JP6551412B2 - Brush polishing apparatus and polishing method - Google Patents

Description

  The present invention relates to a brush polishing apparatus including a rotating brush that rotates horizontally with respect to a workpiece surface, and a polishing method using the brush polishing apparatus.

  The brush polishing apparatus is widely used in surface roughness adjustment, removal of micro cracks and fine pores in the surface layer, deburring, shape adjustment, removal of a film such as a coated film, and the like. In the polishing brush, the brush hair material is disposed radially toward the outer edge around the rotation axis, and the brush hair material is exposed downward from the bottom surface of the brush case fixed to the tip of the rotation shaft. There are some types. The polishing brush of the latter type is suitable for polishing a flat portion because the polishing is performed by rotating the tip of the brush bristles horizontally with respect to the work surface.

  The above-mentioned type of polishing brush whose brush bristle material is exposed downward from the bottom surface of the brush case has a different finish depending on the protruding length from the bottom surface. It is necessary to correct the height so that it is always constant. In this type of polishing brush, Patent Document 1 discloses a polishing brush having a configuration capable of adjusting the protruding length of the brush bristle material. This polishing brush has a structure in which the protrusion length of the brush hair material is corrected by the operator moving the brush holder to which the plurality of polishing tools are fixed when the brush hair material is worn. Therefore, it is necessary to stop the operation of the brush polishing apparatus every predetermined time.

  Patent Document 2 discloses a brush polishing apparatus having a mechanism for automatically correcting the protruding length of a brush bristle material. The brush polishing apparatus comprises means for determining whether the tip of the brush has come into contact. Further, the brush holder to which the polishing tool is fixed is connected to the stepping motor. The adjustment of the projection length advances the brush holder after moving the abrasive brush to the measuring means. And if the front-end | tip of a brush bristle material contacts, a brush holder will be retracted. Since the brush holder is moved forward and backward by a stepping motor, the forward distance and the backward distance can be calculated from the number of pulses. The protrusion length can be adjusted by the difference between these distances.

  In the configuration of Patent Document 2, a mechanism for moving the polishing brush to the vicinity of the measuring means (described in the specification as “first and second tables to which the servomotors are respectively connected”) is required. The apparatus has a complicated configuration, such as a restriction on the position of the workpiece. In addition, since it is judged whether the brush hairs are in contact with a mechanical switch when judging whether the tip of the brush has come in contact, this switch has abrasive grains in the case of grinding with cutting powder or loose abrasive at the time of brush grinding It adheres and causes a failure of the measuring means.

Utility Model Registration No. 2516286 Japanese Unexamined Patent Publication No. 07-040225

  In view of the above problems, the present invention provides a brush polishing apparatus provided with a mechanism capable of correcting the protruding length of a brush bristle material with a simple configuration in order to reduce errors in the degree of finish for each workpiece, and the polishing brush apparatus. An object is to provide a polishing method used.

The brush polishing apparatus according to one aspect of the present invention is a brush polishing apparatus in which a tip of a brush bristle material contacts and rotates with a work surface of a workpiece for polishing. The brush polishing apparatus includes a brush unit, a moving mechanism, a work fixing unit, and control means. The brush unit has a polishing brush with the tip of the brush bristle exposed on the bottom surface, a mechanism for horizontally rotating the polishing brush with respect to the work surface, and a length at which the tip of the brush bristle of the polishing brush protrudes from the bottom surface. A mechanism that automatically adjusts the length to a preset length. The moving mechanism moves the brush unit relative to the surface to be processed in the horizontal direction. The workpiece fixing unit fixes the workpiece. The control means calculates polishing conditions and outputs an operation signal of the brush polishing apparatus to each unit.
Then, the bottom surface of the polishing brush is positioned at an adjustment position that is a position that is a predetermined protruding length away from an adjustment surface that is a surface on which the brush hair material can come into contact. When the change in load due to the tip of the brush bristles coming into contact with the adjustment surface reaches a preset value, the brush bristles stop moving forward to adjust the projection length of the brush bristles. It is the structure which performs.

And the brush grinding | polishing method by this grinding | polishing brush is equipped with a setting process, a protrusion length adjustment process, a brush position setting process, and a grinding | polishing process. In the setting process, the work is fixed to the work fixing unit. In the projecting length adjusting step, the brush bristle material automatically adjusts the length of projection of the brush bristle material of the polishing brush from the bottom surface to a preset length. In the brush position setting step, the polishing brush is advanced in the direction of the processing surface so that the tip of the polishing brush is pressed in the direction of the processing surface by the length of a preset cut amount. In the polishing process, the polishing brush is horizontally rotated and the polishing brush is polished while moving at least one of the brush unit and the work fixing unit so as to move horizontally relative to the processing surface.
The protruding length adjustment step includes a step of moving the polishing brush so that the bottom surface of the polishing brush is positioned at the adjustment position, a step of moving the brush bristle toward the adjustment surface, and the brush bristle on the adjustment surface. And b) stopping the forward movement of the brush bristles when the change in load due to the contact reaches a preset value.

  In the brush polishing apparatus and the brush polishing method on one side, since the brush unit is configured to automatically adjust the protruding length of the brush bristle material, the same finishing degree can always be obtained when polishing a plurality of workpieces. Further, the mechanism for adjusting the projection length positions the bottom surface of the polishing brush so as to be separated from the adjustment surface by a desired projection length, and advances the brush hair material until it abuts on the adjustment surface. In the configuration of the present invention, it is not necessary to use a mechanical switch as in the prior art, so when the brush bristle material comes into contact with the adjustment surface in the protrusion length adjustment process, cutting powder or loose abrasives at the time of brush polishing are used. In this case, the abrasive grains and the like are not attached to the mechanism for adjusting the protruding length of the brush bristle material and fail.

