. 12C is cut into individual pieces by cutting at a cutting position C with a slicer or the like to complete a plurality of semiconductor packages 4 (see FIG. 11). To do. If necessary, an external connection terminal such as a solder ball may be provided on the pad 12 exposed in the opening 20x.

なお、支持体６０を設けた状態で封止樹脂１３０を形成し、その後、支持体６０を除去し、個片化を行い、複数の半導体パッケージ４を形成してもよい。つまり、図１２（ａ）の状態で封止樹脂１３０を形成して図１２（ｄ）の状態とし、その後、支持体６０の除去を行って図１２（ｃ）の状態とし、個片化を行い、複数の半導体パッケージ４を形成してもよい。この場合は、封止樹脂１３０を形成後に支持体６０を除去するため、配線基板の剛性が低い場合でも配線基板の変形を防止できる。   Note that the plurality of semiconductor packages 4 may be formed by forming the sealing resin 130 with the support body 60 provided, then removing the support body 60, and dividing into pieces. That is, the sealing resin 130 is formed in the state of FIG. 12A to obtain the state of FIG. 12D, and then the support 60 is removed to obtain the state of FIG. Alternatively, a plurality of semiconductor packages 4 may be formed. In this case, since the support 60 is removed after the sealing resin 130 is formed, it is possible to prevent the deformation of the wiring board even when the rigidity of the wiring board is low.

このように、配線基板１〜３に半導体チップ１００を搭載することにより、半導体パッケージ４を実現できる。   In this way, the semiconductor package 4 can be realized by mounting the semiconductor chip 100 on the wiring boards 1 to 3.

ところで、パッド１１が、幅の異なる複数種類のパッドを含んでいる場合がある。この場合、幅が異なるパッドは厚さも異なるが（幅が広い方が厚くなる）、パッド１１の半導体チップ１００を搭載する側の面は同一平面にある。そのため、パッド１１の厚さが異なっても、各パッド１１と半導体チップ１００の各電極パッドとのギャップは一定となり、各パッド１１と半導体チップ１００の各電極パッドとを容易に接続することができる。   By the way, the pad 11 may include a plurality of types of pads having different widths. In this case, the pads having different widths have different thicknesses (the wider the width, the thicker), but the surface of the pad 11 on which the semiconductor chip 100 is mounted is on the same plane. Therefore, even if the thickness of the pad 11 is different, the gap between each pad 11 and each electrode pad of the semiconductor chip 100 becomes constant, and each pad 11 and each electrode pad of the semiconductor chip 100 can be easily connected. .

〈配線基板の応用例２〉
配線基板の応用例２では、半導体パッケージ上に更に他の半導体パッケージが搭載された所謂ＰＯＰ（Package on package）構造の半導体パッケージの例を示す。なお、配線基板の応用例２において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。 <Wiring board application example 2>
Application example 2 of the wiring board shows an example of a semiconductor package having a so-called POP (Package on package) structure in which another semiconductor package is mounted on the semiconductor package. In application example 2 of the wiring board, description of the same components as those in the above-described embodiments may be omitted.

図１３は、応用例２に係る半導体パッケージを例示する断面図である。図１３を参照するに、半導体パッケージ５は、半導体チップ１００を実装した配線基板１上に、更に半導体チップ１００を実装した配線基板１がバンプ９０を介して搭載された、所謂ＰＯＰ構造の半導体パッケージである。バンプ９０としては、例えば、銅コアボールの周囲をはんだで覆った構造のはんだボールを用いることができる。なお、半導体パッケージ５において、配線基板１に代えて配線基板２又は３を用いてもよい。   FIG. 13 is a cross-sectional view illustrating a semiconductor package according to Application Example 2. Referring to FIG. 13, the semiconductor package 5 is a semiconductor package having a so-called POP structure in which the wiring board 1 on which the semiconductor chip 100 is mounted is further mounted via the bumps 90 on the wiring board 1 on which the semiconductor chip 100 is mounted. Is. As the bump 90, for example, a solder ball having a structure in which the periphery of a copper core ball is covered with solder can be used. In the semiconductor package 5, the wiring board 2 or 3 may be used instead of the wiring board 1.

