JP6475461B2 - Light transmissive conductive film - Google Patents

Description

  The present invention relates to a light transmissive conductive film.

  As a light-transmitting conductive film mounted on a touch panel, light transmission containing indium tin oxide (ITO) or the like directly or via another layer on at least one surface of a light-transmitting support layer made of plastic or the like Many light-transmitting conductive films having a conductive conductive layer are used.

  In many cases, the above-described film is used after a light-transmitting conductive layer (or further including the layer if any) is patterned by an etching process. When such a film is viewed from the top of the film surface on the side of the light-transmitting conductive layer, the same layer does not exist in the region (pattern region) where the light-transmitting conductive layer (or its upper layer) exists on the surface. A region where the lower layer is exposed (etching region) is observed. The pattern shape is, for example, a strip shape. In such a film, it is known that a so-called bone appearance phenomenon occurs in which the pattern shape is visually recognized.

  Although such a bone appearance phenomenon is an event caused by a plurality of factors, it is considered that a local deformation caused by etching processing contributes as one factor.

  For the purpose of suppressing this bone appearance phenomenon, that is, for the purpose of suppressing local deformation itself, a sufficiently thick layer (for example, about 188 μm) is used as a light-transmitting support layer as a film base, or another film is used. It has been proposed to further bond the materials. However, in recent years, there is a demand for thin and light films (for example, about 50 μm), and such means cannot be employed.

  Therefore, for the purpose of suppressing the bone visible phenomenon, a method of reducing the difference in the refractive index difference and reducing the difference in the appearance of the etched region by providing a coating layer on the surface of the substrate on which the transparent conductive layer is formed is provided. It has been proposed (Patent Document 1).

International Publication No. 2006/126604

  An object of the present invention is to provide a light-transmitting conductive film in which the bone appearance phenomenon when the light-transmitting conductive layer is patterned is suppressed as compared with the prior art.

  The inventors of the present invention have made extensive studies, and in the light transmissive conductive film in which the light transmissive conductive layer is disposed on the light transmissive support layer through the intermediate layer, the surface is characterized as an intermediate layer. In a light-transmitting conductive film in which a light-transmitting conductive layer is patterned by using a material having a network structure and arranging the network structure and the light-transmitting conductive layer so as to face each other, We found that the phenomenon can be improved.

The present invention has been completed by further various studies based on these new findings, and is as follows.
Item 1.
(A) a light transmissive support layer;
(B) an intermediate layer; and (C) a light transmissive conductive layer,
The intermediate layer (B) is disposed on at least one surface of the light transmissive support layer (A) directly or via one or more other layers, and at least one light transmissive conductive layer. (C) is a light transmissive conductive film disposed on at least one surface of the light transmissive support layer (A) via at least the intermediate layer (B),
A light transmissive conductive film, wherein the surface shape of the surface of the intermediate layer (B) facing the light transmissive conductive layer (C) has the following characteristics:
In the differential image obtained by differential analysis of the surface shape measured by the white interference microscope,
Truly (1) inscribed in realm of Ru surrounded by the net-th: irregular network structure is obtained, and the following steps (1) Average diameter Z obtained to (3), is 30 microns to 200 [mu] m Arranging the circles so that they have the greatest diameter and are packed most densely within the boundaries when a plurality of perfect circles can be arranged;
(2) The total area (X) of the group of perfect circles arranged in the step (1) is obtained, and the total area (Y) is the total area (X ) in descending order of the diameter of the perfect circles. And (3) calculating the average diameter Z by arithmetically averaging the diameters of the remaining groups of perfect circles excluding the group of perfect circles arranged in the above (2).
Item 2.
Item 2. The light transmissive conductive film according to Item 1, wherein the width of the lines constituting the network structure is 500 µm to 10 µm.
Item 3.
Item 3. The light transmissive conductive film according to Item 1 or 2, wherein the lines constituting the network structure are formed by grooves.
Item 4.
further,
(D) contains an undercoat layer,
The light-transmitting conductive layer (C) disposed on one surface of the light-transmitting support layer (A) via the intermediate layer (B) is at least interposed via the undercoat layer (D). Item 4. The light transmissive conductive film according to any one of Items 1 to 3, which is disposed in the intermediate layer (B).
Item 5.
Item 5. The light transmissive conductive film according to Item 4, wherein the undercoat layer (D) has a thickness of 3 to 100 nm.

