JP6585669B2 - Mask manufacturing equipment - Google Patents

Description

  The present invention relates to a mask manufacturing apparatus for manufacturing a metal mask.

  Conventionally, when manufacturing a metal mask used when vacuum-depositing an organic light emitting layer in the manufacturing process of an organic EL element, a certain tension is applied to a metal thin plate with a clamp mechanism, so that the metal is not distorted. 2. Description of the Related Art A metal thin plate frame pasting apparatus for pasting a thin plate to a frame (metal mask frame) is known (see, for example, Patent Document 1).

JP 2004-31335 A

  In the frame pasting apparatus (mask manufacturing apparatus) described in Patent Document 1 or the like, one end of a thin metal plate (metal mask sheet) is sandwiched by one clamp, and the other end of the metal mask sheet is sandwiched by the other clamp. The metal mask sheet is tensioned by pulling them in directions away from each other.

  Incidentally, in recent years, further thinning of the metal mask sheet and further enlargement of the metal mask frame (metal mask) have been progressing. Due to the thinning of the metal mask sheet and the increase in the size of the metal mask frame, when the metal mask sheet is welded to the metal mask frame, a gap may be formed between the metal mask frame and the metal mask sheet, resulting in poor welding. there were. Therefore, in order to prevent poor welding, a technique for pressing the periphery of the welded portion of the metal mask sheet against the metal mask frame has been proposed. However, when the periphery of the welded portion of the metal mask sheet is pressed against the metal mask frame, there is a problem that the position of the pattern formed on the metal mask sheet is displaced and the accuracy of the metal mask is lowered.

  An object of the present invention is to provide a mask manufacturing apparatus capable of accurately welding a metal mask sheet to a metal mask frame.

The mask manufacturing apparatus of the present invention is a mask manufacturing apparatus that manufactures a metal mask by welding a strip-shaped metal mask sheet to a frame-shaped metal mask frame, in a direction in which both ends of the metal mask sheet are separated from each other. A tension portion that applies a predetermined tension to the metal mask sheet by moving the metal mask sheet; one end of the metal mask sheet on one side of the metal mask frame; and the metal on the other side of the metal mask frame facing the one side. A welded portion that welds the other end of the mask sheet, and a pressing portion that presses at least one location of the metal mask sheet against the metal mask frame during welding by the welded portion, and the at least one location is the central portion of the metal mask sheet in the vicinity of the welded portion by the weld to Located outside the said welding point, said pressing portion includes a leg portion extending in a direction along the vertical direction, and a foot portion which is formed by bending in a direction along a direction to said spaced apart from the distal end portion of the leg portion A bent portion formed by bending from a tip portion of the foot portion in a direction along a width direction of the metal mask sheet, and the metal mask sheet provided to the bent portion with respect to the metal mask frame At least one projecting portion that presses at least one location, wherein the weld location is located in a space surrounded by an L shape formed by the foot portion and the bent portion. To do.

  In the mask manufacturing apparatus of the present invention, a direction in which the at least one place and the welding place are arranged is parallel to the direction in which the at least one place is separated.

Further, in the mask manufacturing apparatus of the present invention, the pressing portion presses at least two places of the metal mask sheet against the metal mask frame, and the first place among the at least two places is a center of the metal mask sheet. The second part of the at least two parts is located on the inner side of the welded part with respect to the central part of the metal mask sheet.

  Further, the mask manufacturing apparatus of the present invention includes a first pressing portion that the pressing portion presses the first location, and a second pressing portion that presses the second location, and the first pressing portion is in a vertical direction. A first leg that extends in a direction along the first leg, a first leg that is bent from the tip of the first leg in a direction along the direction of separation, and a tip of the first leg. A first bent portion formed by bending in a direction along a width direction of the metal mask sheet; and a first bent portion provided on the first bent portion and pressing the first portion against the metal mask frame. And the second pressing part is formed by bending in a direction along the direction of separating from the second leg part extending in a direction along the vertical direction and the tip part of the second leg part. The second foot and the tip of the second foot A second bent portion formed by bending in a direction along the width direction of the metal mask sheet, and a second bent portion provided on the second bent portion and pressing the second portion against the metal mask frame. Two welds, and the welding location is located in a space surrounded by the first foot, the first bent portion, the second foot, and the second bent portion. And

  In the mask manufacturing apparatus of the present invention, the thickness T of the metal mask sheet is 10 μm ≦ T ≦ 30 μm.

