JP6579933B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container for storing substrates such as semiconductor wafers, photomask glass, and aluminum disks.

  2. Description of the Related Art Conventionally, there is known a substrate storage container having a container main body having an opening for taking in and out a substrate such as a semiconductor wafer, a photomask glass, and an aluminum disk, and a lid for closing the opening. A support portion for horizontally supporting the substrate is provided on the inner side wall of the container main body, and an inclined groove for holding the substrate is provided on a wall surface located on the back side of the support portion. A retainer having a front groove portion for holding the substrate is attached to the inner surface of the lid that faces the substrate. In such a substrate storage container, when the lid is attached to the container body and closed, the front groove portion of the retainer attached to the lid body, and the inclined groove on the back side of the support portion provided on the inner wall of the container body, The substrate is held in a state where it is lifted from the support portion so that the substrate is not contaminated by vibration or the like during transportation. When the lid is removed from the opening of the container body, the substrate is mounted on the upper surface of the support. Thus, the support position of the substrate differs between the state where the lid is attached and the state where it is removed.

  In the substrate storage container having the basic structure as described above, for example, when the lid is attached to the container body, the substrate is easy to climb the inclined groove, while the substrate is easily inclined when the lid is removed. It has been proposed to change the vertical angle of the groove and to reverse the vertical direction of the substrate storage container during use (see, for example, Patent Document 1). In addition, proposals have been made to suppress the rotation of the substrate by the inclination angle of the front groove portion of the retainer (see, for example, Patent Document 2).

JP 2010-199189 A Japanese Patent Laying-Open No. 2015-135881

  The above prior art enables the substrate storage container to be turned upside down or has a certain effect in suppressing the rotation of the substrate during storage, but reduces the amount of resin rubbing marks on the substrate during storage, Moreover, it was found that a new improvement is required to further suppress the rotation. Recently, there is a proposal that the diameter of a wafer, which is a representative example of a substrate, is further increased to 450 mm, and accordingly, the mass of the wafer is expected to increase. When the mass of the wafer increases, the inclined groove that holds the substrate and the substrate come into stronger contact than before, and when the wafer is transported, there is a possibility that the rubbing traces of the material constituting the inclined groove adhere to the wafer end surface due to vibration or the like. Will be higher. In addition, when the holding force of the wafer is insufficient, there is a high risk that the wafer will rotate. This is the same problem not only with wafers but also with other substrates such as photomask glass or aluminum disks.

  An object of the present invention is to solve the above-mentioned problems, that is, to provide a substrate storage container that can reduce the rotation of the substrate during transportation of the substrate and reduce the adhesion of rubbing traces of the material that holds the substrate.

  A substrate storage container according to an embodiment for achieving the above object includes a container main body having support portions for supporting a substrate on inner walls facing each other and having an opening in a direction other than the inner wall, and an opening. A lid that can close the substrate, wherein the lid is a front groove portion that can hold the substrate in a closed state in which the substrate is housed in the container body and the opening is closed by the lid. The support portion is formed in the rear portion direction opposite to the opening portion, and has an inclined groove that can sandwich the substrate in the closed state, and the inclined groove is positioned on the upper side in the groove. An upper inclined surface, and another inclined surface that is in contact with the substrate from the opposite side of the upper inclined surface and is located in the lower side of the groove, and is a horizontal surface of the upper inclined surface. The angle θ2 formed by the angle θ1 and the horizontal plane of the lower inclined surface satisfies the following formula 1. It is the substrate storage container formed so that it may be added.

Formula 1: F1 ≧ F2
(F1 is a vertical component of the vertical drag rN exerted on the substrate from the upper inclined surface and the lower inclined surface when a force F for holding the substrate from the retainer is applied to the upper inclined surface and the lower inclined surface, and F2 Is the horizontal component of the vertical drag rN.)

