JP6679394B2 - Measurement result notification device, measurement system, and measurement result notification method - Google Patents

Description

  The present invention is configured to include a measurement result notifying device and a measurement result notifying method for visually notifying measurement results of a plurality of inspection points defined on a substrate to be inspected, and such a measurement result notifying device. It concerns a measurement system.

  For example, the following patent documents disclose an invention of an in-circuit tester (a method of outputting and displaying defective data by the in-circuit tester) configured to display or print an inspection result by performing an inspection on a substrate to be inspected. ing.

  In this in-circuit tester, first, the probe pin is probed to a plurality of measurement points defined on the board to be inspected, and measurement processing is performed between the measurement points (inspection points) to obtain measurement data. . Next, by comparing the value of the reference data (hereinafter, also referred to as “reference value”) absorbed from the corresponding portion of the non-defective substrate with the value of the above measurement data (hereinafter, also referred to as “measured value”), Inspect the inspection location for quality. In this case, in this in-circuit tester, the allowable range for the satisfaction rate of the measured value with respect to the reference value is set for each inspection point (each measurement step), and the satisfaction rate is within the allowable range in parallel with the measurement process. It is determined whether or not there is, and when the sufficiency ratio is out of the allowable range, a configuration is adopted in which the inspection data is additionally written as a defect at the inspection location.

  Also, in this in-circuit tester, "measurement step number display column" showing the number of steps of the measurement process, "pin number display column" showing the number of the probe pin used in the measurement process, "measurement value display column" showing the measured value , "Satisfaction rate display column" showing the satisfaction rate, "Tolerance range display field" showing the specified allowable range, and "Disparity display field" showing the difference between the measured value and the reference value (difference between both values). A configuration in which a list provided for each inspection location (each measurement step) is displayed or printed based on the above inspection data to notify the inspection result of the inspected substrate is adopted. This makes it possible for this in-circuit tester to identify which inspection location (which measurement step) is defective by referring to the numerical values in the displayed or printed list. There is.

JP-A-3-197880 (pages 2-4, FIGS. 1-3)

  However, the in-circuit tester disclosed in the above patent documents has the following problems to be solved. That is, in the above-mentioned in-circuit tester, the inspection point (measurement step) where the satisfaction rate of the measured value with respect to the reference value is out of the allowable range is determined to be defective, the inspection data is generated, and the list based on the inspection data is displayed. Alternatively, a configuration is adopted in which the inspection result of the inspected substrate is notified by printing.

  In this case, among the inspection points that are inspected as defective by the inspection by the in-circuit tester, there are various inspection points from an inspection point having a high sufficiency rate to an inspection point having a low sufficiency rate. Further, in the substrate to be inspected, due to a change in the manufacturing conditions (manufacturing environment) or the like, the inspection location where the defect occurs changes or the degree of the defect changes. Therefore, at the time of inspection using this type of apparatus, it is necessary to specify, to a plurality of substrates to be inspected, what degree of defect has occurred in which inspection place. However, in the above-mentioned in-circuit tester, the sufficiency rate for a plurality of boards to be inspected, which have inspection points that have been inspected as defective, is numerically displayed in the list. It is very difficult to grasp how much defect (what filling rate) is occurring at a location.

  The present invention has been made in view of the problems to be solved, and a measurement that can easily grasp what degree of failure is occurring at which inspection location when inspecting a plurality of substrates to be inspected. It is a main object to provide a result notification device, a measurement system, and a measurement result notification method.

In order to achieve the above-mentioned object, in the measurement result notification device according to claim 1, measured values respectively measured at a plurality of inspection points defined on the board to be inspected are individually given to the respective inspection points. Based on the measured value data recorded in association with the code and the reference value data recorded in association with the reference value for each of the inspection points, it is possible to specify the quality of each of the inspection points to obtain a measurement result. A measurement result notification device having a processing unit for visually notifying, wherein the processing unit notifies the measurement results of a plurality of the substrates to be inspected of the same type in which each inspection location is defined at the same location. When performing, the specific value that can specify the quality level of each inspection location is calculated for each inspected substrate based on the measured value and the reference value, and the With identifying respective distribution of values for a particular, the order that is specified based on the code to correspond to the first direction, and a value for said particular in a second direction intersecting with the first direction For a display cell group in which a plurality of unit display cells are arranged in a matrix in association with each other, a distribution of the specific value corresponding to a predetermined one of hue, lightness and saturation of each unit display cell. The notification image data is generated by drawing in a state corresponding to the amount, and the measurement result for each inspection location is notified based on the generated notification image data.

  The measurement result notification device according to claim 2 is the measurement result notification device according to claim 1, wherein the processing unit displays the color bar capable of specifying a correspondence between the one defined in advance and the distribution amount. The image data for notification is generated by drawing side by side with the cell group.

In the measurement result notifying apparatus according to claim 3, measured values measured at a plurality of inspection points defined on the board to be inspected are recorded in association with codes individually given to the respective inspection points. Based on the measured value data and the reference value data in which the reference value for each of the inspection points is recorded in association with the code, a processing unit for visually notifying the measurement result so that the quality of each of the inspection points can be specified. In the measurement result notifying apparatus, the processing unit, when notifying the measurement results of a plurality of the substrates to be inspected in the same kind of each inspection point is defined in the same place, each inspection A value for identification that can specify the degree of quality of the location is calculated for each of the inspected substrates based on the measured value and the reference value, and the distribution of the value for each identification for each of the inspection locations is calculated. So With identifying, respectively, the code in the order specified to correspond to the first direction based on, and the distribution of values for said particular in association with a second direction intersecting with the first direction Regarding a display cell group in which a plurality of unit display cells are arranged in a matrix, a state in which a predetermined one of the hue, lightness and saturation of each unit display cell is made to correspond to the corresponding specific value. Is drawn to generate notification image data, and the measurement result for each inspection location is notified based on the generated notification image data.

  The measurement result notification device according to claim 4 is the measurement result notification device according to claim 3, wherein the processing unit includes a color bar capable of specifying a correspondence relationship between the one specified in advance and the specifying value. The notification image data is generated by drawing side by side with the display cell group.

