JP6435005B2 - Joining member manufacturing apparatus and joining member manufacturing method - Google Patents

Description

  The present invention relates to a joining member manufacturing apparatus and a joining member manufacturing method, and more particularly to a joining member manufacturing apparatus and a joining member manufacturing method capable of accurately aligning two members.

  An optical semiconductor is configured by attaching a cap with a lens covering an element or the like to a stem on which a photoelectric conversion element or the like is mounted. As a device for welding the stem and cap, the stem is clamped to the lower electrode holder, the cap is clamped to the upper taper collet electrode, and the upper electrode moving table to which the upper taper collet electrode is fixed is moved vertically by the moving pressing means. In some cases, resistance welding is performed (see, for example, Patent Document 1).

JP 2003-154463 A

  High alignment accuracy is required for welding the stem and cap for optical semiconductors. To align the reference positions of the stem and the cap, at least one of the stem and the cap is moved in a direction having a component perpendicular to the direction in which the stem and the cap are pressed (the direction in which the axis extends). If the stem and the cap come into contact with each other during this alignment, not only the member may be damaged, but also when the clamped stem and / or cap is tilted, it becomes a joined product. May not be accurately aligned.

  An object of this invention is to provide the joining member manufacturing apparatus and the manufacturing method of a joining member which can perform position alignment of two members correctly in view of the above-mentioned subject.

  In order to achieve the above object, a joining member manufacturing apparatus according to a first aspect of the present invention includes, for example, a second joining member S and a lens Cn, as shown in FIGS. An apparatus 1 that manufactures a joining member D joined with a joining target member C; a first holding tool 10 that holds the first joining target member S; and a second that holds the second joining target member C. The second holder 20; the first holder 10 is moved relative to the second holder 20 in the reference plane H, and in a vertical direction V that is perpendicular to the reference plane H. A moving device 30 for reciprocating relatively; and a control device 60 for controlling the moving device 30; the second holding tool 20 is attached to the first joining target member S held by the first holding tool 10. A reference position grasping unit 26 for grasping an existing reference position through the lens Cn; Reference numeral 60 denotes a position when the first joining target member S held by the first holding tool 10 and the second joining target member C held by the second holding tool 20 are projected onto the reference plane H. Are adjusted using the reference position grasping unit 26 at a position separated by a predetermined distance in the vertical direction V, and then the moving device 30 is controlled so as to be brought close to and joined in the vertical direction V.

  With this configuration, when joining the first joining target member and the second joining target member, the position when projected onto the reference plane is adjusted at a position separated by a predetermined distance in the vertical direction. It is possible to avoid contact between the first joining target member and the second joining target member at the time of alignment, and appropriately grasp the reference position of the first joining target member through the lens. Thus, the two members can be accurately aligned.

  In addition, when the joining member manufacturing apparatus according to the second aspect of the present invention is shown with reference to FIG. 1, for example, in the joining member manufacturing apparatus 1 according to the first aspect of the present invention, the control device 60 includes: The reference position grasps the position when the first joining target member S held by one holding tool 10 and the second joining target member C held by the second holding tool 20 are projected onto the reference plane H. Before the alignment using the unit 26, the moving device 30 is controlled so as to temporarily stop the movement in the vertical direction V at a position separated by a predetermined distance in the vertical direction V.

  If comprised in this way, a 1st holding | maintenance member will be made to hold | maintain a 1st joining target member in the state which left | separated the predetermined distance from the 1st holding tool and the 2nd holding tool from the predetermined distance. The second member to be joined can be held, and the first member to be joined and / or the second member to be joined can be easily attached to the joining member manufacturing apparatus.

  Moreover, the joining member manufacturing apparatus according to the third aspect of the present invention is, for example, as shown in FIG. 1, in the joining member manufacturing apparatus 1 according to the second aspect of the present invention, A stopper 29 for bringing the portion 21 s into contact with the first holding tool 10 in the vertical direction V; the second holding tool 20 is held by the first holding tool 10 by contacting the stopper 29. The movement in the vertical direction V is stopped at a position where the first joining target member S and the second joining target member S held by the second holder 20 are separated by a predetermined distance.

  If comprised in this way, when match | combining in the position when a 1st joining target member and a 2nd joining target member are projected on a reference plane, it can avoid that both members contact by simple structure. .

  Moreover, the joining member manufacturing apparatus which concerns on the 4th aspect of this invention is the joining member manufacturing apparatus which concerns on the said 3rd aspect of the said invention, for example, as shown in FIG.4 and FIG.1, The stopper 29 is 2nd. The surface with which the holder 20 comes into contact is configured as an inclined surface 29 s that is inclined with respect to the reference plane H, and the position of the inclined surface 29 s with respect to the second holder 20 is configured to be movable. .

  If comprised in this way, while being able to adjust a predetermined distance with a simple structure, the contact of the 2nd holding tool and a stopper at the time of joining a 1st joining object member and a 2nd joining object member Can be easily released.

