JP6494737B2 - Mluに基づく加速度計 - Google Patents
Mluに基づく加速度計 Download PDFInfo
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- JP6494737B2 JP6494737B2 JP2017501181A JP2017501181A JP6494737B2 JP 6494737 B2 JP6494737 B2 JP 6494737B2 JP 2017501181 A JP2017501181 A JP 2017501181A JP 2017501181 A JP2017501181 A JP 2017501181A JP 6494737 B2 JP6494737 B2 JP 6494737B2
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- 230000005291 magnetic effect Effects 0.000 claims description 110
- 230000005415 magnetization Effects 0.000 claims description 80
- 230000001133 acceleration Effects 0.000 claims description 23
- 230000008859 change Effects 0.000 claims description 15
- 239000003302 ferromagnetic material Substances 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000004888 barrier function Effects 0.000 claims description 6
- 230000001747 exhibiting effect Effects 0.000 claims description 5
- 230000001939 inductive effect Effects 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 description 13
- 239000000956 alloy Substances 0.000 description 13
- 230000005290 antiferromagnetic effect Effects 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 239000011572 manganese Substances 0.000 description 8
- 229910052742 iron Inorganic materials 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052748 manganese Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000002885 antiferromagnetic material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910015136 FeMn Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910003289 NiMn Inorganic materials 0.000 description 1
- 229910019041 PtMn Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005486 microgravity Effects 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0885—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetostrictive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
Description
2 磁気トンネル接合
3 ビット用配線
4 磁場用配線、電流ライン
6 プルーフマス、長方形
11 プルーフマス
12 弾性テザー
13 櫛形電極
14 固定プレート
21 第2磁性層、センス層
22 トンネル障壁層
23 第1磁性層、ストレージ層
24 ストレージ反強磁性層
32 センス電流
41 バイアスフィールド電流
42 バイアス磁場
51 第1変位
60 プルーフマス磁化方向
60′ プルーフマス磁化方向
60″ プルーフマス磁化方向
61 プルーフマス磁場
62 ばね要素、可撓性梁
63 支持要素
70 加速度ベクトル
100 MLUに基づく加速度計
101 第1MLUセル
102 第2MLUセル
103 第3MLUセル
104 第4MLUセル
211 センス磁化(方向)
231 ストレージ磁化(方向)、参照磁化(方向)
Claims (5)
- 少なくとも1つのMLUセルと1つのプルーフマスとを有するMLUに基づく加速度計であって、
前記少なくとも1つのMLUセルが、固定された1つの第1磁化方向を呈する1つの第1磁性層と変更され得る第2磁化方向を呈する第2磁性層との間に1つのトンネル障壁層を有し、
前記プルーフマスが、プルーフマス磁場を誘導するプルーフマス磁化方向を呈する強磁性材料から成り、加速度ベクトルに追従するときに、少なくとも1つの方向に変位可能であるように、前記プルーフマスが、弾性式に懸架されていて、前記プルーフマスが、前記プルーフマス磁場を通じて前記少なくとも1つのMLUセルに磁気結合されている当該加速度計において、
前記MLUに基づく加速度計が、前記少なくとも1つのMLUセルのいずれか1つのMLUセルに対する前記プルーフマスの変位から加速度ベクトルを測定するように、それぞれの前記少なくとも1つのMLUセルの磁気抵抗を読み取り操作中に測定するために構成された読み取りモジュールをさらに有し、
前記第2磁化方向が、前記プルーフマス磁場の変化とほぼ線形に変化するように、前記読み取りモジュールは、前記第2磁化方向を前記第1磁化方向に対して平行と反平行との間の中間状態に読み取り操作中に切り替えるための手段と、センス電流32を磁気トンネル接合2中に通電することによって前記第2磁化方向と前記第1磁化方向との間の整列の度合いを測定するための手段とを有することを特徴とする加速度計。 - 前記第2磁化方向が、前記プルーフマス磁場の変化とほぼ線形に変化するように、前記第2磁化方向を前記第1磁化方向に対して平行と反平行との間の中間状態に読み取り操作中に切り替えるための手段は、前記MLUセルに磁気結合された1つの磁場用配線を有し、この磁場用配線が、バイアス磁場を誘導する1つのバイアスフィールド電流を通電するために形成されている請求項1に記載の加速度計。
- 前記読み取りモジュールは、センス電流を1つのビット用配線を通じて前記MLUセル中に通電するために形成された前記ビット用配線をさらに有する請求項1に記載の加速度計。
- 前記加速度計は、複数のMLUセルを前記プルーフマスのx方向のそれぞれの側面上に有し、複数のMLUセルを前記プルーフマスのy方向のそれぞれの側面上に有する請求項1に記載の加速度計。
- z方向に向けられた加速度ベクトルが検出され得るように、前記加速度計は、1つ又は複数のMLUセルを前記プルーフマスの上又は下に有する請求項1に記載の加速度計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14290201.4 | 2014-07-11 | ||
EP14290201.4A EP2966453B1 (en) | 2014-07-11 | 2014-07-11 | MLU based accelerometer using a magnetic tunnel junction |
PCT/EP2015/064770 WO2016005224A1 (en) | 2014-07-11 | 2015-06-30 | Mlu based accelerometer using a magnetic tunnel junction |
Publications (2)
Publication Number | Publication Date |
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JP2017519997A JP2017519997A (ja) | 2017-07-20 |
