JP6621580B2 - レーザー計測システムおよび方法 - Google Patents

レーザー計測システムおよび方法 Download PDF

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Publication number
JP6621580B2
JP6621580B2 JP2015005034A JP2015005034A JP6621580B2 JP 6621580 B2 JP6621580 B2 JP 6621580B2 JP 2015005034 A JP2015005034 A JP 2015005034A JP 2015005034 A JP2015005034 A JP 2015005034A JP 6621580 B2 JP6621580 B2 JP 6621580B2
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Japan
Prior art keywords
measurement
laser
target structure
detection
photodetectors
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JP2015005034A
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English (en)
Japanese (ja)
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JP2015135327A (ja
JP2015135327A5 (enExample
Inventor
クレア， ジョナサン エム． サン
クレア， ジョナサン エム． サン
ミッシェル ディー． ヴォス，
ミッシェル ディー． ヴォス，
ウィリアム ディー． シャーマン，
ウィリアム ディー． シャーマン，
デーヴィッド シー． ソライデ，
デーヴィッド シー． ソライデ，
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Boeing Co
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Boeing Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66—Tracking systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2015005034A 2014-01-16 2015-01-14 レーザー計測システムおよび方法 Active JP6621580B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/156,789 US9606235B2 (en) 2014-01-16 2014-01-16 Laser metrology system and method
US14/156,789 2014-01-16

Publications (3)

Publication Number Publication Date
JP2015135327A JP2015135327A (ja) 2015-07-27
JP2015135327A5 JP2015135327A5 (enExample) 2018-02-22
JP6621580B2 true JP6621580B2 (ja) 2019-12-18

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Family Applications (1)

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JP2015005034A Active JP6621580B2 (ja) 2014-01-16 2015-01-14 レーザー計測システムおよび方法

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US (1) US9606235B2 (enExample)
EP (1) EP2913630B1 (enExample)
JP (1) JP6621580B2 (enExample)
CN (1) CN104792259B (enExample)

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JP5909537B1 (ja) * 2014-10-14 2016-04-26 株式会社アマダホールディングス ダイレクトダイオードレーザ発振器、ダイレクトダイオードレーザ加工装置及び反射光検出方法
US10281923B2 (en) * 2016-03-03 2019-05-07 Uber Technologies, Inc. Planar-beam, light detection and ranging system
US10799998B2 (en) 2016-10-17 2020-10-13 Virtek Vision International Ulc Laser projector with flash alignment
CN107015211B (zh) * 2017-05-08 2023-05-26 上海诺亚木木机器人科技有限公司 检测器测试系统
US10718915B2 (en) * 2017-06-14 2020-07-21 California Institute Of Technology Compact and low cost beam launcher using planar lightwave circuit
US11231500B1 (en) * 2018-01-30 2022-01-25 Aeva, Inc. Simultaneous measurement of range and velocity using a nondegenerate LiDAR system
CN112400119B (zh) * 2018-05-10 2024-10-01 欧若拉运营公司 用于同时的范围和速度测量的基于相干接收器和多个激光器的互补调制的lidar系统
US11024669B2 (en) * 2018-10-24 2021-06-01 Aeva, Inc. LIDAR system with fiber tip reimaging
US11709231B2 (en) * 2018-12-21 2023-07-25 Infineon Technologies Ag Real time gating and signal routing in laser and detector arrays for LIDAR application
US11650316B1 (en) 2019-02-22 2023-05-16 Aeva, Inc. Fast frequency modulation lidar system through sub-sweep sampling
US11662435B2 (en) * 2019-04-04 2023-05-30 Liturex (Guangzhou) Co. Ltd Chip scale integrated scanning LiDAR sensor
US11156846B2 (en) 2019-04-19 2021-10-26 Kla Corporation High-brightness illumination source for optical metrology
CN110058248A (zh) * 2019-05-29 2019-07-26 南京芯视界微电子科技有限公司 激光雷达装置
JP7360298B2 (ja) * 2019-10-23 2023-10-12 株式会社トプコン 測量装置
US11327158B1 (en) 2020-10-19 2022-05-10 Aeva, Inc. Techniques to compensate for mirror Doppler spreading in coherent LiDAR systems using matched filtering

Family Cites Families (15)

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JPH055610A (ja) * 1990-07-18 1993-01-14 Canon Inc 計測装置
JP3594875B2 (ja) * 2000-05-25 2004-12-02 独立行政法人 科学技術振興機構 ２次元光ヘテロダイン検出法を用いた光画像計測装置
US6909509B2 (en) 2001-02-20 2005-06-21 Zygo Corporation Optical surface profiling systems
US6570646B2 (en) * 2001-03-06 2003-05-27 The Regents Of The University Of California Optical distance measurement device and method thereof
WO2003012405A2 (en) * 2001-08-03 2003-02-13 Rollins Andrew M Aspects of basic oct engine technologies for high speed optical coherence tomography and light source and other improvements in oct
US7701592B2 (en) 2004-12-17 2010-04-20 The Boeing Company Method and apparatus for combining a targetless optical measurement function and optical projection of information
US7532311B2 (en) * 2005-04-06 2009-05-12 Lockheed Martin Coherent Technologies, Inc. Efficient lidar with flexible target interrogation pattern
WO2008121919A1 (en) * 2007-03-30 2008-10-09 Faro Technologies, Inc. Absolute distance meter
EP2389606B1 (en) 2009-01-24 2019-08-28 Ecole Polytechnique Federale De Lausanne (EPFL) EPFL-TTO High-resolution microscopy and photolithography devices using focusing micromirrors
US8659749B2 (en) * 2009-08-07 2014-02-25 Faro Technologies, Inc. Absolute distance meter with optical switch
US8717562B2 (en) * 2010-08-23 2014-05-06 Scattering Solutions, Inc. Dynamic and depolarized dynamic light scattering colloid analyzer
US8902408B2 (en) * 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
US8537376B2 (en) * 2011-04-15 2013-09-17 Faro Technologies, Inc. Enhanced position detector in laser tracker
JP5882674B2 (ja) * 2011-10-24 2016-03-09 キヤノン株式会社 多波長干渉計、計測装置および計測方法
US8692344B2 (en) * 2012-03-16 2014-04-08 Optiz, Inc Back side illuminated image sensor architecture, and method of making same

Also Published As

Publication number Publication date
US9606235B2 (en) 2017-03-28
JP2015135327A (ja) 2015-07-27
EP2913630B1 (en) 2020-05-06
CN104792259B (zh) 2019-04-12
EP2913630A1 (en) 2015-09-02
CN104792259A (zh) 2015-07-22
US20150198433A1 (en) 2015-07-16

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