  According to the present invention, the bone appearance phenomenon can be improved in the light transmissive conductive film in which the light transmissive conductive layer is patterned.

It is sectional drawing which shows the light transmissive conductive film of this invention by which the intermediate | middle layer (B) and the light transmissive conductive layer (C) are arrange | positioned in this order on the single side | surface of a light transmissive support layer (A). . It is sectional drawing which shows the light transmissive conductive film of this invention by which an intermediate | middle layer (B) and a light transmissive conductive layer (C) are arrange | positioned in this order on both surfaces of a light transmissive support layer (A). . The first intermediate layer (B) and the light transmissive conductive layer (C) are disposed in this order on one surface of the light transmissive support layer (A), and the second surface is disposed on the other surface. It is sectional drawing which shows the light transmissive conductive film of this invention in which the intermediate | middle layer (B) is directly arrange | positioned. It is drawing which shows the result of having measured the surface shape of the intermediate | middle layer (B) of this invention with the white interference microscope. 5 is a differential image obtained by differential analysis of the drawing of FIG. 4. It is a figure which shows a mode that a perfect circle is arrange | positioned in a differential image in the method of evaluating the surface shape of the intermediate | middle layer (B) of this invention. It is the figure which showed how to obtain | require the average value of the diameter of a perfect circle in the method of evaluating the surface shape of the intermediate | middle layer (B) of this invention. The light-transmitting conductive material of the present invention has an intermediate layer (B), an undercoat layer (D), and a light-transmitting conductive layer (C) arranged in this order on one side of the light-transmitting supporting layer (A). It is sectional drawing which shows a film. The light-transmitting conductive material of the present invention, in which an intermediate layer (B), an undercoat layer (D), and a light-transmitting conductive layer (C) are arranged in this order on both surfaces of the light-transmitting support layer (A). It is sectional drawing which shows a film. The first intermediate layer (B), the undercoat layer (D), and the light transmissive conductive layer (C) are arranged adjacent to each other in this order on one surface of the light transmissive support layer (A). And it is sectional drawing which shows the light transmissive conductive film of this invention by which the 2nd intermediate | middle layer (B) is directly arrange | positioned on the other surface.

1. Light transmissive conductive film The light transmissive conductive film of the present invention comprises:
(A) a light transmissive support layer;
(B) an intermediate layer; and (C) a light transmissive conductive layer,
The intermediate layer (B) is disposed on at least one surface of the light transmissive support layer (A) directly or via one or more other layers, and at least one light transmissive conductive layer. (C) is a light transmissive conductive film disposed on at least one surface of the light transmissive support layer (A) via at least the intermediate layer (B),
A light transmissive conductive film, wherein the surface shape of the surface of the intermediate layer (B) facing the light transmissive conductive layer (C) has the following characteristics:
In the differential image obtained by differential analysis of the surface shape measured by the white interference microscope,
An irregular network structure is obtained, and the average diameter Z determined by the following steps (1) to (3) is 30 μm to 200 μm:
(1) a true circle inscribed in realm of Ru surrounded by the net-th, arranged so as to be most densely packed within the boundary when the diameter is maximized, and can be arranged a plurality of roundness process;
(2) The total area (X) of the group of perfect circles arranged in the step (1) is obtained, and the total area (Y) is the total area (X ) in descending order of the diameter of the perfect circles. And (3) calculating the average diameter Z by arithmetically averaging the diameters of the remaining groups of perfect circles excluding the group of perfect circles arranged in the above (2).

  In the present invention, “light-transmitting” means having a property of transmitting light (translucent). “Light transmissivity” includes transparency. “Light transmissivity” means, for example, the property that the total light transmittance is 80% or more, preferably 85% or more, more preferably 87% or more. In the present invention, the total light transmittance is measured based on JIS-K-7105 using a haze meter (trade name: NDH-2000 manufactured by Nippon Denshoku Co., Ltd. or equivalent).

  In this specification, when mentioning the relative positional relationship between two layers among a plurality of layers arranged on one surface of the light transmissive support layer (A), the light transmissive support layer (A) is used as a reference. One layer having a large distance from the light transmissive support layer (A) is referred to as “upper layer” and the like, and the other layer having a small distance from the light transmissive support layer (A) is referred to as “lower layer”. And so on.

