JP6598656B2 - Diaphragm valve and manufacturing method thereof - Google Patents

Description

  The present invention relates to a diaphragm valve and a method for manufacturing a diaphragm valve.

  A diaphragm valve is known as one of fluid control devices for controlling the flow of various processing gases in a semiconductor manufacturing process, a flat panel display manufacturing process, a solar panel manufacturing process, and the like. A diaphragm valve has a valve seat mounted in a seat mounting groove of the valve body, and the diaphragm is provided in the valve body so as to be able to come into contact with and separate from the valve seat. -3 etc.).

Japanese Utility Model Publication No. 05-094584 Japanese Patent Laid-Open No. 06-265035 JP 07-004542 A

In the diaphragm valve as described above, the valve seat is fixed to the valve body by plastically deforming a caulking portion which is a part of the valve body provided on one of two opposing side walls of the seat mounting groove.
However, it has been found that with this fixing method, the fixing force of the valve seat to the valve body may not be sufficient. For example, when the valve seat is purged with a purge gas in a manufacturing process or a maintenance process, the valve seat may be detached from the seat mounting groove due to the pressure of the purge gas.
In the fixing method as described above, the stress remaining in the valve seat is fixed to the valve body by pressing the caulking portion. Therefore, the stress is relieved by heating of the diaphragm valve or the passage of time, and the valve seat is fixed. The power can be reduced.
Furthermore, in the above fixing method, it is necessary to ensure the caulking portion in the valve body, and it is difficult to cope with the downsizing of the diaphragm valve.

One of the objects of the present invention is to provide a diaphragm valve in which a valve seat can be more securely fixed to a valve body, and a manufacturing method thereof.
One of the objects of the present invention is to provide a diaphragm valve that can cope with downsizing and a manufacturing method thereof.

  The diaphragm valve of the present invention has a valve body that defines a seat mounting groove and a fluid flow path, and a resin-made annular valve seat that is inserted to fit the seat mounting groove, The valve body supports a diaphragm as a valve body that defines a part of the fluid flow path so as to be able to contact and separate from the valve seat, and the valve body has two side wall surfaces facing the seat mounting groove. A fixing recess extending in the circumferential direction on at least one of them, and further including an annular fixing member made of resin arranged so as to fill the fixing recess, and the fixing member and the valve seat And the valve seat is fixed to the valve body by the fixing member.

The diaphragm valve manufacturing method of the present invention includes a resin-made annular valve seat, a seat mounting groove for mounting the valve seat and a valve body for defining a fluid flow path, and a part of the fluid flow path. A diaphragm valve having a diaphragm that is supported by the valve body so as to be capable of contacting and separating from the valve seat and capable of opening and closing the fluid flow path,
The valve body has a fixing recess extending in the circumferential direction on at least one of two opposing side wall surfaces of the seat mounting groove,
An annular fixing member made of resin is arranged in the fixing concave portion to fill the fixing concave portion,
Inserting the valve seat into the seat mounting groove in which the fixing member is disposed;
Into the portion exposed from the seat mounting groove of the valve seat is fitted a mold having a temperature control means ,
The temperature of the mold, by the temperature control means, said portion of said valve seat to control the temperature at which the shape of the moiety can be maintained without melting,
The valve body is heated to join the fixing member and the valve seat by welding.

The diaphragm valve manufacturing method of the present invention includes a resin-made annular valve seat, a seat mounting groove for mounting the valve seat and a valve body for defining a fluid flow path, and a part of the fluid flow path. A diaphragm valve having a diaphragm that is supported by the valve body so as to be capable of contacting and separating from the valve seat and capable of opening and closing the fluid flow path,
The valve body has a fixing recess extending in the circumferential direction on at least one of two opposing side wall surfaces of the seat mounting groove,
Injecting a molten resin material for filling the fixing recess into the sheet mounting groove, or melting a resin material for filling the fixing recess in the sheet mounting groove,
Inserting the valve seat into a seat mounting groove for containing the molten resin material,
Into the portion exposed from the seat mounting groove of the valve seat is fitted a mold having a temperature control means ,
The temperature of the mold, by the temperature control means, said portion of said valve seat to control the temperature at which the shape of the moiety can be maintained without melting,
And solidifying the resin material and bonding the resin material to the valve seat.