  A substrate storage container according to another embodiment includes a support body that supports a substrate on inner walls facing each other, a container body having an opening in a direction other than the inner wall, and a lid that can close the opening. The lid has a retainer having a front groove portion that can hold the substrate in a closed state in which the substrate is housed in the container body and the opening is closed by the lid. The support portion is formed in the rear direction opposite to the opening portion and has an inclined groove that can sandwich the substrate in the closed state, and the inclined groove is an inclined surface that contacts the substrate and is on the upper side in the groove. An upper inclined surface, and another lower inclined surface that is in contact with the substrate from the opposite side of the upper inclined surface and is located in the lower side of the groove, and serves as a horizontal surface of the upper inclined surface. Angle θ1 is 45 degrees or less, and the angle θ formed with the horizontal surface of the lower inclined surface 2 is 45 degrees or less.

  In the substrate storage container according to another embodiment, the angle θ2 may be larger than the angle θ1.

  In the substrate storage container according to another embodiment, at least one of the angle θ1 and the angle θ2 may be in the range of 19.5 degrees to 45 degrees.

  In the substrate storage container according to another embodiment, the inclined groove further includes a second lower inclined surface that opens at an angle θ3 larger than the angle θ2 at a position closer to the opening side of the inclined groove than the lower inclined surface. May be.

  According to the present invention, it is possible to reduce the rotation of the substrate during transportation of the substrate, and to reduce the adhesion of rubbing marks on the material that holds the substrate.

FIG. 1 shows an exploded perspective view of a substrate storage container according to an embodiment of the present invention. FIG. 2 is a longitudinal sectional view of the substrate storage container of FIG. 1 cut in the vertical direction. FIG. 3 is a back view in which the inner surface of the lid of FIG. FIG. 4 is a cross-sectional view of the substrate storage container of FIG. 1 cut in the horizontal direction. 5 is a partial plan view (5A) in which only one support portion in FIG. 4 is viewed from above, an enlarged cross-sectional view (5B) taken along line AA in the partial plan view, and An enlarged sectional view (5C) of the inclined groove excluding the substrate from the enlarged sectional view is shown. FIG. 6 is a diagram for explaining the basic concept regarding the formation of the inclined grooves in FIG.

  Next, an embodiment of the substrate storage container of the present invention will be described with reference to the drawings. Note that the embodiments described below do not limit the present invention, and that all the elements and combinations thereof described in the embodiments are essential for the solution means of the present invention. Not exclusively.

  FIG. 1 shows an exploded perspective view of a substrate storage container according to an embodiment of the present invention. FIG. 2 is a longitudinal sectional view of the substrate storage container of FIG. 1 cut in the vertical direction. FIG. 3 is a back view in which the inner surface of the lid of FIG. FIG. 4 is a cross-sectional view of the substrate storage container of FIG. 1 cut in the horizontal direction. In the present application, “cutting in the vertical direction” in FIG. 2 means cutting up and down in a direction parallel to the inner wall surface of the container body.

  As shown in FIGS. 1 to 4, the substrate storage container 1 according to the embodiment of the present invention includes support portions 6 that support the substrates W on the inner walls facing each other, and an opening in a direction other than the inner walls. And a lid 3 that can close the opening. The lid 3 includes a retainer 5 having a front groove 5 a that can hold the substrate W in a closed state in which the substrate W is accommodated in the container body 2 and the opening is closed by the lid 3. The lid 3 further includes a gasket 4 that closes the opening of the container body 2 in a sealable manner, and a locking mechanism 7 that enables the container body 2 to be locked and unlocked. The locking mechanism 7 includes a rotating body 7a that can be operated from the outside, a latch bar 7b connected to the rotating body 7a, and a locking portion 7c that engages with a locking recess 12 in the opening of the container body 2. It is operated when the lid 3 is fixed to the container body 2 or removed. Thus, the lid 3 functions as a door for sealing the opening of the container main body 2 in the substrate storage container 1 so as to be sealed.