  Unless otherwise specified in the following description of each layer, in the present invention, the thickness of each layer is a commercially available reflection spectral film thickness meter (Otsuka Electronics, FE-3000 (product name), or equivalent). Use to find. Alternatively, it may be obtained by observation using a commercially available transmission electron microscope. Specifically, the light-transmitting conductive film is thinly cut in a direction perpendicular to the film surface using a microtome or a focused ion beam, and the cross section is observed.

  In FIG. 1, the one aspect | mode of the transparent electroconductive film of this invention is shown. In this embodiment, the intermediate layer (B) and the light transmissive conductive layer (C) are arranged in this order on one surface of the light transmissive support layer (A).

  FIG. 2 shows another embodiment of the light transmissive conductive film of the present invention. In this embodiment, the intermediate layer (B) and the light transmissive conductive layer (C) are arranged in this order on both surfaces of the light transmissive support layer (A).

1.1 Light transmissive support layer (A)
In the present invention, the light transmissive support layer refers to a light transmissive conductive film containing a light transmissive conductive layer, which plays a role of supporting the layer containing the light transmissive conductive layer. Although it does not specifically limit as a light transmissive support layer (A), For example, in the light transmissive conductive film for touch panels, what is normally used as a light transmissive support layer can be used.

  Although the raw material of a light-transmissive support layer (A) is not specifically limited, For example, various organic polymers etc. can be mentioned. The organic polymer is not particularly limited. For example, polyester resin, acetate resin, polyether resin, polycarbonate resin, polyacrylic resin, polymethacrylic resin, polystyrene resin, polyolefin resin, polyimide resin, etc. Examples include resins, polyamide resins, polyvinyl chloride resins, polyacetal resins, polyvinylidene chloride resins, and polyphenylene sulfide resins. Although it does not specifically limit as polyester-type resin, For example, a polyethylene terephthalate (PET), a polyethylene naphthalate (PEN), etc. are mentioned. The material of the light transmissive support layer (A) is preferably a polyester resin, and particularly preferably PET. The light transmissive support layer (A) may be composed of any one of these, or may be composed of a plurality of types.

  Although the thickness of a light-transmissive support layer (A) is not specifically limited, For example, the range of 2-300 micrometers is mentioned.

1.2 Intermediate layer (B)
In the light transmissive conductive film of the present invention, the intermediate layer (B) is disposed on at least one surface of the light transmissive support layer (A) directly or via one or more other layers.

  The intermediate layer (B) may be directly disposed on both surfaces of the light transmissive support layer (A) (FIG. 3).

The intermediate layer (B) is characterized in that the surface shape of the surface facing the light transmissive conductive layer (C) exhibits the following characteristics:
In the differential image obtained by differential analysis of the surface shape measured by the white interference microscope,
Truly (1) inscribed in realm of Ru surrounded by the net-th: irregular network structure is obtained, and the following steps (1) Average diameter Z obtained to (3), is 30 microns to 200 [mu] m Arranging the circles so that they have the greatest diameter and are packed most densely within the boundaries when a plurality of perfect circles can be arranged;
(2) The total area (X) of the group of perfect circles arranged in the step (1) is obtained, and the total area (Y) is the total area (X ) in descending order of the diameter of the perfect circles. And (3) calculating the average diameter Z by arithmetically averaging the diameters of the remaining groups of perfect circles excluding the group of perfect circles arranged in the above (2).

  FIG. 4 and FIG. 5 show an example of a surface shape obtained by measuring the surface of the intermediate layer (B) exhibiting the above characteristics with a white interference microscope, and differential images obtained by differential analysis of the surface, respectively. In FIG. 4, the width of the observation area (reported in the X-axis direction and Y-axis) and the depth of the groove observed on the surface are shown in a hue diagram.

  FIG. 6 is a schematic view showing a place where a perfect circle is arranged in the step (1).

  Further, FIG. 7 shows a schematic diagram in which perfect circles are arranged in the step (2).

  When the surface to be measured of the intermediate layer (B) is not exposed, the layer disposed on the upper side in advance is removed as necessary before the measurement in the above steps (1) to (3). Can do. Although not particularly limited, for example, the upper layer may be removed by an etching process. Although an etching process is not specifically limited, For example, it can carry out as follows. The light-transmitting conductive film is immersed in 20% hydrochloric acid, and the etching process is continued until the surface resistance cannot be measured.