  According to the present invention, it is possible to provide a mask manufacturing apparatus capable of accurately welding a metal mask sheet to a metal mask frame.

It is a perspective view which shows schematic structure of the mask manufacturing apparatus which concerns on embodiment. It is a front view which shows the structure of the welding apparatus which concerns on embodiment. It is an enlarged front view which shows the structure of the welding part and pressing part which concern on embodiment. It is an expansion left view which shows the structure of the welding part and pressing part which concern on embodiment. It is an enlarged bottom view which shows the structure of the welding part and pressing part which concern on embodiment. It is an enlarged front view which shows the structure of the welding part and pressing part which concern on embodiment. It is a perspective view which shows the structure of the pressing part which concerns on embodiment. It is a figure for demonstrating the positional relationship of a welding location, a 1st location, and a 2nd location.

  Hereinafter, with reference to the drawings, for a mask manufacturing apparatus according to an embodiment of the present invention, a metal mask manufacturing apparatus for manufacturing a metal mask used when vacuum-depositing an organic light emitting layer in a manufacturing process of an organic EL element. An example will be described. FIG. 1 is a perspective view showing a schematic configuration of a metal mask manufacturing apparatus according to this embodiment. In the following description, the XYZ orthogonal coordinate system shown in FIG. 1 is set, and the positional relationship of each member will be described with reference to this orthogonal coordinate system. The XY plane is set to a plane parallel to the horizontal plane on which the metal mask manufacturing apparatus is placed, and the Z axis is set to the vertical direction.

  The metal mask manufacturing apparatus 2 is an apparatus for manufacturing a metal mask by welding a belt-shaped metal mask sheet 18 to a frame-shaped metal mask frame 20 as shown in FIG. A part 6, two guide rails 7, four guide rails 8, a welding device 10, two guide rails 12, and a base 16 are provided. The metal mask is manufactured by sequentially welding both ends of the plurality of metal mask sheets 18 to two opposite sides constituting the frame-shaped metal mask frame 20 by the metal mask manufacturing apparatus 2, thereby manufacturing an organic EL element. Used when vacuum-depositing organic materials in the process. The thickness T of the metal mask sheet 18 is 10 μm ≦ T ≦ 30 μm, and the metal mask sheet 18 has a plurality of opening patterns such as a square shape, a circular shape, and a rectangular shape formed by etching or the like.

  The table part 4 is a rectangular flat plate, and the metal mask frame 20 is placed so as to be parallel to the XY plane. The tension portion 6 applies a predetermined tension to the metal mask sheet 18 by moving both end portions of the metal mask sheet 18 in a direction (± X direction) to be separated from each other. The two guide rails 7 support the tension portion 6 so as to be slidable in the ± Y directions. The four guide rails 8 support the welding apparatus 10 so as to be slidable in the ± Y directions. The two guide rails 12 support the welding apparatus 10 so as to be slidable in the ± X directions.

2 is a front view showing the configuration of the welding apparatus 10 according to this embodiment, FIG. 3 is an enlarged front view of a member enclosed by a circle A shown in FIG. 2, and FIG. 4 is a member enclosed by a circle A shown in FIG. FIG. 5 is an enlarged bottom view of the member surrounded by a circle A shown in FIG. The welding apparatus 10 is an apparatus for welding the metal mask sheet 18 to the metal mask frame 20, and includes a welding portion 22 and a pressing portion 24 as shown in FIGS. The welded portion 22 welds the metal mask sheet 18 to the metal mask frame 20, and the pressing portion 24 presses the metal mask sheet 18 against the metal mask frame 20 during welding by the welded portion 22. The welding portion 22 and the pressing portion 24 are configured to be movable in the Z direction as a unit. 6 is a diagram illustrating a state in which the welded portion 22 and the pressing portion 24 are moved in the −Z direction from the position illustrated in FIG. 3. The welded portion 22 and the pressing portion 24 are retracted to the position shown in FIG. 3 when welding is not performed by the welded portion 22, and moved to the position shown in FIG. 6 when welding is performed by the welded portion 22.

