JP6517910B2 - Touch sensor built-in organic EL device - Google Patents

Description

  The present invention relates to a touch sensor built-in organic EL device.

  In Patent Document 1, a substrate, a display unit formed on the substrate, a sealing substrate having a surface facing the substrate, and a sealing substrate having any one surface, the first direction The capacitance type of the present invention is provided with a plurality of first sensors formed side by side along the same, and a plurality of second sensors formed side by side along the second direction crossing the first direction. And a touch unit, and an insulating layer formed on at least a part of the first sensor and the second sensor, wherein the first sensor and the second sensor are on the same surface on the sealing substrate. The plurality of first sensors and the plurality of second sensors include ITO, are formed on the surface of the sealing substrate, and sense a touch to generate an electrical signal, Touch unit An electrical signal generated by each of the plurality of first sensors and the plurality of second sensors is output through the data line, and the display unit is combined with the thin film transistor formed on the substrate and the thin film transistor An organic light emitting element, and the organic light emitting element includes a counter electrode, a pixel electrode, and an intermediate layer formed between the counter electrode and the pixel electrode, and the pixel electrode is in contact with the thin film transistor And the intermediate layer is in contact with at least a portion of the pixel electrode, the counter electrode is in contact with at least a portion of the intermediate layer, and the touch unit is directly on one surface of the sealing substrate. And an organic light emitting display device, wherein the display unit is directly formed on one surface of the substrate.

  Further, in Patent Document 2, an element substrate having a light emitting layer sandwiched between a pair of electrodes, a sealing substrate for sealing the element substrate, and a first detection provided on the inner surface side of the sealing substrate An electrode, a second detection electrode provided on the outer surface side of the sealing substrate and having a detection axis different from the first detection electrode, a dielectric film laminated on the second detection electrode, and the dielectric And a detection means for detecting the formation position of the capacitance formed between the first and second detection electrodes via a film. .

JP 2012-156140 A JP, 2008-216543, A

  As a method of providing an input function on the display screen of the organic EL device, for example, a touch panel (touch sensor) as described in Patent Document 1 and Patent Document 2 is added on the surface of the display screen. A method of operating with a finger, a pen or the like is realized.

  However, as described in Patent Document 1 and Patent Document 2, a touch sensor having a touch panel bonded as a separate member on the surface of a display screen, or a touch sensor having a touch sensor function on part of the opposite substrate of the display device The thickness of the display itself becomes large, and it is difficult for the display device equipped with the display to meet the recent demand for thinner electronic devices.

  Based on the above problems, the inventors bond the touch panel as a separate member on the surface of the display screen, or compare with a display device with a touch sensor having a touch sensor function on a part of the opposite substrate of the display device. We carefully studied about providing a thin touch sensor built-in organic EL device.

  An object of the present invention is to attach a touch panel as a separate member on the surface of a display screen, or to make a touch thinner compared to a display device with a touch sensor having a touch sensor function on part of the opposite substrate of the display device. An object of the present invention is to provide a sensor-incorporated organic EL device.

  Further, the above and other objects and novel features of the present invention will be made clear by the description of the present specification and the accompanying drawings.

  The organic EL device with a touch sensor according to the present invention for solving the above problems emits light by a first substrate having an insulating surface, a circuit formed on the insulating surface and including a thin film transistor, and a circuit including the thin film transistor A plurality of pixels each having an organic EL element to be controlled, a first insulating layer covering the organic EL element, the first insulating layer including a first inorganic layer made of at least an inorganic material, and the first insulating layer Provided on the first detection electrode layer provided on the first insulating layer and the first detection electrode layer, covering an upper surface and a side surface of the first detection electrode layer, and comprising at least an inorganic material A second insulating layer including a second inorganic layer, and a second detection electrode layer provided on the second insulating layer.

  Further, the organic EL device with a touch sensor according to the present invention for solving the above problems comprises: a first substrate having an insulating surface; a circuit formed on the insulating surface and including a thin film transistor; and a circuit including the thin film transistor A plurality of pixels each having an organic EL element whose light emission is controlled, and a first sealing layer covering the organic EL element, the first sealing layer including a first inorganic layer made of at least an inorganic material, and the first sealing layer A first detection electrode layer provided on the sealing layer, and provided on the first sealing layer and the first detection electrode layer to cover the upper surface and the side surface of the first detection electrode layer; A second sealing layer including at least a second inorganic layer made of an inorganic material, and a second detection electrode layer provided on the second sealing layer are characterized.