  The polishing brush of one embodiment further includes a height position measuring device adjacent to the brush unit, and the height position measuring device is a height position of an adjustment surface that is a surface facing the tip of the brush bristle material in the workpiece. And the height position is output to the control means, and the control means may calculate the adjustment position based on the height position.

And the brush grinding | polishing method by this grinding | polishing brush is provided with a setting process, a height position measurement process, a protrusion length adjustment process, a brush position setting process, and a grinding | polishing process. In the setting process, the work is fixed to the work fixing unit. In the height position measuring step, the height position of the adjustment surface is measured by a height position measuring device. In the projecting length adjustment step, the brush bristle material automatically adjusts the length of projection of the brush bristle material of the polishing brush from the bottom surface to a preset length. In the brush position setting step, the polishing brush is advanced so that the tip of the polishing brush is pressed in the direction of the surface to be processed, which is the adjustment surface, by the length of a preset cut amount based on the measurement result of the height position. In the polishing step, the polishing brush is rotated horizontally, and at least one of the brush unit and the work fixing unit is moved so as to move the polishing brush horizontally relative to the processing surface.
The projecting length adjusting step includes a step of inputting the preset projecting length and the height position of the adjustment surface measured in the height position measuring step to the control unit, a projecting length input to the control unit, and A step of calculating a distance for moving the polishing brush forward and backward from a height position, a step of moving the polishing brush based on the result of the calculation, a step of moving the brush bristle toward the work surface, and a brush bristle And b. Stopping the forward movement of the brush bristles when a change in load due to contact with the adjustment surface reaches a preset value.

  The brush polishing apparatus and the brush polishing method of an embodiment are configured to measure the height position of the processing surface with a height position measuring device. With this configuration, when a plurality of workpieces are polished, even if there is an error in the dimensions of each workpiece, it is possible to always polish with the same cutting amount. Further, by setting the surface of the work opposite to the tip of the brush hair as the adjustment surface, it is possible to adjust the protruding length of the brush hair as well as measuring the height position of the work.

The brush unit of the brush polishing apparatus according to one embodiment includes a polishing brush, a rotation mechanism, and a projection length adjustment mechanism. The polishing brush includes a plurality of brush bristle materials, a disc-shaped holding disc to which the base of the brush bristle material is fixed, and a cylindrical brush case that accommodates the holding disc so as to be movable in the bottom direction. The rotation mechanism includes a main shaft having one end fixed to the center of the top surface of the brush case and a mechanism for rotating the main shaft. The protrusion length adjustment mechanism has one end fixed at the center of the holding plate, and a lower shaft that is slidably inserted into a through hole provided in the center of the circular cross section of the main shaft and a lower shaft that moves the sub shaft in the longitudinal direction. Provide mechanism.
And you may comprise so that rotation of the polishing brush centering on the main axis | shaft by rotation of a main axis | shaft and adjustment of the protrusion length of a brush bristle material by the movement of a countershaft may be performed. Since the adjustment of the projection length and the rotation of the polishing brush can be performed on the same axis, blurring due to eccentricity does not occur in the polishing brush. As a result, the workpiece can be polished stably.

  In addition, the lowering mechanism of the brush polishing apparatus according to one embodiment detects a change in the load applied to the counter shaft when the brush bristle material moves, or a motor that can detect a change in torque when the brush bristle material moves. Any of the possible sensors. The protrusion length of the brush bristles can be adjusted without requiring a complicated configuration.

  With the configuration of one aspect or one embodiment, it is possible to provide a brush polishing apparatus provided with a brush unit capable of automatically adjusting the amount of protrusion of the brush bristles from the bottom surface of the polishing brush. Thereby, even if a some workpiece | work is grind | polished, the brush grinding | polishing method which reduces the variation of the finishing grade can be provided.

This application is based on Japanese Patent Application No. 2014-159187 filed on August 5, 2014 in Japan, the contents of which form part of the present application.
The present invention will also be more fully understood from the following detailed description. However, the detailed description and the specific examples are the preferred embodiments of the present invention and are described for the purpose of illustration only. This is because various changes and modifications will be apparent to those skilled in the art from this detailed description.
The applicant does not intend to contribute any of the described embodiments to the public, and the disclosed modifications and alternatives that may not be included in the scope of the claims are equivalent. It is part of the invention under discussion.
In this specification or in the claims, the use of nouns and similar directives should be interpreted to include both the singular and the plural unless specifically stated otherwise or clearly denied by context. The use of any examples or exemplary terms provided herein (eg, “etc.”) is merely intended to facilitate the description of the invention and is not specifically recited in the claims. As long as it does not limit the scope of the present invention.

It is a mimetic diagram showing a brush polisher concerning an embodiment of the present invention. It is a schematic diagram which shows the brush drive unit which concerns on embodiment of this invention. It is a schematic diagram for demonstrating the mounting member which concerns on embodiment of this invention. FIG. 3A is a schematic view showing the entire placement member, and FIG. 3B is a schematic view showing a state in which various types of workpieces are placed.

  An embodiment of a brush polishing apparatus according to the present invention will be described with reference to the drawings. The present invention is not limited to the following embodiments, and changes, modifications, and improvements can be added without departing from the scope of the invention. In the following description, “upper, lower, left, and right directions” refer to directions in the drawings unless otherwise specified.

  FIG. 1 shows a brush polishing apparatus according to this embodiment. The brush polishing apparatus 01 of the present embodiment places a polishing unit 20 including a plurality of brush units 10, a workpiece fixing unit 30 that clamps the workpiece W, and a workpiece W when the workpiece is fixed by the workpiece fixing unit 30. The mounting unit 40, a control unit 50 that controls the operation of the brush polishing apparatus 01, an operation unit 60 that operates the operation of the brush polishing apparatus 01, and a housing 70 are provided.

