JP6466541B2 - Manufacturing method of heat dissipation unit - Google Patents
Manufacturing method of heat dissipation unit Download PDFInfo
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- JP6466541B2 JP6466541B2 JP2017198581A JP2017198581A JP6466541B2 JP 6466541 B2 JP6466541 B2 JP 6466541B2 JP 2017198581 A JP2017198581 A JP 2017198581A JP 2017198581 A JP2017198581 A JP 2017198581A JP 6466541 B2 JP6466541 B2 JP 6466541B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 65
- 230000017525 heat dissipation Effects 0.000 title claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 338
- 239000002184 metal Substances 0.000 claims description 338
- 239000010936 titanium Substances 0.000 claims description 269
- 229910052719 titanium Inorganic materials 0.000 claims description 266
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 265
- 239000011247 coating layer Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 48
- 239000012530 fluid Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 31
- 239000010949 copper Substances 0.000 claims description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 25
- 230000008569 process Effects 0.000 claims description 24
- 229910052802 copper Inorganic materials 0.000 claims description 23
- 230000004048 modification Effects 0.000 claims description 22
- 238000012986 modification Methods 0.000 claims description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 230000005855 radiation Effects 0.000 claims description 20
- 238000003466 welding Methods 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 238000003980 solgel method Methods 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000002209 hydrophobic effect Effects 0.000 claims description 5
- 239000002073 nanorod Substances 0.000 claims description 5
- 230000009467 reduction Effects 0.000 claims description 5
- 239000004408 titanium dioxide Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 13
- 230000000694 effects Effects 0.000 description 13
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 229910001069 Ti alloy Inorganic materials 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000000635 electron micrograph Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000001699 photocatalysis Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000013021 overheating Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- -1 TiO 2 Chemical class 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 229910021488 crystalline silicon dioxide Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- NIFIFKQPDTWWGU-UHFFFAOYSA-N pyrite Chemical compound [Fe+2].[S-][S-] NIFIFKQPDTWWGU-UHFFFAOYSA-N 0.000 description 1
- 229910052683 pyrite Inorganic materials 0.000 description 1
- 239000011028 pyrite Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- NMJKIRUDPFBRHW-UHFFFAOYSA-N titanium Chemical compound [Ti].[Ti] NMJKIRUDPFBRHW-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Description
本発明は、放熱ユニットの製造方法に関し、特に、チタン金属で製造される放熱ユニットの製造方法に関する。 The present invention relates to a method for manufacturing a heat dissipation unit, and more particularly, to a method for manufacturing a heat dissipation unit manufactured from titanium metal.
現行の電子機器は、計算速度が益々速くなるにつれ、その内部の電子素子に高熱を発生させやすく、この電子素子の放熱の問題について、当業者は、ヒートパイプ、熱板、ベイパーチャンバー、放熱器などといった少なくとも１つの放熱ユニットを直接該電子素子と接触させて両者の熱的な結合を行い、更にファンを追加して該放熱ユニットと結合させて強制放熱の効果を向上させてきた。 Current electronic devices are more likely to generate high heat in the electronic elements inside them as the calculation speed increases, and those skilled in the art are concerned about the problem of heat dissipation of these electronic elements, such as heat pipes, heat plates, vapor chambers, radiators. For example, at least one heat radiating unit is directly brought into contact with the electronic element to thermally couple them, and a fan is further added to be coupled to the heat radiating unit to improve the effect of forced heat radiation.
該放熱ユニットは、一般的にアルミニウム又は銅或いはステンレス鋼若しくはこれらの材料の合金等の素材を選定し、銅とアルミニウム及びステンレス鋼等の素材が放熱効果及び熱伝導率が高い等といった特徴を利用し、特に銅の熱伝導率が高いという利点を有することにより、銅が最もよく熱伝導装置の材料として使用されている。しかしながら、銅にも欠点があり、銅（Ｃｕ）が高温還元工程を経た後は、結晶粒成長により結晶が粗大化することで降伏強度（Yield Strength）が大幅に下がり、且つ銅の質量は重く、その硬度は低いため比較的に変形しやすく、変形した後は元の状態に戻らなくなる。 The heat dissipating unit generally uses materials such as aluminum, copper, stainless steel, or alloys of these materials, and uses such features that the heat dissipating effect and heat conductivity of materials such as copper, aluminum, and stainless steel are high. However, copper is best used as a material for heat conduction devices, especially because of the advantage that copper has a high thermal conductivity. However, copper also has drawbacks, and after copper (Cu) undergoes a high-temperature reduction process, the yield strength (Yield Strength) is greatly reduced due to the coarsening of the crystal due to crystal grain growth, and the copper mass is heavy. Since its hardness is low, it is relatively easy to deform, and after it is deformed, it cannot return to its original state.
また、現行のスマート携帯型デバイス（例えば、スマートフォン、タブレット、タブレットコンピュータ或いはノートパソコン）及びウェアラブルデバイス又は薄型化を必要とされる電子デバイスは、より薄型化された受動型放熱ユニットで放熱を行う必要があるため、当業者は銅板体を銅箔に置換させることで薄型化の要求を満たすようにしなければならない。しかし、銅箔は薄型化の要求は満たすが、その構造が更に軟らかくなり、十分な構造支持強度に欠けるため、多くの特殊な利用分野にはあまり適さず、支持力を持っていないため、外力を受けると容易に変形すると共に内部の熱伝導構造も破壊されてしまう。 In addition, current smart portable devices (for example, smartphones, tablets, tablet computers, or laptop computers) and wearable devices or electronic devices that need to be thinned need to dissipate heat using a thinner passive heat radiation unit. Therefore, those skilled in the art must satisfy the demand for thinning by replacing the copper plate with copper foil. However, copper foil satisfies the demand for thinning, but its structure becomes softer and lacks sufficient structural support strength, so it is not well suited for many special fields of use and does not have support force, so external force If it receives, it will deform | transform easily and an internal heat conductive structure will also be destroyed.
これ以外にも、先に述べたアルミニウム又は銅或いはステンレス鋼等の素材を用いた放熱ユニットは、さまざまの特殊な環境若しくは過酷な気候条件下（例えば腐食、高湿、高塩分、極寒、高温、真空又は宇宙空間）において使用できないという問題がある。また当業者は、銅の代替材料としてチタン合金を使用している。チタン合金は高い硬度、耐腐食性、耐高温、耐極寒及び軽質量等といった有用な特性を持っているが、その加工が極めて困難であり、切削加工又は一部の従来にない加工方式を用いる場合を除き、チタン合金に対して塑性変形を行うことは非常に難しいため、チタン合金を銅の代替材料として使用することは多くの場合まだ不可能である。 In addition, the heat dissipation unit using the above-described materials such as aluminum, copper, or stainless steel can be used in various special environments or severe climatic conditions (for example, corrosion, high humidity, high salinity, extreme cold, high temperature, There is a problem that it cannot be used in a vacuum or outer space. Those skilled in the art also use titanium alloys as an alternative material for copper. Titanium alloys have useful properties such as high hardness, corrosion resistance, high temperature resistance, extreme cold resistance, and light mass, but they are extremely difficult to process and use cutting or some unconventional processing methods. Except in some cases, it is still very impossible to use a titanium alloy as an alternative to copper because it is very difficult to plastically deform the titanium alloy.