  According to the present invention, a touch panel is incorporated as a separate member on the surface of a display screen, or a thin touch sensor is built in as compared to a display device with a touch sensor having a touch sensor function on a part of the opposite substrate of the display device. An organic EL device is provided.

FIG. 1 is an exploded perspective view of a touch sensor incorporated organic electroluminescent device according to a first embodiment of the present invention. It is a figure which expands and shows A part of FIG. 1, and is a perspective view which shows typically arrangement | positioning of the detection electrode contained in the touch sensor built-in organic electroluminescent apparatus which concerns on 1st embodiment of this invention. It is a top view which shows typically arrangement | positioning of the detection electrode contained in the touch sensor built-in organic electroluminescent apparatus which concerns on 1st embodiment of this invention. It is a figure showing the sectional view of the touch sensor built-in organic electroluminescence device concerning a first embodiment of the present invention. It is a figure which shows sectional drawing of the touch sensor incorporated organic electroluminescent apparatus which concerns on 2nd embodiment of this invention. It is the schematic which shows the cross section in the V-V line vicinity of FIG. It is sectional drawing which shows another example of the connection terminal part vicinity in the organic electroluminescent apparatus 10 with a touch sensor which concerns on this invention. It is a top view which shows typically arrangement | positioning of the detection electrode contained in the touch sensor built-in organic electroluminescent apparatus 10 which concerns on other embodiment of this invention. It is the schematic which shows the cross section in the VI-VI line vicinity of FIG. 6A.

First Embodiment
The organic EL device with a touch sensor according to the present invention comprises a first substrate on which pixels having thin film transistors are arranged in a matrix on an insulating substrate, and a second substrate disposed opposite to the first substrate. And an organic EL element layer disposed on the first substrate, between the first substrate and the second substrate, of which light emission is controlled by a circuit including the thin film transistor, and the organic EL element layer A first sealing film disposed on the side facing the second substrate of the element layer and covering the organic EL element layer, and one side of the first sealing film facing the second substrate A plurality of first detection electrodes extending in one direction and juxtaposed in a region of the first part, and the first detection electrodes on the side of the first sealing film facing the second substrate; Another area outside the area of the first part, and A second sealing film disposed to cover the second substrate facing the second substrate, and a partial region of the second sealing film facing the second substrate, A plurality of juxtaposed second detection electrodes extending in a direction different from the one direction, and a potential of either one of the first electrode and the second electrode are controlled, and the other generated electric And a touch sensor control unit that detects a touch on the display surface by detecting a change.

  Hereinafter, an embodiment of the touch sensor incorporated organic electroluminescent device 10 of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view of a touch sensor incorporated organic electroluminescent device 10 according to a first embodiment of the present invention.

  As shown in FIG. 1, a touch sensor incorporated organic electroluminescent device 10 according to an embodiment of the present invention includes a first substrate 100 and a second substrate 600. The touch sensor built-in organic electroluminescent device 10 according to the embodiment of the present invention displays an image on the display surface 30 and detects the position on the display surface 30 where the finger touches. It is built-in.

  Although illustration is abbreviate | omitted in FIG. 1, the 1st board | substrate 100 contained in the touch sensor built-in organic electroluminescent apparatus 10 which concerns on one Embodiment of this invention has the pixel which has a thin-film transistor on an insulating substrate in matrix form. It has a arranged structure. Here, the insulating substrate may be made of, for example, glass, plastic (polycarbonate, polyethylene terephthalate, polyimide, polyacrylate or the like) or the like.

  The first substrate 100 included in the touch sensor incorporated organic electroluminescent device 10 according to an embodiment of the present invention may be made of, for example, a light transmitting material. Here, the light transmitting material may be glass, plastic (polycarbonate, polyethylene terephthalate, polyimide, polyacrylate or the like) or the like as the insulating substrate constituting the first substrate 100, and The wirings, electrodes, and the like constituting the substrate 100 may be ITO, IZO, or the like. In addition, the light transmitting material is not limited to those exemplified above.

  The first substrate 100 on which a circuit using thin film transistors is arranged is also referred to as a TFT (Thin Film Transistor) substrate. Here, the thin film transistor includes a semiconductor film such as polysilicon, a gate insulating film covering the semiconductor film, a gate electrode disposed above the semiconductor film via the gate insulating film, and a semiconductor film penetrating the gate insulating film. And the source electrode and the drain electrode electrically connected to each other. Further, as shown in FIG. 1, a driving circuit 20 for driving a circuit using thin film transistors disposed on the first substrate 100 may be disposed on the first substrate 100. .