  The polishing unit 20 includes a moving base 21, a fixed plate 22 vertically fixed to the moving base 21, a moving mechanism 23 fixed to the moving base 21, and a surface of the workpiece W facing the tip of the polishing brush 11 described later. A height position measuring device 24 for measuring the height position (in the present embodiment, the upper surface) and three brush units 10 fixed to the fixed plate 22 are provided. The moving mechanism 23 includes a motor 23a and a gear (not shown). In the housing 70, a long narrow rail 71 having teeth capable of meshing with the above-described gear is disposed in the left-right direction in the figure. When the motor 23a is operated, the polishing unit 20 can be moved along the rail 71.

  The three brush units 10 are connected to the fixed plate 22 so as to be parallel to each other. Although the details of the configuration of the brush unit 10 will be described later, an abrasive brush 11 having a tip of a brush bristle material protruding is fixed to the bottom surface at the bottom end. The polishing force of the polishing brush 11 is different for each of the three brush units 10, and in FIG. 1, the polishing force is arranged to be large to small as it goes to the left.

  The height position measuring device 24 measures the height position of the upper surface of the workpiece W (in the present embodiment, this surface is the adjustment surface). As the measurement method, either a contact type or a non-contact type can be selected. In this embodiment, the contact type is selected.

  The work fixing unit 30 includes cylinders 31A and 31B having sandwiching shafts 32A and 32B, and sandwiching portions 33A and 33B fixed to the tips of the sandwiching shafts 32A and 32B, respectively. The cylinders 31A and 31B are actuated to expand and contract the clamping shafts 32A and 32B to advance the clamping parts 33A and 33B toward the workpiece placed on the placement unit. The clamping parts 33A and 33B clamp both ends of the workpiece W. By doing so, the workpiece W is clamped. Further, if the workpiece fixing unit 30 is configured to connect a workpiece rotation mechanism (not shown) and rotate the workpiece W around the clamping shafts 32A and 32B, a plurality of workpiece surfaces of the workpiece W can be automatically polished. it can.

  The placement unit 40 includes a placement member 41 and a workpiece lifting mechanism 42 for raising and lowering the placement member 41. The placement member 41 is a member for placing the workpiece W when the workpiece W is clamped by the workpiece fixing unit 30, and the form thereof is not particularly limited as long as the workpiece W can be placed so as not to move. In the present embodiment, a V-shaped notch 41a as shown in FIG. 3 and a rectangular notch 41b are provided. With such a shape, as shown in FIG. 3 (B), the workpiece W can be placed well regardless of whether it has a quadrangular prism shape or a cylindrical shape. In addition, in the case of a quadrangular prism shape, it can be satisfactorily placed regardless of whether the processing surface (upper surface) is a flat surface or a ridge surface.

  The control means 50 performs an operation based on the measurement result of the height position of the workpiece W by the height position measuring device 24, and outputs a signal for controlling the operation of the polishing unit 20 based on the result. In addition, a signal for controlling the operations of the polishing unit 20, the workpiece fixing unit 30, and the mounting unit 40 is output to each unit based on polishing conditions input in advance. As the control means 50, various arithmetic devices such as a personal computer, motion controllers such as a programmable logic controller (PLC) and a digital signal processor (DSP), a high-function mobile terminal, a high-performance mobile phone, and the like can be used.

  The operation unit 60 is connected to the control unit 50, and an operator can input the operation of the brush polishing apparatus 01 to the control unit 50. In addition, it is possible to arrange the LCD display to check the operation status and polishing conditions of the brush polishing apparatus 01. Also, the polishing condition may be input to the control means 50 by using a touch panel display instead of the LCD display.

  The housing 70 is provided with an open / close door (not shown) on the front surface, and the internal space has a box shape forming a processing chamber for brush polishing. The polishing unit 20, the workpiece fixing unit 30, the mounting unit 40, and the control means 50 are accommodated, and the operation unit 60 is disposed on the surface.

  Next, the brush unit 10 will be described in detail with reference to FIG. The brush unit 10 has an abrasive brush 11 with a tip of a brush hair material protruding on the bottom surface (the lower surface of the bottom plate 11 e), a rotation mechanism 12 for rotating the abrasive brush 11 horizontally with respect to the work surface, and brush bristles in the abrasive brush 11 A protrusion length adjusting mechanism 13 that adjusts the protrusion length of the material, an elevating mechanism 14 that raises and lowers the polishing brush 11, the rotating mechanism 12, and the protrusion length adjusting mechanism 13, and a lower end when the polishing brush 11 is lowered are adjusted. And a descending end adjustment mechanism 15.

  The polishing brush 11 includes a plurality of (10 in the present embodiment) polishing tools 11a in which a plurality of brush bristle materials are bundled and a metal brush holder 11b is attached to the base, and the polishing tools 11a are detachably fixed. And a brush case 11d whose upper end face is closed and whose bottom end face is fixed to the bottom plate 11e. The bottom plate 11e is provided with a plurality of holes through which the polishing tool 11a can pass.

  The brush bristle material was a monofilament in which a predetermined amount of abrasive grains was contained in a synthetic resin such as polyester resin or nylon resin as a substrate. In particular, when a polyester resin is used as a base, a bristle material having a strong bristle and a high polishing power can be obtained. Therefore, it can be suitably used for polishing hard and brittle materials such as silicon blocks, ceramics and quartz. Polyester resins include polyethylene naphthalate, polyethylene terephthalate, polymethylene terephthalate, polytetramethylene terephthalate, polypropylene terephthalate, polymethylene naphthalate, polytetramethylene naphthalate, polypropylene naphthalate, and copolyesters based on these, etc. Can be selected.

  Abrasive grains can be selected in material and particle size according to the properties of the workpiece W and the desired degree of processing. For example, in the case of polishing the above-mentioned hard and brittle material, diamond particles can be suitably polished. The diamond particles are coated with nickel or a nickel-based alloy. The coating increases the binding force with the synthetic resin, so that the diamond particles are less likely to fall off from the brush bristle material during polishing. When the size of the diamond particle is too small, sufficient polishing power can not be obtained, and when it is too large, the strength of the brush bristles decreases and it becomes easy to break. As for the particle diameter of diamond, the average particle diameter may be 5 μm to 150 μm. Further, for the same reason, the content of abrasive grains is preferably 10 to 40 parts by weight with respect to 100 parts by weight of the brush bristle material.