そこで、上記従来技術の欠点を解決するため、本発明の主な目的は、商業用純チタンに対する塑性加工を実現でき、銅の代替材として商業用純チタンにより放熱ユニットを製造できる製造方法を提供することである。 Therefore, in order to solve the above-mentioned drawbacks of the prior art, the main object of the present invention is to provide a manufacturing method capable of realizing plastic working on commercial pure titanium and manufacturing a heat dissipation unit with commercial pure titanium as an alternative to copper. It is to be.
上記目的を達成するため、本発明は、
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップと、
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、
を含むことを特徴とする放熱ユニットの製造方法を提供する。
In order to achieve the above object, the present invention provides:
Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The manufacturing method of the thermal radiation unit characterized by including is provided.
上記目的を達成するため、本発明は、
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップと、
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内にアルゴンガスを吹き込むと共に、前記第１、２チタン金属板体の表面に過熱還元を発生させることを特徴とする放熱ユニットの製造方法を提供する。
In order to achieve the above object, the present invention provides:
Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by putting the first and second titanium metal plates into an atmosphere furnace, blowing argon gas into the atmosphere furnace, Provided is a method for manufacturing a heat radiating unit characterized in that overheating reduction is generated on the surface of a two-titanium metal plate .
上記目的を達成するため、本発明は、In order to achieve the above object, the present invention provides:
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップと、 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
前記第１、２チタン金属板体に対し熱処理を行うステップと、 Heat-treating the first and second titanium metal plates;
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、 Pressing the first titanium metal plate to form a plurality of protrusions;
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、 Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、 Bonding a metal mesh to one side of the second titanium metal plate;
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、 The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、 One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内を真空手段で吸引すると共に、前記第１、２チタン金属板体の表面に過熱還元を発生させることを特徴とする放熱ユニットの製造方法を提供する。 The surface modification treatment for the first and second titanium metal plate bodies and the metal mesh is performed by placing the first and second titanium metal plate bodies in an atmosphere furnace, sucking the atmosphere furnace by vacuum means, Provided is a method for manufacturing a heat dissipation unit, characterized in that overheating reduction is generated on the surface of a two titanium metal plate.
上記目的を達成するため、本発明は、In order to achieve the above object, the present invention provides:
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップと、 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
前記第１、２チタン金属板体に対し熱処理を行うステップと、 Heat-treating the first and second titanium metal plates;
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、 Pressing the first titanium metal plate to form a plurality of protrusions;
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、 Bonding a metal mesh to one side of the second titanium metal plate;
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、 Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、 The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、 One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、ゾル−ゲル法（Sol-Gel）により行い、その場合、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内を真空手段で吸引すると共に、前記第１、２チタン金属板体の表面にコーティング層を生成させることを特徴とする放熱ユニットの製造方法を提供する。 The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by a sol-gel method (Sol-Gel). In that case, the first and second titanium metal plates are placed in an atmosphere furnace, Provided is a method for manufacturing a heat radiating unit, wherein the inside of the atmosphere furnace is sucked by a vacuum means, and a coating layer is formed on the surfaces of the first and second titanium metal plates.
上記目的を達成するため、本発明は、 In order to achieve the above object, the present invention provides:
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップと、 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
前記第１、２チタン金属板体に対し熱処理を行うステップと、 Heat-treating the first and second titanium metal plates;
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、 Pressing the first titanium metal plate to form a plurality of protrusions;
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、 Bonding a metal mesh to one side of the second titanium metal plate;
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、 Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、 The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、 One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、ゾル−ゲル法（Sol-Gel）により行い、その場合、前記第１、２チタン金属板体を雰囲気炉に入れ、また前記雰囲気炉内にアルゴンガスを吹き込むと共に、前記第１、２チタン金属板体の表面にコーティング層を生成させることを特徴とする放熱ユニットの製造方法を提供する。 The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by a sol-gel method (Sol-Gel). In that case, the first and second titanium metal plates are placed in an atmosphere furnace, Further, the present invention provides a method for manufacturing a heat dissipation unit, wherein argon gas is blown into the atmosphere furnace and a coating layer is formed on the surfaces of the first and second titanium metal plates.
好適な実施例に係る請求項６に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記洗浄作業は、まずアセトンで拭き取り、次いで超音波洗浄機により脱イオン水を用いて洗い流し、最後に窒素ガスで前記第１、２チタン金属板体の表面を乾燥させることを特徴とする。 According to a sixth embodiment of the present invention, in the manufacturing method according to any one of the first to fifth aspects, the cleaning operation is performed by first wiping with acetone and then removing by an ultrasonic cleaner. It is characterized by rinsing with ionic water and finally drying the surfaces of the first and second titanium metal plates with nitrogen gas .
好適な実施例に係る請求項７に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記第１、２チタン金属板体に対する前記熱処理は、該第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内にアルゴンガスを吹き込むと共に４００℃〜７００℃まで加熱し、その加熱時間を３０〜９０分間とすることを特徴とする。 The present invention according to claim 7 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the heat treatment for the first and second titanium metal plates is the first. A 2 titanium metal plate is placed in an atmosphere furnace, argon gas is blown into the atmosphere furnace and heated to 400 ° C. to 700 ° C., and the heating time is set to 30 to 90 minutes .
好適な実施例に係る請求項８に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記コーティング層は、親水性コーティング層或いは疎水性コーティング層のうちのいずれかであることを特徴とする。 The present invention according to claim 8 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the coating layer is a hydrophilic coating layer or a hydrophobic coating layer. It is either .
好適な実施例に係る請求項９に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記コーティング層は、二酸化チタン或いは二酸化ケイ素のうちのいずれかであることを特徴とする。 The present invention according to claim 9 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the coating layer is either titanium dioxide or silicon dioxide. It is characterized by that.
好適な実施例に係る請求項１０に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記金属メッシュは、拡散接合により前記第２チタン金属板体と結合させることを特徴とする。 The present invention according to claim 10 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the metal mesh is coupled to the second titanium metal plate by diffusion bonding. It is characterized by making it.
好適な実施例に係る請求項１１に記載の本発明は、請求項１０に記載の製造方法において、前記拡散接合は、温度６５０℃〜８５０℃、作業時間３０min〜９０minで行うことを特徴とする。 The present invention according to claim 11 according to a preferred embodiment is characterized in that, in the manufacturing method according to claim 10, the diffusion bonding is performed at a temperature of 650 ° C. to 850 ° C. and an operation time of 30 min to 90 min. .
好適な実施例に係る請求項１２に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記第１、２チタン金属板体を互いに対向させて覆い被せると共に、エッジ部封止を行い、使用するレーザー溶接の波長を１０３０nm、レーザー出力を１００〜５００Ｗとし、真空環境１０ -2 torr内で行うことを特徴とする。 According to a twelfth aspect of the present invention according to a preferred embodiment, in the manufacturing method according to any one of the first to fifth aspects, the first and second titanium metal plates are covered with each other so as to face each other. The edge portion is sealed, the wavelength of laser welding to be used is 1030 nm, the laser output is 100 to 500 W, and it is performed in a vacuum environment of 10 −2 torr .