  Further, the second substrate 600 included in the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention is emitted from an organic EL element (see FIG. 2, 4A) disposed on the first substrate. The color filter substrate may have a color filter that transmits light having a predetermined wavelength range among the light. The second substrate 600, which is a color filter substrate, will be described in detail later.

  FIG. 2 is an enlarged view of a portion A of FIG. 1, and is a perspective view schematically showing the arrangement of detection electrodes included in the touch sensor incorporated organic electroluminescent device 10 according to the embodiment of the present invention. .

  As shown in FIG. 2, the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention includes a first substrate 100 including a circuit using a thin film transistor, an organic EL element layer 200, and a first seal. It has a laminated structure in which a stopper film 300, a first detection electrode 410 extending in the X direction, a second sealing film 500, and a second detection electrode 420 extending in the Y direction are laminated in this order. Although a part of the first detection electrode 410 and the second detection electrode 420 is described in the drawing, a plurality of the detection electrodes 410 and a part of the second detection electrode 420 are arranged side by side over the entire display surface 30.

  Further, as shown in FIG. 2, the first detection electrode 410 is disposed in a part of the region of the first sealing film 300 opposite to the side in contact with the organic EL element layer 200. There is. In addition, the first detection electrode 410 and the other portion of the first sealing film 300 on which the first detecting electrode 410 is not disposed on the first sealing film 300 are the second sealing film 500. Covered by The second detection electrode 420 is disposed in a partial region of the surface of the second sealing film 500.

  The first detection electrode 410 extending in the X direction in FIG. 2 and the second detection electrode 420 extending in the Y direction constitute a capacitance projection touch sensor 400. Here, the electrostatic capacity projection type touch sensor will be described below.

  Two types of capacitive touch panels are known: capacitive surface type and capacitive projection type. Both of the electrostatic capacitance surface type and the electrostatic capacitance projection type detect changes in electrostatic capacitance between the fingertip and the detection electrode to detect the position where the fingertip contacts. Here, the electrostatic capacitance surface type touch sensor detects the electrostatic capacitance with the configuration of the solid electrode film and the small number of detection terminals of the electrode terminals at the four corners, whereas the electrostatic capacitance projection type touch sensor In order to enhance the detection sensitivity, a multipoint detection method is adopted, and therefore, a plurality of first detection electrodes 410 extending in the X direction and a plurality of second detection electrodes 420 extending in the Y direction are three-dimensionally It employs a complex configuration that crosses.

  Here, the arrangement relationship between the first detection electrode 410 and the second detection electrode 420 will be described in more detail. FIG. 3 is a plan view schematically showing the arrangement of detection electrodes included in the touch sensor incorporated organic electroluminescent device 10 according to the embodiment of the present invention.

  As shown in FIG. 3, the first detection electrode 410 and the second detection electrode 420 have a shape in which rectangular (stripe) type or diamond (diamond) type are arranged side by side, respectively, so that X direction and Y direction are obtained. It may be an electrode extending in a direction. It has a complicated shape compared to a solid electrode and the like adopted in the electrostatic capacitance surface type, but adopting a detection electrode having a shape in which such rectangular (stripe) type or diamond (diamond) type is continuously arranged This is preferable because the detection sensitivity of the touch sensor 400 can be improved.

  In addition, the first detection electrode 410 and the second detection electrode 420 have one main body 411 and 421 having a rectangular (stripe) or diamond shape, and the one main body 411 and 421, respectively. It may be configured to include the connection portions 412 and 422 connecting the other main body portions formed adjacent to each other.

  Further, as shown in FIG. 3, the wiring drawn out from the first detection electrode 410 and the second detection electrode 420 is flexible and connected to the connection terminal 450 formed on the first substrate 100. It is connected to an external touch sensor control unit 50 via a printed circuit board (FPC) 800A.