半導体パッケージ５を作製するには、例えば、図１２（ｂ）に示す構造体を２個作製する。そして、一方の図１２（ｂ）に示す構造体上に、銅コアボールの周囲をはんだで覆った構造のはんだボールを搭載し、更に他方の図１２（ｂ）に示す構造体を搭載する。この際、一方の図１２（ｂ）に示す構造体のパッド１２の上面と他方の図１２（ｂ）に示す構造体の開口部２０ｘ内のパッド１２の下面とが、はんだボールを介して対向するように配置する。   To manufacture the semiconductor package 5, for example, two structures shown in FIG. 12B are manufactured. Then, a solder ball having a structure in which the periphery of a copper core ball is covered with solder is mounted on one of the structures shown in FIG. 12B, and the other structure shown in FIG. 12B is mounted. At this time, the upper surface of the pad 12 of the structure shown in FIG. 12B on one side and the lower surface of the pad 12 in the opening 20x of the structure shown in FIG. 12B on the other side face each other via the solder ball. Arrange to do.

次に、他方の図１２（ｂ）に示す構造体を一方の図１２（ｂ）に示す構造体に対して押圧しながらリフローを行い、銅コアボールの周囲のはんだを溶融後凝固させて、銅コアボールを介して上下のパッド１２同士を接合する。この際、銅コアボールが上下のパッド１２と接した状態ではんだが凝固するため、銅コアボールがスペーサ部材として機能し、他方の図１２（ｂ）に示す構造体と一方の図１２（ｂ）に示す構造体との間隔が所定値に維持される。   Next, reflow is performed while pressing the other structure shown in FIG. 12 (b) against one structure shown in FIG. 12 (b), and the solder around the copper core balls is melted and solidified, The upper and lower pads 12 are bonded to each other through the copper core balls. At this time, since the solder is solidified in a state where the copper core balls are in contact with the upper and lower pads 12, the copper core balls function as spacer members, and the structure shown in FIG. 12B on the other side and the structure shown in FIG. The distance from the structure shown in () is maintained at a predetermined value.

その後、一方の図１２（ｂ）に示す構造体及び他方の図１２（ｂ）に示す構造体の各半導体チップ１００と各アンダーフィル樹脂１２０を被覆するようにトランスファーモールド法等により封止樹脂１３０を形成する。その後、スライサー等により個片化することにより、複数の半導体パッケージ５（図１３参照）が完成する。必要に応じ、一方の図１２（ｂ）に示す構造体の開口部２０ｘ内に露出するパッド１２上に、はんだボール等の外部接続端子を設けてもよい。   Thereafter, the sealing resin 130 is formed by a transfer molding method or the like so as to cover each semiconductor chip 100 and each underfill resin 120 of the structure shown in FIG. 12B on one side and the structure shown in FIG. 12B on the other side. To form. After that, a plurality of semiconductor packages 5 (see FIG. 13) are completed by dividing into individual pieces with a slicer or the like. If necessary, an external connection terminal such as a solder ball may be provided on the pad 12 exposed in the opening 20x of the structure shown in FIG. 12B.

このように、第１の実施の形態に係る配線基板１〜３を用いて、ＰＯＰ構造の半導体パッケージ５を実現できる。   In this way, the semiconductor package 5 having the POP structure can be realized by using the wiring boards 1 to 3 according to the first embodiment.

［実施例１］
配線幅が狭い部分（ここではファインライン部と称する）と、配線幅が広い部分（ここではラフライン部と称する）について、電解銅めっきの条件を変更して、形成された配線のめっき厚の検討を行った。 [Example 1]
Examination of the plating thickness of the formed wiring by changing the conditions of electrolytic copper plating for a portion with a narrow wiring width (herein referred to as a fine line portion) and a portion with a wide wiring width (herein referred to as a rough line portion) I went.

ここでは、ファインライン部のライン／スペースを１０μｍ／１０μｍ、ラフライン部のライン／スペースを２５μｍ／２５μｍとした。   Here, the line / space of the fine line portion was 10 μm / 10 μm, and the line / space of the rough line portion was 25 μm / 25 μm.