  A manual handle 10 is attached to the outer wall of the container body 2 for gripping by an operator or the like. Moreover, the container main body 2 is provided with the bottom plate 8 for conveyor conveyance in the bottom wall, and the robotic flange 9 for ceiling conveyance in the top wall, respectively.

  The support portion 6 is a plate-like support piece that is provided in a plurality of stages on the left and right inner walls of the container body 2 and supports the substrate W substantially horizontally. Here, the wall surface on the back side of the support portion 6 is provided with an inclined groove 6 a that restricts the movement of the substrate W to the back side. The inclined groove 6 a is an inclined surface in contact with the substrate W, and is an upper inclined surface 17 positioned on the upper side in the inclined groove 6 a and another inclined surface in contact with the substrate W from the side opposite to the upper inclined surface 17. And a lower inclined surface 19 positioned on the lower side in the groove 6a. The lower inclined surface 19 extends upward from the upper surface of the support portion 6. The upper inclined surface 17 is inclined in the opposite direction to the lower inclined surface 19. Thus, the inclined groove 6 a is a substantially V-shaped groove having the upper inclined surface 17 and the lower inclined surface 19. The detailed structure of the other inclined grooves 6a will be described later.

  When the lid 3 is attached to the container body 2, the inclined groove 6 a is located between the front groove portion 5 a of the retainer 5 and the substrate W from the mounting portion 6 b of the support portion 6 along the lower inclined surface 19. It is lifted and supported near the center of the lower inclined surface 19. The mounting portion 6b is located closer to the opening of the container body 2 than the inclined groove 6a. The transport of the substrate storage container 1 is thus performed in a state where the substrate W is lifted from the mounting portion 6b. Next, when removing the lid 3 from the container body 2, the substrate W slides down the lower inclined surface 19, is again supported on the mounting portion 6b, and is taken out by the take-out robot.

  The container main body 2 includes a rear support portion 13 on the back surface portion that is farthest from the opening. Although the rear support portion 13 has a plurality of upper and lower shelves, it is normally in a non-contact state with the substrate W. In this case, each shelf of the rear support portion 13 is formed at a different height from the plate surface of the mounting portion 6 b of the support portion 6. The rear support portion 13 has a role of regulating the position of the substrate W when a large impact is applied during transportation of the substrate storage container 1.

  The container body 2 and the lid 3 constituting the substrate storage container 1 according to the present embodiment are preferably formed mainly from a transparent polycarbonate resin which is an example of a thermoplastic resin. Here, “mainly” allows the inclusion of a material (for example, a filler such as ceramics) different from the thermoplastic resin, and even in such a case, 50 volume% or more of the container body 2 and the lid 3 are included. It means forming from a thermoplastic resin. However, the materials constituting the container body 2 and the lid body 3 may be materials other than the thermoplastic resin described above.

  Further, the multi-stage support portions 6 provided on the left and right inner walls in the inner space of the container body 2 may be made of the same or different resin as the container body 2. The support portion 6 (particularly, the inclined groove 6 a) is a member that requires slidability to come into contact with the substrate W. As a constituent material of the support portion 6, for example, a polycarbonate resin, a cycloolefin resin, a polyetherimide resin, a polybutylene terephthalate resin, a polyethylene terephthalate resin, or an alloy resin containing these as a main component can be used. In addition, as a slidability imparting agent, fluorine-containing resin particles typified by polytetrafluoroethylene; a slidable resin component such as polyethylene (PE), silicone rubber, silica, etc. as another resin component. Coated particles; may be included.

  5 is a partial plan view (5A) in which only one support portion in FIG. 4 is viewed from above, an enlarged cross-sectional view (5B) taken along line AA in the partial plan view, and An enlarged sectional view (5C) of the inclined groove excluding the substrate from the enlarged sectional view is shown.