  The surface shape measurement by the white interference microscope is not particularly limited, but can be performed using a non-contact surface / layer cross-sectional shape measurement system. Although not particularly limited, as such a system, for example, VertScan (registered trademark) 2.0 manufactured and sold by Ryoka System Co., Ltd. can be used. Although there is no particular limitation on the use of these devices, it is usually according to the attached manual, but the usage method may be appropriately modified as necessary.

  The surface resistance was measured by a four-terminal method using a surface resistance meter (manufactured by MITSUBISHI CHEMICAL ANALYTECH, trade name: Loresta-EP).

  In addition, when another layer having a thickness of several tens of nanometers such as an undercoat layer exists on the surface of the intermediate layer (B), the other layer was directly covered with the other layer without being removed. The surface shape may be measured.

  The network structure is not particularly limited, but it is more preferable that the width of a line constituting the network structure is 500 μm to 10 μm.

  The network structure is not particularly limited, but the lines constituting the network structure may be formed by grooves or peaks.

  Although not particularly limited, the intermediate layer (B) may have a function and a structure as a so-called hard coat layer.

  Preferably, the intermediate layer (B) contains fine particles and a binder component.

  The fine particles are not particularly limited, but preferably, transparent organic polymer particles, transparent inorganic particles, organic-inorganic hybrid particles, and the like can be used.

  The binder component is not particularly limited, and examples thereof include acrylic resins, silicone resins, melamine resins, and alkyd resins; and colloidal particles such as silica, zirconia, titania, and alumina. The intermediate layer (B) may contain any one of them as a binder component, or may contain a plurality of types as a binder component.

  In the above, it is preferable that the refractive index difference between the fine particles and the binder component is 0.1 or less. If the refractive index difference is within this range, it is preferable because uniform transmitted light can be obtained over the entire surface of the film when light is transmitted. What is necessary is just to select a material suitably so that a refractive index difference may exist in this range.

  The intermediate layer (B) is not particularly limited as long as the effects of the present invention are exhibited, but may further contain other components in addition to the fine particles. The other components are not particularly limited as long as the effects of the present invention are exhibited. For example, acrylic resins, silicone resins, melamine resins, and alkyd resins; and colloidal particles such as silica, zirconia, titania, and alumina. And silicon-based organic-inorganic hybrid polymers. In addition to the fine particles, the intermediate layer (B) may further contain any one of them, or may further contain a plurality of types.

  The thickness of the intermediate layer (B) is 0.5 to 5 μm, preferably 1 to 4 μm, more preferably 1 to 3 μm. When the thickness of the intermediate layer (B) is larger than 0.5 μm, there is an advantage that when the particles are contained, the particles are difficult to drop off. Further, when the thickness of the intermediate layer (B) is smaller than 5 μm, there is an advantage that the uniformity of the protrusion height is increased.

  In the present invention, the thickness of the intermediate layer (B) is measured as follows. Obtained by observation with a transmission electron microscope. Specifically, a light-transmitting conductive film is thinly cut using a microtome or a focused ion beam, and the cross section is observed.

  The intermediate layer (B) can also be a layer having other additional functions. For example, you may provide the function as an optical adjustment layer to an intermediate | middle layer (B) simultaneously. In this case, the intermediate layer (B) may have, for example, a multilayer structure in which the upper portion has a low refractive region and the lower portion has a high refractive index region, and the boundary may not be clear.

  The method for disposing the intermediate layer (B) on the underlying layer is not particularly limited. For example, a method of applying a raw material to a film and then curing with heat, and an active energy such as ultraviolet rays or electron beams. Examples include a method of curing with a wire. From the viewpoint of productivity, a method of curing with ultraviolet rays is preferable.

More specifically, when the intermediate layer (B) contains the binder component and the fine particles, the intermediate layer (B) can be disposed on the underlying layer as follows.
(1) It can arrange | position by the method containing the process of forming the said intermediate | middle layer (B) using the raw material containing the said binder component and the said microparticles | fine-particles. In the step (1), it is more preferable to form the intermediate layer (B) by applying the raw material on a layer serving as a base.

  Alternatively, a desired protrusion can be provided on the surface of the intermediate layer (B) by a method such as imprinting without using the fine particles as described above.

1.3 Light transmissive conductive layer (C)
The light transmissive conductive layer (C) is disposed on one surface of the light transmissive support layer (A) directly or via one or more other layers.

