JP6563144B2 - モノクロメータの製造方法 - Google Patents

モノクロメータの製造方法 Download PDF

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Publication number
JP6563144B2
JP6563144B2 JP2018552749A JP2018552749A JP6563144B2 JP 6563144 B2 JP6563144 B2 JP 6563144B2 JP 2018552749 A JP2018552749 A JP 2018552749A JP 2018552749 A JP2018552749 A JP 2018552749A JP 6563144 B2 JP6563144 B2 JP 6563144B2
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JP
Japan
Prior art keywords
slit
monochromator
electron beam
thin film
manufacturing
Prior art date
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Application number
JP2018552749A
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English (en)
Japanese (ja)
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JP2019519063A (ja
Inventor
小川　貴志
貴志 小川
ジュファン キム
ジュファン キム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Research Institute of Standards and Science
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Korea Research Institute of Standards and Science
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Publication date
Application filed by Korea Research Institute of Standards and Science filed Critical Korea Research Institute of Standards and Science
Publication of JP2019519063A publication Critical patent/JP2019519063A/ja
Application granted granted Critical
Publication of JP6563144B2 publication Critical patent/JP6563144B2/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B7/00—Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
    • G03B7/08—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
    • G03B7/081—Analogue circuits
    • G03B7/085—Analogue circuits for control of aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1204—Grating and filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/019—Manufacture or treatment of bond pads
    • H10W72/01951—Changing the shapes of bond pads

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2018552749A 2016-05-25 2016-05-26 モノクロメータの製造方法 Active JP6563144B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2016-0064041 2016-05-25
KR1020160064041A KR101787379B1 (ko) 2016-05-25 2016-05-25 모노크로미터의 제조방법
PCT/KR2016/005545 WO2017204380A1 (ko) 2016-05-25 2016-05-26 모노크로미터의 제조방법

Publications (2)

Publication Number Publication Date
JP2019519063A JP2019519063A (ja) 2019-07-04
JP6563144B2 true JP6563144B2 (ja) 2019-08-21

Family

ID=60296239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018552749A Active JP6563144B2 (ja) 2016-05-25 2016-05-26 モノクロメータの製造方法

Country Status (3)

Country Link
JP (1) JP6563144B2 (ko)
KR (1) KR101787379B1 (ko)
WO (1) WO2017204380A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113109949B (zh) * 2021-04-09 2022-09-02 长春长光格瑞光电技术有限公司 宽谱段高分辨中阶梯光栅单色器的针孔装调方法
US20230245933A1 (en) * 2022-02-02 2023-08-03 Kla Corporation Combining focused ion beam milling and scanning electron microscope imaging

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101318B2 (ja) * 1985-10-16 1994-12-12 株式会社日立製作所 イオンマイクロビ−ム装置
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
NL1009959C2 (nl) * 1998-08-28 2000-02-29 Univ Delft Tech Elektronenmicroscoop.
JP2001084900A (ja) * 1999-09-13 2001-03-30 Hitachi Ltd 集束イオンビーム加工観察装置の固定絞りの加工方法
JP2003031171A (ja) * 2001-07-18 2003-01-31 Nikon Corp 電子線装置及び該電子線装置を用いたデバイス製造方法
JP2003331764A (ja) * 2002-05-17 2003-11-21 Jeol Ltd エネルギーフィルタ
JP2004327377A (ja) * 2003-04-28 2004-11-18 Jeol Ltd モノクロメータ
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
EP2287883B1 (en) * 2004-04-15 2017-08-16 Carl Zeiss SMT GmbH Apparatus and method for investigating or modifying a surface with a beam of charged particles
DE102004037781A1 (de) 2004-08-03 2006-02-23 Carl Zeiss Nts Gmbh Elektronenstrahlgerät
DE102007024353B4 (de) * 2007-05-24 2009-04-16 Ceos Corrected Electron Optical Systems Gmbh Monochromator und Strahlquelle mit Monochromator
JP5247761B2 (ja) * 2010-05-21 2013-07-24 株式会社日立ハイテクサイエンス Ｆｉｂ−ｓｅｍ複合装置
US8592761B2 (en) * 2011-05-19 2013-11-26 Hermes Microvision Inc. Monochromator for charged particle beam apparatus
EP2811506B1 (en) * 2013-06-05 2016-04-06 Fei Company Method for imaging a sample in a dual-beam charged particle apparatus
KR101633978B1 (ko) * 2014-06-20 2016-06-28 한국표준과학연구원 모노크로메이터 및 이를 구비한 하전입자빔 장치
JP6266467B2 (ja) * 2014-08-11 2018-01-24 日本電子株式会社 電子顕微鏡、およびモノクロメーターの調整方法
EP3010031B1 (en) * 2014-10-16 2017-03-22 Fei Company Charged Particle Microscope with special aperture plate

Also Published As

Publication number Publication date
KR101787379B1 (ko) 2017-10-18
JP2019519063A (ja) 2019-07-04
WO2017204380A1 (ko) 2017-11-30

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