  Moreover, the joining member manufacturing apparatus which concerns on the 5th aspect of this invention is a joining member manufacturing apparatus which concerns on any one aspect of the said 1st aspect thru | or 4th aspect of this invention, as shown, for example in FIG. 1 includes a distance detection unit 45 that detects the distance between the first joining target member S and the second joining target member C in the vertical direction V.

  If comprised in this way, it can detect that the distance of a 1st joining object member and a 2nd joining object member shifted | deviated from predetermined | prescribed distance, a 1st joining object member and a 2nd joining object member It is possible to take countermeasures so that the distance between and becomes a predetermined distance.

  In order to achieve the above object, a method for manufacturing a joining member according to a sixth aspect of the present invention includes a first joining object member S and a lens Cn as shown in FIGS. 1, 2 and 5, for example. A method of manufacturing a joining member D joined with a second joining target member C having a first joining in which a distance in a vertical direction V that is a direction perpendicular to a reference plane H is a predetermined distance away A positioning step (in which the target member S and the second bonding target member C are aligned while confirming the reference position existing on the first bonding target member S through the lens Cn with respect to the position when projected onto the reference plane H). S4); After the alignment step (S4), a joining step (S6 to S8) for joining the first joining target member S and the second joining target member C close to each other in the vertical direction V is provided.

  With this configuration, when joining the first joining target member and the second joining target member, the position when projected onto the reference plane is adjusted at a position separated by a predetermined distance in the vertical direction. It is possible to avoid contact between the first joining target member and the second joining target member at the time of alignment, and appropriately grasp the reference position of the first joining target member through the lens. Thus, the two members can be accurately aligned.

  In addition, as a manufacturing method of the joining member which concerns on the 7th aspect of this invention, as shown, for example with reference to FIG.1 and FIG.5, in the manufacturing method of the joining member which concerns on the said 6th aspect of this invention, position Prior to the matching step (S4), an approaching step (S3) for approaching the first joining target member S and the second joining target member C so that the distance between them becomes a predetermined distance may be provided.

  According to the present invention, when joining the first joining target member and the second joining target member, the position when projected onto the reference plane is adjusted at a position separated by a predetermined distance in the vertical direction. It is possible to avoid contact between the first joining target member and the second joining target member at the time of alignment, and appropriately grasp the reference position of the first joining target member through the lens. Thus, the two members can be accurately aligned.

It is a longitudinal section showing a schematic structure of a welding device concerning an embodiment of the invention. It is a figure which shows an example of a joining member, (A) is a perspective view, (B) is a decomposition | disassembly partial cross section side view. It is a partial vertical sectional view which shows schematic structure of the upper electrode of the welding apparatus which concerns on embodiment of this invention. It is a figure which shows the stopper with which the welding apparatus which concerns on embodiment of this invention is provided, (A) is a perspective view, (B) is a side expanded view. It is a flowchart which shows the procedure of the manufacturing method of the joining member which concerns on embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or similar members are denoted by the same or similar reference numerals, and redundant description is omitted.

  First, with reference to FIG. 1, the welding apparatus 1 as a joining member manufacturing apparatus which concerns on embodiment of this invention is demonstrated. FIG. 1 is a longitudinal sectional view showing a schematic configuration of the welding apparatus 1. The welding apparatus 1 is an apparatus for welding the cap C and the stem S in the present embodiment. The welding apparatus 1 includes a lower electrode 10, an upper electrode 20, a stopper 29, a moving device 30 that moves the lower electrode 10 and the upper electrode 20, a laser sensor 45, and a control device 60. Here, prior to description of the welding apparatus 1, a joining member manufactured by welding the cap C and the stem S will be described.

  2A is a perspective view of the device D as a joining member, and FIG. 2B is an exploded partial cross-sectional side view of the device D. The device D in the present embodiment will be described as an optical semiconductor. The device D is configured by joining a cap C and a stem S. FIG. 2B shows a state in which the cap C and the stem S before becoming the device D are separated, and the cap C is shown in cross section and the stem S is shown in side view. The stem S is configured by mounting an electrode, a transistor, or the like (hereinafter referred to as “mounting portion St”) constituting a photoelectric conversion element on a base Sb, and a lead Sd extending from the base Sb. The base Sb is formed in a disk shape in the present embodiment. The lead Sd extends from the base Sb to the opposite side of the mounting portion St. The base Sb and the lead Sd are made of metal. In the present embodiment, a mark (not shown) serving as a reference position is provided on the top of the mounting portion St. As a mark serving as the reference position, a light emitting point provided in the mounting portion St may be applied. The cap C is configured to cover the mounting portion St of the stem S and be attached to the base Sb. The cap C has a substantially cylindrical appearance, and is configured so that the mounting portion St can be accommodated inside the cylinder. The cap C is open at one end surface and closed at the other end surface with respect to the outer peripheral portion Cp corresponding to the cylindrical side surface. In the present embodiment, the diameter of the outer peripheral portion Cp in the cross section perpendicular to the axis is about 5 mm. The cap C is provided on the top surface, which is the end surface on which the lens Cn that transmits laser light is closed. The cap C is slightly expanded outward in order to ensure that the edge Ce of the open end face has a surface that is pressurized during welding. In the present embodiment, the outer periphery of the edge Ce is formed in a circular shape having a size equal to or smaller than the outer periphery of the base Sb. The cap C is formed of a metal other than the lens Cn. The metal portions of the stem S and the cap C are typically formed of stainless steel, Kovar, or the like, but may be formed of other metals. The metal portions of the stem S and the cap C are typically dissimilar metals, but may be the same type of metal. The device D is configured by covering the mounting portion St with a cap C and welding the edge Ce to the base Sb. In the present embodiment, the stem S corresponds to the first member to be joined, and the cap C corresponds to the second member to be joined.

