JP6462729B2 - 荷電粒子線装置及び走査電子顕微鏡 - Google Patents

荷電粒子線装置及び走査電子顕微鏡 Download PDF

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Publication number
JP6462729B2
JP6462729B2 JP2016571793A JP2016571793A JP6462729B2 JP 6462729 B2 JP6462729 B2 JP 6462729B2 JP 2016571793 A JP2016571793 A JP 2016571793A JP 2016571793 A JP2016571793 A JP 2016571793A JP 6462729 B2 JP6462729 B2 JP 6462729B2
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Japan
Prior art keywords
charged particle
sample
particle beam
objective lens
detector
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Japanese (ja)
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JPWO2016121224A1 (ja
Inventor
和哉 熊本
和哉 熊本
定好 松田
定好 松田
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Matsusada Precision Inc
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Matsusada Precision Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2016571793A 2015-01-30 2015-12-03 荷電粒子線装置及び走査電子顕微鏡 Active JP6462729B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015017317 2015-01-30
JP2015017317 2015-01-30
PCT/JP2015/084072 WO2016121224A1 (ja) 2015-01-30 2015-12-03 荷電粒子線装置及び走査電子顕微鏡

Publications (2)

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JPWO2016121224A1 JPWO2016121224A1 (ja) 2017-12-07
JP6462729B2 true JP6462729B2 (ja) 2019-01-30

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JP2016571793A Active JP6462729B2 (ja) 2015-01-30 2015-12-03 荷電粒子線装置及び走査電子顕微鏡

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JP (1) JP6462729B2 (zh)
TW (1) TWI676204B (zh)
WO (1) WO2016121224A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018007455B4 (de) * 2018-09-21 2020-07-09 Carl Zeiss Multisem Gmbh Verfahren zum Detektorabgleich bei der Abbildung von Objekten mittels eines Mehrstrahl-Teilchenmikroskops, System sowie Computerprogrammprodukt

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1395201A (en) * 1972-09-04 1975-05-21 Nat Res Dev Magnetic lenses
JPH06181041A (ja) * 1992-12-15 1994-06-28 Hitachi Ltd 走査電子顕微鏡
US5981947A (en) * 1997-02-03 1999-11-09 Nikon Corporation Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods
JPH10223169A (ja) * 1997-02-03 1998-08-21 Nikon Corp 走査試料像表示装置，走査試料像表示方法，マーク検出方法および電子線露光装置
US6452175B1 (en) * 1999-04-15 2002-09-17 Applied Materials, Inc. Column for charged particle beam device
JP2005005178A (ja) * 2003-06-13 2005-01-06 Jeol Ltd 観察装置及び観察装置の制御方法
JP4581824B2 (ja) * 2005-05-06 2010-11-17 株式会社島津製作所 粒子線顕微鏡、及び真空分析装置用部材移動機構
JP4790511B2 (ja) * 2006-06-21 2011-10-12 日本電子株式会社 荷電粒子ビーム装置
JP6242745B2 (ja) * 2014-05-13 2017-12-06 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び当該装置を用いる検査方法
JP6204388B2 (ja) * 2015-01-30 2017-09-27 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡
JP6177817B2 (ja) * 2015-01-30 2017-08-09 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡

Also Published As

Publication number Publication date
TW201721702A (zh) 2017-06-16
TWI676204B (zh) 2019-11-01
JPWO2016121224A1 (ja) 2017-12-07
WO2016121224A1 (ja) 2016-08-04

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