  The welded portion 22 welds the metal mask sheet 18 to the metal mask frame 20 by irradiating the metal mask sheet 18 with laser light emitted from the distal end portion 22 a of the welded portion 22. Specifically, the welded portion 22 welds one end (the end on the −X direction side) of the metal mask sheet 18 to one side (the side located on the −X direction side) of the metal mask frame 20, and the metal mask frame. The other end (the end on the + X direction side) of the metal mask sheet 18 is welded to the other side (the side located on the + X direction side) facing one side. The laser light is incident on the welding apparatus 10 from a light source (not shown) via a fiber or the like, and is emitted from the distal end portion 22a of the welding portion 22 via an optical member (not shown). Further, when welding, a gap of about 0.5 mm is provided between the tip 22a and the surface of the metal mask sheet 18 in order to blow nitrogen.

  The pressing portion 24 presses at least one portion of the metal mask sheet 18 against the metal mask frame 20 during welding by the welding portion 22. FIG. 7 is a perspective view showing the configuration of the pressing unit 24. As shown in FIGS. 3 to 7, the pressing part 24 includes a support part 26, a first leg part 28 a, a second leg part 28 b, a first leg part 30 a, a second leg part 30 b, a first bent part 32 a, A second bent portion 32b, a first protrusion 34a, and a second protrusion 34b are provided. The support part 26 is attached to the upper part (+ Z direction side) of the welding part 22, and supports the 1st leg part 28a and the 2nd leg part 28b. The distal end portions on the + Z direction side of the first leg portion 28a and the second leg portion 28b are fixed to the support portion 26, the first leg portion 28a is on the −X direction side of the support portion 26, and the second leg portion 28b is The support portion 26 is fixed to the + X direction side.

The first leg portion 28a extends vertically downward (−Z direction) from the support portion 26, and the first leg portion 30a is bent toward the + X direction from the distal end portion of the first leg portion 28a on the −Z direction side. Is formed. The first bent portion 32a is formed by being bent in the −Y direction from the tip portion on the + X direction side of the first leg portion 30a. The first bent portion 32a is formed with a first protrusion 34a having a protrusion on the −Z direction side.

The second leg portion 28b extends vertically downward (−Z direction) from the support portion 26, and the second leg portion 30b is bent toward the −X direction from the tip end portion of the second leg portion 28b on the −Z direction side. Is formed. The second bent portion 32b is formed by being bent in the + Y direction from the tip portion on the −X direction side of the second foot portion 30b. A second protrusion 34b having a protrusion on the −Z direction side is formed on the second bent portion 32b.

  The first leg portion 28a and the second leg portion 28b may be configured to extend in a direction along the −Z direction, that is, a direction slightly inclined with respect to the Z direction. In addition, the first foot portion 30a and the second foot portion 30b may be configured to be bent in a direction along the X direction, that is, a direction inclined by a minute amount with respect to the X direction. Moreover, you may comprise the 1st bending part 32a and the 2nd bending part 32b so that it may be formed in the direction along the Y direction, ie, the direction slightly inclined with respect to the Y direction.

  When the pressing part 24 moves together with the welded part 22 from the position shown in FIG. 3 to the position shown in FIG. 6, the first projecting part 34 a and the second projecting part 34 b are respectively connected to the metal mask frame 20 at two locations on the metal mask sheet 18. Press. For example, when two places of the metal mask sheet 18 are pressed against one side of the metal mask frame 20 on the −X direction side, as shown in FIG. 8, the first protrusion 34 a is in the vicinity of the welding spot W <b> 1 and from the welding spot W <b> 1. The first portion P1 is pressed against the metal mask frame 20 in a state where a force is applied to the one portion (first portion) P1 of the metal mask sheet 18 on the + X direction side in the + X direction side. At the same time, the second protrusion 34b applied a force in the −X direction side to one location (second location) P2 of the metal mask sheet 18 that is in the vicinity of the weld location W1 and on the −X direction side from the weld location W1. In this state, the second portion P2 is pressed against the metal mask frame 20. Here, the 1st location P1 is a point or a surface, and is located outside the welding location W1 with respect to the center part of the metal mask sheet 18. The second location P2 is a point or a surface, and is located on the inner side of the weld location W1 with respect to the central portion of the metal mask sheet 18. Moreover, the 1st location P1, the welding location W1, and the 2nd location P2 are arranged in a X direction. That is, the direction in which the first location P1, the welding location W1, and the second location P2 are arranged is the direction in which tension is applied to the metal mask sheet 18 (the direction in which one end and the other end of the metal mask sheet 18 are separated from each other: X Direction).