  Returning to FIG. 1, the configuration of the welding apparatus 1 will be described. The lower electrode 10 holds the stem S and corresponds to a first holder. The lower electrode 10 has an electrode body 10b and a clamper 10c. The electrode body 10b is composed of a metal block. The electrode body 10b is typically made of a metal having high electrical conductivity. The electrode body 10b has a top surface 10f that is exclusively flat. In the present embodiment, the top surface 10f extends horizontally, and a virtual horizontal plane including the top surface 10f and extending outside the top surface 10f on the same plane as the top surface 10f is referred to as a reference plane H. The electrode body 10b is formed with a stem hole 10h that can accommodate the lead Sd in the depth direction from the top surface 10f. The stem hole 10h is formed to have a diameter smaller than the outer diameter of the base Sb while accommodating all the leads Sd, and accommodates the longest lead Sd when the base Sb is placed on the top surface 10f. It is formed to a depth that can be. The clamper 10c holds the lead Sd with the base Sb received in the stem hole 10h and placed on the top surface 10f, and corresponds to a holding mechanism. The clamper 10 c includes a reference portion 11 and a pressing portion 12, and is configured such that the stem S (base Sb) can be sandwiched between the reference portion 11 and the pressing portion 12. Both the reference portion 11 and the pressing portion 12 are provided on the top surface 10f of the electrode body 10b.

  In the plan view, the reference portion 11 and the pressing portion 12 sandwich the base Sb (stem S) in which the lead Sd is accommodated in the stem hole 10h and placed on the top surface 10f between the reference portion 11 and the pressing portion 12. In addition, a reference portion 11 is disposed on one side of the stem S, and a pressing portion 12 is disposed on the opposite side. Both the reference portion 11 and the pressing portion 12 are configured to be able to individually perform reciprocal movements in the direction (Y direction) that approaches and separates from each other along the top surface 10f. After the stem S is placed on the top surface 10f of the electrode body 10b, the reference portion 11 moves to a position where the stem S is gripped before the pressing portion 12, and the clamper 10c grips the stem S (lower electrode) 10 is configured to be a base point for holding the stem S). The clamper 10c can hold the stem S when the pressing portion 12 approaches the reference portion 11 at the position where the stem S is gripped, and can release the holding of the stem S when the pressing portion 12 is separated. It is configured as follows. The entire lower electrode 10 including the electrode body 10b and the clamper 10c is moved in the direction (Y direction) in which the reference portion 11 and the pressing portion 12 are reciprocated in the reference plane H by the lower moving device 31 (in the direction of the drawing). (Vertical direction) can be reciprocated in each direction, and can be rotated about the stem S in the reference plane H. As described above, the lower electrode 10 as a whole is configured to be capable of reciprocating linear movement and rotational movement in two directions within the reference plane H by the lower moving device 31. Following the details of the lower electrode 10, the details of the upper electrode 20 will be described.

  Details of the upper electrode 20 will be described with reference mainly to FIGS. 1 and 3. FIG. 3 is a partial vertical sectional view showing a schematic configuration of the upper electrode 20. The upper electrode 20 holds the cap C and corresponds to a second holder. The upper electrode 20 generally has a cylindrical main body 21, an annular (doughnut-shaped) balloon 22, an electrode tip 23, and an electrode tip 23 sandwiching the balloon 22 between the main body 21 and the main body 21. A chip fixing nut 24 and a cap camera 26 are provided. The main body 21 includes a pressing electrode 21A and a main portion 21B, and a hollow portion 21h that extends along the columnar axis AX as a whole is formed. In the present embodiment, the main body 21 is installed above the lower electrode 10 so that the axis AX extends vertically up and down. At this time, the upper electrode 20 has the axis AX extending perpendicularly to the reference plane H. On the upper side surface of the main portion 21B of the main body 21, a protrusion 21s protruding outward is provided. A projection 21p into which the balloon 22 is fitted is formed at the center of the lower end (end closer to the lower electrode 10) of the main body 21. In this embodiment, the hollow portion 21h of the main body 21 has a small diameter near the protrusion 21p and penetrates the lower end surface of the main body 21. The balloon 22 is attached to the outside of the protrusion 21p so as to cover the outer periphery of the protrusion 21p. The balloon 22 is an elastic member such as silicone rubber, and is formed in a hollow shape in which a gas (typically air) can be injected therein like a floating ring. The balloon 22 is sandwiched between the lower end surface of the main body 21 and the electrode chip 23. A gap for accommodating the balloon 22 is formed between the lower end surface of the main body 21 and the electrode tip 23, and the balloon 22 expands inward toward the axis AX, so that the balloon 22 is hollow 21h. It is configured to be able to enter.