  As shown in FIG. 5 (5B) and FIG. 5 (5C), the inclined groove 6a is provided with a groove bottom surface 16 at the innermost part of the groove, and the upper portion from the groove bottom surface 16 is connected to the upper inclined surface 17, and the lower portion is lower. It connects with the side inclined surface 19. The upper inclined surface 17 is preferably further connected to a second upper inclined surface 18 located on the opening side of the inclined groove 6a. The lower inclined surface 19 is preferably further connected to the second lower inclined surface 20 located on the opening side of the inclined groove 6a. However, at least one of the second upper inclined surface 18 and the second lower inclined surface 20 may not be provided in the inclined groove 6a. In that case, one or both of the upper inclined surface 17 and the lower inclined surface 19 are connected to the edge of the opening of the inclined groove 6a.

  As shown in FIG. 5 (5B), the substrate W accommodated in the container body 2 in this embodiment is usually formed by forming an R surface called a “bevel portion” on the end surface. The inclined groove 6 a is in contact with the bevel portion of the substrate W on both the inclined surfaces of the upper inclined surface 17 and the lower inclined surface 19. In the cross-sectional view of FIG. 5 (5C), the contact portion between the bevel portion of the substrate W and the upper inclined surface 17 and the lower inclined surface 19 is shown as a point contact. It is. The second upper inclined surface 18 and the second lower inclined surface 20 are not in contact with the bevel portion of the substrate W when the substrate W is stored.

  The angle (the “holding angle upper side” in FIG. 5 (5C)) θ1 formed with the horizontal plane of the upper inclined surface 17 is preferably 45 degrees or less, more preferably 19.5 degrees or more and 45 degrees or less. In addition, the angle (the “holding angle lower side” in FIG. 5 (5C)) θ2 formed with the horizontal surface of the lower inclined surface 19 is preferably 45 degrees or less, more preferably 19.5 degrees or more and 45 degrees or less. Is in range. The angle θ1 and the angle θ2 are more preferably set to 19.5 degrees or more by setting the angle θ1 or more to be equal to or greater than the inclination angle of the bevel region of the end surface of the substrate W. This is because the substrate W is held in a linear contact state to make it difficult for the material to be rubbed, and to prevent the substrate W from being sandwiched in the inclined groove 6a and not coming out. Further, the angle θ1 and the angle θ2 are preferably set to 45 degrees or less when the substrate W stored in the substrate storage container 1 is transported with respect to an impact (acceleration) from any direction. Even if vibration or vibration occurs, the substrate W is kept away from the inclined groove 6a on the back side of the support portion 6 to maintain the contact state, so that the rotation and movement of the substrate W are prevented and the material holding the substrate W is rubbed. This is to reduce the marks. Note that only one of the angle θ1 and the angle θ2 may be in the range of 19.5 degrees to 45 degrees.

  The angle θ2 is preferably larger than the angle θ1. Further, the angle θ1 is more preferably 19.5 degrees or more and 30 degrees or less. On the other hand, the angle θ2 is more preferably not less than 30 degrees and not more than 45 degrees. This is because by forming such an angle, when the lid 3 is removed from the opening of the container body 2, the substrate W can be easily slid down to a desired position, and the substrate W can be more easily taken out. FIG. 5 shows a preferred example of the angle θ1 = 22.5 degrees and the angle θ2 = 40 degrees, but the angles θ1 and θ2 are not limited to such examples.

  The angle (the “slip angle” in FIG. 5 (5C)) θ4 formed with the horizontal plane of the second upper inclined surface 18 is an angle larger than the angle θ1 and does not exceed 90 degrees. Further, the angle θ3 (in FIG. 5C, “slip angle”) θ3 formed with the horizontal plane of the second lower inclined surface 20 is an angle larger than the angle θ2 and does not exceed 90 degrees. As described above, when the lid 3 is removed from the container body 2 by forming the second lower inclined surface 20 continuing from the lower inclined surface 19 and forming the second lower inclined surface 20 on the lower side of the inclined groove 6a. The substrate W can be more easily slid down. FIG. 5 shows a preferred example of the angle θ3 = 60 degrees and the angle θ4 = 60 degrees, but the angles θ3 and θ4 are not limited to such examples. In the present application, the angle θ1, the angle θ2, the angle θ3, and the angle θ4 all mean the angle formed with the horizontal plane even if not specifically mentioned.