  A measurement system according to claim 5 is the measurement result notification device according to any one of claims 1 to 4, and executes the measurement process for each of the inspection points to generate the measurement value data in which the measurement values are recorded. And a measuring device for performing the measurement.

In the measurement result notifying method according to claim 6, measured values measured at a plurality of inspection points defined on a substrate to be inspected are recorded in association with a code individually given to each inspection point. Based on the measured value data, and the reference value data recorded by associating the reference value for each of the inspection points with the code, the measurement result visually informing the quality of each of the inspection points can be specified. A method of informing, wherein when each of the inspection points is informed of the measurement results of a plurality of the substrates to be inspected of the same kind defined at the same point, it is possible to specify the degree of quality of each inspection point. Values for each of the inspected substrates based on the measured value and the reference value, and specify the distribution of each of the specified values for each of the inspection points, and The order specified based on in correspondence to the first direction, and has a value for said particular in association with a second direction intersecting with the first direction are arranged a plurality of unit display cells in a matrix For the display cell group, an image data for notification is drawn by drawing a predetermined one of the hue, lightness, and saturation of each unit display cell in a state corresponding to the distribution amount of the corresponding specific value. Is generated, and the measurement result for each of the inspection points is notified based on the generated notification image data.

In the measurement result notifying method according to claim 7, measured values measured at a plurality of inspection points defined on a substrate to be inspected are recorded in association with a code individually given to each inspection point. Based on the measured value data, and the reference value data recorded by associating the reference value for each of the inspection points with the code, the measurement result visually informing the quality of each of the inspection points can be specified. A method of informing, wherein when each of the inspection points is informed of the measurement results of a plurality of the substrates to be inspected of the same kind defined at the same point, it is possible to specify the degree of quality of each inspection point. Values for each of the inspected substrates based on the measured value and the reference value, and specify the distribution of each of the specified values for each of the inspection points, and The order specified based on the first direction to correspond, and the distribution of specifying values in association with a second direction intersecting with the first direction matrix a plurality of display cell units For the display cell group arranged in the above, the notification image data is drawn by drawing a predetermined one of the hue, lightness, and saturation of each unit display cell in correspondence with the corresponding specific value. Is generated, and the measurement result for each of the inspection points is notified based on the generated notification image data.

  With the measurement result notification device according to claim 1 and the measurement result notification method according to claim 6, it is possible to specify the quality level of each inspection point when the measurement results of a plurality of substrates to be inspected of the same type are notified. The specified value is calculated for each inspected board based on the measured value and the reference value, and the distribution of each specified value for each inspection point is specified, and each inspection point is individually specified. A plurality of unit display cells are arranged in a matrix so that the order specified based on the code given to the first direction is associated with the first direction, and the specifying value is associated with the second direction intersecting the first direction. With respect to the display cell group arranged in the above, the notification image is drawn by drawing a predetermined one of the hue, lightness, and saturation of each unit display cell in a state corresponding to the distribution amount of the corresponding specific value. Generate data and report Visually notifying the measurement results for each inspection point on the basis of the use image data. Further, the measurement system according to claim 5 is configured to include the above measurement result notification device and a measurement device that executes measurement processing for each inspection point and generates measurement value data in which measurement values are recorded. There is.

  Therefore, according to the measurement result notification device according to claim 1, the measurement system according to claim 5, and the measurement result notification method according to claim 6, a list of measurement results for each inspection point of a plurality of substrates to be inspected is listed. Different from the measurement result (inspection result) that is displayed and printed in the format (numerical value), by referring to each unit display cell of the displayed or printed notification image, the difference in hue, lightness or saturation of the unit display cell Depending on how many "specific values" existed at each inspection point (how many "specific values" are many, and how many "specific values" are few), that is, It is possible to intuitively grasp the degree of the defect degree (good degree) of each inspection location. As a result, it is possible to easily grasp the measurement results for a large number of inspection points on a plurality of substrates to be inspected, without performing an operation of scrolling the measurement results (list) or turning the pages.

  According to the measurement result notifying device, the measurement system provided with such a measurement result notifying device, and the measurement result notifying method according to claim 2, correspondence between the hue, lightness or saturation of each unit display cell and the distribution amount By drawing a color bar that can specify the relationship along with the display cell group and generating the image data for notification, how much "specific value" is large and how much "specific value" is small Can be more easily grasped for each inspection location.

  With the measurement result notifying apparatus according to claim 3 and the measurement result notifying method according to claim 7, when notifying the measurement results for a plurality of substrates to be inspected of the same type, it is possible to specify the quality level of each inspection location. The specified value is calculated for each inspected board based on the measured value and the reference value, and the distribution of each specified value for each inspection point is specified, and each inspection point is individually specified. A plurality of unit display cells in which the order specified based on the code given to the first direction corresponds to the first direction, and the distribution amount of the specifying value corresponds to the second direction intersecting the first direction. For the display cell group in which the symbols are arranged in a matrix, a predetermined one of the hue, lightness, and saturation of each unit display cell is drawn in a state corresponding to the corresponding specific value, and the notification image is drawn. Generate data and report Visually notifying the measurement results for each inspection point on the basis of the use image data. Further, the measurement system according to claim 5 is configured to include the above measurement result notification device and a measurement device that executes measurement processing for each inspection point and generates measurement value data in which measurement values are recorded. There is.

  Therefore, according to the measurement result notification device according to claim 3, the measurement system according to claim 5, and the measurement result notification method according to claim 7, a list of measurement results for each inspection point of a plurality of substrates to be inspected is listed. Different from the measurement result (inspection result) that is displayed and printed in the format (numerical value), by referring to each unit display cell of the displayed or printed notification image, the difference in hue, lightness or saturation of the unit display cell Depending on how many "specific values" existed at each inspection point (how many "specific values" are many, and how many "specific values" are few), that is, It is possible to intuitively grasp the degree of the defect degree (good degree) of each inspection location. As a result, it is possible to easily grasp the measurement results for a large number of inspection points on a plurality of substrates to be inspected, without performing an operation of scrolling the measurement results (list) or turning the pages.