好適な実施例に係る請求項１３に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記金属メッシュは、チタン素材又はステンレス鋼或いは銅若しくはアルミニウム又はその他の金属材質のいずれかとすることを特徴とする。 The present invention according to claim 13 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the metal mesh is made of titanium material, stainless steel, copper, aluminum, or other materials. It is characterized by being one of metal materials .
好適な実施例に係る請求項１４に記載の本発明は、請求項１〜５のいずれか１項に記載の製造方法において、前記同時に２枚の金属メッシュが各々チタン素材及びステンレス鋼素材の各々１枚を選択し、また２枚の金属メッシュを互いに重ねて該第１、２チタン金属板体の間に設けることを特徴とする。
好適な実施例に係る請求項１５に記載の本発明は、請求項２又は３又は４又は５に記載の製造方法において、前記雰囲気炉が４００℃〜７００℃まで加熱し、その時間を３０〜９０分間とすることを特徴とする。
好適な実施例に係る請求項１６に記載の本発明は、前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、チタン材表面に微細なチタン鋭錐石の二酸化チタンナノロッドを生成させる処理であることを特徴とする。
The present invention according to claim 14 according to a preferred embodiment is the manufacturing method according to any one of claims 1 to 5 , wherein the two metal meshes are respectively a titanium material and a stainless steel material. One sheet is selected, and two metal meshes are overlapped with each other and provided between the first and second titanium metal plates .
The present invention according to claim 15 according to a preferred embodiment is the manufacturing method according to claim 2, 3 or 4 or 5, wherein the atmosphere furnace is heated to 400 ° C to 700 ° C, and the time is set to 30 to 30 ° C. It is characterized by being 90 minutes.
According to a sixteenth aspect of the present invention, in the present invention, the surface modification treatment for the first and second titanium metal plates and the metal mesh is performed with a titanium dioxide nanorod made of fine titanium apyrite on a titanium material surface. It is the process which produces | generates.
本発明で開示する放熱ユニットの製造方法によるときは、純チタンに対して塑性加工を行うことができないという従来の欠陥を改善でき、更に極薄で可撓性を有し、チタンの特性である軽量で強度のある放熱ユニットの製造方法を提供できる。即ち、前記第１、２チタン金属板体に対して熱処理を行うことによりプレス加工等の塑性加工が可能となる。プレス加工によって第１チタン金属板体に形成された前記複数の凸部は、作動流体との間の熱伝導面積を増大させ、作動流体を凝縮する効果や補強効果を高めると共に、毛管力を生じさせて作動流体の流動を促進し、また、第２チタン金属板体に設けた前記金属メッシュも作動流体との間の熱伝導面積を増大させるため、第２チタン金属板体による吸熱効果を向上させることができる。また、本発明の製造方法において、前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側の前記金属メッシュ中に作動流体を充填し、この作動流体を前記金属メッシュに吸着させることにより、以下に説明する作用効果を奏する。 According to the method for manufacturing a heat dissipation unit disclosed in the present invention, it is possible to improve the conventional defect that plastic processing cannot be performed on pure titanium, and it is extremely thin and flexible, which is a characteristic of titanium. A method for manufacturing a lightweight and strong heat dissipation unit can be provided. That is, by performing heat treatment on the first and second titanium metal plate bodies, plastic working such as press working becomes possible. The plurality of convex portions formed on the first titanium metal plate by press working increase the heat conduction area between the working fluid, enhance the effect of condensing the working fluid and the reinforcing effect, and generate capillary force. The flow of working fluid is promoted, and the metal mesh provided on the second titanium metal plate also increases the heat conduction area between the working fluid and the heat absorption effect of the second titanium metal plate is improved. Can be made. In the manufacturing method of the present invention, the first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh on one side of the second titanium metal plate, By adsorbing the fluid to the metal mesh, the following effects can be obtained.
本発明の上記目的及びその構成と機能上の特徴を、添付図面の好ましい実施例をもって説明する。 The above-mentioned object of the present invention and the features and construction thereof will be described with reference to the preferred embodiments of the accompanying drawings.
図１、図２を参照すると、これらは本発明の製造方法により製造された実施例１に係る放熱ユニットの立体分解図及び組立断面図である。図に示すように、本発明の放熱ユニット１は、第１チタン金属板体１１と第２チタン金属板体１２とを含む。
前記第１チタン金属板体１１は、第１平面１１１と第２平面１１２を備え、前記第１平面１１１は複数の凸部１１３（図２）を有し、それらの凸部１１３はプレス加工により形成され、前記第２平面１１２が凝縮側（放熱側）となる。
Referring to FIGS. 1 and 2, these are a three-dimensional exploded view and an assembled cross-sectional view of a heat dissipation unit according to the first embodiment manufactured by the manufacturing method of the present invention. As shown in the figure, the heat dissipation unit 1 of the present invention includes a first titanium metal plate 11 and a second titanium metal plate 12.
The first titanium metal plate 11 includes a first plane 111 and a second plane 112, and the first plane 111 has a plurality of projections 113 (FIG. 2), and these projections 113 are formed by press working. The second plane 112 is formed on the condensation side (heat radiation side).
前記第２チタン金属板体１２は、第３平面１２１と第４平面１２２とを備え、前記第３平面１２１には金属メッシュ１２３（図２）を設け、これらの第１、２チタン金属板体１１、１２が互いに対向して覆い被せられることによって密閉ハウジング１３が画成されるようになっている。これらの第１、２チタン金属板体１１、１２を真空環境内に設置し、前記第２チタン金属板体１２の一側に結合された前記金属メッシュ１２３中に作動流体（図示せず）を充填し、前記作動流体を前記金属メッシュ１２３に吸着させる。この場合前記第４平面１２２が吸熱側となる。尚、図示した例においては、前記作動流体を前記金属メッシュ１２３に充填する際に、口部１１６、１２６を利用することもできる。 The second titanium metal plate 12 includes a third plane 121 and a fourth plane 122. The third plane 121 is provided with a metal mesh 123 (FIG. 2). The sealed housing 13 is defined by covering 11 and 12 facing each other. These first and second titanium metal plates 11 and 12 are placed in a vacuum environment, and a working fluid (not shown) is placed in the metal mesh 123 coupled to one side of the second titanium metal plate 12. The working fluid is filled and the metal mesh 123 is adsorbed. In this case, the fourth plane 122 is the heat absorption side. In the illustrated example, the openings 116 and 126 can be used when the working fluid is filled in the metal mesh 123.
図３を参照すると、同図は本発明の製造方法により製造された実施例２に係る放熱ユニットの組立断面図である。図に示すように、本実施例は前記実施例１の一部構造とその技術的特徴が同じであるため、ここではその説明は省略する。本実施例と前記実施例１の相違点は、本実施例においては、その凸部１１３の表面に第１コーティング層１１４を有し、また前記金属メッシュ１２３（図５参照）と前記第３平面１２１の間に第２コーティング層１２４を有し、前記金属メッシュ１２３表面に第３コーティング層１２５を有し、これらの第１、２、３コーティング層１１４、１２４、１２５が親水性コーティング層又は疎水性コーティング層のうちのいずれかの特性を持ち、前記親水性コーティング層は二酸化チタン或いは二酸化ケイ素のうちのいずれか（図６、図７、図８）とすることである。 Referring to FIG. 3, FIG. 3 is an assembled cross-sectional view of a heat dissipation unit according to a second embodiment manufactured by the manufacturing method of the present invention. As shown in the drawing, the present embodiment has the same technical features as the partial structure of the first embodiment, and therefore the description thereof is omitted here. The difference between this embodiment and the first embodiment is that, in this embodiment, the first coating layer 114 is provided on the surface of the convex portion 113, and the metal mesh 123 (see FIG. 5) and the third plane are provided. A second coating layer 124 is provided between the first and second metal layers 123. A third coating layer 125 is provided on the surface of the metal mesh 123. These first, second, and third coating layers 114, 124, and 125 are hydrophilic coating layers or hydrophobic coating layers. The hydrophilic coating layer has one of the characteristics of the hydrophilic coating layer, and the hydrophilic coating layer is either titanium dioxide or silicon dioxide (FIGS. 6, 7, and 8).