  In addition, a connection terminal 250 for driving the organic EL element layer 200 is provided on one side on the first substrate 100 in the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention. Is connected to an external organic EL element control unit (not shown) via a flexible printed circuit board (FPC) 800B connected to

  In the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention, the connection terminals 450 and 250 connected to the touch sensor control unit 50 and the organic EL element control unit in this manner are on the same plane. It can be provided on the first substrate 100. Although described later, the connection terminal 250 for driving the organic EL element layer 200 may be provided together with the connection terminal 450 for touch sensor control provided on the first substrate 100. Further, the connection method of the connection terminal portion will be described in more detail later.

  Next, the organic EL element layer 200 and the like will be described in detail. FIG. 4A is a cross-sectional view of a touch sensor incorporated organic electroluminescent device 10 according to an embodiment of the present invention.

  As shown in FIG. 4A, the first substrate 100 includes an anode 210, a cathode 230, and a light emitting layer 220 sandwiched between the anode 210 and the cathode 230. The organic EL element layer 200 is provided.

  In addition, a sealing film for protecting the organic EL element layer 200 is formed on the organic EL element layer 200, and a touch sensor 400 is provided on the sealing films 300 and 500. That is, on the first substrate 100, the organic EL element layer 200 and the touch sensor 400 are provided.

  Hereinafter, the organic EL element layer 200 included in the touch sensor incorporated organic electroluminescent device 10 according to an embodiment of the present invention will be described in detail. The organic EL element layer 200 included in the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention comprises an anode 210, a cathode 230, and a light emitting layer sandwiched between the anode 210 and the cathode 230. 220 and is provided on the first substrate 100 described above.

  Here, the anode 210 and the cathode 230 in the present embodiment may be formed of a conductive film made of a transparent metal such as ITO or IZO. A current is supplied to the anode 210 included in the organic EL element layer 200 through the thin film transistor provided on the first substrate 100. Then, the current supplied to the anode 210 flows into the cathode 230 through the light emitting layer 220. The light emitting layer 220 sandwiched between the anode 210 and the cathode 230 emits light by recombination of electrons from the cathode 230 and holes from the anode 210. Then, the emitted light is emitted to the outside.

  Further, the cathode 230 in the present embodiment is formed of a solid electrode formed over substantially the entire surface of the display surface 30 of the touch sensor incorporated organic electroluminescent device 10. In addition, since the solid electrode is formed on one surface of a predetermined region (in the present embodiment, the display surface 30 of the touch sensor incorporated organic electroluminescent device 10), some steps are broken in the uneven state of the surface. Also, the function of the electrode is not completely impaired.

  A first sealing film 300 is provided on the opposite side of the organic EL element layer 200 to the side facing the first substrate 100. That is, the first sealing film 300 is provided on the side of the cathode 230 located on the uppermost surface of the organic EL element layer 200 facing the second substrate 600.

  Further, as shown in FIG. 4A, a bank 240 is formed at the end of the anode 210 included in the organic EL element layer 200 so as to cover the end. The bank 240 serves to define a light emitting area by covering the end of the anode 210 separated by each pixel. Therefore, the bank 240 is provided at a position corresponding to the black matrix 610 provided on the color filter substrate (second substrate 600) which is the second substrate 600 as also shown in FIG. 4A.

  Further, the bank 240 prevents a short circuit between the anode 210 and the cathode 230 due to the disconnection of the light emitting layer 220 of the organic EL element layer 200 by covering the step at the end of the anode 210 formed on the first substrate 100. It also plays a role. Therefore, the bank 240 is formed to have a smooth curved surface, as shown in FIG. 4A.

  For this reason, in the cathode 230 which is a solid electrode formed on the uppermost surface of the organic EL element layer 200 in FIG. 4A, the unevenness is gently formed so as to follow the shape of the bank 240. Then, the surface of the first sealing film 300 provided on the opposite side to the side facing the first substrate 100 of the organic EL element layer 200 is also a solid electrode formed on the uppermost surface of the organic EL element layer 200 Asperities are formed to follow the surface shape of the cathode 230.

  Here, the first sealing film 300 is provided to protect the organic EL element layer 200 from moisture, oxygen and the like from the outside. Therefore, the material forming the first sealing film 300 is selected in consideration of water permeability and air permeability.

  In the present embodiment, the first sealing film 300 is configured of a first inorganic layer formed of an inorganic material. The first inorganic layer is selected from compounds selected from the group consisting of SiN, SiO2, P2O5.SiO2 (PSG), Al2O3, PbO.SiO2, Si3N4, SiON, and PbO.B2O3. It may be formed. In particular, the first sealing film 300 is preferably made of SiN. Further, the first sealing film 300 may be formed, for example, by CVD. In addition, the material of the 1st sealing film 300 and the formation method are not restricted to said thing.