  As described above, the substrate storage container 1 according to this embodiment includes the support body 6 that supports the substrate W on the inner walls facing each other, and the container body 2 having an opening in a direction other than the inner wall; And a lid 3 that can close the opening. The lid 3 is a state in which the substrate W is housed in the container body 2 and the opening is closed by the lid 3 before the substrate W can be sandwiched. The retainer 5 is provided with a side groove 5a. The support 6 has an inclined groove 6a that is formed in the rear direction opposite to the opening and can hold the substrate W in the closed state. The upper inclined surface 17 located on the upper side in the groove, and another inclined surface 19 which is in contact with the substrate W from the opposite side of the upper inclined surface 17 and located on the lower side in the groove. And. Since the angle θ1 formed with the horizontal plane of the upper inclined surface 17 is 45 degrees or less and the angle θ2 formed with the horizontal plane of the lower inclined plane 19 is 45 degrees or less, the rotation of the substrate W can be reduced and the inclined groove 6a is configured. It is possible to reduce adhesion of a rubbing mark of a material (for example, resin).

  FIG. 6 is a diagram for explaining the basic concept regarding the formation of the inclined grooves in FIG.

  In FIG. 6, the left figure shows an example of a good inclined groove 6a, and the right figure shows an example of an undesirable inclined groove 6a. 6 shows only the state in which the upper end portion of the substrate W is in contact with the upper inclined surface 17, the state in which the lower end portion of the substrate W is in contact with the lower inclined surface 19 is also described below. This is the same as the situation described in the section.

  When the substrate W is held in the inclined groove 6a, the holding force F of the substrate W from the retainer 5 is applied to the contact portion between the substrate W and the upper inclined surface 17. As a result, the upper inclined surface 17 receives a vertical drag N in a direction perpendicular to the surface in contact with the contact portion of the upper inclined surface 17. The angle formed by the vector of the normal force N and the vector of the holding force F is indicated by θ in FIG. On the other hand, the substrate W receives a reaction force rN in the direction opposite to the direction of the vertical reaction force N (referred to as a vertical reaction force), where r means a reactive force. The vertical reaction force rN is divided into a vertical component (also referred to as a Z direction component) F1 and a horizontal component (also referred to as a Y direction component) F2, and the upper inclined surface 17 is formed so as to satisfy the condition of the following formula 1. Effectively, the rotation of the substrate W can be reduced during the transportation of the substrate W, and the adhesion of the rubbing traces of the material (resin) holding the substrate W can be reduced.

F1 ≧ F2 Formula 1
(F1 is the vertical drag rN exerted on the substrate W from the upper inclined surface 17 and the lower inclined surface 19 when the force F for holding the substrate W from the retainer 5 is applied to the upper inclined surface 17 and the lower inclined surface 19. (It is a vertical component, and F2 is a horizontal component of the vertical drag rN.)

  As shown in the example on the left side in FIG. 6, when the upper inclined surface 17 having an angle θ1 = 22.5 degrees and the upper end surface of the substrate W are in contact with each other, F1> F2, and the rotation of the substrate W is suppressed and the rubbing marks are attached. Reduction effect is obtained. On the other hand, as shown in the example on the right side in FIG. 6, when the upper inclined surface 17 having the angle θ1 = 55 degrees and the upper end surface of the substrate W are in contact with each other, F1 <F2, and the same effect as the above cannot be obtained. .