  The electrode tip 23 is formed in a disc shape having a step. The electrode tip 23 is formed with an insertion hole that communicates with the hollow portion 21 h of the main body 21 and the annular center hole of the balloon 22. The insertion hole of the electrode tip 23 is formed to be larger than the outer diameter of the outer peripheral portion Cp of the cap C and smaller than the outer diameter of the edge Ce of the cap C. The thickness around the insertion hole of the electrode tip 23 is formed such that the outer peripheral portion Cp of the cap C penetrates the center hole of the balloon 22 when the cap C is inserted into the insertion hole until the edge Ce hits the electrode tip 23. Has been. The chip fixing nut 24 has an outer diameter larger than the outer diameter of the main body 21. The tip fixing nut 24 is recessed toward the inside in the direction in which the axis AX extends from the upper surface so that the electrode tip 23 can be accommodated. The chip fixing nut 24 is formed with an inner screw 24 w on an inner wall of a portion recessed toward the inside, and can be screwed into an outer screw 21 w formed at a lower side of the main body 21. The tip fixing nut 24 is formed with a passage hole 24h in the center portion through which a portion having a diameter larger than the insertion hole of the electrode tip 23 passes. In the upper electrode 20, a main body 21, an electrode tip 23, and a tip fixing nut 24 are typically formed of a metal having high electrical conductivity. In the upper electrode 20, the main body 21, the balloon 22, the electrode tip 23, and the tip fixing nut 24 are arranged concentrically around the axis AX.

  The upper electrode 20 is a balloon inflated toward the axis AX by supplying the gas F into the balloon 22 after the cap C is inserted into the insertion hole of the electrode tip 23 until the edge Ce contacts the electrode tip 23. The outer peripheral portion Cp of the cap C can be held by 22. At this time, the balloon 22 is inflated uniformly inward over the entire circumference, so that the cap C is held by the upper electrode 20 with the axis of the cap C coinciding with the axis AX of the upper electrode 20. At this time, the upper electrode 20 may hold the cap C in a state where the optical axis of the lens Cn is perpendicular to the reference plane H.

  The cap camera 26 is provided in the hollow portion 21 h of the main body 21. The cap camera 26 is arranged so as to be able to photograph the direction of the pressing electrode 21A (a vertically downward state). With such a configuration, the cap camera 26 grasps the position of the lens Cn of the cap C held by the upper electrode 20, and the upper electrode 20 holding the cap C approaches the lower electrode 10 holding the stem S. Sometimes, a mark (not shown) serving as a reference position provided on the stem S through the lens Cn of the cap C can be grasped. That is, the cap camera 26 corresponds to a reference position grasping unit.

  The upper electrode 20 is fixed to the upper moving device 32. The upper moving device 32 is fixed to the upper part of the gate pole 28 fixed to the base 81. The base 81 is a base having a surface that extends in the horizontal direction, and is fixed to the casing of the welding apparatus 1. The upper electrode 20 is configured to be able to reciprocate toward and away from the lower electrode 10 by the operation of the upper moving device 32. In other words, the upper electrode 20 is configured to reciprocate in the vertical direction V by the operation of the upper moving device 32. The movement of the upper electrode 20 in the vertical direction V by the upper moving device 32 is limited by the stopper 29. The stopper 29 is attached to the upper part of the gate pole 28 below the protrusion 21s.

  FIG. 4 shows details of the stopper 29. 4A is a perspective view of the stopper 29, and FIG. 4B is a developed view of the side surface of the stopper 29. The stopper 29 is formed in a substantially cylindrical shape. The lower end of the stopper 29 is typically a bottom surface 29b formed flat. A shaft 29c of a motor (not shown) is attached to the cylindrical center of the bottom surface 29b. The shaft 29c extends so as to coincide with the axis of the cylinder. The stopper 29 is configured to be able to rotate in both forward and reverse directions around the axis of the cylinder by the operation of a motor (not shown). The upper end of the stopper 29 is an inclined surface 29s that is inclined along the circumferential direction. The inclined surface 29s is inclined with respect to the reference plane H (see FIG. 1). Typically, the inclined surface 29s is inclined linearly with respect to the bottom surface 29b, as shown in FIG. 4B. The bottom surface 29b is parallel to the reference plane H. The stopper 29 is installed at a position where the protrusion 21 s of the upper electrode 20 can contact the inclined surface 29 s by the movement of the upper electrode 20 in the vertical direction V by the upper moving device 32.

  With reference mainly to FIG. 1 again, description of the structure of the welding apparatus 1 is continued. The lower electrode 10 and the upper electrode 20 are connected to a power source (not shown) via a cable (not shown). The welding apparatus 1 contacts the stem S held by the lower electrode 10 and the cap C held by the upper electrode 20, and then turns on the power (not shown) and applies a voltage to the lower electrode. 10, the stem S, the cap C, and the upper electrode 20 are configured to allow current to flow.