  According to the measurement result notifying device, the measurement system provided with such a measurement result notifying device, and the measurement result notifying method according to claim 4, the hue, lightness or saturation of each unit display cell and a value for specifying By creating a notification image data by drawing a color bar that can specify the correspondence relationship with the display cell group, the number of "specific values" is large and the extent of "specific value" is large. It can be more easily grasped for each inspection point whether the number is small.

It is a block diagram which shows the structure of the board | substrate inspection system 100 (measurement apparatus 1 and data processing apparatus 2). It is an explanatory view for explaining an example of information image G5 (cell group image G1 and color bar G2). It is an explanatory view for explaining an example of information image G5a (cell group image G1a and color bar G2a).

  Embodiments of a measurement result notification device, a measurement system, and a measurement result notification method according to the present invention will be described below with reference to the accompanying drawings.

  The substrate inspection system 100 shown in FIG. 1 is an example of a “measurement system”, and includes a measurement device 1 and a data processing device 2, and a plurality of substrates to be inspected X of the same type in which each inspection place is defined at the same place. Based on the measurement result by the measuring device 1 regarding the above, the tendency of pass / fail about each inspected portion in each inspected substrate X in the data processing device 2 (the degree of failure and the degree of goodness: “measurement result for a plurality of inspected substrates of the same type” ") Is specified so that it can be specified. In this case, the board to be inspected X corresponds to the “board to be inspected”, in which conductor paths (not shown) each including a conductor pattern and vias are formed, and in order to inspect the quality of each inspection point. Several hundred to several thousand inspection points are specified.

  The measuring apparatus 1 is an example of a “measuring apparatus”, and includes a measuring jig 11, a scanner 12, a measuring unit 13, a storage unit 14, and a processing unit 15, as shown in FIG. It is configured to be able to execute the measurement process for. The measuring jig 11 is provided with a plurality of measuring probes 11a that are probably implanted at a plurality of probing points defined for the measurement process for each inspection point on the substrate X to be inspected.

  Under the control of the processing unit 15, the scanner 12 connects an arbitrary measuring probe 11a of the measuring jig 11 to the measuring unit 13. Under the control of the processing unit 15, the measuring unit 13 measures an electrical parameter (a resistance value, for example) at an arbitrary inspection location on the inspected substrate X via the measurement probe 11a connected by the scanner 12.

  The storage unit 14 temporarily stores the measurement procedure data Da in which the measurement procedure (inspection procedure) for the inspected substrate X is recorded, the calculation result of the processing unit 15, and the like. The processing unit 15 controls the measuring device 1 as a whole. Specifically, the processing unit 15 controls the scanner 12 according to the measurement procedure data Da to connect the arbitrary measurement probe 11a to the measurement unit 13, and controls the measurement unit 13 to execute the resistance value measurement process. Let

  In this case, in the substrate inspection system 100 (measurement apparatus 1) of this example, the measurement step number for each inspection location on the substrate X to be inspected (an example of “a code individually assigned to each inspection location”) Is added, and the processing unit 15 controls the scanner 12 so that the measurement process is performed by the measurement unit 13 in the order of the measurement step numbers recorded in the measurement procedure data Da. Further, the processing unit 15 records the measurement value output from the measurement unit 13 in association with the measurement step number of the inspection point where the measurement value is measured, and records the measurement value data D1 (an example of “measurement value data”). And the generated measurement value data D1 is output to the data processing device 2.

  On the other hand, the data processing device 2 corresponds to a “measurement result notifying device”, and is constituted by, for example, a general-purpose personal computer in which a data processing program is installed. Specifically, the data processing device 2 includes an operation unit 21, a display unit 22, a printing unit 23, a storage unit 24, and a processing unit 25. The operation unit 21 is configured by a pointing device such as a mouse and a touch pad, a keyboard, and the like, and outputs an operation signal according to an operation by the user to the processing unit 25. The display unit 22 displays a measurement result display screen or the like, as described later, under the control of the processing unit 25. The printing unit 23 prints a measurement result, which will be described later, and the like, under the control of the processing unit 25.

  The storage unit 24 stores the program for data processing described above, the measurement value data D1 output from the measuring device 1, the reference value data D0, the color bar image data D2 and D2a, the difference rate data D3, the distribution amount data D4, The notification image data D5, D5a, etc. are stored. In this case, the reference value data D0 is an example of “reference value data”, and the reference value defined in advance for each of the above-mentioned inspection points on the inspected substrate X is recorded. For example, the reference value data D0 is generated in an external device based on the design data or the like of the substrate X to be inspected and stored in the storage unit 24 of the data processing device 2.

  In addition, the color bar image data D2 has the brightness defined for each unit display cell C (see FIG. 2) in the cell group image G1 drawn by the processing unit 25 for the purpose of notifying the measurement result as described later. Image data of a color bar G2 (see FIG. 2) whose range can be specified is configured. Further, the color bar image data D2a has the brightness defined for each unit display cell Ca (see FIG. 3) in the cell group image G1a drawn by the processing unit 25 for the purpose of notifying the measurement result as described later. The image data of the color bar G2a (see FIG. 3) that can specify the range is configured. The relationship between the color bars G2 and G2a of the color bar image data D2 and D2a and the brightness of the unit display cells C and Ca in the cell group images G1 and G1a will be described in detail later.

  Further, the difference rate data D3 is data in which “the difference rate of the measured value with respect to the reference value”, which is an example of the “specification value”, is recorded, and the distribution amount data D4 is the above “difference rate”. It is data indicating the distribution for each inspection location, and is generated during the data processing executed by the processing unit 25 as described later. The “difference rate (specific value)” and its “distribution” will be described in detail later. Further, the notification image data D5, D5a is an example of “notification image data”, and is generated by data processing executed by the processing unit 25 as described later.

  The processing unit 25 controls the data processing device 2 as a whole. The processing unit 25 is an example of a “processing unit”, and generates and generates the notification image data D5, D5a based on the reference value data D0 and the measurement value data D1 according to the above data processing program. The notification image data D5 and D5a are used to display the measurement result of each inspection location on each inspected substrate X on the display unit 22 or the printing unit 23 (“visually notify measurement result”). "). The process of informing the measurement result by the processing unit 25 will be described later in detail with a specific example.