  As described above, the substrate storage container 1 according to this embodiment includes the support body 6 that supports the substrate W on the inner walls facing each other, and the container body 2 having an opening in a direction other than the inner wall; And a lid 3 that can close the opening. The lid 3 is a state in which the substrate W is housed in the container body 2 and the opening is closed by the lid 3 before the substrate W can be sandwiched. The retainer 5 is provided with a side groove 5a. The support 6 has an inclined groove 6a that is formed in the rear direction opposite to the opening and can hold the substrate W in the closed state. The upper inclined surface 17 located on the upper side in the groove, and another inclined surface 19 which is in contact with the substrate W from the opposite side of the upper inclined surface 17 and located on the lower side in the groove. And. Since the angle θ1 formed with the horizontal plane of the upper inclined surface 17 and the angle θ2 formed with the horizontal plane of the lower inclined surface 19 are formed so as to satisfy Formula 1 (F1 ≧ F2), the rotation of the substrate W can be reduced, and Adhesion of rubbing traces of the material (for example, resin) constituting the inclined groove 6a can be reduced.

  The preferred embodiments of the substrate storage container according to the present invention have been described above, but the present invention is not limited to the above-described embodiments and can be implemented with various modifications.

  For example, the angle θ2 may be the same as or smaller than the angle θ1. This is also because the rotation of the substrate W can be reduced and the adhesion of the rubbing trace of the material (for example, resin) constituting the inclined groove 6a can be reduced even with such an angle relationship. Further, at least one of the angle θ1 and the angle θ2 may be in the range of 1 degree or more and less than 19.5 degrees.

  The inclined groove 6 a includes a second upper inclined surface 18 that opens at an angle θ 4 larger than the angle θ 1 at a position closer to the opening side of the inclined groove 6 a than the upper inclined surface 17, while The second lower inclined surface 20 that opens at an angle θ3 larger than the angle θ2 may not be provided at a position close to the opening side. In addition, the inclined groove 6 a may include only the second lower inclined surface 20 without including the second upper inclined surface 18.

  Next, examples of the present invention will be described in comparison with comparative examples. However, the present invention is not construed as being limited to the examples described below.

1. Example (Example 1)
The container body and the lid were manufactured from a transparent polycarbonate resin. The support part including the inclined groove was manufactured from polybutylene terephthalate resin, and this was attached to the container body or integrally formed with the container body to manufacture the substrate storage container. The inclined groove has a horizontal holding angle (upper side) θ1 (referred to as angle θ1) of 19.5 degrees, a holding angle (lower side) θ2 (referred to as angle θ2) of 30 degrees, a sliding angle θ3 (referred to as angle θ3), and a sliding angle. Both θ4 (referred to as angle θ4) were formed to be 65 degrees.
(Example 2)
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 22.5 degrees and an angle θ2 = 40 degrees.
(Example 3)
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 30 degrees and an angle θ2 = 40 degrees.
Example 4
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 45 degrees and an angle θ2 = 45 degrees.

2. Comparative Example (Comparative Example 1)
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 65 degrees and an angle θ2 = 65 degrees.
(Comparative Example 2)
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 22.5 degrees and an angle θ2 = 65 degrees.
(Comparative Example 3)
A substrate storage container was manufactured under the same conditions as in Example 1 except that the inclined grooves were formed to have an angle θ1 = 60 degrees, an angle θ2 = 60 degrees, an angle θ3 = 60 degrees, and an angle θ4 = 60 degrees.

3. Evaluation Method (1) Contact Mark Adhesion Evaluation After Vibrating a Substrate Storage Container Containing a Substrate W Using a Vibrator (EMIC, 936-AW / LAH) by a Method Conforming to JIS Z0200: 1999 Then, it was examined whether or not the resin rubbing trace of the inclined groove could be confirmed on the substrate. The vibration condition was equivalent to less than 1000 km on land. The sine wave vibration was performed by changing one and a half times (5 Hz → 50 Hz → 5 Hz → 50 Hz) at a frequency of 5 to 50 Hz. The acceleration was ± 0.75 G, and the sweep time was 7 minutes one way for a total of 21 minutes. The rubbing marks were evaluated from simple visual observation of the amount of light reflected from the condenser lamp and observation using a digital microscope. If no scratch marks are observed in any of the observations, it is evaluated as “◯” (good meaning), and if any scratch marks are recognized by any method, “×” (defective meaning). evaluated.