  In the present embodiment, the moving device 30 includes a lower moving device 31 that moves the lower electrode 10 in the reference plane H and an upper moving device 32 that moves the upper electrode 20 in the vertical direction V. In other words, the generic name of the lower moving device 31 and the upper moving device 32 is the moving device 30. The lower moving device 31 is attached to the base 81. The upper moving device 32 supports the upper electrode 20 so as to be able to reciprocate in the vertical direction V. The gate pole 28 constitutes a structure for determining the position of the cap C (member to be joined) held by the upper electrode 20 in cooperation with the upper electrode 20 and the upper moving device 32. The structure that determines the position of the joining target member typically corresponds to a structure such as a holder or a support column that supports the holder.

  The laser sensor 45 is provided at a position adjacent to the lower electrode 10 at substantially the same height as the reference plane H. The laser sensor 45 is installed so as to face the direction of the upper electrode 20. The laser sensor 45 detects the distance from the upper electrode 20 when the upper electrode 20 descends so as to approach the lower electrode 10, thereby detecting the stem S held by the lower electrode 10 near the laser sensor 45. The distance from the cap C held by the upper electrode 20 can be estimated. That is, the laser sensor 45 can detect the distance in the vertical direction V between the stem S held by the lower electrode 10 and the cap C held by the upper electrode 20, and corresponds to a distance detection unit.

  The control device 60 controls the operation of the welding device 1. The control device 60 transmits control signals to the lower electrode 10 and the upper electrode 20 in a wired or wireless manner, thereby holding and releasing the stem S in the lower electrode 10 and holding and releasing the cap C in the upper electrode 20. It is configured so that it can be performed individually. Further, the control device 60 transmits control signals by wire or wireless to the lower moving device 31 and the upper moving device 32, respectively, so that the lower moving device 31 moves the lower electrode 10 on the reference plane H and the upper moving device. The movement of the upper electrode 20 in the vertical direction V by 32 can be performed individually. The control device 60 is electrically connected to the cap camera 26 in a wired or wireless manner, and is configured to receive an image captured by the cap camera 26. Further, the control device 60 is configured to be able to rotate the stopper 29 around the axis line by transmitting a control signal by wire or wireless to a motor (not shown) of the stopper 29. The control device 60 is electrically connected to the laser sensor 45 in a wired or wireless manner, and is configured to receive a distance detected by the laser sensor 45. The control device 60 is electrically connected to a power source (not shown) in a wired or wireless manner, and can control the presence or absence of voltage application between the lower electrode 10 and the upper electrode 20. It is configured as follows.

  Next, with reference to FIG. 5, the manufacturing method of the joining member which concerns on embodiment of this invention is demonstrated. FIG. 5 is a flowchart showing a procedure for manufacturing the device D as a joining member. A device D manufacturing method (device D manufacturing method) described below is typically performed by the welding apparatus 1 described so far. The manufacturing method of the device D described below also serves as an explanation of the operation of the welding apparatus 1. In the following description of the manufacturing method of the device D, when referring to the configuration of the welding apparatus 1 or the structure of the device D, FIGS. 1 to 4 will be referred to as appropriate. The welding apparatus 1 typically has a hypothesis in which the axis AX of the upper electrode 20 is extended from the center of the stem hole 10h (circular space in which the stem S is held) of the lower electrode 10 before the device D is manufactured. The lower electrode 10 is set at a position where the straight line penetrates.

  When the device D is manufactured, a stem pallet (not shown) in which a plurality of stems S are arranged and a cap pallet (not shown) in which a plurality of caps C are arranged are carried into the welding apparatus 1. The mounting position of the cap pallet (not shown) is separated from the lower electrode 10 within a range where the upper electrode 20 can move or within a moving range of a cap transfer robot hand (not shown) which delivers the cap C to the upper electrode 20. It has become a position. On the other hand, the mounting position of the stem pallet (not shown) is within the range in which the lower electrode 10 can move or the range of movement of the stem transport robot hand (not shown) that delivers the stem S to the lower electrode 10. It is in a remote position. The stem transport robot hand (not shown) is configured to move the stem S between the lower electrode 10 and the stem pallet (not shown) through a plurality of stages (for example, in the case of two stages, the stem S is the first The second hand conveys between the stem pallet and the intermediate stage, and the second hand conveys between the intermediate stage and the lower electrode 10.

  When the cap pallet (not shown) and the stem pallet (not shown) are placed at predetermined positions in the welding apparatus 1, the control device 60 uses the stem carrying robot hand (not shown) to It is transported to the position of the lower electrode 10 and held by the lower electrode 10 (S1). At this time, the control device 60 keeps the reference part 11 and the holding part 12 constituting the clamper 10c of the lower electrode 10 apart from each other, and the stem carrying robot hand (not shown) holds the stem S with the reference part 11 and the holding part. The reference portion 11 is first moved to a position where the stem S is gripped, and then the pressing portion 12 is moved toward the reference portion 11, so that the stem S is moved between the reference portion 11 and the holding portion 12. Hold the clip.