  The thickness of the first sealing film 300 may be 0.5 μm to 5 μm. When the thickness of the first sealing film 300 is 0.5 μm to 5 μm, the protective effect on the organic EL element layer 200 is enhanced, which is preferable.

  Since the first detection electrode 410 formed on the first sealing film 300 constitutes the electrostatic capacity projection type touch sensor 400, as described above, for example, a rectangular (stripe) type or a diamond shape is used. It has a complicated shape such as a shape in which (diamond) molds are arranged side by side. For this reason, unlike the solid electrode, if the first detection electrode 410 is cut off, the electrode may be in the open state, and the function of the touch sensor 400 may be completely impaired. Therefore, the surface of the first sealing film 300 on which the first detection electrode 410 is formed is required to be flatter so that disconnection of the first detection electrode 410 does not occur. It becomes.

  Further, in particular, as the organic electroluminescence display unit provided in the touch sensor incorporated organic electroluminescent device 10 has a higher definition, the location where the bank 240 is formed is increased, so that the unevenness is more easily formed. Become.

  The second sealing film 500 is also provided to protect the organic EL element layer 200 from moisture, oxygen and the like from the outside, similarly to the first sealing film 300. Therefore, the material forming the second sealing film 500 is selected in consideration of water permeability and air permeability.

  The second sealing film 500 of the present embodiment is configured of a second inorganic layer formed of an inorganic material. The second inorganic layer is selected from compounds selected from the group consisting of SiN, SiO2, P2O5.SiO2 (PSG), Al2O3, PbO.SiO2, Si3N4, SiON, and PbO.B2O3. It may be formed. Although the second sealing film 500 is an organic material, it may be formed of, for example, a polyimide resin and / or a derivative thereof. In particular, the first sealing film 300 is preferably made of SiN. In addition, the second sealing film 500 may be formed, for example, by CVD. In addition, the material of the 2nd sealing film 500 and the formation method are not restricted to said thing.

  The thickness of the second sealing film 500 may be 0.5 μm to 5 μm. When the thickness of the second sealing film 500 is 0.5 μm to 5 μm, the protective effect on the organic EL element layer 200 is preferably enhanced.

  The second detection electrode 420 formed on the second sealing film 500 has, for example, a shape in which rectangular (stripe) type or diamond (diamond) type are arranged side by side (continuously) as described above. It has a complicated shape. Therefore, it is preferable that the surface of the second sealing film 500 on which the second detection electrode 420 is formed be flat. This is because it is conceivable that the second detection electrode 420 causes disconnection due to the unevenness of the surface of the second sealing film 500.

  In addition, the thickness of each of the first detection electrode 410 and the second detection electrode 420 may be 10 μm to 100 μm. The thickness of the first detection electrode 410 and the second detection electrode 420 is preferably 10 μm to 100 μm to reduce sheet resistance.

  Further, the first detection electrode 410 and the second detection electrode 420 included in the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention are either the mask sputtering method or the printing method, respectively. It may be formed by a method.

  The organic EL device 10 with a built-in touch sensor according to the present invention incorporates a capacitive touch panel to enhance detection sensitivity, but to realize the touch panel, as shown in FIG. It is necessary to pattern complicated shapes. Further, in the organic EL device 10 with a touch sensor according to the present invention, the organic EL element layer 200 and the touch sensor 400 are physically close to each other as shown in FIG. 4A because of a demand for thinning. It will be. In view of these points, the organic EL element layer 200 does not like moisture and oxygen, and therefore, it is preferable to use a method that does not use moisture or oxygen as much as possible even in forming the touch sensor 400.

  For example, since the method of forming the detection electrode using etching uses a large amount of water for cleaning the etching solution, the first detection electrode 410 and the first detection electrode 410 of the touch sensor incorporated organic electroluminescent device 10 according to the present invention The formation of the second detection electrode 420 is not preferable. Therefore, the first detection electrode 410 and the second detection electrode 420 included in the touch sensor built-in organic electroluminescent device 10 according to one embodiment of the present invention are either the mask sputtering method or the printing method, respectively. Preferably it is formed by a method. Here, the printing method is, for example, an inkjet method, a letterpress printing method, or the like.