まず、導体層を設けた基板上に、ライン／スペース＝１０μｍ／１０μｍのファインライン部と、ライン／スペース＝２５μｍ／２５μｍのラフライン部とを形成するための開口部を備えたレジスト層を作製した。   First, a resist layer having an opening for forming a fine line portion of line / space = 10 μm / 10 μm and a rough line portion of line / space = 25 μm / 25 μm was produced on a substrate provided with a conductor layer. .

次に、硫酸銅と硫酸を濃度比１で建浴した電解銅めっき液と、濃度比５で建浴した電解銅めっき液とを用意した。そして、夫々の電解銅めっき液を用い、電流密度を１．０ＡＳＤ（Ａ／ｄｍ２）、めっき時間を６０分として電解めっきを行い、ファインライン部及びラフライン部に対応するレジスト層の開口部内に電解銅めっき膜を析出した。 Next, an electrolytic copper plating solution prepared by bathing copper sulfate and sulfuric acid at a concentration ratio of 1 and an electrolytic copper plating solution prepared by bathing at a concentration ratio of 5 were prepared. Then, using each of the electrolytic copper plating solutions, electrolytic plating was performed at a current density of 1.0 ASD (A / dm 2 ) and a plating time of 60 minutes, and the electrolytic plating was performed in the openings of the resist layer corresponding to the fine line portion and the rough line portion. An electrolytic copper plating film was deposited.

又、比較例１として、硫酸銅と硫酸を濃度比０．２で建浴した電解銅めっき液と、濃度比５．５で建浴した電解銅めっき液とを用意した。そして、実施例１と同様に、夫々の電解銅めっき液を用い、電流密度を１．０ＡＳＤ、めっき時間を６０分として電解めっきを行い、ファインライン部及びラフライン部に対応するレジスト層の開口部内に電解銅めっき膜を析出した。   In addition, as Comparative Example 1, an electrolytic copper plating solution in which copper sulfate and sulfuric acid were bathed at a concentration ratio of 0.2 and an electrolytic copper plating solution in which a bath was concentrated at a concentration ratio of 5.5 were prepared. Then, in the same manner as in Example 1, electrolytic plating was performed using each electrolytic copper plating solution with a current density of 1.0 ASD and a plating time of 60 minutes, and inside the openings of the resist layer corresponding to the fine line portion and the rough line portion. An electrolytic copper plating film was deposited on.

結果を図１４に示す。図１４よりわかるように、硫酸銅と硫酸との濃度比を１とした場合には、ファインライン部のめっき厚は平均値で１３μｍ程度、ラフライン部のめっき厚は平均値で１５μｍ程度となり、両者の差異は２μｍ程度であった。又、硫酸銅と硫酸との濃度比を５とした場合には、ファインライン部のめっき厚は平均値で１２μｍ程度、ラフライン部のめっき厚は平均値で１５．５μｍ程度となり、両者の差異は３．５μｍ程度であった。つまり、何れの濃度比でも、ファインライン部とラフライン部で、平均値で１μｍ以上の十分なめっき厚差が得られた。   The results are shown in Fig. 14. As can be seen from FIG. 14, when the concentration ratio of copper sulfate to sulfuric acid is 1, the average plating thickness of the fine line portion is about 13 μm and the average plating thickness of the rough line portion is about 15 μm. Was about 2 μm. When the concentration ratio of copper sulfate to sulfuric acid is 5, the average thickness of the fine line is 12 μm and the average thickness of the rough line is 15.5 μm. It was about 3.5 μm. That is, at any of the concentration ratios, a sufficient plating thickness difference of 1 μm or more was obtained between the fine line portion and the rough line portion on average.

これに対して、比較例１で硫酸銅と硫酸との濃度比を０．２とした場合には、ファインライン部のめっき厚は平均値で１４μｍ程度、ラフライン部のめっき厚は平均値で１４．５μｍ程度となり、両者の差異は０．５μｍ程度であった。又、比較例１で硫酸銅と硫酸との濃度比を０．２とした場合には、銅イオンの供給不足のため、電解銅めっきの異常析出が生じていた。なお、比較例１で硫酸銅と硫酸との濃度比を５．５とした場合には、銅イオンの供給過剰のため、電解銅めっきの異常析出が生じ、めっき厚を計測することができず、図１４に結果を示すことができなかった。   On the other hand, when the concentration ratio of copper sulfate to sulfuric acid is 0.2 in Comparative Example 1, the fine line portion has an average plating thickness of about 14 μm, and the rough line portion has an average plating thickness of 14 μm. It was about 0.5 μm, and the difference between the two was about 0.5 μm. Further, when the concentration ratio of copper sulfate to sulfuric acid was set to 0.2 in Comparative Example 1, abnormal deposition of electrolytic copper plating occurred due to insufficient supply of copper ions. When the concentration ratio of copper sulfate to sulfuric acid was set to 5.5 in Comparative Example 1, abnormal deposition of electrolytic copper plating occurred due to excessive supply of copper ions, and the plating thickness could not be measured. The results could not be shown in FIG.