  The cross-sectional shape of the brush bristles is not particularly limited to a circle, an ellipse, a triangle, a rectangle, another variant, or the like. In this embodiment, the cross-sectional shape is a circle. If the thickness of the brush bristles is too thin, the bristles become too weak, resulting in a problem that sufficient abrasive power can not be obtained, or they become easily broken. If it is too thick, the polishing force becomes too strong, which makes it difficult to adjust the surface roughness of the work surface. When the cross-sectional shape is circular, the diameter may be selected from 0.4 mm to 1.0 mm.

  On the lower surface of the holding plate 11c, there are provided recesses that can fix the polishing tool 11a radially at equal intervals around a circular center point. The brush holder 11b is fitted in the recess, and the polishing tool 11a is fixed to the holding board 11c with a bolt (not shown) from the side surface of the holding board 11c.

  The holding plate 11c is accommodated in the brush case 11d so as to be movable in the vertical direction. Since the bottom plate 11e is provided with a hole through which the polishing tool 11a can pass, the protrusion length of the brush bristles from the bottom surface (the lower surface of the bottom plate 11e) is adjusted by moving the holding board 11c in the vertical direction. can do.

  The rotating mechanism 12 for horizontally rotating the polishing brush 11 has a main shaft 12a whose lower end surface is fixed at the center of the top surface of the polishing brush 11, a rotational motor 12b, and a rotational force transmission for transmitting the rotational force of the rotational motor 12b to the main shaft 12a. And a mechanism 12c. The rotational force transmission mechanism 12c includes, for example, a pulley fixed to the upper end of the main shaft 12a and the rotational shaft of the rotary motor 12b, and a belt spanned between the pulleys. When the rotary motor 12b is operated, the rotation of the rotary motor 12b is transmitted to the main shaft 12a via the rotational force transmission mechanism 12c, so that the polishing brush 11 rotates around the main shaft 12a.

  The protrusion length adjustment mechanism 13 for adjusting the protrusion length of the brush bristles from the bottom surface of the polishing brush 11 generates a force to lower the sub shaft 13a whose lower end surface is fixed to the center of the upper surface of the holding disc 11c and the sub shaft 13a. And a connecting member 13c for connecting the auxiliary shaft 13a and the lowering mechanism 13b. The sub-shaft 13a is inserted in a through-hole provided through the center of the circular cross section of the main shaft 12a so as to be slidable in the vertical direction and rotated by the rotation of the main shaft 12a.

  The lowering mechanism 13b lowers the auxiliary shaft 13a, that is, the polishing tool 11a, and adjusts the protruding length of the brush bristle material. The protruding length of the brush bristle material may be adjusted by a method in which the brush bristle material is lowered toward the adjustment surface and a load generated when the brush bristle material contacts the adjustment surface is detected. As another method, even if the brush bristle material contacts the adjustment surface, the brush bristle material is lowered until a preset load is reached, but may not be lowered after reaching the preset load. In this embodiment, a case where the former method is used will be described. In this case, the lowering mechanism 13b only needs to lower the brush bristle material and detect this load. For example, a change in torque when the brush bristles contact the adjustment surface may be detected using a ball screw mechanism in which a motor (such as a servomotor) capable of detecting a change in torque is connected. As another configuration, a change in load when the brush bristle material contacts the adjustment surface may be detected using a mechanism that combines a sensor (load cell) that can detect a change in load and an electric cylinder. In this embodiment, a change in torque when the brush bristles come in contact with the adjustment surface is detected using a ball screw mechanism 13e in which the servomotor 13d is connected.

  One end side of the connecting member 13c is fixed to the lowering mechanism 13b, and the other end side is fixed so that the auxiliary shaft 13a can be moved in the vertical direction and is not driven by the rotation of the auxiliary shaft 13a.

  The lifting and lowering mechanism 14 for lifting and lowering the polishing brush 11 includes a cylinder 14a having a lifting and lowering shaft 14b, and a base 14c to which the tip of the lifting and lowering shaft 14b is fixed. A rotation motor 12b is fixed to the base 14c, and the main shaft 12a is rotatably fixed to the base 14c. Since the cylinder 14a is fixed to the fixed plate 22 of the polishing unit 20, by operating the cylinder 14a to extend and retract the elevating shaft 14b, the main shaft 12a and the sub shaft 13a move up and down following the elevating shaft 14b. That is, the polishing brush 11 can be moved up and down with respect to the fixed plate 22 by operating the cylinder 14 a.

  The cylinder 14a only needs to be able to move the polishing brush 11 up and down, and any of hydraulic pressure, pneumatic pressure, and electric power can be used. When a mechanism capable of controlling the expansion and contraction distance of the elevating shaft 14b is used as in a servo cylinder, it can be combined with a lowering end adjusting mechanism 15 described later.

  The falling end adjustment mechanism 15 has a rotational force that causes the adjustment member 15b to rotate in the vertical direction by rotating the adjustment member 15b, and the adjustment member 15b that can be screwed onto the screw member 15a. A lowering end adjustment motor 15c to be generated, an adjustment force transmission mechanism 15d for transmitting the rotational force of the lowering end adjustment motor 15c to the adjustment member 15b, and an abutment member 15e for setting the lowering end of the base 14c by the elevation mechanism 14; The base 14c is provided with an abutment plate 15f that abuts on the abutment member 15e when the base 14c is lowered.

  The screw member 15 a has a cylindrical shape and is fixed to the fixed plate 22 of the polishing unit 20. A through hole is provided at the center of the circular cross section, and the main shaft 12a is rotatably inserted.