  In the present invention, the light-transmitting conductive layer means a layer that conducts electricity and transmits visible light. Although it does not specifically limit as a light transmissive conductive layer (C), For example, what is normally used as a light transmissive conductive layer in the light transmissive conductive film for touch panels can be used.

  The material of the light transmissive conductive layer (C) is not particularly limited, and examples thereof include indium oxide, zinc oxide, tin oxide, and titanium oxide. The light transmissive conductive layer (C) is preferably a light transmissive conductive layer containing indium oxide doped with a dopant in terms of achieving both transparency and conductivity. The light transmissive conductive layer (C) may be a light transmissive conductive layer made of indium oxide doped with a dopant. Although it does not specifically limit as a dopant, For example, a tin oxide, a zinc oxide, those mixtures, etc. are mentioned.

In the case of using indium oxide doped with tin oxide as the material of the light transmissive conductive layer (C), indium oxide (III) (In ₂ O ₃ ) doped with tin oxide (IV) (SnO ₂ ) (Tin-doped indium oxide; ITO) is preferable. In this case, the addition amount of SnO ₂ is not particularly limited, and examples thereof include 1 to 15% by weight, preferably 2 to 10% by weight, and more preferably 3 to 8% by weight. Moreover, you may use as a raw material of a light-transmitting conductive layer (C) what added the other dopant to indium tin oxide in the range which the total amount of a dopant does not exceed the numerical range of the left description. Although it does not specifically limit as another dopant in the left, For example, selenium etc. are mentioned.

  The light transmissive conductive layer (C) may be composed of any one of the various materials described above, or may be composed of a plurality of types.

  The light transmissive conductive layer (C) is not particularly limited, but may be a crystalline or amorphous body, or a mixture thereof.

  The method for disposing the light transmissive conductive layer (C) may be either wet or dry, and is not particularly limited. Specific examples of the method for disposing the light transmissive conductive layer (C) include a sputtering method, a vacuum deposition method, an ion plating method, a CVD method, and a pulse laser deposition method.

1.4 Undercoat layer (D)
The light transmissive conductive film of the present invention has an undercoat layer directly or via one or more other layers on the surface of the light transmissive support layer (A) where the light transmissive conductive layer (C) is disposed. (D) may be arranged. When the undercoat layer (D) is disposed, at least one of the light transmissive conductive layers (C) is disposed at least through the undercoat layer (D) and the intermediate layer (B). It is arranged on the surface of (A). In this case, at least one of the light transmissive conductive layers (C) may be disposed adjacent to the undercoat layer (D). In this case, the undercoat layer (D) is usually disposed closer to the light transmissive conductive layer (C) than the intermediate layer (B).

  In FIG. 8, the one aspect | mode of the transparent electroconductive film of this invention is shown. In this embodiment, the intermediate layer (B), the undercoat layer (D), and the light transmissive conductive layer (C) are arranged adjacent to each other in this order on one surface of the light transmissive support layer (A). Yes.

  In FIG. 9, the one aspect | mode of the transparent electroconductive film of this invention is shown. In this embodiment, the intermediate layer (B), the undercoat layer (D), and the light transmissive conductive layer (C) are arranged adjacent to each other in this order on both surfaces of the light transmissive support layer (A).

  In FIG. 10, the one aspect | mode of the transparent electroconductive film of this invention is shown. In this embodiment, the first intermediate layer (B), the undercoat layer (D), and the light transmissive conductive layer (C) are adjacent to each other in this order on one surface of the light transmissive support layer (A). The second intermediate layer (B) is disposed directly on the other surface.

  Although the material of an undercoat layer (D) is not specifically limited, For example, you may have a dielectric property. The material for the undercoat layer (D) is not particularly limited. For example, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, silicon alkoxide, alkylsiloxane and its condensate, polysiloxane, silsesquioxane, and Examples include polysilazane. The undercoat layer (D) may be composed of any one of them, or may be composed of a plurality of types. A light-transmitting undercoat layer containing silicon oxide is preferable, and a light-transmitting undercoat layer made of silicon oxide is more preferable.

  One layer of the undercoat layer (D) may be disposed. Alternatively, two or more layers may be arranged adjacent to each other or separated from each other via other layers.

  As for the thickness per layer of an undercoat layer (D), 15-40 nm etc. are mentioned. When two or more layers are disposed adjacent to each other, the total thickness of all the undercoat layers (D) adjacent to each other may be within the above range. In the example list shown on the left, the following are more preferable than the above.