  When the substrate inspection system 100 executes the measurement process for a plurality of inspected substrates X and the notification of the measurement result, first, the first inspected substrate X is set in the measuring apparatus 1. Measure the resistance value at each inspection point. In the actual measuring apparatus 1, the substrate X to be inspected is held by a substrate holding unit (not shown), and the measuring jig 11 is moved by a moving mechanism (not shown) (for each measurement with respect to the probing point defined for each inspection point). Although probing of the probe 11a) and the like are performed, these operations are publicly known and will not be described.

  At this time, the processing unit 15 controls the scanner 12 and the measuring unit 13 in accordance with the measurement procedure data Da to perform the measurement process for each inspection location in the numerical order of the measurement step numbers recorded in the measurement procedure data Da. Let it run. In addition, every time the measurement value is output from the measurement unit 13, the processing unit 15 records the measurement value data D1 in association with the measurement step number of the inspection location where the measurement value was measured. As a result, the measurement value data D1 in which the measurement values for the respective inspection points on the first substrate to be inspected X are recorded is generated. After that, the measurement value data D1 is generated for each inspected substrate X by performing the measurement processing for each inspected portion on the second and subsequent inspected substrates X in the same procedure as described above. It

  On the other hand, when notifying the measurement result of each inspected substrate X, each time the measurement process (generation of the measurement value data D1) for one inspected substrate X is completed, or a plurality of inspected substrates to be inspected When the measurement process (generation of the measurement value data D1) for the substrate X is completed, the measurement value data D1 is transferred from the measuring device 1 to the data processing device 2. Further, when the prescribed number of measured value data D1 for which the tendency of pass / fail for each inspection location should be notified is transferred to the data processing device 2, the measured result is displayed based on each measured value data D1, D1 ... Or let it print.

  Specifically, as an example, the measurement process for 100 inspected substrates X is completed, and 100 measurement value data D1 are transferred from the measurement device 1 to the data processing device 2 and stored in the storage unit 24. In the state, the operation unit 21 of the data processing device 2 is operated to start notification of the measurement result. At this time, the processing unit 25 first obtains the value of the measurement value data D1 for the inspected substrate X for which the first measurement processing has been performed and the value of the reference value data D0 stored in the storage unit 24. Based on this, a "specification value" capable of specifying the quality level of each inspection location (each conductor pattern or each via) is calculated for each measurement step number of each inspection location.

  More specifically, in the data processing device 2 (substrate inspection system 100) of this example, as an example, the reference value recorded in the reference value data D0 is subtracted from the measurement value recorded in the measurement value data D1. A value obtained by dividing the value by the reference value (hereinafter, this value is also referred to as "difference rate") is calculated for each inspection location as a "specification value", and the calculation result is stored in the storage unit 24 as difference rate data D3. Remember. Instead of the above-mentioned "difference rate", the value obtained by subtracting the reference value from the measured value divided by the reference value may be multiplied by "100" to obtain the "difference rate". Such arithmetic processing (generation and storage of the difference rate data D3) is sequentially performed on the inspected substrates X for which the second and subsequent measurement processes have been performed, so that each inspected portion on 100 inspected substrates X is inspected. The difference rate for each is calculated, and 100 pieces of difference rate data D3 are stored in the storage unit 24.

  Next, the processing unit 25 specifies the distribution of the above "difference rate" for each inspection location based on the above respective difference rate data D3. Specifically, the processing unit 25 specifies, for each inspection location, the degree of difference and how many different rates there are, based on 100 pieces of difference rate data D3. More specifically, as an example, when it is assumed that the difference rate calculated when inspecting the inspected substrate X is within the range of “difference rate: −0.10 or more and +0.10 or less”, this assumption is made. 19 difference rate ranges obtained by dividing the range (for example, "-0.10 or more and less than -0.09", "-0.09 or more and less than -0.08" ... "-0.01 or more and +0.01 or less) "・ ・" More than +0.08 to +0.09 or less "," more than +0.09 to +0.10 or less "), and how many difference rates are included in each difference rate range? Is specified for each inspection location, and the distribution amount data D4 in which the distribution amount for each difference rate range for each inspection location is recorded is stored in the storage unit 24.

  Subsequently, the processing unit 25, as shown in FIG. 2, based on the difference rate data D3 and the distribution amount data D4, the dot-shaped unit display cell C (“unit display”) indicating the distribution amount of the difference rate for each inspection location. A cell group image G1 in which “examples of cells” are arranged in a matrix is drawn. The cell group image G1 corresponds to a “display cell group”, and as an example, an order of measurement step numbers (an example of “the order specified based on the code”: “measurement step number = 1” to “in this example”). The order of measurement step number = 300) corresponds to the left-right direction (an example of the “first direction”), and the “difference rate” (an example of the “specification value”) corresponds to the vertical direction (the “second direction”). The unit display cells C described above are arranged in a matrix in correspondence with (example).

  In the present example in which the distribution amount of the difference rate for each of the 19 difference rate ranges is obtained as described above, the 19 unit display cells C corresponding to each difference rate range for each inspection location are vertically arranged. One cell row Cl is arranged side by side. Further, in the present example of notifying the distribution amount of the difference rate about the 300 inspection points of “measurement step number = 1” to “measurement step number = 300” as the measurement result, the inspection point of “measurement step number = 1” 300 cells from the cell column Cl composed of 19 unit display cells C of No. to the cell column Cl composed of 19 unit display cells C of the inspection point of “measurement step number = 300” The column Cl is drawn to form the cell group image G1.