  The adjustment member 15b has a cylindrical shape, and a screw thread corresponding to the screw thread of the screw member 15a is provided on the inner side. A gear corresponding to an adjusting force transmission mechanism 15d described later is provided on the outer peripheral surface. A ring-shaped contact plate 15f is fixed to the upper end.

  The lowering end adjustment motor 15 c is fixed to the screw member 15 a, that is, the fixed plate 22 of the polishing unit 20. Since the position of the adjusting member 15b is adjusted by the operation of the lowering end adjusting motor 15c, the lowering end adjusting motor 15c is preferably a mechanism capable of controlling the rotation angle. For example, a servo motor or a stepping motor can be used.

  The adjustment force transmission mechanism 15d includes a gear fixed to the rotation shaft of the falling end adjustment motor 15c and a gear provided on the outer periphery of the adjustment member 15b. The teeth of the two gears can mesh with each other. When the lowering end adjustment motor 15c is operated, the adjustment member 15b is rotated via the adjustment force transfer mechanism 15d, so that the adjustment member 15b can be moved in the vertical direction. After setting the adjustment member 15b to a predetermined position, when the lifting mechanism 14 is operated, the base 14c is lowered. The contact member 15e (bolt in this embodiment) is fixed to the base 14c so as to be positioned above the contact member 15f. As the base 14c descends, the contact member 15e contacts the contact plate 15f, and the lowering stops. That is, the descent end of the polishing brush 11 can be adjusted by adjusting the position of the contact plate 15f by the operation of the descent end adjustment motor 15c. By adjusting the lowering end, it is also possible to adjust the amount of pressing (cutting amount) of the brush hairs to the surface to be processed, or to polish workpieces of different sizes.

  Next, a brush polishing method by the brush polishing apparatus 01 of the present embodiment will be described. In the following description, removal of micro cracks present in the surface layer is carried out by polishing all surfaces on the long side of quadrangular prism-shaped polycrystalline silicon blocks (four ridge portions formed by four flat portions and adjacent flat portions). A method for adjusting the surface roughness of the surface will be described. In addition, the chamfered corner portion is processed to be a minute slope (C surface).

(1) Initial setting A work (master work M) having a machining target dimension is placed on the placement member 41 so that one of the plane portions is horizontally upward. Next, the cylinder 31A is actuated to advance the clamping member 33A to the reference position R, and then the cylinder 31B is actuated to advance the clamping member 33B to clamp the master work M.

  Next, the moving mechanism 23 of the polishing unit 20 is operated to move the polishing unit 20 leftward from the original position (the position shown in FIG. 1) so that the height position measuring instrument 24 is positioned directly above the master work M. Let Thereafter, the height position measuring device 24 is operated to bring the contacts of the height position measuring device 24 into contact with the upper surface (reference surface) of the master work M, and the height position is measured. The measured result is output to the control means 50 and stored. After measuring the height position, the polishing unit 20 returns to the original position.

  Thereafter, the clamping portions 33A and 33B are retracted by the operation of the cylinders 31A and 31B, respectively, and the clamping of the master work M is released. Then, the master work M is removed from the placement member 41.

  The operating unit 60 is operated to input polishing conditions to the control means 50. The polishing conditions include the number of rotations and cutting amount of the polishing brush 11, the moving speed of the polishing unit 20, the protruding length of the brush bristles, the shape of the work (the shape of the corner portion), and the like.

(2) Setting Step The work W is placed on the placement member 41 such that one of the flat portions is horizontally upward. Next, the cylinder 31A is actuated to advance the clamping member 33A to the reference position R, and then the cylinder 31B is actuated to advance the clamping member 33B to clamp the workpiece W and fix it to the workpiece fixing unit 30.

(3) Height position measuring step The moving unit 23 is operated to move the polishing unit 20 to the left so that the height position measuring device 24 and the polishing brush 11 are positioned immediately above the upper surface (adjustment surface) of the workpiece W. To. Thereafter, the height position measuring device 24 is operated to bring the contacts of the height position measuring device 24 into contact with the upper surface of the workpiece W, and the height position is measured. The measured result is output to the control means 50 and stored.

(4) Protrusion length adjustment step Based on the “height position of the adjustment surface of the workpiece W” and the “protrusion length of the brush bristle material” input in advance, the position of the bottom surface of the polishing brush 11 (the bottom surface of the bottom plate 11e) An operation for calculating the position and the like of the contact plate 15f is performed. The lower end, that is, the position of the bottom surface of the polishing brush 11 (the bottom surface of the bottom plate 11e) when the contact member 15e contacts the contact plate 15f and the lowering of the polishing brush 11 stops is higher than the adjustment surface by the protruding length. A signal for operating the descending end adjustment mechanism 15 so as to be located at (the adjustment position) is generated and output. Based on this signal, after the position of the adjustment member 15b is adjusted by the operation of the lower end adjustment motor 15c, the cylinder 14a is operated, and the polishing brush 11 is lowered to a predetermined position.

  Next, the servo motor 13d is operated to lower the polishing tool 11a. At this time, the torque applied to the servomotor is detected and input to the control means 50. When the brush bristles abut on the adjustment surface, the torque applied to the servomotor 13d increases. When the torque applied to the servomotor 13d exceeds a preset value, the control means 50 outputs a signal for stopping the operation of the servomotor 13d, and the operation of the servomotor 13d is stopped. (For example, the servo motor 13d stops operating when the torque becomes 125% or more with respect to the torque when the polishing tool 11a is lowered without contacting the adjustment surface.) In this way, the bottom surface of the polishing brush 11 The protruding length of the brush bristle material is set.

  When the length of the workpiece W is sufficiently long, the protrusion length can be adjusted at one time by moving the polishing unit 20 so that all the polishing brushes are positioned immediately above the workpiece W. If the length of the workpiece W is short, the height position of the workpiece W is measured, and then the polishing unit 20 is moved to sequentially adjust the protruding length of the brush bristles for each polishing brush. When adjusting the protrusion length of the brush bristles in one polishing unit 20 when the wear amount of the brush bristles in brush polishing is the same for all the polishing brushes, the servomotor 13 d of the brush unit 10 is adjusted. By operating the servomotors 13d of the other brush units 10 in conjunction with the operation, the projection lengths of the brush bristles of all the brush units 10 can be adjusted.