In the present invention, the fixing recess formed in the seat mounting groove of the valve body is filled with an annular fixing member, and the valve seat is inserted into the seat mounting groove and joined to the fixing member. The fixing member fitted in the fixing concave portion is prevented from falling off the groove. Thereby, the valve seat is securely fixed to the seat mounting groove of the valve body. In the present invention, since the valve seat can be fixed to the seat mounting groove without deforming the valve body, it is possible to cope with downsizing of the valve body (diaphragm valve).
Note that the term “joining” used in the present invention originally means that different members or materials are bonded together using various connection methods such as welding, welding, and adhesion using an adhesive, and at the molecular level. Not only the case where it couple | bonds but the case where it couple | bonds mechanically shall also be included.
In addition, the term “integrated” used in the present invention is used to mean that the fixing member and the valve seat, which are separate bodies, are combined into one member, and are fused only at the molecular level. In addition, the case where they are mechanically coupled is also included.

The external view which has a fracture | rupture part in a part of diaphragm valve which concerns on one Embodiment of this invention. The expanded sectional view in the circle A of FIG. Sectional drawing which shows the assembly | attachment process of the valve seat of the diaphragm valve which concerns on one Embodiment of this invention. Sectional drawing which shows the process of following FIG. 3A. FIG. 3B is a cross-sectional view showing a step following FIG. 3B. The expanded sectional view of the principal part of the diaphragm valve which concerns on the 2nd Embodiment of this invention. Sectional drawing which shows the assembly | attachment process of the valve seat of the diaphragm valve of FIG. Sectional drawing which shows the process of following FIG. 5A. Sectional drawing which shows the process of following FIG. 5B. The expanded sectional view of the principal part of the diaphragm valve which concerns on the 3rd Embodiment of this invention. Sectional drawing which shows the assembly | attachment process of the valve seat of the diaphragm valve of FIG. Sectional drawing which shows the process of following FIG. 7A. The expanded sectional view of the principal part of the diaphragm valve which concerns on the 4th Embodiment of this invention. Sectional drawing which shows the assembly | attachment process of the valve seat of the diaphragm valve of FIG. FIG. 9B is a cross-sectional view showing a step following FIG. 9A. Sectional drawing which shows the assembly | attachment process of the valve seat of the diaphragm valve which concerns on the 5th Embodiment of this invention. FIG. 10B is a cross-sectional view showing a step following FIG. 10A.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, in this specification and drawing, about the component which has the substantially same function structure, duplication description is abbreviate | omitted by attaching | subjecting the same code | symbol.

First Embodiment A first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an external view of a diaphragm valve according to an embodiment of the present invention. Note that FIG. 1 partially has a broken portion in order to show the structure of the main part of the diaphragm valve according to the present embodiment. FIG. 2 is an enlarged cross-sectional view of the broken portion in FIG. 3A to 3C are views for explaining a process of assembling the valve seat of the diaphragm valve according to the present embodiment.
The diaphragm valve 1 has a metal valve body 10, and as shown in FIG. 1, the valve body 10 defines flow paths 11, 12, and 13 for fluids such as gas. The flow path 11 communicates with a flow path (not shown) formed in the joint portion 21, and the flow path 12 communicates with a flow path (not shown) formed in the joint portion 22. A flow path 13 that connects the flow path 11 and the flow path 12 is defined by the valve body 10 and a diaphragm 80 described later. An annular seat mounting groove 30 is formed around the flow path 11 of the valve body 10, and an annular valve seat 70 is mounted in the seat mounting groove 30. The structure of the valve seat 70 and the seat mounting groove 30 and the method for fixing the valve seat 70 to the seat mounting groove 30 will be described in detail later.