  Further, in the cell group image G1 of this example, the lightness (an example of a process in which “one of the hue, lightness, and saturation is defined in advance” is “lightness”) corresponds to the distribution amount of the difference rate. Each unit display cell C is drawn. Specifically, in the data processing device 2 (substrate inspection system 100) of the present example, as an example, the unit display cell C corresponding to the difference rate range in which the distribution amount of the difference rate is small has a higher brightness and the difference rate is higher. As shown in FIG. 2, the cell group image G1 of the grayscale image is drawn by defining the lightness as low as the unit display cell C corresponding to the difference rate range in which the distribution amount is large. As a result, in the drawn cell group image G1, the brightness of each unit display cell C becomes different depending on the distribution amount for each difference rate range of the corresponding inspection location.

  Subsequently, the processing unit 25 draws the color bar G2 of the color bar image data D2 read from the storage unit 24 side by side with the cell group image G1 drawn as described above. In this case, the color bar G2 is an example of a “color bar”, and the range of lightness defined in each unit display cell C (in this example, the range from white to black) and the difference for each difference rate range described above. It is configured so that the correspondence relationship with the distribution amount of rates can be specified. Specifically, in the color bar G2 of this example, the smaller the distribution amount is, the higher the lightness (lightness toward the white) is associated, and the larger the distribution amount is, the lower lightness (the lightness toward the black) is associated. It is configured so that it can be specified. That is, in the color bar G2 of this example, the lightness gradually increases as the distribution amount decreases, and the lightness gradually decreases as the distribution amount increases.

  With the above processing, in the example of FIG. 2, the notification image G5 (cell group image G1 and color bar G2) showing the measurement results (distribution of the difference rate) at 300 inspection points on 100 inspected substrates X is obtained. The notification image data D5 (an example of “notification image data”) is generated.

  Next, the processing unit 25, as shown in FIG. 3, based on the difference rate data D3 and the distribution amount data D4, is a bar-shaped unit indicating the difference rate (magnitude of difference rate: degree of quality) for each inspection location. A cell group image G1a in which display cells Ca (another example of “unit display cell”) are arranged in a matrix is drawn. The cell group image G1a corresponds to a “display cell group”, and as an example, an order of measurement step numbers (an example of “an order specified based on a code”: “measurement step number = 1” to “in this example”). The measurement step number = 300 ”is associated with the left-right direction (an example of the“ first direction ”), and the“ distribution amount ”is associated with the up-down direction (an example of the“ second direction ”). The unit display cells Ca are arranged in a matrix.

  In this cell group image G1a, as an example, from the unit display cell Ca corresponding to “Distribution amount = 1 (the difference rate included in the corresponding difference rate range is 1)”, “Distribution amount = 20 (correspondence amount)” 20 unit display cells Ca up to the unit display cell Ca corresponding to "the difference rate included in the difference rate range is 20)" are arranged in the vertical direction to form one cell row Cla. Further, in the present example in which the difference rate for each distribution amount for 300 inspection points from “measurement step number = 1” to “measurement step number = 300” is notified as the measurement result, the inspection of “measurement step number = 1” From the cell array Cla composed of 20 unit display cells Ca for the location to the cell array Cla composed of 20 unit display cells Ca for the inspection location of “measurement step number = 300” The cell column Cla is drawn to form the cell group image G1a.

  Furthermore, in the cell group image G1a of this example, each unit display is performed so that the lightness (an example of a process in which "one of the hue, lightness, and saturation is defined in advance" is "lightness") corresponds to the difference rate. The cell Ca is drawn. Specifically, in the data processing device 2 (substrate inspection system 100) of the present example, as an example, the unit display cell Ca corresponding to the difference rate of a negative value having a large absolute value is defined to have a higher brightness and the absolute value is Is defined as a unit display cell Ca corresponding to a large positive difference rate, and the maximum brightness is set for the unit display cell Ca in which there is no corresponding distribution amount difference rate. As shown in, the cell group image G1a of the gray scale image is drawn. As a result, in the drawn cell group image G1a, the brightness of each unit display cell Ca becomes different according to the difference rate for each distribution amount of the corresponding inspection points.

  Specifically, as an example, the difference rate included in the difference rate range of “exceeding +0.09 and +0.10 or less” with respect to the inspection portion of “measurement step number = 1” on 100 inspected substrates X When there are 20 cells, the uppermost unit display cell Ca in the leftmost cell row Cla of the 300 cell rows Cla in the cell group image G1a is drawn with low brightness (color close to black). It will be.

  In addition, with respect to the inspection location of “measurement step number = 300” on 100 inspected substrates X, there was only one difference rate included in the difference rate range of “−0.10 or more and less than −0.09”. In this case, the lowermost unit display cell Ca in the rightmost cell row Cla of the 300 cell rows Cla in the cell group image G1a is drawn with high brightness (color close to white).

  Furthermore, if there is no difference rate specified as “distribution amount = 20” at the inspection points of “measurement step number = 150” on 100 inspected substrates X, 300 lines in the cell group image G1a are present. The uppermost unit display cell Ca in the central cell row Cla of the cell rows Cla is drawn with the maximum brightness (white).

  Subsequently, the processing unit 25 draws the color bar G2a of the color bar image data D2a read from the storage unit 24 side by side with the cell group image G1a drawn as described above. In this case, the color bar G2a is another example of the “color bar”, and is a range of the brightness (white to black range in this example) defined in each unit display cell Ca and the difference rate. It is configured so that the correspondence can be specified. Specifically, in the color bar G2a of this example, the higher the lightness (lightness toward white), the higher the absolute value of the negative value difference is associated, and the larger the absolute value of the positive value difference rate is, It is configured so that it is possible to specify that low lightness (lightness toward black) is associated. That is, in the color bar G2a of the present example, the lightness gradually decreases as the difference rate decreases, and the lightness gradually increases as the difference rate increases.

  With the above processing, in the example of FIG. 3, the notification image G5a (cell group image G1a and color bar G2a) showing the measurement results (difference rate for each distribution amount) at 300 inspection points on 100 inspected substrates X is obtained. ) Notification image data D5a (another example of “notification image data”) is generated.

  Next, the processing unit 25 notifies the measurement result (the tendency of acceptability of each inspection location in 100 inspection target boards X) for 100 inspection target substrates X based on the generated notification image data D5, D5a. To do.