  After adjustment of the projection length of the brush bristles, the polishing unit 20 moves to the left end (processing start position).

  At that time, the workpiece elevating mechanism 42 operates to lower the mounting member 41, and the workpiece W and the mounting member 41 are separated from each other. Then, the work rotating mechanism connected to the work fixing unit 30 is operated to rotate the work 45 degrees so that the C surface (ridge corner) as the processing surface becomes the upper surface, and then the work lifting mechanism 42 is operated. Then, the mounting member 41 rises, the mounting member 41 and the workpiece W come into contact with each other, and the workpiece W is mounted on the mounting member 41 again.

(5) Brush position setting step The control means 50 calculates the height position that is the machining dimension target of the ridge corner from the “reference surface height position” and the “work shape” measured by the master work M. Furthermore, based on the “protruding length of the brush bristle material” inputted in advance, the position of the bottom surface of the polishing brush 11 that is higher than the height position by the projecting length of the brush bristle material (the brush origin in ridge corner polishing) is determined. calculate. Then, a signal for setting the lower end is output to the respective lower end adjustment motors 15c so that the bottom surface of the polishing brush 11 is positioned below the “cutting amount” inputted in advance from the brush origin in the ridge corner polishing. Based on this signal, the position of the contact plate 15f is adjusted by the operation of each lowering end adjusting motor 15c, and then the cylinder 14a is operated so that the polishing brush 11 is lowered and positioned.

(6) Polishing process The rotation motor 12b is operated based on the "rotation speed of the polishing brush" inputted in advance, and the polishing brush 11 is rotated horizontally around the main shaft 12a and is polished toward the workpiece W from a nozzle (not shown). Liquid is injected. Next, the brush unit 20 advances toward the right end (original position) based on the “moving speed of the polishing unit” input in advance. The polishing brush 11 is arranged so that the polishing force decreases in order from the right. That is, the polishing brush 11 is, in order from the right, “for rough polishing for removing microcracks existing on the surface of the processed surface”, “for intermediate polishing for removing irregularities generated by the rough polishing brush”, and “surface roughness of the processed surface”. "Finishing for polishing to adjust the degree to be small". The polishing brush 11 that rotates horizontally by the movement of the polishing unit 20 passes while contacting the workpiece in the order of "rough polishing polishing brush", "medium polishing polishing brush", and "finish polishing polishing brush". Thus, it is possible to remove microcracks existing on the surface layer of the workpiece W and adjust the surface roughness.

  When the polishing unit 20 moves to the original position, the operation of the rotary motor 12b is stopped and the rotation of the polishing brush 11 is stopped, and then the cylinder 14a is operated and the polishing brush 11 is raised. Then, after the placement of the workpiece W is released by the operation of the workpiece lifting mechanism 42, the workpiece rotation mechanism connected to the workpiece fixing unit 30 is operated so that the C surface, which is a new processing surface, becomes the upper surface. Then, the workpiece elevating mechanism 42 is actuated to place the workpiece W on the placement member 41 again. Thereafter, a new workpiece surface is polished in the same manner as described above. By repeating this operation, all four ridge corners can be polished.

  After grinding the four ridge corners, the workpiece lifting mechanism 42 is operated to release the workpiece W, and then the workpiece rotating mechanism connected to the workpiece fixing unit 30 is operated, so that the flat surface portion to be processed is formed. After rotating the workpiece 45 degrees so that one surface is the upper surface, the workpiece lifting mechanism 42 is operated to place the workpiece W on the placement member 41 again. Thereafter, the height position of the work surface is measured, and the position of the polishing brush 11 is set. Specifically, based on the “height position of the reference surface” and the “projection length of the brush bristle material”, the position of the bottom surface of the polishing brush 11 that is higher than the height position by the projection length of the brush bristle material ( The brush origin in the flat surface polishing is calculated. Then, a signal for setting the descending end is output to each descending end adjusting motor 15c so that the bottom surface of the polishing brush 11 is positioned below the “cutting amount” inputted in advance from the brush origin in the planar portion polishing. After the position of the contact plate 15f is adjusted by the operation of each lowering end adjustment motor 15c based on this signal, the cylinder 14a is operated and the polishing brush 11 is lowered. After the brush position is set, the workpiece W is mounted by the operation of the workpiece lifting mechanism 42 and the workpiece rotating mechanism so that the flat portion which is the new processing surface becomes the upper surface, as in the case of the polishing of the ridge corner described above. Polish the four flat portions by repeating the steps of placing on the placement member 41, measuring the height position of the new work surface, adjusting the position of the polishing brush 11, and polishing the new work surface. Can do. Here, polishing is performed while moving at least one of the brush unit 10 and the workpiece fixing unit 30 so as to horizontally rotate the polishing brush 11 and to horizontally move the polishing brush 11 relative to the surface to be processed.

(7) Finishing Step When the polishing of the four flat portions and the four corner portions is finished, the operation of the polishing unit 20 is stopped. In addition, the ejection of the polishing liquid is also stopped. Thereafter, the holding portions 33A and 33B are respectively retracted by the operation of the cylinders 31A and 31B, and the holding of the work W is released. Then, the work W is removed from the mounting member 41.

  In this way, a series of polishing is completed. In the case of polishing a plurality of workpieces W, the above-described steps (2) to (7) may be repeated.