A diaphragm 80 as a valve body is supported by the valve body 10 so as to be in contact with and separated from the valve seat 70.
As shown in FIGS. 1 and 2, the diaphragm 80 has a larger diameter than the valve seat 70 and is formed in a spherical shell shape so as to be elastically deformable with a metal such as stainless steel or NiCo alloy or a fluorine resin. The diaphragm 80 is fixed to the valve body 10 by being pressed toward the valve body 10 by a lower end surface (not shown) of the valve head 100 through the presser adapter 90.
In FIGS. 1 and 2, the diaphragm 80 is pressed by the diaphragm presser 110 to be elastically deformed and pressed against the valve seat 70. When the pressing by the diaphragm presser 110 is released, it is restored to a spherical shell shape. In a state where the diaphragm 80 is pressed against the valve seat 70, the fluid flow path 13 is closed, the diaphragm valve 1 is closed, and when the diaphragm 80 moves away from the valve seat 70, the fluid flow path 13 is opened and the diaphragm is opened. The valve 1 is in an open state.

  The diaphragm presser 110 is operated by a drive mechanism (not shown) built in the valve head 100. The drive mechanism is operated by an operation fluid FL such as air. The driving mechanism for driving the diaphragm presser 110 is well known and will not be described in detail.

As shown in FIG. 2, the seat mounting groove 30 is formed in an annular shape centered on the central axis Ct of the valve body 10, and has a flat bottom surface 33, opposing inner peripheral wall surfaces 31 and outer periphery extending upward from the bottom surface 33. Wall surface 32. The inner peripheral wall surface 31 is defined by the outer peripheral surface of a cylindrical inner peripheral wall portion 15 formed in the valve body 10.
On the bottom surface 33 side of the outer peripheral wall surface 32, a fixing recess 35 having a rectangular cross-sectional shape is formed along the circumferential direction. An annular fixing member 60 made of a thermoplastic resin is fitted into the fixing recess 35 so as to fill the fixing recess 35. The cross-sectional shape of the fixing member 60 is a rectangular shape, and conforms to the cross-sectional shape of the fixing recess 35.
An annular valve seat 70 made of a thermoplastic resin and having a substantially rectangular cross section is fitted in the seat mounting groove 30 adjacent to the fixing member 60. The width of the valve seat 70 is adapted to the distance between the inner peripheral wall surface 31 and the outer peripheral wall surface 32 of the seat mounting groove 30.

  Here, what is important is that the valve seat 70 and the fixing member 60 are joined. Since the fixing member 60 is fitted in the fixing recess 35 and the valve seat 70 is fitted in the seat mounting groove 30, the valve seat 70 is prevented from falling off the seat mounting groove 30 by the fixing member 60, It is securely fixed to the sheet mounting groove 30.

The assembly process of the valve seat to the valve body will be described with reference to FIGS. 3A to 3C.
FIG. 3A shows a state before the fixing member 60 is fitted into the fixing recess 35 of the sheet mounting groove 30. The outer diameter d1 of the fixing member 60 is the inner diameter D1 of the fixing recess 35, the width w1 of the fixing member 60 is the radial width W1 of the fixing recess 35, and the height h1 of the fixing member 60 is the fixing recess 35. Each of the heights H1 is adapted.
Since the outer diameter d1 of the fixing member 60 is larger than the diameter of the inner peripheral wall surface 32, the fixing member 60 is fitted into the fixing concave portion 35 as shown in FIG. In this state, the inner peripheral surface 61 of the fixing member 60 is substantially flush with the outer peripheral wall surface 32.