  The method of disposing the undercoat layer (D) may be either wet or dry, and is not particularly limited. Examples of the wet include a sol-gel method and a method of applying a fine particle dispersion or colloid solution. It is done. Examples of the method for disposing the undercoat layer (D) include a method of laminating on an adjacent layer by a sputtering method, an ion plating method, a vacuum deposition method, or a pulse laser deposition method.

1.5 Other layers The light-transmitting conductive film of the present invention is provided on the surface of the light-transmitting support layer (A) where the intermediate layer (B) and the light-transmitting conductive layer (C) are disposed. At least one layer selected from the group consisting of the undercoat layer (D) and at least one other layer (E) may be further disposed.

  Although it does not specifically limit as another layer (E), For example, an adhesive layer etc. are mentioned.

  The adhesive layer is a layer that is disposed between two layers so as to be adjacent to each other and to adhere the two layers to each other. Although it does not specifically limit as a contact bonding layer, For example, what is normally used as a contact bonding layer in the transparent conductive film for touchscreens can be used. Although not particularly limited, for example, a coupling agent can be used. Corona treatment may be performed for the purpose of further improving the adhesion to one surface or both surfaces to be bonded as required.

1.6 Use of light-transmitting conductive film of the present invention The light-transmitting conductive film of the present invention is preferably used for touch panels. The light-transmitting conductive film of the present invention is particularly preferably used for a capacitive touch panel. A light-transmitting conductive film used for manufacturing a resistive touch panel generally requires a surface resistivity (sheet resistance) of about 100 to 1,000 Ω / sq. On the other hand, a light-transmitting conductive film used for manufacturing a capacitive touch panel generally has a lower surface resistivity. The light-transmitting conductive film of the present invention has a reduced resistivity, and is thus preferably used for the production of a capacitive touch panel. The details of the capacitive touch panel are as described in 2.

2. Capacitive touch panel of the electrostatic capacitance type touch panel <br/> invention of the present invention comprises a light transmissive, electrically-conductive film of the present invention, comprise other members according to necessity.

Specific examples of the configuration of the capacitive touch panel according to the present invention include the following configurations. The protective layer (1) side is used so that the operation screen side faces, and the glass (5) side faces the side opposite to the operation screen.
(1) Protective layer (2) Light transmissive conductive film of the present invention (Y-axis direction)
(3) Insulating layer (4) Light transmissive conductive film of the present invention (X-axis direction)
(5) Glass Although the capacitive touch panel of the present invention is not particularly limited, for example, it can be produced by combining the above (1) to (5) and other members as required according to a usual method. it can.

3. Production method of light transmissive conductive film of the present invention The light transmissive conductive film of the present invention can be produced by disposing each layer as described for each layer. For example, the light-transmissive support layer (A) may be sequentially disposed on the surface on which the light-transmissive conductive layer (C) is disposed from the lower layer side, but the arrangement order is not particularly limited. For example, first, another layer may be disposed on one surface of a layer that is not the light-transmissive support layer (A) (for example, the light-transmissive conductive layer (C)). Alternatively, one composite layer is obtained by arranging two or more layers adjacent to each other on the one hand, or at the same time, two or more layers are similarly disposed adjacent to each other on the other side. Thus, one type of composite layer may be obtained, and these two types of composite layers may be further arranged adjacent to each other.

Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.
1. Example 1
1.1 Preparation of Hard Coat Material Methyl isobutyl ketone (MIBK) was mixed with a photopolymerizer-containing acrylic oligomer to prepare a coating solution having a solid content concentration of 40% by weight.
1.2 Preparation of Hard Coat Film Apply the coating solution prepared in 1.1 on one side of a 50 μm thick PET film (Mitsubishi Resin Diafoil) using a bar coater. Then, using a dryer oven, it was heated and dried at 100 ° C. for 1 minute. Subsequently, the coated film after drying was irradiated with ultraviolet rays (irradiation amount: 300 mJ / cm ² ) to provide a hard coat having a thickness of about 1 μm on the PET film.