このように、硫酸銅と硫酸との濃度比が０．２以下、又は５．５以上では電解銅めっき膜の品質を確保できないため、硫酸銅と硫酸との濃度比は０．２よりも大きく５以下であることが好ましい。又、ファインライン部とラフライン部で平均値で１μｍ以上の顕著なめっき厚差が得られる、硫酸銅と硫酸との濃度比が１以上５以下の範囲が特に好ましい。   Thus, if the concentration ratio of copper sulfate to sulfuric acid is 0.2 or less, or 5.5 or more, the quality of the electrolytic copper plating film cannot be ensured, so the concentration ratio of copper sulfate to sulfuric acid is larger than 0.2. It is preferably 5 or less. Further, it is particularly preferable that the concentration ratio of copper sulfate to sulfuric acid is 1 or more and 5 or less so that a remarkable difference in plating thickness of 1 μm or more can be obtained on the average between the fine line portion and the rough line portion.

［実施例２］
レジスト層のアスペクト比を１〜４まで０．５置きに変えたサンプルを作製した。そして、硫酸銅と硫酸を濃度比５で建浴した電解銅めっき液を用い、電流密度を１．０ＡＳＤ、めっき時間を６０分として、アスペクト比の異なるレジスト層を用いて電解めっきを行った。その後、レジスト層を剥離し、レジスト剥離の不良率を測定した。 [Example 2]
Samples were prepared in which the aspect ratio of the resist layer was changed from 1 to 4 at intervals of 0.5. Then, electrolytic plating was carried out using a resist layer having different aspect ratios, using an electrolytic copper plating solution prepared by bathing copper sulfate and sulfuric acid at a concentration ratio of 5 with a current density of 1.0 ASD and a plating time of 60 minutes. Then, the resist layer was peeled off, and the defect rate of resist peeling was measured.

又、比較例２として、硫酸銅と硫酸を濃度比０．２未満で建浴した電解銅めっき液を用い、電流密度を１．０ＡＳＤ、めっき時間を６０分として、アスペクト比の異なるレジスト層を用いて電解めっきを行った。その後、レジスト層を剥離し、レジスト剥離の不良率を測定した。   Further, as Comparative Example 2, using an electrolytic copper plating solution in which copper sulfate and sulfuric acid were formed in a concentration ratio of less than 0.2, the current density was 1.0 ASD, and the plating time was 60 minutes to form resist layers having different aspect ratios. It was used for electrolytic plating. Then, the resist layer was peeled off, and the defect rate of resist peeling was measured.

結果を図１５に示す。図１５よりわかるように、実施例２では、レジスト層のアスペクト比が３．５までは不良率が０％であり、レジスト層のアスペクト比が４では不良率が約１０％であった。これに対して、比較例２では、レジスト層のアスペクト比が３．５では不良率が約５％であり、レジスト層のアスペクト比が４では不良率が約５０％であった。   The results are shown in Fig. 15. As can be seen from FIG. 15, in Example 2, the defect rate was 0% until the aspect ratio of the resist layer was 3.5, and when the aspect ratio of the resist layer was 4, the defect rate was about 10%. On the other hand, in Comparative Example 2, when the aspect ratio of the resist layer was 3.5, the defective rate was about 5%, and when the aspect ratio of the resist layer was 4, the defective rate was about 50%.

このように、レジスト層のアスペクト比が高い部分（すなわち、ファインライン部）におけるめっき厚を薄くすることにより、レジスト剥離の不良率を大幅に低減できることが確認された。   As described above, it was confirmed that the defective rate of resist peeling can be significantly reduced by reducing the plating thickness in the portion having a high aspect ratio of the resist layer (that is, the fine line portion).