  The welding location W1 is an L-shaped space formed by the first leg 30a and the first bent part 32a (L formed by the second leg 30b and the second bent part 32b). In the space surrounded by the letter shape), that is, in the space surrounded by the first foot portion 30a, the first bent portion 32a, the second foot portion 30b, and the second bent portion 32b.

  The welded portion 22 welds several portions (for example, welded portions W2 and W3 shown in FIG. 8) at one end of the metal mask sheet 18 to one side of the −X direction side of the metal mask frame 20 in addition to the welded portion W1. The welded portion 22 welds several places on the other end of the metal mask sheet 18 to the other side of the metal mask frame 20 on the + X direction side.

  When the other end of the metal mask sheet 18 is welded to the other side of the metal mask frame 20 on the + X direction side, the first protrusion 34a is in the vicinity of the welded part and on the + X direction side of the welded part. The third location is pressed against the metal mask frame 20 with a force applied to one location (third location) 18 in the + X direction. At the same time, the second protrusion 34b is in the state in which a force is applied in the −X direction side to one location (fourth location) of the metal mask sheet 18 that is in the vicinity of the weld location and on the −X direction side from the weld location. Four places are pressed against the metal mask frame 20. Here, the third location is a point or a surface, and is located on the inner side of the weld location with respect to the central portion of the metal mask sheet 18. The fourth location is a point or a surface, and is located outside the weld location with respect to the central portion of the metal mask sheet 18. Further, the third location, the weld location, and the fourth location are arranged in the X direction. That is, the direction in which the third place, the welded place, and the fourth place are arranged is a direction in which tension is applied to the metal mask sheet 18 (a direction in which one end and the other end of the metal mask sheet 18 are separated from each other: X direction). Parallel. The welding location is in a space surrounded by an L shape formed by the first foot portion 30a and the first bent portion 32a (an L shape formed by the second foot portion 30b and the second bent portion 32b. In the space surrounded by the shape), that is, in the space surrounded by the first leg 30a, the first bent part 32a, the second leg 30b, and the second bent part 32b.

  When a metal mask is manufactured in the metal mask manufacturing apparatus 2 according to this embodiment, first, a predetermined tension is applied to both ends of the metal mask sheet 18 by the tension portion 6, and then the tension portion 6 (metal mask). By moving the sheet 18) along the guide rail 7 in the Y direction, the metal mask sheet 18 is moved to a predetermined position (welding position) on the metal mask frame 20. Next, the welding apparatus 10 is moved in the X direction along the guide rail 12 and is moved in the Y direction along the guide rail 8, so that the welding apparatus 10 is moved to a predetermined position (position to be welded) on the metal mask sheet 18. ). Further, after tension is applied to both ends of the metal mask sheet 18 by the tension portion 6, a predetermined portion of the metal mask sheet 18 is welded to a predetermined portion of the metal mask frame 20 by the welding device 10. Specifically, the welding part 22 and the pressing part 24 are moved from the position shown in FIG. 3 to the position shown in FIG. 2 places near the place) are pressed against the metal mask frame 20. Then, nitrogen is blown between the front end portion 22a of the welded portion 22 and the surface of the metal mask sheet 18, and the metal mask sheet 18 is irradiated with laser light emitted from the front end portion 22a. A predetermined portion of the metal mask sheet 18 is welded to the portion.

  Next, the welding apparatus 10 is moved in the Y direction along the guide rail 8, and is moved in the X direction along the guide rail 12 as necessary, so that the welding apparatus 10 is subjected to the next welding on the metal mask sheet 18. Move to position. Then, the above-described welding process is repeated until the metal mask sheet 18 is completely welded to the metal mask frame 20. Further, a metal mask is manufactured by welding a predetermined number of metal mask sheets 18 to the metal mask frame 20 in this way.

  According to the metal mask manufacturing apparatus 2 according to this embodiment, since the pressing portion 24 is provided, when the metal mask sheet 18 is welded to the metal mask frame 20, the metal mask sheet 18 is placed in the vicinity of the weld location. 20 can be pressed with high accuracy. Accordingly, it is possible to suppress a gap from being generated between the metal mask sheet 18 and the metal mask frame 20 at the welded location, thereby reducing the thickness of the metal mask sheet 18 and increasing the size of the metal mask frame 20 (metal mask). Welding defects can be eliminated. In addition, since the displacement of the metal mask sheet 18 with respect to the metal mask frame 20 can be suppressed, deterioration of the accuracy of the metal mask due to the displacement can be prevented, and a good metal mask can be manufactured. Further, since the two portions in the vicinity of the welded portion of the metal mask sheet 18 are pressed and welded to the metal mask frame 20 with a force applied to the outer side of the welded portion, the metal mask sheet 18 is bent or wrinkled. It is possible to prevent welding.