  When the first detection electrode 410 and / or the second detection electrode 420 are formed by mask sputtering, if there is no space between the mask and the substrate, the influence of scratches and foreign matter can be considered. Preferably, the first detection electrode 410 and / or the second detection electrode 420 are formed with a predetermined gap therebetween. As described above, when the first detection electrode 410 and / or the second detection electrode 420 are formed with a predetermined gap between the disk and the substrate, the first detection electrode 410 and / or the second detection electrode The end of 420 will have a tapered shape. Therefore, the end of the first detection electrode 410 and / or the second detection electrode 420 may have a tapered shape.

  In addition, the first detection electrode 410 and the second detection electrode 420 may be formed of a transparent metal such as ITO or IZO, or a metal mesh, silver nanofibers, carbon nanofibers, graphene or the like. Good.

  The color filter substrate, which is the second substrate 600 in the present embodiment, has a structure in which three regions (620R, 620G, and 620B) partitioned by RGB are formed on a transparent substrate 630 such as glass or resin. You may do it. In addition, a filling layer 700 made of, for example, an organic resin may be provided between the second substrate 600 and the second detection electrode 420.

  The organic EL device with a touch sensor according to the first embodiment described above substantially comprises the first and second touch sensors, as compared to an organic EL device without a touch sensor. It is realizable only by the increase in the film thickness of the sealing film structure containing the detection electrode, and satisfy | fills the request | requirement of thickness reduction.

  Further, the connection method of the connection terminal portion will be described in detail below. FIG. 5A is a schematic view showing a cross section in the vicinity of the VV line of FIG. 3. As shown in FIG. 5A, the connection terminal 450 of the touch sensor 400 and the connection terminal 250 of the organic EL element layer 200 provided in the touch sensor incorporated organic electroluminescent device 10 are on the same substrate (first substrate 200 On the upper side).

  As shown in FIG. 5A, the first sealing film 300 and the second sealing film 500 are removed stepwise at the end. Thus, one end of the first detection electrode 410 and one end of the second detection electrode 420 are exposed as the connection terminal 450 of the touch sensor 400, that is, the connection terminal 450 of the touch sensor 400 is One end of the first detection electrode 410 and one end of the second detection electrode 420 are provided.

  The flexible printed circuit (FPC) 800A connected to the connection terminal 450 of the touch sensor 400 is connected to one end of the first detection electrode 410 and one end of the second detection electrode 420. The connection terminal 250 of the organic EL element layer 200 is connected to another flexible printed circuit (FPC) 800B different from the flexible printed circuit (FPC) 800A connected to the connection terminal 450 of the touch sensor 400. .

  FIG. 5B is a cross-sectional view showing another example near the connection terminal portion in the touch sensor incorporated organic electroluminescent device 10 according to the present invention. As shown in FIG. 5B, the connection terminal 450 of the touch sensor 400 and the connection terminal 250 of the organic EL element layer 200 are connected by a common flexible printed circuit (FPC) 800.

  Thus, the connection process is simplified and the number of members is reduced by connecting the connection terminal 450 of the touch sensor 400 and the connection terminal 250 of the organic EL element layer 200 with one flexible printed circuit board (FPC) 800. Etc., and a reduction in manufacturing cost is realized.

  Moreover, FIG. 6A is a top view which shows typically arrangement | positioning of the detection electrode contained in the touch sensor incorporated organic electroluminescent apparatus 10 which concerns on other embodiment of this invention. 6B is a schematic view showing a cross section in the vicinity of the VI-VI line of FIG. 6A. It is sectional drawing which shows another example of the connection terminal part vicinity in the organic electroluminescent apparatus 10 with a touch sensor which concerns on this invention.

  As shown in FIG. 6B, the first detection electrode 410 and the second detection electrode 420 that make up the touch sensor 400 are formed on the first substrate 100 via the contact holes 460 formed at the ends thereof. Are electrically connected to lead wires connected to the connection terminals 450 provided on the

  By adopting such a structure, the connection terminal 450 of the touch sensor 400 and the connection terminal 250 of the organic EL element layer 200 are formed on the same plane in the first substrate 200. The electrical connection with the external circuit becomes easier.

  In addition, the touch sensor built-in organic electroluminescent device connected through the contact hole 460 described above has the effect of satisfying the demand for thinning and facilitating the electrical connection with the external circuit. It will be.