  Next, the control device 60 uses a cap transfer robot hand (not shown) to transfer one of the caps C placed on the cap pallet (not shown) to the upper electrode 20, and to the upper electrode 20. The cap C is held (S2). At this time, the outer peripheral portion Cp of the cap C is inserted into the center hole of the balloon 22 from the lens Cn side until the edge Ce contacts the electrode tip 23, and the balloon 22 is inflated to hold the cap C. Since the upper electrode 20 inflates the balloon 22 and holds the cap C, the balloon 22 contacts the entire circumference of the outer peripheral portion Cp of the cap C evenly, and the cap C is positioned at the center in plan view. Twenty axes AX penetrate through the center of the cap C. In FIG. 5, for convenience of explanation, the cap C is held (S2) by the upper electrode 20 after the stem S is held (S1), but before or simultaneously with the stem S is held (S1). It may be done.

  If the lower electrode 10 holds the stem S and the upper electrode 20 holds the cap C, the stem S and the cap C are brought close to each other, and the stem S and the cap C of the device D for optical semiconductor are joined. High alignment accuracy is required for the bonding with, for example, alignment accuracy on the order of micron to submicron may be required. As described above, the welding apparatus 1 includes the lower electrode 10 at a position where the virtual straight line extending the axis AX of the upper electrode 20 passes through the center of the stem hole 10h of the lower electrode 10 before the device D is manufactured. It is set. Therefore, if the stem S is held by the lower electrode 10 and the cap C is held by the upper electrode 20 in this state, an imaginary straight line extending the axis AX of the upper electrode 20 becomes the center axis of each of the stem S and the cap C. If the stem S and the cap C are brought close to each other and joined as they are, it is considered that a high alignment accuracy in which the axes coincide with each other can be realized. However, the positioning at the time of joining the stem S and the cap C should be performed so that the center of the lens Cn of the cap C and the reference position on the mounting portion St of the stem S are aligned. The reference position on St does not necessarily exist at the center of the outer diameter of the base Sb of the stem S, and the center of the lens Cn of the cap C may deviate from the center axis of the outer peripheral portion Cp. Further, the lower electrode 10 may be affected by a change in the size of the contour of the stem S due to a difference in the thickness of the plating applied to the stem S or the influence of thermal stress accompanying a temperature change in the welding apparatus 1. Individual differences may occur in the reference position on the mounting portion St when the stem S is held in the second position and the center position of the lens Cn when the cap C is held in the upper electrode 20.

  The control device 60 adjusts the position of the stem S and the cap C in plan view so that the center of the lens Cn of the cap C matches the reference position of the stem S in the image taken by the cap camera 26. The lower electrode 10 may be moved within the reference plane H via the lower moving device 31. However, if the stem S and the cap C are too far, the cap camera 26 cannot capture the reference position of the stem S. Can occur. Therefore, the control device 60 causes the upper moving device 32 to bring the upper electrode 20 closer to the lower electrode 10 in the vertical direction V (accessing step: S3). At this time, if the upper electrode 20 is brought too close to the lower electrode 10 and the cap C comes into contact with the stem S, when the positioning is performed later, the stem S slides and moves while being in contact with the cap C. . Then, the stem S and / or the cap C may be damaged. Further, since the upper electrode 20 holds the cap C with the balloon 22, the holding state of the cap C in the upper electrode 20 may be shifted, and alignment may not be performed properly. In the welding apparatus 1, in the approaching step (S3), when the stem S held by the lower electrode 10 and the cap C held by the upper electrode 20 are separated from each other by a predetermined distance, The protrusion 21s comes into contact with the inclined surface 29s of the stopper 29 so that the approach between the stem S and the cap C is temporarily stopped. Here, the predetermined distance is a distance that allows the cap camera 26 to capture the reference position of the stem S through the lens Cn without contact between the stem S and the cap C, and is a viewpoint for improving the alignment accuracy. It is preferable that the stem S and the cap C are as close as possible. In the welding apparatus 1, since the approach between the stem S and the cap C is temporarily stopped by the stopper 29, when the manufacture of one device D is completed and the manufacture of the next device D is repeated, the stem is repeated. It is possible to avoid a change in the distance between the S and the cap C each time the S and the cap C approach each other, and it is possible to make the distance between the stem S and the cap C constant once the approach is stopped. Further, by making the distance between the stem S and the cap C constant, it is possible to avoid the occurrence of a positional shift due to the focus shift of the image captured by the cap camera 26.