By performing the same operation on the other side of the PET film, a hard coat film in which a hard coat having a thickness of about 1 μm was provided on both sides of the PET film was obtained.
1.3 Formation of Low Refractive Index Layer (Low Flexion Layer) A film was formed on one surface of the obtained hard coat film by reactive sputtering using a sputtering target material made of Si (boron dope). Specifically, the inside of the chamber was evacuated to 5 × 10 ⁻⁴ Pa or less, and then Ar gas and O ₂ gas were introduced at a ratio of 2: 1, and the pressure in the chamber was 0.2 Pa, and sputtering was performed.
1.5 Film Formation of Transparent Conductive Layer A transparent material covering the entire surface of the low refractive index layer by a DC magnetron sputtering method using a sintered body material made of indium oxide: 95 wt% and tin oxide: 5 wt% as a target material A conductive layer was formed. Specifically, after evacuating the inside of the chamber to 5 × 10 ⁻⁴ Pa or less, a mixed gas consisting of Ar gas: 95% and oxygen gas: 5% is introduced into the chamber, and the pressure in the chamber is reduced. Sputtering was performed at 0.2 to 0.3 Pa. Sputtering was performed so that the finally obtained transparent conductive layer had a thickness of 20 nm. The sheet resistance after heat-treating the obtained film at 150 ° C. for 1 hour was 150Ω / □.
1.6 Etching Treatment After forming a patterned photoresist film on the obtained transparent conductive layer, the whole film was mixed with HCl / HNO ₃ / H ₂ O mixed solution [HCl: HNO ₃ : H ₂ O at 25 ° C. = 20: 1: 30 (volume ratio)) was immersed for 10 minutes to obtain a transparent conductive film having a transparent conductive layer having a pattern opening and a pattern portion on the outermost surface.
1.7 Bone appearance evaluation The appearance of the bone texture of the patterned film was visually evaluated.

The case where the pattern could hardly be confirmed visually was marked as ◯, the case where the pattern could be slightly confirmed was marked as Δ, and the case where the pattern could be clearly confirmed was marked as x.
2. Example 2
The drying temperature at the time of preparation of the hard coat film was set to 120 ° C., and otherwise the same as in Example 1.
3. Comparative Example 1
Except that the drying temperature at the time of preparing the hard coat film was 70 ° C., it was the same as Example 1.

  Table 1 shows the evaluation results of the films obtained in Examples and Comparative Examples.

1 Light-transmissive conductive film 11 Light-transmissive support layer (A)
12 Middle layer (B)
13 Light transmissive conductive layer (C)
14 Undercoat layer (D)
15 Lower layer of intermediate layer (B) (may be light transmissive support layer (A))

Claims (5)

(A) a light transmissive support layer;
(B) an intermediate layer; and (C) a light transmissive conductive layer,
The intermediate layer (B) is disposed on at least one surface of the light transmissive support layer (A) directly or via one or more other layers, and at least one light transmissive conductive layer. (C) is a light transmissive conductive film disposed on at least one surface of the light transmissive support layer (A) via at least the intermediate layer (B),
A light transmissive conductive film, wherein the surface shape of the surface of the intermediate layer (B) facing the light transmissive conductive layer (C) has the following characteristics:
In the differential image obtained by differential analysis of the surface shape measured by the white interference microscope,
Irregular network structure is obtained, and an average diameter Z sought to the following steps (1) to (3), are 30Myuemu～200myuemu: (1) a true circle inscribed in the realm of Ru surrounded by the net-th In such a way that, when the diameter is the largest and a plurality of perfect circles can be arranged, the boundary is filled most densely;
(2) The total area (X) of the group of perfect circles arranged in the step (1) is obtained, and the total area (Y) is the total area (X ) in descending order of the diameter of the perfect circles. And (3) calculating the average diameter Z by arithmetically averaging the diameters of the remaining groups of perfect circles excluding the group of perfect circles arranged in the above (2). The light-transmitting conductive film according to claim 1, wherein the line constituting the network structure has a width of 500 μm to 10 μm. The light-transmitting conductive film according to claim 1 or 2, wherein the lines constituting the network structure are formed by grooves. further,
(D) contains an undercoat layer,
The light-transmitting conductive layer (C) disposed on one surface of the light-transmitting support layer (A) via the intermediate layer (B) is at least interposed via the undercoat layer (D). The light-transmitting conductive film according to any one of claims 1 to 3, which is disposed in the intermediate layer (B). The light-transmitting conductive film according to claim 4, wherein the undercoat layer (D) has a thickness of 3 to 100 nm.