(Modification example)
For example, when the shape of the ridge corner of the workpiece W such as a silicon block cut out from a single crystal silicon ingot having a cylindrical shape is a curved surface, the number of strokes (4 in this case) The curvature of the curved surface (that is, the diameter of the silicon ingot) is further input. Then, after the above step (4) is completed, the brush origin in the ridge corner polishing is calculated based on the “curvature of the curved surface” and the “projection length of the brush bristle material” inputted in advance. Then, the lowering end is set so that the bottom surface of the polishing brush 11 is positioned below the “cutting amount” inputted in advance from the brush origin in the corner polishing, and the polishing brush 11 is lowered. When polishing the ridges, the workpiece lifting mechanism 42 is operated to move the mounting member 41 away from the workpiece W, and the workpiece rotating mechanism connected to the workpiece fixing unit 30 is operated to continuously rotate the workpiece W. Let In a state where the workpiece W is continuously rotated, the brush unit 10 and the polishing unit 20 are operated as in the process (6) described above, and the four ridge corners are simultaneously polished.

  In the present embodiment, the protrusion length of the brush bristle material is adjusted with the upper surface of the work W as the adjustment surface, but a member as the adjustment surface may be separately provided. This member should just be the plane where the bristle material contacts. As it is not necessary to provide the adjustment surface with a mechanism for detecting the contact of the brush bristles with the adjustment surface as in the prior art, the protrusion length adjustment mechanism 13 does not fail due to the contact of the brush bristles.

  The polishing brush 11 may be configured to directly fix one end of the brush bristles to the holding disc 11 c. In this case, when the brush bristle material is worn, the entire holding platen 11c is replaced.

(Another embodiment)
The adjustment of the protruding length of the brush bristle material in this embodiment was performed by detecting a change in load due to the brush bristle material contacting the adjustment surface and outputting a signal for stopping the forward movement of the brush bristle material. However, in the present invention, “the forward movement of the brush bristle material is stopped when the load change due to the tip of the brush bristle material contacting the adjustment surface reaches a preset value” is not limited to this form. An example of another form will be described below. In the following description, differences from the above-described embodiment will be mainly described.

  In another embodiment, a cylinder provided with a lock function is used as the lowering mechanism 13b for lowering the sub shaft 13a. For example, in the case of an air cylinder, the thrust of the cylinder is set by adjusting the air pressure introduced into the cylinder in advance. This thrust is set so that the load when the polishing tool contacts the adjustment surface does not exceed a predetermined value (for example, the brush bristle material will not bend more than necessary, or the yield point of the brush bristle material will not be exceeded. And so on). That is, the load applied to the brush bristle material is set in advance by setting the thrust. Thereafter, the cylinder is operated to lower the polishing tool 11 a in the above-mentioned “protrusion length adjustment process”. The tip of the polishing tool 11a reaches the adjustment surface, but the cylinder does not advance beyond a preset load. Thereafter, the lock function is activated and the cylinder is fixed. The operation of the lock function may be performed by estimating in advance the time for the tip of the polishing tool 11a to reach the adjustment surface, and operating after a sufficiently long time has elapsed after the operation of the cylinder.

As described above, in the present invention, "when the change in load due to the tip of the brush bristle contacting the adjustment surface reaches a preset value, the forward movement of the brush bristle is stopped"
(1) When detecting a change in the load in real time and stopping the forward movement of the brush bristle material (2) Set the upper limit value of the load in advance, and select "the length of the brush bristle tip of the polishing brush protruding from the bottom surface. This includes any case where the brush bristle material does not advance beyond this load even if the operation of the “mechanism that automatically adjusts to a preset length” continues.

01 Brush polishing apparatus 10 Brush unit 11 Polishing brush 11a Polishing tool 11b Brush holder 11c Holding plate 11d Brush case 11e Bottom plate 12 Rotating mechanism 12a Main shaft 12b Rotating motor 12c Rotating force transmission mechanism 13 Projection length adjusting mechanism 13a Sub shaft 13b Lowering mechanism 13c Connection Member 13d Servo motor 13e Ball screw 14 Elevating mechanism 14a Cylinder 14b Elevating shaft 14c Base 15 Lowering end adjusting mechanism 15a Screw member 15b Adjusting member 15c Lowering end adjusting motor 15d Adjusting force transmission mechanism 15e Contacting member 15f Contacting plate 20 Polishing unit 21 Movement Base 22 Fixing plate 23 Moving mechanism 23a Motor 24 Height position measuring device 30 Work fixing unit 31A, 31B Cylinder 32A, 32B Holding shaft 33A, 33B Holding unit 40 Mounting unit DOO 41 mounting member 41a notch (V-shape)
41b Notch (Rectangle)
42 Work lifting mechanism 50 Control means 60 Operation unit 70 Housing 71 Rail M Master work R Reference position W Work

Claims (8)