(2) Substrate rotation If no substrate rotation is observed before and after the vibration of (1) above, it is evaluated as “◯” (good meaning). It evaluated as "x" (meaning defect).

(3) Slip-up and slide-down of the board When the cover is attached to the container body, if the board rises smoothly on the lower inclined surface of the inclined groove, “○” (good meaning) When it was evaluated and even a slight catch was found, it was evaluated as “×” (defective meaning). If the substrate slides smoothly down the lower inclined surface of the inclined groove when the lid is removed from the container body, it is evaluated as “◯” (good meaning), and even a slight catch is recognized. In such a case, it was evaluated as “×” (defective meaning).

4). Evaluation Results Table 1 shows the manufacturing conditions and various evaluation results of each Example and each Comparative Example.

  As is apparent from Table 1, when each example and each comparative example were compared, a large difference was observed in the evaluation of the scratch marks after the vibration test, and no scratch marks were observed on the substrate in each example. On the other hand, in each comparative example, scratch marks were observed on the substrate. Regarding the evaluations other than the scratch marks, there was no difference in each Example and each Comparative Example, and a good evaluation was obtained. In comprehensive judgment, Examples 1-4 excellent in all the evaluation items passed, and Comparative Examples 1-3 in which adhesion of contact marks was recognized failed. From this result, it is considered that when both the angle θ1 and the angle θ2 are 45 degrees or less with respect to the horizontal, the rubbing traces can be prevented from adhering to the substrate.

  The present invention can be used for a substrate storage container for storing a substrate such as a semiconductor wafer, a photomask glass, or an aluminum disk.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Cover body 5 Retainer 5a Front side groove part 6 Support part 6a Inclination groove 17 Upper inclined surface 19 Lower inclined surface 20 Second lower inclined surface W Substrate

Claims (4)

A container main body provided with support portions for supporting a substrate on inner walls facing each other, and having an opening in a direction other than the inner wall;
A lid capable of closing the opening;
A substrate storage container comprising:
The lid body includes a retainer including a front groove portion that can hold the substrate in the closed state in which the substrate is housed in the container body and the opening is closed by the lid body,
The support portion is formed in a rear direction opposite to the opening, and in the closed state, the support portion is sandwiched between the front groove portion and lifted from the mounting portion of the support portion to support the inclined groove. Have
The inclined groove is an upper inclined surface located on the upper side in the groove, and another inclined surface that is in contact with the substrate from the opposite side of the upper inclined surface and is located on the lower side in the groove. An inclined surface,
When the angle formed with the horizontal plane of the upper inclined surface is θ1, and the angle formed with the horizontal plane of the lower inclined surface is θ2, θ2 is larger than θ1, both θ1 and θ2 are 45 degrees or less, and the following formula 1 A substrate storage container formed so as to satisfy the above.
Formula 1: F1 ≧ F2
(F1 is a normal force rN exerted on the substrate from the upper inclined surface and the lower inclined surface when a force F for holding the substrate from the retainer is applied to the upper inclined surface and the lower inclined surface. (It is a vertical component, and F2 is a horizontal component of the vertical drag rN.) 2. The substrate storage container according to claim 1, wherein at least one of the angle θ <b> 1 and the angle θ <b> 2 is in a range of 19.5 degrees or more and 45 degrees or less. The inclined groove is closer to the opening side of the inclined groove from the lower inclined surface, a second lower inclined surface that is open at a large angle θ3 from the angle .theta.2, to claim 1 or claim 2 further comprising The substrate storage container as described. The lid is made of polycarbonate resin,
  The support part is a member made of a cycloolefin resin, a polyetherimide resin, a polybutylene terephthalate resin, a polyethylene terephthalate resin, or an alloy resin containing these as a main component, or a member containing a slidability imparting agent. The substrate storage container according to any one of claims 1 to 3.