以上、好ましい実施の形態等について詳説したが、上述した実施の形態等に制限されることはなく、特許請求の範囲に記載された範囲を逸脱することなく、上述した実施の形態等に種々の変形及び置換を加えることができる。   Although the preferred embodiments and the like have been described in detail above, the present invention is not limited to the above-described embodiments and the like, and various embodiments and the like described above are possible without departing from the scope described in the claims. Modifications and substitutions can be added.

例えば、上記実施の形態では、配線層の幅が狭い部分の例として配線パターンを、幅が広い部分の例としてパッドを挙げたが、これには限定されない。例えば、幅が広い部分の例として、電源やグラウンドのプレーン層を挙げることができる。又、配線パターンの中に、幅が狭い配線パターンと、幅が広い配線パターンとが混在してもよい。   For example, in the above-described embodiment, the wiring pattern is given as an example of the portion where the width of the wiring layer is narrow, and the pad is given as an example of the portion where the width is wide. However, the present invention is not limited to this. For example, a plane layer of a power supply or a ground can be given as an example of the wide portion. Further, a wiring pattern having a narrow width and a wiring pattern having a wide width may be mixed in the wiring pattern.

又、配線基板の製造方法において、プリプレグ３１０の両面にキャリア付き金属箔３２０や３２０Ａを積層して支持体とし、支持体の両面上に配線基板を形成してもよい。   In the method for manufacturing a wiring board, the metal foils 320 and 320A with a carrier may be laminated on both surfaces of the prepreg 310 to form a support, and the wiring board may be formed on both surfaces of the support.

１、２、３ 配線基板
４、５ 半導体パッケージ
１０ 配線層
１１、１２ パッド
１２ｘ、２０ｙ 凹部
１２ｙ アンダーカット
１３ 配線パターン
２０ 絶縁層
２０ｘ、４０ｘ、３４０ｘ 開口部
４０ ソルダーレジスト層
５０ 粘着層
６０、３００、３００Ａ 支持体
９０、１１０ バンプ
１００ 半導体チップ
１２０ アンダーフィル樹脂
１３０ 封止樹脂
３１０ プリプレグ
３２０、３２０Ａ キャリア付き金属箔
３２１、３２１Ａ 薄箔
３２２ 厚箔
３３０ バリア層
３４０ レジスト層 1, 2 and 3 Wiring board 4, 5 Semiconductor package 10 Wiring layer 11, 12 Pad 12x, 20y Recess 12y Undercut 13 Wiring pattern 20 Insulating layer 20x, 40x, 340x Opening 40 Solder resist layer 50 Adhesive layer 60, 300, 300A support 90, 110 bump 100 semiconductor chip 120 underfill resin 130 encapsulation resin 310 prepreg 320, 320A metal foil with carrier 321, 321A thin foil 322 thick foil 330 barrier layer 340 resist layer

Claims (10)