  Specifically, first, based on the notification image data D5, as shown in FIG. 2, the notification image G5 (cell group image G1 and color bar G2) is displayed on the display unit 22. As a result, the cell group image G1 showing the measurement result for each inspection location of “Measurement step number = 1 to 300” on the 100 substrates X to be inspected is displayed side by side with the color bar G2. Notification. ").

  In this notification image G5 (cell group image G1), the brightness of the corresponding unit display cell C is changed according to the distribution amount of the difference rate for each of the above-described 19 different rate ranges for each inspection location (measurement step). Differentiated. Specifically, the unit display cells C corresponding to the difference rate range with a small distribution amount have higher brightness, and the unit display cells C corresponding to the difference rate range with a larger distribution amount have lower brightness. 19 unit display cells C in the cell column Cl corresponding to are drawn. Therefore, by referring to the unit display cells C in the notification image G5 (cell group image G1) together with the color bar G2, how much difference rate is large and how little difference rate is small, that is, how many defects are present. It is possible to intuitively grasp the degree of occurrence of each of the inspection points.

  In this case, in the cell group image G1 (each cell column Cl) of the notification image G5 shown in the figure, the higher the difference rate close to “0.00”, the lower the brightness of the central unit display cell C in the vertical direction. It will be drawn in (a color close to black). Therefore, when most of the inspection points on 100 inspected substrates X are good, it corresponds to the inspection points from "measurement step number: 1" to "measurement step number: 230" shown in FIG. Of the 19 unit display cells C arranged in the vertical direction like the cell column Cl, the unit display cell C near the center has a low brightness, and the brightness of each of the upper and lower unit display cells C is low. Displayed high.

  Further, when many defects occur at any of the inspection locations on 100 substrates X to be inspected, the inspection from around “measurement step number: 230” to “measurement step number: 300” shown in FIG. Like the cell row Cl corresponding to a part of the locations, the unit display cells C other than the central portion among the 19 unit display cells C arranged in the vertical direction in the cell row Cl corresponding to the inspection location In the figure, the brightness of the unit display cell C) which is slightly higher is displayed low, and the brightness of each of the other unit display cells C is displayed high. Therefore, it is possible to intuitively grasp the degree of defect and the degree of goodness of each inspected part on each inspected substrate X.

  Further, in the data processing device 2 (substrate inspection system 100) of this example, the tendency of pass / fail for each inspection location on 100 substrates X to be inspected is notified in a mode different from the above-described display of the notification image G5. Is possible. Specifically, instead of displaying the notification image G5 based on the notification image data D5, based on the notification image data D5a, as shown in FIG. 3, the notification image G5a (cell group image G1a and color bar G2a). Is displayed on the display unit 22. As a result, the cell group image G1a showing the measurement result for each inspection location of “Measurement step number = 1 to 300” on the 100 substrates to be inspected X is displayed side by side with the color bar G2a. Another example of the processing of "notifying to.").

  In this notification image G5a (cell group image G1a), for each of 20 types of “distribution amount” from “distribution amount = 1” to “distribution amount = 20” described above for each inspection location (measurement step), The brightness of the corresponding unit display cell Ca is made different according to the magnitude of the difference rate for which the "distribution amount" is specified. Specifically, a unit display cell Ca having a distribution amount that has been identified as having a large negative difference value distribution has a higher lightness and a larger positive difference value distribution ratio. The 20 unit display cells Ca in the cell row Cla corresponding to each inspection location are drawn so that the unit display cells Ca having the distribution amount that is specified have a lower brightness. Therefore, by referring to the unit display cell Ca in the notification image G5a (cell group image G1a) together with the color bar G2a, how much difference rate is large and how little difference rate is small, that is, how many defects. It is possible to intuitively grasp the degree of occurrence of each of the inspection points.

  In this case, in the cell group image G1a (each cell row Cla) of the notification image G5a shown in the same figure, the closer the difference rate is to “0.00”, the intermediate brightness (a color closer to gray intermediate between black and white). ), The unit display cell Ca is drawn. In the cell group image G1a (each cell column Cla) of the notification image G5a, the unit display cell Ca corresponding to the distribution amount having a large value is drawn upward and the unit display cell Ca corresponding to the distribution amount having a small value is displayed. It is drawn below.

  Therefore, although it differs from the example of the notification image G5a (cell group image G1a) shown in the same figure, when most of the inspection points on 100 inspected substrates X are good, the upper part of each cell row Cla is Most of the unit display cells Ca closer to each other are drawn with a brightness close to an intermediate brightness (a color close to gray), and even if there is a small amount of the substrate X to be inspected having a defective inspection portion, each cell row Either one of the lower unit display cells Ca in Cla has high brightness (color close to white: large absolute value with a negative difference ratio) or low brightness (color close to black: large absolute value). When there is a positive difference rate, it is drawn. Therefore, it is possible to intuitively grasp the degree of defect and the degree of goodness of each inspected part on each inspected substrate X.

  In the board inspection system 100 (data processing device 2) of the present example, instead of displaying on the display unit 22, the notification image data D5, D5a is output to the printing unit 23 to output the notification image G5 ( The cell group image G1 and the color bar G2) and the notification image G5a (the cell group image G1a and the color bar G2a) can be printed on the paper surface (another example of the process of "visually notifying the measurement result"). . As a result, in the same manner as when the notification images G5, G5a displayed on the display unit 22 are referred to, the notification images G5, G5a printed on the paper surface are referred to, so that 100 inspection target boards X are displayed. It is possible to intuitively understand how many defects have occurred and how many defects have occurred.

  As described above, according to the data processing device 2 and the measurement result notifying method thereof, when notifying the measurement results of a plurality of inspected substrates X of the same type, it is possible to specify the degree of pass / fail of each inspection location. "Value for difference (in this example, difference rate)" is calculated for each inspected substrate X based on the measured value and the reference value, and the distribution of each difference rate for each inspection location is specified. The order specified based on the codes individually given to the inspection points (in this example, the order of the measurement step numbers) is made to correspond to the “first direction (left and right direction in this example)”, In addition, regarding the cell group image G1 in which a plurality of unit display cells C are arranged in a matrix with the difference rate corresponding to the “second direction (up and down direction in this example)”, the hue, brightness and color of each unit display cell C are A predefined one of the degrees In this example, the lightness) is drawn in a state of being associated with the distribution amount of the corresponding difference rate to generate the notification image data D5. Based on the generated notification image data D5, the measurement result for each inspection location is displayed. Notify visually. Further, the board inspection system 100 is configured to include the above-described data processing device 2 and the measurement device 1 that executes the measurement process for each inspection location and generates the measurement value data D1 in which the measurement value is recorded. There is.