Second Embodiment
In the following, even if the organic electroluminescence display unit equipped with the touch sensor with a built-in organic electroluminescence display unit 10 adopts a higher definition, it is possible to realize thinning and to constitute a touch sensor. An embodiment for suppressing disconnection will be described.

  In the touch sensor incorporated organic electroluminescent device 10 according to the second embodiment of the present invention, in the touch sensor incorporated organic electroluminescent device 10 according to the first embodiment, the first sealing film 300 is the first inorganic layer. It differs in that it is composed of 300 and the first planarization layer 310.

  FIG. 4B is a view showing a cross-sectional view of the touch sensor incorporated organic electroluminescent device 10 according to the second embodiment of the present invention. As shown in FIG. 4B, the first sealing film 300 of the touch sensor incorporated organic electroluminescent device 10 according to the second embodiment is formed on the second substrate side of the first inorganic layer 300, and the surface thereof The first planarizing layer 310 planarizes the surface asperities.

  Here, the first planarization layer 310 is formed of an organic material. The first planarizing layer 310 planarizes irregularities on the surface of the first sealing film 300 on the side on which the first detection electrode 410 is provided, and influences the capacitance formed with the cathode 230. In order to be prepared for the purpose of reducing the film thickness, the film thickness may be selected appropriately. Then, by applying the varnish of the organic resin (liquid material in which the organic resin is dissolved in the solvent) to the uneven surface, the varnish preferentially flows into the concave portion, and the unevenness of the surface of the first sealing film 300 is effective. Will be flattened.

  Also, the first planarization layer 310 may be formed of, for example, an organic resin. The organic resin applied to the first planarizing layer 310 may be selected from, for example, the group consisting of acrylic, polyimide, epoxy, and optical adhesive (OCA). Other than the method of applying the organic material, the organic material may be formed by a low temperature vapor deposition method, a resin sheet bonding method, or the like. Alternatively, the first sealing film 300 and the second sealing film 500 may be in contact with each other at the outermost portion. This can effectively prevent the entry of moisture from the outside.

  Also, the first planarization layer may have a thickness of 1 to 100 μm. When the first planarizing layer is 10 μm or more, in addition to the effect of suppressing disconnection of the touch sensor being enhanced, the influence of the capacitance between the cathode and the touch sensor can be reduced, which is preferable. Further, the upper limit of the thickness of the first planarization layer is not particularly defined, but as the thickness of the first planarization layer is larger, the thickness reduction is disadvantageous, so for example, 80 μm or less Or less than 80 .mu.m.

  In addition, the material of the 1st planarization layer 310 and the formation method are not restricted to said thing.

  The organic EL device with a touch sensor according to the second embodiment described above substantially comprises the first and second touch sensors, as compared with the organic EL device without the touch sensor. This can be realized only by increasing the thickness of the detection electrode and the thickness of the first planarization layer, and satisfies the demand for thinning. In addition, it also has the effect of suppressing disconnection of the touch sensor, and has the effect of enhancing the reliability of the device.

  Also in the touch sensor built-in organic electroluminescent device according to the second embodiment described above, the connection structure of the connection terminal described in the touch sensor built-in organic electroluminescent device according to the first embodiment is adopted. It may be

  Further, the second sealing film 500 is a second planarizing layer for planarizing the surface asperities of the region where at least the second detection electrode 420 is disposed on the side facing the second substrate 600 (see FIG. (Not shown) may be included.

  Further, in the case where the second sealing film 500 includes the second planarization layer, the second planarization layer may be formed of, for example, an organic resin. Since the second planarizing layer is provided for the purpose of planarizing the surface unevenness, it is necessary to select a material in consideration of water permeability and air permeability which is a function of the second sealing film 500. Absent. Further, by applying varnish of an organic resin (liquid substance in which organic resin is dissolved in a solvent) on the uneven surface, the varnish preferentially flows into the concave portion, and as a result, the surface of the second sealing film 500 effectively. Can be flattened, which is preferable.

  In addition, the material of the 2nd planarization layer 510 and the formation method are not restricted to said thing.

  The second planarization layer may have a thickness of 1 to 100 μm. When the second planarizing layer is 10 μm or more, the effect of suppressing disconnection of the touch sensor is increased, which is preferable. Further, the upper limit of the thickness of the second planarization layer is not particularly defined, but the larger the thickness of the second planarization layer, the more disadvantageous the reduction in thickness, for example, 80 μm or less Or less than 80 .mu.m.