  From this state, the valve seat 70 is inserted into the seat mounting groove 30. The outer diameter d2 of the valve seat 70 is matched with the diameter D2 of the outer peripheral wall surface 32, and the width w2 of the valve seat 70 is matched with the width W2 of the seat mounting groove 30. For this reason, the valve seat 70 can be fitted into the seat mounting groove 30 without being deformed. For this reason, the valve seat 70 is not easily damaged. When the fixing member 60 is fitted into the fixing recess 35 by press-fitting, the possibility of damage increases, but the possibility that the damage of the fixing member 60 affects the valve performance is very low.

When the valve seat 70 is fitted into the seat mounting groove 30, as shown in FIG. 3C, the inner peripheral surface 61 of the fixing member 60 and the outer peripheral surface 73 of the valve seat 70 are in contact with each other. Here, in the present embodiment, the inner peripheral surface 61 of the fixing member 60 and the outer peripheral surface 73 of the valve seat 70 are bonded together to be joined, and the fixing member 60 and the valve seat 70 are integrated. As a material for forming the valve seat 70, PTFE or PCTFE is used. Although the material similar to the formation material of valve seats 70, such as PTFE and PCTFE, can also be used as a formation material of fixing member 60, in this embodiment, it differs from the formation material of valve seat 70 of valve seat 70. A material having a lower melting point than the forming material, such as PVDF, is used.
Next, in a state where the fixing member 60 and the valve seat 70 are in contact with each other, the valve body 10 is heated to a temperature that slightly exceeds the melting point of the material for forming the valve seat 70. When the fixing member 60 and the valve seat 70 are expanded by heat, the fixing member 60 and the valve seat 70 are sandwiched between the inner peripheral wall surface 31 and the inner peripheral surface of the fixing recess 35, and therefore, the inner peripheral surface 61 of the fixing member 60 and the valve seat 70. The fixing member 60 and the valve seat 70 are melted while pressure is applied between the outer peripheral surface 73 and the outer peripheral surface 73 and then cooled and solidified. As a result, the fixing member 60 and the valve seat 70 are combined and integrated at the molecular level by the pressure acting in the molten state. By using PVDF having a relatively low melting point as the material of the fixing member 60, the amount of deformation of the valve seat 70 can be minimized, and the positional accuracy of the upper surface 74 that is the contact surface of the valve seat 70 can be maintained.
In order to suppress the deformation of the valve seat 70, the shape of the valve seat 70 can be maintained by fitting a mold into a portion exposed from the seat mounting groove 30 of the valve seat 70. In this case, the valve seat 70 is melted by heating the valve body 10 in order to weld the portion in the seat mounting groove 30 to the fixing member 60, but the other portions are not melted by temperature control of the mold. In addition, the shape can be maintained. This is applicable even when the fixing member 60 and the valve seat 70 are made of the same material.
In addition, the fixing member 60 is formed of a material having a melting point lower than that of the valve seat 70, and the heating temperature of the fixing member 60 and the valve seat 70 is lower than the melting point of the valve seat 70 and is used for fixing. The fixing member 60 and the valve seat 70 can be joined to each other while preventing the deformation of the valve seat 70 by melting only the fixing member 60 and cooling and solidifying it by making the melting point of the member 60 higher.

As described above, according to the present embodiment, caulking is not necessary for fixing the valve seat 70, the number of processes is reduced, and productivity is improved. Further, since the caulking is not performed, variation in the seat height can be suppressed.
Further, since the fixing concave portion 35 can be formed larger, the catch becomes larger than the caulking, and more reliable fixing is possible.
According to the present embodiment, since the valve body 10 is heated and welded, it is possible to heat a plurality of valve bodies at the same time to fix each valve seat in a lump, and to exist in one diaphragm valve. It is possible to fix a plurality of valve seats simultaneously. As a result, productivity can be improved.