前記第１、２、３コーティング層１１４、１２４、１２５は、選択的に親水性又は疎水性の特性を持たせるように選定し、主に区域及び用途に分け、例えば第１平面１１１の第１コーティング層１１４については親水性コーティング層或いは疎水性コーティング層のうちのいずれかを選定できる。前記第３平面１２１上の第２コーティング層１２４については親水性コーティング層を選択し、その主な目的は、吸水力及び第３平面１２１と金属メッシュ１２３間の結合力を増すことである。前記金属メッシュ１２３上の第３コーティング層１２５については親水性コーティング層を選定し、それは主に含水量を増加すると共に、液体（作動流体）の還流の効果を増すことである。 The first, second, and third coating layers 114, 124, and 125 are selected so as to selectively have hydrophilic or hydrophobic characteristics, and are mainly divided into areas and applications. For the coating layer 114, either a hydrophilic coating layer or a hydrophobic coating layer can be selected. For the second coating layer 124 on the third plane 121, a hydrophilic coating layer is selected, and its main purpose is to increase the water absorption force and the bonding force between the third plane 121 and the metal mesh 123. For the third coating layer 125 on the metal mesh 123, a hydrophilic coating layer is selected, which is mainly to increase the water content and increase the effect of liquid (working fluid) reflux.
前記第１、２チタン金属板体１１、１２としては、商業用純チタンを選択し、塑性加工前に事前熱処理を経ることにより塑性加工を行うことができる。 As said 1st, 2nd titanium metal plate bodies 11 and 12, plastic processing can be performed by selecting commercial pure titanium and going through prior heat processing before plastic processing.
図４を参照すると、同図は本発明の製造方法により製造された実施例３に係る放熱ユニットの組立断面図である。図に示すように、本実施例は前記実施例１の一部構造とその技術的特徴が同じであるため、ここではその説明を省略する。本実施例と前記実施例１の相違点は、本実施例においては、前記第１チタン金属板体１１の第２平面１１２上に、第１平面１１１にある凸部１１３と対応する部位に凹部１１５が設けられ、これらをエンボス加工方式で形成した構造とする点である。このように第１チタン金属板体１１の第２平面１１２上に複数の凹部１１５を設けることによって、第２平面１１２の凝縮（放熱）効果を高めることができる。 Referring to FIG. 4, FIG. 4 is an assembled cross-sectional view of a heat dissipation unit according to Example 3 manufactured by the manufacturing method of the present invention. As shown in the figure, the present embodiment has the same technical features as the partial structure of the first embodiment, and therefore the description thereof is omitted here. The difference between the present embodiment and the first embodiment is that, in this embodiment, a concave portion is formed on the second flat surface 112 of the first titanium metal plate 11 at a portion corresponding to the convex portion 113 on the first flat surface 111. 115 is provided, and these are formed by an embossing method. Thus, by providing the plurality of recesses 115 on the second plane 112 of the first titanium metal plate 11, the condensation (heat radiation) effect of the second plane 112 can be enhanced.
図９を参照すると、同図は本発明の製造方法により製造された実施例１に係る放熱ユニットの製造方法のステップフローチャートである。図１、図２、図３、図４、図５、図６、図７、図８を一緒に参照して説明する。図に示すように、本発明に係る放熱ユニットの製造方法は、次のステップＳ１〜Ｓ６を含む。 Referring to FIG. 9, this figure is a step flow chart of the manufacturing method of the heat dissipation unit according to the first embodiment manufactured by the manufacturing method of the present invention. 1, 2, 3, 4, 5, 6, 7, and 8 will be described together. As shown in the figure, the method for manufacturing a heat dissipation unit according to the present invention includes the following steps S1 to S6.
ステップＳ１：第１チタン金属板体及び第２チタン金属板体を用意して、これらの事前洗浄作業を行う。
製造加工しようとする第１、２チタン金属板体１１、１２に対し事前洗浄作業を行う。洗浄作業は、まずアセトンで拭き取ってから、超音波洗浄機により脱イオン水を用いて洗い流し、最後に窒素ガスで第１、２チタン金属板体１１、１２の表面を乾燥させる。前記第１、２チタン金属板体１１、１２は一般的なチタン合金ではなく、商業用純チタンを選択して用いる。純チタンを選定する利点は、より高比強度（引張強さ／密度）であり、純チタンの引張強さは銅より優れ、また純チタン（Ｔｉ）の密度（４．５４g/cm3）は、銅（Ｃｕ）の密度（８．９６g/cm3）の約２分の１であるため、同じ体積において、高比強度の純チタン（Ｔｉ）が、より一層の強度と軽量化を兼ね備えることができる点である。
Step S1: A first titanium metal plate and a second titanium metal plate are prepared, and these preliminary cleaning operations are performed.
Prior cleaning work is performed on the first and second titanium metal plates 11 and 12 to be manufactured and processed. The cleaning operation is performed by first wiping with acetone, and then rinsing with deionized water using an ultrasonic cleaner, and finally drying the surfaces of the first and second titanium metal plates 11 and 12 with nitrogen gas. The first and second titanium metal plates 11 and 12 are not a general titanium alloy but are selected from commercial pure titanium. The advantage of selecting pure titanium is higher specific strength (tensile strength / density), the tensile strength of pure titanium is superior to copper, and the density of pure titanium (Ti) (4.54 g / cm 3 ) is Since the density of copper (Cu) is about one half of the density (8.96 g / cm 3 ), high specific strength pure titanium (Ti) has both higher strength and light weight in the same volume. It is a point that can be.
純チタンは、常温下でその表面に厚さ数百Å（１Å＝１０-10ｍ）の安定性が高く、付着力も強い一層の酸化膜（ＴｉＯ2、Ｔｉ2Ｏ3、ＴｉＯ）を形成し、且つ損傷後も直ちに再生できるという特性を有し、このことは、チタンが強い安定化頃向を有する金属であることを示している。よって、チタンの耐食能力は、銅（Ｃｕ）よりはるかに優れ、ベイパーチャンバーの各種環境における運用に有利にある。更にまた、チタンは、湿潤環境、海水、塩素含有溶液、次亜塩素酸、硝酸、クロム酸及び一般的な酸化性酸の環境下においても優れた耐腐食特性を持っている。 Pure titanium forms a single oxide film (TiO 2 , Ti 2 O 3 , TiO) with a high stability and several hundreds of Å (1Å = 10 -10 m) thick and strong adhesion at room temperature. In addition, it has the property that it can be regenerated immediately after damage, which indicates that titanium is a metal with a strong stabilization tendency. Therefore, the corrosion resistance of titanium is far superior to copper (Cu), which is advantageous for operation of the vapor chamber in various environments. Furthermore, titanium has excellent corrosion resistance in wet environments, seawater, chlorine-containing solutions, hypochlorous acid, nitric acid, chromic acid and general oxidizing acids.