A brush polishing apparatus in which a tip of a brush bristle material contacts and rotates with a work surface of a work piece to polish, and the brush polishing apparatus is
A polishing brush in which the tip of the brush bristle material is exposed on the bottom surface, a mechanism for horizontally rotating the polishing brush with respect to the work surface, and the tip of the brush bristle material of the polishing brush protrudes from the bottom surface of the polishing brush A brush unit comprising a mechanism for automatically adjusting the length to be set to a preset length;
A moving mechanism for moving the brush unit relative to the processing surface in the horizontal direction;
A work fixing unit for fixing the work;
Control means for calculating polishing conditions and outputting operation signals of the brush polishing apparatus to each unit;
And a height position measuring device independently installed adjacent to the brush unit and measuring a height position of an adjustment surface which is a surface on which the brush bristles can come into contact;
The bottom surface of the polishing brush is positioned at an adjustment position which is a position separated from the adjustment surface by the projection length set in advance, the brush bristle material is advanced toward the adjustment surface, and the brush bristle material When the change of the load due to the tip of the tip coming into contact with the adjustment surface becomes a preset value, the brush hair material is stopped from advancing to adjust the protrusion length of the brush hair material. ,
An upper limit value is set for the load due to the tip of the brush bristle material coming into contact with the adjustment surface, and the length of the tip of the brush bristle material of the polishing brush to project from the bottom is a preset length. A brush polishing apparatus characterized in that the brush bristle material does not advance beyond the upper limit even if the automatic adjustment mechanism continues to operate . A brush polishing apparatus in which the tip of a brush bristle material contacts and rotates on the work surface of the workpiece, and the brush polishing apparatus
A polishing brush in which the tip of the brush bristle material is exposed on the bottom surface, a mechanism for horizontally rotating the polishing brush with respect to the work surface, and the tip of the brush bristle material of the polishing brush protrudes from the bottom surface of the polishing brush A brush unit comprising a mechanism for automatically adjusting the length to be set to a preset length;
A moving mechanism for moving the brush unit relative to the processing surface in the horizontal direction;
A workpiece fixing unit for fixing the workpiece;
Control means for calculating polishing conditions and outputting an operation signal of the brush polishing apparatus to each unit;
And a height position measuring device independently installed adjacent to the brush unit and measuring a height position of an adjustment surface which is a surface on which the brush bristles can come into contact;
The bottom surface of the polishing brush is positioned at an adjustment position which is a position separated from the adjustment surface by the projection length set in advance, the brush bristle material is advanced toward the adjustment surface, and the brush bristle material When the change in load due to the tip of the contact with the adjustment surface becomes a preset value, the forward movement of the brush bristle material is stopped to adjust the protruding length of the brush bristle material. And
The brush unit includes a plurality of the brush bristle materials, a disk-shaped holding disc to which a base of the brush bristle material is fixed, and a cylindrical brush case that accommodates the holding disc movably in the bottom surface direction, A polishing brush including,
A main shaft whose one end is fixed at the center of the top surface of the brush case and a rotation mechanism having a mechanism for rotating the main shaft;
One end is fixed to the center of the holding plate, and a sub-shaft slidably inserted in a through hole provided through the center of the circular cross section of the main shaft and a lowering mechanism for moving the sub-axis in the longitudinal direction are provided. A protrusion length adjusting mechanism,
The rotation of the polishing brush with the main axis as the main axis by the rotation of the main axis and the adjustment of the protruding length of the brush bristle material by the movement of the sub-axis are performed.
The lowering mechanism includes at least one of a motor that can detect a change in torque when the brush bristle material moves, or a sensor that can detect a change in load applied to the sub shaft when the brush bristle material moves. A brush polishing apparatus comprising: The height position measuring device detects the height position of the adjustment surface, which is a surface facing the tip of the brush bristle material, and outputs the height position to the control means.
The said control means calculates the said adjustment position based on the said height position, The brush grinding apparatus of Claim 1 or 2 characterized by the above-mentioned. The brush unit includes a plurality of the brush bristle materials, a disk-shaped holding disc to which a base of the brush bristle material is fixed, and a cylindrical brush case that accommodates the holding disc movably in the bottom surface direction, A polishing brush including,
A rotation mechanism comprising a main shaft fixed at one end to the center of the top surface of the brush case and a mechanism for rotating the main shaft;
One end is fixed to the center of the holding plate, and a sub-shaft slidably inserted in a through hole provided through the center of the circular cross section of the main shaft and a lowering mechanism for moving the sub-axis in the longitudinal direction are provided. A protrusion length adjusting mechanism,
The polishing brush is rotated around the main shaft by the rotation of the main shaft, and the protruding length of the brush bristle material is adjusted by the movement of the auxiliary shaft. The brush grinding device according to claim 1 . 5. The brush polishing apparatus according to claim 4 , wherein the lowering mechanism includes a motor capable of detecting a change in torque when the brush bristle material moves. 5. The brush polishing apparatus according to claim 4 , wherein the lowering mechanism includes a sensor capable of detecting a change in a load applied to the auxiliary shaft when the brush bristle material moves. A polishing method using the brush polishing apparatus according to claim 1 or 2 , wherein the polishing method is:
Fixing the work to the work fixing unit;
A step of automatically adjusting the length of the brush bristle protruding from the bottom surface of the polishing brush to a preset length by the brush bristle;
A step of setting the position of the polishing brush by advancing the polishing brush in the direction of the processing surface so that the tip of the polishing brush is pressed in the direction of the processing surface by the length of a preset cutting amount;
Performing polishing while moving at least one of the brush unit and the workpiece fixing unit so that the polishing brush is rotated horizontally and the polishing brush is moved horizontally relative to the surface to be processed. Prepared,
The step of adjusting the protruding length includes the step of moving the polishing brush so that the bottom surface of the polishing brush is located at the adjustment position, the step of moving the brush bristle toward the adjustment surface, And a step of stopping the forward movement of the brush bristle material when a change in load caused by the contact of the brush bristle material with the adjustment surface reaches a preset value. A polishing method using the brush polishing apparatus according to claim 3 , wherein the polishing method is:
Fixing the work to the work fixing unit;
Measuring the height position of the adjustment surface with the height position measuring device;
A step of automatically adjusting the length of the brush bristle that protrudes from the bottom surface to the tip of the brush bristle of the polishing brush;
Based on the measurement result of the height position, the polishing brush is advanced so that the tip of the polishing brush is pressed in the direction of the work surface that is the adjustment surface by the length of a preset cut amount. Setting the position;
Performing polishing while moving at least one of the brush unit and the workpiece fixing unit so that the polishing brush is rotated horizontally and the polishing brush is moved horizontally relative to the surface to be processed. Prepared,
The step of adjusting the projecting length includes a step of inputting a preset projecting length and a height position of the adjustment surface measured in the step of measuring the height position to the control unit, respectively. A step of calculating a distance for moving the polishing brush forward and backward from the input protrusion length and height position, a step of moving the polishing brush based on a result of the calculation, and the brush bristle material being adjusted. A step of moving forward toward the surface, and a step of stopping the forward movement of the brush bristle material when a change in load due to the brush bristle material contacting the adjustment surface reaches a preset value. A method of polishing a characterized brush.

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