  In the above-described embodiment, at the time of welding, two portions in the vicinity of the welded portion of the metal mask sheet 18 are pressed against the metal mask frame 20 by the pressing portion 24, but at least near the welded portion of the metal mask sheet 18. A configuration may be adopted in which one place (one place or three or more places) is pressed against the metal mask frame 20. When one portion of the metal mask sheet 18 is pressed against the metal mask frame 20, the one portion is preferably positioned outside the welded portion with respect to the central portion of the metal mask sheet 18.

  In the above-described embodiment, the two locations where the metal mask sheet 18 is pressed against the metal mask frame 20 by the pressing portion 24 are arranged so as to be parallel to the welded portion of the metal mask sheet 18 and the X direction. However, what is necessary is just the vicinity of a welding location.

  DESCRIPTION OF SYMBOLS 2 ... Metal mask manufacturing apparatus, 4 ... Table part, 6 ... Tension part, 8 ... Guide rail, 10 ... Welding apparatus, 12 ... Guide rail, 16 ... Base, 18 ... Metal mask sheet, 20 ... Metal mask frame, 22 ... welded part, 24 ... pressing part, 26 ... support part, 28a ... first leg part, 28b ... second leg part, 30a ... first leg part, 30b ... second leg part, 32a ... first bent part, 32b ... 2nd bending part, 34a ... 1st protrusion, 34b ... 2nd protrusion.

Claims (5)

A mask manufacturing apparatus for manufacturing a metal mask by welding a strip-shaped metal mask sheet to a frame-shaped metal mask frame,
A tension portion that applies a predetermined tension to the metal mask sheet by moving both ends of the metal mask sheet in a direction to separate each other;
A welded portion for welding one end of the metal mask sheet to one side of the metal mask frame, and welding the other end of the metal mask sheet to the other side facing the one side of the metal mask frame;
A pressing portion that presses at least one portion of the metal mask sheet against the metal mask frame during welding by the welding portion;
The at least one place is located near the welded part by the welded part and outside the welded part with respect to the central part of the metal mask sheet,
The pressing portion is
Legs extending in a direction along the vertical direction;
A foot part formed by bending in a direction along the direction of separating from the tip part of the leg part;
A bent portion formed by bending from the tip of the foot toward the direction along the width direction of the metal mask sheet;
At least one protrusion provided on the bent portion and pressing at least one portion of the metal mask sheet against the metal mask frame,
The said welding location is located in the space enclosed by L shape formed by the said leg part and the said bending part, The mask manufacturing apparatus characterized by the above-mentioned. The mask manufacturing apparatus according to claim 1 , wherein a direction in which the at least one location and the welding location are arranged is parallel to the direction in which the separation is performed. The pressing portion presses at least two portions of the metal mask sheet against the metal mask frame,
The first part of the at least two parts is located outside the welded part with respect to the central part of the metal mask sheet, and the second part of the at least two parts is a central part of the metal mask sheet. The mask manufacturing apparatus according to claim 1 , wherein the mask manufacturing apparatus is located on an inner side than the welding location. The pressing portion includes a first pressing portion that presses the first location, and a second pressing portion that presses the second location,
The first pressing portion is
A first leg extending in a direction along the vertical direction;
A first leg formed by bending toward a direction along the direction of separating from the tip of the first leg,
A first bent portion formed by bending from a tip portion of the first foot portion in a direction along a width direction of the metal mask sheet;
A first protrusion that is provided at the first bent portion and presses the first portion against the metal mask frame,
The second pressing portion is
A second leg extending in a direction along the vertical direction;
A second leg portion formed by being bent from a tip portion of the second leg portion in a direction along the separating direction;
A second bent portion formed by bending from the tip of the second foot portion in a direction along the width direction of the metal mask sheet;
A second protrusion provided on the second bent portion and pressing the second portion against the metal mask frame,
4. The mask according to claim 3 , wherein the welding location is located in a space surrounded by the first foot, the first bent portion, the second foot, and the second bent portion. Manufacturing equipment. The thickness T of the metal mask sheet, a mask manufacturing apparatus according to any one of claims 1 to 4, characterized in that the 10 [mu] m ≦ T ≦ 30 [mu] m.

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