ステップＳ２：前記第１、２チタン金属板体に対して以下の熱処理を行う。
前記第１、２チタン金属板体１１、１２を雰囲気炉（図示せず）に入れ、該雰囲気炉内にアルゴンガスを吹き込むと共に４００℃〜７００℃まで加熱し、その加熱時間を３０〜９０分間とする。その主な目的は第１、２チタン金属板体１１、１２に塑性加工ができるようにすることである。
Step S2: The following heat treatment is performed on the first and second titanium metal plates.
The first and second titanium metal plates 11 and 12 are put in an atmosphere furnace (not shown), and argon gas is blown into the atmosphere furnace and heated to 400 ° C. to 700 ° C., and the heating time is 30 to 90 minutes. And Its main purpose is to enable plastic working of the first and second titanium metal plates 11 and 12.
ステップＳ３：前記第１チタン金属板体にプレス加工を行って複数の凸部を形成する。
機械加工としてのプレス加工により、前記第１チタン金属板体１１の一側に複数の凸部１１３を形成させ、それらの凸部１１３が作動流体を凝縮する効果及び支持強度の高い構造体とする効果等を有するようにする。
Step S3: A plurality of convex portions are formed by pressing the first titanium metal plate.
A plurality of convex portions 113 are formed on one side of the first titanium metal plate 11 by press working as machining, and the convex portions 113 condense the working fluid and have a high support strength. It has an effect.
ステップＳ４：前記第２チタン金属板体の一側に金属メッシュを結合する。
拡散接合方式によって、該第２チタン金属板体１２の第３平面１２１に金属メッシュ１２３を結合するステップであり、その場合、前記第２チタン金属板体１２［純チタンのチタン放熱板（Ｔｉ−ＶＣ）］と金属メッシュの拡散接合温度は６５０℃〜８５０℃で、プロセス雰囲気は正圧の高純アルゴンガス（Ａｒ）或いは高真空環境（１０-4〜１０-6torr）としなければならず、プロセス圧力は１ｋｇ〜５ｋｇで、プロセス時間は３０min〜９０minとする。純チタンは、化学的に非常に活性な金属であり、８８３℃で相変態（相転移温度／Phase Transformation Temperature）を呈し、即ち、８８３℃以上ではβ相となってＢＣＣ（body-centered cubic;体心立方格子）結晶構造を有し、８８３℃以下ではα相となってＨＣＰ（六方最密充填構造）結晶構造を有する。
Step S4: A metal mesh is bonded to one side of the second titanium metal plate.
In this case, the metal mesh 123 is coupled to the third plane 121 of the second titanium metal plate 12 by diffusion bonding. In this case, the second titanium metal plate 12 [pure titanium titanium heat sink (Ti- VC)] and the metal mesh have a diffusion bonding temperature of 650 ° C. to 850 ° C., and the process atmosphere must be a positive high pure argon gas (Ar) or a high vacuum environment (10 −4 to 10 −6 torr). The process pressure is 1 kg to 5 kg, and the process time is 30 min to 90 min. Pure titanium is a chemically very active metal and exhibits a phase transformation (phase transformation temperature) at 883 ° C., that is, a β-phase at 883 ° C. or higher, and a body-centered cubic; It has a (body-centered cubic lattice) crystal structure and has an α phase at 883 ° C. or lower and an HCP (hexagonal close-packed structure) crystal structure.
純チタンは、高温環境において、多くの元素及び化合物と反応を起こし且つ材料の相変化を発生することができ、例えば空気中のチタンは、２５０℃で水素吸蔵を開始し、５００℃で酸素吸蔵を開始し、６００℃で窒素吸蔵を開始する。温度が高くなるにつれチタンのガスを吸蔵する能力が更に強くなり、水素（Ｈ）、酸素（Ｏ）、炭素（Ｃ）、窒素（Ｎ）がチタンと反応を起こすことで、侵入型固溶体を材料に形成させ、機械的性質が変化し、更に欠陥が生じ、ＴｉＯ2、ＴｉＣ、ＴｉＮ及びＴｉＨ2等の関連化合物を形成し、材料性質に対して不良な影響（硬脆化）を及ぼす。そのためプロセス温度、プロセス雰囲気（環境制御）は、チタン放熱板の製造関連の熱工程にとって極めて重要なことである。 Pure titanium can react with many elements and compounds in a high temperature environment and can cause a phase change of the material. For example, titanium in the air starts storing hydrogen at 250 ° C. and stores oxygen at 500 ° C. And nitrogen occlusion is started at 600 ° C. As the temperature rises, the ability to occlude titanium gas becomes stronger, and hydrogen (H), oxygen (O), carbon (C), and nitrogen (N) react with titanium, making it an interstitial solid solution. The mechanical properties change, further defects occur, and related compounds such as TiO 2 , TiC, TiN and TiH 2 are formed, and the material properties are adversely affected (hard embrittlement). Therefore, the process temperature and the process atmosphere (environmental control) are extremely important for the thermal process related to the manufacture of the titanium heat sink.
従来の銅放熱板（Ｃｕ−ＶＣ）においては、金属メッシュの拡散接合温度は７５０℃〜９５０℃で、プロセス雰囲気が１５％Ｈ2＋８５％Ｎ2、プロセス圧力が１ｋｇ〜５ｋｇ、プロセス時間が４０min〜６０minで行われていた。その場合、高温プロセスにおいてチタンのような相変態挙動は起こさないが、結晶粒が加熱により成長、粗大化され、機械的性質の大幅な低下が起こってしまう（軟らかくなる）。 In the conventional copper heat sink (Cu-VC), the diffusion bonding temperature of the metal mesh is 750 ° C. to 950 ° C., the process atmosphere is 15% H 2 + 85% N 2 , the process pressure is 1 kg to 5 kg, and the process time is 40 min. It was done in ~ 60min. In that case, phase transformation behavior like titanium does not occur in a high-temperature process, but crystal grains grow and become coarse due to heating, resulting in a significant decrease in mechanical properties (softening).
ステップＳ５：前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させる。即ち、より具体的には、本プロセスにおいては、前記１、２チタン金属板体を真空環境１０-2torr内に設置し、該第２チタン金属板体の金属メッシュを有する一側に対し作動流体を充填し、該第２チタン金属板体上の金属メッシュに作動流体を完全に吸着させる。 Step S5: installing the first and second titanium metal plates in a vacuum environment, filling the metal mesh bonded to one side of the second titanium metal plate with the working fluid, Adsorb to metal mesh. More specifically, in the present process, the above-mentioned 1,2 titanium metal plate is placed in a vacuum environment of 10 -2 torr and is operated on one side having the metal mesh of the second titanium metal plate. The fluid is filled and the working fluid is completely adsorbed on the metal mesh on the second titanium metal plate.
ステップＳ６：前記第１チタン金属板１１の凸部１１３を有する一側と前記第２チタン金属板体１２の金属メッシュ１２３を有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行う。 Step S6: One side having the convex portion 113 of the first titanium metal plate 11 and one side having the metal mesh 123 of the second titanium metal plate 12 are covered so as to face each other, and the first is made by laser welding. The edge part sealing of a 2 titanium metal plate body is performed.