  When the approach is stopped at a position where the stem S and the cap C are separated from each other by a predetermined distance, the control device 60 moves the lower electrode 10 in the reference plane H via the lower moving device 31 and takes an image with the cap camera 26. In the obtained image, the center of the lens Cn of the cap C is aligned with the reference position of the stem S (alignment process: S4). After the alignment, the control device 60 rotates the stopper 29 so that the protrusion 21s is separated from the inclined surface 29s (S5). At this time, the stopper 29 is rotated until the protrusion 21s does not contact the inclined surface 29s even if the upper electrode 20 is lowered until the cap C contacts the stem S. When the stopper 29 is rotated, the control device 60 lowers the upper electrode 20 via the upper moving device 32 and brings the edge Ce of the cap C into contact with the base Sb of the stem S (S6). When the edge Ce is brought into contact with the base Sb, the upper electrode 20 is further pressed toward the lower electrode 10 to pressurize the contact portion T (projection) between the base Sb of the stem S and the edge Ce of the cap C ( S7) A power source (not shown) is turned on to energize the contact portion T (S8). When a voltage is applied by applying a power source (not shown), a current from the power source (not shown) flows through the upper electrode 20, the cap C, the base Sb of the stem S, and the lower electrode 10 via the electric wires (or this). In the reverse direction), resistance welding of the contact portion T is performed. In the present embodiment, the joining step is configured by combining the step of bringing the edge Ce into contact with the base Sb (S6), the step of pressurizing the contact portion T (S7), and the step of energizing the contact portion T (S8). Yes. When resistance welding of the contact portion T is performed, the device D is manufactured.

  When the device D is manufactured, the holding of the cap C by the upper electrode 20 is released (S9). Thereafter, the upper electrode 20 is retracted from above the lower electrode 10, and the device D held by the lower electrode 10 is taken out from the lower electrode 10 by a stem transport robot hand (not shown), and the device D is arranged. To a device pallet (not shown) (S10). The device pallet (not shown) may also be used as a stem pallet (not shown). In this case, the device D may be arranged at a position where the stem S is taken out for manufacturing the device D. This completes the manufacture of one device D. Subsequently, when a device D is newly manufactured, the above-described flow shown in FIG. 5 is repeated.

  As described above, according to the present embodiment, when the stem S and the cap C are joined, the approach between the stem S and the cap C in the vertical direction V is separated by a predetermined distance in the vertical direction V. Since the reference position of the stem S on the reference plane H and the center position of the lens Cn of the cap C are matched with each other after stopping at the fixed position, the reference position of the stem S performed through the lens Cn of the cap C is appropriately grasped. In addition, it is possible to avoid contact between the stem S and the cap C when aligning in the reference plane H, and accurately align the stem S and cap C in the reference plane H. Can do. In addition, when the approach between the stem S and the cap C in the vertical direction V is temporarily stopped at a position separated by a predetermined distance in the vertical direction V, the stopper 29 having the inclined surface 29s is used, and thus a simple configuration. Thus, the predetermined distance can be kept constant.

  In the above description, the cap camera 26 as the reference position grasping part is arranged in the hollow part 21h of the upper electrode 20, but it may be arranged outside the hollow part 21h.

  In the above description, the stopper is the stopper 29 that is formed in a substantially cylindrical shape and has an inclined surface 29 s that is inclined along the circumferential direction at the upper end, and the protrusion 21 s contacts the inclined surface 29 by the rotation of the stopper 29. Although the height can be changed, an inclined surface formed in a straight line and inclined along the direction in which the straight line extends is formed at the upper end, and the height at which the protrusion 21s contacts the inclined surface by the reciprocating linear movement is set. It may be changed.

  In the above description, the lower electrode 10 moves in the reference plane H (horizontal plane) and the upper electrode 20 moves in the vertical direction V (vertical direction). However, the lower electrode 10 moves in the vertical direction V (vertical direction). The upper electrode 20 may move in the reference plane H (horizontal plane). Alternatively, the lower electrode 10 may not move and the upper electrode 20 may move both in the reference plane H (horizontal plane) and in the vertical direction V (vertical direction). Conversely, the upper electrode 20 does not move. The lower electrode 10 may be moved both in the reference plane H (horizontal plane) and in the vertical direction V (vertical direction), and the lower electrode 10 is either in the reference plane H (horizontal plane) or in the vertical direction V (vertical direction). The upper electrode 20 may move both in the reference plane H (horizontal plane) and in the vertical direction V (vertical direction), while the upper electrode 20 moves in the reference plane H (horizontal plane) or in the vertical direction V (vertical). The lower electrode 10 may move both in the reference plane H (horizontal plane) and in the vertical direction V (vertical direction), while both the lower electrode 10 and the upper electrode 20 move in the reference plane H. Within (horizontal plane) It may be moved in both the fine vertical V (vertical direction).

  In the above description, the distance detection unit is the laser sensor 45. However, the lower electrode is obtained from the image captured by the side camera using the side camera that is installed so as to face the horizontal direction and captures the vicinity of the top surface 10f. 10 may be configured to detect the distance between the stem S held by 10 and the cap C held by the upper electrode 20.

  In the above description, after the lower electrode 10 holds the stem S (S1) and the upper electrode 20 holds the cap C, the stem S held by the lower electrode 10 and the cap C held by the upper electrode 20 are connected. Although the approaching step (S3) of approaching to a position separated by a predetermined distance is performed, the lower electrode 10 holds the stem S and the upper electrode 20 is capped at a position where the stem S and the cap C are at a predetermined distance. As C is held, the approach step (S3) may be omitted.

