JP6576356B2 - サブ周囲温度蒸気センサ及びその使用方法 - Google Patents

サブ周囲温度蒸気センサ及びその使用方法 Download PDF

Info

Publication number
JP6576356B2
JP6576356B2 JP2016554380A JP2016554380A JP6576356B2 JP 6576356 B2 JP6576356 B2 JP 6576356B2 JP 2016554380 A JP2016554380 A JP 2016554380A JP 2016554380 A JP2016554380 A JP 2016554380A JP 6576356 B2 JP6576356 B2 JP 6576356B2
Authority
JP
Japan
Prior art keywords
sensor element
vapor
conductive electrode
sensor
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016554380A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017506751A (ja
JP2017506751A5 (enExample
Inventor
ステファン エイチ． グライスカ，
ステファン エイチ． グライスカ，
マイケル シー． パラツォット，
マイケル シー． パラツォット，
ジャスティン トゥンジュンヤサム，
ジャスティン トゥンジュンヤサム，
ミュンチャン カン，
ミュンチャン カン，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2017506751A publication Critical patent/JP2017506751A/ja
Publication of JP2017506751A5 publication Critical patent/JP2017506751A5/ja
Application granted granted Critical
Publication of JP6576356B2 publication Critical patent/JP6576356B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2016554380A 2014-02-27 2015-02-19 サブ周囲温度蒸気センサ及びその使用方法 Active JP6576356B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461945583P 2014-02-27 2014-02-27
US61/945,583 2014-02-27
PCT/US2015/016620 WO2015130548A1 (en) 2014-02-27 2015-02-19 Sub-ambient temperature vapor sensor and method of use

Publications (3)

Publication Number Publication Date
JP2017506751A JP2017506751A (ja) 2017-03-09
JP2017506751A5 JP2017506751A5 (enExample) 2018-03-22
JP6576356B2 true JP6576356B2 (ja) 2019-09-18

Family

ID=53005625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016554380A Active JP6576356B2 (ja) 2014-02-27 2015-02-19 サブ周囲温度蒸気センサ及びその使用方法

Country Status (6)

Country Link
US (1) US10161896B2 (enExample)
EP (1) EP3111203A1 (enExample)
JP (1) JP6576356B2 (enExample)
KR (1) KR102414098B1 (enExample)
CN (1) CN106062545A (enExample)
WO (1) WO2015130548A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018526614A (ja) 2015-04-27 2018-09-13 バーチャル・フルイド・モニタリング・サービシズ，エルエルシー 流体分析および監視のための、システム、装置、および方法
US10591388B2 (en) 2015-04-27 2020-03-17 Virtual Fluid Monitoring Services LLC Fluid analysis and monitoring using optical spectroscopy
US9780554B2 (en) * 2015-07-31 2017-10-03 Apple Inc. Moisture sensors
US10083883B2 (en) * 2016-06-20 2018-09-25 Applied Materials, Inc. Wafer processing equipment having capacitive micro sensors
WO2019246099A1 (en) * 2018-06-19 2019-12-26 Virtual Fluid Monitoring Services LLC Fluid analysis and monitoring using optical spectroscopy
CN109142185B (zh) * 2018-08-30 2020-05-05 上海大学 一种水汽透过率测试系统和方法
CN111122185A (zh) * 2019-06-28 2020-05-08 浙江荷清柔性电子技术有限公司 旋转部件健康监测系统及机车
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
WO2025115398A1 (ja) * 2023-11-29 2025-06-05 パナソニックＩｐマネジメント株式会社 回路基板用フィルム、回路基板、伝送方法、及び回路基板用フィルムの製造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794347B2 (ja) * 1991-03-11 1998-09-03 新コスモス電機株式会社 ガス濃度検出方法及び検知素子並びに検出装置
JP2853622B2 (ja) * 1995-12-12 1999-02-03 横河電機株式会社 ガス測定装置
EP0787985A1 (de) 1996-02-03 1997-08-06 Cerberus Ag Verfahren und Vorrichtung für den Nachweis von organischen Dämpfen und Aerosolen
US5792938A (en) 1996-12-13 1998-08-11 Panametrics, Inc. Humidity sensor with differential thermal detection and method of sensing
GB2328556A (en) * 1997-08-21 1999-02-24 Univ Cardiff Thermoelectric cooler for semiconductor devices
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US7498802B2 (en) 2006-07-10 2009-03-03 3M Innovative Properties Company Flexible inductive sensor
US20080018424A1 (en) 2006-07-10 2008-01-24 3M Innovative Properties Company Inductive sensor
US8835180B2 (en) * 2007-10-05 2014-09-16 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use
JP2013542422A (ja) 2010-09-30 2013-11-21 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
WO2012044419A1 (en) * 2010-09-30 2012-04-05 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
EP2697643B1 (en) * 2011-04-13 2015-01-28 3M Innovative Properties Company Method of using an absorptive sensor element
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
JP2014510933A (ja) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
JP6016887B2 (ja) 2011-04-13 2016-10-26 スリーエム イノベイティブ プロパティズ カンパニー 校正情報を含む電子素子及びその使用方法
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
KR101367887B1 (ko) * 2012-03-16 2014-03-03 주식회사삼영에스앤씨 정전용량형 습도센서
CN103528603A (zh) 2012-07-05 2014-01-22 北斗电子工业株式会社 静电电容式水分检测装置
CN102944325B (zh) 2012-11-29 2014-03-12 东南大学 一种无源无线温、湿度集成传感器
EP3048983B1 (en) 2013-09-26 2020-11-25 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site

Also Published As

Publication number Publication date
US20170016843A1 (en) 2017-01-19
JP2017506751A (ja) 2017-03-09
CN106062545A (zh) 2016-10-26
EP3111203A1 (en) 2017-01-04
KR20160127020A (ko) 2016-11-02
KR102414098B1 (ko) 2022-06-29
US10161896B2 (en) 2018-12-25
WO2015130548A1 (en) 2015-09-03

Similar Documents

Publication Publication Date Title
JP6576356B2 (ja) サブ周囲温度蒸気センサ及びその使用方法
CN103492872B (zh) 使用吸收性传感器元件的方法
EP2864770B1 (en) Sensor element, method of making, and method of using the same
US10228344B2 (en) Sensor element, method of making the same, and sensor device including the same
JP5955379B2 (ja) 揮発性有機化合物の検出方法
JP5932806B2 (ja) センサー素子、その製造方法、及びそれを含むセンサー装置
US9658198B2 (en) Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
JP2014510933A (ja) センサ素子を含み一体型加熱機構を備えた蒸気センサ
JP2014515106A (ja) 校正情報を含む電子素子及びその使用方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180208

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181204

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20181130

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190228

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190723

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190820

R150 Certificate of patent or registration of utility model

Ref document number: 6576356

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250