即ち、前記第１、２チタン金属板体１１、１２の第１、３平面１１１、１２１（凸部１１３及び金属メッシュ１２３を有する一側）を互いに対向させて覆い被せた後、該第１、２チタン金属板体１１、１２のエッジ部にレーザー溶接方法によりエッジ部封止を行う。その際、図１に示した例においては、口部１１６、１２６についても封止するようにする。 That is, after covering the first and third planes 111 and 121 (one side having the convex portion 113 and the metal mesh 123) of the first and second titanium metal plate bodies 11 and 12, facing each other, The edge portions of the two titanium metal plates 11 and 12 are sealed by a laser welding method. At that time, in the example shown in FIG. 1, the mouth portions 116 and 126 are also sealed.
前記エッジ部封止工程では、レーザー溶接技術を使用する。レーザー励起源はディスク型（Disk）固体Ｙｂ：ＹＡＧ（イットリウム・アルミニウム・ガーネット）とし、レーザー波長を１０３０nm、レーザー出力を１００〜５００Ｗ（材料の厚さに応じて決定）とし、これを真空環境１０-2torr内で行う。 In the edge sealing step, a laser welding technique is used. The laser excitation source is a disk solid Yb: YAG (yttrium, aluminum, garnet), the laser wavelength is 1030 nm, the laser output is 100 to 500 W (determined according to the thickness of the material), and this is a vacuum environment 10 Perform within -2 torr.
レーザー溶接の利点は、エネルギーを集中でき（小さなエリアで溶接を行うことができ、付近材料に影響を及ぼさない）、作業時間も短かく（素子全体の機械的性質を変えにくい）、超清浄化溶接（何らの溶接材も必要としない）が可能で、迅速な自動化生産が比較的容易に実現できることである。 The advantages of laser welding are that it can concentrate energy (welding can be done in a small area and does not affect nearby materials), has a short working time (hard to change the mechanical properties of the entire device), and is super-clean. Welding (no welding material required) is possible, and rapid automated production can be realized relatively easily.
図１０を参照すると、同図は本発明の製造方法により製造された実施例２に係る放熱ユニットの製造方法のステップフローチャートである。図１、図２、図３、図４、図５、図６、図７、図８を一緒に参照しながら説明する。図に示すように、本発明の実施例２に係る放熱ユニットの製造方法は、まず次のステップＳ１〜Ｓ６を含む。即ち、
第１チタン金属板体及び第２チタン金属板体を用意し、これらの事前洗浄作業を行うステップＳ１と、
前記第１、２チタン金属板体に対し熱処理を行うステップＳ２と、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップＳ３と、
該第２チタン金属板体の一側に金属メッシュを結合するステップＳ４と、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップＳ５と、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップＳ６と、を含む。
Referring to FIG. 10, this figure is a step flowchart of a method for manufacturing a heat dissipation unit according to the second embodiment manufactured by the manufacturing method of the present invention. 1, 2, 3, 4, 5, 6, 7, and 8 will be described together. As shown in the figure, the method for manufacturing a heat dissipation unit according to the second embodiment of the present invention first includes the following steps S1 to S6. That is,
Step S1 of preparing a first titanium metal plate and a second titanium metal plate and performing these pre-cleaning operations;
Performing a heat treatment on the first and second titanium metal plates,
Step S3 for forming a plurality of convex portions by pressing the first titanium metal plate,
Connecting a metal mesh to one side of the second titanium metal plate,
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step S5;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. And step S6 for performing edge sealing.
本実施例は、前記実施例１の一部ステップと同じであるため、ここではその説明を省略する。本実施例と前記実施例１の相違点を説明すれば、本実施例では前記第２チタン金属板体の一側に金属メッシュを結合するステップＳ４の後に、更に、前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップＳ７を有することである。 Since the present embodiment is the same as some steps of the first embodiment, the description thereof is omitted here. The difference between the present embodiment and the first embodiment will be described. In the present embodiment, after the step S4 for joining a metal mesh to one side of the second titanium metal plate, the first and second titanium metals are further provided. And performing a surface modification process on the plate body and the metal mesh to form at least one coating layer on the surfaces of the first and second titanium metal plate bodies and the surface of the metal mesh.
前記第１、２チタン金属板体に対する前記表面改質処理は、下記の４つの方式のいずれかを選択して行うことができる。
第１方式：該第１、２チタン金属板体１１、１２を雰囲気炉（図示せず）に入れ、該雰囲気炉内を真空手段で吸引すると共に４００℃〜７００℃まで加熱し、その加熱時間を３０〜９０分間とし、プロセス雰囲気を正圧の純アルゴンガス（Ａｒ）とし、該第１、２チタン金属板体１１、１２の表面に過熱還元を発生させ、このプロセスはいずれもプロセス雰囲気内の微量酸素を制御してチタン材表面に微細なチタン鋭錐石（Anatase）の二酸化チタンナノロッド（ＴｉＯ2 nano-rods）を生成させ、その構造は良好な親水性を有し、且つ時効性も長い（１〜２週間）。ただし時間の経過及び環境の影響（湿気）に伴い、親水性の効果が低下する。その場合、完成品にＵＶ光を照射し、その照射時間を約２０min〜６０minとする（ＵＶ光の強弱に応じて決定）と、光触媒作用により親水性が回復する。
第２方式：該第１、２チタン金属板体１１、１２を雰囲気炉に入れ、該雰囲気炉内を真空手段で吸引すると共に４００℃〜７００℃まで加熱し、その加熱時間を３０〜９０分間とし、該第１、２チタン金属板体１１、１２の表面に過熱還元を発生させ、このプロセスはいずれもプロセス雰囲気内の微量酸素を制御してチタン材表面に微細なチタン鋭錐石（Anatase）の二酸化チタンナノロッド（ＴｉＯ2 nano-rods）を生成させ、その構造は良好な親水性を有し、且つ時効性も長い（１〜２週間）。ただし時間の経過及び環境の影響（湿気）に伴い、親水性の効果が低下する。その場合、完成品にＵＶ光を照射し、その照射時間を約２０min〜６０minとする（ＵＶ光の強弱に応じて決定）と、光触媒作用により親水性が回復する。
第３方式：ゾル−ゲル法（Sol-gel）、即ち、ゾル−ゲルコーティング（Sol-gel coating）により行う。主に第２チタン金属板体１２表面の金属メッシュ１２３について処理を行う。まず一層の結晶型二酸化ケイ素（ＳｉＯ2）で被覆して基材層とし、８０℃オーブンで乾燥した後、次にその上に一層のチタン鋭錐石（Anatase）の二酸化チタン（ＴｉＯ2）をコーティングし、そして熱処理コーティング層の緻密化・焼結処理（Fully dense sintering treatment）を行うことによりＳｉＯ2／ＴｉＯ2複合膜を形成する。前記緻密化・焼結処理の温度を４００℃〜７００℃とし、焼結時間を３０〜９０ｍｉｎとし、プロセス雰囲気を正圧の純アルゴンガス（Ａｒ）とする。ＳｉＯ2／ＴｉＯ2複合膜の親水性は良好で、且つ時効性も長い（１〜２週間）。ただし時間の経過及び環境の影響（湿気）に伴い、親水性の効果が低下する。その場合、完成品にＵＶ光を照射し、その照射時間を約２０min〜６０minとする（ＵＶ光の強弱に応じて決定）と、ＳｉＯ2／ＴｉＯ2複合膜の表層の光触媒作用により親水性が回復する。
第４方式：ゾル−ゲル法（Sol-gel）、即ち、ゾル−ゲルコーティング（Sol-gel coating）により行う。主に第２チタン金属板体１２表面の金属メッシュ１２３について処理を行う。まず一層の結晶型二酸化ケイ素（ＳｉＯ2）で被覆して基材層とし、８０℃オーブンで乾燥した後、次にその上に一層のチタン鋭錐石（Anatase）の二酸化チタン（ＴｉＯ2）をコーティングし、そして熱処理コーティング層の緻密化・焼結処理（Fully dense sintering treatment）を行うことによりＳｉＯ2／ＴｉＯ2複合膜を形成する。前記緻密化・焼結処理の温度を４００℃〜７００℃とし、焼結時間を３０〜９０minとし、プロセス環境を真空吸引とする。ＳｉＯ2／ＴｉＯ2複合膜の親水性は良好で、且つ時効性も長い（１〜２週間）。ただし時間の経過及び環境の影響（湿気）に伴い、親水性の効果が低下する。その場合、完成品にＵＶ光を照射し、その照射時間を約２０min〜６０minとする（ＵＶ光の強弱に応じて決定）と、ＳｉＯ2／ＴｉＯ2複合膜の表層の光触媒作用により親水性が回復する。
The surface modification treatment for the first and second titanium metal plates can be performed by selecting one of the following four methods.