  DESCRIPTION OF SYMBOLS 10 Touch sensor incorporated organic electroluminescent apparatus, 30 display surface, 50 touch sensor control part, 100 1st board | substrate, 200 organic EL element layer, 250 connection terminal, 210 anode, 220 light emitting layer, 230 cathode, 240 bank, 300 1st First sealing film, 310 first planarization layer, 400 touch sensor, 410 first detection electrode, 420 second detection electrode, 450 connection terminal, 460 contact hole, 500 second sealing film, 600 second Second board, 610 black matrix, 800 flexible printed circuit board (FPC).

Claims (14)

A first substrate having an insulating surface;
A plurality of pixels each formed on the insulating surface and having a circuit including a thin film transistor and an organic EL element whose light emission is controlled by the circuit including the thin film transistor;
A first insulating layer including at least a first inorganic layer made of an inorganic material covering the organic EL element;
A first detection electrode layer provided on the first insulating layer;
A second insulating layer provided on the first insulating layer and the first detection electrode layer, covering a top surface and a side surface of the first detection electrode layer, and including at least a second inorganic layer made of an inorganic material When,
And a second detection electrode layer provided on the second insulating layer,
At least one of the first detection electrode layer and the second detection electrode layer is a lead wire provided in the lower layer of the first insulating layer through a contact hole provided in the first insulating layer. touch sensor incorporated organic EL device according to claim Rukoto are electrically connected.   A first detection electrode extending in one direction and a plurality of juxtaposed detection electrodes by the first detection electrode layer and the second detection electrode layer, and a plurality of the first detection electrodes extending in a direction different from the one direction The organic EL device with a built-in touch sensor according to claim 1, wherein two detection electrodes are configured.   The organic sensor with a built-in touch sensor according to claim 2, wherein the first detection electrode and the second detection electrode respectively have a rectangular (stripe) type or a diamond (diamond) type continuous shape. EL device. The lead wirings is characterized by intersecting at an end and a plan view of the first insulating layer and the second insulating layer, a touch sensor incorporated organic EL device according to claim 1.   The touch sensor incorporated organic EL device according to any one of claims 1 to 4, wherein the first insulating layer further includes an organic layer on the first inorganic layer. A first substrate having an insulating surface;
A plurality of pixels each formed on the insulating surface and having a circuit including a thin film transistor and an organic EL element whose light emission is controlled by the circuit including the thin film transistor;
A first sealing layer including at least a first inorganic layer made of an inorganic material covering the organic EL element;
A first detection electrode layer provided on the first sealing layer;
A second seal provided on the first sealing layer and the first detection electrode layer, covering a top surface and a side surface of the first detection electrode layer, and including a second inorganic layer made of at least an inorganic material With the tuyere,
And a second detection electrode layer provided on the second sealing layer,
At least one of the first detection electrode layer and the second detection electrode layer is provided under the first sealing layer via a contact hole provided in the first sealing layer. touch sensor incorporated organic EL device according to claim Rukoto the lead wirings electrically connected.   A first detection electrode extending in one direction and a plurality of juxtaposed detection electrodes by the first detection electrode layer and the second detection electrode layer, and a plurality of the first detection electrodes extending in a direction different from the one direction 7. The organic EL device with a built-in touch sensor according to claim 6, wherein two detection electrodes are formed.   The organic sensor according to claim 7, wherein each of the first detection electrode and the second detection electrode has a shape in which a rectangular (stripe) type or a diamond (diamond) type is continuous. EL device. The touch sensor incorporated organic EL according to claim 7 or 8 , wherein the lead-out wiring intersects the end of the first sealing layer and the end of the second sealing layer in plan view. apparatus.   The touch sensor according to any one of claims 6 to 9, wherein the first sealing layer further includes a planarization layer made of an organic material on the first inorganic layer. Built-in organic EL device. It further has a second substrate disposed opposite to the first substrate, and a filling layer provided between the first detection electrode and the second detection electrode and the second substrate. The organic EL device with a built-in touch sensor according to claim 2 or 7 . The organic EL device with a built-in touch sensor according to claim 2, wherein the first detection electrode and the second detection electrode each include a metal mesh. The organic EL device with a built-in touch sensor according to claim 2, wherein the first detection electrode and the second detection electrode each include a transparent conductive material.   The organic EL device with a built-in touch sensor according to claim 13, wherein the transparent conductive material is ITO or IZO.

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