絶縁層と、
前記絶縁層の一方の面側に埋め込まれた銅からなる配線層と、を有し、
前記配線層は、第１の部分と、前記第１の部分よりも幅及び間隔が広い第２の部分と、を備え、
前記第１の部分は、前記第２の部分よりも層厚が１．０μｍ以上薄く形成されており、
前記第１の部分の一方の面及び前記第２の部分の一方の面は、前記絶縁層の一方の面から露出し、
前記第２の部分の他方の面の一部は、前記絶縁層の他方の面側に開口する開口部内に露出している配線基板。 An insulating layer,
A wiring layer made of copper embedded on one surface side of the insulating layer,
The wiring layer includes a first portion and a second portion having a width and a spacing wider than that of the first portion,
The first portion has a layer thickness of 1.0 μm or more smaller than that of the second portion,
One surface of the first portion and one surface of the second portion are exposed from one surface of the insulating layer,
A wiring board in which a part of the other surface of the second portion is exposed in an opening opening to the other surface of the insulating layer. 前記第１の部分の一方の面と前記第２の部分の一方の面とが同一平面上にある請求項１に記載の配線基板。   The wiring board according to claim 1, wherein one surface of the first portion and one surface of the second portion are on the same plane. 前記第１の部分の側面及び他方の面は前記絶縁層に被覆され、
前記第２の部分の側面及び他方の面は前記絶縁層に被覆され、
前記第２の部分の他方の面の一部が前記開口部内に露出している請求項１又は２に記載の配線基板。 The side surface and the other surface of the first portion are covered with the insulating layer,
The side surface and the other surface of the second portion are covered with the insulating layer,
The wiring board according to claim 1, wherein a part of the other surface of the second portion is exposed in the opening. 前記第１の部分は配線パターンを含み、前記第２の部分はパッドを含む請求項１乃至３の何れか一項に記載の配線基板。   The wiring board according to claim 1, wherein the first portion includes a wiring pattern, and the second portion includes a pad. 前記パッドは、
前記開口部内に露出する部分に設けられた外部接続用のパッドと、
該外部接続用のパッドと異なる部分に設けられた半導体チップ接続用のパッドと、を含む請求項４に記載の配線基板。 The pad is
A pad for external connection provided in a portion exposed in the opening,
The wiring board according to claim 4, further comprising a pad for connecting a semiconductor chip, which is provided in a portion different from the pad for external connection. 前記第１の部分の一方の面と前記第２の部分の一方の面は、前記絶縁層の一方の面よりも窪んだ位置に露出している請求項１乃至５の何れか一項に記載の配線基板。   The one surface of the said 1st part and the one surface of the said 2nd part are exposed in the position depressed rather than the one surface of the said insulating layer. Wiring board. 前記絶縁層の他方の面側に、粘着層を介して支持体が設けられた請求項１乃至６の何れか一項に記載の配線基板。   The wiring board according to claim 1, wherein a support is provided on the other surface side of the insulating layer via an adhesive layer. 支持体上にめっきを析出し、第１の部分と、前記第１の部分よりも幅及び間隔が広い第２の部分と、を備え、前記第１の部分及び前記第２の部分の一方の面が前記支持体と接する銅からなる配線層を形成する工程と、
前記支持体上に、前記第１の部分及び前記第２の部分を被覆するように、一方の面が前記支持体と接する絶縁層を形成する工程と、
前記絶縁層に、前記絶縁層の他方の面側に開口し前記第２の部分の他方の面の一部を露出する開口部を形成する工程と、
前記支持体を除去する工程と、を有し、
前記配線層を形成する工程では、前記第１の部分は、前記第２の部分よりも層厚が１．０μｍ以上薄く形成される配線基板の製造方法。 A plating is deposited on a support, and a first portion and a second portion having a width and a spacing larger than that of the first portion are provided, and one of the first portion and the second portion is provided. Forming a wiring layer made of copper, the surface of which is in contact with the support,
Forming an insulating layer on the support, one surface of which is in contact with the support, so as to cover the first portion and the second portion;
Forming an opening in the insulating layer on the other surface side of the insulating layer and exposing a part of the other surface of the second portion;
A step of removing the support,
The method of manufacturing a wiring board, wherein in the step of forming the wiring layer, the first portion has a layer thickness thinner than that of the second portion by 1.0 μm or more . 前記開口部を形成する工程と前記支持体を除去する工程との間に、前記絶縁層の他方の面側に粘着層を介して他の支持体を設ける工程を有する請求項８に記載の配線基板の製造方法。   The wiring according to claim 8, further comprising a step of providing another support on the other surface side of the insulating layer via an adhesive layer between the step of forming the opening and the step of removing the support. Substrate manufacturing method. 前記配線層を形成する工程では、
硫酸銅と硫酸を所定の濃度比で建浴した電解銅めっき液を用いた電解めっき法により、前記第１の部分及び前記第２の部分を銅めっきで形成し、
前記所定の濃度比を予め調整することで、前記第１の部分の層厚を前記第２の部分の層厚よりも薄く形成する請求項８又は９に記載の配線基板の製造方法。 In the step of forming the wiring layer,
The first portion and the second portion are formed by copper plating by an electrolytic plating method using an electrolytic copper plating solution in which copper sulfate and sulfuric acid are bathed at a predetermined concentration ratio,
The method for manufacturing a wiring board according to claim 8, wherein the layer thickness of the first portion is formed thinner than the layer thickness of the second portion by adjusting the predetermined concentration ratio in advance.
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