First method: The first and second titanium metal plates 11 and 12 are placed in an atmosphere furnace (not shown), the inside of the atmosphere furnace is sucked by vacuum means and heated to 400 ° C. to 700 ° C., and the heating time For 30 to 90 minutes, and the process atmosphere is pure argon gas (Ar) under a positive pressure, and overheating reduction is generated on the surfaces of the first and second titanium metal plates 11 and 12, both of which are within the process atmosphere. Titanium dioxide nanorods (TiO 2 nano-rods) of fine titanium anatite (TiO 2 nano-rods) are generated on the titanium material surface by controlling the trace amount of oxygen, and the structure has good hydrophilicity and aging Long (1-2 weeks). However, with the passage of time and the influence of the environment (humidity), the hydrophilic effect decreases. In that case, when the finished product is irradiated with UV light and the irradiation time is set to about 20 min to 60 min (determined according to the intensity of the UV light), the hydrophilicity is restored by the photocatalytic action.
Second method: The first and second titanium metal plates 11 and 12 are put in an atmosphere furnace, the inside of the atmosphere furnace is sucked by vacuum means and heated to 400 ° C. to 700 ° C., and the heating time is 30 to 90 minutes. In this process, superheat reduction is generated on the surfaces of the first and second titanium metal plates 11 and 12, and both of these processes control a minute amount of oxygen in the process atmosphere to form fine titanium pyrite (Anatase) on the surface of the titanium material. ) Titanium dioxide nanorods (TiO 2 nano-rods), the structure has good hydrophilicity and long aging (1-2 weeks). However, with the passage of time and the influence of the environment (humidity), the hydrophilic effect decreases. In that case, when the finished product is irradiated with UV light and the irradiation time is set to about 20 min to 60 min (determined according to the intensity of the UV light), the hydrophilicity is restored by the photocatalytic action.
Third method: Sol-gel method (Sol-gel coating). Processing is mainly performed on the metal mesh 123 on the surface of the second titanium metal plate 12. First, a single layer of crystalline silicon dioxide (SiO 2 ) is coated to form a base layer, dried in an oven at 80 ° C., and then a layer of titanium anatase titanium dioxide (TiO 2 ) is applied thereon. The SiO 2 / TiO 2 composite film is formed by coating and performing a fully dense sintering treatment of the heat-treated coating layer. The densification / sintering temperature is set to 400 ° C. to 700 ° C., the sintering time is set to 30 to 90 min, and the process atmosphere is set to a pure argon gas (Ar) with a positive pressure. The SiO 2 / TiO 2 composite film has good hydrophilicity and long aging (1 to 2 weeks). However, with the passage of time and the influence of the environment (humidity), the hydrophilic effect decreases. In that case, when the finished product is irradiated with UV light and the irradiation time is set to about 20 min to 60 min (determined according to the intensity of the UV light), hydrophilicity is obtained by the photocatalytic action of the surface layer of the SiO 2 / TiO 2 composite film. Recover.
4th system: It carries out by the sol-gel method (Sol-gel), ie, sol-gel coating (Sol-gel coating). Processing is mainly performed on the metal mesh 123 on the surface of the second titanium metal plate 12. First, a single layer of crystalline silicon dioxide (SiO 2 ) is coated to form a base layer, dried in an oven at 80 ° C., and then a layer of titanium anatase titanium dioxide (TiO 2 ) is applied thereon. The SiO 2 / TiO 2 composite film is formed by coating and performing a fully dense sintering treatment of the heat-treated coating layer. The densification / sintering temperature is set to 400 ° C. to 700 ° C., the sintering time is set to 30 to 90 min, and the process environment is set to vacuum suction. The SiO 2 / TiO 2 composite film has good hydrophilicity and long aging (1 to 2 weeks). However, with the passage of time and the influence of the environment (humidity), the hydrophilic effect decreases. In that case, when the finished product is irradiated with UV light and the irradiation time is set to about 20 min to 60 min (determined according to the intensity of the UV light), hydrophilicity is obtained by the photocatalytic action of the surface layer of the SiO 2 / TiO 2 composite film. Recover.
以上に述べた各実施例内の金属メッシュは、チタン素材又はステンレス鋼或いは銅若しくはアルミニウム又はその他の金属素材のいずれかを選択でき、或いは同時に２枚の金属メッシュが各々チタン素材及びステンレス鋼素材の各々１枚を選択し、また２枚の金属メッシュを互いに重ねて該第１、２チタン金属板体の間に設けることができる。 The metal mesh in each of the embodiments described above can be selected from any of titanium material, stainless steel, copper, aluminum, or other metal materials, or at the same time, the two metal meshes can be made of titanium material and stainless steel material, respectively. One each can be selected, and two metal meshes can be placed on top of each other and placed between the first and second titanium metal plates.