  Therefore, according to the data processing device 2, the board inspection system 100, and the measurement result notifying method, the measurement results for each inspection point of the plurality of boards to be inspected are displayed and printed in the form of a list (numerical values). Unlike the (inspection result), by referring to each unit display cell C, C ... of the displayed or printed notification image G5, the hue, lightness or saturation of the unit display cell C (lightness in this example) The degree of difference between the inspection points and the degree of difference (the degree of difference is high and the degree of difference is low), that is, the degree of failure (the degree of goodness) of each inspection point. ) Can be intuitively grasped how much was. As a result, it is possible to easily grasp the measurement results for a large number of inspection points on a plurality of substrates to be inspected, without performing an operation of scrolling the measurement results (list) or turning the pages.

  Further, according to the data processing device 2, the board inspection system 100, and the measurement result notification method, it is possible to specify the correspondence relationship between the hue, lightness or saturation (lightness in this example) of each unit display cell C and the distribution amount. A color bar G2 is drawn side by side with the cell group image G1 to generate the notification image data D5, so that it is easier to grasp how much difference rate is large and how little difference rate is small for each inspection location. Can be made.

  Further, in the data processing device 2 and the measurement result notifying method thereof, when notifying the measurement results of a plurality of substrates to be inspected X of the same type, the difference rate capable of specifying the quality level of each inspection point is measured. The calculation is performed for each inspected substrate X based on the value and the reference value, and the distribution of each difference rate for each inspection location is specified, and "based on the code individually assigned to each inspection location". Specified order (in this example, the order of measurement step numbers) "corresponds to the" first direction (in this example, the left-right direction) "and the distribution rate of the difference rate is set in the" second direction (book) ". In the example, for the cell group image G1a in which a plurality of unit display cells Ca are arranged in a matrix in correspondence with (vertical direction) ”, one of the hue, lightness, and saturation of each unit display cell Ca is defined in advance ( (In this example, brightness) By drawing in a state of being associated to the corresponding percent difference creates broadcast image data D5a, visually notifying the measurement results for each inspection point on the basis of the created broadcast image data D5a. Further, the board inspection system 100 is configured to include the above-described data processing device 2 and the measurement device 1 that executes the measurement process for each inspection location and generates the measurement value data D1 in which the measurement value is recorded. There is.

  Therefore, according to the data processing device 2, the measurement system, and the measurement result notifying method, the measurement results for each inspection point of the plurality of substrates to be inspected are displayed and printed in the form of a list (numerical values). Different from the result), by referring to each unit display cell Ca, Ca ... Of the displayed or printed notification image G5a, the difference in hue, lightness, or saturation (lightness in this example) of the unit display cell Ca Depending on how much difference rate exists at each inspection point (how much difference rate is large and how little difference rate is small), that is, the defect degree (good degree) at each inspection point It is possible to intuitively grasp how much it was. As a result, it is possible to easily grasp the measurement results for a large number of inspection points on a plurality of substrates to be inspected, without performing an operation of scrolling the measurement results (list) or turning the pages.

  Further, according to the data processing device 2, the board inspection system 100, and the measurement result notifying method, it is possible to specify the correspondence relationship between the hue, lightness or saturation (lightness in this example) of each unit display cell Ca and the difference rate. A color bar G2a is drawn side by side with the cell group image G1a to generate the notification image data D5a, so that it is easier to grasp how much difference rate is large and how little difference rate is small for each inspection point. Can be made.

  The configurations of the “measurement result notification device” and the “measurement system” and the processing contents of the “measurement result notification method” are not limited to the above examples. For example, a value obtained by subtracting the reference value from the measurement value divided by the reference value, or a value (difference rate) obtained by multiplying the value by “100” is calculated as the “specification value” to give the notification image data. Although the example of generating D5 has been described, the “specification value” is not limited to the above “difference rate”. For example, "a value obtained by dividing the measured value by a reference value (a value similar to the" sufficiency rate "calculated in the in-circuit tester disclosed in the above patent document)" or a value obtained by multiplying the value by "100" It can be calculated and used as a "specific value".

  In addition, as an example of “one defined in advance among hue, lightness, and saturation”, “lightness” of the unit display cell C is “amount of distribution of a specific value (difference rate in the above example)”. To generate the notification image data D5 of the grayscale image, or to change the "brightness" of the unit display cell Ca according to the "specific value (difference rate in the above example)". Although the process of generating the notification image data D5a of the grayscale image has been described as an example, the “brightness” of the “unit display cell” of any color other than gray (monotone) is set to “the value of the specific value”. It is also possible to generate the "report image data" by making it different depending on the "distribution amount" or the "specification value".

  Further, instead of the process of changing the "brightness", if the "hue" or "saturation" of the color of the "unit display cell" differs depending on the "specific value distribution amount" or the "specific value". It is also possible to generate "report image data". Further, an example in which the cell group image G1 in which the dot-shaped unit display cells C are arranged and the cell group image G1a in which the bar-shaped unit display cells Ca are arranged is referred to as a “display cell group” has been described. It is also possible to arrange "display cells" to form a "display cell group".

  Furthermore, an example has been described in which the “measurement step number” assigned to each inspection step is used as the “code individually assigned to each inspection location” to perform the measurement processing and the measurement result notification processing. However, the “code” is not limited to this example. As long as it can be individually identified, for example, instead of the “measurement step number”, the pattern number given to each conductor path at the time of designing the inspected substrate X is used as a code of the corresponding inspection point, or each inspection point On the other hand, a number arbitrarily given separately from the measurement step number can be used as a code.