Second Embodiment A second embodiment will be described with reference to FIGS. 4 to 5C. In addition, the same code | symbol is used about the component similar to 1st Embodiment. FIG. 4 is an enlarged cross-sectional view of a main part of the diaphragm valve according to the second embodiment. 5A to 5C are views for explaining a process of assembling the valve seat of the diaphragm valve according to FIG.
In the present embodiment, the shape of the fixing member 60A and the fixing concave portion 35A are different from those in the first embodiment. Specifically, the fixing member 60A has an outer peripheral surface that is widened toward the end and an R portion 60R. On the valve body 10B side, as shown in FIG. 5A, the shape in the vicinity of the reference surface 32b that defines the radial position of the valve seat 70 is a curved surface that curves smoothly in a convex shape, and the lower side of the reference surface 32b. The shape of the fixing recess 35A extending in the circumferential direction that is recessed outward is adapted to the shape of the fixing member 60A.
As a result, as shown in FIG. 5B, when the fixing member 60A is press-fitted into the fixing recess 35A, the fixing member 60A can be smoothly fitted, and damage to the fixing member 60A can be prevented more reliably. Can do.
After press-fitting the fixing member 60A into the fixing recess 35A, as in the first embodiment, as shown in FIG. 5C, the valve seat 70 is mounted in the seat mounting groove 30A, the valve body 10B is heated, and the valve The sheet 70 and the fixing member 60A are welded.

Third Embodiment A third embodiment will be described with reference to FIGS. 6, 7A and 7B. In addition, the same code | symbol is used about the component similar to 1st Embodiment. FIG. 6 is an enlarged cross-sectional view of a main part of the diaphragm valve according to the third embodiment. 7A and 7B are views for explaining the assembly process of the valve seat.
In the present embodiment, in addition to the fixing member 60, an annular fixing member 160 having a smaller diameter than this is used, and the fixing member 160 is provided at the bottom of the inner peripheral wall surface 31 of the seat mounting groove 30C of the valve body 10C. A fixing recess 36 for fitting is formed.
The forming material of the fixing member 160 may be the same as or different from the forming material of the fixing member 60.
As shown in FIG. 7B, the two fixing members 60 and 160 are press-fitted into the fixing concave portions 35 and 36, respectively. Thereafter, the valve seat 70 and the two fixing members 60 and 160 are welded in the same procedure as described in the first embodiment.
According to the present embodiment, by providing the fixing members on both the outer diameter side and the inner diameter side of the valve seat 70, the valve seat 70 can be more reliably fixed to the valve body 10C.

Fourth Embodiment A fourth embodiment will be described with reference to FIGS. 8, 9A and 9B. In addition, the same code | symbol is used about the component similar to 1st and 3rd embodiment. FIG. 8 is an enlarged cross-sectional view of a main part of the diaphragm valve according to the third embodiment. 9A and 9B are diagrams for explaining the assembly process of the valve seat.
In the present embodiment, the fixing recesses 35 and 36 are formed in the inner peripheral wall surface 31 and the outer peripheral wall surface 32 of the seat mounting groove 30C of the valve body 10C, respectively, as in the third embodiment. A common fixing member 260 is press-fitted into the two fixing recesses 35 and 36.
8 and 9B, the valve seat 70A conforms to the width of the seat mounting groove 30C, but does not contact the bottom surface 33 of the seat mounting groove 30C, and the bottom surface 71A and the fixing member The upper surface 262 of 260 is joined.
In this embodiment as well, the valve is obtained by melting both the fixing member 260 and the valve seat 70A or only the fixing member 260, and then cooling and solidifying by the various methods described in the first embodiment. The sheet 70A and the fixing member 260 can be joined.
In the present embodiment, a larger joint area between the valve seat 70A and the fixing member 260 can be ensured, and the coupling can be performed more reliably.