  In the above description, the reference position of the stem S is the mark provided on the mounting portion St. However, on the base Sb on the surface on which the mounting portion St is mounted (on the outer edge (outer diameter)) A virtual point inside the outer edge) or a real point may be used as the reference position. In addition, although the portion of the cap C that matches the reference position of the stem S is the center of the lens Cn, it may be the outer diameter of the cap C (the contour of the outer peripheral portion Cp or the contour of the edge Ce in plan view). In this case, a mirror is provided in the hollow portion 21h of the main body 21, the reference point of the outer diameter of the cap C is reflected by the mirror, and the cap camera 26 reflects the reference point of the outer diameter of the cap C reflected by the mirror and the lens. What is necessary is just to control the moving apparatus 30 so that both may be reflected, reflecting the reference position of the stem S grasped over. Or the position of the plane coordinate which mechanically grips the outer peripheral part Cp of the cap C by the upper electrode 20 may be set, and the set coordinate and the reference position of the stem S may be matched.

  In the above description, the joining member (device D) is an optical semiconductor, but it is a sensor article manufactured by joining at least one of two members constituting the joining member having a lens. May be.

DESCRIPTION OF SYMBOLS 1 Welding apparatus 10 Lower electrode 20 Upper electrode 21s Protrusion 26 Cap camera 29 Stopper 29s Inclined surface 30 Moving apparatus 45 Laser sensor 60 Control apparatus D Device C Cap Cn Lens S Stem H Reference plane V Vertical direction

Claims (6)

An apparatus for manufacturing a joining member in which a first joining target member and a second joining target member having a lens are joined;
A first holder for holding the first member to be joined;
A second holding tool for holding the second member to be joined;
A moving device that moves the first holder relative to the second holder in a reference plane and reciprocates in a vertical direction that is perpendicular to the reference plane; ;
A control device for controlling the moving device;
The second holder has a reference position grasping part for grasping a reference position existing in the first joining target member held by the first holder through the lens;
The control device projects the first joining target member held by the first holding tool and the second joining target member held by the second holding tool onto the reference plane. given the position, it is possible to capture the reference position in the lens over at without the reference position recognition unit that the and the direction perpendicular to Oite the first bonding target member and the second bonding target member contacts The moving device is controlled so as to be brought into close contact with each other in the vertical direction after being aligned using the reference position grasping unit at a position separated by a distance of
Joining member manufacturing equipment. The control device projects the first joining target member held by the first holding tool and the second joining target member held by the second holding tool onto the reference plane. Controlling the moving device to temporarily stop the movement in the vertical direction at a position separated by a predetermined distance in the vertical direction before adjusting the position using the reference position grasping unit;
The joining member manufacturing apparatus according to claim 1. A stopper for causing a part of the second holder to contact the first holder in the vertical direction;
When the second holder comes into contact with the stopper, the first member to be joined held by the first holder and the second member to be joined held by the second holder. And the vertical movement is stopped at a position separated by the predetermined distance;
The joining member manufacturing apparatus according to claim 2. An apparatus for manufacturing a joining member in which a first joining target member and a second joining target member having a lens are joined;
A first holder for holding the first member to be joined;
A second holding tool for holding the second member to be joined;
A moving device that moves the first holder relative to the second holder in a reference plane and reciprocates in a vertical direction that is perpendicular to the reference plane; ;
A control device for controlling the moving device;
The second holder has a reference position grasping part for grasping a reference position existing in the first joining target member held by the first holder through the lens;
The control device projects the first joining target member held by the first holding tool and the second joining target member held by the second holding tool onto the reference plane. the position, the after combined with the reference position recognition unit at a position predetermined distance in the vertical direction, so as to be joined by approaching the vertical direction, and controls the mobile device;
The control device projects the first joining target member held by the first holding tool and the second joining target member held by the second holding tool onto the reference plane. the position prior to combining with the reference position recognition unit, and controls the moving device so as to temporarily stop the movement of the said vertical at a position a predetermined distance in the vertical direction;
A stopper for causing a part of the second holder to contact the first holder in the vertical direction;
When the second holder comes into contact with the stopper, the first member to be joined held by the first holder and the second member to be joined held by the second holder. And the vertical movement is stopped at a position separated by the predetermined distance ;
The stopper is configured as an inclined surface with which the second holder is in contact with the reference plane, and the position of the inclined surface that is in contact with the second holder is movable. Composed of;
Junction member manufacturing apparatus. A distance detector that detects a distance between the first member to be joined and the second member to be joined in the vertical direction;
The joining member manufacturing apparatus of any one of Claim 1 thru | or 4. A method of manufacturing a joining member in which a first joining target member and a second joining target member having a lens are joined;
For the first member to be welded and the second member to be welded that are separated by a predetermined distance in the vertical direction that is a direction perpendicular to the reference plane, the position when projected onto the reference plane is the An alignment step for aligning the first joining target member while confirming the reference position through the lens;
After the alignment step, e Bei a bonding step of bonding the first said and joining target members of the second bonding target member is brought closer to the vertical direction;
The predetermined distance is a distance at which the reference position can be captured through the lens in the alignment step without contact between the first joining target member and the second joining target member;
A method for manufacturing a joining member.

Images