  Also, an example has been described in which the "first direction" is the "horizontal direction" and the "second direction" is the "vertical direction". However, regarding the "first direction" and the "second direction", Any direction can be used as long as the directions intersect with each other. Specifically, as one example, the “first image direction data” can be generated by setting the “first direction” to the “vertical direction” and the “second direction” to the “horizontal direction”.

  In addition, the measurement device 1 that executes the measurement process for the substrate X to be inspected through the measurement jig 11 and the scanner 12 has been described as an example, but the configuration of the “measurement device” in the “measurement system” is as follows. The configuration is not limited to the above, but is provided with a “measuring device” capable of performing measurement processing on “inspected substrate” by moving each measurement probe individually and independently by a probe moving mechanism and probing to an arbitrary probing point. You can also do it.

100 board inspection system 1 measuring device 2 data processing device 11 measuring jig 13 measuring unit 15, 25 processing unit 22 display unit 23 printing unit C, Ca unit display cell D0 reference value data D1 measurement value data D2, D2a color bar image Data D3 Difference rate data D4 Distribution amount data D5, D5a Notification image data Da Measurement procedure data G1, G1a Cell group image G2, G2a Color bar G5, G5a Notification image X Inspected substrate X

Claims (7)

Measurement value data in which measured values measured at a plurality of inspection points defined on the board to be inspected are recorded in association with a code individually given to each inspection point, and for each of the inspection points A reference value of the reference value data recorded in association with the code, based on the reference value data recorded, a measurement result notifying apparatus including a processing unit for visually notifying the measurement result capable of specifying the quality of each inspection location,
The processing unit, when informing the measurement results of a plurality of the substrates to be inspected of the same type in which each of the inspection points is defined in the same place, for specifying the degree of quality of each inspection point Is calculated for each of the inspected substrates based on the measured value and the reference value, and the distribution of each of the specifying values for each of the inspection points is specified, and is specified based on the code. A display cell group in which a plurality of unit display cells are arranged in a matrix in which the specified order is associated with a first direction and the specifying value is associated with a second direction intersecting the first direction. , Generating a notification image data by drawing a predetermined one of the hue, lightness and saturation of each unit display cell in a state corresponding to the distribution amount of the corresponding specific value, Generated for the notification Measurement reporting device for reporting the measurement result for each inspection point on the basis of the image data.   The measurement result according to claim 1, wherein the processing unit draws a color bar capable of specifying a correspondence relationship between the one defined in advance and the distribution amount side by side with the display cell group to generate the notification image data. Notification device. Measurement value data in which measured values measured at a plurality of inspection points defined on the board to be inspected are recorded in association with a code individually given to each inspection point, and for each of the inspection points A reference value of the reference value data recorded in association with the code, based on the reference value data recorded, a measurement result notifying apparatus including a processing unit for visually notifying the measurement result capable of specifying the quality of each inspection location,
The processing unit, when informing the measurement results of a plurality of the substrates to be inspected of the same type in which each of the inspection points is defined in the same place, for specifying the degree of quality of each inspection point Is calculated for each of the inspected substrates based on the measured value and the reference value, and the distribution of each of the specifying values for each of the inspection points is specified, and is specified based on the code. A display in which a plurality of unit display cells are arranged in a matrix in which the order in which the specified values are distributed corresponds to the first direction and the distribution amount of the specific value corresponds to the second direction intersecting the first direction. Regarding the cell group, the notification image data is generated by drawing the predetermined one of the hue, the brightness, and the saturation of each unit display cell in correspondence with the corresponding specific value, Generated for the notification Measurement reporting device for reporting the measurement result for each inspection point on the basis of the image data.   4. The display unit according to claim 3, wherein the processing unit draws a color bar capable of specifying a correspondence relationship between the one specified in advance and the specifying value in parallel with the display cell group to generate the notification image data. Measurement result notification device.   A measurement result notification device according to any one of claims 1 to 4, and a measurement device that executes measurement processing for each of the inspection points to generate the measurement value data in which the measurement values are recorded. Measuring system. Measurement value data in which measured values measured at a plurality of inspection points defined on the board to be inspected are recorded in association with a code individually given to each inspection point, and for each of the inspection points A reference value of the reference value data recorded in association with the code, a measurement result notifying method for visually notifying the measurement result capable of specifying the quality of each inspection location,
When notifying the measurement results of a plurality of the substrates to be inspected in the same kind that each inspection location is defined in the same location, the measurement of the specific value that can specify the quality level of each inspection location A value is calculated for each inspected substrate based on the reference value and the reference value, and a distribution of each of the specifying values for each of the inspection points is specified, and the order specified based on the code is determined . 1 for each display unit group in which a plurality of unit display cells are arranged in a matrix so as to correspond to the direction 1 and the specific value corresponds to the second direction intersecting the first direction. A predetermined one of the hue, lightness, and saturation of the cell is drawn in a state corresponding to the distribution amount of the corresponding specific value to generate the notification image data, and the generated notification information is generated. Based on image data Measurements notification method for notifying the said measurement results for each inspection point to have. Measurement value data in which measured values measured at a plurality of inspection points defined on the board to be inspected are recorded in association with a code individually given to each inspection point, and for each of the inspection points A reference value of the reference value data recorded in association with the code, a measurement result notifying method for visually notifying the measurement result capable of specifying the quality of each inspection location,
When notifying the measurement results of a plurality of the substrates to be inspected in the same kind that each inspection location is defined in the same location, the measurement of the specific value that can specify the quality level of each inspection location A value is calculated for each inspected substrate based on the reference value and the reference value, and a distribution of each of the specifying values for each of the inspection points is specified, and the order specified based on the code is determined . A display cell group in which a plurality of unit display cells are arranged in a matrix so as to correspond to one direction and the distribution amount of the specifying value to a second direction intersecting the first direction, A predetermined one of the hue, lightness, and saturation of each unit display cell is drawn in a state corresponding to the corresponding specific value to generate notification image data, and the generated notification information is generated. Based on image data Measurements notification method for notifying the said measurement results for each inspection point to have.