JP6494737B2 true JP6494737B2 (ja) | 2019-04-03 |
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JP2017501181A Active JP6494737B2 (ja) | 2014-07-11 | 2015-06-30 | Mluに基づく加速度計 |
Country Status (5)
Country | Link |
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US (1) | US10119988B2 (ja) |
EP (1) | EP2966453B1 (ja) |
JP (1) | JP6494737B2 (ja) |
CN (1) | CN106489063B (ja) |
WO (1) | WO2016005224A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106645797B (zh) * | 2016-10-26 | 2023-09-12 | 东南大学 | 一种基于间隙改变的隧道磁阻效应加速度计装置 |
CN107255737B (zh) * | 2017-05-18 | 2019-12-10 | 东南大学 | 一种基于磁场方向改变的隧道磁阻式加速度计装置及方法 |
CN107942096B (zh) * | 2017-10-11 | 2019-11-19 | 杭州电子科技大学 | 三维磁悬浮加速度计及其制造方法 |
US10876839B2 (en) | 2018-09-11 | 2020-12-29 | Honeywell International Inc. | Spintronic gyroscopic sensor device |
US10871529B2 (en) | 2018-09-11 | 2020-12-22 | Honeywell International Inc. | Spintronic mechanical shock and vibration sensor device |
US10802087B2 (en) | 2018-09-11 | 2020-10-13 | Honeywell International Inc. | Spintronic accelerometer |
US11150312B2 (en) * | 2019-02-01 | 2021-10-19 | Honeywell International Inc. | Accelerometer using magnetic tunnel junction |
CN110780088B (zh) * | 2019-11-08 | 2021-08-03 | 中北大学 | 多桥路隧道磁阻双轴加速度计 |
CN111337708B (zh) * | 2020-04-10 | 2022-01-21 | 东南大学 | 一种基于双层线圈敏感结构的隧道磁阻式微加速度计装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US20030214762A1 (en) * | 2002-05-14 | 2003-11-20 | Manish Sharma | Magnetic field detection sensor |
JP4692805B2 (ja) * | 2004-06-30 | 2011-06-01 | Tdk株式会社 | 磁気検出素子およびその形成方法 |
US7541804B2 (en) * | 2005-07-29 | 2009-06-02 | Everspin Technologies, Inc. | Magnetic tunnel junction sensor |
US7414396B2 (en) * | 2005-07-29 | 2008-08-19 | Freescale Semiconductor, Inc. | Sensor with magnetic tunnel junction and moveable magnetic field source |
US7547480B2 (en) * | 2005-10-28 | 2009-06-16 | Everspin Technologies, Inc. | Magnetic tunnel junction pressure sensors and methods |
JP2009041949A (ja) * | 2007-08-06 | 2009-02-26 | Alps Electric Co Ltd | 磁気式加速度センサ |
EP2221826A1 (en) * | 2009-02-19 | 2010-08-25 | Crocus Technology S.A. | Active strap magnetic random access memory cells |
US9182459B2 (en) * | 2011-09-08 | 2015-11-10 | Honeywell International Inc. | Wireless magnetic position sensor |
EP2575135B1 (en) * | 2011-09-28 | 2015-08-05 | Crocus Technology S.A. | Magnetic random access memory (MRAM) cell and method for reading the MRAM cell using a self-referenced read operation |
EP2626860B1 (en) * | 2012-02-08 | 2016-11-16 | Crocus Technology S.A. | Self-referenced mram element with linear sensing signal |
ITTO20120290A1 (it) * | 2012-04-02 | 2013-10-03 | St Microelectronics Srl | Sensore inerziale di tipo magnetico, e metodo per operare il sensore inerziale |
JP2014089088A (ja) * | 2012-10-30 | 2014-05-15 | Alps Electric Co Ltd | 磁気抵抗効果素子 |
-
2014
- 2014-07-11 EP EP14290201.4A patent/EP2966453B1/en active Active
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2015
- 2015-06-30 CN CN201580037658.2A patent/CN106489063B/zh not_active Expired - Fee Related
- 2015-06-30 US US15/324,291 patent/US10119988B2/en active Active
- 2015-06-30 JP JP2017501181A patent/JP6494737B2/ja active Active
- 2015-06-30 WO PCT/EP2015/064770 patent/WO2016005224A1/en active Application Filing
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Publication number | Publication date |
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US20170160308A1 (en) | 2017-06-08 |
EP2966453B1 (en) | 2018-10-31 |
EP2966453A1 (en) | 2016-01-13 |
US10119988B2 (en) | 2018-11-06 |
WO2016005224A1 (en) | 2016-01-14 |
JP2017519997A (ja) | 2017-07-20 |
CN106489063A (zh) | 2017-03-08 |
CN106489063B (zh) | 2020-02-28 |
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