Fifth Embodiment A fifth embodiment will be described with reference to FIGS. 10A and 10B.
In the first to fourth embodiments described above, the fixing member is press-fitted into the fixing recess. However, in the present invention, as shown in FIG. The fixing member is molded within 30.
Specifically, the melted thermoplastic resin M is supplied from the outside into the seat mounting groove 30 or the solid thermoplastic resin is supplied into the seat mounting groove 30 to heat the valve body 10 to melt the heat. Let it be a plastic resin M. The amount of the thermoplastic resin M is sufficient to fill the fixing recess 35.
As shown in FIG. 10B, when the valve seat 70 is inserted into the seat mounting groove 30 containing the molten thermoplastic resin M, the molten thermoplastic resin M outside the fixing recess 35 is fixed. The melted thermoplastic resin M is filled into the fixing recess 35 by being pushed into the recess 35. When cooled in this state, the molten thermoplastic resin M is solidified and joined to the valve seat 70, and the fixing member 360 is formed.

  In each of the embodiments described above, the case where the cross-sectional shape of the valve seat is rectangular has been described, but the present invention is also applicable to valve seats having other shapes.

  The diaphragm valve according to each of the embodiments described above is used as a fluid control device that controls a fluid in various manufacturing processes such as a semiconductor manufacturing process, a flat panel display manufacturing process, and a solar panel manufacturing process.

  In each of the above-described embodiments, the case where the resins are joined by welding has been described. However, it is also possible to join using an adhesive such as a thermosetting resin. In addition to heat welding, other methods such as high frequency welding, ultrasonic welding, laser welding, and high frequency dielectric heating can be used.

1 Diaphragm valve 10, 10B, 10C Valve body 11, 12, 13 Fluid flow path 30, 30A, 30C Seat mounting groove 31 Inner peripheral wall surface 32 Outer peripheral wall surface 33 Bottom surface 35, 36 Fixing recess 60, 60A, 160, 260, 360 Fixing member 70 Valve seat 73 Outer peripheral surface 74 Upper surface 80 Diaphragm 90 Presser adapter 100 Valve head 110 Diaphragm presser Ct Center axis

Claims (4)

An annular valve seat made of resin, a seat body for defining the seat seat for mounting the valve seat and a fluid passage for defining the fluid passage, a portion of the fluid passage, and for the valve seat A diaphragm valve that is supported by the valve body so as to be capable of contacting and separating, and capable of opening and closing the fluid flow path,
The valve body has a fixing recess extending in the circumferential direction on at least one of two opposing side wall surfaces of the seat mounting groove,
An annular fixing member made of resin is arranged in the fixing concave portion to fill the fixing concave portion,
Inserting the valve seat into the seat mounting groove in which the fixing member is disposed;
Into the portion exposed from the seat mounting groove of the valve seat is fitted a mold having a temperature control means,
The temperature of the mold is controlled by the temperature control means to a temperature at which the part of the valve seat does not melt and the shape of the part can be maintained,
A method of manufacturing a diaphragm valve, comprising heating the valve body and joining the fixing member and the valve seat by welding. An annular valve seat made of resin, a seat body for defining the seat seat for mounting the valve seat and a fluid passage for defining the fluid passage, a portion of the fluid passage, and for the valve seat A diaphragm valve that is supported by the valve body so as to be capable of contacting and separating, and capable of opening and closing the fluid flow path,
The valve body has a fixing recess extending in the circumferential direction on at least one of two opposing side wall surfaces of the seat mounting groove,
Injecting the molten resin material for filling the fixing recess into the sheet mounting groove, or melting the resin material for filling the fixing recess in the sheet mounting groove,
Inserting the valve seat into a seat mounting groove for containing the molten resin material,
Into the portion exposed from the seat mounting groove of the valve seat is fitted a mold having a temperature control means,
The temperature of the mold is controlled by the temperature control means to a temperature at which the part of the valve seat does not melt and the shape of the part can be maintained,
A method for manufacturing a diaphragm valve, comprising solidifying the resin material and bonding the resin material to the valve seat. 2. The method for manufacturing a diaphragm valve according to claim 1 , wherein the fixing member and the valve seat are formed of different materials. The method for manufacturing a diaphragm valve according to claim 1 , wherein the fixing member and the valve seat are formed of the same material.

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