本発明は、銅に代替して主に商業用純チタンを基材材料として製造されるベイパーチャンバー等の放熱ユニットを提供するため、純チタンに対する加工（前記プレス加工等）によって前記放熱ユニットを製造可能なプロセスを提供するものである。即ち、本発明の製造方法によれば、銅の代替材料として純チタンを使用することが実現でき、純チタンの利点によって銅材料の欠点を改善できる。本発明は又、純チタンを、銅、アルミニウム、ステンレス鋼等の代替材料として使用可能とする以外に、更に、純チタン自体の質量が軽く、強度が高く、耐食性が高いという特性を利用して、携帯型デバイス又はモバイルデバイスの載置台座或いは載置中枠を製造でき、且つ同時に、載置構造と放熱構造とを直接一体的に統合して製造し、現行のモバイルデバイス又は携帯型デバイスの薄型化の構造に適合させ、載置機能を持つだけでなく放熱の効果も持たせることが可能な放熱ユニットの製造方法を提供し得る。特に、本発明の製造方法では、前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側の前記金属メッシュ中に作動流体を充填し、この作動流体を前記金属メッシュに吸着させるという構成を有する。 The present invention provides a heat-dissipating unit such as a vapor chamber manufactured mainly using commercial pure titanium as a base material instead of copper. Therefore, the heat-dissipating unit is manufactured by processing (such as pressing) on pure titanium. It provides a possible process. That is, according to the manufacturing method of the present invention, it is possible to use pure titanium as an alternative material for copper, and the disadvantages of the copper material can be improved by the advantages of pure titanium. In addition to making it possible to use pure titanium as an alternative material such as copper, aluminum, stainless steel, etc., the present invention further utilizes the characteristics that pure titanium itself has a light mass, high strength, and high corrosion resistance. A portable device or a mounting base of a mobile device or a mounting frame can be manufactured, and at the same time, a mounting structure and a heat dissipation structure are directly integrated and manufactured. It is possible to provide a method for manufacturing a heat radiating unit that can be adapted to a thin structure and have not only a mounting function but also a heat radiating effect. In particular, in the manufacturing method of the present invention, the first and second titanium metal plates are placed in a vacuum environment, and the working fluid is filled in the metal mesh on one side of the second titanium metal plate, The fluid is adsorbed on the metal mesh.
尚、薄型の純チタン材料は、形状記憶合金としての機能を持たせることにより、外力を受けて曲がって変形し、外力を除去した後、再び元の状態に戻ることができるため、直接純チタン材料をスマートウォッチと統合して使用したり、若しくは純チタン材料で直接腕時計ベルトとして製造でき、これにより放熱用及び支持用という用途を持たせ得るだけでなく、同時に又装着用とすることもでき、そのような放熱ユニットの製造方法として本発明は有効である。 In addition, thin pure titanium material has a function as a shape memory alloy, so it can bend and deform by receiving external force, and after removing the external force, it can return to its original state again. The material can be integrated with the smart watch or manufactured directly as a watch belt with pure titanium material, so that it can be used not only for heat dissipation and support, but also for wearing at the same time The present invention is effective as a method for manufacturing such a heat dissipation unit.
１ 放熱ユニット
１１ 第１チタン金属板体
１２ 第２チタン金属板体
１１１ 第１平面
１１２ 第２平面
１１３ 凸部
１１４ 第１コーティング層
１１５ 凹部
１１６ 口部
１２１ 第３平面
１２２ 第４平面
１２３ 金属メッシュ
１２４ 第２コーティング層
１２５ 第３コーティング層
１２６ 口部
１３ 密閉ハウジング
1 Heat Dissipation Unit 11 First Titanium Metal Plate 12 Second Titanium Metal Plate 111 First Plane 112 Second Plane 113 Convex 114 First Coating Layer 115 Concave 116 Mouth 121 Third Plane 122 Fourth Plane 123 Metal Mesh 124 Second coating layer 125 Third coating layer 126 Mouth 13 Sealed housing
Claims (16)
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、
を含むことを特徴とする放熱ユニットの製造方法。 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The manufacturing method of the thermal radiation unit characterized by including.
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内にアルゴンガスを吹き込むと共に、前記第１、２チタン金属板体の表面に過熱還元を発生させることを特徴とする放熱ユニットの製造方法。 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by putting the first and second titanium metal plates into an atmosphere furnace, blowing argon gas into the atmosphere furnace, method for producing a thermal unit release you, characterized in that to generate superheated reduced to 2 surface of a titanium metal plate member.
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内を真空手段で吸引すると共に、前記第１、２チタン金属板体の表面に過熱還元を発生させることを特徴とする放熱ユニットの製造方法。 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The surface modification treatment for the first and second titanium metal plate bodies and the metal mesh is performed by placing the first and second titanium metal plate bodies in an atmosphere furnace, sucking the atmosphere furnace by vacuum means, the method of thermal units release you, characterized in that to generate superheated reduction on the surface of 2 titanium metal plate member.
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、ゾル−ゲル法（Sol-Gel）により行い、その場合、前記第１、２チタン金属板体を雰囲気炉に入れ、前記雰囲気炉内を真空手段で吸引すると共に、前記第１、２チタン金属板体の表面にコーティング層を生成させることを特徴とする放熱ユニットの製造方法。 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by a sol-gel method (Sol-Gel). In that case, the first and second titanium metal plates are placed in an atmosphere furnace, the atmosphere furnace while sucking in vacuum means, the production method of the thermal unit release you, characterized in that to produce a coating layer on the first and second surface of the titanium metal plate member.
前記第１、２チタン金属板体に対し熱処理を行うステップと、
前記第１チタン金属板体にプレス加工を行って複数の凸部を形成するステップと、
前記第２チタン金属板体の一側に金属メッシュを結合するステップと、
前記第１、２チタン金属板体及び金属メッシュに対し表面改質処理を行い、前記第１、２チタン金属板体の表面及び前記金属メッシュの表面に少なくとも１つのコーティング層を形成するステップと、
前記第１、２チタン金属板体を真空環境内に設置し、前記第２チタン金属板体の一側に結合された前記金属メッシュ中に作動流体を充填し、前記作動流体を前記金属メッシュに吸着させるステップと、
前記第１チタン金属板体の凸部を有する一側と前記第２チタン金属板体の金属メッシュを有する一側を互いに対向させて覆い被せると共に、レーザー溶接によりこれら第１、２チタン金属板体のエッジ部封止を行うステップと、を含み、
前記第１、２チタン金属板体及び金属メッシュに対する前記表面改質処理は、ゾル−ゲル法（Sol-Gel）により行い、その場合、前記第１、２チタン金属板体を雰囲気炉に入れ、また前記雰囲気炉内にアルゴンガスを吹き込むと共に、前記第１、２チタン金属板体の表面にコーティング層を生成させることを特徴とする放熱ユニットの製造方法。 Preparing a first titanium metal plate and a second titanium metal plate, and performing these pre-cleaning operations;
Heat-treating the first and second titanium metal plates;
Pressing the first titanium metal plate to form a plurality of protrusions;
Bonding a metal mesh to one side of the second titanium metal plate;
Performing a surface modification treatment on the first and second titanium metal plates and the metal mesh, and forming at least one coating layer on the surfaces of the first and second titanium metal plates and the metal mesh;
The first and second titanium metal plates are placed in a vacuum environment, the working fluid is filled in the metal mesh bonded to one side of the second titanium metal plate, and the working fluid is put into the metal mesh. Adsorbing step;
One side of the first titanium metal plate body having the convex portion and one side of the second titanium metal plate body having the metal mesh are covered so as to face each other, and these first and second titanium metal plate bodies are covered by laser welding. Performing the edge sealing of
The surface modification treatment for the first and second titanium metal plates and the metal mesh is performed by a sol-gel method (Sol-Gel). In that case, the first and second titanium metal plates are placed in an atmosphere furnace, also with blowing argon gas to the atmosphere furnace, the production method of the thermal unit release you, characterized in that to produce a coating layer on the first and second surface of the titanium metal plate member.
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