JP6643710B2 - フォトレジスト成分濃度測定装置および濃度測定方法 - Google Patents

フォトレジスト成分濃度測定装置および濃度測定方法 Download PDF

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Publication number
JP6643710B2
JP6643710B2 JP2016012558A JP2016012558A JP6643710B2 JP 6643710 B2 JP6643710 B2 JP 6643710B2 JP 2016012558 A JP2016012558 A JP 2016012558A JP 2016012558 A JP2016012558 A JP 2016012558A JP 6643710 B2 JP6643710 B2 JP 6643710B2
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Japan
Prior art keywords
photoresist
stripping solution
concentration
measuring
photoresist stripping
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JP2016012558A
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English (en)
Japanese (ja)
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JP2017135204A5 (cg-RX-API-DMAC7.html
JP2017135204A (ja
Inventor
和哉 島田
和哉 島田
晴香 西川
晴香 西川
佑典 鬼頭
佑典 鬼頭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Publication date
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Priority to JP2016012558A priority Critical patent/JP6643710B2/ja
Priority to PCT/JP2016/088687 priority patent/WO2017130620A1/ja
Priority to CN201680079908.3A priority patent/CN108604534B/zh
Priority to TW105144149A priority patent/TWI697743B/zh
Publication of JP2017135204A publication Critical patent/JP2017135204A/ja
Publication of JP2017135204A5 publication Critical patent/JP2017135204A5/ja
Application granted granted Critical
Publication of JP6643710B2 publication Critical patent/JP6643710B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2016012558A 2016-01-26 2016-01-26 フォトレジスト成分濃度測定装置および濃度測定方法 Active JP6643710B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016012558A JP6643710B2 (ja) 2016-01-26 2016-01-26 フォトレジスト成分濃度測定装置および濃度測定方法
PCT/JP2016/088687 WO2017130620A1 (ja) 2016-01-26 2016-12-26 フォトレジスト成分濃度測定装置および濃度測定方法
CN201680079908.3A CN108604534B (zh) 2016-01-26 2016-12-26 光致抗蚀剂成分浓度测定装置及浓度测定方法
TW105144149A TWI697743B (zh) 2016-01-26 2016-12-30 光阻劑成分濃度測定裝置及濃度測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016012558A JP6643710B2 (ja) 2016-01-26 2016-01-26 フォトレジスト成分濃度測定装置および濃度測定方法

Publications (3)

Publication Number Publication Date
JP2017135204A JP2017135204A (ja) 2017-08-03
JP2017135204A5 JP2017135204A5 (cg-RX-API-DMAC7.html) 2019-02-14
JP6643710B2 true JP6643710B2 (ja) 2020-02-12

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JP2016012558A Active JP6643710B2 (ja) 2016-01-26 2016-01-26 フォトレジスト成分濃度測定装置および濃度測定方法

Country Status (4)

Country Link
JP (1) JP6643710B2 (cg-RX-API-DMAC7.html)
CN (1) CN108604534B (cg-RX-API-DMAC7.html)
TW (1) TWI697743B (cg-RX-API-DMAC7.html)
WO (1) WO2017130620A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020130415B4 (de) 2019-12-26 2025-01-09 Taiwan Semiconductor Manufacturing Co., Ltd. Versorgungssystem für chemische flüssigkeiten und verfahren zur versorgung mit chemischen flüssigkeiten
US11715656B2 (en) 2019-12-26 2023-08-01 Taiwan Semiconductor Manufacturing Co., Ltd. Chemical liquid supplying system and method of supplying chemical liquid

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3093975B2 (ja) * 1996-07-02 2000-10-03 株式会社平間理化研究所 レジスト剥離液管理装置
JP2000058411A (ja) * 1998-08-04 2000-02-25 Mitsubishi Electric Corp 半導体製造装置
JP2005535780A (ja) * 2002-08-09 2005-11-24 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー フォトレジスト、フルオロポリマーおよび１５７ｎｍ微細平版印刷のための方法
JP2005191030A (ja) * 2003-12-24 2005-07-14 Sharp Corp レジスト除去装置およびレジスト除去方法
JP2007316360A (ja) * 2006-05-26 2007-12-06 Nishimura Yasuji 水系フォトレジスト剥離液の管理方法および管理装置
JP4923882B2 (ja) * 2006-09-07 2012-04-25 三菱化学エンジニアリング株式会社 フォトレジスト供給装置およびフォトレジスト供給方法
JP5019393B2 (ja) * 2008-04-14 2012-09-05 東亞合成株式会社 導電性高分子膜上のレジスト被膜の除去方法および除去装置
JP6028973B2 (ja) * 2012-11-08 2016-11-24 パナソニックＩｐマネジメント株式会社 フォトレジスト濃度測定装置および測定方法
JP6501448B2 (ja) * 2014-02-28 2019-04-17 芝浦メカトロニクス株式会社 処理装置および処理方法

Also Published As

Publication number Publication date
CN108604534B (zh) 2022-06-21
CN108604534A (zh) 2018-09-28
WO2017130620A1 (ja) 2017-08-03
TWI697743B (zh) 2020-07-01
TW201736987A (zh) 2017-10-16
JP2017135204A (ja) 2017-08-03

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